阅读说明：本技术 驱动装置 (Driving device ) 是由 莲尾健 于 2019-05-20 设计创作，主要内容包括：本发明提供一种驱动装置(1),能够抑制装置重量的增大并产生大的力,该驱动装置(1)具备：马达驱动部(MD),其能够利用伺服马达(30)的输出使可动部(20)向预定方向移动；气缸驱动部(AD),其能够利用气缸(40)的输出使可动部(20)向预定方向移动；以及控制部,其控制马达驱动部(MD)和气缸驱动部(AD),控制部利用气缸驱动部(AD)和马达驱动部(MD)使可动部(20)向预定方向移动。(The present invention provides a kind of driving device (1), it is able to suppress the increase of installation weight and generates big power, the driving device (1) has: motor driving part (MD), can make movable part (20) mobile to predetermined direction using the output of servo motor (30)；Cylinder driving portion (AD) can make movable part (20) mobile to predetermined direction using the output of cylinder (40)；And control unit, motor driving part (MD) and cylinder driving portion (AD) are controlled, control unit keeps movable part (20) mobile to predetermined direction using cylinder driving portion (AD) and motor driving part (MD).)

1. a kind of driving device, which is characterized in that have:

Motor driving part can make movable part mobile to predetermined direction using the output of servo motor；

Cylinder driving portion can make the movable part mobile to the predetermined direction using the output of cylinder；And

Control unit controls the motor driving part and the cylinder driving portion,

The control unit moves the movable part to the predetermined direction using the cylinder driving portion and the motor driving part It is dynamic.

2. driving device according to claim 1, which is characterized in that

The control unit is when keeping the movable part mobile to the predetermined direction, using the motor driving part to described movable Portion applies the power towards the predetermined direction, thus to by the cylinder driving portion to the movable part apply towards described pre- The power for determining direction is supplemented.

3. driving device according to claim 1, which is characterized in that

The control unit is when keeping the movable part mobile to the predetermined direction, using the motor driving part to described movable Portion applies towards the power with the predetermined direction opposite direction, thus offsets and is applied by the cylinder driving portion to the movable part The power towards the predetermined direction a part.

4. driving device described in any one of claim 1 to 3, which is characterized in that

The movable part is supported in pedestal sidepiece part in a manner of it can swing around axis of oscillation,

The motor driving part and the cylinder driving portion can make the movable part to the predetermined party for surrounding the axis of oscillation To swing.

Technical field

The present invention relates to driving devices.

Background technique

In the past, it is known that following device: making to move (example to predetermined direction as the lifting base of movable part using multiple cylinders Such as, referring to patent document 1.).

Additionally, it is known that following device: using servo motor driven movable part (for example, referring to patent document 2.).

Summary of the invention

Problems to be solved by the invention

The driving devices such as the direct acting device using servo motor driven can critically control the movement of movable part.However, In the case where needing keeps weight object mobile with high acceleration, large-scale deceleration mechanism, large-scale servo motor etc. are needed, therefore drive The weight of device becomes weight.In addition, amplifier of large-scale servo motor etc. is at high price, therefore use large-scale servo motor The manufacturing cost of driving device is got higher.

On the other hand, it even if cylinder includes its air control unit, is weighed compared with the combination of retarder with servo motor It measures also light.However, the control of the position of the movable part carried out by cylinder, speed and acceleration is carried out with by servo motor Control compared to inaccurate.

The present invention is made in view of aforementioned situation.The present invention one is designed to provide a kind of driving device, energy Enough inhibit the increase of installation weight and generates big power.

The solution to the problem

To solve the above-mentioned problems, the present invention uses following scheme.

The driving device of a scheme of the invention has: motor driving part, can be made using the output of servo motor Movable part is mobile to predetermined direction；Cylinder driving portion can make the movable part to the predetermined party using the output of cylinder To movement；And control unit, the motor driving part and the cylinder driving portion are controlled, the control unit uses the cylinder Driving portion and the motor driving part keep the movable part mobile to the predetermined direction.

In this scenario, control unit moves movable part to predetermined direction using both cylinder driving portion and motor driving part It is dynamic, therefore the size of the servo motor miniaturization cylinder driving portion of motor driving part can be made, it is suppressed that the increase of installation weight. In addition, the power that cylinder is big according to generations such as piston area, air pressures.Therefore, using the driving of cylinder driving portion and motor driving part Device can generate big power.

