阅读说明：本技术 制备金刚石单晶的激光等离子体cvd设备及其工作方法 (Laser plasma CVD equipment for preparing diamond single crystal and working method thereof ) 是由 魏朝兵 于 2020-06-29 设计创作，主要内容包括：本发明公开制备金刚石单晶的激光等离子体CVD设备及其工作方法,包括下箱体、上箱体,下箱体与上箱体之间通过铰链转动连接,上箱体上安装有两个激光灯,下箱体一侧设置有微波发生器,微波发生器上安装有微波发射喇叭,微波发射喇叭贯穿下箱体侧壁,下箱体内安装有下基座,下基座上转动设置有下基台。本发明通过甲烷、丙酮、二氧化碳混合气体的储存设备通过碳气管向上箱体与下箱体形成的空间通入混合气体,开启激光灯,激光灯对籽晶进行照射,开启第一电机,两个第一电机输出轴配合齿轮带动齿盘转动,齿盘通过下基台带动籽晶转动,籽晶进行生长,解决现有技术中激光灯对籽晶的照射不全面,导致籽晶生长不快的技术问题。(The invention discloses laser plasma CVD equipment for preparing diamond single crystals and a working method thereof. According to the invention, the mixed gas is introduced into the space formed by the upper box body and the lower box body through the carbon gas pipe by the storage equipment for the mixed gas of methane, acetone and carbon dioxide, the laser lamp is started to irradiate the seed crystal, the first motors are started, the output shafts of the two first motors are matched with the gears to drive the fluted disc to rotate, the fluted disc drives the seed crystal to rotate through the lower base platform, and the seed crystal grows.)

1. The laser plasma CVD equipment for preparing the diamond single crystal is characterized by comprising a lower box body (1) and an upper box body (2), wherein the lower box body (1) is rotatably connected with the upper box body (2) through a hinge, two laser lamps (4) are installed on the upper box body (2), a microwave generator (3) is arranged on one side of the lower box body (1), a microwave transmitting horn (5) is installed on the microwave generator (3), the microwave transmitting horn (5) penetrates through the side wall of the lower box body (1), a lower base (6) is installed in the lower box body (1), and a lower base (7) is rotatably arranged on the lower base (6);

go up box (2) inner wall top and install footstock (13), movable groove (131) have been seted up on footstock (13), slidable mounting has movable plate (15) on movable groove (131), installs telescopic cylinder (16) on movable plate (15), connecting plate (17) are installed to telescopic cylinder (16) piston rod tip, install laser cutting head (18) on connecting plate (17), two exhaust gas collection box (22) are installed to box (1) bottom down, install aspiration pump (23) in exhaust gas collection box (22), box (1) under exhaust gas collection box (22) intercommunication, vacuum tube (24), carbon pipe (25) are installed to box (1) homonymy outer wall down, all install the ooff valve on vacuum tube (24), carbon pipe (25).

2. A laser plasma CVD apparatus for producing a diamond single crystal according to claim 1, wherein two laser lamps (4) are symmetrically fixed to both sides of the upper case (2), and a handle is installed on the upper case (2).

3. The laser plasma CVD apparatus for producing diamond monocrystal according to claim 1, wherein a groove (8) is formed in each of four side edges of the top of the lower case (1), a sealing strip (9) is mounted on each of four side edges of the bottom of the upper case (2), and the sealing strips (9) and the grooves (8) are fitting members.

4. The laser plasma CVD apparatus for producing diamond single crystal according to claim 1, wherein the lower base (6) has a hollow structure, two first motors (10) are installed in the lower base (6), a positioning shaft (11) is installed in the lower base (6), the bottom of the positioning shaft (11) is rotatably connected to the bottom of the inner wall of the lower base (6), the two first motors (10) are respectively disposed on two sides of the positioning shaft (11), the output shaft of the first motor (10) is connected to a gear, a fluted disc (12) is sleeved on the top shaft end of the positioning shaft (11), the fluted disc (12) is disposed above the lower base (6), the fluted disc (12) is fixed to the bottom of the lower base (7), and the fluted disc (12) is meshed with the two gears.

5. The laser plasma CVD apparatus for producing diamond single crystal according to claim 1, wherein a lead screw is rotatably disposed in the movable groove (131), the top base (13) is mounted with a second motor (14), an output shaft of the second motor (14) is connected with the lead screw, a lead screw connecting block is rotatably sleeved on an outer peripheral surface of the lead screw, the lead screw connecting block is fixedly connected with the movable plate (15), two sliding blocks are mounted on the movable plate (15), two sliding rails are mounted in the movable groove (131), and the two sliding blocks are respectively slidably connected with the two sliding rails.

