阅读说明：本技术 用于处理超薄玻璃的设备和用于处理超薄玻璃的方法 (Apparatus for processing ultra-thin glass and method for processing ultra-thin glass ) 是由 赵在俊 刘正必 安成洙 梁相熙 于 2021-06-16 设计创作，主要内容包括：本公开涉及层压多个超薄玻璃的一种用于处理超薄玻璃的设备和用于处理超薄玻璃的方法。用于处理超薄玻璃的设备包含：载物台,用于支撑超薄玻璃；粘合剂提供部件,用于将粘合剂提供到由载物台支撑的超薄玻璃上；以及非接触式按压部件,包含多孔板,多孔板具有多个孔隙且通过将气体注入到多个孔隙的至少一部分将按压力提供到利用其间的粘合剂层压的多个超薄玻璃上。(The present disclosure relates to an apparatus for processing ultra-thin glass and a method for processing ultra-thin glass in which a plurality of ultra-thin glasses are laminated. An apparatus for processing ultra-thin glass comprising: the objective table is used for supporting the ultrathin glass; an adhesive supply member for supplying an adhesive to the ultra-thin glass supported by the stage; and a non-contact pressing member including a porous plate having a plurality of pores and providing a pressing force onto the plurality of ultra-thin glasses laminated with the adhesive therebetween by injecting a gas into at least a portion of the plurality of pores.)

1. An apparatus for processing ultra-thin glass comprising:

an object stage configured to support ultra-thin glass;

an adhesive providing member configured to provide an adhesive onto the ultra-thin glass supported by the stage; and

a non-contact pressing member including a porous plate having a plurality of pores and configured to provide a pressing force onto the plurality of ultra-thin glasses laminated with the adhesive therebetween by injecting a gas into at least a portion of the plurality of pores.

2. The apparatus for processing ultra-thin glass according to claim 1, further comprising a height measuring part configured to measure at least one of a height of the adhesive and a height of the ultra-thin glass laminated on the adhesive.

3. The apparatus for processing ultra-thin glass as in claim 1, further comprising a control component configured to selectively control an internal pressure of pores of each region of the porous plate.

4. The apparatus for processing ultra-thin glass according to claim 3, further comprising a pressure variable distribution storing part configured to store a relative pressure variable distribution of each region of the porous plate to surface pressing,

wherein the control part selectively controls the inner pressure of the pores of each region of the porous plate according to the relative pressure variable distribution of each region of the porous plate, which is stored in the pressure variable distribution storage part.

5. The apparatus for processing ultra-thin glass according to claim 1, wherein the porous plate comprises a plurality of unit plates each having pores formed therein.

6. The apparatus for processing ultra-thin glass according to claim 1, wherein the non-contact pressing member further comprises at least one of:

a gas supply connected to the porous plate to provide the gas to at least a portion of the pores; and

a vacuum pump connected to the porous plate to create a negative pressure in the remainder of the pores.

7. The apparatus for processing ultra-thin glass according to claim 1, wherein the porous plate has a planar area equal to or larger than the ultra-thin glass.

8. The apparatus for processing ultra-thin glass according to claim 7, wherein the non-contact pressing member simultaneously supplies the pressing force to the entire surface of the ultra-thin glass.

9. The apparatus for processing ultra-thin glass according to claim 1, further comprising a processing component configured to process an ultra-thin glass laminate in which a plurality of the ultra-thin glass is laminated.

10. A method for processing ultra-thin glass comprising:

supporting a first ultra-thin glass on an object stage;

providing an adhesive to the first ultra-thin glass supported by the stage;

providing a second ultra-thin glass onto the adhesive; and

providing a pressing force on the second ultra-thin glass by injecting a gas into at least a portion of the plurality of pores of the porous plate.

11. The method for processing ultra-thin glass as recited in claim 10, further comprising:

measuring the height of the adhesive; and

determining the pressing force caused by the porous plate.

12. The method for processing ultra-thin glass as in claim 10, further comprising determining a relative pressure variation profile for each region of the multi-well plate to surface pressing.

13. The method for processing ultra-thin glass as recited in claim 10, further comprising selectively controlling an internal pressure of pores of each region of the porous plate.

14. The method for processing ultra-thin glass as claimed in claim 13, wherein the porous plate comprises a plurality of unit plates each having pores formed therein, and

selectively controlling the internal pressure of the pores is performed by independently controlling each of the plurality of unit plates.

15. The method for processing ultra-thin glass as in claim 12, wherein determining the relative pressure variable profile for each region comprises:

providing initial ultra-thin glass onto the porous plate;

floating the initial ultra-thin glass by injecting the gas into at least a portion of the pores;

measuring the flatness of the floated initial ultra-thin glass; and

flattening the floated initial ultra-thin glass by controlling the internal pressure of the pores of each region of the porous plate according to the flatness of the initial ultra-thin glass.

16. The method for processing ultra-thin glass as recited in claim 15, wherein planarizing the floated initial ultra-thin glass includes creating an internal pressure in a portion of a plurality of pores that is different from other pores.

17. The method for processing ultra-thin glass as recited in claim 12, further comprising:

measuring the height of the second ultra-thin glass; and

controlling an internal pressure of pores of each region of the porous plate according to the measured height of the second ultra-thin glass.

18. The method for processing ultra-thin glass as recited in claim 10, further comprising processing an ultra-thin glass laminate in which the first ultra-thin glass and the second ultra-thin glass are laminated.

Technical Field

The present disclosure relates to an apparatus for processing ultra-thin glass and a method for processing ultra-thin glass, and more particularly, to an apparatus for processing ultra-thin glass and a method for processing ultra-thin glass in which a plurality of ultra-thin glasses are laminated.

Background

In recent years, display products have been subject to significant technological development through constant changes and innovations. As the use functions have been diversified and the product design has been continuously developed, portable and convenient products have been continuously developed. Future product changes may also be continually developed to reflect the versatility and simplicity and convenience of product design, and the target point for future product changes may result in flexible, foldable, and rollable display products.

To enable flexible display products, such as flexible, foldable and rollable display products, display assemblies capable of maintaining product performance when bent are preferred. For this purpose, high strength films have been applied to typical flexible display products. However, high strength films have the following limitations: the film may be subjected to a bending test ten thousand or less and have a transmission of 96% or less than 96%. Therefore, in recent years, flexible ultra-thin glass (UTG) which is extremely thin, has 98% or more transmittance, and is capable of being folded and unfolded more than ten thousand times has been intensively developed.

Since this ultra-thin glass (UTG) has an extremely small thickness of less than 150 microns, ultra-thin glass is difficult to handle and is easily broken during processing such as a cutting process or an edge process that cuts the glass into a predetermined size or shape.

Accordingly, a method and apparatus for processing ultra-thin glass, which can stably manufacture ultra-thin glass suitably used for various product sizes and purposes without breakage defects.

[ related art documents ]

[ patent document ]

Korean patent No. 10-1334406

Disclosure of Invention

The present disclosure provides an apparatus for processing ultra-thin glass and a method for processing ultra-thin glass that bonds a plurality of ultra-thin glass in a non-contact manner.

According to an exemplary embodiment, an apparatus for processing ultra-thin glass includes: an object stage configured to support ultra-thin glass; an adhesive supply member configured to supply an adhesive onto the ultra-thin glass supported by the stage; and a non-contact pressing member including a porous plate having a plurality of pores and configured to provide a pressing force onto the plurality of ultra-thin glasses laminated with the adhesive therebetween by injecting a gas into at least a portion of the plurality of pores.

The apparatus may further include a height measuring part configured to measure at least one of a height of the adhesive and a height of the ultra-thin glass laminated on the adhesive.

The apparatus may further comprise a control member configured to selectively control an internal pressure of the pores of each region of the perforated plate.

The apparatus may further include a pressure variable distribution storing part configured to store a relative pressure variable distribution of each region of the porous plate pressed against the surface, and the control part may selectively control the internal pressure of the pores of each region of the porous plate according to the relative pressure variable distribution of each region of the porous plate stored in the pressure variable distribution storing part.

The multi-well plate may include a plurality of unit plates each having apertures formed therein.

The non-contact pressing member may further include at least one of: a gas supply connected to a porous plate that provides gas to at least a portion of the pores; and a vacuum pump connected to the porous plate to form a negative pressure in the remaining portion of the pores among the plurality of pores.

The perforated plate may have a planar area equal to or greater than the ultra-thin glass.

The non-contact pressing member may simultaneously provide the pressing force to the entire surface of the ultra-thin glass.

The apparatus may further include a processing component configured to process an ultra-thin glass laminate in which a plurality of ultra-thin glasses are laminated.

According to another exemplary embodiment, a method for processing ultra-thin glass comprises: supporting a first ultra-thin glass on an object stage; providing an adhesive to a first ultra-thin glass supported by a stage; providing a second ultra-thin glass to the adhesive; and providing a pressing force onto the second ultra-thin glass by injecting a gas into at least a portion of the plurality of pores of the porous plate.

The method may further comprise: measuring the height of the adhesive; and determining the pressing force caused by the porous plate.

The method may further comprise determining a relative pressure variation profile for each region of the multi-well plate for the surface pressing.

The method may further comprise selectively controlling the internal pressure of the pores of each region of the perforated plate.

The porous plate may include a plurality of unit plates each having pores formed therein, and the selective control of the internal pressure of the pores may be performed by independently controlling each of the plurality of unit plates.

The determination of the relative pressure variation distribution for each zone may include: providing initial ultra-thin glass onto a porous plate; floating the initial ultra-thin glass by injecting a gas into at least a portion of pores among the plurality of pores; measuring the flatness of the floating initial ultrathin glass; and flattening the floating ultra-thin initial glass by controlling the internal pressure of the pores of each region of the porous plate according to the measured flatness of the ultra-thin initial glass.

