阅读说明：本技术 集成电路系统、存储器集成电路系统以及用于形成集成电路系统的方法 (Integrated circuit system, memory integrated circuit system and method for forming integrated circuit system ) 是由 M·J·戈斯曼 M·J·巴克利 M·J·金 E·纳尔逊 M·帕克 J·里斯 徐丽芳 赵 于 2019-05-29 设计创作，主要内容包括：本申请涉及一种集成电路系统、一种存储器集成电路系统以及用于形成集成电路系统的方法。一种用于形成集成电路系统的方法包括形成不同组成材料的竖直交替层的堆叠。形成至所述堆叠中的阶梯梯级结构,并且邻近所述阶梯梯级结构并在其之上形成上部平台。将所述阶梯梯级结构形成为包括所述不同组成材料的竖直交替层。多个阶梯个别地包括所述不同组成材料层中的两层。所述阶梯中的至少一些个别地具有仅两层,每层仅具有所述不同组成材料中的不同一者。位于所述上部平台下方的所述阶梯的上部包括所述不同组成材料层中的至少四层。公开了独立于方法的结构。(The present application relates to an integrated circuit system, a memory integrated circuit system and a method for forming an integrated circuit system. A method for forming an integrated circuit system includes forming a stack of vertically alternating layers of different constituent materials. A stair step structure is formed into the stack and an upper landing is formed adjacent to and above the stair step structure. Forming the stair step structure to include vertically alternating layers of the different constituent materials. The plurality of steps individually include two of the different composition material layers. At least some of the steps individually have only two layers, each layer having only a different one of the different composition materials. An upper portion of the stair step located below the upper landing includes at least four of the layers of different composition materials. A method independent structure is disclosed.)

1. An integrated circuit system, comprising:

a three-dimensional (3D) array comprising an electronic component layer;

A circuit operated stair step structure;

An upper landing adjacent to and above the circuit-operated stair-step structure; and is

The circuit-operated stair step structure includes:

vertically alternating insulating and conductive layers;

A plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, the only one conductive layer extending into one of the layers of the 3D array of the electronic components and being electrically coupled to at least one of the electronic components in the one layer; and

an uppermost one of the stairs located below the upper platform having at least one conductive layer therein that does not extend from the circuit-operated stair-step structure into the 3D array of electronic components.

2. The integrated circuit system of claim 1, comprising a circuit inoperative stair step structure opposite and facing the circuit operative stair step structure.

3. the integrated circuit system of claim 1, comprising:

another stair step structure adjacent to and below the upper landing; and is

Wherein:

the one conductive layer that does not extend from the circuit-operated stair step structure into the 3D array extends from the other stair step structure into the 3D array;

The other stair step structure comprises a stair step comprising the one conductive layer extending from the other stair step structure into the 3D array; and is

The steps in the further stepped configuration are contacted by vertically extending conductive vias.

4. The integrated circuit system of claim 3, comprising a circuit inoperative stair step structure opposite and facing the other stair step structure and located between the other stair step structure and the circuit operative stair step structure.

5. The integrated circuit system of claim 1, wherein the electronic component comprises a transistor.

6. the integrated circuit system of claim 1, wherein the electronic component comprises a memory cell.

7. The integrated circuit system of claim 1, wherein the uppermost step has at least two conductive layers therein that do not extend into the 3D array.

8. The integrated circuit system of claim 7, wherein the uppermost step has at least three conductive layers therein that do not extend into the 3D array.

9. The integrated circuit system of claim 1, comprising a gap between the uppermost step and the upper landing.

10. The integrated circuit system of claim 1, wherein all of the steps individually comprise one of the conductive layers that is on top and contacts a bottom one of the insulating layers.

11. the integrated circuit system of claim 1, wherein a step immediately below the uppermost step has at least one conductive layer therein that does not extend from the circuit-operated step structure into the 3D array of electronic components.

12. The integrated circuit system of claim 1, wherein a plurality of steps successively immediately below the uppermost step individually have at least one conductive layer therein that does not extend from the circuit-operating step structure into the 3D array of electronic components.

13. An integrated circuit system, comprising:

A three-dimensional (3D) array comprising an electronic component layer;

A circuit operated stair step structure;

An upper landing adjacent to and above the circuit-operated stair-step structure; and is

the circuit-operated stair step structure includes:

Vertically alternating insulating and conductive layers;

A plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, the only one conductive layer extending into one of the layers of the 3D array of the electronic components and being electrically coupled to at least one of the electronic components in the one layer; and

an uppermost one of the steps under the upper landing having a dummy conductive layer therein.

14. The integrated circuit system of claim 13, wherein the uppermost staircase includes a plurality of dummy conductive layers therein.

15. the integrated circuit system of claim 13, comprising:

Another stair step structure adjacent to and below the upper landing; and is

Wherein:

The dummy conductive layer in the uppermost rung of the circuit-operated stair-step structure is a circuit active layer in the other stair-step structure;

The further stair step structure comprises a stair step comprising the circuit active layer, the circuit active layer extending from the further stair step structure into the 3D array; and is

the steps in the further stepped configuration are contacted by vertically extending conductive vias.

16. the integrated circuit system of claim 13, wherein a step immediately below the uppermost step has a dummy conductive layer therein.

17. The integrated circuit system of claim 13, wherein a plurality of steps successively immediately below the uppermost step individually have a dummy conductive layer therein.

18. An integrated circuit system, comprising:

A three-dimensional (3D) array of electronic components;

A circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array;

an upper landing adjacent to and above the circuit-operated stair-step structure; and is

The circuit-operated stair step structure includes:

Vertically alternating insulating and conductive layers;

A plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers; and

an uppermost one of the steps under the upper landing comprising at least two of the conductive layers and at least two of the insulating layers.

19. The integrated circuit system of claim 18, wherein the uppermost step comprises at least three of the conductive layers.

20. An integrated circuit system, comprising:

A three-dimensional (3D) array of electronic components;

A circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array;

An upper landing adjacent to and above the circuit-operated stair-step structure; and is

The circuit-operated stair step structure includes:

Vertically alternating insulating and conductive layers;

A plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, only respective ones of the conductive layers extending into the array and being directly electrically coupled with respective ones of the electronic components;

An uppermost one of the steps under the upper landing comprising at least two of the conductive layers and at least two of the insulating layers; and

A gap between the uppermost step and the upper platform.

21. the integrated circuit system of claim 20, wherein the gap comprises at least one circuit inoperative rung comprising one of the conductive layers.

22. The integrated circuit system of claim 20, wherein the gap comprises opposing and facing stair steps that individually comprise at least one circuit inoperative stair step comprising one of the conductive layers.

