阅读说明：本技术 用于借助二维位置表定位显微样本的方法和设备 (Method and apparatus for positioning micro- sample by two-dimensional position table ) 是由 J.比伯格 于 2019-05-09 设计创作，主要内容包括：一种用于在显微镜系统中定位样本的方法,其中,利用显微镜系统观察和/或处理样本的感兴趣区域(ROI),并且显微镜系统包括：光轴；用于接收样本的可移动样本载物台；存储设备,其存储描述样本的位置的数据记录；控制设备,所述控制设备能够借助于所存储的数据记录来控制样本载物台的移动。该方法包括以下步骤：a)将样本区域(ROI)保持在第一位置；b)存储第一数据记录,通过第一数据记录来描述第一位置,其中第一位置被定义为独立位置；c)存储第二数据记录,通过第二数据记录来描述第二位置,其中第二位置链接到独立位置；d)调用所存储的数据记录中的一个,使得样本载物台移动以使得样本区域保持在由所调用的数据记录所描述的位置。(A method of for positioning sample in microscopic system, wherein the area-of-interest (ROI) of sample is observed and/or handled using microscopic system, and microscopic system includes: optical axis；For receiving the removable sample objective table of sample；Store equipment, the data record of the position of storage description sample；Equipment is controlled, the control equipment can control the movement of sample objective table by means of the data record stored.Method includes the following steps: sample areas (ROI) a) is maintained at first position；B) the first data record is stored, first position is described by the first data record, wherein first position is defined as independent position；C) the second data record is stored, the second position is described by the second data record, wherein the second position is linked to independent position；D) one in stored data record is called, so that sample objective table moves so that sample areas is maintained at the position as described in the data record called.)

1. a kind of method for positioning sample in microscopic system, wherein observe and/or locate using the microscopic system The area-of-interest (ROI) on the sample is managed, and the microscopic system includes:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the sample is able to maintain in phase For the first position and the second position of the optical axis of the microscopic system；

Equipment is stored, the storage equipment is used to store the data record for describing these positions；

Equipment is controlled, the control equipment controls the movement of the sample objective table by means of the data record stored；

And it the described method comprises the following steps:

A) sample areas (ROI) is maintained at the first position；

B) the first data record is stored, the first position is described by first data record, wherein described first It sets and is defined as independent position；

C) the second data record is stored, the second position is described by second data record, wherein the second It sets and is linked to the independent position；

D) one in stored data record is called, so that the sample objective table moves so that the sample areas is protected It holds in the position as described in the data record called.

2. according to the method described in claim 1, wherein, being implemented and calculating the second position with calculating operation described Link.

3. according to the method described in claim 1, wherein, by implementing the link close to the second position manually.

4. according to the method in any one of claims 1 to 3, wherein the data record can be presented in bivariate table.

5. mode is so that the data record according to the method described in claim 4, wherein, saving the data record Between relationship indicated by the arrangement in the bivariate table.

6. the method according to any one of claims 1 to 5, wherein the second sample area-of-interest (ROI) is repeated Method and step a) to d),

And the data record of the second sample area-of-interest (ROI) is equally presented in the bivariate table.

7. method according to any one of claim 1 to 6, wherein the data record is editable.

8. method according to any one of claim 1 to 7, wherein record at least one rule, at least one described rule Then define two sample positions between management logic so that the sample only can be positioned on according to the rule it is permitted that In a little sample positions.

9. method according to any one of claim 1 to 8, wherein the sample objective table includes at least two axis, And the movement of the sample objective table is limited by mobile sequence, speed and the degree of the axis, and wherein, and record is at least One rule, at least one described rule regulation is for positioning sample sheet, sequence, speed and degree that these axis to be moved.

10. method according to any one of claim 1 to 9, wherein calibrated by storing at calibration samples position Position improve the accuracy of the positioning of the sample area-of-interest (ROI).

11. method according to any one of claim 1 to 10, wherein the bivariate table is implemented as graphical user circle Face.

12. method according to any one of claim 1 to 11, wherein generate band electrochondria in the microscopic system Beamlet.

13. method according to any one of claim 1 to 12, wherein the microscopic system includes electron beam column.

14. method according to any one of claim 1 to 13, wherein the microscopic system includes ion beam column.

15. a kind of microscopic system, comprising:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the sample is able to maintain in phase For the first position and the second position of the optical axis of the microscopic system, wherein the first position can be by the first number According to record description, the second position can be described by the second data record；

Equipment is stored, the storage equipment is for storing the data record, wherein the data record can be reserved in two dimension In table；

Equipment is controlled, the control equipment can control the shifting of the sample objective table by means of the data record stored It is dynamic；

Wherein, the microscopic system is configured for executing the method for positioning the sample, and the method includes following Step:

A sample areas (ROI)) is maintained at the first position；

B the first data record) is stored, the first position is described by first data record, wherein described first It sets and is defined as independent position；

C the second data record) is stored, the second position is described by second data record, wherein the second It sets and is linked to the independent position；

D one in stored data record) is called, so that the sample objective table moves so that the sample areas is protected It holds in the position as described in the data record called.

