阅读说明：本技术 一种基于静电反馈结构的隧道磁阻加速度计装置 (Tunnel magnetic resistance accelerometer device based on electrostatic feedback structure ) 是由 杨波 陈新茹 李成 黄鑫 孙震宇 曾俊杰 于 2021-09-03 设计创作，主要内容包括：本发明公开了一种基于静电反馈结构的隧道磁阻加速度计装置,该装置由位于顶层的隧道磁阻传感器检测结构,位于中间层的永磁体结构和底层机构形成一个统一整体。其中永磁体结构通过微组装固定在底层机构上表面,底层机构包括敏感外部加速度的敏感结构和静电反馈结构。敏感结构使得输入加速度转化为位移变化,进而转化为永磁体的位移变化,同时通过静电反馈结构实现对永磁体的控制,使得永磁体总是处于平衡位置,最后通过隧道磁阻传感器检测结构输出不同电压信号,实现对外界加速度的测量。本发明提出的基于静电反馈结构的隧道磁阻加速度计装置具有精度高、灵敏度高、动态范围大等优点。(The invention discloses a tunnel magnetoresistive accelerometer device based on an electrostatic feedback structure. The permanent magnet structure is fixed on the upper surface of the bottom layer mechanism through micro assembly, and the bottom layer mechanism comprises a sensitive structure for sensing external acceleration and an electrostatic feedback structure. The sensitive structure enables input acceleration to be converted into displacement change, and then the displacement change of the permanent magnet is converted into, meanwhile, the permanent magnet is controlled through the electrostatic feedback structure, the permanent magnet is always in a balance position, and finally different voltage signals are output through the tunnel magnetic resistance sensor detection structure, so that measurement of external acceleration is achieved. The tunnel magnetic resistance accelerometer device based on the electrostatic feedback structure has the advantages of high precision, high sensitivity, large dynamic range and the like.)

1. The utility model provides a tunnel magnetic resistance accelerometer device based on static feedback structure which characterized in that: the sensor comprises a substrate structure (6) positioned on the top layer, a left tunnel magnetoresistive sensor (7), a right tunnel magnetoresistive sensor (8), a permanent magnet structure (1) positioned in the middle and a bottom layer mechanism (69);

the lower surface of the permanent magnet structure (1) is located at the center of the upper surface of the bottom layer mechanism (69), the left tunnel magnetoresistive sensor (7) and the right tunnel magnetoresistive sensor (8) are symmetrically distributed right above the permanent magnet structure (1), the upper surfaces of the left tunnel magnetoresistive sensor (7) and the right tunnel magnetoresistive sensor (8) are located at the lower surface of the substrate structure (6), and are symmetrically distributed left and right about the center of the lower surface of the substrate structure (6) to detect two opposite horizontal magnetic fields;

the bottom layer mechanism (69) is composed of a glass substrate (5), a metal layer structure (4), an anchor point layer structure (3), a main body structure (2) and a feedback part (70) of the main body structure, the upper surface of the glass substrate (5) is a structure with a groove, the lower surface of the metal layer structure (4) is superposed with the upper surface of the glass substrate (5), the whole upper surface of the metal layer structure (4) is higher than the upper surface of the glass substrate (5), the lower surface of the anchor point layer structure (3) is superposed with the upper surface of the metal layer structure (4) and is positioned at the central position of the upper surface of the metal layer structure (4), the lower surface of the main body structure (2) is superposed with the upper surface of the anchor point layer structure (3), the feedback part (70) is positioned at the left side and the right side of the main body structure (2) symmetrically, when external acceleration is input, the main body structure (2) generates displacement in the horizontal motion direction, the feedback part (70) generates feedback force in the horizontal direction, so that the main structure (2) is always in a balanced position, thereby forming a unified whole.

2. The tunneling magnetoresistive accelerometer device according to claim 1, wherein: the main body structure (2) is a composite structure and comprises a sensitive structure consisting of a mass block (9), first, second, third and fourth folding elastic beams (14-1, 14-3, 15-1 and 15-3), first and second elastic connecting beams (14-2 and 15-2) and first and second frame structures (16 and 17), wherein the permanent magnet structure (1) is positioned at the central position of the mass block (9), and also comprises first, second, third, fourth and fifth movable comb tooth structures (10-1, 10-2, 10-3, 10-4 and 10-5) above the mass block (9), sixth, seventh, eighth, ninth and tenth movable comb tooth structures (11-1, 11-2, 11-3, 11-4 and 11-5) below the mass block (9), eleventh, tenth and eleventh comb tooth structures on the left side of the mass block (9), Twelve, thirteen and fourteen movable comb tooth structures (12-1, 12-2, 12-3 and 12-4), a fifteenth, sixteen, seventeen and eighteen movable comb tooth structures (13-1, 13-2, 13-3 and 13-4) on the right side of the mass block (9), a first, second, third, fourth, fifth, sixth, seventh, eight, nine and ten fixed comb tooth structures (18-1, 18-2, 19-1, 19-2, 20-1, 20-2, 21-1, 21-2, 22-1 and 22-2) on the mass block (9), an eleventh, twelfth, thirteen, fourteen, fifteen, sixteen, seventeen, eighteen, nineteen and twenty fixed comb tooth structures (23-1, 23-2, 24-1, 24-2) on the lower side of the mass block (9), 25-1, 25-2, 26-1, 26-2, 27-1, 27-2), twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh, twenty-eight fixed comb tooth structures (28-1, 28-2, 29-1, 29-2, 30-1, 30-2, 31-1, 31-2) on the left side of the mass block (9), twenty-ninth, thirty-first, thirty-second, thirty-third, thirty-fourth, thirty-fifth, thirty-sixth fixed comb tooth structures (32-1, 32-2, 33-1, 33-2, 34-1, 34-2, 35-1, 35-2) on the right side of the mass block (9);

