阅读说明：本技术 更换光刻胶瓶罐的车辆、电脑系统及更换方法 (Vehicle for replacing photoresist bottle, computer system and replacing method ) 是由 于之跃 王希鸣 陈裕凯 吴立仁 杨谨漪 邱惠琪 于 2019-07-12 设计创作，主要内容包括：本公开叙述一种更换光刻胶瓶罐的车辆、电脑系统及更换方法。示例性的车辆包括一处理器,配置以接收一请求信号,以更换一第一光刻胶瓶罐。处理器亦配置以传递基于请求信号的一指令。车辆亦包括多个车轮,配置以从第一地点移动车辆至一第二地点、及从第二地点移动车辆至第一地点。车辆还包括一机械手臂,配置以在第一地点装载第一光刻胶瓶罐至一第一容器中；装载一第二光刻胶瓶罐至一第二容器中；从第二光刻胶瓶罐移除一盖部及从第一光刻胶瓶罐移除一套筒；耦接第一光刻胶瓶罐的套筒至第二光刻胶瓶罐；及从第二容器卸载第二光刻胶瓶罐。(The present disclosure describes a vehicle, a computer system and a method for replacing photoresist bottles. The exemplary vehicle includes a processor configured to receive a request signal to replace a first photoresist canister. The processor is also configured to communicate an instruction based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location and from the second location to the first location. The vehicle further includes a robot configured to load the first photoresist canister into a first container at a first location; loading a second photoresist canister into a second container; removing a cap from the second photoresist canister and a sleeve from the first photoresist canister; coupling the sleeve of the first photoresist canister to the second photoresist canister; and unloading the second photoresist canister from the second container.)

1. A vehicle for replacing a photoresist canister, comprising:

a processor configured to:

receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister; and

transmitting an instruction based on the request signal;

a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location; and

a robot configured to:

loading the first photoresist canister into a first container at the first location;

loading a second photoresist canister into a second container at the second location;

removing a cap from the second photoresist bottle and a sleeve from the first photoresist bottle;

coupling the sleeve of the first photoresist canister to the second photoresist canister; and

unloading the second photoresist canister from the second container at the first location.

2. The vehicle of claim 1, further comprising:

a first rotatable pedestal and a second rotatable pedestal for respectively securing the first container and the second container to the first rotatable pedestal and the second rotatable pedestal and rotating the first container and the second container along a horizontal plane.

3. The vehicle of claim 2, wherein the robot arm comprises a grip for removing the lid portion from the second photoresist bottle can and the sleeve from the first photoresist bottle can by clamping to respective outer sidewalls of the lid portion and the sleeve.

4. The vehicle of claim 3, wherein the grip is further configured to load and unload the first container and the second container by coupling to carrier inserts at respective bottoms of the first container and the second container and lifting the first container and the second container.

5. A computer system for replacing a photoresist canister, comprising:

a memory configured to store a program and data for replacing the photoresist bottle; and

a processor configured to:

receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister;

sending a vehicle to the first location; and

controlling the vehicle to:

loading the first photoresist canister onto the vehicle;

transporting the first photoresist bottle to a second location where a second photoresist bottle is located;

loading the second photoresist canister onto the vehicle;

removing a cap portion of the second photoresist canister and a sleeve of the first photoresist canister;

coupling the sleeve of the first photoresist canister to the second photoresist canister; and

transporting the second photoresist canister to the first location.

6. The computer system of claim 5, wherein the processor is further configured to:

controlling the vehicle to load the first photoresist canister onto the vehicle by inserting a robot of the vehicle into a first container and lifting the first container onto a first rotatable pedestal of the vehicle; and

controlling the vehicle to load the second photoresist canister onto the vehicle by inserting the robot arm of the vehicle into a second container and lifting the second container onto a second rotatable pedestal of the vehicle.

7. The computer system of claim 5, wherein removing the cover of the second photoresist canister and the sleeve of the first photoresist canister comprises:

clamping the sleeve to one outer side wall of the cover part and one outer side wall of the sleeve;

rotating the first and second rotatable pedestals of the vehicle, respectively, in a direction in which the lid and the sleeve are coupled to the second and first photoresist canisters, respectively.

8. A method for replacing a photoresist canister using a vehicle, comprising:

receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister;

moving to the first location;

loading the first photoresist bottle;

transporting the first photoresist canister to a second location associated with a second photoresist canister;

loading the second photoresist bottle;

removing a cap from the second photoresist bottle and a sleeve from the first photoresist bottle;

coupling the sleeve of the first photoresist canister to the second photoresist canister; and

transporting the second photoresist canister to the first location.

9. The replacement method according to claim 8, wherein:

loading the first photoresist canister comprises:

loading the first photoresist canister into a first container with a robot; and

lifting the first container with the robot arm onto a first rotatable pedestal of the vehicle; and

loading the second photoresist canister comprises:

loading the second photoresist canister into a second container with the robot arm; and

the second container is lifted by the robot arm onto a second rotatable pedestal of the vehicle.

10. The method of claim 8, further comprising verifying that an identity of the first photoresist bottle matches an identity of the second photoresist bottle.

Technical Field

The embodiment of the disclosure relates to a vehicle and a computer system, in particular to a vehicle and a computer system for replacing a photoresist bottle.

Background

Photoresists (PR) are an important element in the semiconductor industry. Photoresists are used at various stages in the semiconductor manufacturing process to form patterns on wafers. Photoresist canisters (e.g., canisters containing photoresist used in semiconductor manufacturing) have been manually replaced to refill/replace the photoresist. However, manual replacement of photoresist canisters can be time consuming and expensive, and can be susceptible to human error and damage.

Disclosure of Invention

The disclosed embodiment provides a vehicle for replacing photoresist bottles, which comprises a processor, a plurality of wheels and a mechanical arm. The processor is configured to: the method includes receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister, and transmitting a command based on the request signal. The wheels are configured to move the vehicle from the first location to a second location, and from the second location to the first location. The robot is configured to load a first photoresist canister into a first container at a first location, load a second photoresist canister into a second container at a second location, remove a cap from the second photoresist canister, and remove a sleeve from the first photoresist canister, couple the sleeve of the first photoresist canister to the second photoresist canister, and unload the second photoresist canister from the second container at the first location.

The embodiment of the disclosure provides a computer system for replacing a photoresist bottle, which comprises a memory and a processor. The memory is configured to store a program and data for replacing the photoresist canister. The processor is configured to: receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister, sending a vehicle to the first location, and controlling the vehicle to: loading a first photoresist bottle onto a vehicle, transporting the first photoresist bottle to a second location where a second photoresist bottle is located, loading the second photoresist bottle onto the vehicle, removing a cap of the second photoresist bottle and a sleeve of the first photoresist bottle, coupling the sleeve of the first photoresist bottle to the second photoresist bottle, and transporting the second photoresist bottle to the first location.

