阅读说明：本技术 振动加速度传感器用封接玻璃材料的制备方法和封接工艺 (Preparation method and sealing process of sealing glass material for vibration acceleration sensor ) 是由 华斯嘉 王哲 冯庆 乔星 徐绍华 郗雪艳 刘卫红 杨文波 于 2020-12-27 设计创作，主要内容包括：本发明属于玻璃-金属封接技术领域,特别是涉及振动加速度传感器用封接玻璃材料的制备方法和封接工艺。该振动加速度传感器用封接玻璃材料按重量百分比选取以下原料制成：SiO-2：45％-55％；Al-2O-3：5％-10％；K-2O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V-2O-5：2.5％-4.5％。本发明既保证了封接产品外观的一致性及稳定性,又提高了产品的气密性、机械强度及高温绝缘性,且制备工艺简单,封接及热处理工艺适合于工业化生产。(The invention belongs to the technical field of glass-metal sealing, and particularly relates to a preparation method and a sealing process of a sealing glass material for a vibration acceleration sensor. The sealing glass material for the vibration acceleration sensor is prepared from the following raw materials in percentage by weight: SiO 2 2 ：45％‑55％；Al 2 O 3 ：5％‑10％；K 2 O：3％‑5％；MgO：1％‑3％；CaO：3％‑7％；SrO：0.5％‑3％；BaO：20％‑25％；ZnO：0％‑2％；V 2 O 5 : 2.5 to 4.5 percent. The invention not only ensures the consistency and stability of the appearance of the sealing product, but also improves the air tightness, mechanical strength and high-temperature insulation of the product,and the preparation process is simple, and the sealing and heat treatment process is suitable for industrial production.)

1. The sealing glass material for the vibration acceleration sensor is characterized by being prepared from the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

2. a sealing glass material for a vibration acceleration sensor according to claim 1, characterized in that the sealing glass material has a coefficient of thermal expansion α of 95 to 120 x 10^-7/° c; softening temperature T of sealing glass material_fThe sealing reference system of the sealing glass material is 1020-³。

3. The preparation method of the sealing glass material for the vibration acceleration sensor is characterized by comprising the following steps of:

step 1), taking the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

step 2), sieving the raw materials by a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear molten glass;

step 3), pouring the obtained clear glass liquid into distilled water, and performing water quenching and cooling to obtain glass cullet;

and 4) baking the obtained glass broken slag in an oven at 100 ℃ for 12-24 hours, then carrying out ball milling on the baked glass broken slag by using a planetary ball mill, and sieving by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor.

4. A method for producing a sealing glass material for a vibration acceleration sensor according to claim 3, characterized in that in the step 2), the raw materials are mixed in a V-type mixer so that the batch materials are mixed uniformly.

5. A method for producing a sealing glass material for a vibration acceleration sensor according to claim 4, wherein a rotating speed of the V-type blender is 20 to 40r/min and a mixing time is 30 to 60 min.

6. A method for preparing a sealing glass material for a vibration acceleration sensor according to claim 3, wherein in step 3), the ball-milled mixed material is placed in a crucible, the crucible is placed in a high-temperature lifting furnace, and the furnace is heated until the glass is completely melted and clarified to obtain molten glass.

7. A method for producing a sealing glass material for a vibration acceleration sensor according to claim 1, characterized in that the crucible is a corundum crucible or a platinum crucible.

8. The method for preparing a sealing glass material for a vibration acceleration sensor according to claim 1, wherein the step 3) comprises placing the mixed material in a crucible, placing the crucible in a high temperature furnace, raising the temperature from room temperature to 650-; stirring for several times during the process to enable the molten material to be uniform, obtaining molten glass after the molten material is completely melted and clarified, and grinding the roasted glass broken slag in a zirconia ball grinding tank for 8-12 hours at the rotating speed of 200-400 r/min.

9. A method for producing a sealing glass material for a vibration acceleration sensor according to claim 3, characterized in that the sealing glass frit produced has a thermal expansion coefficient α of 95 to 120 x 10^-7/° c; transition temperature T of sealing glass powder_f800 ℃ at 720-³。

10. The sealing process of the sealing glass material for the vibration acceleration sensor is characterized by comprising the following steps of:

step 1), 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent are placed in a ball milling tank and mixed for 2 hours;

step 2), taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

step 3), preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

step 4), preparing the granulation powder by a pneumatic compaction machine to obtain a glass green body, then completely discharging the gel at room temperature to 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass cooked blank without the dispersant and the binder;

step 5), assembling the sealed metal shell, the core column and the glass clinker obtained in the step 4) into a component to be sealed, and then slowly heating to 1020-;

and 6) annealing the sealing component obtained in the step 5) along with a furnace for 2-3h to room temperature to obtain the connector of the ultrahigh-temperature vibration acceleration sensor.