the first fixed comb tooth structures (18-1) and the second fixed comb tooth structures (18-2) above the mass block (9) are respectively and symmetrically distributed on the left side and the right side of the first movable comb tooth structure (10-1), a certain overlapping length is formed between the comb teeth, the intervals of the adjacent comb teeth are equal, and the third fixed comb tooth structures (19-1) and the fourth fixed comb tooth structures (19-2) above the mass block (9) are respectively and symmetrically distributed on the left side and the right side of the second movable comb tooth structure (10-2); the fifth fixed comb tooth structure and the sixth fixed comb tooth structure (20-1, 20-2) are respectively and symmetrically distributed at the left side and the right side of the third movable comb tooth structure (10-3); the seventh fixed comb tooth structure and the eighth fixed comb tooth structure (21-1 and 21-2) are respectively and symmetrically distributed at the left side and the right side of the fourth movable comb tooth structure (10-4); the ninth and tenth comb teeth (22-1 and 22-2) are respectively and symmetrically distributed on the left side and the right side of the fifth movable comb tooth structure (10-5);

eleventh and twelfth fixed comb tooth structures (23-1 and 23-2) below the mass block (9) are respectively and symmetrically distributed on the left side and the right side of the sixth movable comb tooth structure (11-1); thirteenth and fourteen (24-1 and 24-2) fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the seventh movable comb tooth structure (11-2), and fifteenth and sixteenth (25-1 and 25-2) fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the eighth movable comb tooth structure (11-3); seventeenth and eighteenth (26-1 and 26-2) fixed comb tooth structures are symmetrically distributed on the ninth movable comb tooth structure (11-4) respectively; nineteenth and twenty (27-1 and 27-2) fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the tenth movable comb tooth structure (11-5);

twenty-first and twenty-second fixed comb tooth structures (28-1 and 28-2) on the left side of the mass block (9) are symmetrically distributed on the left side and the right side of the eleventh movable comb tooth structure (12-1) respectively; twenty-third and twenty-fourth fixed comb tooth structures (29-1 and 29-2) are respectively and symmetrically distributed on the left side and the right side of the twelve movable comb tooth structures (12-2); twenty-fifth and twenty-sixth fixed comb tooth structures (30-1 and 30-2) are respectively and symmetrically distributed on the left side and the right side of the thirteen movable comb tooth structures (12-3); twenty-seventh and twenty-eighth fixed comb tooth structures (31-1 and 31-2) are respectively and symmetrically distributed on the left side and the right side of the fourteen movable comb tooth structures (12-4);

twenty-ninth and thirty fixed comb tooth structures (32-1, 32-2) fixed on the right of the mass block (9) are respectively and symmetrically distributed on the left side and the right side of the fifteenth movable comb tooth structure (13-1); the thirty-first and thirty-second fixed comb tooth structures (33-1 and 33-2) are respectively and symmetrically distributed on the left side and the right side of the sixteenth movable comb tooth structure (13-2); thirty-third and thirty-fourth fixed comb tooth structures (34-1 and 34-2) are respectively and symmetrically distributed on the left side and the right side of the seventeenth movable comb tooth structure (13-3); thirty-fifth and thirty-sixth fixed comb tooth structures (35-1 and 35-2) are respectively and symmetrically distributed on the left side and the right side of the eighteenth movable comb tooth structure (13-4); forming a complete body structure.

3. The tunneling magnetoresistive accelerometer device according to claim 1, wherein: the permanent magnet structure (1) is located at the center of the mass block (9), the anchor point structure (3) is composed of a first fixed long beam (38-1, 38-2, 39-1, 39-2, 40-1, 40-2, 41-1, 41-2, 42-1 and 42-2) located above the mass block (9), an eleventh fixed long beam (43-1, 43-2, 44-1, 44-2, 45-1, 45-2, 46-1, 46-2, 47-1 and 47-2) located below the mass block (9), a twenty-first fixed long beam (43-1, 43-2, 44-1, 44-2, 45-1, 45-2, 46-1, 46-2, 47-1 and 47-2) located on the left side of the mass block (9), a twenty-second fixed long beam (twenty-twelve, twenty-second fixed long beam (38-1, 38-2, 39-2, 42-1, 42-2) located above the mass block (9), Twenty-four, twenty-five, twenty-six, twenty-seven, twenty-eight fixed long beams (48-1, 48-2, 49-1, 49-2, 50-1, 50-2, 51-1, 51-2), twenty-ninth, thirty-one, thirty-two, thirty-three, thirty-four, thirty-five, thirty-six fixed long beams (52-1, 52-2, 53-1, 53-2, 54-1, 54-2, 55-1, 55-2) positioned at the right side of the mass block (9), an upper U-shaped beam (36) and a lower U-shaped beam (37) form a unified whole.