The planarization of the floating initial ultra-thin glass may include forming an internal pressure in a portion of the plurality of pores that is different from internal pressures of other pores.

The method may further comprise: measuring the height of the second ultra-thin glass; and controlling the internal pressure of the pores of each region of the porous plate according to the measured height of the second ultra-thin glass.

The method may further comprise processing the ultra-thin glass laminate in which the first ultra-thin glass and the second ultra-thin glass are laminated.

Drawings

Exemplary embodiments may be understood in more detail by the following description taken in conjunction with the accompanying drawings, in which:

fig. 1 is a schematic cross-sectional view illustrating an apparatus for processing ultra-thin glass according to an exemplary embodiment.

Fig. 2 is a conceptual diagram for explaining the supply of an adhesive supply member according to an exemplary embodiment.

Fig. 3 is a perspective view illustrating a multi-well plate including a plurality of unit plates according to an exemplary embodiment.

Fig. 4 is a conceptual diagram for explaining a cutting process performed by a processing part according to an exemplary embodiment.

FIG. 5 is a flow chart illustrating a method for processing ultra-thin glass in accordance with another exemplary embodiment.

Fig. 6 is a conceptual diagram for explaining the determination of the pressing force according to another exemplary embodiment.

Fig. 7 is a view illustrating a process of determining a relative pressure variation distribution of a multi-well plate according to another exemplary embodiment.

Fig. 8 is a conceptual diagram for explaining controlling the internal pressure of the pores of each region of the porous plate according to the height of the second ultra-thin glass according to another exemplary embodiment.

Detailed Description

Hereinafter, specific embodiments will be described in more detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Wherever possible, like reference numbers are used in the description and drawings to refer to the same or like elements. In the drawings, the size of layers and regions may be exaggerated for clarity of illustration. Like reference numerals in the drawings denote like elements, and thus the description thereof will be omitted.

Fig. 1 is a schematic cross-sectional view illustrating an apparatus for processing ultra-thin glass according to an exemplary embodiment.

Referring to fig. 1, an apparatus 100 for processing ultra-thin glass (hereinafter, referred to as an ultra-thin glass processing apparatus 100) according to an exemplary embodiment may include: an object stage 110 for supporting the ultra-thin glass 10; an adhesive supply part 120 for supplying an adhesive 20 onto the ultra-thin glass 10 supported by the stage 110; and a non-contact pressing member 130 including a porous plate 131, the porous plate 131 having a plurality of pores 131a and providing a pressing force onto the plurality of ultra-thin glasses 10 laminated while providing the adhesive 20 therebetween by injecting a gas into at least a portion of the plurality of pores 131 a.

When the ultra-thin glass laminate 50 is formed by providing the adhesive 20 between a plurality of ultra-thin glasses 10, the stage 110 may support the ultra-thin glass (UTG)10 and fix the ultra-thin glass 10 disposed at the lowermost layer. For example, the stage 110 may support the ultra-thin glass 10 on its porous surface in an adsorptive fixed manner. Here, the aperture may have a width (or diameter) equal to or less than the thickness T of the ultra-thin glass 10 such that the ultra-thin glass 10 is not bent (bent/curved) when a portion of the ultra-thin glass 10 is drawn into the aperture by an adsorption force. Here, when the size of the pore is not constant, the maximum pore may have a width equal to or less than the thickness of the ultra-thin glass 10.

Here, the transferring means (not shown) may transfer the ultra-thin glass 10 onto the stage 110 by supporting any one of two surfaces of the ultra-thin glass 10 opposite to each other. For example, the transfer member 120 may transfer the ultra-thin glass 10 by supporting the ultra-thin glass 10 in an adsorption fixing manner, and includes a transfer robot. Here, similarly to the stage 110, the aperture of the transfer member (not shown) for suction fixing may have a width (or diameter) equal to or less than the thickness of the ultra-thin glass 10. Here, the transfer means (not shown) may transfer (or provide) the ultra-thin glass 10 disposed at the lowermost layer and contacting the stage 110, provide the ultra-thin glass 10 onto the adhesive sheet 20 disposed on the ultra-thin glass 10, or transfer the ultra-thin glass 10 onto the stage 110 so that the surface facing the stage 110 is exposed. Further, the ultra-thin glass 10 disposed at the lowermost layer may be supported on the stage 110 and disposed at the processing position by moving the stage 110 by using another device other than the transfer member 120.

Fig. 2 is a conceptual view for explaining supply of an adhesive supply member according to an exemplary embodiment, (a) of fig. 2 is a view illustrating supply of a first adhesive, and (b) of fig. 2 is a view illustrating supply of a second adhesive.

Referring to fig. 2, the adhesive supply part 120 may supply an adhesive 20 onto the ultra-thin glass 10 supported by the stage 110, contact the upwardly exposed ultra-thin glass 10 on the stage 110 to supply the adhesive 20, and adhere a plurality of ultra-thin glasses 10 by the adhesive 20. Here, the adhesive supply part 120 may apply and supply the liquefied adhesive 20 having viscosity onto the ultra-thin glass 10, or print the liquefied adhesive 20 such as resin onto the ultra-thin glass 10. Here, the adhesive 20 may be photo-cured by light such as Ultraviolet (UV) and have improved adhesive force when cured.

For example, the adhesive 20 may be rapidly cured when irradiated with light having a predetermined wavelength, and the light having the predetermined wavelength may be UV or visible light having a specific wavelength band. Here, the adhesive 20 may be a photo-curing adhesive or an ultraviolet adhesive, which is cured by UV having a wavelength band of 254 nm or 365 nm, and the photo initiator may be contained in the adhesive 20.

Here, the adhesive supply member 120 may supply the first adhesive 21 to the edge portion of the ultra-thin glass 10 and supply the second adhesive 22 different from the first adhesive 21 to the central portion of the ultra-thin glass 10. Here, the first adhesive 21 and the second adhesive 22 may differ in at least one of viscosity, material (or composition), density, and material state (e.g., liquid, gel, or solid). For example, the first adhesive 21 and the second adhesive 22 may have different viscosities, and thus different materials and/or densities. Further, the first adhesive 21 may be cured by light having a first wavelength, and the second adhesive 22 may be cured by light having a second wavelength different from the first wavelength.

The adhesive providing member 120 may provide the adhesive 20 by distinguishing an edge portion and a central portion of the ultra-thin glass 10. That is, a dam portion or a sealing portion for limiting or preventing the deviation and leakage of the adhesive 20 (i.e., the second adhesive and/or the first adhesive) from the ultra-thin glass 10 may be formed at an edge portion of the ultra-thin glass 10, and the adhesive 20 (i.e., the second adhesive) for diffusing in a space surrounded by the dam portion or the sealing portion to stably adhere the plurality of ultra-thin glasses 10 to each other may be formed at a central portion of the ultra-thin glass 10. Here, the first adhesive 21 may be the adhesive 20 for forming the dam portion or the sealing portion. The first adhesive may be in a liquid phase having a viscosity and applied on the edge portion of the ultra-thin glass 10. The adhesive 20 having a high viscosity may be used to effectively form the dam portion or the sealing portion. Further, the second adhesive 22 may be the adhesive 20 spread in the space surrounded by the dam portion or the sealing portion by pressing the non-contact pressing member 130. For example, the second adhesive 22 may be in a liquid phase having a viscosity and applied to the central portion of the ultra-thin glass 10, and the adhesive 20 having a low viscosity may be used to effectively diffuse between a plurality of ultra-thin glasses 10.

For example, the first adhesive 21 and the second adhesive 22 may be printed on the ultra-thin glass 10. The first adhesive 21 may be printed along (or around) the edge portion of the ultra-thin glass 10 by the first adhesive discharge part 121, and the second adhesive 22 may be printed in the space (i.e., the central portion of the ultra-thin glass) surrounded by the dam portion or the sealing portion by the second adhesive discharge part 122.

The non-contact pressing member 130 may provide a pressing force in a non-contact manner onto the plurality of ultra-thin glasses 10 laminated with the adhesive 20 therebetween, and allow the plurality of ultra-thin glasses 10 facing each other (or adjacent to each other) to come close to each other so that the adhesive 20 is uniformly spread among the plurality of ultra-thin glasses 10. For example, the non-contact pressing member 130 may be disposed on the stage 110 to slowly press the upper ultra-thin glass 10 exposed on the stage 110 such that the liquefied adhesive 20 is uniformly spread among the plurality of ultra-thin glasses 10.

Here, the non-contact pressing member 130 may include a porous plate 131 having a plurality of pores 131a and inject a gas (e.g., air) into at least a portion of the plurality of pores 131 a. Here, the pores 131a may include irregularly formed pores or regularly arranged perforations to form a path. Here, when the pores 131a are irregularly formed pores, two or more pores may communicate with each other to form a channel through which gas flows. For example, since two or more than two apertures 131a communicate with each other, a channel connecting (or communicating) the first and second surfaces opposite to each other of the porous plate 131 may be formed.

Since the pressing force is provided to the plurality of ultra-thin glasses 10 by injecting the gas into at least a portion of the plurality of pores 131a, the plurality of ultra-thin glasses 10 can be bonded in a non-contact manner, and contamination and breakage (or damage) of the surface of the ultra-thin glass 10 can be prevented.

Here, the non-contact pressing member 130 may simultaneously provide a pressing force to the entire surface (or front surface) of the ultra-thin glass 10 while pressing the pressing surface (or surface) of the ultra-thin glass 10, and bond the plurality of ultra-thin glasses 10 in an entire surface bonding method in which the plurality of ultra-thin glasses 10 are bonded by simultaneously pressing the entire ultra-thin glass 10. Therefore, the tact time (tact time) for bonding a plurality of ultra-thin glasses 10 can be further reduced as compared with the case when part of the surface of the ultra-thin glass 10 is sequentially pressed by using a roller or the like.