Technical Field

The invention belongs to the technical field of glass-metal sealing, and particularly relates to a preparation method and a sealing process of a sealing glass material for a vibration acceleration sensor.

Background

The ultra-high temperature vibration acceleration sensor adopts a high temperature resistant design, a balanced differential type and an airtight structure, signals are insulated from the ground, and the ultra-high temperature vibration acceleration sensor can work for a long time at the temperature of +482 ℃. The method has the characteristics of extremely long mean time without failure, high output, high temperature stability, wide frequency band and the like. The product is widely applied to vibration measurement of high-temperature parts such as turbine engines, gas engines, steam turbines, diesel engines and the like. Because the connector of the ultrahigh-temperature vibration acceleration sensor adopts a glass sealing structure to meet the characteristics of high reliability, high temperature resistance and the like, the sealing glass in the connector of the ultrahigh-temperature vibration acceleration sensor is used for sealing and connecting the metal core column and the metal shell, so that the sealing and insulating effects are achieved, the connector is a key component of the ultrahigh-temperature vibration acceleration sensor, and the quality of the connector directly influences the comprehensive performance of the ultrahigh-temperature vibration acceleration sensor.

However, the shell and the core used by the ultra-high temperature vibration acceleration sensor are both made of high temperature nickel-based alloy, and the product is required to have very good high temperature insulation, and the packaging connector with special requirements has many problems in the world at present, for example, the wettability of the high temperature nickel-based alloy and the traditional sealing glass is poor; the high-temperature nickel-based alloy has a large expansion coefficient, and the sealing glass is difficult to ensure high-temperature insulation on the premise of meeting the requirement of matching the expansion coefficient. Therefore, a sealing product with good performance is difficult to obtain by adopting the traditional sealing glass, at present, glass powder such as Elan13, Corning9013 and the like is mostly adopted at home and abroad, sintering is carried out through a plurality of complicated and complicated packaging processes, the yield and consistency of the products are poor, and after a thermal aging experiment at 482 ℃/32h, a large number of micro-cracks are generated at the defect part of a sealing interface, so that the problems of poor air tightness, poor insulation resistance and the like are caused. Meanwhile, the European and American countries have limited the export of sensors and raw materials thereof above 350 ℃.

Therefore, research and development of a sealing glass material which can be applied to an ultrahigh-temperature vibration acceleration sensor are urgently needed, so that the sealing process and the heat treatment process are suitable for industrial production, the product yield is high, the stability is good, and the sealing glass material has good air tightness, mechanical strength, chemical stability and high-temperature insulation.

Disclosure of Invention

The invention aims to provide sealing glass powder for an ultrahigh-temperature vibration acceleration sensor, and a preparation method and application thereof.

The sealing glass material for the vibration acceleration sensor is prepared from the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

further, the sealing glass material has a coefficient of thermal expansion α of 95 to 120 × 10^-7/° c; softening temperature T of sealing glass material_fThe sealing reference system of the sealing glass material is 1020-³。

The preparation method of the sealing glass material for the vibration acceleration sensor comprises the following steps:

step 1), taking the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

step 2), sieving the raw materials by a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear molten glass;

step 3), pouring the obtained clear glass liquid into distilled water, and performing water quenching and cooling to obtain glass cullet;

step 4), baking the obtained glass broken slag in an oven at 100 ℃ for 12-24 hours, then carrying out ball milling on the baked glass broken slag by using a planetary ball mill, and sieving by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor;

further, in the step 2), the raw materials are placed in a V-shaped mixer for mixing, so that the batch materials are uniformly mixed.

Furthermore, the rotating speed of the V-shaped mixer is 20-40r/min, and the mixing time is 30-60 min.

Further, in the step 3), the ball-milled and mixed material is placed in a crucible, the crucible is placed in a high-temperature lifting furnace, and the furnace is heated until the material is completely melted and clarified to obtain glass liquid.

Further, the crucible is a corundum crucible or a platinum crucible.

Further, in the step 3), the mixed material is placed in a crucible, the crucible is placed in a high-temperature lifting furnace, the temperature is raised from room temperature to 650 plus material 850 ℃ at the temperature raising rate of 8-12 ℃/min at room temperature, the temperature is maintained at 650 plus material 850 ℃ for 20-40min, then the temperature is raised to 1000 plus material 1500 ℃ at the temperature raising rate of 8-12 ℃/min, and the temperature is maintained at 1000 plus material 1500 ℃ for 1-2 h; stirring for several times during the process to enable the molten material to be uniform, obtaining molten glass after the molten material is completely melted and clarified, and grinding the roasted glass broken slag in a zirconia ball grinding tank for 8-12 hours at the rotating speed of 200-400 r/min.