4. The tunneling magnetoresistive accelerometer device according to claim 1, wherein: the metal layer structure (4) is positioned at the center of the glass substrate (5), and the metal layer structure (4) comprises a mass block metal structure (56-1), a first, second, third and fourth connecting metal structures (56-2, 56-4, 56-6 and 56-8), a first, second, third and fourth elastic beam metal structures (56-3, 56-5, 56-7 and 56-9), a first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth comb tooth metal structures (57-1, 58-1, 57-2, 58-2, 57-3, 58-3, 57-4, 58-4, 57-5 and 58-5) above the mass block (9) and an eleventh, twelfth, thirteen, fourteen, fifteen, sixteen, seventeen, eighteen and eighteen-teeth metal structures (57-1, 58-2, 57-3, 58-3, 57-4, 58-4, 57-5 and 58-5) below the mass block (9), Nineteen, twenty comb tooth metal structures (59-1, 60-1, 59-2, 60-2, 59-3, 60-3, 59-4, 60-4, 59-5, 60-5), twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh, twenty-eight comb tooth metal structures (61-1, 62-1, 61-2, 62-2, 61-3, 62-3, 61-4, 62-4) on the left side of the mass block (9), twenty-ninth, thirty-first, thirty-second, thirty-third, thirty-fourth, thirty-fifth, thirty-six comb tooth metal structures (63-1, 64-1, 63-2, 64-2, 63-3, 64-3, 63-4, 63-3, 63-4) on the right side of the mass block (9), 64-4), first, second, third, fourth, fifth, sixth, seventh, eighth, ninth, and tenth electrodes (65, 66, 67, 68, 69, 70, 71, 72, 73, 74);

the mass block metal structure (56-1), the first, second, third and fourth connecting metal structures (56-2, 56-4, 56-6 and 56-8), the first, second, third and fourth elastic beam metal structures (56-3, 56-5, 56-7 and 56-9) are connected to the fifth and tenth electrodes (69 and 74) through leads, the comb-tooth metal structure (57-1, 57-2, 57-3, 57-4 and 57-5) above the mass block (9) is connected to the first electrode (65) through leads, the second, fourth, sixth, eighth and tenth comb-tooth metal structure (58-1, 58-2, 58-3, 58-4 and 58-5) above the mass block (9) is connected to the second electrode (66) through leads, and the comb-tooth metal structure eleven, eleven and eleven below the mass block (9), Thirteen, fifteen, seventeen, nineteen (59-1, 59-2, 59-3, 59-4, 59-5) are connected to a third electrode (67) through leads, twelfth, fourteen, sixteen, eighteen, twenty-comb metal structures (60-1, 60-2, 60-3, 60-4, 60-5) below the mass block (9) are connected to a fourth electrode (68) through leads, twenty-first, twenty-third, twenty-fifth, twenty-seven comb metal structures (61-1, 61-2, 61-3, 61-4) on the left side of the mass block (9) are connected to a sixth electrode (70) through leads, twenty-second, twenty-fourth, twenty-sixth, twenty-eight comb metal structures (62-1, 62-2, 62-3, 62-4) on the left side of the mass block (9) are connected to a seventh electrode (71) through leads, twenty-ninth, thirty-first, thirty-third and thirty-fifth comb tooth metal structures (63-1, 63-2, 63-3 and 63-4) on the right side of the mass block (9) are connected to an eighth electrode (72) through leads, and thirty-third, thirty-second, thirty-fourth and thirty-sixth comb tooth metal structures (64-1, 64-2, 64-3 and 64-4) on the right side of the mass block (9) are connected to a ninth electrode (73) through leads, so that a unified whole is formed.

5. The tunneling magnetoresistive accelerometer device according to claim 1, wherein: the substrate structure (6) is a rectangular structure, the left tunnel magnetoresistive sensor (7) and the right tunnel magnetoresistive sensor (8) are also rectangular structures, and are distributed in bilateral symmetry about the center of the substrate structure (6) to detect the magnetic field intensity in opposite horizontal directions, so that a unified whole is formed.

Technical Field

The invention relates to the technical field of tunnel magneto-resistance sensing technology and comb electrostatic feedback technology, in particular to a tunnel magneto-resistance accelerometer device based on an electrostatic feedback structure.

Background

The mass block-spring-damper system is utilized to convert the external acceleration into the displacement of the sensitive structure in the horizontal direction, so that the change of the displacement of the permanent magnet changes the size of a magnetic field detected by the tunnel magnetoresistive sensor, and meanwhile, the sensitive structure is always kept at a balance position through the electrostatic force generated by the comb electrostatic feedback technology, thereby realizing the conversion of the acceleration, the displacement, the magnetic field and an electric signal, and forming the accelerometer structure with high sensitivity and good stability.