16. a kind of microscopic system, comprising:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the first area energy of the sample It is enough brought to different location and the spatial orientation of the optical axis relative to the microscopic system, and by means of the sample Objective table, the second area of the sample can be brought to the optical axis relative to the microscopic system different location and Spatial orientation, wherein the first area of the sample and the different location of the second area and spatial orientation point It can not be described by different data records；

Equipment is stored, the storage equipment records for storing data；

Equipment is controlled, the control equipment controls the sample by means of storing data record in the storage device The movement of objective table；

User interface, the user interface have display equipment, and item of information can be displayed in bivariate table in the display equipment In field, wherein the field in the first row or column of the bivariate table is assigned to the first area of the sample, and The field being parallel in the second row or column of first row or column is assigned to the second area of the sample；

And the data record wherein, being stored in the data storage device is assigned to the field of the bivariate table, described Data record corresponds to different location and/or spatial orientation of the sample relative to the optical axis,

Wherein, the data record of the field of first row or column is distributed to,

Different location and/or spatial orientation of the first area relative to the optical axis corresponding to the sample；

Also, the data record of the field of second row or column is distributed to,

Different location and/or spatial orientation of the second area relative to the optical axis corresponding to the sample；

And wherein, the control equipment is implemented as starting the user interface phase at the selected field of the bivariate table The sample objective table mobile for the optical axis, the movement proceed to described the of the sample for distributing to selected field One region or the second area are taken described in the data record for distributing to the selected field relative to the optical axis Place and/or spatial orientation.

17. microscopic system according to claim 16, wherein the user interface is implemented as

Assign commands to being deposited for the field for being assigned to the bivariate table distributed to the first area of the sample The data record of storage；

And the user interface, which is additionally embodied to assign commands to, to be assigned to the second area of the sample point The data record of the field for the bivariate table matched stored,

Wherein the control equipment is implemented as calculating and distributing the word for being assigned to the second area of the sample The associated data record of section, the associated data record correspond to the order for distributing to the field,

Wherein, when calculating the data record, the second area for distributing to the sample is considered in different fields The data record stored, other described field distributions are given the second area of the sample, and wherein, calculating The data record stored for being assigned to the first area of the sample is considered when the data record, it is described to be stored Data record be assigned to the field that same commands are assigned with the field that should calculate and distribute the data record.

18. microscopic system described in 6 and 17 according to claim 1, wherein the user interface is implemented as command list (CLIST) In order distribute to the field for being assigned to the bivariate table of the first area of the sample and/or be assigned to institute The field of the bivariate table of the second area of sample is stated, and wherein, the control equipment is implemented as calculating related Connection data record simultaneously assigns it to selected field, and the associated data record corresponds to the life for distributing to the selected field It enables, wherein considering the data record of storage when calculating the data record, the data record of the storage is distributed to assigned To another field of the same area of the sample.

19. a kind of computer program, including control command sequence, the control command sequence executes microscopic system according to power Benefit require any one of 1 to 14 described in for the method that positions sample.

Technical field

The present invention relates to for micro- sample to be located in microscopic system (such as optical microscopy or electron microscope) Sample room in method.

Background technique

In general, the areal extent of sample to be checked is very big, so that the area-of-interest (ROI) of sample cannot be fully disposed in In the visual field for the microscopic system of inspection.Therefore, it is necessary to by sample shift so that entire sample is imaged or is handled. Additionally, there are multiple sample area-of-interests (ROI) to be present in the situation on same sample.In this case, it is also necessary to will Sample shift, so as to successively bring sample area-of-interest (ROI) in the visual field of microscopic system into, so as to right The ROI is imaged or is handled.In addition, when preparing micro- sample, it is often necessary to which sample area-of-interest is maintained at phase For the various positions definitely defined of the optical axis of microscopic system.Therefore, navigation is (that is, sample area-of-interest is accurate fixed Position and retrieval) it plays an important role in microexamination and structure problem.

In the feelings that operation is the microscopic system (such as electron microscope or ion cluster microscope) based on charged particle beam Under condition, usually sample group is mounted on displaceable sample objective table.For example, this can be five axis objective tables, by means of this Five axis objective tables, sample can move on x and y direction in space, and mode is so that its visual field for being maintained at microscopic system In.In addition, sample, particularly area-of-interest (ROI) are maintained at away from object lens certain distance (z-height), so that the particle beams The optical axis of device and the surface of sample it is at a generally normal angle extend and area-of-interest (ROI) can be focused on.

Five axis objective tables are commonly used in scanning electron microscope (SEM), ion cluster microscope or dual beam apparatus.Dual beam apparatus It is combination unit comprising both electron beam column and ion beam column (focused ion beam, FIB).Dual beam apparatus be commonly used in by Electron beam column observes micro- sample and handles these micro- samples by ion beam column.For example, can manufacture section or TEM thin slice can be prepared in dual beam apparatus.During such sample preparation, sample generally has to be maintained at multiple and different Position, that is, on different places and spatial orientation, especially as follows: allow on the one hand it by electronics The imaging of beam column, and on the other hand it can be handled with focused ion beam (FIB).

Sample is positioned usually using list of locations, two dimensional image or CAD data；But this largely works with user It is associated with document expenditure.

Therefore, it is desirable to simplify the capture of position data and use and at least partly make its automation.In addition, will be advantageous Be to handle data in a user-friendly manner so that the work of user and document expenditure keep as low as possible and avoid inputting Incorrect or not applicable position data.

This is provided by according to the method for the present invention.In addition, localization method described below may be embodied as intelligent method, It is embodied as self-learning method, the input of this method monitoring data simultaneously provides the choosing for improving the positional accuracy of sample objective table .

The brief description of related art

It is well known that in order to position sample during sample preparation, using can by the simple position list that user edits, In list the various positions that sample can use.In general, sample is manually moving to desired locations first, so as to then by this A little positions are stored in list of locations.Then, the position of storage can be then called, so that sample is moved back into relevant position. Its shortcoming is that this needs a large amount of work expenditure, this is because all positions must all approach manually and must by with Family individually records.In addition, management and processing long list (can be considered as dimensional table) may be very chaotic.

