阅读说明：本技术 一种光刻胶涂胶喷嘴的定位拾取装置 (Positioning and picking device of photoresist gluing nozzle ) 是由 郑霞 于 2021-07-16 设计创作，主要内容包括：本发明公开了一种光刻胶涂胶喷嘴的定位拾取装置,包括支撑板、第二固定块、转轴、滑杆、定位板,所述支撑板的下端设置有导向杆,所述导向杆的下端固定安装有底板,所述底板的下端固定安装有支撑杆,所述支撑杆的外侧固定安装有吸盘,所述支撑板的外侧设置有气缸,所述气缸的驱动杆与支撑板滑动连接,所述驱动杆的外侧套接有连接座,所述连接座的外侧固定安装有连接板,所述连接板的内部开设有滑槽,所述滑槽的内部滑动连接有滑块,所述滑块的外侧固定安装有螺纹套,所述螺纹套的外侧固定安装有限位板。本发明涉及一种光刻胶涂胶喷嘴的定位拾取装置,具有精准定位以及涂胶喷嘴拆卸便捷的特点。(The invention discloses a positioning and picking device of a photoresist gluing nozzle, which comprises a supporting plate, a second fixing block, a rotating shaft, a sliding rod and a positioning plate, wherein a guide rod is arranged at the lower end of the supporting plate, a bottom plate is fixedly arranged at the lower end of the guide rod, a supporting rod is fixedly arranged at the lower end of the bottom plate, a sucker is fixedly arranged on the outer side of the supporting rod, an air cylinder is arranged on the outer side of the supporting plate, a driving rod of the air cylinder is connected with the supporting plate in a sliding mode, a connecting seat is sleeved on the outer side of the driving rod, a connecting plate is fixedly arranged on the outer side of the connecting seat, a sliding groove is formed in the connecting plate, a sliding block is connected in the sliding mode inside the sliding groove, a threaded sleeve is fixedly arranged on the outer side of the sliding block, and a limiting plate is fixedly arranged on the outer side of the threaded sleeve. The invention relates to a positioning and picking device of a photoresist coating nozzle, which has the characteristics of accurate positioning and convenient disassembly of the coating nozzle.)

1. The utility model provides a location pick device of photoresist rubber coating nozzle, includes backup pad (1), second fixed block (13), pivot (16), slide bar (31), locating plate (34), its characterized in that: the lower extreme of backup pad (1) is provided with guide bar (20), the lower extreme fixed mounting of guide bar (20) has bottom plate (21), the lower extreme fixed mounting of bottom plate (21) has bracing piece (28), the outside fixed mounting of bracing piece (28) has sucking disc (29), the outside of backup pad (1) is provided with cylinder (2), actuating lever (3) and backup pad (1) sliding connection of cylinder (2), connecting seat (4) have been cup jointed in the outside of actuating lever (3), the outside fixed mounting of connecting seat (4) has connecting plate (6), spout (7) have been seted up to the inside of connecting plate (6), the inside sliding connection of spout (7) has slider (8), the outside fixed mounting of slider (8) has thread bush (9), the outside fixed mounting of thread bush (9) has limiting plate (25), the outer side of the limiting plate (25) is fixedly provided with a limiting block (26), and the outer side of the limiting block (26) is fixedly provided with a convex block (27).

2. A positioning and picking apparatus of a resist coating nozzle according to claim 1, characterized in that: a first fixed block (10) is fixedly arranged on the outer side of the connecting plate (6), a rotating seat (11) is fixedly arranged on the outer side of the first fixed block (10), a threaded rod (12) is rotatably connected inside the rotating seat (11), a threaded sleeve (9) is connected on the outer side of the threaded rod (12) through threads, the outer side of the threaded rod (12) is connected with a second fixed block (13) in a contact way, the second fixed block (13) is fixedly connected with the connecting plate (6), a motor (15) is arranged on the outer side of the second fixed block (13), a rotating shaft (16) of the motor (15) is rotatably connected with the second fixed block (13), threaded rod (12) have been cup jointed in the outside of pivot (16), there are set screw (17) in the outside of threaded rod (12) through threaded connection, the tail end and threaded rod (12) joint of set screw (17).