Much research has been conducted on the work of designing accelerometers using the tunnel magnetoresistance effect. The tunnel magnetic resistance sensor designed based on the tunnel magnetic resistance effect has high sensitivity, and meanwhile, the comb electrostatic feedback structure generates feedback electrostatic force for the sensitive structure, so that the permanent magnet can be always in a balance position under the condition of not influencing the detection of a magnetic field, and the stability and the dynamic range of the system are improved.

The tunnel magnetic resistance sensing technology is combined with the comb static feedback technology, so that a fully integrated tunnel magnetic resistance accelerometer structure for detecting external input acceleration is formed. The accelerometer with the structure has high sensitivity, good linearity, large detection range and strong stability, and provides a new idea for the development of the accelerometer.

Disclosure of Invention

In order to solve the problems, the invention discloses a tunnel magnetoresistive accelerometer device based on an electrostatic feedback structure, which has the advantages of good stability, high precision, high sensitivity, large dynamic range and the like.

A tunnel magnetoresistive accelerometer device based on an electrostatic feedback structure comprises a substrate structure positioned on the top layer, a left tunnel magnetoresistive sensor, a right tunnel magnetoresistive sensor, a permanent magnet structure positioned in the middle and a bottom layer mechanism;

the lower surface of the permanent magnet structure is positioned at the center of the upper surface of the bottom layer mechanism, the left tunnel magnetoresistive sensor and the right tunnel magnetoresistive sensor are symmetrically distributed right above the permanent magnet structure, and the upper surfaces of the left tunnel magnetoresistive sensor and the right tunnel magnetoresistive sensor are positioned at the lower surface of the substrate structure and are symmetrically distributed in the left-right direction relative to the center of the lower surface of the substrate structure to detect two opposite magnetic fields in the horizontal direction;

bottom mechanism is by the glass substrate, the metal level structure, anchor point layer structure, the feedback part of major structure and major structure constitutes, glass substrate upper surface is for taking the notched structure, metal level structure lower surface and the coincidence of glass substrate upper surface, and metal level structure upper surface whole is higher than glass substrate upper surface, anchor point layer structure lower surface and the coincidence of metal level structure upper surface are located the central point on metal level structure upper surface, the lower surface of major structure and the coincidence of anchor point layer structure upper surface, the feedback part is located the major structure left and right sides symmetry and places, when external acceleration input, the major structure produces the displacement of horizontal motion direction, the feedback part produces the feedback force of horizontal direction, make the major structure always be in balanced position, thereby constitute unified whole.

Due to the action of the mass block-elastic beam structure in the main body structure, external input acceleration is converted into displacement variation of a horizontal shaft, the permanent magnet is fixed on the mass block and further causes displacement variation of the permanent magnet, so that different magnetic field strengths are converted, meanwhile, the permanent magnet is controlled through the comb electrostatic feedback structure, a horizontal electrostatic feedback force is formed, the permanent magnet is always in a balance position, and finally, different electric signals are detected and output through the tunnel magnetoresistive sensor positioned at the top layer, so that measurement of the external acceleration is realized.

The invention further improves that: the main structure is a composite structure and comprises a sensitive structure consisting of a mass block, a first, a second, a third and a fourth folding elastic beams, a first, a second elastic connecting beam, a first and a second outer frame structures, wherein a permanent magnet structure is positioned at the center of the mass block, and also comprises a first, a second, a third, a fourth and a fifth movable comb tooth structure above the mass block, a sixth, a seventh, an eighth, a ninth and a tenth movable comb tooth structure below the mass block, an eleventh, a twelfth, a thirteen and a fourteen movable comb tooth structure on the left side of the mass block, a fifteenth, a sixteenth and an eighteen movable comb tooth structure on the right side of the mass block, a first, a second, a third, a fourth, a fifth, a sixth, a seventh, an eighth, a nineteen and a tenth fixed comb tooth structure above the mass block, an eleventh, a twelfth, a thirteen, a fourteen, a fifteenth, a sixteen, a seventeen, an eighteen, a nineteen and a twenty fixed comb tooth structure below the mass block, a twenty-first, a second, a third and a fourth movable comb tooth structure above the mass block, The static feedback structure consists of twenty-two, twenty-three, twenty-four, twenty-five, twenty-six, twenty-seven and twenty-eight fixed comb tooth structures, and twenty-ninth, thirty-one, thirty-two, thirty-three, thirty-four, thirty-five and thirty-six fixed comb tooth structures on the right side of the mass block;