23. A memory integrated circuit system, comprising:

an array of vertically extending strings of memory cells, the memory cells individually comprising programmable charge storage transistors, the array comprising vertically alternating layers of insulating layers and word lines;

A circuitry region adjacent to the array and comprising a plurality of circuit-operated stair-step structures with an upper landing between and above immediately adjacent ones of the circuit-operated stair-step structures, the circuit-operated stair-step structures individually comprising:

some of the vertically alternating insulating layers and word line layers;

A plurality of ladders individually comprising one of the word line layers and one of the insulating layers, at least some of the ladders individually having only one of the word line layers and only one of the insulating layers, only one word line layer of an individual of the at least some ladders extending into the array and being directly electrically coupled to at least one of the programmable charge storage transistors in the one word line layer; and is

At least one of the circuit operated stair step structures has an uppermost stair step therein located below the upper landing between one circuit operated stair step structure and a circuit operated stair step structure immediately adjacent to the one circuit operated stair step structure toward the array, the uppermost stair step having a dummy word line therein.

24. The memory integrated circuit system of claim 23, wherein at least two of the at least two dummy word line layers and the insulating layer are included in the uppermost staircase.

25. The memory integrated circuit system of claim 23, wherein the word line layer that is the dummy word line layer in the one circuit-operated stair-step structure is an active word line layer in the immediately adjacent circuit-operated stair-step structure, and a step of the active word line layer in the immediately adjacent circuit-operated stair-step structure is contacted by a vertically extending conductive via, the active word line layer in the immediately adjacent circuit-operated stair-step structure extending from the immediately adjacent circuit-operated stair-step structure into an array of vertically extending memory cell strings.

26. The memory integrated circuit system of claim 23, comprising NAND.

27. A method for forming an integrated circuit system, comprising:

Forming a stack of vertically alternating layers of different constituent materials;

a stair step structure formed into the stack and forming an upper landing adjacent to and above the stair step structure, the stair step structure formed to include:

Vertically alternating layers of the different constituent materials;

A plurality of steps individually comprising two of the layers of different composition materials, at least some of the steps individually having only two layers, each layer having only a different one of the different composition materials; and is

An upper portion of the stair step below the upper landing comprising at least four of the layers of different composition materials.

28. The method of claim 27, wherein the upper step is an uppermost step of the stair step structure.

29. The method of claim 27, wherein the steps individually comprise a step height portion and a step width portion, and

The method further comprises:

Transferring the stair step structure at least partially deeper into the stack by etching deeper into the stack; and

using the upper step as a masking material to prevent a gap from forming between the step-width portion and the step-height portion of the step immediately below the upper step during the etching.

30. The method of claim 29, wherein the upper step is the uppermost step of the stair-step structure.

31. the method of claim 30, comprising forming a gap between the uppermost step and the upper platform.

32. the method of claim 31, comprising forming the gap to include at least one stair step comprising two of the layers of different composition materials.

33. The method of claim 31, comprising forming the gap to include opposing and facing stair steps individually having at least one stair step comprising two of the layers of different composition materials.

34. the method of claim 27, wherein the stair-step structure is one stair-step structure, and the method comprises forming another stair-step structure opposite and facing the one stair-step structure.

35. The method of claim 27, wherein,

The stair step structure is one of a plurality of stair step structures formed, adjacent ones of the plurality of stair step structures having a respective upper landing therebetween; and is

The method further comprises the following steps:

in addition to the one stair step structure, at least one other stair step structure of the plurality of stair step structures is formed having an upper stair step located below the respective landing and comprising at least four layers of the layers of different composition materials.

Technical Field

Embodiments disclosed herein relate to integrated circuit systems, memory integrated circuit systems, and methods for forming integrated circuit systems.

Background

Memory is one type of integrated circuit system and is used in computer systems to store data. The memory may be fabricated in one or more arrays of individual memory cells. The digit lines (which may also be referred to as bit lines, data lines, or sense lines) and access lines (which may also be referred to as word lines) may be used to write to or read from the memory cells. Sense lines may conductively interconnect memory cells along columns of the array, and access lines may conductively interconnect memory cells along rows of the array. Each memory cell can be uniquely addressed by a combination of a sense line and an access line.

The memory cells may be volatile, semi-volatile, or nonvolatile. The non-volatile memory cell may extend the period of time to store data without powering up. Non-volatile memory is typically designated as memory having a retention time of at least about 10 years. Volatile memory is dissipative and therefore refreshed/rewritten to maintain data storage. Volatile memory may have a retention time of milliseconds or less. Regardless, the memory cells are configured to hold or store memory in at least two different selectable states. In a binary system, the state is considered to be either "0" or "1". In other systems, at least some individual memory cells may be configured to store more than two bits or states of information.

A field effect transistor is one type of electronic component that can be used in a memory cell. These transistors include a pair of conductive source/drain regions having a semiconductive channel region therebetween. A conductive gate is adjacent to and separated from the channel region by a thin gate insulator. Application of a suitable voltage to the gate allows current to flow from one of the source/drain regions to the other through the channel region. When the voltage is removed from the gate, current is largely prevented from flowing through the channel region. The field effect transistor may also include additional structures, for example, a reversibly programmable charge storage region, as part of the gate construction between the gate insulator and the conductive gate.

Flash memory is one type of memory and is used in large numbers in modern computers and devices. For example, modern personal computers may store the BIOS on a flash memory chip. As another example, it is increasingly common for computers and other devices to utilize flash memory in the form of a solid state drive in place of a traditional hard disk drive. As yet another example, flash memory is popular in wireless electronic devices because it enables manufacturers to support new communication protocols as they become standardized and to provide manufacturers with the ability to remotely upgrade devices for enhanced features.

NAND can be the basic architecture for integrated flash memory. A NAND cell unit includes at least one select device connected in series with a serial merge of memory cells (the serial merge is commonly referred to as a NAND string). The NAND architecture can be configured in a three-dimensional arrangement that includes vertically stacked memory cells that individually include reversibly programmable vertical transistors. Control circuitry or other circuitry may be formed below the vertically stacked memory cells.

one proposed approach to increasing the density of integrated circuit systems is to form three-dimensional (3D) arrays that include layers of electronic components, such as multiple layers of non-programmable transistors and/or programmable transistors, which may be part of a memory circuit. The gates of these transistors may be patterned into gate lines (and may be plate-shaped) in each layer. Connections to these gate lines may occur in so-called "stair-step structures" at the ends or edges of the transistor or other electronic component layers. The stair-step structure includes individual "steps" (alternatively referred to as "steps" or "stair-steps") that define contact regions for individual gate lines on which vertically extending conductive vias contact to provide electrical access to gate lines or other conductive structures.

Disclosure of Invention

one embodiment of the present application relates to an integrated circuit system. The integrated circuit system includes: a three-dimensional (3D) array comprising an electronic component layer; a circuit operated stair step structure; an upper landing adjacent to and above the circuit-operated stair-step structure; and the circuit-operated stair step structure comprises: vertically alternating insulating and conductive layers; a plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, the only one conductive layer extending into one of the layers of the 3D array of the electronic components and being electrically coupled to at least one of the electronic components in the one layer; and an uppermost one of the stairs located below the upper platform, having at least one conductive layer therein that does not extend from the circuit-operated stair-step structure into the 3D array of electronic components.

