MEMS sensor detection device and MEMS sensor system
阅读说明:本技术 Mems传感器检测装置以及mems传感器系统 (MEMS sensor detection device and MEMS sensor system ) 是由 李宗伟 韩可都 刘婧 冯方方 杨长春 于 2019-11-06 设计创作,主要内容包括:本发明公开了一种MEMS传感器检测装置以及MEMS传感器系统,所述MEMS传感器检测装置包括:读出电路,用于对MEMS传感器的输出信号进行模拟信号处理,以产生检测电压;抵消电压产生电路,用于根据所述检测电压产生重力抵消电压,所述重力抵消电压和重力加速度成正比例关系;选择电路,用于在反馈阶段选择所述检测电压输出,在重力抵消阶段选择所述重力抵消电压输出,其中,在一个检测周期内所述反馈阶段位于所述重力抵消阶段之后;反馈电路,用于根据所述选择电路的输出电压产生反馈电压,所述反馈电压和所述选择电路的输出电压成正比例关系。本发明公开的MEMS传感器检测装置以及MEMS传感器系统,能够抵消重力加速度的影响,提高MEMS传感器系统的灵敏度。(The invention discloses a MEMS sensor detection device and a MEMS sensor system, wherein the MEMS sensor detection device comprises: the reading circuit is used for carrying out analog signal processing on an output signal of the MEMS sensor to generate a detection voltage; the offset voltage generating circuit is used for generating a gravity offset voltage according to the detection voltage, and the gravity offset voltage and the gravity acceleration are in a direct proportional relation; a selection circuit for selecting the detection voltage output in a feedback phase and the gravity cancellation voltage output in a gravity cancellation phase, wherein the feedback phase is located after the gravity cancellation phase within a detection period; and the feedback circuit is used for generating a feedback voltage according to the output voltage of the selection circuit, and the feedback voltage and the output voltage of the selection circuit are in a direct proportion relation. The MEMS sensor detection device and the MEMS sensor system disclosed by the invention can offset the influence of gravity acceleration and improve the sensitivity of the MEMS sensor system.)
1. A MEMS sensor detection device, comprising:
the reading circuit is used for carrying out analog signal processing on an output signal of the MEMS sensor to generate a detection voltage;
the offset voltage generating circuit is used for generating a gravity offset voltage according to the detection voltage, and the gravity offset voltage and the gravity acceleration are in a direct proportional relation;
a selection circuit for selecting the detection voltage output in a feedback phase and the gravity cancellation voltage output in a gravity cancellation phase, wherein the feedback phase is located after the gravity cancellation phase in a detection period;
and the feedback circuit is used for generating a feedback voltage according to the output voltage of the selection circuit, and the feedback voltage and the output voltage of the selection circuit are in a direct proportion relation.
2. The MEMS sensor sensing apparatus of claim 1, wherein the cancellation voltage generating circuit comprises:
and the first low-pass filter is used for carrying out low-pass filtering processing on the detection voltage so as to generate the gravity counteracting voltage.
3. The MEMS sensor sensing apparatus of claim 1, wherein the cancellation voltage generating circuit comprises:
the second low-pass filter is used for carrying out low-pass filtering processing on the detection voltage to generate a filtering voltage;
the pulse generator is used for generating a positive pulse when the filtering voltage exceeds a preset positive voltage and generating a negative pulse when the filtering voltage exceeds a preset negative voltage;
the counter is used for counting the pulses generated by the pulse generator within a preset time interval, counting and adding 1 when the positive pulses are received, and counting and subtracting 1 when the negative pulses are received;
a register for storing a count value of the counter;
and the first digital-to-analog converter is used for performing digital-to-analog conversion processing on the count value stored by the register so as to generate the gravity offset voltage.
4. The MEMS sensor sensing apparatus of claim 1, wherein the cancellation voltage generating circuit comprises:
the first analog-to-digital converter is used for performing analog-to-digital conversion on the detection voltage to generate a digital signal corresponding to the detection voltage;
the first processing circuit is used for generating a digital signal corresponding to the gravity offset voltage according to the digital signal corresponding to the detection voltage;
and the second digital-to-analog converter is used for performing digital-to-analog conversion processing on the digital signal corresponding to the gravity offset voltage so as to generate the gravity offset voltage.
5. The MEMS sensor detection device of claim 4, wherein the digital signal corresponding to the gravity cancellation voltage is an average value of the digital signal corresponding to the detection voltage within a preset time interval.
