阅读说明：本技术 X射线分析装置和峰搜索方法 (X-ray analyzer and peak search method ) 是由 坂前浩 于 2021-04-09 设计创作，主要内容包括：本发明提供一种X射线分析装置和峰搜索方法,能够不使处理时间大幅增加地实现高精度的峰搜索。峰搜索处理包括以下步骤：步骤(S220),获取光谱的轮廓；步骤(S240),考虑测定值的统计上的变动来限定峰波长(峰强度)的真值能存在的波长范围；步骤(S250),在限定后的波长范围的长波长端、短波长端、以及这两端之间的中间波长处测定X射线的强度；步骤(S255),计算经过上述三个波长的各测定值的二次函数；以及步骤(S260),计算所计算出的二次函数的顶点的波长来作为峰波长。(The invention provides an X-ray analysis device and a peak search method, which can realize high-precision peak search without greatly increasing processing time. The peak search process includes the steps of: step (S220), acquiring the profile of the spectrum; a step (S240) of limiting a wavelength range in which a true value of a peak wavelength (peak intensity) can exist, in consideration of statistical variations in measurement values; a step (S250) of measuring the intensity of X-rays at a long wavelength end, a short wavelength end, and an intermediate wavelength therebetween of the defined wavelength range; a step (S255) of calculating a quadratic function of each measurement value passing through the three wavelengths; and a step (S260) of calculating the wavelength of the peak of the calculated quadratic function as the peak wavelength.)

1. An X-ray analysis apparatus includes:

a wavelength dispersion type spectrometer; and

a processing device configured to execute a peak search process of detecting a peak wavelength of a spectrum of the characteristic X-ray separated by using the spectrometer,

the peak search process includes:

a first process of measuring the characteristic X-ray at intervals shorter than a count time when measuring a peak intensity of the characteristic X-ray while operating the spectrometer so that a wavelength of the characteristic X-ray changes at predetermined intervals in steps, thereby acquiring a profile of the spectrum;

a second process of calculating a minimum value of values that a true value of the peak intensity can take, based on an intensity value of data indicating a maximum intensity in the acquired profile and a statistical variation of measurement values;

a third process of calculating a minimum measurement value that can be taken by the measurement value of the peak intensity from a statistical variation of the measurement value, when the true value of the peak intensity is the minimum value;

a fourth process of measuring the intensity of the characteristic X-ray with the count time at a long wavelength end, a short wavelength end, and an intermediate wavelength between the long wavelength end and the short wavelength end of a wavelength range in which a measurement value in the acquired profile is larger than the minimum measurement value;

fifth processing of calculating a quadratic function of each measurement value at the long wavelength end, the short wavelength end, and the intermediate wavelength; and

sixth processing of calculating a wavelength of a vertex of the calculated quadratic function as the peak wavelength.

2. The X-ray analysis apparatus according to claim 1,

the intermediate wavelength is a median of the wavelength range.

3. The X-ray analysis apparatus according to claim 1,

the processing means calculates the intensity of the vertex of the quadratic function as the peak intensity.

4. The X-ray analysis apparatus according to claim 1,

the processing device determines the peak intensity at the peak wavelength at the count time.

5. The X-ray analysis apparatus according to claim 1,

the processing device executes the first to third processes for a first measurement point when performing quantitative analysis on a plurality of measurement points on a sample,

the fourth process includes the following processes:

measuring the intensity of the characteristic X-ray at the long wavelength end for the plurality of measurement points successively in the count time;

measuring the intensity of the characteristic X-ray at the short wavelength end successively at the count time for the plurality of measurement points in sequence; and

measuring the intensity of the characteristic X-ray at the intermediate wavelength successively at the count time for the plurality of measurement points in sequence,

the fifth processing includes the following processing: calculating a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength for each of the plurality of measurement points,

the sixth process includes the following processes: the peak wavelength is calculated as a wavelength of a peak of the calculated quadratic function for each of the plurality of measurement points.

6. A peak search method for detecting a peak wavelength of a spectrum of characteristic X-rays separated using a wavelength dispersion type spectrometer, the peak search method comprising:

a first step of measuring the characteristic X-ray at intervals shorter than a count time when measuring a peak intensity of the characteristic X-ray while operating the spectrometer so that a wavelength of the characteristic X-ray changes at predetermined intervals in steps, thereby acquiring a profile of the spectrum;

a second step of calculating a minimum value of values that can be taken by a true value of the peak intensity from an intensity value of data indicating a maximum intensity in the acquired profile and a statistical variation of measurement values;

a third step of calculating a minimum measurement value that can be taken by the measurement value of the peak intensity from a statistical variation of the measurement value, when the true value of the peak intensity is assumed to be the minimum value;

a fourth step of measuring the intensity of the characteristic X-ray at the long wavelength end and the short wavelength end of a wavelength range in which a measurement value in the acquired profile is larger than the minimum measurement value, and at an intermediate wavelength between the long wavelength end and the short wavelength end, with the count time;

a fifth step of calculating a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength; and

a sixth step of calculating a wavelength of a vertex of the calculated quadratic function as the peak wavelength.

7. The peak search method according to claim 6,

the intermediate wavelength is a median of the wavelength range.

8. The peak search method according to claim 6,

the sixth step includes the steps of: the intensity of the vertex of the quadratic function is calculated as the peak intensity.

9. The peak search method according to claim 6,

the sixth step includes the steps of: the peak intensity was determined at the count time at the peak wavelength.

10. The peak search method according to claim 6,

in the case of performing quantitative analysis with respect to a plurality of measurement points on a specimen,

the fourth step includes the steps of:

measuring the intensity of the characteristic X-ray at the long wavelength end for the plurality of measurement points successively in the count time;

measuring the intensity of the characteristic X-ray at the short wavelength end successively at the count time for the plurality of measurement points in sequence; and

measuring the intensity of the characteristic X-ray at the intermediate wavelength successively at the count time for the plurality of measurement points in sequence,

the fifth step includes the steps of: calculating a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength for each of the plurality of measurement points,

the sixth step includes the steps of: the peak wavelength is calculated as a wavelength of a peak of the calculated quadratic function for each of the plurality of measurement points.

Technical Field

The present disclosure relates to an X-ray analysis apparatus and a peak search method.

Background

As an X-ray Analyzer such as an Electron Probe Microanalyzer (EPMA) and a fluorescent X-ray Analyzer, an apparatus equipped with a Wavelength Dispersive Spectrometer (WDS) is known.

Jp-a-8-31367 (patent document 1) discloses a peak search method that can accurately and easily obtain a wavelength (hereinafter, referred to as "peak wavelength", and an intensity at the peak wavelength as "peak intensity") at which the intensity (the number of characteristic X-rays obtained by a detector) in a spectrum of characteristic X-rays separated by a spectrometer is the maximum (see patent document 1).