Here, the plane area (or horizontal area) of the porous plate 131 may be equal to or greater than the plane area of the ultra-thin glass 10. That is, the porous plate 131 may have a planar area equal to or greater than the ultra-thin glass 10. Accordingly, the porous plate 131 may press the ultra-thin glass 10 by providing a pressing force (i.e., gas pressure) to the entire surface of the ultra-thin glass 10 and bond a plurality of ultra-thin glasses 10 by the entire surface bonding method. For example, the gas may be injected to the entire surface of the ultra-thin glass 10 by allowing the distribution area of the plurality of pores 131a to be the same as the planar area of the ultra-thin glass 10 in the entire planar area of the porous plate 131. By this, the gas pressure (or atmospheric pressure) can be provided to the entire surface of the ultra-thin glass 10 and press the ultra-thin glass 10. When the gas pressure distribution caused by the pores 131a of each region of the porous plate 131 is adjusted by selectively controlling the internal pressure of the plurality of pores 131a, a negative pressure providing a suction force to suck air (or gas) may be formed in a portion of the plurality of pores 131 a.

Since the ultra-thin glass 10 has an extremely small thickness equal to or less than about 150 μm, when a process such as a cutting process of cutting the ultra-thin glass 10 into a predetermined size or a predetermined shape or an edge process of finely adjusting an edge surface of the ultra-thin glass 10 is performed, handling of the ultra-thin glass 10 hardly causes left/right shaking of the ultra-thin glass 10, thereby causing damage, for example, being easily broken.

Accordingly, in an exemplary embodiment, since the ultra-thin glass laminate 50 is formed by laminating a plurality of ultra-thin glasses 10 through the adhesive 20, the thickness thereof may be increased by more than 150 micrometers to easily perform handling during a process such as a cutting process of an edge process. Accordingly, stable handling may be performed to allow precise processing and prevent damage to the ultra-thin glass 10 during processing. Further, a plurality of ultra-thin glasses 10 can be processed at one time, so that ultra-thin glasses 10 having excellent process uniformity in size or the like can be processed, and the number of cutting processes can be reduced to shorten the tact time for processing the ultra-thin glass 10.

The ultra-thin glass processing apparatus 100 according to an exemplary embodiment may further include a height measuring part 140 for measuring at least one of a height of the adhesive 20 and a height of the ultra-thin glass 10 laminated on the adhesive 20.

The height measuring part 140 may measure the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20, and the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20 at a plurality of points. The height measuring part 140 may measure the height of the adhesive 20 provided (or applied) on the ultra-thin glass 10, the height of the left and right sides and/or the front and rear sides of the adhesive 20 at two or more points, and the height of the front and rear and left and right sides of the adhesive 20 at four or more points. Here, the pressing force provided to the plurality of ultra-thin glasses 10 by the non-contact pressing member 130 may be determined by using a measured height (e.g., an average height) of the adhesive 20, and a proper pressing force that allows the adhesive 20 to uniformly spread among the plurality of ultra-thin glasses 10 may be determined. Further, the flatness (or levelness) of the adhesive 20 provided on the ultra-thin glass 10 may be measured by using the height of the adhesive 20 measured at two or more points, the internal pressure of the pores 131a of each region of the porous plate 131 may be adjusted according to the measured flatness of the adhesive 20, and the pressing force (or gas pressure) may be changed for each region of the ultra-thin glass 10. For example, since the internal pressure of the pores 131a is selectively controlled for each region of the porous plate 131, the gas pressure (or pressing force) caused by the pores 131a of each region of the ultra-thin glass 10 may be adjusted. Here, a relatively high gas pressure may be provided to the region having a relatively high height of the adhesive 20, and a relatively low gas pressure may be provided to the region having a relatively low height of the adhesive 20.

Further, the height measuring part 140 may measure the height of the ultra-thin glass 10 at a plurality of points, and the height of the ultra-thin glass 10 disposed at the (most) upper portion and laminated on the adhesive 20. Here, the left-right flatness and/or the front-back flatness of the ultra-thin glass 10 may be measured by using the height of the ultra-thin glass 10 measured at two or more points, and the height of the ultra-thin glass 10 may be measured at four or more points to measure (or adjust) the flatness of all the front-back and left-right sides. The gas pressure caused by the pores 131a may be adjusted for each region of the ultra-thin glass 10 according to the measured flatness of the ultra-thin glass 10, and since the internal pressure of the pores 131a of each region of the porous plate 131 is selectively controlled, the gas pressure provided for each region of the ultra-thin glass 10 caused by the pores 131a may be adjusted. For example, a relatively high gas pressure may be provided to a point (or region) having a relatively high height of the ultra-thin glass 10, and a relatively low gas pressure may be provided to a point having a relatively low height of the ultra-thin glass 10. By this, the flatness of the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are bonded and laminated to each other can be maintained at a predetermined level.

Here, the height measuring part 140 may measure the height of the ultra-thin glass 10 placed only on the adhesive 20 and the height of the ultra-thin glass 10 placed at the (uppermost) upper portion of the plurality of ultra-thin glasses 10 pressed and adhered. When measuring the height of the ultra-thin glass 10 mounted only on the adhesive 20, since the gas pressure provided for each region of the ultra-thin glass 10 caused by the pores 131a is controlled, the gas pressure (distribution) or the pressing force can be provided to the ultra-thin glass 10 mounted only on the adhesive 20. Further, when measuring the height of the ultra-thin glass 10 disposed at the upper portion of the plurality of ultra-thin glasses 10 pressed and bonded, since the gas pressure provided for each region of the ultra-thin glass 10 caused by the pores 131a is controlled, the gas pressure or the pressing force may be provided to the ultra-thin glass 10 to be laminated later.

Further, the height measuring part 140 may be used in a process of determining a relative pressure variation distribution of each region of the porous plate 131 by using the initial ultra-thin glass 10a, and a detailed description thereof will be described in detail in the process of determining the relative pressure variation distribution.

Further, the pressing force applied to the plurality of ultra-thin glasses 10 may be determined by measuring the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20. Here, the pressing force provided for each region of the ultra-thin glass 10 may be changed according to the flatness of the adhesive 20 and/or the flatness of the ultra-thin glass 10 measured by using the measured height of the adhesive 20 and/or the measured height of the ultra-thin glass 10 laminated on the adhesive 20. Here, the ultra-thin glass processing apparatus 100 according to an exemplary embodiment may further include a pressing force storage means (not shown) for storing a pressing force (distribution) determined by using at least one of the height of the adhesive 20 measured by the height measuring means 140 and the height of the ultra-thin glass 10 laminated on the adhesive 20. The ultra-thin glass 10 disposed at the (uppermost) upper portion may be pressed, and the plurality of ultra-thin glasses 10 may be adhered to each other by providing a pressing force onto the plurality of ultra-thin glasses 10 according to a pressing force (distribution) stored in a pressing-force storing means (not shown).

The ultra-thin glass processing apparatus 100 according to an exemplary embodiment may further include a control member 150 for selectively controlling the internal pressure of the pores 131a of each region of the porous plate 131.

The control part 150 may selectively control the internal pressure of the pores 131a of each region of the porous plate 131, by which the internal pressure distribution of the pores 131a of each region of the porous plate 131 is adjusted (or regulated), and the gas pressure provided for each region of the ultra-thin glass 10 caused by the pores 131a is adjusted. Therefore, the gas pressure distribution (or pressing force) caused by the pores 131a can be controlled and/or compensated according to the height of the applied adhesive 20 and/or the surface height of the laminated ultra-thin glass 10 measured by using the height measuring means 140.

Here, the control part 150 may independently control the internal pressure of each of the plurality of pores 131a, and since two or more pores 131a among the plurality of pores 131a are grouped, the internal pressure of each group may be independently controlled. For example, the control part 150 may selectively control the internal pressure of the apertures 131a of each region of the porous plate 131 by controlling the gas valve 132b provided to each of the gas supply pipes 132a connected to the plurality of apertures 131a to supply gas and/or the vacuum valve 133b provided to each of the vacuum pipes connected to the plurality of apertures 131a for forming vacuum (pressure) in the plurality of apertures 131 a. Here, when the internal pressure of each of the plurality of apertures 131a is independently controlled, a plurality of gas supply pipes 132a and/or a plurality of vacuum pipes 133a may be connected to the plurality of apertures 131a, respectively, and a gas valve 132b and/or a vacuum valve 133b may be provided to each of the gas supply pipes 132a and/or the vacuum pipes 133 a. Further, when two or more apertures 131a among the plurality of apertures 131a are grouped, since the plurality of gas supply pipes 132a and/or the plurality of vacuum pipes 133a connected to the plurality of apertures 131a are grouped according to the plurality of grouped apertures 131a, respectively, the gas valve 132b and/or the vacuum valve 133b may be provided to each group of the gas supply pipes 132a and/or the vacuum pipes 133 a.

The ultra-thin glass processing apparatus 100 according to an exemplary embodiment may further include a pressure variable distribution storing part 155 for storing a relative pressure variable distribution of each region of the porous plate 131 against surface pressing.

The pressure variation distribution storing part 155 may store the relative pressure variation distribution of each region of the porous plate 131 that presses the ultra-thin glass 10 through the surface of the porous plate 131. By this, the gas can be injected to at least a part of the pores 131a, and the pressing force can be provided to the entire ultra-thin glass 10 by controlling the internal pressure of the pores 131a of each region of the porous plate 131 according to the stored relative pressure variable distribution of each region of the porous plate 131. Here, the relative pressure variation distribution of each region of the porous plate 131 capable of providing a uniform pressing force to the entire surface of the ultra-thin glass 10 may be stored in the pressure variation distribution storage part 155. Here, the relative pressure variation distribution of the pores 131a of each region of the porous plate 131, which is obtained by compensating (or controlling) the relative pressure variation of the pores 131a of each region of the porous plate 131, may be updated and stored in the pressure variation distribution storage part 155 in order to planarize the ultra-thin glass laminate 50 according to the height of the adhesive 20 and/or the height of the ultra-thin glass 10 laminated on the adhesive 20, which are measured by the height measuring part 140.