the first fixed comb tooth structure and the second fixed comb tooth structure are respectively and symmetrically distributed on the left side and the right side of the first movable comb tooth structure, a certain overlapping length is formed between the comb teeth, the distance between the adjacent comb teeth is equal, and the third fixed comb tooth structure and the fourth fixed comb tooth structure above the mass block are respectively and symmetrically distributed on the left side and the right side of the second movable comb tooth structure; the fifth fixed comb tooth structure and the sixth fixed comb tooth structure are respectively and symmetrically distributed on the left side and the right side of the third movable comb tooth structure; the seventh fixed comb tooth structure and the eighth fixed comb tooth structure are respectively and symmetrically distributed on the left side and the right side of the fourth movable comb tooth structure; ninthly, ten movable comb tooth structures are symmetrically distributed on the left side and the right side of the fifth movable comb tooth structure respectively;

eleven and twelve fixed comb tooth structures below the mass block are symmetrically distributed on the left side and the right side of the sixth movable comb tooth structure respectively; the thirteenth and fourteenth fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the seventh movable comb tooth structure, and the fifteenth and sixteenth fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the eighth movable comb tooth structure; seventeenth and eighteenth fixed comb tooth structures are symmetrically distributed on the ninth movable comb tooth structure respectively; the nineteenth and twenty-th fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the tenth movable comb tooth structure; the twenty-first fixed comb tooth structure and the twenty-second fixed comb tooth structure on the left side of the mass block are symmetrically distributed on the left side and the right side of the eleventh movable comb tooth structure respectively; the twenty-third and twenty-fourth fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the twelve movable comb tooth structures; the twenty-fifth fixed comb tooth structures and the twenty-sixth fixed comb tooth structures are symmetrically distributed on the left side and the right side of the thirteen movable comb tooth structures respectively; twenty-seventh and twenty-eighth fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the fourteen movable comb tooth structures; twenty-ninth and thirty fixed comb tooth structures fixed on the right side of the mass block are symmetrically distributed on the left side and the right side of the fifteenth movable comb tooth structure respectively; the thirty-first fixed comb tooth structure and the thirty-second fixed comb tooth structure are respectively and symmetrically distributed on the left side and the right side of the sixteenth movable comb tooth structure; the thirty-third and thirty-fourth fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the seventeenth movable comb tooth structure; the thirty-fifth and thirty-sixth fixed comb tooth structures are respectively and symmetrically distributed on the left side and the right side of the eighteenth movable comb tooth structure; the twenty-first comb tooth structure and the twenty-second comb tooth structure are respectively and symmetrically distributed on the fifteenth movable comb tooth structure; forming a complete body structure.

The invention further improves that: the permanent magnet structure is positioned at the center of the mass block, and the anchor point structure is formed by a first fixing long beam, a second fixing long beam, a third fixing long beam, a fourth fixing long beam, a fifth fixing long beam, a sixth fixing long beam, an eighth fixing long beam, a ninth fixing long beam, a twelfth fixing long beam, a twenty-third fixing long beam, a twenty-fifth fixing long beam, a twenty-sixth fixing long beam, a twenty-seventh fixing long beam, a twenty-eighth fixing long beam, a twenty-ninth fixing long beam, a thirty-eleventh fixing long beam, a thirty-second fixing long beam, a thirty-fourth fixing long beam, a thirty-fifth fixing long beam, a twenty-seventh fixing long beam, a twenty-eighth fixing long beam, a twenty-ninth fixing long beam, a thirty-fifth fixing long beam, a thirty-eleventh fixing long beam, a thirty-second fixing long beam, a thirty-third fixing long beam, a thirty-sixth fixing long beam, an upper U-shaped beam and a lower U-shaped beam which are positioned above the mass block into a unified whole.

The invention further improves that: the metal layer structure is positioned at the center of the glass substrate and consists of a mass block metal structure, a first, second, third and fourth connecting metal structure, a first, second, third and fourth elastic beam metal structure, a first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth comb tooth metal structure above the mass block, an eleventh, twelfth, thirteen, fourteen, fifteen, sixteen, seventeen, eighteen, nineteen and twenty-comb tooth metal structure below the mass block, a twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh, twenty-eight comb tooth metal structure on the left side of the mass block, a twenty-ninth, thirty-third, thirty-first, thirty-second, thirty-fourth, thirty-fifth and thirty-sixth comb tooth metal structure on the right side of the mass block; the first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth electrodes;

wherein, the mass block metal structure, the first, the second, the third and the fourth connecting metal structures, the first, the second, the third and the fourth elastic beam metal structures are connected to the fifth and the tenth electrodes through leads, the comb tooth metal structure above the mass block is connected to the first electrode through a lead, the second, the fourth, the sixth, the eighth and the tenth comb tooth metal structure above the mass block is connected to the second electrode through a lead, the comb tooth metal structure eleven, thirteen, fifteen, seventeen and nineteen below the mass block is connected to the third electrode through a lead, the twelfth, the fourteen, the sixteen, the eighteenth and the twenty comb tooth metal structure below the mass block is connected to the fourth electrode through a lead, the twenty-first, twenty-third, twenty-fifth and twenty-seventh comb tooth metal structures on the left side of the mass block are connected to the sixth electrode through leads, the twenty-second, twenty-fourteen, twenty-sixth and twenty-eight comb tooth metal structures on the left side of the mass block are connected to the seventh electrode through leads, the twenty-ninth, thirty-first, thirty-third and thirty-fifth comb tooth metal structures on the right side of the mass block are connected to the eighth electrode through leads, and the thirty-third, thirty-second, thirty-fourth and thirty-sixth comb tooth metal structures on the right side of the mass block are connected to the ninth electrode through leads, so that a unified whole is formed.