The disclosed embodiment provides a replacing method for replacing a photoresist bottle by using a vehicle, comprising the following steps: receiving a request signal to replace a first photoresist canister, wherein the request signal includes a first location associated with the first photoresist canister, moving to the first location, loading the first photoresist canister, transporting the first photoresist canister to a second location associated with a second photoresist canister, loading the second photoresist canister, removing a cap from the second photoresist canister, and removing a sleeve from the first photoresist canister, coupling the sleeve of the first photoresist canister to the second photoresist canister, and transporting the second photoresist canister to the first location.

Drawings

The form of the present disclosure can be best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with common practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of illustration and discussion.

FIG. 1 illustrates an exemplary photoresist exchange system according to some embodiments.

Fig. 2A illustrates a top view of an example clamp structure, according to some embodiments.

Figure 2B illustrates a top view of an exemplary clamp structure in operation of a photoresist exchange process, according to some embodiments.

FIG. 3A illustrates an exemplary photoresist exchange system in operation of a photoresist exchange process according to some embodiments.

FIG. 3B illustrates an exemplary photoresist exchange system in another operation of a photoresist exchange process according to some embodiments.

FIG. 4 illustrates an exemplary process flow of a photoresist replacement process according to some embodiments.

FIG. 5 is a diagram of an exemplary computer system for implementing various embodiments.

Description of reference numerals:

100 system

101 vehicle body

102 mechanical arm

103-1 first connection part

103-2 second connecting part

103-3 third connecting part

103-4 fourth connecting part

104 arm base

105-1 first arm part

105-2 second arm part

106 top of arm

107 grip part

107-1, 107-2 clamp structure

108. 108-1 and 108-2 wheels

109. 109-1, 109-2 rotatable table base

110 image forming apparatus

111 support pedestal

112 support column

113 communication network

114 communication network

115. 115-1, 115-2 rotatable base

116 identity sensing device

120 vehicle

121 vertical center line

130 central controller

140-1 tablet computer and receiving device

140-2 mobile phone and receiving device

200 schematic diagram

201-1, 202-1 clamp base

201-2, 202-2 clamp

207 line

208 hub structure

209 line

220 element, cap/sleeve

250 top view

300 view

301-1 cover part

301-2 sleeve

302-1, 302-2 container

303-1, 303-2 cover

304-1, 304-2 container body

305-1, 305-2 photoresist bottle can

306-1, 306-2 insertion openings

307 hose

308-1, 308-2 collision prevention part

309-1, 309-2 vector insert

310 heavy object

350 view

400 method

401. 402, 403, 404, 405 operations

500 computer system

502 input/output interface

503 input/output device

504 processor

506 bus

508 primary memory, primary memory

510 secondary storage device, secondary storage

512 hard disk drive

514 removable storage device

518. 522 removable storage unit

520 interface

524 communication interface, network interface

526 communication path

528 remote device, remote network, remote entity, element

x, x1, y1, z axis

Detailed Description

The following disclosure provides many different embodiments, or examples, for implementing different features of the disclosure. The following disclosure describes specific examples of components and arrangements thereof to simplify the description. These specific examples are not intended to be limiting. In addition, different examples of the present disclosure may repeat reference numerals and/or symbols that are the same. These iterations are for simplicity and clarity and are not intended to limit the particular relationship between the various embodiments and/or configurations discussed, unless otherwise specified.

In semiconductor manufacturing, photoresist is an important element for forming various patterns/features. The photoresist is stored in photoresist canisters, which are distributed at various locations in the manufacturing facility. The photoresist canister may be manually replaced/refilled when its photoresist is low or empty. Replacement/refilling of photoresist canisters may include manually transporting empty photoresist canisters to a particular location (e.g., a warehouse) to refill/replace the photoresist canisters. The transportation and refilling/replacement of photoresist canisters can be susceptible to damage to the photoresist canister, photoresist spillage, and human error; this process can also be time consuming and expensive.

Embodiments of the present disclosure describe systems and methods for automatically transporting photoresist bottles and replacing empty photoresist bottles with filled photoresist bottles. The system includes a central controller, a vehicle, and a plurality of receiving devices. The central controller controls and communicates with the operation of the vehicle and the receiving device. The vehicle is controlled by a central controller to automatically transport empty photoresist canisters from the manufacturing site to a site (e.g., a warehouse) where the photoresist canisters are replaced, replace caps of full photoresist canisters with sleeves (sockets) of empty photoresist canisters, and transport full photoresist canisters back to the manufacturing site. Among the benefits include automated transportation and replacement/refilling of photoresist vials, making them less susceptible to uncertainty/error through human handling. Protected by the container and transported by vehicle, the photoresist canisters are less susceptible to damage/spillage/leakage, and this transportation can take less time. Furthermore, automated equipment can be used to load and unload photoresist canisters to vehicles, with the advantages of improved stability and reduced chance of photoresist canister damage/spillage/leakage. Furthermore, by using a robot arm, the sleeve change process is more reliable and predictable. Therefore, less labor is required for loading, transporting, and replacing the photoresist canisters.

Fig. 1 illustrates an exemplary system 100 that can automatically transport and replace photoresist canisters according to some embodiments. System 100 may include a vehicle 120, a central controller 130, receiving devices 140-1 and 140-2, and communication networks 113 and 114. According to some embodiments, the central controller 130 may communicate with the vehicle 120 and control the vehicle 120 to move to a first location (e.g., where an empty photoresist canister is located), load an empty photoresist canister onto the vehicle 120, transport a loaded empty photoresist canister to a second location (e.g., where a full photoresist canister is located), load a full photoresist canister onto the vehicle 120, remove a cap from a full photoresist canister and a sleeve from an empty photoresist canister, and place a sleeve onto a full photoresist canister. According to some embodiments, the central controller 130 may also communicate with the vehicle 120 and control the vehicle 120 to unload empty photoresist bottles (e.g., at the second location), transport full photoresist bottles back to the first location, and unload full photoresist bottles. For ease of description, an "empty photoresist canister" may represent any photoresist canister to be replaced, a "full photoresist canister" may represent any other photoresist canister in which an empty photoresist canister is replaced, and a "sleeve" may represent a cap/sleeve (e.g., of an empty photoresist canister) within which a hose is secured. The hose may be an elastic tube passing through the sleeve for transporting photoresist from the photoresist canister to, for example, a manufacturing platform. The central controller 130 may be located at any suitable location. For example, central controller 130 may be inside or outside of a manufacturing facility, or may be installed on one or more vehicles 120.