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 8-31367

Disclosure of Invention

Problems to be solved by the invention

By accurately determining the peak wavelength from the profile of the spectrum of the characteristic X-ray (hereinafter, sometimes simply referred to as "profile") separated by the spectrometer, it is possible to improve the accuracy of "quantitative analysis" for measuring the concentration of an element contained in a sample, for example. In the quantitative analysis, in order to measure the concentration of a target element, after measuring the peak intensity using a standard sample whose concentration of the element is known, the peak intensity is measured under the same measurement conditions for a sample whose concentration of the element is unknown, and the concentration of the element in the sample is measured from the intensity ratio thereof.

The profile obtained by using the wavelength dispersion Spectrometer has a characteristic that a peak is steeper and is less likely to overlap with peaks of other characteristic X-rays than the profile obtained by using the Energy Dispersion Spectrometer (EDS), and is more likely to be affected by a shift in wavelength depending on reproducibility of mechanical operation (operation of goniometer) of the Spectrometer, a shift in wavelength depending on a chemical bonding state of an element, and the like. Therefore, in an X-ray analyzer including a wavelength dispersion spectrometer, it is general to perform "peak search" in which a spectral wavelength is scanned from the vicinity of a peak wavelength assumed by a target element and the peak wavelength is accurately determined from a profile obtained by performing the scanning to adjust the spectral wavelength.

In the peak search, the following scanning process is performed: the profile around the peak wavelength is acquired by measuring the characteristic X-ray at predetermined intervals while operating the spectrometer so that the wavelength of the characteristic X-ray to be detected changes at predetermined intervals. As an example, the scanning range is set to be about a few times (e.g., 3 times to 4 times) the half of the expected contour, approximately 40 points are marked in the scanning range, and 0.75 seconds of measurement is performed for each point, and scanning processing is performed for approximately 30 seconds in total.

Then, the wavelength to be a peak in the profile obtained by the scanning process is obtained, and after aligning the spectral wavelength with the wavelength, the intensity of the characteristic X-ray is measured for a count time of, for example, 10 seconds, thereby performing quantitative analysis.

However, the shape of the profile obtained in the peak search may be distorted by a statistical variation (deviation) in the measured X-ray intensity. When the shape of the contour is deformed, the peak wavelength may be erroneously determined. Further, when measurement is performed at a spectral wavelength that deviates from the true peak wavelength, an error occurs in the peak intensity, and an error occurs in the measurement result of the concentration.

Specifically, according to the above-described measurement conditions, the counting time for obtaining the peak intensity of the target characteristic X-ray in the quantitative analysis is 10 seconds, while the profile for obtaining the peak wavelength used in the quantitative analysis is obtained by the counting time of 0.75 seconds for each point. Even when the two are compared at a count rate (the count per unit time, which may be referred to as "cps") and the X-ray intensities are equal, the count numbers are different from each other, and therefore the two have different statistical variations.

Statistically, error in measured X-ray intensity(σ represents a standard deviation, and N represents a count). Therefore, when the count rate of the intensity of the target characteristic X-ray is 3000cps, the count number is 30000 counts when the count time is 10 seconds, and henceThe error of the measured X-ray intensity was 0.58% by count. On the other hand, when the count time is 0.75 seconds, the count number is 2250, and therefore, the termThe error of the measured X-ray intensity was 2.11% by count. That is, in this example, the statistical variation when the contour acquisition is performed is 3.65 times larger than that when the quantitative analysis is performed.

The statistical variation in the number of counts when performing the contour acquisition becomes a cause of deformation of the contour shape and hinders the accurate peak wavelength from being obtained. To eliminate this influence, it is conceivable to match the count time of each point in the peak search processing with the count time of the quantitative analysis. However, when the count time of each point in the peak search processing is set to, for example, 10 seconds, if the scan range of the peak search is 40 points, it takes 400 seconds as long to acquire the contour. Further, it is also conceivable to narrow the scanning range by an amount corresponding to the time for which the counting time is extended, but there is a possibility that the peak does not converge within the scanning range, resulting in failure of the peak search.

The present disclosure has been made to solve the above-described problems, and an object of the present disclosure is to provide an X-ray analyzer and a peak search method capable of realizing a high-precision peak search without greatly increasing a processing time.

Means for solving the problems

The X-ray analysis apparatus of the present disclosure includes: a wavelength dispersion type spectrometer; and a processing device configured to execute a peak search process of detecting a peak wavelength of a spectrum of the characteristic X-ray separated by the spectrometer. The peak search process includes first to sixth processes. In the first process, the spectrometer is operated so as to change the wavelength of the characteristic X-ray at predetermined intervals, and the characteristic X-ray is measured at intervals shorter than the counting time when the peak intensity of the characteristic X-ray is measured, thereby acquiring the profile of the spectrum. In the second process, the minimum value of values that the true value of the peak intensity can take is calculated from the intensity value of the data indicating the maximum intensity in the acquired contour and the statistical variation of the measured value. In the third process, when the true value of the peak intensity is the minimum value, the minimum measurement value that can be taken by the measurement value of the peak intensity is calculated from the statistical variation of the measurement value. In the fourth process, the intensity of the characteristic X-ray is measured at the long wavelength end and the short wavelength end of the wavelength range in which the measured value in the acquired profile is larger than the minimum measured value, and at the intermediate wavelength between the long wavelength end and the short wavelength end, with the count time. In the fifth process, a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength is calculated. In the sixth process, the wavelength of the vertex of the calculated quadratic function is calculated as the peak wavelength.

In addition, the peak search method of the present disclosure is for detecting a peak wavelength of a spectrum of characteristic X-rays separated using a wavelength dispersion type spectrometer, the peak search method including the first to sixth steps. In the first step, the spectrometer is operated so as to change the wavelength of the characteristic X-ray at predetermined intervals, and the characteristic X-ray is measured at intervals shorter than the counting time when the peak intensity of the characteristic X-ray is measured, thereby acquiring the profile of the spectrum. In the second step, the minimum value of values that the true value of the peak intensity can take is calculated from the intensity value of the data indicating the maximum intensity in the acquired contour and the statistical variation of the measured value. In the third step, when the true value of the peak intensity is the minimum value, the minimum measurement value that can be taken by the measurement value of the peak intensity is calculated from the statistical variation of the measurement value. In the fourth step, the intensity of the characteristic X-ray is measured at the long wavelength end and the short wavelength end of the wavelength range in which the measured value in the acquired profile is larger than the minimum measured value, and at the intermediate wavelength between the long wavelength end and the short wavelength end, with the count time. In the fifth step, a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength is calculated. In the sixth step, the wavelength of the vertex of the calculated quadratic function is calculated as the peak wavelength.

