阅读说明：本技术 掩模版修复设备 (Mask repair equipment ) 是由 陈策 许亮 于 2020-05-21 设计创作，主要内容包括：本申请提供一种掩模版修复设备,掩模版修复设备包括研磨机构,在研磨机构中,导向头的第一端部与所述第二驱动组件连接,第二端部抵接研磨带,第二驱动组件用于驱动导向头摆动以调整研磨带的研磨角度。本申请通过将研磨机构的导向头设置为可摆动的方式,提高了研磨机构的研磨效果。(The application provides a mask version repair equipment, mask version repair equipment include grinding mechanism, in grinding mechanism, the first end of direction head with the second drive assembly is connected, and second end butt grinding belt, second drive assembly are used for driving the direction head swing with the grinding angle of adjustment grinding belt. This application sets up to wobbling mode through the direction head with grinding mechanism, has improved grinding mechanism's grinding effect.)

1. A reticle repair apparatus, comprising:

the grinding mechanism is used for grinding foreign matters on the mask plate;

the grinding mechanism includes:

the driving control module comprises a cavity, a first driving assembly, a second driving assembly and a plurality of rollers, the first driving assembly, the second driving assembly and the plurality of rollers are connected to the cavity, one side, facing the mask, of the cavity is concavely provided with a groove, the first driving assembly is connected with at least one roller and is used for driving the roller to rotate, and the roller is located on the outer peripheral side of the groove;

an abrasive belt for grinding the foreign matter, the abrasive belt surrounding and overlapping the roller; and

the guide head is arranged in the groove and extends out of the groove, the guide head is located in a ring formed by the grinding belt, the guide head comprises a first end portion and a second end portion which are arranged oppositely, the first end portion is arranged in the groove, the second end portion is arranged outside the groove, the first end portion is connected with the second driving assembly, the second end portion abuts against the grinding belt, and the second driving assembly is used for driving the guide head to swing so as to adjust the grinding angle of the grinding belt.

2. The reticle repair apparatus of claim 1, wherein the first end portion is provided with a fixing hole, the fixing hole is fixedly provided with a connecting shaft, and the second driving assembly is connected with the connecting shaft.

3. The reticle repair apparatus of claim 1, wherein the reticle repair apparatus comprises a transfer mechanism comprising a first displacement module to drive the grinding mechanism to move in a first direction, a second displacement module to drive the grinding mechanism to move in a second direction, and a third displacement module to drive the grinding mechanism to move in a third direction;

the second moving module is arranged on the first shifting module in a sliding mode, the third moving module is arranged on the second moving module in a sliding mode, and the first direction, the second direction and the third direction are perpendicular to each other in pairs.

4. The reticle repair device of claim 3, wherein the grinding mechanism further comprises a pressure sensor for sensing a pressure at a contact position of the guide head and the grinding tape, the pressure sensor is disposed on the chamber, a fixing groove is formed in the second end portion, and a sensing end of the pressure sensor is disposed in the fixing groove;

the third direction is up and down, and the pressure sensor is electrically connected with the third mobile module.

5. The reticle repair tool of claim 1, wherein the guide head has an angle of oscillation of less than 120 °.

6. The reticle repair apparatus of claim 3, wherein the reticle repair apparatus comprises a first image acquisition mechanism for acquiring an image of a foreign object on the reticle and determining a height of the foreign object from the image, the first image acquisition mechanism being electrically connected to the transfer mechanism;

the first image acquisition mechanism includes:

the first camera module is used for acquiring the image of the foreign matter;

the first image processing module is electrically connected with the first camera module and used for obtaining the height of the foreign matter according to the intensity of reflected light of the portrait under each gray scale of the foreign matter; and

the first light-emitting assembly is used for vertically projecting light rays to the front surface of the mask plate; and

and the second light-emitting assembly is used for projecting light to the back surface of the mask.