It is also known that using such as being assisted for figures such as the two-dimentional general view image of navigation purpose or CAD topology datas Object.In general, target is with two-dimentional (x, y) or three-dimensional (x, y, z) sample retrieval area-of-interest.However, even if in these methods In, especially if it is intended to the variation in view of three-dimensional coordinate or the variation (for example, inclination and rotation of sample) of spatial orientation, User may also have found to be difficult to oneself position and record required data.

Summary of the invention

The purpose of the present invention is to propose to following methods, in this way, sample to be checked can be with user-friendly side Formula is located in particle beam apparatus, and can be made close to predetermined sample position by this method by partly or entirely automatic Change.

According to the present invention, these purposes are realized by the method with feature described below.

A method of in microscopic system position sample, wherein observed using the microscopic system and/or The area-of-interest (ROI) on the sample is handled, and the microscopic system includes:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the sample is able to maintain In the first position and the second position of the optical axis relative to the microscopic system；

Equipment is stored, the storage equipment is used to store the data record for describing these positions；

Equipment is controlled, the control equipment controls the shifting of the sample objective table by means of the data record stored It is dynamic；

And it the described method comprises the following steps:

A) sample areas (ROI) is maintained at the first position；

B) the first data record is stored, the first position is described by first data record, wherein described the One position is defined as independent position；

C) the second data record is stored, the second position is described by second data record, wherein described the Two positions are linked to the independent position；

D) one in stored data record is called, so that the sample objective table moves so that the sample area Domain is maintained at the position as described in the data record called.

Advantageous configuration is by hereafter indicating.

Preferably, implement the link and calculating the second position with calculating operation.

Preferably, by implementing the link close to the second position manually.

Preferably, the data record can be presented in bivariate table.

Preferably, the data record is saved, mode is so that the relationship between the data record is by the two dimension Arrangement in table indicates.

Preferably for the second sample area-of-interest (ROI) repetition methods step a) to d), and second sample The data record of area-of-interest (ROI) is equally presented in the bivariate table.

Preferably, the data record is editable.

Preferably, at least one rule is recorded, the management that at least one described rule defines between two sample positions is patrolled Volume, so that the sample only can be positioned on according in those permitted sample positions of the rule.

Preferably, the sample objective table includes at least two axis, and the movement of the sample objective table is by described Mobile sequence, speed and the degree of axis limit, and wherein, record at least one rule, at least one described rule regulation In order to position sample, sequence, speed and degree that these axis to be moved.

Preferably, the sample area-of-interest is improved by storing corrected position at calibration samples position (ROI) accuracy of positioning.

Preferably, the bivariate table is implemented as graphic user interface.

Preferably, charged particle beam is generated in the microscopic system.

Preferably, the microscopic system includes electron beam column.

Preferably, the microscopic system includes ion beam column.

In addition, the particle beam apparatus is configured for executing according to this present invention relates to particle beam apparatus described below The method of invention, and it is related to computer program described below, which makes particle beam apparatus execute localization method.

A kind of microscopic system, comprising:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the sample is able to maintain In the first position and the second position of the optical axis relative to the microscopic system, wherein the first position can be by The description of one data record, the second position can be described by the second data record；

Equipment is stored, the storage equipment is for storing the data record, wherein the data record can be reserved for In bivariate table；

Equipment is controlled, the control equipment can control the sample objective table by means of the data record stored Movement；

Wherein, the microscopic system is configured for executing the method for positioning the sample, the method includes Following steps:

A sample areas (ROI)) is maintained at the first position；

B the first data record) is stored, the first position is described by first data record, wherein described the One position is defined as independent position；

C the second data record) is stored, the second position is described by second data record, wherein described the Two positions are linked to the independent position；

D one in stored data record) is called, so that the sample objective table moves so that the sample area Domain is maintained at the position as described in the data record called.

A kind of microscopic system, comprising:

Optical system or Particle-optical system, the system define optical axis,

For receiving the removable sample objective table of sample, by means of the sample objective table, the firstth area of the sample Domain can be brought to different location and the spatial orientation of the optical axis relative to the microscopic system, and by means of described Sample objective table, the second area of the sample can be brought to relative to the microscopic system the optical axis differently Point and spatial orientation, wherein the first area of the sample and the different location of the second area and space take It can be described to difference by different data records；

Equipment is stored, the storage equipment records for storing data；

Equipment is controlled, the control equipment controls described by means of storing data record in the storage device The movement of sample objective table；

User interface, the user interface have display equipment, and item of information can be displayed in two dimension in the display equipment In the field of table, wherein the field in the first row or column of the bivariate table is assigned to the first area of the sample, And the field being parallel in the second row or column of first row or column is assigned to the second area of the sample；

And the data record wherein, being stored in the data storage device is assigned to the field of the bivariate table, The data record corresponds to different location and/or spatial orientation of the sample relative to the optical axis,

Wherein, the data record of the field of first row or column is distributed to,

Different location and/or spatial orientation of the first area relative to the optical axis corresponding to the sample；

Also, the data record of the field of second row or column is distributed to,

Different location and/or spatial orientation of the second area relative to the optical axis corresponding to the sample；

And wherein, the control equipment is implemented as starting the user interface at the selected field of the bivariate table When relative to the mobile sample objective table of the optical axis, the movement proceeds to the institute for distributing to the sample of selected field It states first area or the second area is taken described in the data record for distributing to the selected field relative to described The place of optical axis and/or spatial orientation.

Preferably, the user interface is implemented as:

Assign commands to the field for being assigned to the bivariate table distributed to the first area of the sample The data record stored；

And the user interface is additionally embodied to assign commands to secondth area being assigned to the sample The data record of the field of the bivariate table of domain distribution stored,

Wherein the control equipment is implemented as calculating and distributing the second area for being assigned to the sample Field associated data record, associated data record corresponds to the order for distributing to the field,

Wherein, when calculating the data record, consider to distribute to described the second of the sample in different fields Other described field distributions are given the second area of the sample by the data record stored in region, and wherein, In The data record stored for being assigned to the first area of the sample, the institute are considered when calculating the data record The data record of storage is assigned to the field that same commands are assigned with the field that should calculate and distribute the data record.