6. The MEMS sensor sensing apparatus of claim 1, wherein the selection circuit comprises a first switch and a second switch;
one end of the first switch is used for receiving the detection voltage, one end of the second switch is used for receiving the gravity offset voltage, and the other end of the first switch is connected with the other end of the second switch and serves as the output end of the selection circuit.
7. The MEMS sensor sensing apparatus of claim 1, further comprising:
a detection voltage output terminal for outputting the detection voltage;
and the offset voltage output end is used for outputting the gravity offset voltage.
8. The MEMS sensor sensing apparatus of claim 1, further comprising:
the second analog-to-digital converter is used for performing analog-to-digital conversion on the detection voltage to generate a digital signal corresponding to the detection voltage;
the third analog-to-digital converter is used for performing analog-to-digital conversion on the gravity counteracting voltage to generate a digital signal corresponding to the gravity counteracting voltage;
and the second processing circuit is used for carrying out digital signal processing on the digital signal corresponding to the detection voltage and the digital signal corresponding to the gravity offset voltage.
9. A MEMS sensor system comprising a MEMS sensor, further comprising a MEMS sensor detection device according to any of claims 1 to 8.
10. The MEMS sensor system of claim 9, wherein the MEMS sensor is a three-electrode MEMS sensor;
in a detection period, the ending time of the gravity counteracting stage is the starting time of the feedback stage, and the ending time of the feedback stage is the starting time of the reading stage.
11. The MEMS sensor system of claim 9, wherein the MEMS sensor is a five-electrode MEMS sensor;
in a detection period, the start time of the gravity counteracting stage is read out, the end time of the gravity counteracting stage is the start time of the feedback stage, and the end time of the feedback stage is the end time of the reading out stage.
12. The MEMS sensor system of claim 10 or 11, wherein the duration of the gravity cancellation phase is greater than the duration of the feedback phase.
Technical Field
The invention relates to the technical field of micro electro mechanical systems, in particular to a MEMS sensor detection device and an MEMS sensor system.
Background
Under the further development of artificial intelligence, automatic driving, inertial navigation and the internet of things, signal detection is particularly important, and sensor technologies closely related to signal detection are rapidly developed. Particularly, the development of the internet of things greatly increases the demand of sensor products, and the center of gravity gradually turns to the field of Micro-Electro-Mechanical Systems (MEMS) sensors with higher technical content. The micro-electro-mechanical system is a micro device or system which integrates a micro sensor, a micro actuator, a micro mechanical mechanism, a signal processing and control circuit, a high-performance electronic integrated device, an interface, communication and a power supply into a whole by utilizing the traditional semiconductor process and materials, and has the advantages of small volume, low cost, integration and the like.
Fig. 1 is a schematic circuit diagram of a conventional MEMS sensor system, which employs an analog closed-loop negative feedback architecture, and includes a
Sensitivity refers to the detection of the sensor system when it is operating stablyThe ratio of the directional output variation to the input variation. For the MEMS sensor system shown in fig. 1, assuming that the acceleration range detected by the
Disclosure of Invention
The invention aims to solve the problem of low sensitivity of the existing MEMS sensor system.
The invention is realized by the following technical scheme:
a MEMS sensor detection device, comprising:
the reading circuit is used for carrying out analog signal processing on an output signal of the MEMS sensor to generate a detection voltage;
the offset voltage generating circuit is used for generating a gravity offset voltage according to the detection voltage, and the gravity offset voltage and the gravity acceleration are in a direct proportional relation;
a selection circuit for selecting the detection voltage output in a feedback phase and the gravity cancellation voltage output in a gravity cancellation phase, wherein the feedback phase is located after the gravity cancellation phase in a detection period;
and the feedback circuit is used for generating a feedback voltage according to the output voltage of the selection circuit, and the feedback voltage and the output voltage of the selection circuit are in a direct proportion relation.
Optionally, the cancellation voltage generating circuit includes:
and the first low-pass filter is used for carrying out low-pass filtering processing on the detection voltage so as to generate the gravity counteracting voltage.
Optionally, the cancellation voltage generating circuit includes:
the second low-pass filter is used for carrying out low-pass filtering processing on the detection voltage to generate a filtering voltage;
the pulse generator is used for generating a positive pulse when the filtering voltage exceeds a preset positive voltage and generating a negative pulse when the filtering voltage exceeds a preset negative voltage;
the counter is used for counting the pulses generated by the pulse generator within a preset time interval, counting and adding 1 when the positive pulses are received, and counting and subtracting 1 when the negative pulses are received;
a register for storing a count value of the counter;
and the first digital-to-analog converter is used for performing digital-to-analog conversion processing on the count value stored by the register so as to generate the gravity offset voltage.