In some embodiments, the vehicle 120 includes a vehicle body 101, a plurality of wheels 108, a robotic arm 102, a plurality of rotatable pedestals 109, a plurality of rotatable bases 115 connecting the rotatable pedestals 109 and the vehicle body 101, a support column 112, an Identity (ID) sensing device 116, a support pedestal 111, and an imaging device 110. The vehicle 120 may be powered by various forms of power sources (e.g., direct current (DC current), alternating current (AC current), batteries, etc.). For illustrative purposes, two wheels 108-1 and 108-2, two rotatable pedestals 109-1 and 109-2, and two rotatable bases 115-1 and 115-2 are shown. The plurality of wheels 108 may be designed to rotate and carry the vehicle body 101 to different locations in a manufacturing facility. The plurality of rotatable pedestals 109 may be stable in the same horizontal plane (e.g., x-y plane). In some embodiments, the plurality of rotatable pedestals 109 are horizontally aligned in the same horizontal plane. For example, the rotatable base 115-1 and the rotatable pedestal 109-1 may be the same as or similar to the rotatable base 115-2 and the rotatable pedestal 109-2, respectively, and the top surfaces of the rotatable pedestals 109-1 and 109-2 may be horizontally aligned with this horizontal plane (e.g., have the same height to the ground). The plurality of rotatable pedestals 109 may fix the horizontal and vertical positions of the photoresist canisters placed thereon and ensure that the photoresist canisters are at least approximately at the same height relative to the floor. The photoresist canister may be positioned within a range where the imaging device 110 captures an image of the photoresist canister with sufficient resolution for further processing and identification. The robot 120 can rotate to grip the cap/sleeve without touching the photoresist canister. In some embodiments, the rotatable bases 115-1 and 115-2 may each be connected to a motor that may drive the rotatable pedestals 109-1 and 109-2, respectively, to rotate clockwise and/or counterclockwise in the same horizontal plane, such that when the robot 102 is clamped onto a cap/sleeve of a photoresist vial jar placed on the rotatable pedestal 109, the corresponding rotatable base 115 may drive the rotatable pedestal 109 to rotate clockwise and/or counterclockwise to make it easier for the robot 102 to rotate the cap/sleeve.

The identity sensing device 116 may comprise any suitable device that can detect and verify that the correct photoresist canister is placed on the rotatable pedestal 109. For example, the photoresist canister and/or the container (the container that supports the photoresist canister) may include a Radio Frequency Identification (RFID) tag. The identity sensing device 116 may comprise a reader (radio frequency identification reader). The identity sensing device 116 can detect that a full photoresist canister placed on the rotatable pedestal 109 matches an empty photoresist canister so that the cap/sleeve replacement can be operated between the two photoresist canisters. A full photoresist canister that matches an empty photoresist canister may be any suitable photoresist canister from which an empty photoresist canister may be replaced. A full photoresist canister may be filled with the same type or a different type of photoresist for an empty photoresist canister. A full photoresist canister may have the same dimensions or different dimensions for an empty photoresist canister. In some embodiments, the system 100 (e.g., the central controller 130, the vehicle 120, and/or the receiving device 140) records the photoresist canister of the replaceable photoresist canister and any other photoresist canisters (e.g., matching photoresist canisters).

According to some embodiments, the imaging device 110 may be mounted/placed on the support pedestal 111 to record and monitor the hoses and sleeves of empty photoresist canisters for proper placement in matching full photoresist canisters. Imaging device 110 may be any suitable device capable of recording an image for use in pattern recognition and/or image recognition processes. For example, a weight (e.g., an object heavy enough to be dipped into the photoresist) having a detectable shape/size (e.g., a shape/size detectable using a recognition function) may be attached to an end of the hose such that when the weight is submerged into the photoresist, the end of the hose to which the weight is attached may also be dipped into the photoresist to allow for the extraction of sufficient photoresist for the manufacturing process. At the same time, the imaging device 110 may record the position of the weight and may perform image recognition based on the recorded real-time position of the weight to ensure that the end of the hose to which the weight is connected is properly positioned below the surface of the photoresist. In some embodiments, the hose with the weight attached thereto may be straightened and generally face upward. The imaging device 110 may also record the real-time position of the cap and sleeve, and may perform image recognition to ensure that the cap and sleeve are properly removed or placed on the appropriate photoresist canister. In some embodiments, the imaging device 110 may include a charged-coupled device (CCD) camera, and the image recognition may include a three-dimensional (3D) positioning process. For example, the system 100 (e.g., the vehicle 120, the central controller 130, and/or the receiving device 140) may identify the position of the weight and/or compare this position (e.g., along the x-y plane and z-axis) to a stored position to determine whether the weight and sleeve have been properly placed (e.g., at the bottom of the photoresist and/or below the surface of the photoresist).

Support column 112 may be any suitable support structure having sufficient stiffness and strength to provide a suitable position/angle to identity sensing device 116 and imaging device 110. Support pedestal 111 may be any suitable structure upon which imaging device 110 may be stably positioned. In some embodiments, imaging device 110 moves in accordance with the movement of support stage 111. In some embodiments, identity sensing device 116 is mounted along support column 112, and the position of identity sensing device 116 along a vertical axis (e.g., z-axis) can be automatically/manually adjusted. In some embodiments, the support column 112 can be rotated clockwise and/or counterclockwise to adjust the position of the identity sensor device 116. Accordingly, the position of the identity sensing device 116 may be adjusted (e.g., vertically and/or horizontally) such that the identity sensing device 116 may be placed at a desired angle/height to more accurately detect and verify the identity (e.g., identification number and/or radio frequency identification) of the photoresist bottle can placed on the rotatable pedestal 109. In some embodiments, the support column 112 may drive the support pedestal 111 to rotate clockwise and/or counterclockwise such that the orientation of the imaging device 110 may be adjusted and the imaging device 110 may face the desired photoresist canister (e.g., the photoresist canister whose cap/sleeve is being replaced). In some embodiments, the support column 112 may also extend along a vertical axis (e.g., z-axis) such that the height of the imaging device 110 may be adjusted to allow the imaging device 110 to record features of different heights. For example, photoresist vials of different heights may be placed on the rotatable pedestals 109-1 and 109-2, and the position and/or orientation of the imaging device 110 may be automatically adjusted to monitor the replacement of the caps/sleeves of the vials. That is, the position and/or orientation of the imaging device 110 may be adjusted based on the photoresist canister placed on the rotatable stage 109.

The robotic arm 102 may include an arm base 104, a first connection 103-1, a first arm 105-1, a second connection 103-2, a second arm 105-2, a third connection 103-3, an arm top 106, a fourth connection 103-4, and a grip 107. The grip 107 may include a plurality of jaw structures that are rotationally coupled together.