Preferably, the user interface, which is implemented as distributing to the order in command list (CLIST), is assigned to the sample The field of the bivariate table of the first area and/or be assigned to the sample the second area the bivariate table Field, and wherein, the control equipment, which is implemented as calculating associated data, records and assigns it to selected field, institute It states associated data record and corresponds to the order for distributing to the selected field, wherein considering to deposit when calculating the data record The data record of storage, the data record of the storage distribute to another field for the same area for being assigned to the sample.

A kind of computer program, including control command sequence, it is above that the control command sequence executes microscopic system The method for positioning sample.

The present invention is based on the discovery that sample shift to various sample positions, the position during sample preparation It is relative to each other.Corresponding relation between two positions can generate due to steric requirements (sample and/or device geometry), Or it can arbitrarily be distributed by user.Usually in a defined sequence in succession close to sample position, wherein may be repeatedly close to some Position.

Under any circumstance, the knowledge about the mutual subordinate relation of each sample position can be used for improving sample positioning Method.

Sample position (being also abbreviated by " position ") includes place and the spatial orientation of sample.Here, phrase place means The positioning of sample in three dimensions can be described by specified x, y and z coordinate.Spatial orientation is understood to mean sample Alignment.Carry out designated space orientation usually relative to an optical axis of microscopic system.At the geometric configuration of sample and/or expectation Reason step means that sample must keep specific alignment relative to (multiple) optical axis of microscopic system.In general, by surrounding Tilt axis and/or rotation axis rotated sample modify the spatial orientation of sample.Herein, it is often necessary to be directed at the inclination of sample Axis, mode are so that sample is tilted according to the requirement of each processing geometry.

Phrase positioning is understood to refer to sample and is moved to sample position.Here, sample is moved to second from first position The route of position also works in some cases.Route is interpreted as accurate displaced path, that is, is moved in translation (displacement step Suddenly) and sequence, speed and the degree of moving in rotation (inclination, rotation).

It is usually to be completed by sample objective table can be shifted that sample, which is moved to various positions,.Sample objective table typically at least wraps Translational movement element is included, by means of being moved in translation element, it can be moved on the direction x and the direction y, and generally also in the side z It moves up.Here, aforementioned translated axis line orientation at right angles to each other in each case.Sample objective table, which also typically includes, to be had Such as the rotating moving element of first rotation (R), sample objective table surround the first rotation in a rotatable way Arrangement.It is also contemplated that the objective table also has the second rotation axis (T), which can surround second rotary shaft Line rotation, and second rotation axis is arranged to the first rotation into right angle.Second rotation axis is also referred to as Tilt axis (T).If therefore sample to be checked can be in three direction in spaces x, y using such five axis objective table It is shifted on z, to change the place of sample.Moreover, by means of the rotation and/or inclination of sample, thus it is possible to vary the sky of sample Between be orientated.It is also contemplated that sample objective table is embodied as six axis objective tables (so-called super centering objective table), that is, it is embodied as having Commonly known as five axis objective tables of the additional axis of M axis.

Control the movement of equipment control sample objective table.Advantageously, this passes through control equipment and the phase interaction for storing equipment Implement to computer based mode.The desired locations of sample area-of-interest can be described by data record and It can be stored by means of storage equipment.In order to approach some sample position, from storage equipment calls related data record, so that Sample objective table and sample are moved together position described in data record by control equipment.

Data record is understood to refer to distribute to sample position and the information including can sufficiently characterize sample position The data at (such as x, y and Z coordinate and inclination angle of some sample).

According to the present invention, the data record for describing each sample position is shown with bivariate table, i.e., is shown with matrix structure.It can To convey additional information by the arrangement in matrix.For example, following information: all data entries of a column can be conveyed Suitable for same sample.Furthermore, it is possible to couple following information: it is opposite that all data entries in particular row describe respective sample In the same space orientation of the optical axis of microscopic system.Change kind of an expression way: the relationship between data record is by using two dimension Table indicates.This is conducive to being partially or fully automated for sample positioning.

Since unrestricted choice be defined as independent sample position, can precalculate or manual allocation subordinate position It sets.Here, the relationship between independent position and subordinate position can be described for example by fixed value or by mathematical function.

The relationship between sample position particularly advantageously may be stored as to opposite link, so that position changes Become the change for necessarily leading to other link positions.

It is also contemplated that by logicality analogy conclusion come confirmatory sample position.From the sample bit of first sample area-of-interest Beginning is set, the corresponding position of the second sample areas can be calculated in a similar way.

It therefore, can be in the preparation phase by all sample positions of the first sample area-of-interest (ROI) initially stored Between by sample localization criteria.It is then possible to export other sample area-of-interests in a similar way from the data of storage (ROI) sample position or sample alignment.This is favourable, because user only needs to be manually entered several sample positions, and Equipment can be controlled by means of computer based to calculate multiple sample positions.

Furthermore, it is possible to define management logic, which determines certain places in the form of rules and spatial orientation is It is no to be allowed as sample position.

It is also contemplated that providing predetermined command in command list (CLIST), therefrom can choose predetermined command and being distributed To the data record and/or field in bivariate table.Sample objective table can be moved by means of ordering, so that sample region of interest Domain is moved to the second sample position from first sample position.

Detailed description of the invention

Exemplary embodiment of the present invention is explained below based on attached drawing.Therefore, for the purpose of explanatory parts, also join respectively Face and subsequent whole description before examination.