Optionally, the cancellation voltage generating circuit includes:
the first analog-to-digital converter is used for performing analog-to-digital conversion on the detection voltage to generate a digital signal corresponding to the detection voltage;
the first processing circuit is used for generating a digital signal corresponding to the gravity offset voltage according to the digital signal corresponding to the detection voltage;
and the second digital-to-analog converter is used for performing digital-to-analog conversion processing on the digital signal corresponding to the gravity offset voltage so as to generate the gravity offset voltage.
Optionally, the digital signal corresponding to the gravity offset voltage is an average value of the digital signals corresponding to the detection voltage within a preset time interval.
Optionally, the selection circuit includes a first switch and a second switch;
one end of the first switch is used for receiving the detection voltage, one end of the second switch is used for receiving the gravity offset voltage, and the other end of the first switch is connected with the other end of the second switch and serves as the output end of the selection circuit.
Optionally, the MEMS sensor detection apparatus further includes:
a detection voltage output terminal for outputting the detection voltage;
and the offset voltage output end is used for outputting the gravity offset voltage.
Optionally, the MEMS sensor detection apparatus further includes:
the second analog-to-digital converter is used for performing analog-to-digital conversion on the detection voltage to generate a digital signal corresponding to the detection voltage;
the third analog-to-digital converter is used for performing analog-to-digital conversion on the gravity counteracting voltage to generate a digital signal corresponding to the gravity counteracting voltage;
and the second processing circuit is used for carrying out digital signal processing on the digital signal corresponding to the detection voltage and the digital signal corresponding to the gravity offset voltage.
Based on the same inventive concept, the invention also provides a MEMS sensor system, which comprises the MEMS sensor and the MEMS sensor detection device.
Optionally, the MEMS sensor is a three-electrode MEMS sensor;
in a detection period, the ending time of the gravity counteracting stage is the starting time of the feedback stage, and the ending time of the feedback stage is the starting time of the reading stage.
Optionally, the MEMS sensor is a five-electrode MEMS sensor;
in a detection period, the start time of the gravity counteracting stage is read out, the end time of the gravity counteracting stage is the start time of the feedback stage, and the end time of the feedback stage is the end time of the reading out stage.
Optionally, the duration of the gravity counteracting stage is longer than the duration of the feedback stage.
Compared with the prior art, the invention has the following advantages and beneficial effects:
according to the MEMS sensor detection device and the MEMS sensor system, the time division multiplexing and gravity counteracting technology is adopted, the counteracting voltage generating circuit is arranged in the MEMS sensor detection device, and the gravity counteracting voltage which is in a direct proportion relation with the gravity acceleration is generated by the counteracting voltage generating circuit according to the detection voltage, so that the influence of the gravity acceleration is counteracted, and the MEMS sensor system can achieve high sensitivity.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
FIG. 1 is a schematic circuit diagram of a prior art MEMS sensor system;
FIG. 2 is a timing diagram of the operation of a prior art three-electrode MEMS sensor system;
FIG. 3 is a schematic diagram of a three-electrode MEMS sensor operating in +1g, 0g, and-1 g positions;
FIG. 4 is a schematic circuit diagram of a MEMS sensor system in accordance with an embodiment of the present invention;
FIG. 5 is a schematic circuit diagram of a cancellation voltage generating circuit according to an embodiment of the invention;
fig. 6 is a schematic circuit diagram of a cancellation voltage generating circuit according to another embodiment of the invention;
FIG. 7 is a schematic diagram of a pulse generator generating positive and negative pulses in accordance with an embodiment of the present invention;
FIG. 8 is a schematic circuit diagram of a cancellation voltage generating circuit according to yet another embodiment of the present invention;
FIG. 9 is a diagram illustrating the relationship between the detection voltage and the gravity-offset voltage according to an embodiment of the present invention;
FIG. 10 is a timing diagram of the operation of a three electrode MEMS sensor system of an embodiment of the present invention;
FIG. 11 is a schematic circuit diagram of a MEMS sensor system in accordance with another embodiment of the invention;
FIG. 12 is a schematic circuit diagram of a MEMS sensor system in accordance with yet another embodiment of the invention;
FIG. 13 is a schematic diagram of a five electrode MEMS sensor;
FIG. 14 is a timing diagram of the operation of a prior five electrode MEMS sensor system;
FIG. 15 is a timing diagram of the operation of a five electrode MEMS sensor system of an embodiment of the present invention.