Another embodiment of the present application relates to an integrated circuit system. The integrated circuit system includes: a three-dimensional (3D) array comprising an electronic component layer; a circuit operated stair step structure; an upper landing adjacent to and above the circuit-operated stair-step structure; and the circuit-operated stair step structure comprises: vertically alternating insulating and conductive layers; a plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, the only one conductive layer extending into one of the layers of the 3D array of the electronic components and being electrically coupled to at least one of the electronic components in the one layer; and an uppermost one of the steps under the upper mesa having a dummy conductive layer therein.

yet another embodiment of the present application relates to an integrated circuit system. The integrated circuit system includes: a three-dimensional (3D) array of electronic components; a circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array; an upper landing adjacent to and above the circuit-operated stair-step structure; and the circuit-operated stair step structure comprises: vertically alternating insulating and conductive layers; a plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers; and an uppermost one of the steps under the upper landing, including at least two of the conductive layers and at least two of the insulating layers.

Yet another embodiment of the present application relates to an integrated circuit system. The integrated circuit system includes: a three-dimensional (3D) array of electronic components; a circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array; an upper landing adjacent to and above the circuit-operated stair-step structure; and the circuit-operated stair step structure comprises: vertically alternating insulating and conductive layers; a plurality of steps individually comprising one of the conductive layers and one of the insulating layers, at least some of the steps individually having only one of the conductive layers and only one of the insulating layers, only respective ones of the conductive layers extending into the array and being directly electrically coupled with respective ones of the electronic components; an uppermost one of the steps under the upper landing comprising at least two of the conductive layers and at least two of the insulating layers; and a gap between the uppermost step and the upper platform.

Yet another embodiment of the present application relates to a memory integrated circuit system. The memory integrated circuit system includes: an array of vertically extending strings of memory cells, the memory cells individually comprising programmable charge storage transistors, the array comprising vertically alternating layers of insulating layers and word lines; a circuitry region adjacent to the array and comprising a plurality of circuit-operated stair-step structures with an upper landing between and above immediately adjacent ones of the circuit-operated stair-step structures, the circuit-operated stair-step structures individually comprising: some of the vertically alternating insulating layers and word line layers; a plurality of ladders individually comprising one of the word line layers and one of the insulating layers, at least some of the ladders individually having only one of the word line layers and only one of the insulating layers, only one word line layer of an individual of the at least some ladders extending into the array and being directly electrically coupled to at least one of the programmable charge storage transistors in the one word line layer; and at least one of the circuit operated stair step structures has an uppermost stair step therein located below the upper landing between one circuit operated stair step structure and a circuit operated stair step structure immediately adjacent to the one circuit operated stair step structure toward the array, the uppermost stair step having a dummy word line therein.

Yet another embodiment of the present application relates to a method for forming an integrated circuit system. The method comprises the following steps: forming a stack of vertically alternating layers of different constituent materials; a stair step structure formed into the stack and forming an upper landing adjacent to and above the stair step structure, the stair step structure formed to include: vertically alternating layers of the different constituent materials; a plurality of steps individually comprising two of the layers of different composition materials, at least some of the steps individually having only two layers, each layer having only a different one of the different composition materials; and an upper portion of the stair step located below the upper landing, including at least four of the layers of different composition materials.

Drawings

FIG. 1 is a diagrammatic, cross-sectional view of a portion of a substrate construction in a method in accordance with an embodiment of the invention.

Fig. 2 is a view of the fig. 1 construction at a processing step subsequent to that shown by fig. 1.

Fig. 2A is an enlarged view of a portion of fig. 2.

Fig. 3 is a view of the fig. 2 construction at a processing step subsequent to that shown by fig. 2.

Fig. 4 is a view of the fig. 3 construction at a processing step subsequent to that shown by fig. 3.

Fig. 5 is a view of the fig. 4 construction at a processing step subsequent to that shown by fig. 4.

Fig. 6 is a view of the fig. 5 construction at a processing step subsequent to that shown by fig. 5.

Fig. 6A is an enlarged view of a portion of fig. 6.

Fig. 7 is a diagrammatic, cross-sectional view of a portion of a substrate construction in a method in accordance with an embodiment of the invention.

Fig. 8 is a view of the fig. 6 construction at a processing step subsequent to that shown by fig. 6.

FIG. 9 is a diagrammatic, cross-sectional view of a portion of a substrate construction in a method in accordance with an embodiment of the invention.

FIG. 10 is a diagrammatic, cross-sectional view of a portion of a substrate construction in a method in accordance with an embodiment of the invention.

Fig. 11 is a view of a portion of the fig. 10 substrate configuration and shows another portion thereof not visible in fig. 10.

Detailed Description

Embodiments of the invention include methods for forming integrated circuit systems, such as three-dimensional (3D) arrays including electronic component layers. In some embodiments, those electronic components include transistors, and in some embodiments, those electronic components include memory cells (e.g., the memory cells may individually contain transistors). In some embodiments, the integrated circuitry formed is memory integrated circuitry comprising an array of vertically extending strings of memory cells individually comprising programmable charge storage transistors, such as NAND arrays or other memory cells whose peripheral circuitry is under the array (e.g., CMOS under array). Embodiments of the present invention encompass so-called "gate last" or "replacement gate" processes, so-called "gate first" processes, and other processes, whether existing or to be developed independently of the time to form the transistor gate. A first example embodiment is described with reference to fig. 1-8, which may be considered a "back gate" or "replacement gate" process.

Fig. 1 illustrates a substrate construction 10 during a method of forming an array 12 of vertically extending strings 13 of memory cells. The memory cells in one embodiment will individually comprise programmable charge storage transistors. Exemplary base substrate 11 of construction 10 may comprise any one or more of conductive/conductor/conductive (i.e., electrically conductive herein), semi-conductive/semiconductor/semi-conductive, or insulative/insulator/insulative (i.e., electrically insulative herein) material. Various materials have been formed over base substrate 11. The material may be sideways, in elevation, or out of elevation of the material shown in figure 1. For example, other partially or fully fabricated components of the integrated circuit system may be provided somewhere above, around, or within the base substrate 11. Control and/or other peripheral circuitry for operating components within an array of vertically extending strings of memory cells (e.g., array 12) may also be fabricated, and the system may or may not be completely or partially within an array or sub-array. Furthermore, multiple sub-arrays may also be fabricated and operated independently, sequentially, or otherwise with respect to each other. Herein, a "sub-array" may also be considered an array. The circuitry region 14 is adjacent to the array 12. The exemplary depicted vertically extending string 13 is shown as having been manufactured prior to certain acts described below with respect to the process of fig. 1-8, but may be formed intermediate or subsequent to the process shown in fig. 1-8.

a stack 16 of vertically alternating layers 18, 20 of a first material 19 and a second material 21, respectively, of different compositions is formed. Either layer 18 or layer 20 may be sacrificial, while the other of layers 18 or 20 is insulating. Alternatively, as an example, the layer 18 or 20 may be conductive while the other of the layer 18 or 20 may be insulating. In an example embodiment, layer 20 is sacrificial and will eventually comprise word line layer 20, and layer 18 is insulating. The example sacrificial material 21 is silicon nitride and the example insulating material 19 is silicon dioxide. This may be formed to have the same or different thicknesses from one another, and each need not have the same respective thickness within the exemplary depicted stack. Construction 10 is shown with fifty-three vertically alternating layers 18 and 20, but fewer or possibly more (e.g., hundreds, etc.) may be formed. Thus, more layers 18, 20 may be below the depicted layers and above the base substrate 11, and/or more layers 18, 20 may be above the depicted layers.