Fig. 1 shows the situation in the particle beam apparatus for the exemplary embodiment for being configured for executing localization method.

Fig. 2 shows the flow charts of the first exemplary embodiment according to the method for the present invention.

Fig. 3 a shows two-dimensional position table by way of example.

Fig. 3 b shows alternative two-dimensional position table by way of example.

Fig. 4 shows the flow chart of the second exemplary embodiment according to the method for the present invention.

Fig. 5 shows the specific manifestation form of two-dimensional position table.

Fig. 6 shows particle beam apparatus, can execute localization method using the device.

Fig. 7 shows the example for being embodied as the two-dimensional position table of graphic user interface.

Specific embodiment

Fig. 1 and Fig. 2 is related to the first exemplary implementation of the localization method according to the present invention that can be used for the preparation of TEM thin slice Example.

TEM thin slice is the micro- sample needed for checking in transmission electron microscope (TEM).At least in a part, TEM thin slice is too thin so that they can be passed through by electronics, allows to detect transmitted electron and generates for image.In general, TEM thin slice is prepared by entire sample material (i.e. sample block).In so-called lifting process, TEM thin slice separates simultaneously with sample block It is transferred on transfer frame.

Fig. 1 schematically shows the situation in the sample room of dual beam apparatus, wherein fixed during preparing TEM thin slice Position sample block 6 and transfer frame 2.

The sample block 6 including area of space that should be prepared as TEM thin slice is assembled on sample rack 5.Transfer frame 2 is held On another sample rack 3.The two sample racks 3,5 are all retained on displaceable sample objective table 4, and the sample objective table is preferably It is embodied as five axis objective tables.

Transfer frame 2 for receives from the isolated TEM thin slice of sample block 6 and holding make TEM thin slice can be used for further making With.For example, transfer frame 2 may be embodied as promoting grid.

The sample objective table 4 for being assembled with said elements thereon is located in the sample room of dual beam apparatus, which has Electron beam column 1 and ion beam column 7.In addition, dual beam apparatus includes storage equipment (not shown) and control equipment (not shown).It can be with Sample objective table 4 is moved using control equipment, to allow the element of sample objective table 4 and assembling to be on it displaced to pre-determined bit It sets.Therefore, it can be kept relative to the optical axis 8,9 of particle beam apparatus by mobile sample objective table 4, sample block 6 and transfer frame 2 In different positions.

Fig. 2 shows the flow charts of the first exemplary embodiment of localization method according to the present invention.Here, in step Sl In, the sample objective table of dual beam apparatus is mounted with sample block and transfer frame, and the first TEM thin slice should be obtained from the sample block.Tradition On, sample objective table includes the multiple containers equipment for sample rack.The sample rack for carrying sample block is assembled in one of appearance In device equipment.Transfer frame (in principle, being equally sample rack) be assembled in second container equipment, the first TEM thin slice be intended to from It is transferred on the transfer frame after sample block separation.

In step s 2, sample block is imaged by means of the scanning electron microscope function of dual beam apparatus.For this purpose, borrowing Help control equipment to position sample block, so that sample block is substantially aligned at right angle with the optical axis of electron beam column.This means that Electron beam hits sample surface with approximate right angle.Herein, it is advantageous to select working distance in a manner of obtaining good imaging characteristic From (z-height).

Then, the image selection based on sample is intended for preparing the sample area-of-interest (ROI) of the first TEM thin slice (step S3).It may be necessary in the x and y direction by sample shift, until sample area-of-interest (ROI) is placed in electron beam Under the object lens of column, so that sample area-of-interest (ROI) basis is desirably located in the visual field of electron beam column.

The current location of first sample region (ROI) is stored in next step S4.Here, the first data record is stored, First data record describes place and the spatial orientation in first sample region (ROI).Data record with information needed It can be shown in bivariate table by means of storing equipment.

The sample position in the first sample region (ROI) stored in step s 4 be advantageously defined as independent position and So storage.It can be with unrestricted choice independent position.During this method, then other sample positions can be distributed to this Independent position.In other words: other positions are linked to the independent position, so that the position distributed is considered being subordinated to the independence Position.Advantageously, label that is unique and characterizing, such as " facing SEM " are provided for data record, more held so that being further processed Easily.

In next step S5, transfer frame is imaged by scanning electron microscope.For this purpose, moving in the following manner Sample objective table, so that transfer frame is placed in below the object lens of electron beam column.

First sample receiving area is selected based on SEM image in step s 6, specifically in the promotion then implemented The region on transfer frame that first TEM thin slice should be transferred to.

The position of first receiving area is linked to the first sample position " in face of SEM " and is stored (step S7).Advantageously, The position saves together with suitable label (such as " being attached to grid to refer to "), and can be presented in bivariate table.Especially have Benefit, this is to realize in the following manner: so that the link becomes to identify from the arrangement in table.For example, if each other The data record of link is stored in not the going together of same row (as shown in Figure 3a), and wherein all fields in the column are all with first TEM thin slice is associated and the various sample positions of the first TEM thin slice of entry representation in these fields, then is such case.

If it is desire to, it now is possible to definition and the even other sample positions of storage.For this purpose, can approach and store manually Desired locations.Alternatively, can be determined by calculating operation and store other desired sample positions --- from their institute's chains The independent position connect starts.

If being intended to handle the 2nd TEM thin slice, to the 2nd TEM thin slice repetition methods step S2 to S8.

Finally, in step s 9, the sample position being stored in data record is called, so that passing through storage equipment and control Sample objective table is moved in the interaction of equipment.Realize that sample objective table is mobile as follows: so that sample areas shifts To and be maintained at position described in the data record of calling.Therefore, that is to say, that sample areas relative to microscopic system, It is orientated preferably relative to the optical axis of microscopic system using the predetermined area and predetermined space.