7. The mask repair equipment according to claim 6, wherein the first light emitting assembly comprises a first light emitting device and a semi-reflecting and semi-transmitting plate, a plane where the semi-reflecting and semi-transmitting plate is located and a plane where the mask is located form an angle of 45 degrees, the first light emitting device is located on a light reflecting side of the semi-reflecting and semi-transmitting plate, and a light path of the first light emitting device and the light reflecting side of the semi-reflecting and semi-transmitting plate form an angle of 45 degrees;

the first camera module is positioned on the light transmitting side of the semi-reflective and semi-transparent plate, and the optical axis of the first camera module penetrates through the semi-reflective and semi-transparent plate and is perpendicular to the plane where the mask is positioned.

8. The reticle repair apparatus of claim 6, further comprising a second image capture mechanism configured to capture an image of the reticle and determine coordinates of the foreign object from the image of the reticle, the second image capture mechanism being electrically connected to the transfer mechanism and the first image capture mechanism, respectively.

9. The reticle repair apparatus of claim 6, wherein the first image capture mechanism is further configured to capture an image of the reticle and determine coordinates of the foreign object from the image of the reticle.

10. The mask repair apparatus of claim 8, further comprising a laser mechanism for removing foreign matter on the mask, the laser mechanism being slidably disposed on the transfer mechanism;

the laser mechanism comprises a laser transmitter, a filter and a frequency tripling device, wherein the filter is arranged between the laser transmitter and the frequency tripling device.

Technical Field

The application relates to the technical field of display, in particular to mask repair equipment.

Background

In the surface repair equipment for the mask plate, when stubborn fiber and metal foreign matters appear, the laser mechanism cannot be used for removing the hard foreign matters, so that the hard foreign matters can only be manually ground, but the repair efficiency of manual grinding is low, and the grinding effect on the foreign matters on the uneven surface of the mask plate is poor, for example, the foreign matters on the concave surface cannot be ground.

Disclosure of Invention

The embodiment of the application provides mask repair equipment to solve the technical problem that existing mask surface repair equipment is poor in mask repair effect.

The embodiment of the application provides a mask plate repair equipment, which comprises:

the grinding mechanism is used for grinding foreign matters on the mask plate;

the grinding mechanism includes:

the driving control module comprises a cavity, a first driving assembly, a second driving assembly and a plurality of rollers, the first driving assembly, the second driving assembly and the plurality of rollers are connected to the cavity, one side, facing the mask, of the cavity is concavely provided with a groove, the first driving assembly is connected with at least one roller and is used for driving the roller to rotate, and the roller is located on the outer peripheral side of the groove;

an abrasive belt for grinding the foreign matter, the abrasive belt surrounding and overlapping the roller; and

the guide head is arranged in the groove and extends out of the groove, the guide head is located in a ring formed by the grinding belt, the guide head comprises a first end portion and a second end portion which are arranged oppositely, the first end portion is arranged in the groove, the second end portion is arranged outside the groove, the first end portion is connected with the second driving assembly, the second end portion abuts against the grinding belt, and the second driving assembly is used for driving the guide head to swing so as to adjust the grinding angle of the grinding belt.

In the mask repairing equipment, the first end is provided with a fixing hole, the fixing hole is fixedly provided with a connecting shaft, and the second driving assembly is connected with the connecting shaft.

In the mask repair apparatus of the present application, the mask repair apparatus includes a transfer mechanism, the transfer mechanism includes a first shift module, a second shift module, and a third shift module, the first shift module is configured to drive the grinding mechanism to move along a first direction, the second shift module is configured to drive the grinding mechanism to move along a second direction, and the third shift module is configured to drive the grinding mechanism to move along a third direction;

the second moving module is arranged on the first shifting module in a sliding mode, the third moving module is arranged on the second moving module in a sliding mode, and the first direction, the second direction and the third direction are perpendicular to each other in pairs.