Further, the sealing glass powder prepared had a coefficient of thermal expansion α of 95 to 120 × 10^-7/° c; transition temperature T of sealing glass powder_f800 ℃ at 720-³。

The sealing process of the sealing glass material for the vibration acceleration sensor comprises the following steps:

step 1), 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent are placed in a ball milling tank and mixed for 2 hours;

step 2), taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

step 3), preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

step 4), preparing the granulation powder by a pneumatic compaction machine to obtain a glass green body, then completely discharging the gel at room temperature to 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass cooked blank without the dispersant and the binder;

step 5), assembling the sealed metal shell, the core column and the glass clinker obtained in the step 4) into a component to be sealed, and then slowly heating to 1020-;

and 6) annealing the sealing component obtained in the step 5) along with a furnace for 2-3h to room temperature to obtain the connector of the ultrahigh-temperature vibration acceleration sensor.

The beneficial effects brought by the invention are as follows:

the invention discloses a sealing glass material for an ultrahigh-temperature vibration acceleration sensor, which takes silicon dioxide as a skeleton structure and a network former of glass, uses a small amount of alkali metal elements to reduce melting temperature, improve expansion coefficient and have small influence on the chemical stability of the glass; adding alkaline earth metal oxides of MgO, CaO, SrO, BaO, the cation Mg²⁺、Ca²⁺、Sr²⁺、Ba²⁺The mixed alkali effect and the pressing effect are generated by filling in the network gaps, so that the activity of alkali metal ions is blocked, and the insulating property of the glass is improved; adding Al₂O₃Can form AlPO in the glass₄The unit is changed from a straight chain to a network structure, so that the structure of the glass tends to be stable, and the chemical stability is improved; adding ZnO and V₂O₅Oxide to improve chemical stability and electrical insulation of glassThe nature is strong.

Detailed Description

The sealing glass material for the vibration acceleration sensor is prepared from the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

in this example, the sealing glass material had a coefficient of thermal expansion α of 95 to 120 × 10^-7/° c; softening temperature T of sealing glass material_fThe sealing reference system of the sealing glass material is 1020-³。

The preparation method of the sealing glass material for the vibration acceleration sensor comprises the following steps:

step 1), taking the following raw materials in percentage by weight:

SiO₂：45％-55％；Al₂O₃：5％-10％；K₂O：3％-5％；MgO：1％-3％；CaO：3％-7％；SrO：0.5％-3％；BaO：20％-25％；ZnO：0％-2％；V₂O₅：2.5％-4.5％。

step 2), sieving the raw materials by a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear molten glass;

step 3), pouring the obtained clear glass liquid into distilled water, and performing water quenching and cooling to obtain glass cullet;

step 4), baking the obtained glass broken slag in an oven at 100 ℃ for 12-24 hours, then carrying out ball milling on the baked glass broken slag by using a planetary ball mill, and sieving by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor;

in the embodiment, the raw materials are mixed in the V-shaped mixer in the step 2), so that the batch materials are uniformly mixed.

In the embodiment, the rotating speed of the V-shaped mixer is 20-40r/min, and the mixing time is 30-60 min.

In the embodiment, the ball-milled and mixed material is placed in a crucible in the step 3), the crucible is placed in a high-temperature lifting furnace, and the material is heated along with the furnace until the material is completely melted and clarified to obtain the glass liquid.

In this embodiment, the crucible is a corundum crucible or a platinum crucible.

In the embodiment, the mixed material in the step 3) is placed in a crucible, the crucible is placed in a high-temperature lifting furnace, the temperature is raised from room temperature to 650-; stirring for several times during the process to enable the molten material to be uniform, obtaining molten glass after the molten material is completely melted and clarified, and grinding the roasted glass broken slag in a zirconia ball grinding tank for 8-12 hours at the rotating speed of 200-400 r/min.

In this example, the sealing glass powder prepared had a coefficient of thermal expansion α of 95 to 120 × 10^-7/° c; transition temperature T of sealing glass powder_f800 ℃ at 720-³。

The sealing process of the sealing glass material for the vibration acceleration sensor comprises the following steps:

step 1), 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent are placed in a ball milling tank and mixed for 2 hours;

step 2), taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

step 3), preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

step 4), preparing the granulation powder by a pneumatic compaction machine to obtain a glass green body, then completely discharging the gel at room temperature to 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass cooked blank without the dispersant and the binder;

step 5), assembling the sealed metal shell, the core column and the glass clinker obtained in the step 4) into a component to be sealed, and then slowly heating to 1020-;

and 6) annealing the sealing component obtained in the step 5) along with a furnace for 2-3h to room temperature to obtain the connector of the ultrahigh-temperature vibration acceleration sensor.