ADVANTAGEOUS EFFECTS OF INVENTION

In the X-ray analysis apparatus and the peak search method described above, the wavelength range in which the true value of the peak intensity can exist is limited in consideration of the statistical variation of the measured values. This makes it possible to appropriately limit the wavelength range in which the true value of the peak intensity can exist, taking into account the statistical variation in the measured value. The intensities of characteristic X-rays are measured at the long wavelength end and the short wavelength end of the limited wavelength range and at intermediate wavelengths between the long wavelength end and the short wavelength end, and the peak wavelength is calculated from a quadratic function passing through each measurement point. This makes it possible to realize a high-precision peak search without significantly increasing the processing time.

Drawings

Fig. 1 is a diagram showing an overall configuration of an EPMA as an example of an X-ray analysis apparatus according to embodiment 1.

Fig. 2 is a diagram showing an example of a profile of a characteristic X-ray.

Fig. 3 is a diagram illustrating an idea of limiting a wavelength range in which a true value of the peak wavelength can exist.

Fig. 4 is a diagram illustrating a calculation method of peak wavelength and peak intensity.

Fig. 5 is a flowchart showing an example of a procedure of quantitative analysis using the EPMA according to embodiment 1.

Fig. 6 is a flowchart showing an example of the procedure of the measurement processing executed in step S20 and step S40 in fig. 5.

Fig. 7 is a flowchart showing an example of a procedure of the peak search processing executed in step S150 in fig. 6.

Fig. 8 is a plan view showing an example of a sample in which a plurality of measurement points are set.

Fig. 9 is a flowchart showing an example of the procedure of the peak search processing in embodiment 2.

Fig. 10 is a flowchart showing an example of a procedure of the long wavelength side process executed in step S320 of fig. 9.

Fig. 11 is a flowchart showing an example of the procedure of the intermediate wavelength processing executed in step S330 in fig. 9.

Fig. 12 is a flowchart showing an example of a procedure of the short-wavelength-side processing executed in step S340 in fig. 9.

Fig. 13 is a flowchart showing an example of the procedure of the peak intensity calculation process executed in step S350 in fig. 9.

Description of the reference numerals

1: an electron gun; 2: a deflection yoke; 3: an objective lens; 4: a sample stage; 5: a sample stage driving section; 6a, 6 b: a spectrometer; 10: a control unit; 11: a data processing unit; 12: a deflection coil control unit; 13: an operation section; 14: a display unit; 20: a CPU; 22: a memory; 61a, 61 b: a spectrum crystal; 63a, 63 b: a detector; 64a, 64 b: a slit; 100: EPMA; s: and (4) sampling.

Detailed Description

Embodiments of the present disclosure are described below in detail with reference to the drawings. In the drawings, the same or corresponding portions are denoted by the same reference numerals, and description thereof will not be repeated.

[ embodiment 1]

< construction of X-ray analysis apparatus >

Fig. 1 is an overall configuration diagram of an EPMA as an example of an X-ray analysis apparatus according to an embodiment of the present disclosure. The X-ray analyzer of the present disclosure is not limited to the EPMA that irradiates the sample with the electron beam, and may be a fluorescence X-ray analyzer that irradiates the sample with the X-ray and disperses the characteristic X-ray by WDS.

Referring to fig. 1, EPMA 100 includes an electron gun 1, a deflection yoke 2, an objective lens 3, a sample stage 4, a sample stage driving unit 5, and a plurality of spectrometers 6a and 6 b. The EPMA 100 further includes a control unit 10, a data processing unit 11, a deflection coil control unit 12, an operation unit 13, and a display unit 14. The electron gun 1, the deflection yoke 2, the objective lens 3, the sample stage 4, and the spectrometers 6a and 6b are disposed in a measurement chamber, not shown, and the measurement chamber is evacuated to a vacuum state during the measurement of the X-rays.

The electron gun 1 is an excitation source for generating an electron beam E to be irradiated to the sample S on the sample stage 4, and can adjust the beam current of the electron beam E by controlling a condenser lens (not shown). The deflection yoke 2 forms a magnetic field by a drive current supplied from the deflection yoke control unit 12. The electron beam E can be deflected by a magnetic field formed by the deflection coils 2.

The objective lens 3 is provided between the deflection yoke 2 and the sample S placed on the sample stage 4, and defines the electron beam E passing through the deflection yoke 2 to a small diameter. The electron gun 1, the deflection yoke 2, and the objective lens 3 constitute an irradiation device that irradiates an electron beam toward a sample. The sample stage 4 is a table on which the sample S is placed, and is configured to be movable in a horizontal plane by a sample stage driving unit 5.

By specifying the sample stage 4 by the sample stage driving unit 5 and/or driving the deflection coil 2 by the deflection coil control unit 12, the irradiation position of the specimen S on which the electron beam E is irradiated can be scanned two-dimensionally. When the scanning range is relatively narrow, scanning is performed by the deflection coil 2, and when the scanning range is relatively wide, scanning is performed by moving the sample stage 4.

The spectrometers 6a and 6b are devices for detecting characteristic X-rays emitted from the sample S irradiated with the electron beam E. In this example, two spectrometers 6a and 6b are shown, but the number of spectrometers is not limited to this, and may be one spectrometer, or may be three or more spectrometers. The structures of the spectrometers other than the spectroscopic crystal are the same, and hereinafter, each spectrometer is sometimes simply referred to as "spectrometer 6".

The spectrometer 6a is configured to include a spectroscopic crystal 61a, a detector 63a, and a slit 64 a. The irradiation position of the sample S with the electron beam E, the spectroscopic crystal 61a, and the detector 63a are located on a rowland circle, not shown. The spectral crystal 61a is tilted while being moved on the straight line 62a by a drive mechanism, not shown, and the detector 63a is rotated as shown in the drawing in response to the movement of the spectral crystal 61a so that the incident angle of the characteristic X-ray with respect to the spectral crystal 61a and the exit angle of the diffracted X-ray satisfy the bragg diffraction condition. This enables wavelength scanning of the characteristic X-rays emitted from the sample S.

The spectrometer 6b is configured to include a spectroscopic crystal 61b, a detector 63b, and a slit 64 b. The structure of the spectrometer 6b other than the spectroscopic crystal is the same as that of the spectrometer 6a, and therefore, description thereof will not be repeated. The structure of each spectrometer is not limited to the above-described one, and various known structures can be employed.

The control Unit 10 includes a CPU (Central Processing Unit) 20, a Memory (ROM (Read Only Memory) and RAM (Random Access Memory)) 22, and an input/output buffer (not shown) for inputting and outputting various signals. The CPU loads the program stored in the ROM into the RAM or the like and executes the program. The program stored in the ROM is a program in which a processing procedure of the control unit 10 is recorded. The ROM also stores various tables (diagrams) used for various calculations. The control unit 10 executes various processes in the EPMA 100 according to the programs and the tables. The processing is not limited to being executed by software, and may be executed by dedicated hardware (electronic circuit).