In this embodiment, it is preferable that the control unit is utilized when keeping the movable part mobile to the predetermined direction The motor driving part to the movable part apply towards the predetermined direction power, thus to by the cylinder driving portion to institute The power towards the predetermined direction for stating movable part application is supplemented.

In this scenario, driving device can generate big power, and can using the servo motor of motor drive Accurately carry out the control of the big power.

In this embodiment, it is preferable that when keeping the movable part mobile to the predetermined direction, driven using the motor Dynamic portion applies towards the power with the predetermined party in the opposite direction the movable part, thus offsets by the cylinder driving portion To a part for the power towards the predetermined direction that the movable part applies.

It is generally difficult to accurately switch the control for generating direction and size of the power of cylinder in a short time.In this embodiment party In formula, in the case where being continuously applied the power of predetermined direction to movable part using cylinder driving portion, motor driving part can be utilized Carry out deceleration, the stopping etc. of movable part.That is, driving device is by with cylinder driving portion, it is big so as to generate Power, and can accurately control the movement of movable part.

In this embodiment, it is preferable that the movable part is supported in pedestal in a manner of it can swing around axis of oscillation Sidepiece part, the motor driving part and the cylinder driving portion can make the movable part to around the predetermined of the axis of oscillation Direction is swung.

In this case, having used the driving device of cylinder driving portion and motor driving part also can generate for making movably The big power that portion is swung.

Invention effect

Inventive drive means are able to suppress the increase of installation weight and generate big power.

Detailed description of the invention

Fig. 1 is the main view of the driving device of first embodiment of the invention.

Fig. 2 is the block diagram of the control device of the driving device of first embodiment.

Fig. 3 is the timing diagram of an example of the movement for the driving device for showing first embodiment.

Fig. 4 is the figure for showing the example of the configuration of driving device of first embodiment.

Fig. 5 is the timing diagram for showing another example of the movement of driving device of first embodiment.

Fig. 6 is the main view of the driving device of second embodiment of the present invention.

Description of symbols

1,2 driving device

10 base components

11 slots

20 movable parts

21 tracks

30 servo motors

31 output shafts

32 pinion gears

33 rack gears

40 cylinders

41 main parts

41a, 41b suction and exhaust ports

42 output shafts

44 cylinder control units

50 control devices

51 control units

53 storage units

53a system program

53b operation program

60 pedestal sidepiece parts

70 movable parts

MD motor driving part

AD cylinder driving portion

Specific embodiment

Hereinafter, being illustrated using driving device 1 of the attached drawing to first embodiment of the invention.

As shown in Figure 1, the driving device 1 of present embodiment has base component 10 and movable part 20, base component 10 is in X There is length, movable part 20 is sliding block, and is installed on base portion in a manner of it can move along its length in axis direction On part 10.In Fig. 1, X-direction is horizontal direction, and Z-direction is vertical direction, and Y direction is and X-direction and Z axis side To orthogonal horizontal direction.In the present embodiment, driving device 1 is direct acting device.

Base component 10 is made of metal, rigid plastics etc., is formed on base component 10 and prolongs along its length direction The slot 11 stretched.

Movable part 20 is made of metal, rigid plastics etc., and track 21 is provided on movable part 20.Pass through track 21 and slot 11 Engaging, so that movable part 20 is supported on base component 10 in a manner of it can move along its length.

In addition, can be configured between track 21 and slot 11 by protecting to keep the sliding between track 21 and slot 11 smooth The steel ball that holder is kept.

It is fixed with servo motor 30 on movable part 20, pacifies on the output shaft 31 rotated by the output of servo motor 30 Equipped with pinion gear 32.Servo motor 30 is built-in with the working position detecting devices such as encoder, the detection of working position detecting device As a result it is sent to aftermentioned control device 50.Moreover, testing result control of the control device 50 using working position detecting device Servo motor 30 processed.

On the other hand, the rack gear 33 extended along its length, rack gear 33 and pinion gear 32 are fixed on base component 10 Engagement.With this configuration, movable part 20 is moved according to the work of servo motor 30.I.e. it is capable to make movable part 20 The motor driving part MD moved along the length direction of base component 10 has servo motor 30, pinion gear 32 and rack gear 33.This Outside, retarder can be set between servo motor 30 and output shaft 31.