For example, the relative pressure variable distribution of each region of the porous plate 131 may be stored as a graph or map in the pressure variable distribution storage part 155. The internal pressure of the pores 131a of each region of the porous plate 131 may be formed by reflecting a relative pressure variable to each region or each pore 131a according to a graph or map.

Further, the control part 150 may selectively control the internal pressure of the pores 131a of each region of the porous plate 131 according to the relative pressure variable distribution of each region of the porous plate 131 stored in the pressure variable distribution storage part 155. Further, the control part 150 may selectively control the inner pressure of the pores 131a of each region of the porous plate 131 according to the relative pressure variation distribution of each region of the porous plate 131 to provide a uniform pressing force to the entire surface of the ultra-thin glass 10. In addition, when the adhesive 20 and/or the ultra-thin glass 10 laminated on the adhesive 20 is inclined rather than being planarized, the ultra-thin glass laminate 50 may be planarized by providing a different pressing force per region of the ultra-thin glass 10.

Fig. 3 is a perspective view illustrating a multi-well plate including a plurality of unit plates according to an exemplary embodiment.

Referring to fig. 3, the porous plate 131 may include a plurality of unit plates 131b each including the pores 131 therein. One aperture 131a or a plurality of apertures 131a may be formed in each of the unit plates 131 b. When one aperture 131a is formed in each unit plate 131b, one gas supply pipe 132a and/or one vacuum pipe 133a may be connected to each unit plate 131b to easily independently control the internal pressure of each aperture 131 a. Further, when a plurality of apertures 131a are formed in each unit plate 131b, the plurality of apertures 131a may be grouped for each unit plate 131b, and a gas supply pipe 132a and/or a vacuum pipe 133a may be connected to each unit plate 131b to easily independently control the internal pressure of each grouped aperture 131a of each group. By this, the internal pressure of the pores 131a of each unit plate 131b can be controlled, and thus the internal pressure of the pores 131a of each region of the porous plate 131 can be controlled (or adjusted).

Here, the control part 150 may independently control the internal pressure of the aperture 131a of each of the plurality of unit plates 131b, and since each unit plate 131b is independently controlled, when one aperture 131a is formed in each unit plate 131b, the internal pressure of each aperture 131a may be independently controlled. Further, when a plurality of apertures 131a are formed in each unit plate 131b, the control part 150 may control each group of apertures 131a grouped for each unit plate 131 b. Here, the number of the plurality of unit plates 131b may be equal to or greater than the number of the plurality of points at which the height of the adhesive 20 and/or the height of the ultra-thin glass 10 is measured. By this, the internal pressure of the pores 131a of each unit plate 131b can be determined in a form matched with the height difference at a plurality of points, and a plurality of ultra-thin glasses 10 can be laminated and bonded while the flatness of the ultra-thin glass laminate 50 is maintained at a predetermined level.

The non-contact pressing member 130 may further include at least one of: a gas supply source 132 connected to a porous plate that supplies gas to at least a part of the apertures 131 a; and a vacuum pump 133 connected with the porous plate 131 to form a negative pressure in the remaining part of the pores 131a among the plurality of pores 131 a. The gas supply source 132 may be connected with the porous plate 131 and supply gas to at least a portion of the apertures 131a through the gas supply pipe 132 a. Here, the gas supply pipe 132a may be connected to all of the plurality of apertures 131a, the gas valves 132b provided to the gas supply pipe 132a may be individually controlled by the control part 150 to selectively provide the gas to the plurality of apertures 131a, and the gas may be supplied to at least a portion of the apertures 131a among the plurality of apertures 131 a. Here, the gas valve 132b may adjust the amount of gas provided to the aperture 131a, and the internal pressure (or injection pressure) of the aperture 131a may be determined according to the amount of gas provided to the aperture 131 a.

The vacuum pump 133 may be connected with the porous plate 131 through a vacuum pipe 133a, and sucks (or absorbs) air (or gas) to form a negative pressure (or vacuum pressure) in the remaining portion of the aperture 131a among the plurality of apertures 131 a. Here, the vacuum pipes 133a may be connected to all of the plurality of pores 131a, and the negative pressure may not be formed in all of the plurality of pores 131a as necessary upon injection of the gas (i.e., positive pressure). That is, since the vacuum valves 133b provided to each vacuum tube 133a are individually controlled by the control part 150, the negative pressure may be selectively formed in the plurality of apertures 131a, and the negative pressure may be formed in the remaining portions of the apertures 131a among the plurality of apertures 131 a. Here, since it is necessary to provide the pressing force caused by the gas injection onto the plurality of ultra-thin glasses 10, the gas-injected pores 131a among the plurality of pores 131a are absolutely required, but the pores 131a in which the negative pressure is formed among the plurality of pores 131a are not required. Here, the vacuum valve 133b may adjust the intensity of the vacuum pressure (or negative pressure) formed in the aperture 131a, and the internal pressure (or suction force) of the aperture 131a may be determined according to the vacuum pressure formed in the aperture 131 a.

The gas pressure distribution (i.e., the relative pressure variation distribution of each region of the porous plate) is important so that the ultra-thin glass 10 flattened and provided on the adhesive 20 is pressed while maintaining the flattened state rather than being inclined, or the ultra-thin glass 10 inclined and laminated is flattened by pressing. Here, when the gas pressure distribution is adjusted by using only the intensity (i.e., positive pressure) of the gas injected from the pores 131a, but the injection pressure of the pores 131a disposed at the local portion (or the partial region) is reduced, or the supply of the gas to the pores 131a disposed at the local portion is blocked (or stopped), even the (local) portion of the ultra-thin glass 10 corresponding to the local portion may receive the pressing force as an effect of the injection pressure of the gas injected from the pores 131a surrounding it. Due to this, the feature of pressing and pushing one part of the ultra-thin glass 10 and sucking (or absorbing) and pulling another part of the ultra-thin glass 10 may not be performed. Therefore, the feature of pressing the ultra-thin glass 10 while maintaining the flatness of the ultra-thin glass 10 or pressing the ultra-thin glass 10 while planarizing the inclined ultra-thin glass 10 may not be performed.

However, when a negative pressure is formed in the aperture 131a disposed at the local portion by the vacuum pump 133, the effect of the injection pressure of the gas injected from the aperture 131a (i.e., the positive pressure) may be offset by the negative pressure to provide a suction force for suction and drawing to the (local) portion of the ultra-thin glass 10 corresponding to the local portion. By this, a part of the ultra-thin glass 10 (i.e., another part of the ultra-thin glass corresponding to the partial section) can be pressed and pushed, and another part of the ultra-thin glass 10 (i.e., a part of the ultra-thin glass corresponding to the partial section) can be sucked and pulled. Therefore, the ultra-thin glass 10 may be pressed while maintaining the flatness of the ultra-thin glass 10 by adjusting the pressing force and the suction force at each portion of the ultra-thin glass 10, or the ultra-thin glass 10 may be pressed while planarizing the inclined ultra-thin glass 10.

Fig. 4 is a conceptual view for explaining a cutting process performed by a processing part according to an exemplary embodiment, (a) of fig. 4 is a view illustrating an ultra-thin glass laminate is cut by using a cutting wheel, and (b) of fig. 4 is a view illustrating an ultra-thin glass laminate separated into laminate units having a predetermined size.

Referring to fig. 4, the ultra-thin glass processing apparatus 100 may further include a processing part for processing the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are laminated.

The processing means may process the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 are laminated, and may perform processes such as a cutting process of cutting the ultra-thin glass laminate 50 into a predetermined size or shape and/or an edge process of finely adjusting an edge surface. Here, the cutting process may cut the ultra-thin glass laminate 50 by a necessary predetermined size to separate (or divide) into the laminate units 5. For example, the processing component may include a cutting wheel 161. In the cutting process, the ultra-thin glass laminate 50 may be cut (or separated) into laminate units 5 each having a predetermined size by using a Computer Numerical Control (CNC) cutting unit mounted with a cutting wheel 161 made of a diamond abrasive. Here, the processing member may cut the ultra-thin glass laminate 50 by a laser cutting method using a laser.

In addition, the edge process may remove debris (chipping) on the edge surfaces of the ultra-thin glass laminate 50 and/or the laminate unit 5. For example, the micro-debris present at the edge surface of the ultra-thin glass laminate 50 and/or the shape-treated laminate unit 5 may be removed by using a polishing wheel. Here, a soft cloth having excellent durability can be used as the surface material of the polishing wheel. Chemical edge polishing may be performed on each of the plurality of ultra-thin glasses 10 of the ultra-thin glass laminate 50 and/or the edge surface of the laminate unit 5 so as to form a C-angle rounded in a "C" shape. While the ultra-thin glass laminate 50 and/or the laminate unit 5 is slowly rotated in a state where the ultra-thin glass laminate 50 and/or the laminate unit 5 is firmly mounted to the chemical edge healing apparatus and then positioned to be sufficiently immersed in the edge healing bath filled with the chemical polishing solution, chemical polishing may be performed to uniformly heal the entire edge surface. By this, the ultra-thin glass 10 may have excellent edge strength and improved bending strength, and each of the plurality of ultra-thin glasses 10 may be easily separated from the ultra-thin glass laminate 50 and/or the laminate unit 5.

In an exemplary embodiment, since the ultra-thin glass laminate 50 is formed by laminating a plurality of ultra-thin glasses 10 by the adhesive 20, the thickness thereof may be increased by more than 150 micrometers to easily perform handling during a process such as a cutting process of an edge process. Accordingly, stable handling may be performed to allow precise processing and prevent damage to the ultra-thin glass 10 during processing. Further, a plurality of ultra-thin glasses 10 can be processed at one time, so that ultra-thin glasses 10 having excellent process uniformity in size or the like can be processed, and the number of cutting processes can be reduced to shorten the tact time for processing the ultra-thin glass 10.