6. The laser plasma CVD equipment for preparing diamond monocrystal according to claim 1, wherein a water inlet pipe (19) and a water outlet pipe (20) are installed on the same side wall of the lower box body (1), the water inlet pipe (19) and the water outlet pipe (20) are arranged on the same plane, a water outlet of a circulating cooling device is externally connected with the water inlet pipe (19), a water inlet of the circulating cooling device is externally connected with the water outlet pipe (20), a U-shaped pipe (21) is arranged in an inner cavity of the lower box body (1), and two ends of the U-shaped pipe (21) are respectively communicated with the water inlet pipe (19) and the water outlet pipe.

7. The laser plasma CVD apparatus for producing a diamond single crystal according to claim 1, wherein the evacuation tube (24) and the carbon gas tube (25) are connected to a side wall of the lower case (1), the evacuation tube (24) is externally connected to a vacuum pump, and the carbon gas tube (25) is externally connected to a storage apparatus for a mixed gas of methane, acetone, and carbon dioxide.

8. The working method of the laser plasma CVD equipment for preparing the diamond single crystal is characterized by comprising the following steps of:

the method comprises the following steps: pulling a handle on the upper box body (2), opening the upper box body (2), placing seed crystals on a lower base station (7), closing the upper box body (2), matching and sealing the upper box body (2) with a groove (8) on the lower box body (1) through a sealing strip (9), pumping a space formed by the upper box body (2) and the lower box body (1) to vacuum through a vacuum pump (24), starting a microwave generator (3), heating the space formed by the upper box body (2) and the lower box body (1) through a microwave transmitting loudspeaker (5) by the microwave generator (3), starting external circulating cooling equipment, circulating cooling water through a U-shaped pipe (21) matched with a water inlet pipe (19) and a water outlet pipe (20), and further cooling the space formed by the upper box body (2) and the lower box body (1);

step two: the storage equipment for the mixed gas of methane, acetone and carbon dioxide introduces the mixed gas into a space formed by the upper box body (2) and the lower box body (1) through a carbon gas pipe (25), a laser lamp (4) is started, the laser lamp (4) irradiates seed crystals, first motors (10) are started, output shafts of the two first motors (10) are matched with gears to drive a fluted disc (12) to rotate, the fluted disc (12) drives the seed crystals to rotate through a lower base platform (7), and the seed crystals grow;

step three: obtaining the diamond piece after the seed crystal growth, opening second motor (14), second motor (14) output shaft drives the lead screw and rotates, lead screw cooperation lead screw connecting block drives movable plate (15) and slides in activity groove (131), telescopic cylinder (16) piston rod passes through connecting plate (17) and drives laser cutting head (18) decline, laser cutting head (18) are to diamond polycrystal cutting all around, then base station (7) drive diamond rotation down, laser cutting head (18) vertically cut the diamond.

Technical Field

The invention relates to the technical field of diamond production, in particular to laser plasma CVD equipment for preparing diamond single crystals and a working method thereof.

Background

The synthesis rate of the single crystal diamond synthesized by the common plasma CVD equipment is low, the yield is not high, if the rate needs to be improved, a microwave source with high power is needed to be improved, so that the cost and the energy consumption are greatly increased, the cost of the equipment is increased, and the high-speed batch preparation of the diamond is also limited.

Patent document (CN201810159834.5) discloses a device and method for preparing single crystal diamond by laser-enhanced plasma CVD, which can improve the density of the excited plasma by adopting the laser-enhanced method, improve the dissociation rate of the gas, thereby quickening the growth efficiency, the laser irradiation to the surface of the substrate can increase the surface temperature of the substrate, thereby improving the surface activity of the particles, and improving the growth quality, but the laser irradiation of the CVD equipment to the seed crystal is not comprehensive, the growth of the seed crystal is not good, and the diamond obtained after the growth needs to be taken out for laser cutting, which all causes the treatment efficiency of the diamond to be not high.