3. A positioning and picking apparatus of a resist coating nozzle according to claim 2, characterized in that: the outside of guide bar (20) is slided and is cup jointed uide bushing (18), uide bushing (18) and motor (15) contact, the inside of uide bushing (18) is provided with ball (19), ball (19) and guide bar (20) sliding connection, the outside and connecting plate (6) fixed connection of uide bushing (18), draw-in groove (24) have been seted up to the inside of uide bushing (18), the inside joint of draw-in groove (24) has fixture block (23), the outside fixed mounting of fixture block (23) has sealed pad (22), sealed pad (22) are made for a rubber material, sealed pad (22) contact with uide bushing (18) and guide bar (20) respectively, the quantity of sealed pad (22) is four, four sealed pad (22) set up the upper and lower both ends with uide bushing (18) respectively.

4. A positioning and picking apparatus of a resist coating nozzle according to claim 1, characterized in that: a through hole (30) is arranged inside the bottom plate (21), a sliding rod (31) is connected inside the through hole (30) in a sliding manner, the outer side of the sliding rod (31) is fixedly provided with a fixed ring (32), the fixed ring (32) is contacted with the bottom plate (21), a positioning plate (34) is fixedly arranged on the outer side of the sliding rod (31), a positioning groove (35) is formed in the positioning plate (34), a positioning block (36) is clamped in the positioning groove (35), a gluing nozzle (37) is fixedly arranged on the outer side of the positioning block (36), a fixing plate (38) is fixedly arranged on the outer side of the gluing nozzle (37), the fixing plate (38) is made of an elastic steel sheet material, fixing grooves (39) are formed in the fixing plates (38), limiting grooves (40) are formed in the fixing plates (38), and the fixing grooves (39) are communicated with the limiting grooves (40).

5. A positioning and picking apparatus of a resist coating nozzle according to claim 1, characterized in that: the outside of connecting seat (4) has stop screw (5) through threaded connection, the tail end and actuating lever (3) joint of stop screw (5).

6. A positioning and picking apparatus of a resist coating nozzle according to claim 2, characterized in that: a rotating groove (14) is formed in the second fixing block (13), and a rotating shaft (16) is rotatably connected to the inside of the rotating groove (14).

7. The apparatus of claim 4, wherein: the outer side of the sliding rod (31) is sleeved with a spring (33), and two ends of the spring (33) are respectively in contact with the bottom plate (21) and the positioning plate (34).

8. A positioning and picking apparatus of a resist coating nozzle according to claim 1, characterized in that: the number of the supporting rods (28) is four, and the outer sides of the four supporting rods (28) are provided with suckers (29).

Technical Field

The invention belongs to the technical field of semiconductor spin coating and developing equipment, and particularly relates to a positioning and picking device of a photoresist coating nozzle.

Background

At present, in the production process of semiconductor wafers, one photoresist homogenizing and developing device needs to integrate a nozzle system of various photoresists in one photoresist homogenizing unit, so that the requirements of one machine for multiple purposes and cost reduction are met. However, the common nozzle needs to be automatically positioned and replaced due to the fact that the number of types of glue is large and the sizes of the photoresist supply pipelines are different. However, the current pick-up devices have some problems: 1. the picking mechanism is usually driven by an air cylinder to move, and the moving is not accurate enough due to shaking in the moving process; 2. the mounting and dismounting modes of the gluing nozzle are complicated, and the working efficiency is influenced.

The invention content is as follows:

the present invention is directed to solving the above problems by providing a positioning and picking apparatus for a photoresist dispensing nozzle, which solves the problems mentioned in the background art.

In order to solve the above problems, the present invention provides a technical solution:

a positioning and picking device of a photoresist gluing nozzle comprises a supporting plate, a second fixed block, a rotating shaft, a sliding rod and a positioning plate, the lower end of the supporting plate is provided with a guide rod, the lower end of the guide rod is fixedly provided with a bottom plate, the lower end of the bottom plate is fixedly provided with a supporting rod, the outer side of the supporting rod is fixedly provided with a sucker, the outer side of the supporting plate is provided with an air cylinder, a driving rod of the air cylinder is connected with the supporting plate in a sliding way, the outer side of the driving rod is sleeved with a connecting seat, the outer side of the connecting seat is fixedly provided with a connecting plate, a sliding groove is arranged inside the connecting plate, a sliding block is connected inside the sliding groove in a sliding manner, a threaded sleeve is fixedly arranged on the outer side of the sliding block, the thread bushing is characterized in that a limiting plate is fixedly mounted on the outer side of the thread bushing, a limiting block is fixedly mounted on the outer side of the limiting plate, and a convex block is fixedly mounted on the outer side of the limiting block.