The data processing unit 11 is also configured to include a CPU, a memory (ROM and RAM), and an input/output buffer (neither shown) for inputting and outputting various signals. The data processing unit 11 creates an X-ray spectrum of the analysis target, and performs qualitative analysis based on the X-ray spectrum. The data processing unit 11 also performs peak search of a standard sample and an unknown sample containing an element to be measured by a characteristic X-ray corresponding to the element, and performs quantitative analysis based on the peak search. The data processing unit 11 may be integrated with the control unit 10.

The deflection coil control unit 12 controls the drive current supplied to the deflection coil 2 in accordance with an instruction from the control unit 10. By controlling the drive current in accordance with a predetermined drive current pattern (magnitude and changing speed), the irradiation position of the specimen S on which the electron beam E is irradiated can be scanned at a desired scanning speed.

The operation unit 13 is an input device for giving various instructions to the EPMA 100 by an analyst, and is configured by, for example, a mouse, a keyboard, and the like. The display unit 14 is an output device for providing various information to the analyst, and is configured by, for example, a display including a touch panel that can be operated by the analyst. The touch panel may be the operation unit 13.

< method of quantitative analysis >

In quantitative analysis, the concentration of a target element (hereinafter referred to as "target element") in a sample is measured. In the quantitative analysis, in order to measure the concentration of an object element, after measuring the intensity ("peak intensity") at the peak position (peak wavelength) of a characteristic X-ray corresponding to the object element using a standard sample whose concentration of the object element is known, the peak intensity is measured under the same measurement conditions for a sample whose concentration of the object element is unknown, and the concentration of the object element in the sample is measured from the intensity ratio thereof.

Therefore, by accurately obtaining the peak wavelength of the characteristic X-ray corresponding to the target element for each of the standard sample and the unknown sample, the accuracy of the quantitative analysis can be improved. In an X-ray analyzer including a wavelength dispersion spectrometer, the following "peak search" is performed: the spectral wavelength is scanned in the vicinity of the peak wavelength assumed from the target element, and the peak wavelength is accurately determined from the profile obtained by the scanning.

Fig. 2 is a diagram showing an example of a measured characteristic X-ray profile. In fig. 2, the horizontal axis represents the wavelength (spectrum wavelength) of the detected characteristic X-ray, and the vertical axis represents the signal intensity (number of counts in the case where the count time is 0.375 seconds) of the detected characteristic X-ray.

Referring to fig. 2, qualitatively, the profile has a shape of an approximately normal distribution. The points on the contour represent the measured values. That is, the following scanning processing is performed in the peak search: the profile as shown in the drawing is obtained by measuring the characteristic X-rays at predetermined time intervals while operating the spectrometer so that the wavelength of the detected characteristic X-rays changes at predetermined interval steps.

In this example, the scanning range is set to be about a few times (e.g., 3 times to 4 times) the half of the contour expected from the previous data or the like, approximately 40 points are marked in the scanning range, each point is measured for 0.375 seconds one by one, and the scanning process is performed for about 15 seconds in total.

From the viewpoint of shortening the processing time, since the counting time of each point is as short as 0.375 second, each measurement value (intensity) forming the contour includes a statistical variation (error). Therefore, as shown in the drawing, the shape of the obtained contour is deformed. When the shape of the contour is deformed, the peak wavelength may be erroneously determined. Further, when measurement is performed at a spectral wavelength that deviates from the true peak wavelength, an error occurs in the peak intensity, and an error occurs in the measurement result of the concentration.

Therefore, in embodiment 1, the wavelength range in which the true value of the peak intensity can exist is limited in consideration of the statistical variation of the measured values. This makes it possible to appropriately limit the wavelength range in which the true value of the peak intensity can exist, taking into account the statistical variation of the measured values. Then, the intensity of the characteristic X-ray is measured at the long wavelength end, the short wavelength end, and the intermediate wavelength (for example, the median) between the long wavelength end and the short wavelength end of the limited wavelength range, and the peak wavelength is calculated from the quadratic function passing through each measurement point. This makes it possible to realize a high-precision peak search without significantly increasing the processing time. Next, the peak search method of embodiment 1 will be described in detail.

Fig. 3 is a diagram illustrating an idea of defining a wavelength range in which a true value of the peak wavelength can exist. Fig. 3 shows the same profile data as fig. 2.

Referring to fig. 3, in EPMA 100 according to embodiment 1, a wavelength range in which a true value of the peak intensity can exist is determined from the maximum intensity Ymax of the acquired profile, taking into account the statistical variation of the measured values.

When the true peak intensity is I, the maximum intensity Ymax is considered to be within the error range of the statistical variation of the measured value of the intensity I. That is, when the statistical variation is considered to be 3 σ, the maximum intensity Ymax can be in the following range with respect to the true peak intensity I.

Therefore, the minimum value Imin that the true peak intensity I can take with respect to the maximum intensity Ymax can be obtained as a value satisfying the following expression.

When the true peak intensity I is Imin, the measurement also needs to take account of statistical variations, and therefore the minimum value Ylow (minimum measurement value) of the intensity that can be measured when the true peak intensity I is Imin is expressed by the following equation.

As described above, in the acquired profile, there is a possibility that a point (black point) included in a wavelength range having an intensity larger than Ylow is a result of measuring the true peak intensity I. In other words, the range in which the true peak intensity I can exist can be limited to a wavelength range in which the intensity is larger than Ylow.

Next, a method of calculating the peak wavelength and the peak intensity after limiting the wavelength range in which the true peak intensity can exist will be described.

Fig. 4 is a diagram illustrating a calculation method of peak wavelength and peak intensity. In fig. 4, since the display of the measurement values having different counting times is aligned, the contour data shown in fig. 2 and 3 is converted into the number of counts counted every 10 seconds and displayed.

Referring to fig. 4, in EPMA 100 according to embodiment 1, the intensity is measured at both ends (long wavelength end and short wavelength end) of the wavelength range (fig. 3) in which the true peak intensity can exist and at the intermediate wavelength between the both ends for the same counting time (10 seconds) as the counting time (10 seconds) when the peak intensity is measured. Actually, since the wavelength is measured discretely, the intensity is measured at one point of the long wavelength side point, the short wavelength side point, and the point between the long wavelength side point and the short wavelength side point in the above wavelength range (points B1 to B3).

In this example, the intermediate wavelength is a median between a long wavelength end and a short wavelength end of the wavelength range (actually, a median between a wavelength of a point on a long wavelength end side and a wavelength of a point on a short wavelength end side). Then, a quadratic function L2 was calculated through the three measured values (points B1 to B3).

y＝ax²+bx+c…(4)

Here, X and y are the spectral wavelength and the signal intensity of X-rays, respectively, and a, b, and c are coefficients.