The invention further improves that: the substrate structure is a rectangular structure, and the left tunnel magnetoresistive sensor and the right tunnel magnetoresistive sensor are also rectangular structures and are distributed in bilateral symmetry about the center of the substrate structure to detect the magnetic field intensity in opposite horizontal directions, so that a unified whole is formed.

The invention has the beneficial effects that:

(1) the invention adopts the mass block-elastic beam as a sensitive structure, fixes the permanent magnet on the mass block, and enables the mass block and the permanent magnet to generate displacement in the horizontal direction by inputting external acceleration, thereby enabling the magnetic field intensity to change, and converting an acceleration signal into a displacement signal and further converting the displacement signal into a magnetic field signal.

(2) The invention adopts a tunnel magnetoresistive sensor detection method to convert the detected magnetic field intensity signal into a voltage signal for output, thereby improving the sensitivity of the accelerometer.

(3) The invention adopts a comb electrostatic feedback structure to realize the feedback acting force on the sensitive mass block and the permanent magnet, so that after the sensitive mass block and the permanent magnet generate horizontal displacement under the action of external input acceleration, the permanent magnet can be quickly restored to a balance position through electrostatic force, the detection range of the tunnel magnetoresistive accelerometer is improved, and the detection stability is also improved.

Drawings

FIG. 1 is a front view of the overall construction of the present invention;

FIG. 2 is a top view of the main body structure of the present invention;

FIG. 3 is a bottom view of the anchor point and body structure of the present invention;

FIG. 4 is a top view of a metal structure of the present invention;

figure 5 is a bottom view of the top layer structure of the present invention.

Detailed Description

The present invention will be further illustrated with reference to the accompanying drawings and specific embodiments, which are to be understood as merely illustrative of the invention and not as limiting the scope of the invention. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

As shown in fig. 1, the tunnel magnetoresistive accelerometer device based on the electrostatic feedback structure of the embodiment includes a substrate structure 6 located at a top layer, a left tunnel magnetoresistive sensor 7, a right tunnel magnetoresistive sensor 8, a permanent magnet structure 1 located in a middle, and a bottom layer mechanism 69; the lower surface of the permanent magnet structure 1 is located at the center of the upper surface of the bottom layer mechanism 69, the left tunnel magnetoresistive sensor 7 and the right tunnel magnetoresistive sensor 8 are symmetrically distributed right above the permanent magnet structure 1, the upper surfaces of the left tunnel magnetoresistive sensor 7 and the right tunnel magnetoresistive sensor 8 are located at the lower surface of the substrate structure 6, and are symmetrically distributed left and right about the center of the lower surface of the substrate structure 6 to detect two opposite horizontal magnetic fields;

the bottom layer mechanism 69 is composed of a glass substrate 5, a metal layer structure 4, an anchor point layer structure 3, a main body structure 2 and a feedback part 70 of the main body structure, the upper surface of the glass substrate 5 is a structure with a groove, the lower surface of the metal layer structure 4 is superposed with the upper surface of the glass substrate 5, the upper surface of the metal layer structure 4 is entirely higher than the upper surface of the glass substrate 5, the lower surface of the anchor point layer structure 3 is superposed with the upper surface of the metal layer structure 4 and is positioned at the central position of the upper surface of the metal layer structure 4, the lower surface of the main body structure 2 is superposed with the upper surface of the anchor point layer structure 3, the feedback parts 70 are positioned at the left side and the right side of the main body structure 2 and are symmetrically arranged, when the external acceleration is inputted, the main body structure 2 generates a displacement in the horizontal movement direction, and the feedback part 70 generates a feedback force in the horizontal direction, so that the main body structure 2 is always in the equilibrium position, thereby forming a unified whole.