The arm base 104 may be secured to the vehicle body 101 to provide support for a structure/object attached to the arm base 104. Arm base 104 may withstand the forces/weight exerted on robotic arm 102. As shown in FIG. 1, a first arm portion 105-1 may be connected to the arm base 104 via a first connection 103-1, a second arm portion 105-2 may be connected to the first arm portion 105-1 via a second connection 103-2, an arm top 106 may be connected to the second arm portion 105-2 via a third connection 103-3, and a grip 107 may be connected to the arm top 106 via a fourth connection 103-4. First arm 105-1 and second arm 105-2 may be any suitable shape that is movable in various directions and may be made of a suitable material of sufficient stiffness and strength. In some embodiments, each of the first arm 105-1 and the second arm 105-2 has a cylindrical shape and comprises a metallic material (e.g., stainless steel). The first, second, and third connections 103-1, 103-2, 103-3 may be commonly connected to arms on both sides and allow the connected arms to move horizontally and/or vertically (e.g., in the x-direction and z-direction, respectively). The arm top 106 may be any suitable shape that may be connected to the grip 107 and may suspend the grip 107 such that the clamp structures of the grip 107 may be aligned with each other in the same plane for clamping onto the cover/sleeve. In some embodiments, the arm top 106 has an "L" shape, one end of the arm top 106 is connected to the third connecting portion 103-3, and the other end of the arm top 106 is connected to the fourth connecting portion 103-4. The clamp structure of the grip portion 107 may thus be suspended to the fourth connecting portion 103-4 and may rotate in a horizontal plane (e.g., the x-plane). In some embodiments, each of the first, second, third and fourth connecting portions 103-1, 103-2, 103-3, 103-4 comprises a pivotal connecting portion and is made of a material having sufficient stiffness and strength (e.g., stainless steel).

The grip 107 may include a plurality of jaw structures that are rotationally coupled together. For illustrative purposes, two clamp structures 107-1 and 107-2 are shown. In the present disclosure, the term "rotationally coupled" may refer to one end of each clamp structure being mounted together to allow the other end of the clamp structure to rotate and grip onto the cap/sleeve of the photoresist canister. The pivotally connected clamp structure may be suspended from the fourth connection 103-4 and may be rotated about a vertical center line 121 (e.g., along the z-axis). In some embodiments, the rotationally connected clamp structures are positioned in the same horizontal plane and can be rotated in this horizontal plane to grip on the intended cap/sleeve. In some embodiments, the fourth connection portion 103-4 includes a spring structure that allows the grip portion 107 to extend or retract vertically (e.g., adjust the position of the grip portion 107 along the z-axis) when the grip portion 107 grips the cap/sleeve. The position of the clamp structure can thus be adjusted both horizontally and vertically. The grip 107 may be made of a suitable material having sufficient hardness and strength to withstand the reaction force (reaction force) exerted by the object being clamped. In some embodiments, the grip 107 may be made of metal (e.g., stainless steel) and/or reinforced plastic (e.g., recycled plastics).

The vehicle 120 may also include a control unit (not shown) that controls various operations of the vehicle 120. For example, the control unit may control communication between the vehicle 120 and the central controller 130, automatic loading and unloading of photoresist canisters, movement of the robot 102, rotation of the rotatable base 115, detection of identity signals by the identity sensing device 116, transmission and processing of sensed identity signals, recording of cap/sleeve replacement by the imaging device 110, and/or transmission or processing of recorded images. The control unit may include suitable software and hardware, such as computer programs stored in memory, and a processor and associated circuitry to perform various operations. In some embodiments, vehicle 120 stores a map of the manufacturing facility, and vehicle 120 is equipped with a suitable positioning system so that vehicle 120 may move along a designated route within the manufacturing facility. For example, the control unit of the vehicle 120 may include a Global Positioning System (GPS) receiver, a receiving device/program with a Bluetooth-based indoor positioning system, and/or a receiving device/program with a wireless network-based indoor positioning system to navigate within a manufacturing facility according to an indoor map. The manufacturing facility may include corresponding devices for use in an indoor positioning system, such as Bluetooth beacons and/or wireless network access points (WiFi access points) distributed at various locations for use in indoor positioning functions. The control unit may be arranged at any suitable location of the vehicle 120. In some embodiments, the control unit is positioned in the vehicle body 101.

The central controller 130 may include any suitable computer system and receiving device 140 that controls the overall operation of the vehicle 120. Receiving devices 140, such as tablet 140-1 and cell phone 140-2, may comprise any suitable portable device and may be used to communicate with central controller 130. In some embodiments, each receiving device 140 includes a processor and associated circuitry to process and respond to notifications/commands communicated through the central controller 130. For example, central controller 130 may receive real-time data from vehicle 120 and deliver a notification to receiving devices 140-1 and/or 140-2 that includes the real-time status of vehicle 120. Vehicle 120 may communicate with central controller 130 via communication network 113, and receiving device 140 may communicate with central controller 130 via communication network 114. Each communication network 113 and 114 may be a suitable wired or wireless communication device. In some embodiments, communication networks 113 and 114 comprise wireless networks. The following describes a detailed description of the computers/processors in the vehicle 120, the central controller 130, and the receiving device 140.

Fig. 2A illustrates a schematic 200 of an exemplary grip according to some embodiments. The grip portion shown in fig. 2A may be the same as or similar to the grip portion 107 shown in fig. 1. In some embodiments, the grip includes two clamp structures 107-1 and 107-2. The two clamp structures 107-1 and 107-2 may each include a clamp base (201-1 and 202-1) and a pair of clamps (201-2 and 202-2). The clamp base and its clamp may each be of any suitable shape for holding various sizes of caps/sleeves. In some embodiments, the jaws have the shape of prongs. In some embodiments, the clamp base and clamp are made of a suitable material of sufficient hardness and strength for grasping and moving the object being clamped. For example, the clamp base and clamp can be made of metal (e.g., stainless steel). The two clamp structures 107-1 and 107-2 may form a rigid connection at one end of the clamp base. While the two pairs of clamps 201-2 and 202-2 at the other end may be exposed to points in opposite directions to clamp onto the object. For ease of description, FIG. 2A is shown in the x1-y1 plane, which is formed by the connected jaw structures. The x1 axis is referred to as the longitudinal direction and the y1 axis is referred to as the transverse direction. For exemplary purposes, the clamp structures are rigidly connected along the x1 axis.

In some embodiments, clamp structures 107-1 and 107-2 are connected via a hub (hub) structure 208 at one end. The hub structure 208 may comprise a suitable material having sufficient stiffness and strength to connect the clamp structures 107-1 and 107-2 together as a single piece. The hub structure 208 may be connected to the top of the arm (e.g., 106 in fig. 1) via a fourth connection (e.g., 103-4 in fig. 1). In some embodiments, at least one clamp structure 107-1 and 107-2 includes a connecting portion at an end of the clamp base opposite the clamp for connecting to other clamp structures. In some embodiments, the two clamp structures 107-1 and 107-2 are welded together. In some embodiments, the two clamp structures 107-1 and 107-2 are similar or identical clamp structures. In some embodiments, the grip comprises more than two clamp structures rigidly connected to each other, and the clamps may point in a variety of different directions.

The clamp structures 107-1 and 107-2 are rotatable about a vertical center line 121 of fig. 1 in the x1-y1 plane (a point viewed along the vertical/z axis at the center point of the grip in the x1-y1 plane) so that the intended pair of clamps can face and approach the cap/sleeve to be operated. In some embodiments, the two clamp structures 107-1 and 107-2 move/rotate integrally along a line 207 (line 207 of FIG. 2A), the line 207 crossing the center point of the clamp structures 107-1 and 107-2 along the x1 axis. In some embodiments, the two clamp structures 107-1 and 107-2 move/rotate integrally along line 209, the line 209 spanning the center points of the clamp structures 107-1 and 107-2 along the y1 axis. In some embodiments, the centers of clamp structures 107-1 and 107-2 along the x1 axis and along the y1 axis, respectively, overlap at vertical centerline 121.