Next, the peak position (wavelength) λ p of the calculated quadratic function L2 and the intensity Ip at the peak position λ p are calculated by the following equation.

λp＝-b/(2a)，Ip＝c-b²/(4a)…(5)

In the drawing, a point C shown by a diamond mark represents a peak of the calculated quadratic function L2. In embodiment 1, the peak position (wavelength) λ p of the quadratic function L2 is defined as a peak wavelength, and the intensity Ip at the peak position (wavelength) λ p is defined as a peak intensity.

When the count rate of the intensity of the target characteristic X-ray is 3000cps, the count amount in the vicinity of the peak is about 30000 counts when the count time is 10 seconds, and hence the X-ray detector is based on the principle thatThe error of the measured X-ray intensity was 0.58% by count. Therefore, it can be expected that the peak intensities calculated from the quadratic functions of three points (long wavelength end, short wavelength end, intermediate wavelength) passing near the peak are also accurate to the same extent. In addition, the total of the measurement times used in the method is 45 seconds in total, because it takes 15 seconds to obtain the contour at 0.375 seconds × 40 points, and 30 seconds to measure the intensities at three points near the peak at 10 seconds × 3 points.

On the other hand, according to a typical conventional method, the acquisition of the contour requires 30 seconds, which is 0.75 seconds × 40 points, and the measurement of the peak intensity requires 10 seconds, which requires 40 seconds in total. The detection of the peak wavelength is performed based on the above profile, and the intensity of the peak in this case is about 2250 counts, and therefore, based on the above profileThe error of the measured X-ray intensity was 2.11% by count. This error causes an error in the peak wavelength, and therefore the measurement result of the peak intensity has an error (2.11%) that is about the same as that in the case of obtaining the profile.

As described above, according to embodiment 1, it is possible to realize a peak search with high accuracy in the same total measurement time as compared with the typical conventional method described above.

Further, in the drawing, a point D shown with a + sign represents an actual measurement result of the intensity of the characteristic X-ray at the calculated peak wavelength λ p. As shown in the figure, the intensity Ip of the peak of the quadratic function L2 and the actual measurement result of the intensity at the peak wavelength λ p show the same value, and it is understood that the peak intensity can be calculated with high accuracy also by the quadratic function L2.

Fig. 5 is a flowchart showing an example of a procedure of quantitative analysis using the EPMA 100 according to embodiment 1. Referring to fig. 5, first, the composition conditions (the weight percentage of the target element in the standard sample, etc.) of the standard sample whose composition is known are input (step S10). The composition condition may be input from the operation unit 13 by the user, or may be stored in advance in a memory based on the result of a previous evaluation test or the like.

Next, the data processing unit 11 performs a standard sample measurement process of measuring characteristic X-rays corresponding to the target element on the standard sample to which the composition condition is input (step S20). The details of the measurement processing performed here are explained in detail later.

In the standard sample measurement processing of step S20, the peak intensity of the characteristic X-ray corresponding to the object element is measured for the standard sample. Then, the data processing section 11 corrects the measured intensity of the characteristic X-ray in consideration of the composition condition input in step S10, thereby calculating a standard sensitivity with respect to the object element (step S30).

Next, the data processing unit 11 performs a target sample measurement process of measuring characteristic X-rays corresponding to the target element on an unknown sample (hereinafter, referred to as a "target sample") including the target element (step S40). The procedure of the measurement process performed here is the same as the standard sample measurement process of step S20, and will be described in detail later.

In the target sample measurement processing of step S40, the peak intensity of the characteristic X-ray corresponding to the target element is measured for the target sample. Next, the data processing unit 11 calculates the ratio (intensity ratio) between the peak intensity calculated for the target sample in step S40 and the peak intensity calculated for the standard sample in step S20 (step S50). Then, the data processing unit 11 calculates the concentration of the target element in the target sample from the intensity ratio calculated in step S50 (step S60).

Fig. 6 is a flowchart showing an example of the procedure of the measurement processing executed in step S20 and step S40 in fig. 5. Referring to fig. 6, first, an analysis position on the sample is set (step S110). Next, irradiation conditions for irradiating the electron beam with the irradiation device (the electron gun 1, the deflection yoke 2, and the objective lens 3) are set (step S120). Here, the irradiation conditions in the standard sample measurement processing of step S20 in fig. 5 and the irradiation conditions in the target sample measurement processing of step S40 are set to the same conditions.

Next, the object element is specified (step S130). The user can specify the object element from the operation unit 13, and can also specify a plurality of object elements. After the target element is specified, the data processing portion 11 sets a range of peak positions (wavelengths) of the characteristic X-rays corresponding to the specified target element, and sets a spectral crystal suitable for the target element (the wavelength of the characteristic X-rays corresponding to the target element) (step S140). Further, the relationship of the element with the range of peak positions (wavelengths) of the characteristic X-rays and the relationship of the element (wavelength of the characteristic X-ray corresponding to the element) with the spectral crystal are determined in advance and stored in the memory.

Then, when the above various settings are completed, the data processing section 11 executes a peak search process (step S150).

Fig. 7 is a flowchart showing an example of a procedure of the peak search processing executed in step S150 in fig. 6. Referring to fig. 3, 4, and 7, the data processing unit 11 sets a range in which the contour is acquired by the scanning process (step S210). This range can be set to, for example, about a half of the contour expected from the previous data or the like.

Next, the data processing unit 11 determines the measurement wavelength and the measurement condition of the scanning process (step S215). In this example, the measurement wavelength (spectral wavelength) is determined so that 40 points are marked in the scanning range set in step S210, and the measurement time at each wavelength is set to 0.375 second. Then, the data processing section 11 executes the following contour acquisition processing: a scanning process is performed in accordance with the set measurement wavelength and measurement condition, thereby acquiring a profile (step S220).

After acquiring the contour, the data processing unit 11 detects the maximum intensity Ymax in the acquired contour (step S225). Specifically, the data processing unit 11 detects the data having the maximum intensity among the measurement values at 40 points as the maximum intensity Ymax.

Next, the data processing unit 11 calculates a minimum value Imin that the true peak intensity I can take with respect to the maximum intensity Ymax using the above expression (2) (step S230). Then, the data processing unit 11 calculates the minimum value Ylow (minimum measurement value) of the intensity that can be measured when the true peak intensity I is Imin, using the above equation (3) (step S235).

After calculating the minimum measurement value Ylow, the data processing unit 11 extracts a point (a point satisfying Y > Ylow) where the measurement value Y of the intensity is larger than the minimum value Ylow from the contour acquired in step S220 (step S240). That is, the wavelength range in which the true peak intensity I can exist is defined based on the minimum measurement value Ylow.

