阅读说明：本技术 混合滤波器 (Hybrid filter ) 是由 M·希克 R·罗塞齐恩 于 2018-12-19 设计创作，主要内容包括：本发明使用同一衬底在单个设备上组合两种滤波技术。在该衬底上布置滤波器电路,该滤波器电路具有串联阻抗元件和并联阻抗元件的阶梯型布置或点阵型布置,以提供具有例如带通功能的混合滤波器。阻抗元件选自BAW谐振器和LC元件。(The present invention combines two filtering techniques on a single device using the same substrate.A filter circuit is disposed on the substrate, the filter circuit having a ladder-type arrangement or a lattice-type arrangement of series impedance elements and parallel impedance elements to provide a hybrid filter having, for example, a bandpass function.)

1. A hybrid filter comprising

-a Substrate (SU);

-a filter circuit having a ladder-type arrangement or a lattice arrangement of series impedance elements and parallel impedance elements selected from BAW Resonator (BR) and L C elements, the filter circuit being arranged on the substrate,

wherein

-the L C element comprises a metal-insulator-metal capacitor (MIM) and a coil (IND),

-the L C element is formed by a multi-level metallization (M L M),

-each metallization level (M L) of the L C element is embedded in a Dielectric (DE),

the L C elements formed at the same metallization level are electrically connected by conductor lines,

l C elements formed at different metallization levels are interconnected by vias (ICNs).

2. The hybrid filter according to the preceding claim,

wherein the Substrate (SU) is a glass substrate.

3. The hybrid filter according to the preceding claim,

wherein the L C elements (MIM, IND) are embodied as passive on glass elements.

4. The hybrid filter according to the preceding claim,

-wherein the L C element is formed on the glass Substrate (SU),

-wherein a planar dielectric layer is arranged above the L C element,

-wherein the BAW Resonator (BR) is formed directly on the planar dielectric layer.

5. Hybrid filter according to one of claims 1 to 3,

wherein the BAW Resonator (BR) is formed on the surface of the Substrate (SU),

wherein each BAW resonator comprises at least a top acoustic mirror,

wherein the L C element is formed as a passive element on the top acoustic mirror.

6. Hybrid filter according to one of claims 1 to 3,

wherein the L C element and the BAW Resonator (BR) are formed on opposite surfaces of the Substrate (SU).

7. Hybrid filter according to one of claims 1 to 3,

wherein the L C element and the BAW Resonator (BR) are formed adjacent to each other on the same surface of the Substrate (SU).

8. The hybrid filter according to claim 4, wherein,

wherein the planar dielectric layer comprises a polished silicon oxide layer.

9. Hybrid filter according to one of the preceding claims,

wherein all external Contact Pads (CP) of the filter circuit are arranged on the top surface of the BAW Resonator (BR).

10. Hybrid filter according to one of the preceding claims,

wherein the filterThe circuit comprising a series Impedance Element (IE) as said ladder-type arrangement or lattice-type arrangement_S) And a parallel reactive element (IE) as said ladder-type arrangement or as a dot-matrix-type arrangement_P) The coil (IND) of (a),

wherein the BAW Resonator (BR) and the L C element (MIM, IND) are interconnected by vias.

Background

The acoustic filter generally has a ladder type structure or a lattice type structure. In the ladder type structure, the series resonators and the parallel resonators are combined to generate a desired filter function, for example, a band pass function. In the lattice type structure, two series signal lines having series resonators are interconnected with parallel branches in which the parallel resonators are arranged, respectively. The achievable bandwidth of such a filter structure can be estimated to be about twice the pole-zero distance (PZD) of the resonator used. The standard topology of such filter structures uses SAW resonators or BAW resonators, both of which have a PZD equivalent. BAW resonators are preferred at frequencies above 2GHz and in all cases where high power signals are to be handled, since their power resistance is higher when compared to SAW resonators.

For the recent emergence of high frequency, high bandwidth applications, achievable performance beyond these standard architectures is required. Therefore, a non-standard topology is required.