The stair-step structure will be formed into the stack 16 in the circuitry region 14. Such a stair-step structure may be formed by any now known or later developed method. For example, masking material 22 (e.g., a photoimageable material such as photoresist) has been formed atop stack 16, and openings 24 have been formed through the masking material. Masking material 22 has then been used as a mask, for example, as shown, when etching (e.g., anisotropically) through openings 24 to extend such openings 24 into the outermost two layers 18, 20.

Referring to fig. 2 and 2A, the substrate construction 10 of fig. 1 has been subjected to a successively alternating series of lateral trim etches of masking material 22, and then etched deeper into the two layers 18, 20 of the stack 16 at a time using the trimmed masking material 22 as a mask. This results in the formation of the stair step structure 26 as a stack 16 comprising vertically alternating layers 18, 20 of different constituent materials 19, 21, which also results in the formation of another stair step structure 28 opposite and facing the stair step structure 26. Example stair-step structures 26 and 28 are each shown as including a plurality of steps 34 (e.g., as respective step steps 34) that individually include two layers 18, 20 of different composition materials 19, 21. At least some of the steps 34 in the stepped stair configuration 26 (both shown in fig. 2 and 2A) individually have only two layers 18 and 20, each of the layers 18 and 20 being only one of a different layer 18 or 20 having a different composition material 19, 21. In any event, by way of example only, only one step may be formed, more than two step steps may be formed (e.g., spaced beside and/or longitudinally from one another), and if multiple step steps are formed, the step steps may not have the same shape, configuration, and/or number of steps relative to one another (not shown). Alternative existing or later developed methods may be used to form the stair-step configuration 26 and/or 28.

In one embodiment and as shown, the stair step structures 26 and 28 are mirror images relative to each other. Alternatively, for example, only a single stair-step structure 26 or 28 may be formed with opposing walls substantially vertical (not shown) in place of the other of the stair-step structures. The upper platforms 30 and/or 31 are adjacent and above the stair step structure 26 (whether or not covered by the masking material 22 at this time in the example process), with the upper platform 30 immediately adjacent the stair step structure 26. The lower landing 32 is adjacent the stair step structure 26 and, in the illustrated embodiment, is located between the stair step structure 26 and the stair step structure 28. The platforms 30, 31, and 32 may individually have any lateral width and need not have the same lateral width as any other of the platforms 30, 31, and 32.

For the purpose of continuing the discussion, the steps 34 may be considered to include the step height portion 33 and the step width portion 35 individually-all of the step height portions need not be the same size as each other, all of the step width portions need not be the same size as each other, and if so, the step height portions and step width portions together need not be the same size as each other. By way of example only, the dimensions of the step-height portion 33 and the step-width portion 35 are all shown equal to each other in the cross-section shown. Also, the stair step structures 26 and 28 are each shown with five steps between the upper and lower platforms. There may be more or fewer steps (and possibly more) in the stair-step configuration. Together, the stair step structures 26 and 28 may define a recess 15 (e.g., a recessed portion).

Referring to fig. 3, the stair step structures 26 and 28 have been at least partially (as shown, completely) transferred deeper into the stack 16 by etching deeper into the stack 16. In the example shown, such four layers 18, 20 have been etched back into the stack 16, but more layers 18, 20 may be etched from the platform 30 into the stack 16. Regardless, the example stair step structure 26 (and corresponding stair step structure 28) is shown now with six steps 34 between the upper and lower platforms 30 and 32, such that the masking material 22 has been trimmed back laterally from the depicted vertical edges of the top layers 20 and 18, as shown in fig. 2 and 2A. If masking material 22 is not so laterally trimmed, a total of five steps (not shown) will result.

Referring to fig. 4, masking material 22 has been laterally trimmed as shown. This exposes laterally opposite portions 27 of the stack 16 (e.g., more of the platforms 30 and 31 if exposed by the process of fig. 2). In the depicted example, the exposed portions 27 are shown individually twice as deep as the general dimensions of the step-width portions 35 (the step-width portions 35 are shown in fig. 2 and 2A, but not in fig. 4, for clarity of fig. 4). However, the lateral dimension of the portion 27 may individually be equal to, less than, or greater than any of the step width portions 35 of any of the steps 34, and the laterally opposite portions 27 need not have the same lateral dimension relative to each other.

Referring to fig. 5, the stair-step structures 26, 28 have again been at least partially (as shown, completely) transferred deeper into the stack 16 by etching deeper into the stack 16 using the masking material 22 of fig. 4 as a mask. This is shown as etching ten layers 18, 20 into a stack 16, by way of example only. More or less than ten layers 18, 20 may be alternately etched. Regardless, the deeper stair step structure 26 (and in one embodiment the stair step structure 28) includes an upper step 34U1 that is located below the upper platform 30 and includes at least four layers 18, 20 of different composition materials 19, 21. The example upper step 34U1 is shown with only four layers 18, 20, but there may be more layers 18, 20 in the upper step 34U1 (e.g., 6, 8, 10, etc., and the layers may contain an odd number of layers, and not shown). In one embodiment and shown at least at this point in the example process, the upper step 34U1 is the uppermost step of the stair step structure 26 below the platform 30.

Referring to fig. 6 and 6A, the stair-step structure 26 of fig. 5 (and corresponding stair-step structure 28) has been at least partially (as shown, completely) transferred deeper into the stack 16 by etching. In one embodiment, upper step 34U1 has been used as a masking material to prevent a gap (not shown) from forming between step width portion 35 and step height portion 33 of step 34 immediately below upper step 34U1 during such deeper etching into stack 16. In one embodiment and as shown, a gap 38 is formed between the uppermost step 34U1 and the upper platform 30. In one embodiment and as shown, the gap 38 has been formed to include at least one step 40 having a step width portion 37 and a step height portion 39, including the two layers 18, 20, and in one embodiment and as shown, including opposing and facing step individually having at least one step 40. Alternatively and by way of example, no step (not shown) may be formed in the gap 38, such as with a gap having non-stepped vertical or side walls that are inclined from vertical, and in any event, the gap 38 need not extend completely through the upper step 34U1 (not shown). Additionally and by way of example only, at least one stair step 40 may be formed on only one of the opposing lateral sides of the gap 38 (not shown).