In some embodiments, the clamp bases (e.g., 201-1 and 202-1) are rigidly connected together, and the clamps (e.g., 201-2 and 202-2) are laterally movable in the y1 direction (indicated by the double-headed arrows). The central controller (e.g., 130 in fig. 1) and/or the vehicle (e.g., 120 in fig. 1) may control the movement of the jaws to widen or narrow the spacing between the two prongs so that the desired cap/sleeve may be placed in this spacing before the jaws contact the cap/sleeve.

Fig. 2B illustrates a top view 250 of the clamping structure 107-2 clamped onto the cap/sleeve according to some embodiments. Element 220 may represent a cap or sleeve of a photoresist canister. The cap/sleeve 220 may be of different sizes and the clamp 202-2 may be moved along the y1 axis to adjust to the size of the cap/sleeve 220. Thus, the clamp structure 107-2 may contact and tightly secure/couple the cover/sleeve 220 on the outer sidewall of the cover/sleeve 220. Further, the central controller and/or vehicle may control the clamp structure 107-2 to rotate the cap/sleeve 220 in the x1-y1 plane, and the cap/sleeve 220 may be rotated to open or close the photoresist canister.

Fig. 3A and 3B are views 300 and 350 of an exemplary vehicle in an operation to replace a cap/sleeve of a photoresist bottle can, according to some embodiments. In contrast to the vehicle 120 shown in FIG. 1, the vehicles of FIGS. 3A and 3B each further include two photoresist canisters (e.g., 305-1 and 305-2) in the container 302, loaded on the rotatable steps 109-1 and 109-2. In some embodiments, the container 302 is part of a system (e.g., the system 100 shown in fig. 1). For illustrative purposes, photoresist canister 305-2 located in container 302-2 on rotatable step 109-2 represents an empty photoresist canister and photoresist canister 305-1 located in container 302-1 on rotatable step 109-1 represents a full photoresist canister. The photoresist canister 305-2 may include a sleeve 301-2 with a hose 307 inserted into the sleeve 301-2. A weight 310 may be attached to one end of the hose 307 to allow the hose to be properly immersed in the photoresist. The photoresist canister 305-1 may include a cap portion 301-1. As shown in FIGS. 3A and 3B, each photoresist canister (e.g., 305-1 and 305-2) is placed in a respective container (e.g., 302-1 and 302-2) and the containers are loaded onto a respective rotatable pedestal (e.g., 109-1 and 109-2). Each container may include a lid (e.g., 303-1 and 303-2), a container body (e.g., 304-1 and 304-2), and a collision preventing part (e.g., 308-1 and 308-2). Each container may further include a carrier-insertion section (e.g., 309-1 and 309-2) fixed/attached to the bottom of the container, wherein the carrier insertion section may include a plurality of insertion openings (e.g., 306-1 and 306-2). For illustrative purposes, two insertion openings are shown.

During manufacture, the photoresist canister (e.g., 305-1 or 305-2) may be secured in a corresponding container (e.g., 302-1 or 302-2), and photoresist may be withdrawn from the photoresist canister via hose 307. The lid (e.g., 303-1 or 303-2) may remain closed to fix the position or orientation of the photoresist canister in the container, and the collision prevention portion (e.g., 308-1 or 308-2) may further cushion any impact caused by the photoresist canister and avoid any collision between the photoresist canister and portions of the container. When there is less photoresist in the photoresist canister 305-2, a signal may be sent to the central controller requesting a replacement of the photoresist canister 305-2. In some embodiments, the signal may include the location (e.g., first location) of the photoresist canister 305-2, the time, the identification number of the container 302-2/photoresist canister 305-2, and the approximate percentage of photoresist remaining. This request may also be manually communicated (e.g., by a technician handling the photoresist canister 305-2) to a receiving device (e.g., the same as or similar to the receiving device 140 shown in fig. 1) or automatically communicated through the container 302-2. In some embodiments, the vessel 302-2 includes a photoresist detection mechanism that can automatically detect the remaining photoresist in the photoresist canister 305-2, e.g., based on the weight of the photoresist canister 305-2. In some embodiments, the container 302-2 includes an Integrated Circuit (IC) that can communicate with a vehicle and/or a central controller.

Upon receiving the request, the central controller may transfer the vehicle to the location of the photoresist canister 305-2. According to some embodiments, the vehicle may follow a stored indoor map and select a designated route to reach the location. In some embodiments, the central controller may be notified after the photoresist canister 305-2 is loaded onto the rotatable pedestal 109-2. In some embodiments, the vehicle may access the photoresist canister 305-2 and determine the optimal distance between the vehicle and the photoresist canister 305-2, and the robot 102 may automatically insert a clamp structure (e.g., 107-1 or 107-2) into the insertion opening 306-2 to load/lift/raise the container 302-2 onto the rotatable pedestal 109-2, and the vehicle may transmit a vehicle status update regarding the loading of the photoresist canister 305-2 to the central controller. In some embodiments, after the container 302-2 is placed on the rotatable pedestal 109-2, the identity sensing device 116 detects the identity number of the container 302-2 and transmits a vehicle status update (including the identity number of the container 302-2) regarding the photoresist canister 305-2 to the central controller. The central controller may then verify that the identification number of the container 302-2 matches the request and send the vehicle to the location (e.g., a second location) where the photoresist canister 305-1 is stored. In some embodiments, the vehicle includes, for example, command buttons and/or a keypad (keypad), wherein the second location can be entered by pressing the command buttons and/or typing the keypad. Further, the vehicle may communicate with the central controller to update the status of the vehicle, such as the loading of the photoresist bottle 305-2 and the transportation of the photoresist bottle 305-2 to a second location.

After the vehicle reaches the second location, the photoresist canister 305-1 (e.g., photoresist full and contained in container 302-1) may be loaded onto the rotatable pedestal 109-1 in a manner similar to that described above (manual or automated loading). In some embodiments, the photoresist canisters 305-1 and 305-2 are substantially fixed to the rotatable pedestals 109-1 and 109-2, respectively, to allow rotation of the sleeve 301-2 and cap 301-1. For example, the rotatable pedestals 109-1 and 109-2 may each include features/patterns, such as snaps and/or hooks, to limit movement of the containers 302-1 and 302-2. In another example, the frictional force between the bottom of the rotatable pedestal (e.g., 109-1 or 109-2) and the corresponding carrier insert (e.g., 309-1 or 309-2) may be sufficiently large to effectively limit movement and sliding of the corresponding container (e.g., 302-1 or 302-2). In some embodiments, identity sensing device 116 may verify the identity number of container 302-1 to ensure that photoresist canister 305-1 matches photoresist canister 305-1. In some embodiments, when a photoresist canister 305-1 is detected that does not match photoresist canister 305-2, the central controller commands (e.g., transmits an indication to) the vehicle to unload container 302-1 and find a matching photoresist canister. In some embodiments, when no matching photoresist canister is found, the vehicle notifies the central controller, and the central controller transmits a notification to one or more receiving devices to request additional assistance (e.g., from a technician) to find a matching photoresist canister. In some embodiments, when no matching photoresist canister is found, a status update may be communicated to the central controller, an under-stock of matching photoresist canisters is reported, and the central controller automatically requests ordering (ordering) of additional matching photoresist canisters. In some embodiments, the second location is a warehouse that stores empty and/or full photoresist canisters.