Therefore, the sample areas that will be located at any position is allowed to shift according to the method for the present invention, so that sample areas is moved Move another previously determined position.

Fig. 3 a and Fig. 3 b show the appearance in the bivariate table for wherein showing data record.Fig. 3 a shows the field of table 33, it 34,35,36 is arranged in 31,32 column and 37,38 rows.Give all field distributions of the 31st column to some sample, such as the One TEM thin slice (thin slice 1).The data record of each position of the sample is respectively stored in 37,38 rows of the 31st column.This meaning During preparing the first TEM thin slice sample be intended to use all sample positions data record be stored in the 31st column in.

Certainly, it is also contemplated that the size of table is inverted, as shown in Figure 3b.Here, the number of some sample (for example, thin slice 1) According to being arranged in the 39th row.The sample position for belonging to the sample is stored in each column 40,41.

The common ground of two variants of Fig. 3 a and Fig. 3 b is that data record is presented with matrix structure.Here particularly advantageous Be, by bivariate table arrangement come indicate, i.e. reproduce data record between relationship.Therefore, with list of locations on the contrary, can be with Save laborious tag.The relationship between data entry in each field 33,34,35,36 can with manual allocation or by It calculates and generates.

In the exemplary embodiment described in above and hereafter, in principle it is also contemplated that by initial data, i.e. about ground The data of point and spatial orientation are stored in the data record of description independent sample position.Storage is and the letter about the relationship Breath is implemented together, and subordinate position passes through the relational links to independent position.Therefore, that is to say, that initial data is to pass through management Logic storage.This is favourable, because only needing to store small data quantity.The subordinate sample position to be approached is calculated only to read Implement when data, i.e., when sample should be moved to some sample position.Therefore, the place about them of subordinate sample position and The precise information of spatial orientation is only " instant " to be determined.

In the another exemplary embodiment explained based on Fig. 4, according to the method for the present invention for preparing sample Sample is navigated in the sample room of dual beam apparatus when section.Preparing sample section can be a part of TEM thin slice preparation.

Sample section is the polished surface extended with sample surface at right angle.In order to generate section, generally by means of scanning Sample is initially imaged in electron microscope, wherein being intended to manufacture the region in section on setting sample.

For this purpose, sample is maintained at below the object lens of electro-optical column so that sample surface with electro-optical The optical axis of column is aligned at a generally normal anglely.For example, which is marked as " in face of SEM ".Then, using focus from Beamlet ablation (grinding) sample material, until exposing cross section.In the processing step, sample preferably must be held in ion- Below the object lens of optical column, specifically make sample surface with ion-optical column optical axis is at a generally normal angle is directed at (sample bit It sets: " in face of FIB ").

Advantageously, rotated sample is gone back in this process, so that the tilt axis of sample is parallel to the longitudinal extent pair in section Quasi- (sample position: " being rotated from face of FIB ").In principle (depending on sample geometry and used microscopic system Geometry), processing geometry may require sample and rotate in some way, so as to execute required processing step.

Collision between sample and microscopic system in order to prevent, it is usually desirable to sample is maintained at increased distance, Such as it is maintained at the object lens away from particle-optical device and increases at the distance of 1mm.For this purpose, its for meeting these standards can be defined His position (sample position: " facing FIB-1mm ").

As described above, using focused ion beam ablation sample material to generate section.However, due to the beam of focused ion beam The shape of profile, therefore the section generated does not extend with sample surface at right angle accurately largely.Therefore (condition is depended on), Sample is still tilted in a manner of slightly becoming apparent from or is distant, so that after ion beam may be carried out with the incidence angle of change Reason (sample position: " rotate to FIB and over-tilting ").This allows to generate the cross-sectional area for being aligned alignment at right angle with sample surface Domain.Finally, by sample be placed in can in scanning electron microscope pair cross-section be imaged position.It is advantageous herein that by sample 60 ° of angle (sample position: " facing SEM with 60 ° ") is tilted between the optical axis and section of electro-optical column.

Therefore, in the preparation process of section, optical axis and ion-optical column optical axis of the sample relative to electro-optical column It is moved successively to each different location and is maintained at these positions.Due to the geometrical condition of dual beam apparatus, exist in each case There are logical relations between each position of the position sequence, this can mathematically be formulated.For example, two Shu Zhuxiang For being arranged each other with certain angle alpha.It therefore, can be by means of since the first sample position for being defined as independent position Calculating operation determines other position and the other position is linked to first sample position.

For example, can choose " facing SEM ", (wherein sample is maintained in focal plane and SEM column optical axis Cheng Zhi for position Angle is without tilting) it is used as independent position.As shown in figure 4, sample is made to enter the position first in step S41, so as to It is imaged with SEM.Advantageously, implementing positioning while generating SEM record, so as to set the essence with monitor sample True position.

The position found in step S1 is stored as independent position by then (step S42).If position is presented on Two-dimensional Position It sets in table (such as Fig. 5), then may be especially user-friendly.

Subordinate position is calculated and stored in step S43, and it is for example saved line by line in bivariate table.Here, may be used " will face FIB ", position will be calculated as subordinate position, without thus manually close to the position.Electro-optical column and ion-light Column is learned relative to each other with fixed angle α arrangement, such as arrange with 54 ° of angle.In order to by sample from " face SEM " sample bit It sets and is moved to the position " in face of FIB ", sample has to be around tilt axis rotation angle [alpha].If it is known that and storing the position " in face of SEM " The site coordinate and space coordinate set can then calculate the site coordinate and space coordinate of the position " in face of FIB ".

Therefore, the sample position obtained needed for respective sample preparation can be calculated from the position of unrestricted choice.Herein, In principle, any sample position in position sequence can be set as independent position, because link is usually reversible.