Fig. 7 shows an alternative example substrate construction 10a compared to the substrate construction shown in fig. 6. Like numerals from the above-described embodiments have been used where appropriate, with some construction differences being indicated with the suffix "a". Fig. 7 illustrates an example embodiment in which upper step 34U1a of stair-step structure 26a (and of corresponding stair-step structure 28 a) is also used as a mask to prevent formation of a gap (not shown) between the step-width and step-height portions of step 34 immediately below upper step 34U1 during such etching, but in which gap 38 (not shown gap 38) is not formed. By way of example only, alternate example upper steps 34U1a are shown having step width portions 35 that are equivalent to example general dimensions of individual step width portions 35 of other steps 34. Any other attributes or aspects illustrated and/or described herein with respect to other embodiments may be used.

Fig. 8 shows an exemplary subsequent process to that of fig. 6, in which the sacrificial material 21 (not shown) has been replaced with a conductive material 25 (e.g., a conductively doped semiconductor material and/or a metallic material such as TiN). This may occur by first forming slits/trenches (not shown) through stack 16 to expose the lateral edges of materials 19 and 21. The material 21 may then be isotropically etched selective to the insulating material 19, followed by deposition of a conductive material to fill the voids left by removal of the material 21, and then anisotropically etched from the slits/trenches 25. Thereafter, an insulator material 48 (e.g., doped or undoped silicon dioxide) has been formed on the stair-step structures 26 and 28, and vertically extending operative conductive vias 42 have been formed to individually electrically couple with the conductive material 25 of each of the steps 34 in the stair-step structures 26. Interconnect lines 82 have been formed over the stair-step structure 26 and individually electrically couple different conductive vias 42 together through the conductive extensions 69. An insulator material 86 (e.g., doped or undoped silicon dioxide) is shown surrounding the interconnect lines 82 and the conductive extensions 69.

Also, the example processes described above are described and illustrated with respect to a "back gate" or "replacement gate" process. As an alternative example, the processing may be performed according to a "gate first" process, wherein, for example, the processing of fig. 1 begins with the conductive material 25 instead of the sacrificial material 21. In addition, other processes, whether now existing or later developed, may be used independently in forming transistor gates. In any event, any other attributes or aspects illustrated and/or described herein with respect to other embodiments may be used with respect to the above-described embodiments.

In one embodiment and as shown, the array 12 is formed to include vertically extending strings 13 of memory cells 52 that individually include programmable charge storage transistors 52 (which may be circuit functional memory cells in some applications and not in others). The example transistor material 51 extends vertically through the stack 16 in individual strings 13 and may be substantially annular. This may include (e.g., and in order of deposition) charge blocking regions or materials (e.g., silicon dioxide and/or silicon nitride), charge storage materials (e.g., floating gate materials such as doped or undoped silicon, or charge trapping materials such as silicon nitride, metal dots, etc.), charge transport materials (e.g., band gap engineered structures with nitrogen-containing materials such as silicon nitride, e.g., silicon dioxide, laterally sandwiched between two insulating oxide layers), and transistor channel materials (e.g., appropriately doped polysilicon, etc.). The radially central portion of the string 13 may be filled with transistor material (not shown), solid insulator material 53, or hollow (not shown). The stair-step structure 26 in the circuitry region 14 adjacent the array 12 is circuit-operated (e.g., it has at least some conductive steps 34 that are electrically coupled to and between electronic components in the array 12, such as transistors and/or memory cells, and electronic components external to the array 12). Layer 20 comprises a word line layer. In one embodiment and as shown, the uppermost ladder 34U1 has a dummy word line layer 20D therein, two such dummy word line layers 20D are shown.

It is an object of some aspects of the present invention to overcome the problems that occur when transferring a stair-step structure deep (by etching) into the stack 16, for example, as shown in fig. 6 in comparison to fig. 5. Such processing typically occurs by plasma etching. During this time, the ion bombardment, particularly at the base of the laterally outermost vertical wall of the example recess 15, may be sufficiently large that a gap similar to gap 38 is formed entirely by the operative stair-step of the top of the stair-step structure. Heretofore, this has resulted in breaks or "opens" in those outermost stair steps, whereby the conductive material in those stair steps does not extend into the array and result in at least partially inoperative circuitry. Such problems can be overcome by providing the uppermost step 34U1 whereby any gap 38 formed therein is inconsequential and accommodates the conductive material in those layers that will be contacted and extend from the different step ladder structures into the array 12.

In one embodiment, the steps 34 in the stair-step structure 28 may be circuit-inoperative (i.e., may be "dummy," meaning that no current flows, and it may be an inoperable dead-end of the circuit, not part of the current flow path of the circuit, even if extending to or from an electronic component). Regardless, vertical conductive vias (not shown) surrounded at their periphery by insulator material (not shown) may extend through the stair-step structure 28, the steps 34 in the stair-step structure 26, and/or through one or both of the upper platforms 30, 31 to connect with circuitry below the stack 16.

Embodiments of the present invention include forming a plurality of stair-step structures 26 (and, accordingly, in some embodiments, a plurality of stair-step structures 28), whereby the stair-step structure 26 described above is one of the plurality of stair-step structures 26 formed. However, when a plurality of stepped structures 26 are formed, no two such stepped structures need be identical to each other in configuration, nor does it necessarily require that more than one stepped structure 26 have an upper step comprising at least four layers 18, 20 of different constituent materials 19, 21. Fig. 9 illustrates an example substrate construction 10b in which two stair-step structures 26 (and, correspondingly, in one embodiment, two stair-step structures 28) are formed. Like numerals from the above-described embodiments have been used where appropriate, with some construction differences being indicated with the suffixes "B", "a" and "B". Array 12 is not shown in fig. 9 due to drawing size limitations. The adjoining plurality of stair step structures 26 have respective upper landings 30/31 therebetween. The pairs of stepped structures 26 and 28 may individually define recesses 15A or 15B (e.g., recessed portions), while the lands 30/31 may individually define peaks between immediately adjacent recesses. In one embodiment and as shown, the opposing and facing stair step structure 28 in the left-depicted recess 15A is located between two immediately adjacent ones of the stair step structures 26. All or portions of the recesses 15A and 15B may be formed simultaneously and/or at different times relative to each other.

Regardless, in one embodiment and as shown, in addition to one stair step structure 26, at least one other stair step structure 26 has an upper step (e.g., 34U1) located below a respective platform (e.g., platform 30) and including at least four layers 18, 20 of different constituent materials 19, 21. Fig. 9 shows each of the left-and right-depicted stair step structures 26 having such an example upper step 34U 1. The upper step 34U1 depicted on the right is shown with gap 38, while the upper step 34U1 depicted on the left does not have gap 38. Alternatively, by way of example, upper steps 34U1 may each have a gap 38 (not shown), or upper steps 34U1 may each have no gap 38 (not shown).

Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

fig. 10 and 11 depict additional or alternative processing that may occur relative to the processing described above with respect to substrate constructions 10, 10a, and 10b and with respect to construction 10 c. The same reference numerals are used for the above-described embodiments where appropriate, with some construction differences being indicated with the suffixes "c", "E", "F", "G", and "H", and different numbers being used. The example configuration 10c has four stepped structures 26E, 26F, 26G, and 26H (collectively 26 ×) and four recesses 15E, 15F, 15G, and 15H. There may be fewer or more steps in each stair step structure 26, and no stair step structure 26 need have the same configuration as any other stair step structure 26 as shown. The array 12 (to the left in fig. 8 and not shown in fig. 10 and 11 due to drawing size limitations) includes vertically extending strings 13 of memory cells 52 that individually include programmable charge storage transistors 52. Circuitry region 14 is adjacent to array 12 (fig. 8), and stair step structures 26E, 26F, 26G, and 26H are exemplary multiple circuit-operated stair step structures with upper landing 30/31 between and over immediately adjacent ones of circuit-operated stair step structures 26E, 26F, 26G, and 26H. Four recesses 15E, 15F, 15G, and 15H are shown, but fewer or more recesses (e.g., longitudinally and/or laterally spaced/arranged relative to each other) may be included. Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

The stair step structures 26F, 26G, and 26H individually have an upper step 34U1, which in the illustrated embodiment is the uppermost step in each of the stair step structures 26F, 26G, and 26H. Stair step structures 26G and 26H individually have upper steps 34U2, and stair step structure 26H has upper steps 34U3 (upper steps 34U1, 34U2, and 34U3 are collectively or generally referred to as 34U). The upper step 34U need not have the same step width portion and/or step height portion as any other upper step 34U, and/or need not have the same number of layers 18 and 20, for example as shown in one embodiment. Any one or more of the uppermost steps 34U1 may have a gap therein (e.g., gap 38c as shown in stair step structure 26H), or none of such uppermost steps 34U1 (not shown) may have a gap therein. The same applies to upper steps 34U2 and 34U3 (gap 38/38c not shown). Not all stair step structures 26 need have the uppermost step 34U1 (e.g., stair step structure 26E does not have the uppermost step), and only one stair step structure 26 (not shown) may have the uppermost step 34U 1.

Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

Any existing or later developed alternative method may be used to form stair-step structure 26 with the uppermost steps (e.g., steps 34U 1). The above method basically shows forming such an uppermost step together with initially forming the stepped structure 26 and then transferring it deeper into the stack 16. Alternatively and by way of example only, such an uppermost step may not be initially formed, and the initially formed stair-step structure is then transferred deep into the stack. This may be followed by a masking step that exposes one or more outside edges of the desired step width portion dimension, which is then etched into the stack to form the uppermost step of the stair-step structure. The masking step may be used specifically for this purpose. Alternatively and more likely, the masking step may be part of another masking/etching step that combines forming or transferring deeper different stair step structures into the stack. In any event, it is not necessary that all of the stair-step structures (and/or recesses) be formed simultaneously. For example, one or more recesses may be formed at different times, or some or all may be only partially transferred into the stack at the same time, and where other recesses are masked (e.g., by the photoimageable material) during etching certain stair-step structures deeper into the stack.

embodiments of the invention include integrated circuit systems, such as memory integrated circuit systems, that are independent of the method of manufacture. However, any such integrated circuit system may be fabricated according to the methods disclosed herein. Furthermore, any of the structural attributes described above and elsewhere herein with respect to method embodiments may be found in structural embodiments of the present invention and vice versa.

In one embodiment, a memory integrated circuit system includes an array (e.g., 12) of vertically extending strings (e.g., 13) of memory cells (e.g., 52) that individually include programmable charge storage transistors (e.g., 52). In one such embodiment, the memory integrated circuitry comprises NAND. Regardless, the array includes vertically alternating layers of insulation (e.g., 18) and word lines (e.g., 20). A circuitry region (e.g., 14) is adjacent the array and includes a plurality of circuit-operated stair step structures (e.g., 26), with upper lands (e.g., 30/31) between and above immediately adjacent ones of the circuit-operated stair step structures. The circuit-operated stair-step structures individually include a number of vertically alternating layers of insulating and word lines and a plurality of stairs (e.g., 34U) individually including one of the word line layers and one of the insulating layers. At least some of the steps (e.g., 34) individually have only one of the word line layers and only one of the insulating layers. Only one word line layer of an individual of at least some of the ladders extends into the array and is directly electrically coupled to at least one of the programmable charge storage transistors in the one word line layer. At least one of the circuit-operated stair step structures has an uppermost step (e.g., 34U1) therein (three stair step structures 26F, 26G and 26H as shown in fig. 10 and 11) located below the upper landing (e.g., 30/31) between one circuit-operated stair step structure and the circuit-operated stair step structure immediately adjacent to the one circuit-operated stair step structure toward the array. Reference to "immediately adjacent" with respect to a circuit-operated stair step structure means that two circuit-operated stair step structures have no other circuit-operated stair step structure therebetween, but there may be one or more circuit-inoperative stair step structures between two immediately adjacent circuit-operated stair step structures (e.g., opposite and facing circuit-operated stair step structures 26, 26;) that are not circuit-operated stair step structures 28). The uppermost staircase has a dummy word line layer (e.g., 20D).

In some embodiments and as shown, the uppermost staircase includes at least two dummy word line layers and at least two insulating layers therein. In one embodiment and as shown, word line layer 20, which is dummy word line layer 20D in one circuit-operated stair-step structure 26, is the active word line layer in the immediately adjacent circuit-operated stair-step structure 26, extending therefrom into array 12, and the steps 34 of the active word line layer in the immediately adjacent circuit-operated stair-step structure are contacted by vertically extending conductive vias 42.

In one embodiment, a gap (e.g., gap 38c in fig. 11) is located between the uppermost step 34U1 in the circuit-operated stair step structure (e.g., circuit-operated stair step structure 26H) and the upper platform 30/31. Alternatively, there is no gap between the uppermost step and the upper platform (e.g., as in the circuit-operated stair step structures 26G and 26F).

Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

Embodiments of the invention include integrated circuitry that includes a 3D array (e.g., 12) that includes layers (e.g., 20) of electronic components (e.g., transistors 52). The integrated circuit system includes a circuit-operated stair-step structure (e.g., 26). An upper platform (e.g., 30/31) is adjacent to and above the circuit-operated stair step structure. The circuit-operated stair-step structure includes vertically alternating insulating layers (e.g., 18) and conductive layers (e.g., 20) (whether or not these are word line layers of a memory integrated circuit system). The plurality of steps (e.g., 34U) individually include one of the conductive layers and one of the insulating layers. At least some of the steps (e.g., 34) individually have only one of the conductive layers and only one of the insulating layers. Only one conductive layer of such at least some steps extends into one of the layers of the 3D array and, in one embodiment, is directly electrically coupled to at least one of the electronic components in that one layer. The uppermost stair step (e.g., 34U1) located below the upper platform has a dummy conductive layer (e.g., 20D) therein, and whether or not extending from the circuit-operated stair-step structure into the 3D array and whether or not including at least two conductive layers and at least two insulating layers. In one embodiment, the uppermost staircase includes a plurality of dummy conductive layers therein.

in one embodiment, the integrated circuit system includes another stair-step structure near and below the upper platform. In such embodiments, the dummy conductive layer in the uppermost rung of the circuit-operated stair-step structure is a circuit active layer in another stair-step structure. The other stair step structure includes a stair step including a circuit active layer, and the circuit active layer extends from the other stair step structure into the 3D array. The steps in the other stair-step structure are contacted by vertically extending conductive vias.