As shown in fig. 2: the main body structure is a composite structure and comprises a sensitive structure consisting of a mass block 9, first, second, third and fourth folding elastic beams 14-1, 14-3, 15-1, 15-3, first and second elastic connecting beams 14-2, 15-2 and first and second frame structures 16 and 17, wherein the permanent magnet structure 1 is positioned at the central position of the mass block 9, and also comprises first, second, third, fourth and fifth movable comb tooth structures 10-1, 10-2, 10-3, 10-4, 10-5 above the mass block 9, sixth, seventh, eighth, ninth and tenth movable comb tooth structures 11-1, 11-2, 11-3, 11-4 and 11-5 below the mass block 9, and eleventh, twelfth, thirteen and fourteen movable comb tooth structures 12-1, 12-1 at the left side of the mass block 9, 12-2, 12-3, 12-4, the fifteenth, sixteenth, seventeenth, eighteenth movable comb tooth structures 13-1, 13-2, 13-3, 13-4 on the right side of the mass block 9, the first, second, third, fourth, fifth, sixth, seventh, eighth, ninth, and tenth fixed comb tooth structures 18-1, 18-2, 19-1, 19-2, 20-1, 20-2, 21-1, 21-2, 22-1, 22-2 on the upper side of the mass block 9; the eleventh, twelfth, thirteen, fourteen, fifteen, sixteen, seventeen, eighteen, nineteen, twenty fixed comb tooth structures 23-1, 23-2, 24-1, 24-2, 25-1, 25-2, 26-1, 26-2, 27-1, 27-2 below the mass block 9, the twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh, twenty-eight fixed comb tooth structures 28-1, 28-2, 29-1, 29-2, 30-1, 30-2, 31-1, 31-2 on the left side of the mass block 9; a twenty ninth, thirty-one, thirty-two, thirty-three, thirty-four, thirty-five, thirty-six fixed comb tooth structures 32-1, 32-2, 33-1, 33-2, 34-1, 34-2, 35-1, 35-2 on the right side of the mass block 9;

the first fixed comb tooth structure 18-1 and the second fixed comb tooth structure 18-2 are respectively and symmetrically distributed on the left side and the right side of the first movable comb tooth structure 10-1, a certain overlapping length is formed between the comb teeth, the distance between the adjacent comb teeth is equal, and the third fixed comb tooth structure 19-1 and the fourth fixed comb tooth structure 19-2 above the mass block 9 are respectively and symmetrically distributed on the left side and the right side of the second movable comb tooth structure 10-2; the fifth fixed comb tooth structure 20-1 and the sixth fixed comb tooth structure 20-2 are respectively and symmetrically distributed on the left side and the right side of the third movable comb tooth structure 10-3; the seventh and eighth fixed comb tooth structures 21-1 and 21-2 are respectively and symmetrically distributed on the left and right sides of the fourth movable comb tooth structure 10-4; the ninth, tenth and 22-1 and 22-2 are respectively and symmetrically distributed at the left and right sides of the fifth movable comb tooth structure 10-5,

eleven and twelve fixed comb tooth structures 23-1 and 23-2 below the mass block 9 are respectively and symmetrically distributed on the left side and the right side of the sixth movable comb tooth structure 11-1; the thirteenth, fourteen 24-1 and 24-2 fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the seventh movable comb tooth structure 11-2, and the fifteenth, sixteenth, 25-1 and 25-2 fixed comb tooth structures are respectively and symmetrically distributed on the left and right sides of the eighth movable comb tooth structure 11-3; seventeenth, eighteenth 26-1 and 26-2 fixed comb tooth structures are symmetrically distributed on the ninth movable comb tooth structure 11-4 respectively; nineteenth, twenty 27-1 and 27-2 fixed comb tooth structures are symmetrically distributed on the left side and the right side of the tenth movable comb tooth structure 11-5 respectively;

the twenty-first and twenty-second fixed comb tooth structures 28-1 and 28-2 on the left side of the mass block 9 are symmetrically distributed on the left side and the right side of the eleventh movable comb tooth structure 12-1 respectively; twenty-third and twenty-fourth fixed comb tooth structures 29-1 and 29-2 are respectively and symmetrically distributed on the left side and the right side of the twelve movable comb tooth structures 12-2; twenty-fifth and twenty-sixth fixed comb tooth structures 30-1 and 30-2 are respectively and symmetrically distributed on the left side and the right side of the thirteen movable comb tooth structures 12-3; twenty-seventh and twenty-eighth fixed comb tooth structures 31-1 and 31-2 are respectively and symmetrically distributed on the left side and the right side of the fourteen movable comb tooth structures 12-4; twenty-ninth and thirty fixed comb tooth structures 32-1 and 32-2 fixed to the right of the mass block 9 are symmetrically distributed on the left side and the right side of the fifteenth movable comb tooth structure 13-1 respectively; the thirty-first and thirty-second fixed comb tooth structures 33-1 and 33-2 are respectively and symmetrically distributed on the left side and the right side of the sixteenth movable comb tooth structure 13-2; thirty-third and thirty-fourth fixed comb tooth structures 34-1 and 34-2 are respectively and symmetrically distributed on the left side and the right side of the seventeenth movable comb tooth structure 13-3; thirty-fifth and thirty-sixth fixed comb tooth structures 35-1 and 35-2 are respectively and symmetrically distributed on the left side and the right side of the eighteenth movable comb tooth structure 13-4;

the twenty-first comb tooth structure 28-1 and the twenty-second comb tooth structure 28-2 are respectively and symmetrically distributed on the fifteenth movable comb tooth structure 13-1; forming a complete body structure.