L C elements can also be used to form the filter structure although the bandwidth of the L C filter is higher, the skirt of the achievable pass band is not as steep as the acoustic resonators in SAW or BAW technology due to the lower Q factor.

To further improve the performance of the critical skirt of the filter passband, acoustic resonators are used in conjunction with the L C element to enhance the steepness of the skirt to maintain a high bandwidth.

A recent approach to improve the quality of L C elements is described in published patent application US 2017/0077079 a1, in which a glass substrate is used to build high Q L C elements in a multilayer metallization embedded in a dielectric, vias are used to interconnect different metallization levels and improve the integration factor, hereinafter these L C elements are referred to as POG elements (passive on glass elements) and the related manufacturing process as POG process.

BAW filters, on the other hand, are typically formed on a semiconductor wafer for possible integration of semiconductor devices therein.

Thus, forming a hybrid filter by combining a BAW structure and an L C structure results in the disadvantage of two different and therefore separate substrates for implementing the combination.

Disclosure of Invention

It is an object of the present invention to provide a filter that overcomes the above mentioned problems.

This and other objects are achieved by a hybrid filter according to claim 1. Other embodiments of the invention are the subject of other claims.

The general idea of the invention is to combine these two technologies on a single device using the same substrate on which filter circuits with ladder-type or lattice-type arrangements of series and parallel impedance elements are arranged, the impedance elements being selected from BAW resonators and L C elements, L C elements comprising at least metal-insulator-metal capacitors (MIM capacitors) and coils, L C elements are formed by multi-level metallization, each level of said multi-level metallization comprising at least one L C element embedded in a dielectric, L C elements formed at the same metallization level being electrically connected by conductor lines, which may be formed in parallel with L C elements in an integration process, L C elements formed at different metallization levels being interconnected by vias, which conductor lines and vias may also be used to connect the BAW elements L C elements to the same wafer, depending on whether they are arranged in the same plane or in different planes of the device.

This new approach results in a reduced required overhead, i.e. reduced connection effort, reduced number of pads and smaller conductor lines, and thus reduced resistance and thus reduced electrical losses. Furthermore, the area consumption is reduced compared to a solution using two different wafers as substrates.

The preferred substrate on which the L C element is implemented is a glass wafer those wafers are not conductive and may be provided with a flat and planar surface glass substrates are also very beneficial for building BAW resonators on.

However, the POG process can also be performed on another such substrate commonly used for BAW equipment if any BAW process requires a silicon wafer compatible with standard semiconductor processes. In either method, only one substrate is required, and the necessary area of the entire device is reduced to the area of the larger of the two structures formed in different technologies.

In a preferred embodiment, the L C element is implemented as a passive on glass element (POG) as described in the already mentioned U.S. patent application, thus, the L C element is formed on a glass substrate in two or more metallization levels embedded in a dielectric.

The BAW resonator may be formed in either of two currently used designs.

SMR devices require bragg mirrors to maintain acoustic energy within the BAW device. Such an acoustic bragg mirror is formed as a set of at least two alternating layers, typically a metal and a dielectric, having a relatively high acoustic impedance and a relatively low acoustic impedance.

In an alternative embodiment, BAW resonators are formed on a surface of a substrate, on top of the BAW resonators interconnected in a ladder or lattice type structure, at least a top acoustic Bragg mirror is formed, the mirror providing an interface for L C elements formed on the mirror.

In another embodiment, the L C element and the BAW resonator are formed on opposite surfaces of the same substrate in this variant of the filter circuit, the L C element may be electrically connected with the BAW resonator through a via led through the substrate one of the two top surfaces may be used to form an external contact pad thereon.

According to another embodiment, all passive L C elements are formed on the same surface of the substrate adjacent to the BAW resonator.

In those embodiments where a stacked arrangement of passive L C elements and BAW resonators is required, the interface between the two types of elements is sensitive to the quality and other characteristics of the device.

In one embodiment, all external contact pads of the filter circuit are arranged on the top surface of the BAW resonator, i.e. the surface of the layer comprising the BAW resonator.