As preferred, the outside fixed mounting of connecting plate has first fixed block, the outside fixed mounting of first fixed block has the rotation seat, the internal rotation of rotating the seat is connected with the threaded rod, there is the thread bush in the outside of threaded rod through threaded connection, the outside contact of threaded rod is connected with the second fixed block, second fixed block and connecting plate fixed connection, the outside of second fixed block is provided with the motor, the pivot and the second fixed block of motor rotate to be connected, the threaded rod has been cup jointed in the outside of pivot, there is set screw in the outside of threaded rod through threaded connection, set screw's tail end and threaded rod joint.

As preferred, the uide bushing has been cup jointed in the outside slip of guide bar, the uide bushing contacts with the motor, the inside of uide bushing is provided with the ball, ball and guide bar sliding connection, the outside and connecting plate fixed connection of uide bushing, the draw-in groove has been seted up to the inside of uide bushing, the inside joint of draw-in groove has the fixture block, the outside fixed mounting of fixture block has sealed the pad, sealed pad is made for a rubber material, sealed pad contacts with uide bushing and guide bar respectively, the quantity of sealed pad is four, four sealed pad sets up the upper and lower both ends with the uide bushing respectively.

As preferred, the through-hole has been seted up to the inside of bottom plate, the inside sliding connection of through-hole has the slide bar, the outside fixed mounting of slide bar has solid fixed ring, gu fixed ring and bottom plate contact, the outside fixed mounting of slide bar has the locating plate, the constant head tank has been seted up to the inside of locating plate, the inside joint of constant head tank has the locating piece, the outside fixed mounting of locating piece has the rubber coating nozzle, the outside fixed mounting of rubber coating nozzle has the fixed plate, the fixed plate is made for an elastic steel sheet material, the fixed slot has been seted up to the inside of fixed plate, the spacing groove has been seted up to the inside of fixed plate, fixed slot and spacing groove intercommunication.

Preferably, the outer side of the connecting seat is connected with a limit screw through threads, and the tail end of the limit screw is clamped with the driving rod.

Preferably, a rotating groove is formed in the second fixing block, and a rotating shaft is rotatably connected to the inside of the rotating groove.

Preferably, the outer side of the sliding rod is sleeved with a spring, and two ends of the spring are respectively contacted with the bottom plate and the positioning plate.

Preferably, the number of the supporting rods is four, and the outer sides of the four supporting rods are provided with suckers.

The invention has the beneficial effects that: the invention relates to a positioning and picking device of a photoresist coating nozzle, which has the characteristics of accurate positioning and convenient disassembly of the coating nozzle, and has the following two beneficial effects compared with the traditional positioning and picking device of the photoresist coating nozzle in specific use:

firstly, by designing the sliding connection between the ball and the guide rod, a guide effect can be achieved on the movement of the driving rod of the air cylinder, so that the driving rod of the air cylinder drives the threaded sleeve to move more accurately;

secondly, joint through design lug and spacing groove, can fix limiting plate and fixed plate, thereby reach the effect of picking up the rubber coating nozzle, when needs are dismantled the rubber coating nozzle, only need to stimulate the fixed plate to the outside, make lug and spacing groove separation, can directly take off the rubber coating nozzle, it is more convenient to make the dismantlement mode, and the effect through the spring, when the overdraft of limiting plate acts on the fixed plate, can drive the locating plate downstream, make the locating plate spring that can push down, through the flexible effect of spring, can play the effect of a buffering to the overdraft, can prevent effectively that the rubber coating nozzle atress is too big damaged.