In some cases, often it may be necessary or desirable to rotated sample before treatment.Here, it has been found that particularly advantageous It is that will deal with objects (coating) by means of microscope work software and be added in the SEM image of sample and based on the presentation To determine required rotation angle.

In step S44, the position of storage is called, so that place and spatial orientation of the sample shift to earlier set.

Fig. 5 shows the two-dimensional position table with sample position of second embodiment by way of example.Each sample bit It sets and is stored in table line by line.If being intended to generate multiple sections, which can design multiple column 51,52, wherein first row Each field definition and rule can in a similar manner other column field in use.

If the data record in bivariate table be it is editable, be particularly advantageous.It is then possible to record it is regular, this Sample is simplified to position and keep its more reliable.For example, it can recorde: only allowing close to by user's manual definition or can be complete Those complete calculated sample positions.It is also contemplated that user is pacified by definition rule to input between sample and object lens Full nargin.For example, this be by by sample and object lens in a z-direction at a distance from increase 1mm and implement.In addition, can think To formulating and store the rule of the relationship between each row or column.

Furthermore, it is possible to for example by preventing the position at right angle below the object lens of electro-optical column to be stored as " facing FIB " avoids storing obvious incorrect position.Damage risk when can avoid confusion in this way and reduce mobile sample.

Furthermore, it is possible to which setting sample objective table is shifted to move sample area-of-interest (ROI) in the form of rules Move the route along specific position.That is, setting displaced path.For example, this is by which mobile load of definition It object platform axis and is moved to which kind of degree and is sequentially moved to realize with what.

It is also contemplated that formulating operating parameter (such as the setting of the particle beams for defining sample position and particle beam apparatus Beam current) between relationship rule.

Finally, can also be by dependent on record rule in a manner of situation, so that being answered according to very specific processing step With these rules.For example, if over-tilting close to for polishing step position, must correctly select sample Rotation.But if rotation can be ignored in order to record control image close to identical position.

Furthermore, it is possible to provide correction option, the accuracy of positioning can be improved by means of the correction option.Since sample carries The displacement accuracy of object platform is limited, therefore it is generally desirable to users can check institute close position and if necessary manual school Just these positions.It is, therefore, possible to provide being override with the sample position after correction previous after such manual correction The position of storage.This can be with automatic implementation, such as by the beginning of process of lapping or deposition process starts to be triggered.Can also it think To the correction positioned by means of automatic drift correction.In this case, it can also be covered with the sample position after correction Write previously stored position.

Fig. 7 shows particularly advantageous embodiment, and wherein two-dimensional position table is implemented as graphic user interface 100.Here, It is conceivable, that implementing to operate by button 101,102,103,104,105, user can be executed such as by these buttons " generating data record (setting) " 101, " processing data record (editor) " 105, " approaches " storing data records (preservation) " 103 The order of sample position (going to) " 102 and " deleting data record (deletion) " 104.Other buttons can be provided.Particularly advantageous It is that opening user in starting " generating data record (setting) " 101 and/or " processing data record (editor) " 105 button can In the dialog box for wherein editing data record.For example, the row of bivariate table can be specified in setting or editing dialog frame Between relationship.For example, the relationship between the B row in Fig. 5 and C row may is that z (C)=z (B) -1mm, to ensure away from grain The distance of beamlet column increases 1mm.Furthermore, it is possible to specify other conditions, such as the item of A row and B row in Fig. 5 in dialog box Part.In this example, this may be: if the angle [alpha] between Shu Zhu is 54 °, according to T=54 °, B=A+ calculates center and inclines Gradient.

Various embodiments according to the method for the present invention can for example using dual beam apparatus (FIB-SEM combination unit) into Row；Fig. 6 shows dual beam apparatus 61 comprising two particle-beam columns, particularly for the electron beam column 63 for generating electron beam With the ion beam column 79 for generating focused ion beam.Two particles beams are all directed into the processing position on sample 74, at this Reason position is usually located at the coincidence point of the two particles beams.Sample 74 is maintained at displaceable sample by means of sample rack (not shown) On this objective table 75, and the sample is located in the sample room 62 of dual beam apparatus, usually deposits during operation in sample room In vacuum condition.

Sample objective table 75 is advantageously configured as five axis sample objective tables.This means that sample 74 can be in the direction x, y and z Upper movement (that is being moved on three orthogonal direction in spaces), and tilt axis and rotation axis can be surrounded Rotation.It is rotated around with the plane crossed over by optical axis 66,78 at the tilt axis that right angle extends (that is, perpendicular to plane of attached drawing) Allow to allow the surface (it is intended to be irradiated by charged particle) of sample using the different adjustable angles relative to optical axis 66,78 Degree.

During operation, primary electron is generated in electron source 64, the primary electron adds along the optical axis 66 of electron beam column 63 Speed is focused and modified by least one aperture diaphragm 68 by lens system 65,67.In addition, electron beam column 63 includes deflection system 69, primary electron beam can be guided on the surface of sample 74 by the deflection system.In addition, FIB-SEM combination unit 61 includes At least one detector 70, for detecting the interaction product of the interaction between the particle beams and sample 74.

In addition, dual beam apparatus 61 includes the ion beam column 79, deflection system 77 and focus lens element with ion source 80 76.The ion generated in ion source 80 along ion beam column 79 optical axis 78 accelerate and focus so that ion focusing be incident on sample In sheet 74 and it can be used for the material of ablation sample 74 and/or sample 74 be imaged.