Here, the ultra-thin glass 10 may have a thickness of 10 to 150 micrometers, and the ultra-thin glass laminate 50 may be formed by laminating two to fifty ultra-thin glasses 10. Generally, glass has brittleness. When the glass has a hardness at a thickness thereof exceeding 150 μm, the glass may not be easily bent. Therefore, when the glass is forcibly bent, the glass may be broken. Therefore, glass may not be applied to a flexible display since glass may not bend while maintaining product performance. Accordingly, an ultra-thin glass 10 having a reduced thickness in the range of 10 to 150 micrometers may be manufactured (or prepared) by etching an original plate glass having a thickness exceeding 400 micrometers with an etchant, and the ultra-thin glass 10 may have a thickness in the range of 10 to 150 micrometers.

In recent years, it is required to apply the ultra-thin glass 10 having a bending radius (R) in the range of 1 to 10 mm to a foldable display, and the ultra-thin glass 10 according to an exemplary embodiment may have a bending radius in the range of 1 to 10 mm. Here, the flexibility of the ultra-thin glass 10 can be characterized by a bending radius. The bending radius (R) may be measured as an inner curvature at a bending position of the ultra-thin glass 10, and is determined by the thickness (T), young's modulus, and bending strength of the ultra-thin glass 10. Here, the extremely small thickness, low young's modulus, and high bending strength of the ultra-thin glass 10 may contribute to a small bending radius and excellent flexibility of the ultra-thin glass 10. Although the ultra-thin glass 10 may have flexibility at a thickness of 150 micrometers or less than 150 micrometers, the ultra-thin glass 10 having a thickness in a range of 100 micrometers to 150 micrometers may be bent only at a bendable level, and may not be bent at a foldable level with a bending radius (R) in a range of 1 mm to 10 mm. Accordingly, the ultra-thin glass 10 may have a thickness in a range of 10 to 100 micrometers, such that the ultra-thin glass 10 is bent at a foldable level.

The ultra-thin glass 10 may be chemically strengthened to have high flexural strength and/or low young's modulus. Here, the chemical strengthening may be performed by coating the surface and/or the edge of the ultra-thin glass 10. For example, chemical strengthening may strengthen the surface of the ultra-thin glass 10 by forming a compressive stress layer on the surface of the ultra-thin glass 10. That is, the ultra-thin glass 10 may include a compressive stress layer formed by chemical strengthening on the surface thereof. A compressive stress layer may be formed on the surface of the ultra-thin glass 10 by ion exchange at the surface of the ultra-thin glass, and the compressive stress may correspond to a tensile stress when the ultra-thin glass 10 is bent. Therefore, the bending strength of the ultra-thin glass 10 can be improved, handling and treatment of the ultra-thin glass 10 can be easily performed, the bending radius of the ultra-thin glass 10 can be reduced, and the flexibility of the ultra-thin glass 10 can be improved.

Here, the ultra-thin glass 10 having a composition containing an alkali metal (e.g., Li, Na, K, etc.) and/or aluminum (Al) can obtain high mechanical strength and excellent flexibility and bending properties at a specific thickness (e.g., a thickness of about 100 micrometers or less than 100 micrometers). The compressive stress layer may be formed and may be formed by using an alkali metal oxide (e.g., K)₂O、Na₂O and Li₂O) as a glass treatment modifier to chemically strengthen ultra-thin glass 10 to produce Na⁺/Li⁺、Na⁺/K⁺And Li⁺/K⁺Ion exchange with sodium (Na) and lithium (Li) present in the ultra-thin glass 10.

For example, the chemical strengthening may be performed by immersing the ultra-thin glass 10 into a salt bath containing monovalent ions for ion exchange with alkali metal ions in the ultra-thin glass 10, and the diameter of the monovalent ions of the salt bath may be larger than the diameter of the alkali metal ions in the ultra-thin glass 10. Therefore, a compressive stress acting on the surface of the ultra-thin glass 10 after the ion exchange can be generated, and by this, the bending strength and flexibility of the ultra-thin glass 10 can be improved. Compressive Stress (CS) generated by the chemical strengthening may improve scratch resistance of the ultra-thin glass 10 so that the ultra-thin glass 10 is not easily scratched, and depth of ion-exchange layer (DoL) may improve scratch resistance so that the ultra-thin glass 10 is less broken even when scratched.

Salts most typically used in chemical strengthening comprise Na containing molten salts⁺K containing molten salt⁺Or mixtures thereof. Frequently used salts may comprise NaNO₃、KNO₃、NaCl、KCl、K₂SO₄、Na₂SO₄And Na₂CO₃And NaOH, KOH, and additives such as other sodium, potassium or cesium salts can be used to further control the rate of chemically-enhanced ion exchange very well.

Here, the ultra-thin glass 10 may contain sodium carbonate (Na)₂CO₃) And sodium calcium glass (Na) at the surface of the ultra-thin glass 10⁺) May be composed of potassium ions (K)⁺) Instead, the potassium ions each have a larger ionic radius at a glass transition temperature (or softening temperature) or higher. That is, since K + having a large particle size is inserted into the internal space of the ultra-thin glass 10 (in which Na + is used for insertion) in the structure of the ultra-thin glass 10 so that the small internal space is completely filled, the surface of the ultra-thin glass 10 can be further strongly compressed to have excellent elasticity and scratch resistance. Since the particle size of potassium ions (K +) is larger than that of sodium ions (Na +) to occupy a larger space, a layer having a strong compressive stress (i.e., a compressive stress layer) may be formed on the surface of the ultra-thin glass 10 to have durability against scratching when the ultra-thin glass 10 is cooled. Further, the ultra-thin glass 10 can be alkali containing glass (e.g., alkali silicate glass, alkali borosilicate glass, alkali aluminoborosilicate glass, alkali borosilicate glass, alkali germanate glass, alkali borogermanate glass, and combinations thereof) and can contain alkali to allow for ion exchange and chemical strengthening.

The ultra-thin glass laminate 50 may be formed by laminating two to fifty ultra-thin glasses 10. A process such as edge treatment may be performed on glass having a thickness of 150 micrometers (0.15 mm) or more than 150 micrometers in a piece unit by using a physical polishing method, and a C-angle rounded in a "C" shape may be formed at the edge of the glass. However, since the ultra-thin glass 10100% having a thickness of less than 150 μm is broken, the physical polishing method may not be applied to one-sheet units. In order to prevent the ultra-thin glass 10 from being 100% damaged when processed in one sheet, the ultra-thin glass laminate 50 having a thickness of 150 micrometers or more than 150 micrometers may be formed by laminating two sheets to fifty sheets of the ultra-thin glass 10, and then a process such as a cutting process or an edge process may be performed on the ultra-thin glass laminate 50. When a plurality of ultra-thin glasses 10 are processed at a time after the ultra-thin glass laminate 50 is formed, since the thickness thereof exceeds 150 micrometers, handling can be easily performed during a process such as a cutting process or an edge process. Accordingly, stable handling may be performed to allow precise processing and prevent damage to the ultra-thin glass 10 during processing. Further, since a plurality of ultra-thin glasses 10 are processed at one time, ultra-thin glass 10 having excellent process uniformity in size or the like can be processed, and the number of cutting processes can be reduced to shorten the tact time for processing the ultra-thin glass 10.

FIG. 5 is a flow chart illustrating a method for processing ultra-thin glass in accordance with another exemplary embodiment.

Hereinafter, a method for processing ultra-thin glass according to another exemplary embodiment will be described in more detail with reference to fig. 5, and features overlapping with those described in the ultra-thin glass processing apparatus according to the exemplary embodiment will be omitted.

A method for processing ultra-thin glass according to another exemplary embodiment may include: a process S100 of supporting the first ultra-thin glass 11 on the stage 110; a process S200 of providing the adhesive 20 onto the first ultra-thin glass 11 supported by the stage 110; a process S300 of providing a second ultra-thin glass 12 onto the adhesive 20; and a process S400 of providing a pressing force onto the second ultra-thin glass 12 by injecting a gas into at least a portion of the plurality of pores 131a of the porous plate 131.

First, in process S100, a first ultra-thin glass 11 is supported on a stage 110. The first ultra-thin glass 11 may be supported on the stage 110, and when the second ultra-thin glass 12 is laminated on the first ultra-thin glass 11 by the adhesive 20, the first ultra-thin glass 11 may be fixed without moving when the ultra-thin glass laminate 50 is formed. For example, the stage 110 may adsorb and fix the first ultra-thin glass 11 on its porous surface.

Thereafter, in the process S200, the adhesive 20 is provided on the first ultra-thin glass 11 supported by the stage 110. The adhesive 20 may be provided on the first ultra-thin glass 11 supported by the stage 110, and the second ultra-thin glass 12 may be adhered to the first ultra-thin glass 11 by the adhesive 20. Here, the adhesive supply part 120 may be used to apply and supply the liquefied adhesive 20 having viscosity onto the first ultra-thin glass 11, or to print the liquefied adhesive 20 such as resin onto the first ultra-thin glass 11. Here, the adhesive 20 may be photo-cured by light such as Ultraviolet (UV) light and have improved adhesive force when cured.

Thereafter, in process S300, a second ultra-thin glass 12 is provided on the adhesive 20. Since the second ultra-thin glass 12 is provided on the adhesive 20, the first ultra-thin glass 11 and the second ultra-thin glass 12 may be adhered to each other by the adhesive 20. Here, the first ultra-thin glass 11 and the second ultra-thin glass 12 may be the same ultra-thin glass 10 and distinguished according to the lamination order.