Detailed Description
As described in the background, the sensitivity of the MEMS sensor system of FIG. 1 application is not satisfactory. Taking the
wherein A ismaxIs the maximum input acceleration, phiFFor the duration of the feedback phase, FFFor feedback of electrostatic force, m is the mass of the mass in the
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
The present embodiment provides a MEMS sensor system and a MEMS sensor detection apparatus, and fig. 4 is a schematic circuit structure diagram of the MEMS sensor system. The MEMS sensor system includes a
Specifically, the
The
The cancellation
Fig. 5 is a schematic diagram of a circuit structure of the cancellation
Fig. 6 is a schematic diagram of another circuit structure of the cancellation
Specifically, the second low-pass filter 61 is used for filtering the detection voltage VSLow pass filtering processing is performed to generate a filtered voltage. The pulse generator 62 is configured to generate a positive pulse when the filtered voltage exceeds a preset positive voltage and a negative pulse when the filtered voltage exceeds a preset negative voltage. FIG. 7 is a schematic diagram of the pulse generator 62 generating positive and negative pulses, where VSLFor the filtering voltage, Vth1 is the preset positive voltage, and Vth2 is the preset negative voltage. The counter 63 is configured to count pulses generated by the pulse generator 62 within a preset time interval, count by 1 when the positive pulse is received, and count by 1 when the negative pulse is received. The register 64 is configured to store a count value of the counter 63, and the first digital-to-analog converter 65 is configured to perform digital-to-analog conversion processing on the count value stored in the register 64 to generate the gravity cancellation voltage VD。
The voltage value of the preset positive voltage may be determined according to the voltage value output when the
Fig. 8 is a schematic diagram of another circuit structure of the cancellation
In particular, the first analog-to-
The
The
Taking the
After the gravity cancellation technology is adopted, the maximum input acceleration of the system is as follows under the limitation of the maximum output voltage of the reading circuit:
wherein, A'maxIs the maximum input acceleration, phiFIs the duration of the feedback phase, phiDFor the duration of the gravity cancellation phase, m is the mass of the mass block in the
Referring to fig. 11, in an alternative implementation, the MEMS sensor detection apparatus may further include a cancellation
ADC+ACthe acceleration direct-current component and the alternating-current component which represent the acceleration output by the system when the accelerometer works at any position can provide information such as the inclination angle position and the like while measuring the acceleration signal. By providing the offset
Referring to fig. 12, in an alternative implementation, the MEMS sensor detection apparatus may further include a second analog-to-
The detection voltage V is converted by an analog-to-digital converterSAnd a gravity-counteracting voltage VDConverting into digital signal, and detecting voltage VSCorresponding digital signal and gravity offset voltage VDThe corresponding digital signal is processed to output the digital signal Dout, so that the adaptability of a system digital circuit can be enhanced, and the application range of the MEMS sensor is expanded. Meanwhile, more digital signal processing technologies can be applied to further improve the system precision, noise, temperature drift, zero drift and other performances, and the purpose of greatly improving the system performance is achieved. The
For the five-electrode real-time feedback MEMS sensor, if the MEMS sensor can normally work at any angle smaller than 1g, the gravity counteracting technology provided by the embodiment of the invention is also applicable. FIG. 13 is a schematic diagram of a five-electrode MEMS sensor, and FIG. 14 is a timing diagram illustrating operation of a conventional five-electrode MEMS sensor system, wherein φFFor the duration of the feedback phase, phi, of the five-electrode MEMS sensor systemSThe duration of the five-electrode MEMS sensor system operating in the readout phase is specified. Detection electrode and feedback of five-electrode MEMS sensorThe electrodes are independent of each other, so that the feedback phase and the readout phase of the five-electrode MEMS sensor coincide. The gravity counteracting technology provided by the embodiment of the invention is applied to a five-electrode MEMS sensor, and is a time-sharing technology introduced into a feedback time sequence to realize gravity counteracting.
Taking the
Regardless of whether the gravity cancellation technique provided by the embodiment of the present invention is applied to a three-electrode real-time feedback MEMS sensor or a five-electrode real-time feedback MEMS sensor, generally, the duration phi of the gravity cancellation stageDGreater than the duration phi of the feedback phaseFFurther, the duration phi of the gravity-cancellation phaseDCan be set to the duration phi of the feedback phaseFMore than twice as much. However, the duration φ of the gravity cancellation phase is not limited by the embodiments of the present inventionDAs long as the duration phi of the gravity counteracting stageDThe gravity counteraction can be realized.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
- 上一篇:一种医用注射器针头装配设备
- 下一篇:一种速度传感器测试设备