Advantageously, particle beam apparatus also has gas injection system (GIS) 73.Gas injection system generally includes to be used for At least one reservoir of process gas, the process gas can be supplied to sample 74 via the pipeline that treatment site nearby terminates. Process gas may be embodied as precursor gases.Precursor gases are initially by ion beam or electron beam activation and therefore be converted into can Ablation sample material or at sample 74 deposition materials reactive form.For example, xenon difluoride (XeF can be supplied₂) Precursor gases, by activation be converted into reactive xenon difluoride, to etch sample material.By means of electron beam column 63 The treatment process of sample 74 can be simultaneously or sequentially observed with detector 70.

In addition, particle beam apparatus 62 includes control equipment 72 and storage equipment 71.It can be stored by means of storage equipment 71 Data record with processing description sample position and for according to the present invention positioning sample.As storage equipment 71 and control Interaction between equipment 72 as a result, sample objective table can be made to shift as follows: so that sample area-of-interest (ROI) it is moved to and is held in a predetermined position.

Control equipment 72 can be executed including the control command sequence in computer program.As the execution control command Sequence as a result, prompt particle beam apparatus 61 execute localization method according to the present invention.

Localization method according to the present invention be not limited to shown in exemplary microscope system.It is same to be seen it is conceivable, that working as It examines and/or handles and be intended to be checked using other microscopic systems (such as using optical microscopy or X-ray microscope) When sample, using according to the method for the present invention.

Particularly advantageously, using with the optics or Particle-optical system for defining optical axis and with for receiving The microscopic system of the removable sample objective table of sample executes according to the method for the present invention.

By means of sample objective table, the first area of sample can enter different positions relative to the optical axis of microscopic system Set (that is, place and spatial orientation).Equally, the second sample areas can be moved to different positions relative to optical axis.At every kind In the case of, the place and spatial orientation of first sample region and the second sample areas can be described by different data records. In addition, the control that microscopic system includes the movement of the storage equipment recorded for storing data and control sample objective table is set Standby, this movement is carried out by means of the data record of storage.In addition, the microscopic system includes the user with display equipment Interface can show information in the field of bivariate table on the display apparatus.

Here, the field in the first row or column of bivariate table is assigned to first sample region.It is put down in addition, bivariate table has At least one second column or row that row extends in the first column or row.Second area of the field distribution of secondary series or column to sample. Data record is distributed into field, the data record storage in a data storage device and correspond to sample areas relative to The different location of optical axis and/or spatial orientation.Therefore, in each case, by the position of sample areas (that is, place and space Orientation) distribute to the field of table.

Here, distribute to the field of the first row or column data record correspond to first sample region can be with relative to optical axis The place of use and spatial orientation.Distribute to the field of the second row or column data record correspond to the second sample areas relative to The position that optical axis can use.

Particularly advantageously, control equipment is implemented as follows, so that the position as described in the data record stored It can be approached by the input in user interface.It for example, can be by clicking or otherwise selecting in bivariate table Selected field move sample objective table.For this purpose, the data record for distributing to selected field will be used.Distribute to the sample of field One's respective area is moved, until it uses place and spatial orientation described in associated data record relative to optical axis.

In addition, it is conceivable, that since the sample position of first sample area-of-interest, by the conclusion of analogy come really Recognize and calculate the sample position of the second sample areas.For this purpose, user interface should be to be implemented as that storage can be assigned commands to Data record.Here, data record is respectively assigned to field, which is assigned to the first area or second of sample again Region.Here, control equipment can calculate and distribute the associated data record of the field for distributing to sample second area, Wherein calculated data record corresponds to the order for distributing to the field.Order is based on about first sample position and second The relationship knowledge of relationship between sample position, and the order is provided on how to move sample objective table to incite somebody to action Sample areas is moved to the information of the second sample position from first sample position.

When calculating data record, the data stored for distributing to the second sample areas, which are recorded in, is assigned to the secondth area It is contemplated in another field in domain.In addition, considering the data record of storage, the number of the storage when calculating data record The first area of sample is assigned to according to record, which is assigned to and should calculate and distribute the field quilt of data record It is assigned with the field of same commands.

In addition, it is conceivable, that the user interface of microscopic system is implemented as to distribute from the order of command list (CLIST) To the field for being assigned to first sample region and/or it is assigned to the field of the second sample areas.For this purpose, control equipment is with such as Under type is implemented, and allows to calculate associated data and records and assign them to selected field, the data record corresponds to Distribute to the order of selected field.When calculating the data record, the data record of storage, the data note of the storage are considered Another field for being assigned to sample same area is distributed in record.

List of numerals

1 electron beam column

2 transfer framves

3 first sample framves

4 sample objective tables

5 second sample racks

6 sample blocks

7 ion beam columns

The optical axis of 8 electron beam columns

The optical axis of 9 ion beam columns

S1 step 1

S2 step 2

S3 step 3

S4: step 4

S5: step 5

S6: step 6

S7: step 7

S8: step 8

S9: step 9

31 first rows

32 secondary series

33 first fields

34 second fields

35 third fields

36 the 4th fields

37 second rows

38 the first rows

39 rows

40 first rows

41 secondary series

S41 step 1

S42 step 2

S43 step 3

S44 step 4

51 first rows

52 secondary series

61 dual beam apparatus

62 sample room

63 electron beam columns

64 electron sources

65 first collector lens element systems

The optical axis of 66 electron beam columns

67 second condensing lens element systems

68 aperture diaphragms

69 deflection systems

70 detectors

71 storage equipment

72 control equipment

73 gas injection systems

74 sample blocks

75 sample objective tables

76 focus lens elements

77 deflection systems

The optical axis of 78 ions-optical column

79 ions-optical column

80 ion sources

100 graphic user interfaces

101 setting buttons (generating data record)

102 go to button (close to sample position)

103 save buttons (storing data record)

104 delete buttons (delete data record)

105 Edit buttons (editor's data record)