Disclosure of Invention

The invention aims to provide laser plasma CVD equipment for preparing diamond single crystals and a working method thereof, and solves the following technical problems: (1) the storage device for the mixed gas of methane, acetone and carbon dioxide is used for introducing the mixed gas into a space formed by the upper box body and the lower box body through the carbon gas pipe, the laser lamp is started, the seed crystal is irradiated by the laser lamp, the first motors are started, the output shafts of the two first motors are matched with the gears to drive the fluted disc to rotate, the fluted disc drives the seed crystal to rotate through the lower base platform, and the seed crystal grows, so that the technical problem that the seed crystal grows rapidly due to incomplete irradiation of the laser lamp on the seed crystal in the prior art is solved; (2) obtain the diamond piece after the growth of seed crystal is finished, open the second motor, second motor output shaft drives the lead screw and rotates, lead screw cooperation lead screw connecting block drives the movable plate and slides in the movable groove, telescopic cylinder piston rod passes through the connecting plate and drives the decline of laser cutting head, the laser cutting head is to the diamond polycrystal all around cutting, then the base station drives the diamond rotation down, the laser cutting head vertically cuts the diamond, solve among the prior art seed crystal growth and need take out the diamond after obtaining the diamond and carry out laser cutting, the technical problem that the treatment effeciency to the diamond is not high.

The purpose of the invention can be realized by the following technical scheme:

the laser plasma CVD equipment for preparing the diamond single crystal comprises a lower box body and an upper box body, wherein the lower box body is rotatably connected with the upper box body through a hinge, two laser lamps are installed on the upper box body, a microwave generator is arranged on one side of the lower box body, a microwave transmitting horn is installed on the microwave generator, the microwave transmitting horn penetrates through the side wall of the lower box body, a lower base is installed in the lower box body, and a lower base is rotatably arranged on the lower base;

the improved vacuum furnace is characterized in that a top seat is installed at the top of the inner wall of the upper box body, a movable groove is formed in the top seat, a movable plate is slidably installed on the movable groove, a telescopic cylinder is installed on the movable plate, a connecting plate is installed at the end part of a piston rod of the telescopic cylinder, a laser cutting head is installed on the connecting plate, two waste gas collecting boxes are installed at the bottom of the lower box body, an air pump is installed in each waste gas collecting box, the waste gas collecting boxes are communicated with the lower box body, a vacuum tube and a carbon gas tube are installed on the outer wall of the same side of the lower box.

Furthermore, two laser lamps are symmetrically fixed on two sides of the upper box body, and handles are installed on the upper box body.

Furthermore, the side edges at four positions of the top of the lower box body are provided with grooves, the side edges at four positions of the bottom of the upper box body are provided with sealing strips, and the sealing strips and the grooves are matched components.

Further, the base is cavity formula structure down, install two first motors in the base down, install the location axle in the base down, location axle bottom rotates and connects base inner wall bottom down, and two first motors set up respectively in location axle both sides, first motor output shaft has the gear, location axle top axle head cover is equipped with the fluted disc, the fluted disc sets up in base top down, the fluted disc is fixed in base bottom down, two gears are connected in the meshing of fluted disc.

Further, the movable groove internal rotation is provided with the lead screw, install the second motor on the footstock, second motor output shaft connects the lead screw, and the lead screw outer peripheral face rotates the cover and is equipped with the lead screw connecting block, lead screw connecting block fixed connection movable plate, install two sliders on the movable plate, install two slide rails in the movable groove, two sliders are two slide rails of sliding connection respectively.

Further, inlet tube, outlet pipe are installed with the lateral wall to the lower box, inlet tube, outlet pipe set up in the coplanar, the delivery port of the external circulative cooling equipment of inlet tube, the water inlet of the external circulative cooling equipment of outlet pipe, the lower box inner chamber is provided with the U-shaped pipe, U-shaped pipe both ends communicate inlet tube, outlet pipe respectively.

Furthermore, the vacuum-pumping pipe and the carbon gas pipe are both communicated with the side wall of the lower box body, the vacuum-pumping pipe is externally connected with a vacuum pump, and the carbon gas pipe is externally connected with a storage device for methane, acetone and carbon dioxide mixed gas.

Further, the working method of the laser plasma CVD equipment for preparing the diamond single crystal comprises the following steps:

the method comprises the following steps: pulling a handle on the upper box body, opening the upper box body, placing seed crystals on the lower base station, closing the upper box body, matching and sealing the upper box body with a groove on the lower box body through a sealing strip, pumping a space formed by the upper box body and the lower box body to vacuum through a vacuum pump, opening a microwave generator, heating the space formed by the upper box body and the lower box body through a microwave transmitting loudspeaker by the microwave generator, opening external circulating cooling equipment, circulating cooling water through a U-shaped pipe matched with a water inlet pipe and a water outlet pipe, and further cooling the space formed by the upper box body and the lower box body;

step two: the storage equipment for the mixed gas of methane, acetone and carbon dioxide introduces the mixed gas into a space formed by the upper box body and the lower box body through the carbon gas pipe, a laser lamp is started, the laser lamp irradiates seed crystals, the first motors are started, output shafts of the two first motors are matched with the gears to drive the fluted disc to rotate, the fluted disc drives the seed crystals to rotate through the lower base platform, and the seed crystals grow;

step three: and after the growth of the seed crystals is finished, the diamond sheet is obtained, the second motor is started, the output shaft of the second motor drives the screw rod to rotate, the screw rod is matched with the screw rod connecting block to drive the moving plate to slide in the moving groove, the piston rod of the telescopic cylinder drives the laser cutting head to descend through the connecting plate, the laser cutting head cuts the diamond periphery polycrystal, then the base station drives the diamond to rotate, and the laser cutting head longitudinally cuts the diamond.