In addition, being fixed with the main part 41 of cylinder 40 on base component 10, the front end of the output shaft 42 of cylinder 40 is fixed In on movable part 20.With this configuration, movable part 20 is moved along the length direction of base component 10 according to the work of cylinder 40. Two suction and exhaust ports 41a, 41b of main part 41 pass through air supply pipe 43 respectively and connect with cylinder control unit 44, cylinder control Device 44 processed is connect with air supply source (not shown).

In addition, well known solenoid valve is provided in cylinder control unit 44, by solenoid valve selectively to suction and discharge Mouth 41a and suction and exhaust ports 41b supplies air.I.e. it is capable to move movable part 20 along the length direction of base component 10 Cylinder driving portion AD have cylinder 40 and cylinder control unit 44.Cylinder driving portion AD also can have well known link mechanism Etc. other structures.

As shown in Fig. 2, control device 50 has: the control unit 51 with processor etc.；Display device 52；With non-volatile The storage unit 53 of property memory, ROM, RAM etc.；The input units such as keyboard, touch panel, operation panel 54；And it is connect for sending The transmission and reception unit 55 of the collection of letters number.Input unit 54 and transmission and reception unit 55 are functioned as input unit.Control device 50 to Servo motor 30 and cylinder control unit 44 send control signal, control it.

System program 53a is stored in storage unit 53, system program 53a undertakes the basic function of control device 50.In addition, Operation program 53b is stored in storage unit 53.Operation program 53b is control instruction group, in the movement using movable part 20 Servo motor 30 and cylinder control unit 44 are controlled when carrying out scheduled operation.

In the present embodiment, control unit 51 is based on operation program 53b to servo motor 30 and the hair of cylinder control unit 44 Control signal is sent, thus makes movable part 20 mobile relative to base component 10.For example, keeping movable part 20 mobile to the right side of Fig. 1 Movement and movable part 20 to the mobile movement in the left side of Fig. 1 alternately.

The control described below in the movement, carrying out movable part 20 when mobile by control unit 51 to the right side of Fig. 1 Example.In the following description, using towards the direction on the right side of Fig. 1 as predetermined direction, but can also will be towards the left side of Fig. 1 Direction as predetermined direction.

(example of control shown in the timing diagram of Fig. 3)

In the example in figure 3, make (to add movable part 20 movable part 20 to predetermined direction is mobile since time T1 Speed).In addition, it is mobile to predetermined direction to fix acceleration to make movable part 20 between time T2 and time T3.In addition, when Between between T3 and time T5, by being gradually reduced acceleration, movable part 20 is made to become the state mobile with fixed speed.Separately Outside, movable part 20 is made to reduce speed now from time T5.Moreover, adding movable part 20 with fixed between time T6 and time T7 Speed reduction.In addition, stopping movable part 20 in time T8.

When time T1 makes movable part 20 start mobile, control unit 51 since than time T1 earlier at the time of to cylinder The control of the cylinder control unit 44 of driving portion AD, cylinder 40 starts to apply movable part 20 power towards predetermined direction as a result,. In this example embodiment, it is become larger before and after time T1 by the power towards predetermined direction that cylinder 40 applies.

On the other hand, to the servo motor 30 of motor driving part MD control unit 51 is since than time T1 earlier at the time of Control, servo motor 30 starts the power for applying direction opposite to the predetermined direction to movable part 20 as a result,.In this example embodiment, by The power towards opposite direction that servo motor 30 applies becomes larger towards time T1.In this state, from cylinder 40 to movable Portion 20 applies the power towards predetermined direction, but applies the power towards opposite direction to movable part 20 from servo motor 30, as a result, may be used Dynamic portion 20 is static.

Then, in arrival time T1, control unit 51 is gradually reduced the power of the opposite direction applied by servo motor 30, And after power in the opposite direction becomes zero, start to apply movable part 20 power towards predetermined direction using servo motor 30. In this example embodiment, it is become larger by the power towards predetermined direction that servo motor 30 applies.

As a result, in time T1, by the power from cylinder 40, so that movable part 20 starts to predetermined direction movement.

Under the control, from than time T1 earlier at the time of, cylinder 40 starts to apply towards predetermined party movable part 20 To power, servo motor 30 start to movable part 20 apply towards opposite direction power.In addition, from time T1, by servo horse The power towards opposite direction applied up to 30 starts to reduce.In addition, servo motor 30 can also start to movable from time T1 The power of the application of portion 20 predetermined direction.By the control, at the time of movable part 20 can be made to move since it with big acceleration Degree or power steadily move.