Further, in the process S400, a pressing force is provided to the second ultra-thin glass 12 by injecting a gas (e.g., air) to at least a portion of the plurality of pores 131a of the porous plate 131. A pressing force may be provided to the second ultra-thin glass 12, and the adhesive 20 may be uniformly spread between the first ultra-thin glass 11 and the second ultra-thin glass 12 by allowing the first ultra-thin glass 11 and the second ultra-thin glass 12 facing each other to be close to each other. For example, by slowly pressing the second ultra-thin glass 12 exposed on the stage 110, the liquefied adhesive 20 may uniformly spread between the first ultra-thin glass 11 and the second ultra-thin glass 12. Here, the porous plate 131 may have a plurality of pores 131a, and the pores 131a may include irregularly formed pores or regularly arranged perforations to form paths. Here, the porous plate 131 may inject gas into at least a portion of the plurality of pores 131 a. Since the pressing force is provided to the ultra-thin glass 10 disposed at the (uppermost) upper portion by injecting the gas to at least a portion of the plurality of pores 131a, the plurality of ultra-thin glasses 10 may be bonded in a non-contact manner, and contamination and damage of the surface of the ultra-thin glass 10 disposed at the (uppermost) upper portion may be prevented.

That is, since the pressing force is provided to the second ultra-thin glass 12 in a non-contact manner by injecting the gas into the porous plate 131, the first ultra-thin glass 11 and the second ultra-thin glass 12 can be adhered to each other while preventing contamination and damage on the surface of the second ultra-thin glass 12.

The first ultra-thin glass 11 and the second ultra-thin glass 12 may be laminated to each other by the adhesive sheet 20 to form an ultra-thin glass laminate 50 in which two to fifty ultra-thin glasses 10 are laminated. A process such as an edge process may be performed on glass having a thickness of 150 micrometers (0.15 mm) or more than 150 micrometers in the form of one-piece unit by using a physical polishing method, and a C-angle rounded in a "C" shape may be formed at the edge of the glass. However, since the first ultra-thin glass 11 or the second ultra-thin glass 12100% having a thickness of less than 150 μm is damaged when the above process is performed, the physical polishing method may not be applied to one-sheet unit. In order to prevent the first ultra-thin glass 11 or the second ultra-thin glass 12 from being 100% damaged when processed in one sheet, a process such as a cutting process or an edge process may be performed after the ultra-thin glass laminate 50 having a thickness of 150 micrometers or more than 150 micrometers is formed by laminating one sheet to forty-nine sheets of the second ultra-thin glass 12 on the first ultra-thin glass 11. When the first and second ultra-thin glasses 11 and 12 are processed at a time after the ultra-thin glass laminate 50 is formed, since the ultra-thin glass laminate 50 has a thickness of more than 150 micrometers, the ultra-thin glass laminate 50 can be easily handled in a process such as a cutting process or an edge process. Accordingly, stable handling may be performed to allow precise processing and prevent the ultra-thin glass 11 from being damaged during processing. Further, since the first ultra-thin glass 11 or the second ultra-thin glass 12 (i.e., a plurality of ultra-thin glasses) is processed at a time, the ultra-thin glass 10 having excellent process uniformity in size or the like can be processed, and the number of processes such as a cutting process can be reduced to shorten the tact time for processing the plurality of ultra-thin glasses 10.

Here, an ultra-thin glass laminate 50 in which three or more pieces of ultra-thin glass 10 are laminated may be formed. For example, to form the ultra-thin glass laminate 50 in which three pieces of ultra-thin glass 10 are laminated, the third ultra-thin glass 13 may be further laminated on the second ultra-thin glass 12, and to form the ultra-thin glass laminate 50 in which n pieces of ultra-thin glass 10 are laminated, the (n-2) pieces of ultra-thin glass may be further laminated on the second ultra-thin glass 12 up to the nth ultra-thin glass 10 n. Here, since the adhesive 20 is provided on a surface of the exposed ultra-thin glass 10 disposed at the (most) upper portion (for example, a surface of the second ultra-thin glass), the (n-2) th sheet of ultra-thin glass may be further laminated. The first ultra-thin glass 11, the second ultra-thin glass 12, and the third ultra-thin glass 13 may be distinguished based on the number of layers, and the ultra-thin glass 10 disposed at the n layer may be an nth ultra-thin glass 10 n.

Fig. 6 is a conceptual view for explaining determination of a pressing force according to another exemplary embodiment, fig. 6 (a) is a view illustrating a gas pressure distribution of each region of a non-uniform porous plate by determining the pressing force according to a height non-uniformity of an adhesive, and fig. 6 (b) is a view illustrating a first ultra-thin glass and a second ultra-thin glass evenly bonded by the gas pressure distribution of each region of the non-uniform porous plate.

Referring to fig. 6, a method for processing ultra-thin glass according to an exemplary embodiment may further include: a process of measuring the height of the adhesive 20; and a process of determining the pressing force caused by the porous plate 131.

The height of the adhesive 20 can be measured during the process. The height of the adhesive 20 provided on the ultra-thin glass 10 (e.g., on the first ultra-thin glass) can be measured by using the height measuring part 140. Here, the height of the adhesive 20 may be measured at a plurality of points, the height of the left and right sides and/or the front and rear sides of the adhesive 20 may be measured at two or more points, and the height of the front and rear and left and right sides of the adhesive 20 may be measured at four or more points.

Further, the pressing force caused by the porous plate 131 may be determined in the process. The pressing force caused by the porous plate 131 provided on the ultra-thin glass 10 disposed at the (uppermost) upper portion (e.g., on the second ultra-thin glass) by the non-contact pressing member 130 may be determined by using the measured height (e.g., average height) of the adhesive 20. That is, an appropriate pressing force that allows the adhesive 20 to uniformly spread between the plurality of ultra-thin glasses 10 (e.g., between the first ultra-thin glass and the second ultra-thin glass) can be determined. For example, when the adhesive 20 has a high height and a large amount, a low pressing force may be provided to prevent the adhesive 20 from overflowing and leaking on the ultra-thin glass 10 (e.g., on the first ultra-thin glass). Further, when the adhesive 20 has a low height and a small amount, a low pressing force may be provided so that the adhesive 20 is uniformly spread on the ultra-thin glass 10 (e.g., on the first ultra-thin glass). Here, since the pressing force is provided in proportion to the height of the adhesive 20 when the adhesive 20 does not overflow and leak from the ultra-thin glass 10 because of its small amount, the gap between the plurality of ultra-thin glasses 10 can be minimized. That is, since a high pressing force is provided when the adhesive 20 has a high height, and a low pressing force is provided when the adhesive 20 has a low height, the gap between the plurality of ultra-thin glasses 10 can be reduced.

Further, the flatness of the adhesive 20 provided on the ultra-thin glass 10 may be measured by using the height of the adhesive 20 measured at two or more points, and the gas pressure caused by the pores 131a of each region of the ultra-thin glass 10 (e.g., the second ultra-thin glass) may be adjusted according to the measured flatness of the adhesive 20. For example, as in (a) of fig. 6, the internal pressure of the pores 131a is selectively controlled for each region of the porous plate 131, and the gas pressure caused by the pores 131a of each region of the ultra-thin glass 10 may be adjusted. Here, a relatively high gas pressure may be provided to the region having a relatively high height of the adhesive 20, and a relatively low gas pressure may be provided to the region having a relatively low height of the adhesive 20.

As described above, the pressing force caused by the porous plate 131 can be determined by measuring the height of the adhesive 20 at a plurality of points. Here, a plurality of ultra-thin glasses 10 may be stably bonded according to the determined pressing force, and the ultra-thin glass laminate 50 may maintain flatness at a predetermined level by pressing the ultra-thin glass 10 disposed at the (uppermost) upper portion.

The method for processing ultra-thin glass according to an exemplary embodiment may further include a process of determining a relative pressure variation distribution of each region of the porous plate 131 against surface pressing.

The relative pressure variation distribution of each region of the porous plate 131 against the surface pressing can be determined in the process. Since the apertures 131a are irregularly formed in the porous plate 131, the density of the apertures 131a of each region of the porous plate 131 may be changed, and the pressing force provided to each region (or portion) of the ultra-thin glass 10 disposed at the (uppermost) portion may be changed. Further, since the apertures 131a of the porous plate 131 are spaced apart from each other, a portion in which the apertures 131a are not formed is generated between the apertures 131 a. Due to this portion, since the distance from the nearest aperture 131a is changed according to a portion (or point) of the ultra-thin glass 10 disposed at the (most) upper portion, the pressing force provided may be changed according to a portion of the ultra-thin glass 10 disposed at the (most) upper portion. Further, since a size error between the plurality of pores 131a is generated, a pressing force provided to each portion of the ultra-thin glass 10 disposed at the (uppermost) upper portion may be changed. Although the same internal pressure is provided to all of the plurality of pores 131a, or the interval (distance) or the size error between the plurality of pores 131a when the density of the pores 131a of each region of the porous plate 131 is changed, the pressing force may be unevenly provided to the entire ultra-thin glass 10 disposed at the (most) upper portion. Therefore, when the plurality of ultra-thin glasses 10 are pressed by pressing the ultra-thin glass 10 disposed at the (uppermost) portion with the same gas pressure (distribution), the flatness of the ultra-thin glass laminate 50 may be lowered. Accordingly, the relative pressure variation distribution of each region of the porous plate 131 can be determined to provide a uniform pressing force to the entire ultra-thin glass 10 disposed at the (most) upper portion. Further, the relative pressure variation distribution of each region of the porous plate 131 may be determined such that the flatness of the ultra-thin glass laminate 50 is maintained at a predetermined level according to the measured height of the adhesive 20 and/or the measured height of the ultra-thin glass 10. For example, the relative pressure variation distribution for each region of the porous plate 131 may be determined such that a high gas pressure is provided to a portion (or region) having a high measurement height of the adhesive 20 and/or a high measurement height of the ultra-thin glass 10, and a low gas pressure is provided to a portion (or region) having a low measurement height of the adhesive 20 and/or a low measurement height of the ultra-thin glass 10.

