Surface analysis device
阅读说明：本技术 表面分析装置 (Surface analysis device ) 是由 藤野敬太 于 2020-03-02 设计创作，主要内容包括：本发明提供一种表面分析装置。驱动机构(45)以测量部(20)与试样台(30)的相对位置关系在第1位置关系与第2位置关系之间切换的方式使测量部(20)和试样台(30)相对性地位移。在第2位置关系时,试样台(30)自下部壳体的内部暴露于外侧。控制装置(201)包含生成向扫描器(32)供给的高电压的高电压生成电路(203)。在第2位置关系时,第1机械式开关(253)不使电源(202)的电压向高电压生成电路(203)供给。(The invention provides a surface analyzing apparatus. The drive mechanism (45) relatively displaces the measurement unit (20) and the sample stage (30) so that the relative positional relationship between the measurement unit (20) and the sample stage (30) is switched between the 1 st positional relationship and the 2 nd positional relationship. In the 2 nd positional relationship, the sample stage (30) is exposed to the outside from the inside of the lower housing. The control device (201) includes a high voltage generation circuit (203) that generates a high voltage to be supplied to the scanner (32). In the 2 nd positional relationship, the 1 st mechanical switch (253) does not supply the voltage of the power supply (202) to the high voltage generation circuit (203).)
1. A surface analysis device, comprising:
a sample stage on which a sample is placed;
a sample stage holding unit for holding the sample stage;
a measurement section including a cantilever which can be disposed so as to oppose the sample stage and a cantilever driving section for driving the cantilever;
a drive mechanism for relatively displacing the measurement unit and the sample stage so that a relative positional relationship between the measurement unit and the sample stage is switched between a 1 st positional relationship and a 2 nd positional relationship;
a control device; and
the 1 st mechanical switch is a mechanical switch,
the sample stage includes a scanner and a sample mounting portion,
the measuring part is accommodated in the upper shell,
in the 1 st positional relationship, the sample stage is housed in a lower case,
in the 2 nd positional relationship, the sample stage is exposed to the outside from the inside of the lower housing,
the control device includes a high voltage generating circuit connected to a power supply and generating a high voltage to be supplied to the scanner,
in the 1 st positional relationship, the 1 st mechanical switch supplies the voltage of the power source to the high voltage generation circuit, and in the 2 nd positional relationship, the 1 st mechanical switch does not supply the voltage of the power source to the high voltage generation circuit.
2. The surface analysis device of claim 1,
the drive mechanism is configured to: when the sample stage is to be taken out, the sample stage is relatively displaced with respect to the measurement unit in a 1 st direction in which the cantilever and the sample stage face each other so that the measurement unit and the sample stage are separated from each other, and then the sample stage is slidably moved in a 2 nd direction intersecting the 1 st direction, whereby the positional relationship between the sample stage and the measurement unit is changed from the 1 st positional relationship to the 2 nd positional relationship.
3. The surface analysis device of claim 2,
the drive mechanism includes a sample stage holding portion that holds the sample stage, and a moving mechanism for moving the sample stage between a measurement position and a position where a sample is taken out and a scanner is replaced,
the 1 st direction is an up-down direction,
the moving mechanism is configured to: the sample stage holding unit is moved up and down so that the sample stage is moved up and down between the measurement position and a retracted position located below the measurement position, and the sample stage holding unit is moved slidably so that the sample stage is moved between the retracted position and a position where the sample is taken out and the scanner is replaced.
4. The surface analysis device of claim 3,
the moving mechanism slides the sample stage in the 2 nd direction to bring the positional relationship between the sample stage and the measurement unit into the 1 st positional relationship, and the 1 st mechanical switch is pressed to electrically connect the power supply and the high voltage generation circuit.
5. The surface analysis device of claim 3,
the measuring part comprises a laser diode and a laser diode,
the surface analyzing apparatus is further provided with a 2 nd mechanical switch,
the 2 nd mechanical switch supplies the voltage of the power source to the laser diode in the 1 st positional relationship, and the 2 nd mechanical switch does not supply the voltage of the power source to the laser diode in the 2 nd positional relationship.
6. The surface analysis device of claim 5,
the movement mechanism slidably moves the sample stage in the 2 nd direction to bring the positional relationship between the sample stage and the measurement unit into the 1 st positional relationship, and the 2 nd mechanical switch is pressed to electrically connect the power source and the laser diode.
7. The surface analysis device according to any one of claims 3 to 6,
the moving mechanism includes a support body that supports the sample stage holding portion, a sliding mechanism that slidably moves the support body in a sliding direction of the sliding movement of the sample stage holding portion, and an elevating mechanism that elevates the sample stage holding portion with respect to the support body,
the support body is configured to be capable of moving in a predetermined sliding interval including a 1 st interval and a 2 nd interval in succession,
the sample table holding portion is lifted and lowered relative to the support body by the lifting mechanism in conjunction with the sliding movement of the support body in the 1 st section,
the sample table holding portion is configured to slide in the sliding direction integrally with the support body in accordance with the sliding movement of the support body in the 2 nd section,
the surface analyzing apparatus further includes a detecting device for detecting a position of the support,
the detection device includes a light-emitting portion and a light-receiving portion that receives light emitted from the light-emitting portion,
the sliding mechanism includes a light shielding body which slides along with the sliding movement of the supporting body,
the detection device detects the position of the support body by blocking the light emitted from the light emitting section toward the light receiving section with the light blocking body,
the control device controls the sliding movement of the sample stage based on the detection of the position of the support by the detection device.