When accelerating movable part 20 between time T2 and time T3, by cylinder 40 and servo motor 30 to movable part 20 Apply the power of predetermined direction.

Between time T3 and time T5, the shape towards the power of predetermined direction is being continuously applied to movable part 20 from cylinder 40 Under state, control unit 51 makes to be gradually reduced to what movable part 20 applied towards the power of predetermined direction from servo motor 30, and pre- Determine direction power become zero after, using servo motor 30 start to movable part 20 apply towards opposite direction power.In the example In, it is become larger by the power towards opposite direction that servo motor 30 applies.

Control due to changing the direction of the power of cylinder 40 is easy to happen delay, and above-mentioned control is conducive to make movable part 20 accurately carry out expected movement.

On the other hand, when movable part 20 being made to slow down between time T6 and time T7, cylinder 40 and servo motor 30 are utilized Apply the power of opposite direction to movable part 20.

When time T8 stops movable part 20, control unit 51 at the time of than time T8 earlier, from cylinder 40 to can Dynamic portion 20 is continuously applied towards in the state of the power of opposite direction, applies movable part 20 towards predetermined since servo motor 30 The power in direction.Moreover, control unit 51 makes to be gradually increased from power of the servo motor 30 to the predetermined direction that movable part 20 applies.By This in the state of applying movable part 20 towards the power of opposite direction from cylinder 40, stops movable part 20 in time T8. In the state that cylinder 40 applies the power of opposite direction to movable part 20, the control of cylinder 40 is stablized, and therefore, which is conducive to Accurately carry out the stopping control of movable part 20.

After time T8 process, control unit 51 makes the power applied from servo motor 30 and cylinder 40 to movable part 20 gradually Reduce.

(example of control shown in the timing diagram of Fig. 5)

As shown in figure 4, the one end of the slot 11 of base component 10 is higher than another side, there is slot 11 as a result, in upper and lower Acclivitous situation.In this case, using the control of the example of Fig. 5.

In the example of fig. 5, also make (to add movable part 20 movable part 20 to predetermined direction is mobile since time T1 Speed).In addition, it is mobile to predetermined direction to fix acceleration to make movable part 20 between time T2 and time T3.In addition, when Between between T3 and time T5, by gradually becoming smaller acceleration, so that movable part 20 becomes the state mobile with fixed speed.Separately Outside, since time T5 make movable part 20 slow down.Moreover, making movable part 20 with fixed between time T6 and time T7 Acceleration slows down.In addition, stopping movable part 20 in time T8.

When time T1 makes movable part 20 start mobile, control unit 51 since than time T1 earlier at the time of to cylinder The control of the cylinder control unit 44 of driving portion AD, thus cylinder 40 starts to apply movable part 20 power towards predetermined direction. In this example embodiment, the power towards predetermined direction applied by cylinder 40 is constant before and after time T1, or does not significantly change.

On the other hand, to the servo motor of motor driving part MD control unit 51 is since than time T1 earlier at the time of 30 control, thus servo motor 30 starts the power for applying direction opposite to the predetermined direction to movable part 20.In this example embodiment, by The power towards opposite direction that servo motor 30 applies is constant before time T1, or does not significantly change.

In this state, the power towards predetermined direction is applied to movable part 20 from cylinder 40, but from servo motor 30 to can Dynamic portion 20 applies the power towards opposite direction, and thus movable part 20 is static.In addition, before time T1, servo motor 30 can be with According to the inclined size of slot 11, the weight of movable part 20, the load applied to movable part 20 etc., movable part 20 is applied predetermined The power in direction.

Then, in arrival time T1, control unit 51 is gradually reduced the power of the opposite direction applied by servo motor 30, And after power in the opposite direction becomes zero, movable part 20 is started using servo motor 30 to apply the power towards predetermined direction. In this example embodiment, it is become larger by the power towards predetermined direction that servo motor 30 applies.

As a result, in time T1, start movable part 20 by the power from cylinder 40 mobile to predetermined direction.

In this control, from than time T1 earlier at the time of, cylinder 40 starts to apply towards predetermined party movable part 20 To power, servo motor 30 start to movable part 20 apply towards opposite direction power.In addition, from time T1, by servo horse The power towards opposite direction applied up to 30 starts to reduce.In addition, servo motor 30 can also start to movable from time T1 The power of the application of portion 20 predetermined direction.By the control, at the time of movable part 20 can be made to move since it with big acceleration Degree or power steadily move.