In one embodiment, the step (e.g., 34U2) immediately below the uppermost step (e.g., 34U1) has a dummy conductive layer therein (e.g., 20D in 34U2 in either of the step ladder structures 15G or 15H). In one embodiment, a plurality of steps (e.g., 34U2 and 34U3 in stair step structure 15H) are successively immediately below the uppermost step, with dummy conductive layers individually.

Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

In some embodiments, an integrated circuit system according to the present invention includes a 3D array (e.g., 12) including layers (e.g., 20) of electronic components (e.g., transistors 52) and circuit-operating stair-step structures (e.g., 26, 26). An upper platform (e.g., 30, 30/31) is adjacent to and above the circuit-operated stair step structure. The circuit-operated stair-step structure includes vertically alternating insulating layers (e.g., 18) and conductive layers (e.g., 20). The circuit-operated stair-step structure includes a plurality of steps (e.g., 34U), which individually include one of the conductive layers and one of the insulating layers. At least some of the steps (e.g., 34) individually have only one of the conductive layers and only one of the insulating layers. Only one conductive layer of an individual one of the stairs extends into one of the layers of the 3D array and is electrically coupled to at least one of the electronic components in the one layer. An uppermost rung (e.g., 34U) is located below the upper platform and has at least one conductive layer therein that does not extend from the circuit-operated rung structure into the 3D array of electronic components (whether or not the uppermost rung has a dummy conductive layer therein and whether or not the uppermost rung has at least two conductive layers and at least two insulating layers therein).

in one embodiment, the uppermost step has at least two conductive layers therein that do not extend from the uppermost step into the 3D array, and in one such embodiment, has at least three conductive layers therein (not shown) that do not extend from the uppermost step into the 3D array. In one embodiment, all of the steps individually comprise one of the conductive layers, which is on top and contacts the bottom one of the insulating layers. In one embodiment, the step immediately below the uppermost step has at least one conductive layer therein that does not extend from the circuit-operated stair-step structure into the 3D array. In one embodiment, a plurality of steps successively immediately below the uppermost step individually have at least one conductive layer therein that does not extend from the circuit-operated stair-step structure into the 3D array of electronic components.

Any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

In some embodiments, the integrated circuit system includes a 3D array (e.g., 12) of electronic components (e.g., 52). The circuit-operated stair-step structures (e.g., 26) are electrically coupled to electronic components of the 3D array. An upper platform (e.g., 30, 30/31) is adjacent to and above the circuit-operated stair step structure. The circuit-operated stair-step structure includes vertically alternating insulating layers (e.g., 18) and conductive layers (e.g., 20). The circuit-operated stair-step structure includes a plurality of steps (e.g., 34U), which individually include one of the conductive layers and one of the insulating layers. At least some of the steps (e.g., 34) individually have only one of the conductive layers and only one of the insulating layers. The uppermost rung (e.g., 34U) located below the upper platform includes at least two of the conductive layers and at least two of the insulating layers (whether or not there is at least one conductive layer therein that does not extend from the circuit-operated rung structure into the 3D array, and whether or not there is a dummy conductive layer in the uppermost rung). In one embodiment, the uppermost step includes at least three conductive layers (not shown).

any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

In some embodiments, the integrated circuit system includes a 3D array (e.g., 12) of electronic components (e.g., 52). The circuit-operated stair-step structures (e.g., 26) are electrically coupled to electronic components of the 3D array. An upper platform (e.g., 30, 30/31) is adjacent to and above the circuit-operated stair step structure. The circuit-operated stair-step structure includes vertically alternating insulating layers (e.g., 18) and conductive layers (e.g., 20). The circuit-operated stair-step structure includes a plurality of steps (e.g., 34U), which individually include one of the conductive layers and one of the insulating layers. At least some of the steps individually have only one of the conductive layers and only one of the insulating layers. Only respective ones of the conductive layers extend into the array and are directly electrically coupled with respective ones of the electronic components. The uppermost step (e.g., 34U1) located below the upper platform includes at least two of the conductive layers and at least two of the insulating layers. A gap (e.g., 38c) is located between the uppermost step and the upper platform. In some such embodiments, the gap comprises at least one circuit inoperative stair step individually comprising one of the conductive layers. In one embodiment, the gap comprises opposing and facing stair steps individually having at least one circuit inoperative stair step comprising one of the conductive layers.

any other attributes or aspects as shown and/or described herein with respect to other embodiments may be used.

In the invention disclosed above, other processes and/or structures as disclosed in any of the following applications may be used: U.S. patent application publication No. 2015/0001613; U.S. patent No. 9,589,978; U.S. patent application publication No. 2017/0263556; U.S. patent application publication No. 2017/0287833 and U.S. patent application publication No. 2018/0082940. U.S. patent application publication No. 2015/0001613; U.S. patent No. 9,589,978; U.S. patent application publication No. 2017/0287833 and U.S. patent application publication No. 2018/0082940 are hereby incorporated by reference herein.

Herein, "vertical," higher, "" upper, "" lower, "" top, "" bottom, "" above, "" below, "" in. "horizontal" refers to a general direction along the main substrate surface (i.e., within 10 degrees) and may be the relative direction in which the substrate is processed during fabrication, and vertical is a direction generally orthogonal thereto. Reference to "substantially horizontal" is a direction along the main substrate surface (i.e., no degrees from there), and may be with respect to the direction in which the substrate is processed during fabrication. Further, "vertical" and "horizontal" as used herein are generally vertical directions relative to each other, and are independent of the orientation of the substrate in three-dimensional space. Additionally, "vertically extending" and "vertically extending" refer to directions that deviate at least 45 ° from exactly horizontal. Further, with respect to a field effect transistor, "vertically extending," "vertically extending," horizontally extending, and horizontally extending refers to an orientation of a channel length of the transistor along which current flows between source/drain regions in operation for a bipolar junction transistor, "vertically extending," "vertically extending," horizontally extending, and horizontally extending refers to an orientation of a base length along which current flows between an emitter and a collector in operation.

Furthermore, "directly above" and "directly below" require that there is at least some lateral overlap (i.e., horizontally) of the two recited zones/materials/components with respect to each other. Also, the use of "over" without "right before merely requires that some portion of the stated region/material/component above the other stated region/material/component be vertically outward from the other stated region/material/component (i.e., independent of whether there is any lateral overlap of the two stated regions/material/components). Similarly, the use of "under" without "positive" above merely requires that some portion of the stated region/material/component under/below another stated region/material/component be vertically inboard of the other stated region/material/component (i.e., independent of whether there is any lateral overlap of the two stated regions/material/components).