The method for processing ultra-thin glass according to an exemplary embodiment may further include a process of selectively controlling the internal pressure of the pores 131a of each region of the porous plate 131.

That is, the internal pressure of the pores 131a of each region of the porous plate 131 may be selectively controlled in the process. In addition to the process of adjusting all of the plurality of pores 131a to have the same internal pressure, the internal pressure of the pores 131a of each region of the porous plate 131 may be selectively controlled according to the relative pressure variation distribution of each region of the porous plate 131. For example, the internal pressure of the pores 131a may be varied (or differentiated) for each region at which each pore 131a is disposed. Here, the internal pressure of the pores 131a of each region of the porous plate 131 may be selectively controlled according to the relative pressure variable distribution of each region of the porous plate 131. Here, the relative pressure variable distribution of each region of the porous plate 131 may be the determined relative pressure variable distribution of each region of the porous plate 131 or the corrected (or updated) relative pressure variable distribution of each region of the porous plate 131.

For example, the internal pressure of the pores 131a of each region of the porous plate 131 may be selectively controlled by the control member 150. Accordingly, the internal pressure distribution of the pores 131a of each region of the porous plate 131 can be controlled (or adjusted), and the gas pressure caused by the pores 131a provided for each region of the ultra-thin glass 10 disposed at the (uppermost) upper portion can be adjusted. Accordingly, the gas pressure distribution caused by the pores 131a may be controlled and/or compensated according to the height of the applied adhesive 20 and/or the surface height of the laminated ultra-thin glass 10 measured by using the height measuring part 140.

Here, the internal pressure of each of the plurality of pores 131a may be independently controlled, or since two or more pores 131a among the plurality of pores 131a are grouped, the internal pressure of each group may be independently controlled. For example, the inner pressure of the apertures 131a of each region of the porous plate 131 may be selectively controlled by controlling a gas valve 132b connected to the plurality of apertures 131a and provided to a gas supply pipe 132a to supply gas and/or a vacuum valve 133b connected to the plurality of apertures 131a and provided to a vacuum pipe 133a for forming vacuum (pressure) in the plurality of apertures 131 a. Here, when the internal pressure of each of the plurality of apertures 131a is independently controlled, a plurality of gas supply pipes 132a and/or a plurality of vacuum pipes 133a may be connected to the plurality of apertures 131a, respectively, and a gas valve 132b and/or a vacuum valve 133b may be provided to each of the gas supply pipes 132a and/or the vacuum pipes 133 a. Further, when two or more apertures 131a among the plurality of apertures 131a are grouped, since the plurality of gas supply pipes 132a and/or the plurality of vacuum pipes 133a connected to the plurality of apertures 131a are grouped according to the plurality of grouped apertures 131a, respectively, the gas valve 132b and/or the vacuum valve 133b may be provided to each group of the plurality of gas supply pipes 132a and/or the plurality of vacuum pipes 133 a.

Further, the porous plate 131 may include a plurality of unit plates 131b each including the pores 131 therein. One aperture 131a or a plurality of apertures 131a may be formed in each of the unit plates 131 b. When one aperture 131a is formed in each unit plate 131b, one gas supply pipe 132a and/or one vacuum pipe 133a may be connected to each unit plate 131b to easily independently control the internal pressure of each aperture 131 a. Further, when a plurality of apertures 131a are formed in each unit plate 131b, the plurality of apertures 131a may be grouped for each unit plate 131b, and a gas supply pipe 132a and/or a vacuum pipe 133a may be connected to each unit plate 131b to easily independently control the internal pressure of each grouped aperture 131a of each group. By this, the internal pressure of the pores 131a of each unit plate 131b can be controlled, and thus the internal pressure of the pores 131a of each region of the porous plate 131 can be controlled (or adjusted).

The process of selectively controlling the internal pressure of the pores 131a may be performed by independently controlling each of the plurality of unit plates 131 b. The internal pressure of the pores 131a of each of the plurality of unit plates 131b may be independently controlled, and since each of the unit plates 131b is independently controlled, when one pore 131a is formed in each unit plate 131b, the internal pressure of each pore 131a may be independently controlled. Further, when a plurality of apertures 131a are formed in each unit plate 131b, the apertures 131a grouped for each unit plate 131b may be controlled for each group. Here, the number of the plurality of unit plates 131b may be equal to or greater than the number of the plurality of points at which the height of the adhesive 20 and/or the height of the ultra-thin glass 10 is measured. By this, the internal pressure of the pores 131a of each unit plate 131b can be determined in a form matched with the height difference at a plurality of points, and a plurality of ultra-thin glasses 10 can be laminated and bonded while the flatness of the ultra-thin glass laminate 50 is maintained at a predetermined level.

Fig. 7 is a view illustrating a process of determining a relative pressure variation distribution of a porous plate according to another exemplary embodiment, fig. 7 (a) is a view illustrating a state in which an initial ultra-thin glass is provided to a porous plate disposed such that pores face upward, fig. 7 (b) is a view illustrating a state in which the initial ultra-thin glass is floated by injecting a gas into all of a plurality of pores, and fig. 7 (c) is a view illustrating a state in which the floated initial ultra-thin glass is planarized by forming a negative pressure in a portion of the plurality of pores.

Referring to fig. 7, a process of determining a relative pressure variable distribution for each region may include: a process of providing the initial ultra-thin glass 10a onto the porous plate 131; a process of floating the initial ultra-thin glass 10a by injecting a gas into at least a portion of the pores 131a among the plurality of pores 131 a; a process of measuring the flatness of the floating initial ultra-thin glass 10 a; and a process of planarizing the floating initial ultra-thin glass 10a by controlling the internal pressure of the pores 131a of each region of the porous plate 131 according to the measured flatness of the initial ultra-thin glass 10 a.

In the process of determining the relative pressure variation distribution of each region, the initial ultra-thin glass 10a may be provided on the porous plate 131 in the process as illustrated in (a) of fig. 7. Here, the porous plate 131 may be disposed such that the apertures 131a face upward. Since the porous plate 131 is disposed such that the pores 131a face upward, the initial ultra-thin glass 10a may be provided onto the plurality of pores 131a, and the relative pressure variation distribution of each region of the porous plate 131 may be determined while floating the initial ultra-thin glass 10 a. After the porous plate 131 is disposed such that the pores 131a face upward, the initial ultra-thin glass 10a may be provided onto the plurality of pores 131a of the porous plate 131 such that gas is injected into the initial ultra-thin glass 10a through the pores 131 a.

Further, the initial ultra-thin glass 10a may be floated by injecting a gas into at least a portion of the pores 131a among the plurality of pores 131a in the process. The initial ultra-thin glass 10a may be floated by injecting a gas into at least a portion of the plurality of pores 131 a. Here, the internal pressure may be formed in the plurality of pores 131a, and each of the pores 131a may form an internal pressure distribution of the pores 131a of each region of the porous plate 131. Here, the gas may be injected into all of the plurality of pores 131a when the start of the relative pressure variation distribution of each region of the porous plate 131 is not determined.

Thereafter, floating may be measured in the process to check whether the uniform pressing force provides flatness of the initial ultra-thin glass 10a over the entire initial ultra-thin glass 10 a. The flatness of the floating initial ultrathin glass 10a can be measured (or adjusted) by measuring the heights of the initial ultrathin glass 10a at least two points of the plurality of points by the height measuring section 140. Here, as in (b) of fig. 7, the floating initial ultra-thin glass 10a may be non-planarized, and the case in which the floating initial ultra-thin glass 10a is non-planarized may indicate that the pressing force is not uniformly provided to the entire initial ultra-thin glass 10 a. In this case, the floating initial ultra-thin glass 10a needs to be planarized so that a uniform pressing force is provided to the entire initial ultra-thin glass 10 a.

Thereafter, the floating initial ultra-thin glass 10a may be planarized in the process by controlling the inner pressure of the pores 131a of each region of the porous plate 131 according to the measured flatness of the initial ultra-thin glass 10 a. The internal pressure of the pores 131a of each region of the porous plate 131 can be controlled, and by this, the floating initial ultra-thin glass 10a can be horizontally planarized by correcting the flatness of the floating initial ultra-thin glass 10 a. The distribution of the relative pressure variation of each region of the porous plate 131 can be determined according to the distribution of the internal pressure of the pores 131a of each region of the porous plate 131 obtained by flattening the floating starting ultra-thin glass 10 a.

Here, the process of planarizing the floating initial ultra-thin glass 10a may include a process of forming an internal pressure in a portion of the plurality of pores 131a, which is different from an internal pressure of another pore.

An internal pressure different from another pore may be formed in a portion of the plurality of pores 131a while the floating initial ultra-thin glass 10a is planarized in the process. Here, as in (c) of fig. 7, a negative pressure may be formed in a portion of the plurality of pores 131 a. For example, since the negative pressure is formed in the pores 131a corresponding to the relatively lifted portion in the floating initial ultra-thin glass 10a to pull the relatively lifted portion, the floating initial ultra-thin glass 10a may be planarized. By this, the flatness of the floating initial ultrathin glass 10a can be corrected. Here, a negative pressure may be formed in a portion of the plurality of apertures 131a by the vacuum pump 133 connected to the porous plate 131.

Although the injection pressure is reduced in the aperture 131a corresponding to the relatively elevated portion in the state in which the floating initial ultra-thin glass 10a is inclined, or the gas supply is stopped, the relatively elevated portion may not be lowered to the level at which the floating initial ultra-thin glass 10a is planarized due to the effect of the injection pressure of the gas injected from the aperture 131a surrounding it. That is, when only positive pressure is formed in the plurality of apertures 131a of the porous plate 131, the relatively lifted portion may not be pulled because a force to eliminate the positive pressure so that the relatively lifted portion is lowered is not provided, but the strength of the positive pressure of a part of the apertures 131a is reduced.