The invention has the beneficial effects that:

(1) the laser plasma CVD equipment for preparing diamond single crystals and the working method thereof have the advantages that the upper box body is opened by pulling the handle on the upper box body, seed crystals are placed on the lower base station, the upper box body is closed, the upper box body is matched and sealed with the groove on the lower box body through the sealing strip, the vacuum pump pumps the space formed by the upper box body and the lower box body to vacuum through the vacuum pumping pipe, the microwave generator is started, the space formed by the upper box body and the lower box body is heated through the microwave transmitting loudspeaker by the microwave generator, the external circulating cooling equipment is started, the water inlet pipe and the water outlet pipe are matched with the U-shaped pipe to circulate cooling water, the space formed by the upper box body and the lower box body is cooled, the temperature of the CVD equipment is conveniently adjusted through the arrangement of the microwave generator and the external circulating cooling equipment, and the practicability; the storage equipment for the mixed gas of methane, acetone and carbon dioxide introduces the mixed gas into a space formed by the upper box body and the lower box body through the carbon gas pipe, the laser lamp is started, the seed crystal is irradiated by the laser lamp, the first motors are started, the output shafts of the two first motors are matched with the gears to drive the fluted disc to rotate, the fluted disc drives the seed crystal to rotate through the lower base platform, the seed crystal grows, and through the structure, the lower base platform drives the seed crystal to rotate, so that the laser irradiates the seed crystal on the lower base platform more comprehensively, and the treatment effect on the seed crystal is better;

(2) obtain the diamond piece after the seed crystal growth finishes, open the second motor, second motor output shaft drives the lead screw and rotates, lead screw cooperation lead screw connecting block drives the movable plate and slides in the movable groove, telescopic cylinder piston rod passes through the connecting plate and drives the decline of laser cutting head, the laser cutting head is to the diamond polycrystal all around cutting, then the base station drives the diamond rotation down, the laser cutting head vertically cuts the diamond, through above structure setting, make this CVD equipment can directly cut the diamond that obtains after the seed crystal production, the treatment effeciency of diamond is high.

Drawings

The invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic configuration diagram of a laser plasma CVD apparatus for producing a diamond single crystal according to the present invention;

FIG. 2 is an internal structural view of an upper case of the present invention;

FIG. 3 is an internal structural view of the lower case of the present invention;

FIG. 4 is an internal structural view of the lower base of the present invention;

fig. 5 is an internal structural view of the exhaust gas collection tank of the present invention.

In the figure: 1. a lower box body; 2. an upper box body; 3. a microwave generator; 4. a laser light; 5. a microwave transmitting horn; 6. a lower base; 7. a lower base station; 8. a groove; 9. a sealing strip; 10. a first motor; 11. positioning the shaft; 12. a fluted disc; 13. a top seat; 131. a movable groove; 14. a second motor; 15. moving the plate; 16. a telescopic cylinder; 17. a connecting plate; 18. a laser cutting head; 19. a water inlet pipe; 20. a water outlet pipe; 21. a U-shaped tube; 22. a waste gas collection tank; 23. an air pump; 24. vacuumizing a tube; 25. a carbon gas pipe.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, the laser plasma CVD equipment for preparing diamond single crystals of the present invention comprises a lower box 1 and an upper box 2, wherein the lower box 1 is rotatably connected with the upper box 2 through a hinge, the upper box 2 is provided with two laser lamps 4, one side of the lower box 1 is provided with a microwave generator 3, the microwave generator 3 is provided with a microwave emitting horn 5, the microwave emitting horn 5 penetrates through the side wall of the lower box 1, a lower base 6 is arranged in the lower box 1, and the lower base 6 is rotatably provided with a lower base 7;

go up 2 inner wall tops of box and install footstock 13, movable groove 131 has been seted up on footstock 13, slidable mounting has movable plate 15 on the movable groove 131, install telescopic cylinder 16 on the movable plate 15, connecting plate 17 is installed to telescopic cylinder 16 piston rod end, install laser cutting head 18 on the connecting plate 17, two waste gas collecting box 22 are installed to box 1 bottom down, install aspiration pump 23 in the waste gas collecting box 22, waste gas collecting box 22 communicates box 1 down, vacuum tube 24, carbon trachea 25 are installed to box 1 homonymy outer wall down, all install the ooff valve on vacuum tube 24, the carbon trachea 25.