In the mask repair equipment, the grinding mechanism further comprises a pressure sensor for sensing the pressure of the contact part of the guide head and the grinding belt, the pressure sensor is arranged on the cavity, a fixing groove is formed in the second end part, and the sensing end of the pressure sensor is arranged in the fixing groove;

the third direction is up and down, and the pressure sensor is electrically connected with the third mobile module.

In the mask repair equipment, the swing angle of the guide head is less than 120 degrees.

In the mask repair equipment, the mask repair equipment comprises a first image acquisition mechanism, the first image acquisition mechanism is used for acquiring an image of a foreign matter on a mask and determining the height of the foreign matter according to the image, and the first image acquisition mechanism is electrically connected with the transfer mechanism;

the first image acquisition mechanism includes:

the first camera module is used for acquiring the image of the foreign matter;

the first image processing module is electrically connected with the first camera module and used for obtaining the height of the foreign matter according to the intensity of reflected light of the portrait under each gray scale of the foreign matter; and

the first light-emitting assembly is used for vertically projecting light rays to the front surface of the mask plate; and

and the second light-emitting assembly is used for projecting light to the back surface of the mask.

In the mask repair equipment, the first light-emitting assembly comprises a first light-emitting device and a semi-reflecting and semi-transmitting plate, a plane where the semi-reflecting and semi-transmitting plate is located and a plane where the mask is located form an angle of 45 degrees, the first light-emitting device is located on a light-reflecting side of the semi-reflecting and semi-transmitting plate, and a light path of the first light-emitting device and the light-reflecting side of the semi-reflecting and semi-transmitting plate form an angle of 45 degrees;

the first camera module is positioned on the light transmitting side of the semi-reflective and semi-transparent plate, and the optical axis of the first camera module penetrates through the semi-reflective and semi-transparent plate and is perpendicular to the plane where the mask is positioned.

In the mask repair equipment, the mask repair equipment further comprises a second image acquisition mechanism, the second image acquisition mechanism is used for acquiring the image of the mask and determining the coordinate of the foreign matter according to the image of the mask, and the second image acquisition mechanism is respectively electrically connected with the transfer mechanism and the first image acquisition mechanism.

In the mask repair equipment, the first image acquisition mechanism is further used for acquiring the image of the mask and determining the coordinate of the foreign matter according to the image of the mask.

In the mask plate repairing equipment, the mask plate repairing equipment further comprises a laser mechanism, the laser mechanism is used for removing foreign matters on the mask plate, and the laser mechanism is arranged on the transfer mechanism in a sliding mode;

the laser mechanism comprises a laser transmitter, a filter and a frequency tripling device, wherein the filter is arranged between the laser transmitter and the frequency tripling device.

The mask repairing equipment is characterized in that the guide head of the grinding mechanism is arranged in a swingable mode so as to adjust the grinding angle of the grinding belt, and therefore the grinding effect of the grinding mechanism is improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required in the embodiments are briefly described below. The drawings in the following description are only some embodiments of the present application, and it will be obvious to those skilled in the art that other drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a schematic structural diagram of a reticle repair apparatus according to an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a grinding mechanism and an external mask of the mask repair equipment according to the embodiment of the present application;

FIG. 3 is a schematic view of a connection structure of a first driving assembly and a roller of a reticle repair apparatus according to an embodiment of the present application;

FIG. 4 is a schematic view of a connection structure of a second driving assembly and a connection shaft of the reticle repairing apparatus according to the embodiment of the present application;

FIG. 5 is a schematic structural view of a grinding mechanism and a transfer mechanism of the reticle repair apparatus according to an embodiment of the present application;

FIG. 6 is a schematic structural diagram of a first image capture mechanism and an external reticle of a reticle repair apparatus according to an embodiment of the present application;

fig. 7 is a schematic structural diagram of a laser mechanism of the mask repair apparatus according to the embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.

Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a reticle repair apparatus according to an embodiment of the present application; fig. 2 is a schematic structural diagram of a grinding mechanism and an external reticle of the reticle repair apparatus according to the embodiment of the present application.