Next, the data processing unit 11 calculates the median (intermediate wavelength) of the wavelength range defined in step S240 (step S245). In addition, a median between the wavelength of the point on the long wavelength side and the wavelength of the point on the short wavelength side in the wavelength range is actually calculated.

Hereinafter, a series of processes (steps S210 to S245) for determining a wavelength range in which the true peak intensity I can exist and obtaining an intermediate wavelength included in the wavelength range will be referred to as "wavelength extraction process".

Next, the data processing unit 11 sets the measurement wavelength and the measurement conditions such that the intensity is measured at the long wavelength end, the short wavelength end, and the intermediate wavelength of the wavelength range defined in step S240 in the same count time (10 seconds) as the peak intensity is measured. Then, the intensities are measured at the three wavelengths in accordance with the set measurement wavelength and measurement condition (step S250).

Next, the data processing unit 11 calculates a quadratic function of the three measurement values obtained by measuring the intensity in step S250 using the above equation (4) (step S255). Then, the data processing unit 11 calculates the wavelength λ p at the vertex of the calculated quadratic function and the intensity Ip at the wavelength λ p using the above equation (5) (step S260). In embodiment 1, the wavelength λ p calculated here is defined as a peak wavelength, and the intensity Ip at the wavelength λ p is defined as a peak intensity.

In this example, after the wavelength λ p and the intensity Ip at the vertex of the quadratic function are calculated in step S260, the intensity is measured under the measurement condition (count time 10 seconds) of step S250 at the calculated wavelength λ p (peak wavelength) (step S265). The processing of step S265 is not essential, but instead of the peak intensity calculated in step S260, the intensity measured in step S265 may be set as the peak intensity. Further, in this case, the total measurement time is extended by the time (10 seconds in the above example) at which the intensity at the peak wavelength is actually measured.

In the above, the intermediate wavelength between both ends (long wavelength end and short wavelength end) of the wavelength range in which the true peak intensity can exist is set as the center value of the wavelength range, but the intermediate wavelength is not limited to the center value of the wavelength range. For example, the intermediate wavelength may be a wavelength of the maximum intensity Ymax.

As described above, in embodiment 1, the wavelength range in which the true value of the peak intensity can exist is limited in consideration of the statistical variation of the measured values. This makes it possible to appropriately limit the wavelength range in which the true value of the peak intensity can exist, taking into account the statistical variation in the measured value. Then, the intensity of the characteristic X-ray is measured at the long wavelength end, the short wavelength end, and the median (intermediate wavelength) between the long wavelength end and the short wavelength end of the limited wavelength range, and the peak wavelength is calculated from the quadratic function L2 passing through each measurement point. With this method, it is possible to realize a high-precision peak search without significantly increasing the processing time.

[ embodiment 2]

Quantitative analysis is sometimes performed for a plurality of points on a sample. Fig. 8 is a plan view showing an example of a sample in which a plurality of measurement points are set. Referring to fig. 8, points P (1) to P (9) on the sample S are measurement points for quantitative analysis. Next, embodiment 2 will be described by taking this sample S as an example.

In the case of performing quantitative analysis for a plurality of measurement points P (1) to P (9), it takes time and is inefficient to perform peak search for each measurement point and to perform intensity measurement at the detected peak wavelength. Therefore, it is considered that the spectral wavelength is set for each measurement point as the peak wavelength obtained for the standard sample or the peak wavelength obtained for the first measurement point (for example, P (1)) of the unknown sample, and quantitative analysis is performed for each of the measurement points P (1) to P (9). However, such a method is affected by a wavelength shift depending on reproducibility of mechanical operation of the spectrometer, a wavelength shift depending on a chemical bonding state of an element, and the like, and a measurement error may become large.

As a method for more efficiently performing quantitative analysis of a plurality of points, the following methods are also considered: after the spectral wavelength is set to the target wavelength, the measurement points P (1) to P (9) are sequentially changed to measure the intensity, thereby eliminating the time required to change the spectral wavelength for each measurement point. However, although this method can avoid the influence of a wavelength shift depending on the reproducibility of the mechanical operation of the spectrometer, it cannot avoid the influence of an error due to the inaccuracy of the peak wavelength obtained by the peak search and a wavelength shift depending on the chemical bonding state of the element.

Therefore, in embodiment 2, the first measurement point (for example, P (1)) of the standard sample or the unknown sample is limited to the wavelength range in which the true value of the peak wavelength can exist, by the method described in embodiment 1 above, in consideration of the statistical variation of the measurement value. Then, after setting the spectral wavelength to any one of the long wavelength end and the short wavelength end of the limited wavelength range and the intermediate wavelength between the long wavelength end and the short wavelength end (for example, first, setting the spectral wavelength to the long wavelength end), the measurement points P (1) to P (9) are sequentially changed and intensity measurement is performed, and the measurement value of each measurement point at the set spectral wavelength (long wavelength end) is obtained. This operation is also performed for the remaining two wavelengths (intermediate wavelength and short wavelength end), and the measurement value at each measurement point is obtained sequentially for each set spectral wavelength (intermediate wavelength and short wavelength end).

Then, a quadratic function of the three measurement values measured at the three wavelengths is calculated for each of the measurement points P (1) to P (9), and the peak wavelength and the peak intensity are calculated from the calculated quadratic function. This eliminates the need to change the spectral wavelength or perform peak search every time the measurement point is changed, and thus the measurement time can be significantly shortened.

The overall structure of the EPMA according to embodiment 2 is the same as that of EPMA 100 shown in fig. 1. The overall flow of the quantitative analysis process using the EPMA according to embodiment 2 is the same as the flow shown in fig. 5 and 6. The process of the peak search process executed in step S150 in fig. 6 in embodiment 2 is different from that in embodiment 1.

Fig. 9 is a flowchart showing an example of the procedure of the peak search processing in embodiment 2. Referring to fig. 7, 8, and 9, the data processing unit 11 executes the wavelength extraction process shown in fig. 7 at the first measurement point P (1) (step S310). Thus, the wavelength range in which the true peak intensity I can exist is defined for the measurement point P (1), and the intermediate wavelength of the wavelength range is calculated.

Next, the data processing unit 11 executes the following long-wavelength-side processing: at the long wavelength end (point on the long wavelength end side in practice) of the limited wavelength range, measurement conditions are set so that the intensity is measured for the same count time (10 seconds) as the count time when the peak intensity is measured, and the intensity is sequentially measured at each of the measurement points P (1) to P (9) (step S320).