As shown in fig. 3: the permanent magnet structure 1 is positioned at the central position of the mass block 9, and the anchor point structure 3 is composed of first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth fixed long beams 38-1, 38-2, 39-1, 39-2, 40-1, 40-2, 41-1, 41-2, 42-1 and 42-2 which are positioned above the mass block 9; the eleventh, twelfth, thirteenth, fourteen, fifteen, sixteen, seventeen, eighteenth, nineteen and twenty fixed long beams 43-1, 43-2, 44-1, 44-2, 45-1, 45-2, 46-1, 46-2, 47-1 and 47-2 are positioned below the mass block 9; twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh and twenty-eighth fixed long beams 48-1, 48-2, 49-1, 49-2, 50-1, 50-2, 51-1 and 51-2 positioned on the left side of the mass block 9; twenty ninth, thirty eleventh, thirty-two, thirty-three, thirty-four, thirty-five, thirty-six fixed long beams 52-1, 52-2, 53-1, 53-2, 54-1, 54-2, 55-1, 55-2 located on the right side of the mass block 9; the upper U-beam 36 and the lower U-beam 37 form a unified whole.

As shown in fig. 4, the metal layer structure 4 is located at the center of the glass substrate 5, and the metal layer structure 4 is composed of a mass metal structure 56-1, a first, second, third and fourth connecting metal structures 56-2, 56-4, 56-6 and 56-8, a first, second, third and fourth elastic beam metal structures 56-3, 56-5, 56-7 and 56-9; first, second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenth comb tooth metal structures 57-1, 58-1, 57-2, 58-2, 57-3, 58-3, 57-4, 58-4, 57-5 and 58-5 above the mass block 9; the eleventh, twelfth, thirteenth, fourteen, fifteen, sixteen, seventeen, eighteenth, nineteen and twenty-comb-tooth metal structures 59-1, 60-1, 59-2, 60-2, 59-3, 60-3, 59-4, 60-4, 59-5 and 60-5 are arranged below the mass block 9; twenty-first, twenty-second, twenty-third, twenty-fourth, twenty-fifth, twenty-sixth, twenty-seventh and twenty-eight comb tooth metal structures 61-1, 62-1, 61-2, 62-2, 61-3, 62-3, 61-4 and 62-4 on the left side of the mass block 9; twenty-ninth, thirty-first, thirty-second, thirty-third, thirty-fourth, thirty-fifth and thirty-sixth comb tooth metal structures 63-1, 64-1, 63-2, 64-2, 63-3, 64-3, 63-4 and 64-4 on the right side of the mass block 9; first, second, third, fourth, fifth, sixth, seventh, eighth, ninth, and tenth electrodes 65, 66, 67, 68, 69, 70, 71, 72, 73, and 74;

wherein, the mass block metal structure 56-1, the first, second, third and fourth connecting metal structures 56-2, 56-4, 56-6 and 56-8; the first, second, third and fourth elastic beam metal structures 56-3, 56-5, 56-7 and 56-9 are connected to the fifth and tenth electrodes 69 and 74 through leads, the comb-teeth metal structures 57-1, 57-2, 57-3, 57-4 and 57-5 above the mass block 9 are connected to the first electrode 65 through leads, the second, fourth, sixth, eighth and tenth comb-teeth metal structures 58-1, 58-2, 58-3, 58-4 and 58-5 above the mass block 9 are connected to the second electrode 66 through leads, the comb-teeth metal structures eleven, thirteen, fifteen, seventeen, nineteen, 59-1, 59-2, 59-3, 59-4 and 59-5 below the mass block 9 are connected to the third electrode 67 through leads, and the twelfth and fourteenth metal structures below the mass block 9 are connected to the third electrode 67 through leads, Sixteen, eighteen and twenty comb-teeth metal structures 60-1, 60-2, 60-3, 60-4 and 60-5 are connected to a fourth electrode 68 through leads, twenty-first, twenty-third, twenty-fifth and twenty-seventh comb-teeth metal structures 61-1, 61-2, 61-3 and 61-4 on the left side of the mass block 9 are connected to a sixth electrode 70 through leads, twenty-second, twenty-fourth, twenty-sixth and twenty-eight comb-teeth metal structures 62-1, 62-2, 62-3 and 62-4 on the left side of the mass block 9 are connected to a seventh electrode 71 through leads, twenty-ninth, thirty-first, thirty-third and thirty-fifth comb-teeth metal structures 63-1, 63-2, 63-3 and 63-4 on the right side of the mass block 9 are connected to an eighth electrode 72 through leads, thirty-third, thirty-fourth, thirty-third, twenty-fourth, twenty-third, twenty-fourth, twenty-teeth metal structures 63-2, 63-3 and 63-4 on the right side of the mass block 9 are connected to an eighth electrode 72 through leads, Thirty-two, thirty-four and thirty-six comb-tooth metal structures 64-1, 64-2, 64-3 and 64-4 are connected to the ninth electrode 73 through a lead wire, so that a unified whole is formed.

As shown in fig. 5, the substrate structure 6 is a rectangular structure, and the left tunnel magnetoresistive sensor 7 and the right tunnel magnetoresistive sensor 8 are also rectangular structures and are symmetrically distributed about the center of the substrate structure 6 to detect magnetic field strengths in opposite horizontal directions, thereby forming a unified whole.

The technical means disclosed in the invention scheme are not limited to the technical means disclosed in the above embodiments, but also include the technical scheme formed by any combination of the above technical features.