Description of the drawings:

for ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the pick-up of the glue nozzle of the present invention;

FIG. 3 is a bottom view of the web construction of FIG. 1 in accordance with the present invention;

FIG. 4 is an enlarged view of the portion A of FIG. 1 according to the present invention;

FIG. 5 is an enlarged view of the portion B of FIG. 1 according to the present invention;

FIG. 6 is an enlarged view of the structure of the portion C of FIG. 1 according to the present invention.

In the figure: 1. a support plate; 2. a cylinder; 3. a drive rod; 4. a connecting seat; 5. a limit screw; 6. a connecting plate; 7. a chute; 8. a slider; 9. a threaded sleeve; 10. a first fixed block; 11. a rotating seat; 12. a threaded rod; 13. a second fixed block; 14. a rotating groove; 15. a motor; 16. a rotating shaft; 17. a set screw; 18. a guide sleeve; 19. a ball bearing; 20. a guide bar; 21. a base plate; 22. a gasket; 23. a clamping block; 24. a card slot; 25. a limiting plate; 26. a limiting block; 27. a bump; 28. a support bar; 29. a suction cup; 30. a through hole; 31. a slide bar; 32. a fixing ring; 33. a spring; 34. positioning a plate; 35. positioning a groove; 36. positioning blocks; 37. a glue spreading nozzle; 38. a fixing plate; 39. fixing grooves; 40. a limiting groove.

The specific implementation mode is as follows:

as shown in fig. 1 to 6, the following technical solutions are adopted in the present embodiment:

example (b):

a positioning and picking device of a photoresist gluing nozzle comprises a support plate 1, a second fixed block 13, a rotating shaft 16, a sliding rod 31 and a positioning plate 34, wherein a guide rod 20 is arranged at the lower end of the support plate 1, a bottom plate 21 is fixedly arranged at the lower end of the guide rod 20, a support rod 28 is fixedly arranged at the lower end of the bottom plate 21, a sucker 29 is fixedly arranged at the outer side of the support rod 28, an air cylinder 2 is arranged at the outer side of the support plate 1, a driving rod 3 of the air cylinder 2 is in sliding connection with the support plate 1, a connecting seat 4 is sleeved at the outer side of the driving rod 3, a connecting plate 6 is fixedly arranged at the outer side of the connecting seat 4, a sliding groove 7 is formed in the connecting plate 6, a sliding block 8 is connected in the sliding manner in the sliding groove 7, a threaded sleeve 9 is fixedly arranged at the outer side of the sliding block 8, and a limiting plate 25 is fixedly arranged at the outer side of the threaded sleeve 9, the outer side of the limiting plate 25 is fixedly provided with a limiting block 26, and the outer side of the limiting block 26 is fixedly provided with a convex block 27.

Wherein, the outside fixed mounting of connecting plate 6 has first fixed block 10, the outside fixed mounting of first fixed block 10 has rotation seat 11, the internal rotation of rotating seat 11 is connected with threaded rod 12, there is threaded bush 9 in the outside of threaded rod 12 through threaded connection, the outside contact of threaded rod 12 is connected with second fixed block 13, second fixed block 13 and connecting plate 6 fixed connection, the outside of second fixed block 13 is provided with motor 15, motor 15's pivot 16 rotates with second fixed block 13 to be connected, threaded rod 12 has been cup jointed in the outside of pivot 16, there is set screw 17 in the outside of threaded rod 12 through threaded connection, set screw 17's tail end and threaded rod 12 joint.

Wherein, uide bushing 18 has been cup jointed in the outside slip of guide bar 20, uide bushing 18 and the contact of motor 15, the inside of uide bushing 18 is provided with ball 19, ball 19 and guide bar 20 sliding connection, the outside and the connecting plate 6 fixed connection of uide bushing 18, draw-in groove 24 has been seted up to the inside of uide bushing 18, the inside joint of draw-in groove 24 has fixture block 23, the outside fixed mounting of fixture block 23 has sealed the pad 22, sealed pad 22 is made for a rubber material, sealed pad 22 contacts with uide bushing 18 and guide bar 20 respectively, the quantity of sealed pad 22 is four, four sealed pad 22 sets up respectively with the upper and lower both ends of uide bushing 18.