The L C elements include metal-insulator-metal capacitors as series impedance elements and coils of parallel impedance elements as a ladder-type arrangement or a lattice-type arrangement.

One preferred method is a thin film package that provides an air gap over the BAW resonator by depositing and structuring a sacrificial layer, covering the sacrificial layer by a rigid cap layer, and removing the sacrificial layer through an opening in the cap layer to leave a cavity that provides an air gap between the cap layer and the top surface of the BAW resonator (i.e., the top electrode of the resonator).

Drawings

Hereinafter, the present invention is explained in more detail by referring to specific embodiments and the accompanying drawings. The figures are merely schematic and not drawn to scale. Accordingly, some details may be exaggerated for better understanding.

Fig. 1 shows a block diagram of a ladder-type arrangement of resonators;

fig. 2 shows a block diagram of a filter circuit comprising an L C-element and an acoustic resonator;

figure 3 shows a block diagram of a filter circuit, for example an acoustic resonator in a lattice type structure;

fig. 4 shows a schematic cross section through a hybrid filter according to a first embodiment of the invention;

fig. 5 shows a schematic cross-section of a second embodiment;

fig. 6 shows a schematic cross section through a hybrid filter according to a third embodiment;

fig. 7 shows a more detailed cross-section through a hybrid filter according to the first embodiment; and

fig. 8 shows a schematic cross section through a fourth embodiment, where resonator segments and L C elements are arranged on opposite surfaces of a substrate.

Detailed Description

Fig. 1 is a schematic block diagram of a ladder-type arrangement of resonators, which may be embodied in any technology, for example, as acoustic resonators, such as BAW resonators or SAW resonators, the ladder-type structure may also include L C resonators, i.e., a series connection of a capacitor and a coil.

The ladder-shaped structure comprises a plurality of basic sections BS_LTAnd each elementary section also comprises at least one series resonator BR_SAnd a parallel resonator BR_P. Such a basic segment BS_LTCan be connected in series in the number necessary to achieve the desired filter function and selectivity. With such a stepped arrangement of resonators a range of different filter functions can be achieved. Examples are band pass filters, high pass filters and low pass filters and combination filters such as extractors, duplexers or multiplexers. Series resonators BR belonging to adjacent elementary sections_SCan be combined into a common series resonator BR_SAnd if resonators BR are connected in parallel_PDirectly adjacent and belonging to different elementary sections BS_LTThen these parallel resonators BR can also be combined_P。

Fig. 2 is a schematic block diagram of a filter comprising L C-elements and acoustic resonators, depicting only a partial section of a possible filter structure comprising a series impedance element IE formed as a series capacitor and a parallel coil_SAnd a parallel impedance element IE_PThe L C-elements or impedance elements IE are connected in series with one or more basic sections of the acoustic ladder_SAnd a parallel BAW resonator BR_PSuch a filter circuit need not be separated in sections comprising only L C elements and sections comprising only acoustic resonators, but may also comprise alternating sections of L C elements and acoustic resonators.

Fig. 3 shows a schematic block diagram of a lattice type structure that may be embodied by an acoustic resonator BR. The lattice type arrangement includes a series resonator BR arranged therein_STwo serial signal lines. The parallel branches interconnect the two signal lines in a crossing arrangement. Parallel resonator BR_PRespectively arranged in each parallel branch. Thus, basic segments BS of a lattice type arrangement_LCComprising two series resonators BR_SAnd two parallel branches comprising respective parallel resonators BR_P. The lattice-type structure may comprise a plurality of such elementary sections BS_LCTo implement the desired filter function.

BAW resonators for filter circuits as shown in any of fig. 1 to 3 may be cascaded to increase their power resistance. Cascading means a series connection of two or more resonators that behave like a single resonator. When cascading BAW resonators, this requires tuning the harmonicsArea of the oscillator to maintain static capacitance C_SIs constant. The double cascade resonator comprises two resonators connected in series, wherein each series resonator has twice the area of a normal non-cascade resonator.