In the example in fig. 4, from a certain moment before time T1 to a certain moment after time T8, from cylinder 40 Power towards predetermined direction is continuously applied to movable part 20, the power towards predetermined direction applied by cylinder 40 is constant, or not It significantlys change.

In this state, when accelerating movable part 20, by servo motor 30 to movable The power of the application of portion 20 predetermined direction.

Between time T3 and time T5, the shape towards the power of predetermined direction is being continuously applied to movable part 20 from cylinder 40 Under state, control unit 51 makes to be gradually reduced to what movable part 20 applied towards the power of predetermined direction from servo motor 30, if from servo The power that motor 30 applies movable part 20 becomes smaller, then keeps the state.

On the other hand, when movable part 20 being made to slow down between time T6 and time T7, movable part 20 is being held from cylinder 40 It is continuous to apply towards in the state of the power of predetermined direction, apply the power of opposite direction to movable part 20 by servo motor 30.

When time T8 stops movable part 20, control unit 51 is being continuously applied towards predetermined movable part 20 from cylinder 40 In the state of the power in direction, it is gradually reduced the power towards opposite direction applied from servo motor 30 to movable part 20.In addition, control Portion 51 processed applies the power of following size to movable part 20 by servo motor 30: by movable part 20 weight and be applied to movable part The power for the opposite direction that 20 load applies movable part 20, with the power of the predetermined direction that movable part 20 is applied from cylinder 40 it Difference.As a result, in time T8, in the state of applying movable part 20 towards the power of predetermined direction from cylinder 40, make movable part 20 Stop.In the state that cylinder 40 applies the power of predetermined direction to movable part 20, the control of cylinder 40 is stablized, therefore, the control Be conducive to the stopping control for accurately carrying out movable part 20.

In this way, in the present embodiment, control unit 51 is made using both cylinder driving portion AD and motor driving part MD can Dynamic portion 20 is mobile to predetermined direction.Therefore, the servo motor 30 of motor driving part MD can be made to minimize cylinder driving portion AD's Size, it is suppressed that the increase of installation weight.In addition, the power that cylinder 40 is big according to generations such as piston area, air pressures.Therefore, it uses The driving device 1 of cylinder driving portion AD and motor driving part MD can generate big power.

Wherein, it is attached in servo motor 30 current amplifier (amplifier), but the roots such as the size of current amplifier, type Output according to servo motor 30 etc. and it is different.In addition, according to the size of current amplifier, type etc., required power supply device, control The differences such as software processed.Therefore, in order to use relatively large servo motor 30, large-scale current amplifier, power supply device are needed Deng, cause device enlargement and increased costs.In the present embodiment, due to being able to use more small-sized servo motor 30 and Generate big power, therefore, current amplifier, power supply device etc. be it is more small-sized, be able to suppress cost.

In addition, in the present embodiment, control unit 51 is driven when keeping movable part 20 mobile to predetermined direction using motor Portion MD applies the power towards predetermined direction to movable part 20, thus pre- to the direction that portion AD applies movable part 20 is driven by the cylinder The power for determining direction is supplemented.

Therefore, driving device 1 can generate big power, and can be quasi- by the servo motor 30 of motor drive MD Really carry out the control of the big power.

In addition, in the present embodiment, control unit 51 is driven when keeping movable part 20 mobile to predetermined direction using motor Portion MD applies the power towards direction opposite to the predetermined direction to movable part 20, thus offsets and is driven by the cylinder portion AD to movable part 20 A part of the power towards predetermined direction applied.

It is generally difficult to accurately switch the control for generating direction and size of the power of cylinder 40 in a short time.In this implementation In mode, in the case where being continuously applied the power of predetermined direction to movable part 20 using cylinder driving portion AD, motor can be utilized Deceleration, the stopping etc. of driving portion MD progress movable part 20.That is, driving device 1 is due to cylinder driving portion AD, thus Big power can be generated, and can accurately control the movement of movable part 20.

In addition, the connection status of base component 10 and movable part 20 is not limited to the example of Fig. 1, as long as movable part 20 can It is mobile to predetermined direction relative to base component 10.In addition, the structure of motor driving part MD and cylinder driving portion AD are not yet It is defined in the example of Fig. 1.As long as motor driving part MD can make movable part 20 to predetermined direction using the output of servo motor 30 Movement, as long as cylinder driving portion AD also can make movable part 20 mobile to predetermined direction using the output of cylinder 40.