Example 1

A preparation method of a sealing glass material for an ultrahigh-temperature vibration acceleration sensor specifically comprises the following steps:

1) selecting the following chemical components in percentage by weight:

SiO₂：47.5％；Al₂O₃：1％；K₂O：3％；MgO：3％；CaO：5％；SrO：1％；BaO：25％；ZnO：1％；V₂O₅：4.5％。

2) sieving the raw materials with a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear glass liquid;

3) pouring the clear glass liquid obtained in the step (2) into distilled water, and performing water quenching and cooling to obtain glass slag;

4) baking the broken glass residues obtained in the step (3) in an oven at 100 ℃ for 12-24 hours, then ball-milling the baked broken glass residues by using a planetary ball mill, and sieving the ground broken glass residues by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor;

the sealing glass of the invention was subjected to basic performance tests using the following method:

(1) testing the thermal expansion coefficient: measurement of coefficient of thermal expansion α of glass by coefficient of expansion measuring instrument 120 × 10^-7/℃；

(2) And (3) softening temperature test: determination of the softening temperature T of glass Using an expansion coefficient measuring apparatus_f＝720℃；

(3) And (3) testing a sealing reference system: measuring the wetting angle and the high-temperature physical property of the glass by using a high-temperature physical property instrument, and judging the sealing reference system of the glass to be 1020 ℃/30 min;

(4) testing the density of the glass: determination of glass Using Archimedes methodDensity p of 2.55g/cm³。

A sealing process method for the sealing glass comprises the following steps:

1) mixing 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent in a ball milling tank for 2 hours;

2) taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

3) preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

4) preparing the granulated powder into a glass green body by a pneumatic briquetting machine, then completely discharging the glue at the room temperature of 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass mature body with the dispersant and the binder removed;

5) assembling the sealed metal shell, the glass blank and the core column together into a component to be sealed, placing the component into a chain type sealing furnace, slowly heating to 1020 ℃ along with the furnace, and preserving heat for 30min to carry out sealing to obtain a sealing component;

6) and annealing the sealing component along with the furnace for 2-3h to room temperature to obtain the ultrahigh-temperature vibration acceleration sensor connector.

The basic performance test of the connector of the ultra-high temperature vibration acceleration sensor is carried out by adopting the following method:

(1) and (3) air tightness test: the air tightness of the sealed product is measured to be less than or equal to 1.0 multiplied by 10 by using a helium mass spectrometer leak detector^-10Pa·m³·s^-1；

(2) And (3) testing compressive strength: the compression strength test is carried out on a universal mechanical testing machine, the core column does not fall off after 1200N of pressure is applied on the core column, and the compression strength test meets the compression requirement;

(3) and (3) testing the insulation resistance: measuring the insulation property of the sealed product by using an ultrahigh resistance tester, wherein the insulation resistance is more than 10G omega/500 VDC, namely the insulation property requirement of the product is met;

(4) testing high-temperature insulation resistance: after the heat is preserved for 1h in a baking oven at the temperature of 482 ℃, the insulation resistance is tested to be more than or equal to 20 MOmega, and the requirement of the high-temperature insulation performance of the product is met.

Example 2

A preparation method of a sealing glass material for an ultrahigh-temperature vibration acceleration sensor specifically comprises the following steps:

1) selecting the following chemical components in percentage by weight:

SiO₂：53％；Al₂O₃：7％；K₂O：4％；MgO：1％；CaO：6％；SrO：2％；BaO：22％；ZnO：1.5％；V₂O₅：3.5％。

2) sieving the raw materials with a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear glass liquid;

3) pouring the clear glass liquid obtained in the step (2) into distilled water, and performing water quenching and cooling to obtain glass slag;

4) baking the broken glass residues obtained in the step (3) in an oven at 100 ℃ for 12-24 hours, then ball-milling the baked broken glass residues by using a planetary ball mill, and sieving the ground broken glass residues by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor;

the sealing glass of the invention was subjected to basic performance tests using the following method:

(1) testing the thermal expansion coefficient: the coefficient of thermal expansion α of the glass was measured by using a coefficient of thermal expansion measuring instrument as 114 × 10^-7/℃；