As shown in fig. 3A and 3B, the vehicle may first remove the cap from the full photoresist canister (e.g., remove cap 301-1 from photoresist canister 305-1) and then remove the sleeve from the empty photoresist canister (e.g., remove sleeve 301-2 from photoresist canister 305-2) to avoid entanglement or contact between the robot 102 and hose 307. For similar reasons, the vehicle may direct the clamp structure (e.g., clamp structure 107-1) toward the cap portion 301-1 of the photoresist canister 305-1 and clamp onto the outside wall of the cap portion 301-1. When the clamp in the clamping configuration (e.g., 201-2 in FIG. 2A) is adjusted to the size of the cap 301-1 and tightly clamps onto the outer sidewall of the cap 301-1, the rotatable base 115-1 can drive the rotatable stage to rotate (e.g., clockwise) so that the relative movement between the cap 301-1 and the photoresist canister 305-1 can be counter-clockwise and the cap 301-1 can be removed from the photoresist canister 305-1. Further, the sleeve 301-2 may be removed from the photoresist canister 305-2. As shown in fig. 3B, in some embodiments, the gripping structure 107 removes the sleeve 301-2 while carrying the removed cover 301-1. In the present disclosure, it is assumed that a clockwise relative movement between the cap/sleeve and the photoresist canister can secure/couple the cap/sleeve to the photoresist canister, and a counter-clockwise relative movement between the cap/sleeve and the photoresist canister can remove the cap/sleeve from the photoresist canister.

Further, the robot 102 may raise the sleeve 301-2, the lid 301-1, and the hose 307 to prevent contact between the hose 307 and the photoresist canisters (e.g., 305-1 and 305-2), and place the hose 307 into the photoresist canister 305-1. After the hose 307 is properly placed in the photoresist canister 305-1, the rotatable base 115-1 may first drive the rotatable base 109-1 to rotate clockwise such that the relative movement between the sleeve 301-2 and the photoresist canister 305-1 is counterclockwise, allowing the sleeve 301-2 to match the threads of the photoresist canister 305-1. After the sleeve 301-2 is mated with the threads of the photoresist canister 305-1, the rotatable base 115-1 may drive the rotatable pedestal 109-1 to rotate counterclockwise such that the relative movement between the sleeve 301-2 and the photoresist canister 305-1 is clockwise, allowing the sleeve 301-2 to be screwed (threaded) into the threads of the photoresist canister 305-1. The clamp structure 107-1 may be continuously threaded into the sleeve 301-2 and secure/couple the sleeve 301-2 to the photoresist canister 305-1. At the same time, the rotatable base 115-1 may remain rotated counterclockwise to allow the sleeve 301-2 to be tightly secured/coupled to the photoresist canister 305-1. Alternatively, after the sleeve 301-2 is threaded onto the photoresist canister 305-1, the jaws of the clamping mechanism 107-1 may be moved laterally (e.g., along the y1 axis in FIGS. 2A and 2B) to release the sleeve 301-2. Alternatively, after releasing the sleeve 301-2, the robot 102 may rotate the grip 107 and move the clamp structure 107-1 and cap 301-1 toward the photoresist canister 305-2. Robot 102 may further screw cap 301-1 onto photoresist canister 305-2. The operation of screwing the cap 301-1 onto the photoresist canister 305-2 may be similar to the operation of the sleeve 301-2 and will not be repeated here.

The cap/sleeve replacement operation may be controlled by a central controller (e.g., central controller 130 in fig. 1) and/or the vehicle, and performed by different portions of the vehicle. For example, when the vehicle detects that two matching photoresist bottles (e.g., 305-1 and 305-2) are properly placed on the rotatable pedestals (e.g., 109-1 and 109-2), the control unit of the vehicle may control the robot 102 to remove the cap 301-1 of the photoresist bottle 305-1 and the sleeve 301-2 of the photoresist bottle 305-2. The control unit may monitor this operation via the imaging device 110. In one example, the control unit may monitor the replacement of the cap/sleeve via the imaging device 110 by monitoring the position of the weight 310. In some embodiments, the imaging device 110 records and transmits real-time images of the weight 310 to the control unit and/or the central controller, and the control unit and/or the central controller may perform an image recognition process to determine whether the weight 310 is removed from the photoresist canister 305-2, contacted with the photoresist canisters 305-1 and 305-2, or placed in the photoresist canister 305-1. That is, the position of the weight 310 may be accurately monitored and controlled to ensure that the cap/sleeve replacement process is properly performed. In some embodiments, the weight 310 may touch the bottom of the photoresist canister 305-2 to be considered properly positioned. In some embodiments, the imaging device 110 comprises a dual charge coupled device camera, and the control unit and/or central controller cross-matches (cross match) the image of the weight 310 along the x-axis, y-axis, and/or z-axis to determine the position of the weight 310 (e.g., a three-dimensional positioning method).

Further, during the cap/sleeve replacement process, the control unit and/or central controller may perform torque control as the clamp structures (e.g., 107-1 and 107-2) rotate the cap/sleeve. The timing and strength of the torque and the direction of the torque applied to the rotatable base (e.g., 115-1 and 115-2) can be determined and controlled by the control unit and/or central controller. In some embodiments, some parameters are predetermined and stored in the control unit and/or the central controller, so that the operation can be more predictable/controllable. For example, the distance between the photoresist canisters (e.g., 305-1 and 305-2), the orientation of the photoresist canisters, and the dimensions of the containers (e.g., 302-1 and 302-2) may be predetermined and stored in the control unit and/or central controller. Thus, during operation, the control unit and/or central controller may more precisely control and monitor the placement and movement of parts (parts).

Further, after the cap/sleeve replacement process is completed, the vehicle may unload the container 302-2 and photoresist canister 305-2 and/or the vehicle may transmit status updates (e.g., including the completion of the cap/sleeve replacement, the time, and the identification number of the container) to the central controller. The central controller may also transmit notifications (e.g., including status updates) to one or more receiving devices. The central controller may further communicate the location of the next destination of the vehicle to the control unit, or the vehicle may automatically return to the first location. The vehicle may transport the container 302-1 and photoresist canister 305-1 to a designated location and unload the container 302-1 and photoresist canister 305-1 at that location.