Hereinafter, being illustrated using driving device 2 of the attached drawing to second embodiment of the present invention.

As shown in fig. 6, the driving device 2 of second embodiment has motor driving part MD and same as first embodiment Cylinder 40, motor driving part MD make the movable part 70 being supported in pedestal sidepiece part 60 around axis of oscillation 70a swing, cylinder The front end of 40 output shaft 42 is connect with movable part 70.

Pedestal sidepiece part 60 is, for example, the upper arm member of the most base end sides of robots such as vertical multi-joint robot, movable part 70 It is second the upper arm member from the base end side of robot.The one end of movable part 70 can swing twelve Earthly Branches around axis of oscillation 70a It supports in pedestal sidepiece part 60.In addition, movable part 70 is also possible to other the upper arm members of robot, in this case, pedestal side Part 60 is to be configured at the upper arm member that base side is more leaned on than movable part 70.

Motor driving part MD has servo motor 30, and servo motor 30 is fixed in pedestal sidepiece part 60.Pass through servo horse Up to 30 output and the output shaft that rotates is connect with movable part 70, movable part 70 surrounds axis of oscillation 70a by servo motor 30 It swings.

The base end part of the main part 41 of cylinder 40 is connect with pedestal sidepiece part 60, the front end of the output shaft 42 of cylinder 40 with The position of the separate axis of oscillation 70a of movable part 70 connects.In the example of fig. 6, the front end of output shaft 42 and movable part 70 One end connection.Main part 41 is connect in a manner of it can swing along the vertical direction with pedestal sidepiece part 60, output shaft 42 also with The mode that can be swung along the vertical direction is connect with movable part 70.With this configuration, so that for making movable part 70 according to cylinder 40 work and the power swung are applied to one end of movable part 70.

The driving device 2 of second embodiment also has control device 50 same as first embodiment, fills in control It sets in 50 storage unit 53 and is stored with system program 53a and operation program 53b.Operation program 53b is control instruction group, for controlling System control servo motor 30 and cylinder control unit 44, so that movable part 70 carries out scheduled movement.

In this second embodiment, control unit 51 is also made movably using both cylinder driving portion AD and motor driving part MD Portion 70 is mobile to predetermined direction (scheduled swaying direction or scheduled direction of rotation).Therefore, it can make motor driving part MD's The size of the miniaturization of servo motor 30 cylinder driving portion AD, it is suppressed that the increase of installation weight.In addition, cylinder 40 is according to piston area The big power of the generations such as product, air pressure.Therefore, having used the driving device 2 of cylinder driving portion AD and motor driving part MD can generate The bigger power of generated power individually than motor driving part MD.

In addition, in this second embodiment, also carrying out control as follows: when keeping movable part 70 mobile to predetermined direction, leading to It crosses motor driving part MD and power towards predetermined direction is applied to movable part 70, thus movable part 70 is applied to being driven by the cylinder portion AD The power towards predetermined direction added is supplemented.

Therefore, driving device 2 can generate big power, and can be quasi- by the servo motor 30 of motor drive MD Really carry out the control of the big power.

In addition, in this second embodiment, also carrying out control as follows: when keeping movable part 70 mobile to predetermined direction, benefit With motor driving part MD to the application of movable part 70 and the power towards predetermined direction opposite direction, thus offsets and be driven by the cylinder portion AD To a part for the power towards predetermined direction that movable part 70 applies.

It is generally difficult to accurately switch the control for generating direction and size of the power of cylinder 40 in a short time.It is real second It applies in mode, in the case where being continuously applied the power of predetermined direction to movable part 70 using cylinder driving portion AD, horse can be utilized Deceleration, the stopping etc. of movable part 70 are carried out up to driving portion MD.That is, driving device 2 is due to cylinder driving portion AD, from And big power can be generated, and can accurately control the movement of movable part 70.

In addition, pedestal sidepiece part 60 and the connection status of movable part 70 are not limited to the example of Fig. 6, as long as 70 phase of movable part Pedestal sidepiece part 60 can be swung or be rotated to predetermined direction.In addition, motor driving part MD and cylinder driving portion AD Structure be also not limited to the example of Fig. 6.As long as motor driving part MD can make movable part 70 using the output of servo motor 30 It is mobile to predetermined direction, as long as cylinder driving portion AD also can make movable part 70 to predetermined direction using the output of cylinder 40 Movement.