8. A surface analysis device, comprising:
a sample stage on which a sample is placed;
a sample stage holding unit for holding the sample stage;
a measurement section including a cantilever which can be disposed so as to oppose the sample stage and a cantilever driving section for driving the cantilever;
a drive mechanism for relatively displacing the measurement unit and the sample stage so that a relative positional relationship between the measurement unit and the sample stage is switched between a 1 st positional relationship and a 2 nd positional relationship; and
the 3 rd mechanical switch is arranged on the base,
the measuring part is accommodated in the upper shell and comprises a laser diode,
in the 1 st positional relationship, the sample stage is housed in a lower case,
in the 2 nd positional relationship, the sample stage is exposed to the outside from the inside of the lower housing,
the 3 rd mechanical switch supplies the voltage of the power supply to the laser diode when the cover of the upper case is closed, and the 3 rd mechanical switch does not supply the voltage of the power supply to the laser diode when the cover of the upper case is opened.
9. The surface analysis device of claim 8,
the 3 rd mechanical switch is depressed by closing the lid, thereby electrically connecting the power source to the laser diode.
Technical Field
The present invention relates to a surface analyzing apparatus.
Background
As a conventional analysis apparatus, japanese patent application laid-open No. 8-101219 discloses a scanning probe microscope that analyzes a microstructure on a sample surface using a cantilever provided with a probe.
In the scanning probe microscope disclosed in patent document 1, a measurement unit including an optical system is movably fixed to a base fixed in a predetermined positional relationship with respect to a sample stage. When a sample is measured, the measuring unit is disposed above the sample stage. By retracting the measuring unit from the position at the time of measurement, a space for replacing the sample is formed above the sample stage, whereby the sample can be easily replaced.
Disclosure of Invention
However, in a state where the scanning probe microscope is powered on, a high voltage is applied to the piezoelectric scanner. Therefore, when the piezoelectric scanner is replaced, a high voltage may be applied to the piezoelectric scanner. Therefore, when replacing the piezoelectric scanner, the user must turn off the power supply of the scanning probe microscope.
Even in a state where the cover covering the optical system is opened, the laser light source is kept in a lighting state, and a state where a voltage is applied to the piezoelectric scanner is kept. In this state, the scanning probe microscope is still operated as usual, and therefore, when the user accidentally touches the knob for adjustment of the observation portion, the optical microscope, or the like, the scanning probe microscope may be operated erroneously. In addition, the laser may be emitted in a state where the cover is opened.
The present invention aims to provide a surface analysis device capable of preventing a scanning probe microscope from malfunctioning due to a user's operation.
The surface analysis device according to an aspect of the present invention includes: a sample stage on which a sample is placed; a sample table holding unit for holding a sample table; a measurement unit including a cantilever which can be disposed so as to oppose the sample stage and a cantilever driving unit for driving the cantilever; a drive mechanism for relatively displacing the measurement unit and the sample stage so that a relative positional relationship between the measurement unit and the sample stage is switched between a 1 st positional relationship and a 2 nd positional relationship; a control device; and a 1 st mechanical switch. The sample stage includes a scanner and a sample mounting portion. The measuring part is accommodated in the upper case. In the 1 st positional relationship, the sample stage is housed in the lower case. In the 2 nd positional relationship, the sample stage is exposed to the outside from the inside of the lower housing. The control device includes a high voltage generation circuit connected to a power supply and generating a high voltage to be supplied to the scanner. In the 1 st positional relationship, the 1 st mechanical switch supplies the voltage of the power supply to the high voltage generation circuit, and in the 2 nd positional relationship, the 1 st mechanical switch does not supply the voltage of the power supply to the high voltage generation circuit.
The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the present invention which is read in connection with the accompanying drawings.
Drawings
Fig. 1 is a perspective view showing a state of a measuring apparatus 1 of a scanning probe microscope according to an embodiment at the time of measurement.
Fig. 2 is a perspective view showing a state of the measurement device 1 of the scanning probe microscope according to the embodiment when a sample is taken out or when a scanner is replaced.
Fig. 3 is a perspective view showing a state in which a cover of the measuring apparatus 1 of the scanning probe microscope according to the embodiment is opened.
Fig. 4 is a perspective view showing a part of the structure in the housing of the measurement apparatus 1 of the scanning probe microscope according to the embodiment.
Fig. 5A is a diagram for explaining an operation of the
Fig. 6 is a schematic cross-sectional view showing a state in which the
Fig. 7 is a schematic cross-sectional view showing a state in which the
Fig. 8 is a schematic cross-sectional view showing a state in which the
Fig. 9 is a perspective view showing a part of the sample stage holding unit and the moving mechanism according to the embodiment.
Fig. 10 is a side view showing a part of the sample stage holding unit and the moving mechanism in a state where the
Fig. 11 is a side view showing a part of the sample stage holding unit and the moving mechanism in a state where the
Fig. 12 is a side view showing a part of the sample stage holding section and the moving mechanism in a state where the
Fig. 13 is a diagram for explaining a detection device according to the embodiment.
Fig. 14 is a diagram for explaining the operation of the
Fig. 15 is a flowchart showing steps of transition from the time of measurement in the scanning probe microscope according to the embodiment.
Fig. 16 is a perspective view showing a state of the measurement device 1 of the scanning probe microscope according to modification 1 during measurement.
Fig. 17A and 17B are perspective views showing a state of measurement by the measurement device 1 of the scanning probe microscope according to modification 3.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following embodiments, a scanning probe microscope is exemplified as the surface analyzing apparatus. In the embodiments described below, the same or common portions are denoted by the same reference numerals in the drawings, and description thereof will not be repeated.
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