Specifically, two laser lamps 4 are symmetrically fixed on two sides of the upper box body 2, and the upper box body 2 is provided with a handle. All set up flutedly 8 at lower 1 top four sides of box, go up 2 bottoms of box and all install sealing strip 9 at four sides, sealing strip 9 and recess 8 are the cooperation component. Lower base 6 is the cavity formula structure, installs two first motors 10 in lower base 6, installs location axle 11 in lower base 6, and 6 inner wall bottoms of base under the 11 bottoms of location axle are rotated and are connected, and two first motors 10 set up respectively in location axle 11 both sides, and first motor 10 output shaft has the gear, and 11 top axle head covers of location axle are equipped with fluted disc 12, and fluted disc 12 sets up in 6 tops of lower base, and fluted disc 12 is fixed in 7 bottoms of base platform down, and two gears are connected in the meshing of fluted disc 12. A screw rod is rotatably arranged in the movable groove 131, the second motor 14 is installed on the top seat 13, an output shaft of the second motor 14 is connected with the screw rod, a screw rod connecting block is rotatably sleeved on the outer peripheral surface of the screw rod, the screw rod connecting block is fixedly connected with the movable plate 15, two sliding blocks are installed on the movable plate 15, two sliding rails are installed in the movable groove 131, and the two sliding blocks are respectively connected with the two sliding rails in a sliding manner. The lower box body 1 is provided with a water inlet pipe 19 and a water outlet pipe 20 on the same side wall, the water inlet pipe 19 and the water outlet pipe 20 are arranged on the same plane, the water inlet pipe 19 is externally connected with a water outlet of the circulating cooling equipment, the water outlet pipe 20 is externally connected with a water inlet of the circulating cooling equipment, a U-shaped pipe 21 is arranged in the inner cavity of the lower box body 1, and two ends of the U-shaped pipe 21 are respectively communicated with. The vacuumizing pipe 24 and the carbon gas pipe 25 are both communicated with the side wall of the lower box body 1, the vacuumizing pipe 24 is externally connected with a vacuum pump, and the carbon gas pipe 25 is externally connected with storage equipment for methane, acetone and carbon dioxide mixed gas.

Referring to fig. 1 to 5, the laser plasma CVD apparatus for manufacturing diamond single crystal according to this embodiment operates as follows:

the method comprises the following steps: pulling a handle on the upper box body 2, opening the upper box body 2, placing seed crystals on a lower base station 7, closing the upper box body 2, matching and sealing the upper box body 2 with a groove 8 on the lower box body 1 through a sealing strip 9, pumping a space formed by the upper box body 2 and the lower box body 1 to vacuum through a vacuum pump 24, starting a microwave generator 3, heating the space formed by the upper box body 2 and the lower box body 1 through a microwave transmitting loudspeaker 5 by the microwave generator 3, starting external circulating cooling equipment, circulating cooling water through a U-shaped pipe 21 matched by a water inlet pipe 19 and a water outlet pipe 20, and further cooling the space formed by the upper box body 2 and the lower box body 1;

step two: the storage equipment for the mixed gas of methane, acetone and carbon dioxide introduces the mixed gas into a space formed by the upper box body 2 and the lower box body 1 through the carbon gas pipe 25, the laser lamp 4 is started, the laser lamp 4 irradiates seed crystals, the first motors 10 are started, the output shafts of the two first motors 10 are matched with the gears to drive the fluted disc 12 to rotate, the fluted disc 12 drives the seed crystals to rotate through the lower base platform 7, and the seed crystals grow;

step three: obtaining the diamond piece after the seed crystal growth, opening second motor 14, second motor 14 output shaft drives the lead screw and rotates, lead screw cooperation lead screw connecting block drives movable plate 15 and slides in movable groove 131, telescopic cylinder 16 piston rod passes through connecting plate 17 and drives laser cutting head 18 decline, and laser cutting head 18 cuts diamond polycrystal all around, and then lower base station 7 drives the diamond and rotates, and laser cutting head 18 vertically cuts the diamond.

The foregoing is merely exemplary and illustrative of the present invention and various modifications, additions and substitutions may be made by those skilled in the art to the specific embodiments described without departing from the scope of the invention as defined in the following claims.