Any of the materials, regions, and structures described herein may be uniform or non-uniform, and in any event may be continuous or discontinuous over any material that it overlies. When one or more example compositions are provided for any material, the material can comprise, consist essentially of, or consist of such one or more compositions. Furthermore, unless otherwise noted, each material may be formed using any suitable or yet to be developed technique, examples of which are atomic layer deposition, chemical vapor deposition, physical vapor deposition, epitaxial growth, diffusion doping, and ion implantation.

Additionally, "thickness" (the preceding non-directional adjectives), used alone, is defined as the average straight-line distance perpendicularly through a given material or region from the nearest surface of the immediately adjacent material or region of different composition. In addition, the various materials or regions described herein can have a substantially constant thickness or have a variable thickness. If there is a variable thickness, the thickness refers to an average thickness unless otherwise specified, and the material or region will have some minimum thickness and some maximum thickness due to the variable thickness. As used herein, "different compositions" only requires that those portions of the two discussed materials or regions that can be directly against each other be chemically and/or physically different, such as where the materials or regions are non-uniform. If two discussed materials or regions are not directly against each other, then in the event that the materials or regions are not uniform, "different compositions" merely requires that those portions of the two discussed materials or regions that are closest to each other be chemically and/or physically different. In this document, a material, region or structure is "directly against" another material, region or structure when the stated materials, regions or structures are in at least some physical contact with respect to each other. In contrast, the absence of "directly" above, "on," "adjacent," "along," and "against" preceding encompasses "directly against" and configurations in which intervening materials, regions, or structures are not in physical contact with one another.

Furthermore, regions/materials/components are "electrically coupled" with respect to each other if, in normal operation, current can flow continuously from one region/material/component to another, and primarily through movement of subatomic positive and/or negative charges when they are sufficiently generated. Another electronic component may be between and electrically coupled to the regions/materials/components. In contrast, when regions/materials/components are referred to as being "directly electrically coupled," there are no intervening electronic components (e.g., no diodes, transistors, resistors, transducers, switches, fuses, etc.) between the directly electrically coupled regions/materials/components.

Additionally, a "metallic material" is any one or combination of an elemental metal, a mixture or alloy of two or more elemental metals, and any conductive metal compound.

further, "dummy conductive layer" and "dummy word line layer" are conductive layers or word line layers having no electrical function. (i.e., no current flows, and may be an inoperable dead end of the circuit, not part of the current flow path of the circuit, even if extending to or from an electronic component).

Conclusion

In some embodiments, an integrated circuit system includes a 3D array including an electronic component layer and a circuit-operating stair-step structure. An upper landing is adjacent to and above the circuit-operated stair-step structure. The circuit-operated stair-step structure comprises vertically alternating insulating and conductive layers. The plurality of steps individually include one of the conductive layers and one of the insulating layers. At least some of the steps individually have only one of the conductive layers and only one of the insulating layers. The only one conductive layer extends into one of the layers of the 3D array of the electronic components and is electrically coupled to at least one of the electronic components in the one layer. An uppermost stair step located below the upper landing has at least one conductive layer therein that does not extend from the circuit-operated stair step structure into the 3D array of electronic components.

In some embodiments, an integrated circuit system includes a 3D array including an electronic component layer and a circuit-operating stair-step structure. An upper landing is adjacent to and above the circuit-operated stair-step structure. The circuit-operated stair-step structure comprises vertically alternating insulating and conductive layers. The plurality of steps individually include one of the conductive layers and one of the insulating layers. At least some of the steps individually have only one of the conductive layers and only one of the insulating layers. The only one conductive layer extends into one of the layers of the 3D array of the electronic components and is electrically coupled to at least one of the electronic components in the one layer. An uppermost one of the steps located below the upper landing has a dummy conductive layer therein.

In some embodiments, an integrated circuit system includes a 3D array of electronic components and a circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array. An upper landing is adjacent to and above the circuit-operated stair-step structure. The circuit-operated stair-step structure comprises vertically alternating insulating and conductive layers. The plurality of steps individually include one of the conductive layers and one of the insulating layers. At least some of the steps individually have only one of the conductive layers and only one of the insulating layers. An uppermost one of the steps located under the upper landing includes at least two of the conductive layers and at least two of the insulating layers.

In some embodiments, an integrated circuit system includes a 3D array of electronic components and a circuit-operated stair-step structure electrically coupled to the electronic components of the 3D array. An upper landing is adjacent to and above the circuit-operated stair-step structure. The circuit-operated stair-step structure comprises vertically alternating insulating and conductive layers. The plurality of steps individually include one of the conductive layers and one of the insulating layers. At least some of the steps individually have only one of the conductive layers and only one of the insulating layers. Only respective ones of the conductive layers extend into the array and are directly electrically coupled with respective ones of the electronic components. An uppermost one of the steps located under the upper landing includes at least two of the conductive layers and at least two of the insulating layers. A gap is located between the uppermost step and the upper platform.

In some embodiments, a memory integrated circuit system includes an array of vertically extending strings of memory cells that individually include programmable charge storage transistors. The array includes vertically alternating layers of insulating layers and word lines. The circuitry region is adjacent to the array and includes a plurality of circuit-operated stair step structures with an upper landing between and above immediately adjacent ones of the circuit-operated stair step structures. The circuit-operated stair-step structure individually includes some of the vertically alternating insulating layers and the word line layers. A plurality of terraces individually includes one of the word line layers and one of the insulating layers. At least some of the steps individually have only one of the word line layers and only one of the insulating layers. Only one word line layer of an individual of the at least some ladders extends into the array and is directly electrically coupled to at least one of the programmable charge storage transistors in the one word line layer. At least one of the circuit operated stair step structures has an uppermost step therein located below the upper landing between one circuit operated stair step structure and a circuit operated stair step structure immediately adjacent to the one circuit operated stair step structure toward the array. The uppermost staircase has a dummy word line therein.

In some embodiments, a method for forming an integrated circuit system includes forming a stack of vertically alternating layers of different constituent materials. A stair step structure is formed into the stack and an upper landing is formed adjacent to and above the stair step structure. Forming the stair step structure to include vertically alternating layers of the different constituent materials. The plurality of steps individually include two of the different composition material layers. At least some of the steps individually have only two layers, each layer having only a different one of the different composition materials. An upper portion of the stair step located below the upper landing includes at least four of the layers of different composition materials.

In accordance with the provisions, the subject matter disclosed herein has been described in language more or less specific as to structural and methodical features. It is to be understood, however, that the claims are not limited to the specific features shown and described, since the means herein disclosed comprise example embodiments. The claims are thus to be accorded the full scope as literally set forth and appropriately interpreted in accordance with the doctrine of equivalents.