(2) And (3) softening temperature test: determination of the softening temperature T of glass Using an expansion coefficient measuring apparatus_f＝770℃；

(3) And (3) testing a sealing reference system: measuring the wetting angle and the high-temperature physical property of the glass by using a high-temperature physical property instrument, and judging the sealing reference system of the glass to be 1045 ℃/30 min;

(4) testing the density of the glass: measurement of Density ρ of glass by Archimedes method of 2.41g/cm³。

A sealing process method for the sealing glass comprises the following steps:

1) mixing 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent in a ball milling tank for 2 hours;

2)taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

3) preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

4) preparing the granulated powder into a glass green body by a pneumatic briquetting machine, then completely discharging the glue at the room temperature of 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass mature body with the dispersant and the binder removed;

5) assembling the sealed metal shell, the glass blank and the core column together into a component to be sealed, placing the component into a chain type sealing furnace, slowly heating to 1045 ℃ along with the furnace, preserving the heat for 30min, and sealing to obtain a sealing component;

6) and annealing the sealing component along with the furnace for 2-3h to room temperature to obtain the ultrahigh-temperature vibration acceleration sensor connector.

The basic performance test method of the connector of the ultra-high temperature vibration acceleration sensor is the same as that of the embodiment 1. All indexes meet the requirements after testing.

Example 3

A preparation method of a sealing glass material for an ultrahigh-temperature vibration acceleration sensor specifically comprises the following steps:

1) selecting the following chemical components in percentage by weight:

SiO₂：55％；Al₂O₃：7％；K₂O：5％；MgO：2％；CaO：4％；SrO：2％；BaO：20％；ZnO：2％；V₂O₅：3％。

2) sieving the raw materials with a 20-mesh sieve, uniformly mixing the raw materials by using a V-shaped mixer, and heating and melting the mixture in a high-temperature lifting furnace to obtain clear molten glass;

3) pouring the clear glass liquid obtained in the step (2) into distilled water, and performing water quenching and cooling to obtain glass slag;

4) baking the broken glass residues obtained in the step (3) in an oven at 100 ℃ for 12-24 hours, then ball-milling the baked broken glass residues by using a planetary ball mill, and sieving the ground broken glass residues by using a 80-mesh sieve to obtain the sealing glass material for the ultrahigh-temperature vibration acceleration sensor;

the sealing glass of the invention was subjected to basic performance tests using the following method:

(1) testing the thermal expansion coefficient: measurement of coefficient of thermal expansion α of glass by coefficient of expansion measuring instrument 95 × 10^-7/℃；

(2) And (3) softening temperature test: determination of the softening temperature T of glass Using an expansion coefficient measuring apparatus_f＝800℃；

(3) And (3) testing a sealing reference system: measuring the wetting angle and the high-temperature physical property of the glass by using a high-temperature physical property instrument, and judging the sealing reference system of the glass to be 1080 ℃/30 min;

(4) testing the density of the glass: measurement of Density ρ of glass by Archimedes method of 2.35g/cm³。

A sealing process method for the sealing glass comprises the following steps:

1) mixing 100 parts of sealing glass powder, 55-70 parts of water and 0.5-1.5 parts of dispersing agent in a ball milling tank for 2 hours;

2) taking out the ball milling tank, adding 20-30 parts of binder into the slurry, and continuing ball milling and mixing for 2 hours to obtain D₅₀Glass frit paste of 5-10 μm;

3) preparing the glass powder slurry into D in a spray granulation mode₅₀150 μm of granulated powder (100-;

4) preparing the granulated powder into a glass green body by a pneumatic briquetting machine, then completely discharging the glue at the room temperature of 300 ℃, heating to 720-800 ℃, and preserving the heat for 10-30min to prepare a glass mature body with the dispersant and the binder removed;

5) assembling the sealed metal shell, the glass blank and the core column together into a component to be sealed, placing the component into a chain type sealing furnace, slowly heating to 1080 ℃ along with the furnace, preserving heat for 30min, and sealing to obtain a sealing component;

6) and annealing the sealing component along with the furnace for 2-3h to room temperature to obtain the ultrahigh-temperature vibration acceleration sensor connector.

The basic performance test method of the connector of the ultra-high temperature vibration acceleration sensor is the same as that of the embodiment 1, and all indexes meet the requirements through tests.

The principles and embodiments of the present invention have been explained herein using specific embodiments, which are merely used to help understand the method and its core ideas of the present invention; for those skilled in the art, the invention can be modified in the specific embodiments and applications according to the spirit of the present invention, and therefore the content of the present description should not be construed as limiting the invention.