Fig. 4 shows in more detail but still schematically how a first embodiment of a combining filter according to the block diagram of fig. 2 is implemented in a common arrangement. The resulting hybrid filter is depicted with only few elements to show the main structure of a stacked arrangement comprising elements of different kinds.

A first L C element is formed on the substrate SU, which is preferably a flat glass substrate, and embedded in a first dielectric DE1 in this figure the L C element is embodied as a metal-insulator-metal capacitor MIM, which is either a first metal structure covered by a dielectric layer D L or a metal structure as a second capacitor electrode.

A second metallization level M L2 is formed and structured over the first dielectric DE1 and embedded in the second dielectric DE2 one element structured in the second metallization level may be the top electrode of the capacitor MIM further, the coil IND is structured by the second metallization level M L2 thus, in order to form the planar coil IND, a single masking step is used to construct the second metallization level.

The metal structure may be made of a L or AlCu alloy the dielectric layer D L may be an oxide such as silicon oxide.

A second metallization level M L2 is formed and structured over the first dielectric DE1 and embedded in the second dielectric DE2 one element structured in the second metallization level may be the top electrode of the capacitor MIM further, the coil IND is structured by the second metallization level M L2, thus, in order to form the planar coil IND, a single masking step is used to structure the second metallization level M L2.

The metallization level M L may be constructed by first forming and constructing a resist mask and then depositing metal in the areas exposed by the resist mask the deposition of metal may be accomplished by plating metal onto a seed layer applied to the entire surface of the substrate SU of the first metallization level or to the first dielectric DE1 or higher dielectric stack level after the electroplating step the resist mask is removed, thereby exposing areas of the remaining seed layer which are then also removed.

A three-dimensional coil IND (not shown) needs to be formed in two adjacent metallization levels, one of which may be the first metallization level M L1.

To interconnect the two metallization levels M L1, M L2, the respective metallization in the lower metallization level M L1 is exposed by forming an opening in the top surface of the first dielectric DE1 the structure of the second metallization level M L2 applied thereon may now contact the respective structure in the first metallization level M L1 all structures that do not have to have an electrical interlevel connection are isolated from each other by the first dielectric DE 1.

Over the at least two-stage arrangement of L C elements, the acoustic section AS with the BAW resonator BR is arranged in a ladder type structure or a lattice type structure to form a hybrid filter the BAW resonator BR can be formed AS an SMR resonator or an FBAR on a membrane in any known technique.

The figure does not show the exact filter circuit but only indicates the presence of a corresponding number of BAW resonators BR. Further, the various filter functions mentioned above in connection with fig. 1 may be realized by such a hybrid filter.

In fig. 4, the interconnections between the different stacked layers are not shown. The desired interconnects may be formed as vias. Further, a dielectric layer may be arranged at the interface between the acoustic section AS and the uppermost dielectric layer DE 2. The hybrid filter may comprise more than the two dielectric layers DE depicted.

Fig. 5 shows a completely different arrangement of the L C element and the acoustic resonator formed as a BAW resonator BR, both types of elements being here arranged directly on the same surface of a common substrate SU, which means that starting from the L C arrangement on a glass substrate, for example, according to the known POG structure, the acoustic resonator BR is arranged on the remaining free surface of the substrate SU, the passive impedance element segment PES is therefore directly adjacent to the acoustic resonator segment BRs, the passive impedance element portion PES may also comprise two or more metallization levels M L here.

The hybrid filter starts from a substrate SU onto which an arrangement of BAW resonators BR is formed, the resonators may be encapsulated in a thin film encapsulation or provided with a top acoustic mirror deposited onto the top electrode of the BAW resonators, both alternatives are to protect the acoustic resonator segments from mass loads caused by other layers deposited onto the acoustic resonator segments.