Next, the data processing unit 11 executes the following intermediate wavelength processing: the spectral wavelength is set to the intermediate wavelength calculated in the wavelength extraction process, and the intensity is sequentially measured at each of the measurement points P (1) to P (9) under the same measurement condition (count time 10 seconds) as in the long-wavelength-end process (step S330). The data processing unit 11 performs short-wavelength-side processing of: the spectral wavelength is set to the short wavelength end (actually, the point on the short wavelength end side) of the limited wavelength range, and the intensity is measured sequentially at each of the measurement points P (1) to P (9) under the same measurement conditions (count time 10 seconds) as in the long wavelength end process (step S340).

Then, the data processing unit 11 performs the following peak intensity calculation processing for each of the measurement points P (1) to P (9): quadratic functions of the three measurement values calculated in the long wavelength end processing, the intermediate wavelength processing, and the short wavelength end processing are calculated, and the peak wavelength and the peak intensity are calculated from the calculated quadratic functions (step S350).

Fig. 10 is a flowchart showing an example of a procedure of the long wavelength side process executed in step S320 of fig. 9. Referring to fig. 10, the data processing unit 11 sets the spectral wavelength to the long-wavelength end WL _ L of the wavelength range (the range in which the true peak intensity I can exist) defined in the wavelength extraction process (step S310 in fig. 9) (step S410). The spectral wavelength is actually set to a wavelength at a point on the long wavelength side of the wavelength range.

Then, the data processing unit 11 sets the measurement point number n for specifying the measurement point P (n) to "1" (step S420), and sets the measurement position on the sample S to the measurement point P (1) (step S430). Next, the data processing unit 11 sets measurement conditions such that the intensity is measured for the same count time (10 seconds) as the count time when the peak intensity is measured, and sets the measurement result measured under the measurement conditions as the measurement value I _ L (1) of the measurement point P (1) at the long-wavelength end WL _ L (step S440).

Next, the data processing unit 11 increments the measurement point number N by 1 (step S450), and determines whether or not the measurement point number N exceeds the measurement point number N (in the example of fig. 8, N is 9) (step S460). If it is determined that measurement point number N is equal to or less than N (no in step S460), the process returns to step S430, and the next measurement point is measured. If it is determined in step S460 that measurement point number N is greater than N (yes in step S460), the process returns.

Fig. 11 is a flowchart showing an example of the procedure of the intermediate wavelength processing executed in step S330 in fig. 9. Referring to fig. 11, the data processing unit 11 sets the spectral wavelength to the intermediate wavelength WL _ M of the wavelength range (range in which the true peak intensity I can exist) defined in the wavelength extraction process (step S310 in fig. 9) (step S510). For example, the intermediate wavelength WL _ M is the central value of the wavelength range defined in the wavelength extraction process.

Then, the data processing unit 11 sets the measurement point number n to "1" (step S520), and sets the measurement position on the sample S to the measurement point P (1) (step S530). Next, the data processing unit 11 sets measurement conditions so that the intensity is measured for the same count time (10 seconds) as the count time when the peak intensity is measured, and sets the measurement result measured under the measurement conditions as the measurement value I _ M (1) of the measurement point P (1) of the intermediate wavelength WL _ M (step S540).

Next, the data processing unit 11 increments the measurement point number N by 1 (step S550), and determines whether or not the measurement point number N exceeds the measurement point number N (step S560). If it is determined that measurement point number N is equal to or less than N (no in step S560), the process returns to step S530, and the next measurement point is measured. If it is determined in step S560 that measurement point number N is greater than N (yes in step S560), the process returns.

Fig. 12 is a flowchart showing an example of a procedure of the short-wavelength-side processing executed in step S340 in fig. 9. Referring to fig. 12, the data processing unit 11 sets the spectral wavelength to the short wavelength end WL _ S of the wavelength range (range in which the true peak intensity I can exist) defined in the wavelength extraction process (step S310 in fig. 9) (step S610).

Then, the data processing unit 11 sets the measurement point number n to "1" (step S620), and sets the measurement position on the sample S to the measurement point P (1) (step S630). Next, the data processing unit 11 sets measurement conditions so that the intensity is measured for the same count time (10 seconds) as the count time when the peak intensity is measured, and sets the measurement result measured under the measurement conditions as the measurement value I _ S (1) of the measurement point P (1) of the short-wavelength end WL _ S (step S640).

Next, the data processing unit 11 increments the measurement point number N by 1 (step S650), and determines whether or not the measurement point number N exceeds the measurement point number N (step S660). When it is determined that the measurement point number N is equal to or less than N (no in step S660), the process returns to step S630, and the next measurement point is measured. When it is determined in step S660 that measurement point number N is greater than N (yes in step S660), the process returns.

Fig. 13 is a flowchart showing an example of the procedure of the peak intensity calculation process executed in step S350 in fig. 9. Referring to fig. 13, first, the data processing unit 11 sets the measurement point number n for specifying the measurement point p (n) to "1" (step S710). Then, the data processing unit 11 calculates a quadratic function of the three measurement values of the measurement value I _ L (1) calculated in the long wavelength end processing, the measurement value I _ M (1) calculated in the intermediate wavelength processing, and the measurement value I _ S (1) calculated in the short wavelength end processing with respect to the measurement point P (1) (step S720).

Next, the data processing unit 11 calculates the wavelength at the vertex of the calculated quadratic function and the intensity at the wavelength using the above equation (5), and sets the calculated wavelength and intensity as the peak wavelength and the peak intensity of the measurement point P (1), respectively (step S730).

Next, the data processing unit 11 increments the measurement point number N by 1 (step S740), and determines whether or not the measurement point number N exceeds the measurement point number N (step S750). If it is determined that measurement point number N is equal to or less than N (no in step S750), the process returns to step S720, and the next measurement point is measured. When it is determined in step S750 that measurement point number N is greater than N (yes in step S750), the process returns.

As described above, according to embodiment 2, it is not necessary to change the spectral wavelength or perform peak search every time the measurement points P (1) to P (9) are changed, and the measurement time can be significantly shortened. Further, since the X-ray intensities are measured sequentially at the same wavelength position (spectral wavelength) for a plurality of measurement points, the measurement values do not vary due to the influence of wavelength shifts depending on the reproducibility of the mechanical operation of the spectrometer, and measurement with high reproducibility can be realized. Even when there is a shift in wavelength depending on the chemical bonding state of the element, the peak wavelength and the peak intensity can be determined with high accuracy as long as the wavelength after the shift is within the above-mentioned wavelength range in which the true value of the peak wavelength can exist.

[ means ]

It should be understood by those skilled in the art that the above-described exemplary embodiments and modifications thereof are specific examples of the following modes.