For purposes of illustration, two containers/photoresist canisters are shown to describe the operation. In some embodiments, more than two containers/photoresist canisters for cap/sleeve replacement may be loaded onto the vehicle. In some embodiments, the vehicle may be transported to different locations to load more than two containers/photoresist canisters. In some embodiments, the size of the container/photoresist canister may be varied. The difference in size may be stored in the form of an identification number in the control unit and/or the central controller. Thus, when different sized containers/photoresist canisters are loaded onto the vehicle, the control unit and/or central controller may detect this difference via, for example, the identity sensing device 116. The movement of the robot 102 may be adjusted accordingly.

Fig. 4 illustrates an exemplary photoresist canister replacement method/process 400 using the disclosed system according to some embodiments. In some embodiments, the operations of method 400 may be performed in a different order. Variations of the method 400 are within the scope of the present disclosure.

In operation 401, the vehicle receives a request signal indicating that the photoresist of the photoresist canister is low (e.g., an empty photoresist canister). The vehicle may generate a command based on the request signal and control operation of various components of the vehicle based on the command. In some embodiments, the request signal may be sent from a container that holds a photoresist canister with little photoresist and/or from a receiving device that finds a photoresist canister with little photoresist. In some embodiments, the request signal is sent to a central controller, and the central controller may further send commands to the vehicle for photoresist bottle refill/replacement. The request signal may include details of the empty photoresist canister, such as the location of the empty photoresist canister (e.g., the first location), the time of the request, the identity number of the empty photoresist canister, and the like. In some embodiments, the identity number of the photoresist canister is stored uniquely (uniquely) in the system. The identification number may comprise any suitable tag/code, such as a string of digits/characters, radio frequency identification, bar code, etc. The identification number may reflect the type of photoresist contained in the photoresist canister, the size of the photoresist canister, and the like. The identification number may be imprinted (imprinted) on the photoresist bottle and/or container having the photoresist bottle. In some embodiments, the identification number may be scanned/read by a corresponding scanner/reader (e.g., a radio frequency identification reader, a bar code reader, etc.). The details of the system can be found in the description of fig. 1.

In operation 402, upon receiving the request signal, the vehicle moves to the location of the empty photoresist canister and loads the empty photoresist canister onto the vehicle. In some embodiments, the command sent to the vehicle includes the coordinates of the first location and the identification number of the empty photoresist canister. Upon receiving the command, the vehicle may approach the first location by selecting a designated route based on the coordinates and the indoor map. In some embodiments, the central controller receives the request signal and commands (e.g., transmits instructions to) the vehicle to move to the location of the empty photoresist canister. The details of the vehicle can be found in the description of fig. 1.

In operation 403, the vehicle transports the empty photoresist canister to the location of the replacement photoresist canister and loads the full photoresist canister onto the vehicle at the location. In some embodiments, upon arrival at the first location, empty photoresist canisters and their corresponding containers may be loaded onto the vehicle either manually (e.g., by a technician) or automatically (e.g., by a vehicle). The vehicle may verify the identity of the empty photoresist canister by scanning the identification number on the container and/or on the empty photoresist canister. In some embodiments, after loading the containers and verifying the identification numbers of the photoresist canisters, the vehicle transports the empty photoresist canisters and their corresponding containers to a second location (e.g., a warehouse), and the full photoresist canisters and their corresponding containers may be loaded onto the vehicle either manually or automatically. Similarly, the vehicle may verify the identity of a full photoresist bottle can by scanning the identification number on the container and/or on the full photoresist bottle can. In some embodiments, the central controller commands (e.g., transmits instructions to) the vehicle to transport empty photoresist canisters and load full photoresist canisters. The details of the process can be found in the description of fig. 3A and 3B.

In operation 404, the vehicle removes the cap portion of the full photoresist canister and couples the sleeve of the empty photoresist canister to the full photoresist canister. In some embodiments, the vehicle rotatably supports and secures the rotatable pedestal of the photoresist bottle can to facilitate removal and replacement of the cap and sleeve. In some embodiments, the cap portion of the full photoresist canister is removed, and the sleeve of the empty photoresist canister is removed from the empty photoresist canister (e.g., with a hose and weight) and placed into the full photoresist canister. In some embodiments, the cover and sleeve are clamped from the outer side wall in order to avoid contact and entanglement with the hose. In some embodiments, an imaging device of the vehicle may be used to monitor the real-time placement of the sleeve by performing three-dimensional positioning of the weights. After properly placing the sleeve, hose, and weight onto the full photoresist canister, the sleeve can be rotated to secure the sleeve to the full photoresist canister. In some embodiments, the status of empty/full photoresist canisters in the system is updated. In some embodiments, the central controller commands (e.g., transmits instructions to) the vehicle to remove the cap of a full photoresist canister and place the sleeve of an empty photoresist canister onto the full photoresist canister. The details of the process can be found in the description of fig. 3A and 3B.

In operation 405, the vehicle transports the full photoresist bottle back to the first location. In some embodiments, the vehicle transports the full photoresist canister to the first location for loading the empty photoresist canister after the replacement of the sleeve is completed. The filled photoresist canister may then be unloaded manually or automatically. In some embodiments, the status of empty/full photoresist canisters in the system is updated. In some embodiments, the central controller commands (e.g., transmits instructions to) the vehicle to transport the full photoresist canister back to the first location. The details of the process can be found in the description of fig. 3A and 3B.

By using the disclosed apparatus and method, the loading/unloading, transporting, and replacing of empty photoresist canisters can be automated and require less labor. Automated operation can reduce the number of photoresist canisters damaged during the replacement process, and vehicles and containers can reduce the chance of damage and leakage of photoresist canisters. The accuracy of the replacement process can also be improved. Furthermore, replacing an empty photoresist bottle can takes less time. Therefore, it may be less costly to replace an empty photoresist canister.

FIG. 5 illustrates an example of a computer system 500 in which various embodiments of the present disclosure may be implemented, according to some embodiments. As described above, the computer system can be used in the control unit of the vehicle, the integrated circuit of the container, the receiving device, and the central controller. The computer system 500 may be a well known computer capable of performing the functions and operations described herein. By way of example, and not limitation, computer system 500 may process and transmit signals. For example, one or more functions of the vehicle may be performed using the computer system 500, which describes exemplary operations for communication between various components of the vehicle and between the vehicle and a central controller.

Computer system 500 includes one or more processors (also referred to as central processing units, CPUs), such as a processor 504. The processor 504 is connected to a communication infrastructure or bus (bus) 506. The computer system 500 also includes input/output devices 503 such as monitors, keyboards, pointing devices (pointing devices), etc. which communicate with a communication infrastructure or bus 506 via the input/output interfaces 502. The computer system 500 may receive instructions via the input/output device 503 to perform the functions and operations described herein, such as the functions of the vehicle and the method 400. The computer system 500 also includes main or primary memory 508, such as Random Access Memory (RAM). The primary memory 508 may include one or more levels of cache. The primary memory 508 has stored therein control logic (e.g., computer software) and/or data. In some embodiments, the control logic (e.g., computer software) and/or data may include one or more of the functions described above with respect to the container.