Fig. 7 shows a schematic cross section through a hybrid filter, in which passive elements and acoustic resonators are depicted in more detail, this structure is identical to the first embodiment shown in fig. 4 and starts with a known POG arrangement on a glass substrate SU, a multi-level metallization level M L M may comprise more than two depicted levels M L1 and M L, the POG elements constituting part of a filter circuit providing the hybrid feature, a first metallization level M L1 is embedded in a first dielectric DE1, a first metallization level M L1 comprises at least one bottom electrode of a MIM capacitor, the bottom electrode of which is covered by a dielectric layer D L, which is usually different from the embedded dielectric DE1, further, the first metallization level M L1 may comprise portions of a coil IND and in-plane conductor lines for completing the circuit connections of L C elements.

The second metallization level M L2 is provided on top of the first dielectric DE1 to include at least the top electrode of the capacitor MIM and at least parts of the coil IND the second dielectric DE2 covers all structures of the second metallization level M L2, embedding it the interconnection between the two metallization levels M L1 and M L2 may be provided by exposing the metal structures of the first metallization level M L1 by removing parts of the first dielectric DE1 in the area where the interconnection is desired, the first two structures from the left side of the second metallization level M L2 are depicted in the figure as being in contact with the corresponding structures of the first metallization level M L1.

A planarized dielectric layer is disposed on the top surface of the second dielectric DE1 or on the top surface of the uppermost dielectric (only two dielectric layers DE are shown). This layer may be formed as a silicon dioxide layer.

The acoustic section AS comprises an acoustic bragg mirror AM and a BAW resonator BR of SMR type. Such bragg mirrors are composed of layers with alternating high or low acoustic impedance. The high impedance layer of the acoustic mirror AM may comprise a metal and therefore needs to be structured to avoid coupling of adjacent capacitors. The low impedance mirror layer is typically formed of a dielectric such as an oxide.

The bottom electrode BE., which is formed on top of the acoustic mirror AM and configures the BAW resonator, the piezoelectric layer P L is applied to the bottom electrode BE, which can remain continuous and need not BE configured the configuration of the bottom electrode BE and the top electrode TE, which is formed on top of the piezoelectric layer P L and configures the top electrode TE., results in an integrated interconnection or circuit connection of the BAW resonator BR, which is indicated by the corresponding equivalent symbols in the figure.

On the right side of the figure, the electrical interconnect ICN is schematically depicted by a metal structure passing through at least the acoustic mirror AM and through at least one layer of the dielectric DE. On top of the interconnect ICN, contact pads CP for external electrical connection of the hybrid filter are formed. The hybrid filter can be connected to, for example, external circuitry, such as, for example, a printed circuit board, by means of bumps BU.

Fig. 8 shows a schematic cross-section of a fourth embodiment of the invention the arrangement of manufacturing this embodiment may start with a BAW wafer comprising filter circuits of acoustic resonators BR which may be formed on an isolation substrate SU, preferably on a glass substrate according to the previous examples and embodiments, a multi-level metallization comprising interconnects L C elements embodied as POG elements may be formed on the opposite surface of the substrate.

The external contacts of the hybrid filter may be formed by contact pads on top of the POG sections or alternatively on top of the acoustic resonator sections comprising the BAW resonators BR the L C elements and the BAW resonators BR are interconnected by vias through the substrate (not shown in the figure).

The invention has been described only by way of a limited number of examples and is therefore not limited to these examples. The invention is defined by the scope of the claims and may deviate from the embodiments presented.

Further, the hybrid filter may include any circuit of L C elements and BAW resonators that provide the desired filter function.

List of terms and reference numerals used

Filter circuit filter circuit

conductor line conductor

Top acoustic mirror of top acoustic mirror

AM (bottom) acoustic mirror

ARS acoustic resonator segment

AS Acoustic segment

BE bottom electrode

BR BAW resonator

BS_LCBasic section of lattice type arrangement

BS_LTBasic section of ladder type arrangement

BU bump

CP external contact pad

DE dielectric

D L dielectric layer, e.g. silicon oxide layer

ICN interconnect/via

IE_PParallel impedance element

IE_SSeries impedance element

IE_S，IE_PL C element

IND coil

MIM capacitor

M L metallization level

M L M multilevel metallization

PES passive impedance element segment

P L piezoelectric layer

SU substrate

TE top electrode