However, when a negative pressure is formed in a portion of the plurality of apertures 131a by the vacuum pump 133, the effect of the injection pressure (i.e., positive pressure) of the gas injected from the apertures 131a surrounding it may be cancelled by the negative pressure, and the relatively lifted portion may be pulled by the suction force. Thus, the tilted (or non-planarized) floating initial ultra-thin glass 10a may be planarized by matching the positive and negative pressures at each of the plurality of apertures 131a and adjusting the floating force (or pressing force) and suction force at each portion of the initial ultra-thin glass 10 a.

Fig. 8 is a conceptual view for explaining control of inner pressure of pores of each region of the porous plate according to a height of the second ultra-thin glass according to another exemplary embodiment, (a) of fig. 8 is a view illustrating control of inner pressure of pores of each region of the porous plate for correcting flatness of the ultra-thin glass laminate, and (b) of fig. 8 is a view illustrating the ultra-thin glass laminate planarized by controlling inner pressure of pores of each region of the porous plate.

Referring to fig. 8, a method for processing ultra-thin glass according to an exemplary embodiment may further include: a process of measuring the height of the second ultra-thin glass 12; and a process of controlling the internal pressure of the pores 131a of each region of the porous plate 131 according to the measured height of the second ultra-thin glass 12.

The height of the second ultra-thin glass 12 can be measured during the process. The height of the second ultra-thin glass 12 can be measured at a plurality of points by the height measuring means 140. For example, the left-right flatness and/or the front-back flatness of the second ultra-thin glass 12 may be measured by using the height of the second ultra-thin glass 12 measured in two or more points. Further, the height of the second ultra-thin glass 12 can be measured at four or more points to measure the flatness of all front and rear and right and left sides. Here, the number of points at which the height of the second ultra-thin glass 12 is measured may be equal to the number of points at which the height of the adhesive 20 is measured.

Further, the internal pressure of the pores 131a of each region of the porous plate 131 may be controlled in the process according to the measured height of the second ultra-thin glass 12. The flatness of the second ultra-thin glass 12 may be measured according to the measured height of the second ultra-thin glass 12 at a plurality of points, and the internal pressure of the pores 131a of each region of the porous plate 131 may be controlled (or adjusted) according to the measured flatness of the second ultra-thin glass 12. That is, the internal pressure of the pores 131a of each region of the porous plate 131 can be controlled according to the relative pressure variation distribution of each region of the porous plate 131 corrected by reflecting the flatness of the second ultra-thin glass 12. For example, as in fig. 8, the corrected relative pressure variation distribution for each region of the porous sheet 131 may be applied when laminating the third ultra-thin glass 13. A relatively high gas pressure may be provided on the third ultra-thin glass 13 at a point (or region) where the second ultra-thin glass 12 has a relatively high height, and a relatively low gas pressure may be provided on the third ultra-thin glass 13 at a point where the second ultra-thin glass 12 has a relatively low height. By this, the flatness of the ultra-thin glass laminate 50 in which a plurality of ultra-thin glasses 10 (e.g., the first ultra-thin glass, the second ultra-thin glass, and the third ultra-thin glass) are bonded and laminated can be maintained at a predetermined level.

The method for processing ultra-thin glass according to an exemplary embodiment may further include a process of processing the ultra-thin glass laminate 50 in which the first ultra-thin glass 11 and the second ultra-thin glass 12 are laminated.

Further, the ultra-thin glass laminate 50 in which the first ultra-thin glass 11 and the second ultra-thin glass 12 are laminated may be handled in a process. The ultra-thin glass laminate 50 in which the first ultra-thin glass 11 and the second ultra-thin glass 12 are laminated may be processed, and processes such as a cutting process of cutting the ultra-thin glass laminate into a predetermined size or shape and/or an edge process of finely adjusting an edge surface may be performed.

That is, the process of processing the ultra-thin glass laminate 50 may include: a process of cutting the ultra-thin glass laminate 50 into a predetermined size; and a process of polishing the edge surface of the ultra-thin glass laminate 50.

The ultra-thin glass laminate 50 may be cut to a predetermined size in the process. The ultra-thin glass laminate 50 may be cut into a necessary predetermined size and separated (or divided) into laminate units 5. For example, the ultra-thin glass laminate 50 may be cut (or separated) into laminate units 5 having a predetermined size by using a computer numerically controlled cutting unit mounted with a cutting wheel 161 made of a diamond abrasive. Here, the ultra-thin glass laminate 50 may be cut by a laser cutting method using a laser.

In addition, the edge surface of the ultra-thin glass laminate 50 may be polished in the process. An edge process of polishing the edge surface of the ultra-thin glass laminate 50 may be performed to remove debris at the edge surface of the ultra-thin glass laminate 50 and/or the laminate unit 5. For example, the micro-debris present at the edge surface of the ultra-thin glass laminate 50 and/or the shape-treated laminate unit 5 may be removed by using a polishing wheel. Here, a soft cloth having excellent durability can be used as the surface material of the polishing wheel. In addition, chemical edge polishing for forming a C-angle rounded in a "C" shape may be performed to obtain excellent edge strength.

The method for processing ultra-thin glass according to an exemplary embodiment may further include a process of separating each of the first ultra-thin glass 11 and the second ultra-thin glass 12 from the processed laminate unit 5.

Each of the first ultra-thin glass 11 and the second ultra-thin glass 12 may be separated from the treated laminate unit 5 in the process. Each of the first ultra-thin glass 11 and the second ultra-thin glass 12 may be separated from the treated laminate unit 5 by each piece, and each of the first ultra-thin glass 11 and the second ultra-thin glass 12 (i.e., a plurality of ultra-thin glasses) may be separated by hand after melting the adhesive 20 by treatment using a solution such as a special chemical solution (e.g., acetone-based chemicals or alkali washing liquid) or Deionized (DI) water.

As described above, according to the exemplary embodiments, contamination and damage of the surface of the ultra-thin glass may be prevented by injecting gas into the porous plate to provide a pressing force for adhering the plurality of ultra-thin glasses in a non-contact manner. Further, since a plurality of ultra-thin glasses are bonded by the entire surface bonding method of simultaneously providing a pressing force to the entire pressing surface of the ultra-thin glass, the tact time of bonding can be further reduced compared to the case of sequentially pressing each surface by using a roller or the like. Further, since the internal pressure of the pores of each region of the porous plate is controlled by measuring the height of the applied adhesive and/or the height of the surface of the laminated ultra-thin glass by the height measuring means, the pressing force can be adjusted differently for each region of the ultra-thin glass, and the flatness of the ultra-thin glass laminate can be maintained at a predetermined level. Further, a uniform pressing force may be applied to the entire surface of the ultra-thin glass by applying a relative pressure variation distribution of each region of the porous plate to the plurality of pores of the porous plate according to the state of the porous plate. In addition, since the porous plate includes a plurality of unit plates, and each of the plurality of unit plates is independently controlled, the internal pressure of the pores of each region of the porous plate can be easily controlled. Further, since the vacuum pump is connected to the porous plate, the internal pressure of the pores of each region of the porous plate may be controlled, and a negative pressure may be formed in a portion of the pores. Therefore, a uniform pressing force can be further effectively provided to the entire surface of the ultra-thin glass, and a plurality of ultra-thin glasses can be bonded flat rather than obliquely.

In the above description, the expression "on …" may include a case of direct contact and a case of being disposed to face the upper portion or the lower portion instead of direct contact, and may also mean a case of being disposed to face partially the upper portion or the lower portion and to face the entire upper portion or the entire lower portion, and a case of being in direct contact with or facing while being spaced apart therefrom. Thus, the expression "on the stage" may denote a surface of the stage (top surface or bottom surface) or a surface of the ultra-thin glass provided on the surface of the stage.

The apparatus for processing ultra-thin glass according to an exemplary embodiment may inject gas through a porous plate to provide a pressing force for bonding a plurality of ultra-thin glasses (UTG) in a non-contact manner, thereby preventing contamination and breakage (or damage) of the surface of the ultra-thin glass. Further, since a plurality of ultra-thin glasses are bonded by the entire surface bonding method of simultaneously providing a pressing force to the entire pressing surface (or surfaces) of the ultra-thin glass, the tact time of bonding can be further reduced compared to the case of sequentially pressing each surface by using a roller or the like.

Further, since the internal pressure of the pores of each region of the porous plate is controlled (or corrected) by measuring the height of the applied adhesive and/or the height of the surface of the laminated ultra-thin glass by the height measuring means, the pressing force can be adjusted differently for each region of the ultra-thin glass, and the flatness of the ultra-thin glass laminate can be maintained at a predetermined level.

Further, a uniform pressing force may be applied to the entire surface of the ultra-thin glass by applying a relative pressure variation distribution of each region of the porous plate to a plurality of pores of the porous plate according to the state of the porous plate (e.g., factors related to characteristics).

In addition, since the porous plate includes a plurality of unit plates, and each of the plurality of unit plates is independently controlled, the internal pressure of the pores of each region of the porous plate can be easily controlled.

Further, since the vacuum pump is connected to the porous plate, the internal pressure of the pores of each region of the porous plate may be controlled (or adjusted), and the negative pressure may be formed in a portion of the pores. Therefore, a uniform pressing force can be further effectively provided to the entire surface of the ultra-thin glass, and a plurality of ultra-thin glasses can be bonded flat rather than obliquely.

Although exemplary embodiments of the present invention have been described, it is to be understood that the present invention should not be limited to these exemplary embodiments but various changes and modifications can be made by one of ordinary skill in the art within the spirit and scope of the present invention as hereinafter claimed. Therefore, the actual protective scope of the present invention will be determined by the technical scope of the appended claims.