The reticle repairing apparatus 100 of the present embodiment includes a first image capturing mechanism 10, a second image capturing mechanism 20, a laser mechanism 30, a grinding mechanism 40, a transfer mechanism 50, and a transfer mechanism 60.

The transmission mechanism 60 is used for transmitting the mask plate 200 from the feeding hole to the first image pickup position, the second image pickup position, the grinding position and the discharging hole in sequence. The transmission mechanism 60 may be a step-by-step guide transmission mechanism or a step-by-step transmission belt transmission mechanism, which are both prior art and will not be described herein.

The second image acquisition mechanism 20 is arranged at the first image pickup position and is used for acquiring an image of the mask plate 200 and determining the coordinate and the type of the foreign matter on the mask plate 200 according to the image of the mask plate 200. The foreign matter types include fibers, metals, and plastics.

The first image acquisition mechanism 10 is arranged at the second image pickup position and is used for acquiring an image of the foreign matters on the mask plate 200 and determining the height of the foreign matters according to the image. The first image capturing mechanism 10 is electrically connected to the second image capturing mechanism.

The laser mechanism 30 is arranged at the grinding position and used for carrying out laser removal treatment on plastic and large-particle foreign matters according to the coordinates and types of the foreign matters.

The grinding mechanism 40 is arranged at the grinding position and is used for grinding the fiber and metal foreign matters according to the coordinate, type and height information of the foreign matters.

The transfer mechanism 50 is arranged at the grinding position and used for driving the laser mechanism 30 and the grinding mechanism 40 to move. The transfer mechanism 50 is electrically connected to the first image capturing mechanism 10 and the second image capturing mechanism 20, respectively.

The number of the grinding mechanisms 40 is at least one. The present embodiment is described by taking one polishing mechanism 40 as an example, but is not limited thereto. For example, if the number of the grinding mechanisms 40 is two, one grinding mechanism 40 is used as a spare. When the other grinding mechanism 40 reaches the use time, the spare grinding mechanism 40 can be directly used, and the grinding efficiency is greatly improved.

Additionally, in some embodiments, the grinding stations may include a first grinding station at which the laser mechanism 30 is disposed and a second grinding station at which the grinding mechanism 40 is disposed. At this time, the moving mechanism 50 drives the polishing mechanism 40 to move. The other moving mechanism drives the laser mechanism 30 to move.

In some embodiments, the first image capturing mechanism 10 may include the functionality of the second image capturing mechanism 20, that is, the first image capturing mechanism 10 is configured to capture an image of the reticle 200, determine coordinates and a type of a foreign object on the reticle 200 from the image of the reticle 200, and determine a height of the foreign object from the image. This arrangement saves the second image taking mechanism 20, simplifies the apparatus, and improves the work efficiency.

Specifically, the grinding mechanism 40 is used for grinding foreign matter on the reticle 200. In fact, the grinding mechanism 40 can grind all the foreign matters. Therefore, the type of the foreign matter ground by the grinding mechanism 40 can be selected according to actual conditions.

Referring to fig. 2, 3 and 4, the polishing mechanism 40 includes a drive control module 41, a polishing tape 42 and a guide head 43.

The driving control module 41 includes a cavity 411, a first driving module 412 connected to the cavity 411, a second driving module 413, and a plurality of rollers 414. The first driving component 412 is connected to at least one of the rollers 414 and is used for driving the roller 414 to rotate. One side of the cavity 411 facing the mask 200 is recessed to form a groove 41 a. The roller 414 is located on the outer peripheral side of the recess 41 a.

The abrasive belt 42 is used to grind the foreign matter, and the abrasive belt 42 surrounds and overlaps the roller 414.

The guide head 43 is disposed within the recess 41a and extends out of the recess 41 a. The guide head 43 is located within the loop formed by the abrasive tape 42. The guide head 43 includes a first end 43a and a second end 43b opposite to each other, the first end 43a is disposed in the groove 41a, and the second end 43b is disposed outside the groove 41 a. The first end 43a is connected to the second drive assembly 413 and the second end 43b abuts the abrasive belt 42. The second driving assembly 413 is configured to drive the guide head 42 to swing to adjust the polishing angle of the polishing belt 42.