An X-ray analysis apparatus according to a (first aspect) includes: a wavelength dispersion type spectrometer; and a processing device configured to execute a peak search process of detecting a peak wavelength of a spectrum of the characteristic X-ray separated by the spectrometer. The peak search process includes first to sixth processes. In the first process, the spectrometer is operated so as to change the wavelength of the characteristic X-ray at predetermined intervals, and the characteristic X-ray is measured at intervals (for example, 0.375 seconds) shorter than the counting time (for example, 10 seconds) at which the peak intensity of the characteristic X-ray is measured, thereby acquiring the profile of the spectrum. In the second process, the minimum value of values that the true value of the peak intensity can take is calculated from the intensity value of the data indicating the maximum intensity in the acquired contour and the statistical variation of the measured values. In the third process, when the true value of the peak intensity is set to the minimum value, the minimum measurement value that can be taken by the measurement value of the peak intensity is calculated from the statistical variation of the measurement value. In the fourth process, the intensity of the characteristic X-ray is measured at the counting time at the long wavelength end, the short wavelength end, and the intermediate wavelength between the long wavelength end and the short wavelength end of the wavelength range in which the measured value in the acquired profile is larger than the minimum measured value. In the fifth process, a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength is calculated. In the sixth process, the wavelength of the vertex of the calculated quadratic function is calculated as the peak wavelength.

In the X-ray analysis device according to the first aspect, the wavelength range in which the true value of the peak intensity can exist is defined in consideration of the statistical variation of the measured values. This makes it possible to appropriately limit the wavelength range in which the true value of the peak intensity can exist, taking into account the statistical variation in the measured value. The intensity of the characteristic X-ray is measured at the long wavelength end, the short wavelength end, and the intermediate wavelength between the two ends of the limited wavelength range, and the peak wavelength is calculated from the quadratic function passing through each measurement point. This makes it possible to realize a high-precision peak search without significantly increasing the processing time.

(second item) in the X-ray analysis device according to the first item, the intermediate wavelength may be a median of the wavelength range.

Thereby, a function approximation with high accuracy can be performed using the long wavelength end, the short wavelength end, and the center value of the wavelength range.

(third item) in the X-ray analysis device according to the first or second item, the processing device may calculate an intensity of a vertex of the quadratic function as a peak intensity.

This makes it possible to shorten the measurement time without measuring the peak intensity again at the calculated peak wavelength.

(fourth) in the X-ray analyzer according to the first or second aspect, the processing device may measure the peak intensity at the calculated peak wavelength for the count time.

When the intensity of the vertex of the quadratic function is taken as the peak intensity, there is a possibility that an error of function approximation is included, but according to the above configuration, the peak intensity with higher accuracy can be obtained.

(fifth) in the X-ray analysis apparatus according to any one of the first to fourth aspects, the processing device may perform the first to third processes on an initial measurement point when the processing device performs quantitative analysis on a plurality of measurement points on the sample. Also, the fourth process may include the following processes: measuring the intensity of the characteristic X-ray at a long wavelength end of the wavelength range successively at a plurality of measurement points for a count time; measuring the intensity of the characteristic X-ray at a short wavelength end of the wavelength range for a plurality of measurement points successively and continuously in a count time; and measuring the intensity of the characteristic X-ray at the intermediate wavelength of the wavelength range successively at the plurality of measurement points for a count time. The fifth process may include the following processes: a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength is calculated for each of the plurality of measurement points. The sixth process may include the following processes: the peak wavelength is calculated as the wavelength of the peak of the calculated quadratic function for each of the plurality of measurement points.

According to this X-ray analyzer, it is not necessary to change the spectral wavelength or perform peak search every time the measurement point is changed, and the measurement time can be significantly reduced.

A peak search method according to (sixth) one aspect is a peak search method for detecting a peak wavelength of a spectrum of characteristic X-rays separated by using a wavelength dispersion type spectrometer, the peak search method including the first to sixth steps. In the first step, the spectrometer is operated so as to change the wavelength of the characteristic X-ray at predetermined intervals, and the characteristic X-ray is measured at intervals (for example, 0.375 seconds) shorter than the counting time (for example, 10 seconds) at which the peak intensity of the characteristic X-ray is measured, thereby acquiring the profile of the spectrum. In the second step, the minimum value of values that the true value of the peak intensity can take is calculated from the intensity value of the data indicating the maximum intensity in the acquired contour and the statistical variation of the measured values. In the third step, when the true value of the peak intensity is the minimum value, the minimum measurement value that can be taken by the measurement value of the peak intensity is calculated from the statistical variation of the measurement value. In the fourth step, the intensity of the characteristic X-ray is measured at the counting time at the long wavelength end, the short wavelength end, and the intermediate wavelength between the long wavelength end and the short wavelength end of the wavelength range in which the measured value in the acquired profile is larger than the minimum measured value. In the fifth step, a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength is calculated. In the sixth step, the wavelength of the vertex of the calculated quadratic function is calculated as the peak wavelength.

According to this peak search method, it is possible to realize a high-precision peak search without greatly increasing the processing time.

(seventh) in the peak searching method according to the sixth aspect, the intermediate wavelength may be a central value of the wavelength range.

Thereby, a function approximation with high accuracy can be performed using the long wavelength end, the short wavelength end, and the center value of the wavelength range.

(eighth item) in the peak searching method according to the sixth or seventh item, the sixth step may include the steps of: the intensity of the vertex of the quadratic function is calculated as the peak intensity.

This makes it possible to shorten the measurement time without measuring the peak intensity again at the calculated peak wavelength.

(ninth item) in the peak searching method according to the sixth or seventh item, the sixth step may include the steps of: the peak intensity was measured at the calculated peak wavelength with the above counting time.

When the intensity of the vertex of the quadratic function is taken as the peak intensity, an error of function approximation may be included, but according to the above procedure, a more accurate peak intensity can be obtained.

(tenth) in the peak search method according to any one of the sixth to ninth aspects, when quantitative analysis is performed on a plurality of measurement points on the sample, the fourth step may include the steps of: measuring the intensity of the characteristic X-ray at a long wavelength end of the wavelength range successively at a plurality of measurement points for a count time; measuring the intensity of the characteristic X-ray at a short wavelength end of the wavelength range for a plurality of measurement points successively and continuously in a count time; and measuring the intensity of the characteristic X-ray at the intermediate wavelength of the wavelength range for the plurality of measurement points successively and continuously in the count time, the fifth step may include the steps of: the sixth step may include calculating a quadratic function of each measurement value passing through the long wavelength end, the short wavelength end, and the intermediate wavelength for each of the plurality of measurement points, and may include: the peak wavelength is calculated as the wavelength of the peak of the calculated quadratic function for each of the plurality of measurement points.

According to this peak search method, it is not necessary to change the spectral wavelength or perform peak search every time the measurement point is changed, and the measurement time can be significantly reduced.

The embodiments disclosed herein are considered to be illustrative in all respects, rather than restrictive. The scope of the present invention is defined by the claims rather than the description of the above embodiments, and is intended to include all modifications within the meaning and scope equivalent to the claims.