Wherein, through-hole 30 has been seted up to the inside of bottom plate 21, the inside sliding connection of through-hole 30 has slide bar 31, the outside fixed mounting of slide bar 31 has solid fixed ring 32, gu fixed ring 32 contacts with bottom plate 21, slide bar 31's outside fixed mounting has locating plate 34, locating groove 35 has been seted up to the inside of locating plate 34, the inside joint of locating groove 35 has locating piece 36, the outside fixed mounting of locating piece 36 has rubber coating nozzle 37, rubber coating nozzle 37's outside fixed mounting has fixed plate 38, fixed plate 38 is made for an elastic steel sheet material, fixed slot 39 has been seted up to the inside of fixed plate 38, spacing groove 40 has been seted up to the inside of fixed plate 38, fixed slot 39 and spacing groove 40 intercommunication.

Wherein, the outside of connecting seat 4 has stop screw 5 through threaded connection, stop screw 5's tail end and actuating lever 3 joint.

A rotating groove 14 is formed in the second fixing block 13, and a rotating shaft 16 is rotatably connected to the inside of the rotating groove 14.

A spring 33 is sleeved on the outer side of the sliding rod 31, and two ends of the spring 33 are respectively contacted with the bottom plate 21 and the positioning plate 34.

The number of the support rods 28 is four, and the outer sides of the four support rods 28 are provided with suckers 29.

The using state of the invention is as follows: when the glue spreading device is used, under the action of the motor 15, the rotating shaft 16 of the motor 15 drives the threaded rod 12 to rotate, the threaded rod 12 is connected with the threaded sleeve 9 through threads, so that the threaded sleeve 9 drives the sliding block 8 to horizontally move in the sliding groove 7, the threaded sleeve 9 drives the limiting plate 25 to move, the limiting plate 25 drives the limiting block 26 to move, the limiting block 26 drives the bump 27 to move, the position of the glue spreading nozzle 37 is positioned through the positioning groove 35, so that the threaded sleeve 9 moves to the upper end of the glue spreading nozzle 37, then the air cylinder 2 works, the driving rod 3 of the air cylinder 2 drives the connecting seat 4 to move downwards, the connecting seat 4 drives the connecting plate 6 to move, the connecting plate 6 drives the threaded sleeve 9 to move, the threaded sleeve 9 drives the limiting plate 25 to move, the limiting block 25 drives the limiting block 26 to move, the limiting block 26 drives the bump 27 to move, the connecting plate 6 drives the guide sleeve 18 to move while moving, and the balls 19 in the guide sleeve 18 rotate along the guide rod 20, can play a direction effect to the removal of the actuating lever 3 of cylinder 2, thereby make actuating lever 3 of cylinder 2 drive the removal of thread bush 9 more accurate, when limiting plate 25 moves down, can drive stopper 26 and slide in fixed slot 39, stopper 26 drives lug 27 and removes, make lug 27 and spacing groove 40 joint, the picking up to rubber coating nozzle 37 has been accomplished promptly, and when the holding-down force of limiting plate 25 acted on fixed plate 38, the holding-down force can drive locating plate 34 and move down, locating plate 34 drives slide bar 31 and slides down, make locating plate 34 can push down spring 33, through the flexible effect of spring 33, can play the effect of a buffering to the holding-down force, can prevent effectively that rubber coating nozzle 37 atress is too big to be damaged. When needs are dismantled rubber coating nozzle 37, outside pulling fixed plate 38, then pulling fixed plate 38 downwards for lug 27 and spacing groove 40 separate, make stopper 26 slide along fixed slot 39, and make stopper 26 and fixed slot 39 separate, can directly take off rubber coating nozzle 37, and it is more convenient to dismantle the mode. Through the effect of sealed pad 22, can play a sealed effect to uide bushing 18, can prevent that the dust from getting into the use that influences uide bushing 18 in the uide bushing 18, through sealed pad 22 of outside pulling, sealed pad 22 drives fixture block 23 and removes, make fixture block 23 and draw-in groove 24 separate, can take off sealed pad 22, can directly add lubricating oil in to uide bushing 18, reduce the frictional force of ball 19 and guide bar 20, make the direction effect better.

While there have been shown and described what are at present considered to be the fundamental principles of the invention and its essential features and advantages, it will be understood by those skilled in the art that the invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.