The reticle repairing apparatus 100 of the present embodiment provides the grinding effect of the grinding mechanism 40 by arranging the guide head 43 of the grinding mechanism 40 in a swingable manner so as to adjust the grinding angle of the grinding belt 42.

For example, when the foreign matter is located in the recess of the reticle 200, the angle of the guide head 43 can be swung to adjust the grinding angle of the grinding belt 42, so that the grinding belt 42 can grind the foreign matter.

Referring to fig. 3, the first driving assembly 412 includes a first servo motor 4121 and a fixing plate 4122, the fixing plate 4122 is fixedly disposed on the cavity 41, the first servo motor 4121 is fixedly disposed on the fixing plate 4122, and an output shaft of the first servo motor 4121 is fixedly connected to a roller 414 to drive the roller 414 to rotate.

The first end 43a is opened with a fixing hole 431, and a connecting shaft 432 is fixedly disposed in the fixing hole 431. The second driving assembly 413 is connected to the connecting shaft 432.

Referring to fig. 4, the second driving assembly 413 includes a second servo motor 4131 and a coupling 4132, and a rotating shaft of the second servo motor 4131 is fixedly connected to the connecting shaft 432 through the coupling 4132.

Optionally, in some embodiments, the first driving assembly 412 and the second driving assembly 413 may also include a servo motor and a gear box, for example, the second driving assembly 413, an output shaft of the servo motor is connected to an input end of the gear box, and an output end of the gear box is connected to the connecting shaft 432. Of course, the connection between the second driving assembly 413 and the connecting shaft 432 may be other existing manners, such as driving a transmission belt by a motor, driving the connecting shaft fixedly connected with a gear by the transmission belt, and so on, which are not described herein again.

In reticle repair apparatus 100 of the present embodiment, second end 43b of guide head 43 is in a semi-elliptical or semi-circular shape or other shape. When the second end 43b is semicircular, its diameter is less than or equal to 50 mm.

In reticle repair apparatus 100 of the present embodiment, the swing angle of guide head 43 is less than 120 °, but is not limited thereto, and may be, for example, 160 °. Optionally, the swing angle of the guide head 43 is at most 90 degrees. That is, the guide head 43 can swing at a maximum of 45 degrees to the left and right.

In the reticle repair apparatus 100 of the present embodiment, referring to fig. 5, the transfer mechanism 50 includes a first shift module 51, a second shift module 52, and a third shift module 53, and the first shift module 51 is configured to drive the polishing mechanism 40 to move along a first direction. The second displacement module 52 is used for driving the grinding mechanism 40 to move along a second direction. The third displacement module 53 is used for driving the grinding mechanism 40 to move along a third direction.

The second moving module 52 is slidably disposed on the first shifting module 51, and the third moving module 53 is slidably disposed on the second moving module 52. The first direction, the second direction and the third direction are perpendicular to each other.

In this embodiment, the first direction is a left-right direction, the second direction is a front-back direction, and the third direction is an up-down direction. Of course, in some embodiments, the first direction may also be a front-back or up-down direction, and the second direction may also be a left-right or up-down direction, as long as the three directions are perpendicular to each other.

The grinding mechanism 40 is slidably disposed on the third moving module 53.

The transfer mechanism 50 is a three-axis guide rail module or a four-axis guide rail module, which is known in the art and will not be described herein.

In reticle repair apparatus 100 of the present embodiment, the grinding mechanism 40 further includes a pressure sensor 44 for sensing a pressure at a contact of the guide head 43 and the grinding belt 42. The pressure sensor 44 is disposed on the cavity 41, a fixing groove 433 is opened on the second end 43b, and a sensing end of the pressure sensor 44 is disposed in the fixing groove 433. The pressure sensor 44 is electrically connected to the servo motor of the third moving module 53.

When the grinding mechanism 40 pushes down the foreign matter, the angle of adjustment of the guide head 43 is abutted against the grinding belt 42 to push down and contact with the foreign matter, in the process of pushing down, the foreign matter can generate an upward action, the acting force forces the abutting point of the guide head 43 to deform, and further the sensing end of the pressure sensor 44 is pressed, the sensing end acquires a real-time pressure value and feeds the real-time pressure value back to the control end of the pressure sensor 44, the control end compares the real-time pressure value with a set pressure value, when the real-time pressure value is equal to or greater than the set pressure value, the control end sends a signal to the servo motor of the first transfer module 53, and the servo motor stops working, so that the grinding mechanism 40 stops descending, the excessive pushing down of the grinding belt 42 is avoided.

In the reticle repairing apparatus 100 of the present embodiment, referring to fig. 6, the first image capturing mechanism 10 includes a first camera module 11, a first image processing module (not shown), a first light emitting assembly 12, and a second light emitting assembly 13.

The first camera module 11 is used for acquiring an image of the foreign matter.

The first image processing module is electrically connected with the first camera module 11, and the first image processing module is used for obtaining the height of the foreign matter according to the intensity of reflected light of an image under each gray scale of the foreign matter.

The first light emitting assembly 12 is used for vertically projecting light to the front surface of the reticle 200.

The second light emitting assembly 13 is used for projecting light to the back surface of the mask 200.

Wherein, the first image capturing mechanism 10 is electrically connected to the third moving module 53. When the first image capturing mechanism 10 drives the grinding mechanism 40 to precisely descend by a corresponding distance according to the height data of the foreign object, so as to precisely grind the foreign object.

Specifically, the first light emitting assembly 12 includes a first light emitting device 121 and a half-reflecting and half-transmitting plate 122, and a plane where the half-reflecting and half-transmitting plate 122 is located and a plane where the reticle 200 is located form an angle of 45 degrees. The first light emitting device 121 is located on a light reflecting side of the transflective plate 122, and a light path of the first light emitting device 121 forms an angle of 45 degrees with a light reflecting surface of the transflective plate 122.

The first camera module 11 is located on a light-transmitting side of the transflective plate 122, and an optical axis of the first camera module 11 passes through the transflective plate 122 and is perpendicular to a plane where the mask 200 is located.

In the first image capturing mechanism 10, the first light emitting device 121 in the first light emitting assembly 12 emits light to radiate onto the reflective surface of the semi-reflective and semi-transparent plate 122, the light is reflected and vertically transmitted on the foreign matter on the mask 200, and at this time, the foreign matter is reflected under the radiation of the vertical light; and the second light-emitting assembly 13 transmits light from the back of the mask 200, a part of the light is radiated on the back of the mask 200, and a part of the light passes through the opening of the mask 200 to provide a light source for the first camera module 11. Meanwhile, the first camera module 11 adopts a conjugate focus microscope system to shoot images of foreign matters at different gray scales; the first image processing module calculates the height data of the foreign object according to the light reflection intensity of the foreign object image at each gray level, converts the height data into a descending distance, and controls the third moving module 53 to descend by a corresponding height.

The second light emitting assembly 13 includes a second light emitting device 131 and a diffusion plate 132, the diffusion plate 132 is disposed on the light emitting surface of the second light emitting device 131, and the diffusion plate 132 is configured to radiate the light of the second light emitting device 131 to the back of the mask 200 after performing scattering processing.

In some embodiments, the second light emitting assembly 13 further includes a half-reflecting and half-transmitting plate disposed at 45 degrees to reflect the light transmitted through the diffusion plate 132 to the back surface of the mask 200.

In the reticle repairing apparatus 100 of the present embodiment, the second image capturing mechanism 20 includes a second camera module, a third camera module, and a third light emitting assembly, the second camera module is configured to photograph the front surface of the reticle 200, the third camera module is configured to photograph the back surface of the reticle 200, light of the third light emitting assembly is configured to irradiate the reticle 200, and a structure between the second camera module and the third light emitting assembly is the same as a structure between the first camera module 11 and the first light emitting assembly 12.

The third camera module is arranged on one side of the second light emitting device 131, and an optical axis of the third camera module passes through an opening of the diffusion plate and is perpendicular to a plane where the mask 200 is located. That is, the third camera module shares the second light emitting assembly 13, and is used for acquiring the coordinate information of the foreign object on the back surface of the mask 200.

In the reticle repairing apparatus 100 of the present embodiment, referring to fig. 7, the laser mechanism 30 is slidably disposed on the transfer mechanism 50.

The laser mechanism 30 comprises a laser emitter 31, a filter 32 and a frequency tripling device 33, wherein the filter 32 is arranged between the laser emitter 31 and the frequency tripling device 33.

The work flow of the reticle repair apparatus 100 of the present embodiment is:

first, the transfer mechanism 60 transfers the mask 200 to a first imaging position, and the second image capturing mechanism 20 captures the mask 200 to obtain coordinate information and category information of foreign objects on the mask 200, and divides the foreign objects into first and second types of foreign objects.

Then, the transmission mechanism 60 transmits the mask plate 200 from the first image pickup position to the second image pickup position, the first image 10 picks up the image of the foreign object and determines the height information of the foreign object according to the image, and the coordinate information of the second image acquisition mechanism 20 is matched with the height information of each foreign object in a one-to-one correspondence manner.

Meanwhile, the third camera module of the second image capturing mechanism 20 captures an image of the back surface of the reticle 200 to confirm whether foreign objects are present on the back surface of the reticle 200.

Then, the transfer mechanism 60 transfers the mask 200 from the second imaging position to the grinding position, the transfer mechanism 50 moves the laser mechanism 30 according to the first type of foreign matter determined by the second image acquisition mechanism 20 and the coordinate information of the foreign matter, and the laser mechanism 30 performs laser cleaning on each first type of foreign matter.

After the first type of foreign matter is cleaned, the moving mechanism 50 moves the grinding mechanism 40 to grind and clean the second type of foreign matter according to the height information of the second type of foreign matter of the first image acquiring mechanism 10, the second type of foreign matter determined by the second image acquiring mechanism 20 and the coordinate information of the foreign matter. For cleaning the first type of foreign matter, the transfer mechanism 60 only needs to perform transfer operations in the front-back direction and the left-right direction; for cleaning the second type of foreign matter, the transfer mechanism 60 needs to perform the transfer operation in the front-rear direction, the left-right direction, and the up-down direction.

Laser mechanism 30 clears up simple foreign matter, and grinds mechanism 40 clearance stubborn foreign matter, and the two cooperation can improve the clearance efficiency to the foreign matter, as to the division of first type foreign matter and second type foreign matter, can be according to actual conditions and decide.

Finally, whether the cleaning of the foreign matter on the back side is needed or not is determined according to the image on the back side of the mask plate 200. If foreign matters exist or remain on the back surface, the foreign matters on the back surface are cleaned. When the back foreign matter is cleaned, the third camera of the second image capturing mechanism 20 captures the image of the front surface of the mask 200 again to detect whether the foreign matter on the front surface of the mask 200 remains, and if so, the foreign matter needs to be cleaned again.

This completes the operation of the reticle repair apparatus 100 according to the embodiment of the present application.

The mask repairing equipment is characterized in that the guide head of the grinding mechanism is arranged in a swingable mode so as to adjust the grinding angle of the grinding belt, and therefore the grinding effect of the grinding mechanism is improved.

The mask repair equipment provided by the embodiment of the application is described in detail, a specific example is applied in the description to explain the principle and the implementation of the application, and the description of the embodiment is only used for helping to understand the technical scheme and the core idea of the application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.