Computer system 500 may also include one or more secondary storage devices or memories 510. For example, the secondary memory 510 may include a hard disk drive (hard disk drive)512 and/or a removable storage device 514 or a removable storage drive 514. The removable storage drive 514 may be a floppy disk drive (floppy disk drive), a tape drive (magnetic tape drive), an optical disk drive (compact disk drive), an optical storage device, a tape backup device (tape backup device), and/or any other storage device/drive.

The removable storage drive 514 may interact with a removable storage unit 518. Removable storage unit 518 includes a computer usable storage device or a computer readable storage device having stored thereon computer software (control logic) and/or data. Removable storage unit 518 may be a floppy disk, a magnetic tape, a compact disk, a Digital Versatile Disk (DVD), an optical storage disk (optical storage disk), and/or any other computer data storage device. Removable storage device 514 reads from and/or writes to removable storage unit 518 in a well known manner.

According to some embodiments, secondary memory 510 may include other devices, tools, or other methods for allowing computer programs and/or other instructions and/or data to be accessed by computer system 500. Such apparatus, means, or other methods may include, for example, a removable storage unit 522 and an interface 520. Examples of removable storage unit 522 and interface 520 may include a program cartridge and cartridge interface (such as found in video game devices), a removable memory chip (such as an erasable programmable read-only memory (EPROM) or a programmable read-only memory (PROM)) and associated socket, a memory stick and universal serial bus port (USB port), a memory card and associated memory card slot, and/or any other removable storage unit and associated interface. In some embodiments, secondary memory 510, removable storage unit 518, and/or removable storage unit 522 may include one or more of the functions described above with respect to containers.

Computer system 500 may also include a communications interface 524 or a network interface 524. The communication interface 524 enables the computer system 500 to communicate and interact with any combination of remote devices, remote networks, remote entities, and the like, singly or collectively referenced by the reference numeral 528. For example, communication interface 524 may allow computer system 500 to communicate with remote devices 528 via communication paths 526, which communication paths 526 may be wired and/or wireless, and which communication paths 526 may include any combination of Local Area Networks (LANs), Wide Area Networks (WANs), the Internet, and the like. Control logic and/or data may be transferred to and from computer system 500 via communication path 526.

The functions/operations of the foregoing embodiments may be implemented in a wide variety of configurations and architectures. Thus, the operations of some or all of the foregoing embodiments (e.g., the functions of the vehicle and central controller, and the method 400) may be performed in hardware, software, or both. In some embodiments, a tangible device or article of manufacture including a tangible computer usable or readable medium having control logic (software) stored thereon is also referred to herein as a computer program product or program storage device. This includes, but is not limited to, computer system 500, primary memory 508, secondary memory 510, and removable storage units 518 and 522, as well as tangible articles of manufacture embodying any combination of the foregoing. Such control logic, when executed by one or more data processing devices (e.g., computer system 500), causes such data processing devices to operate as described herein. In some embodiments, computer system 500 includes hardware/equipment used in the manufacture of masks (photomasks) and circuits. For example, the hardware/devices may be connected to or part of an element 528 (remote device, network, entity 528) of the computer system 500.

Embodiments of the present disclosure describe systems and methods for automatically transporting photoresist bottles and replacing empty photoresist bottles with full photoresist bottles. The system comprises a central controller, a vehicle and a plurality of receiving devices. The central controller controls and communicates with the operation of the vehicle and the receiving device. The vehicle, controlled by the central controller, may automatically transport empty photoresist canisters from the manufacturing site to the photoresist canister replacement site (e.g., a warehouse), replace caps of full photoresist canisters with sleeves of empty photoresist canisters, and transport full photoresist canisters back to the manufacturing site. Among the benefits include that the transportation and replacement/refilling of photoresist vials can be automated such that the transportation and replacement/refilling of photoresist vials is less susceptible to uncertainty/error through human handling. The photoresist canisters are less susceptible to damage/spillage/leakage, and this transportation can take less time, protected by the containers and transported by the vehicle. Furthermore, automated equipment can be used to load and unload photoresist canisters to vehicles with greater stability and reduced chance of damage/spillage/leakage of photoresist canisters. Furthermore, by using a robot arm, the sleeve change process is more reliable and predictable. Therefore, less labor is required for loading, transporting, and replacing the photoresist canisters.

In some embodiments, there is provided a replacement method for replacing a photoresist canister using a vehicle. The method includes receiving a request signal for replacing a first photoresist canister. The request signal includes a first location associated with a first photoresist canister. The method also includes moving to a first location, loading a first photoresist canister, transporting the first photoresist canister to a second location associated with a second photoresist canister, and loading the second photoresist canister. The method also includes removing the cap from the second photoresist canister and removing the sleeve from the first photoresist canister, coupling the sleeve of the first photoresist canister to the second photoresist canister, and transporting the second photoresist canister to the first location.

In some embodiments, the operation of moving to the first location comprises locating the first location on a stored map of the manufacturing facility. In some embodiments, loading the first photoresist canister includes loading the first photoresist canister into the first container with a robot arm, and lifting the first container with the robot arm onto a first rotatable pedestal of the vehicle. The operation of loading the second photoresist canister includes loading the second photoresist canister into the second container with a robot arm, and lifting the second container with the robot arm onto a second rotatable pedestal of the vehicle. In some embodiments, removing the cap portion from the second photoresist canister and removing the sleeve from the first photoresist canister comprises: clamping to the outer side wall of the cap and the outer side wall of the sleeve, and rotating the first rotatable pedestal and the second rotatable pedestal, respectively, in a direction in which the cap and the sleeve are fixed to the second photoresist canister and the first photoresist canister, respectively. In some embodiments, coupling the sleeve of the first photoresist canister to the second photoresist canister comprises: clamping onto the outer sidewall of the sleeve, rotating the second rotatable stage in a direction in which the sleeve is coupled to the second photoresist canister to allow the sleeve to match the threads of the second rotatable stage, and rotating the second rotatable stage in a direction opposite to the direction in which the sleeve is coupled to the second photoresist canister. In some embodiments, the method further comprises monitoring the position of the sleeve based on the real-time position of a weight attached to the hose inserted through the sleeve. In some embodiments, the operation of monitoring the real-time position includes a three-dimensional positioning process of cross-matching the position of the weights along the horizontal plane and the vertical direction. In some embodiments, the method further comprises verifying that the identity of the first photoresist canister matches the identity of the second photoresist canister.

In some embodiments, a vehicle for replacing photoresist bottles provided by the present disclosure includes a processor configured to receive a request signal to replace a first photoresist bottle. The request signal includes a first location associated with a first photoresist canister. The processor is also configured to communicate an instruction based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from a first location to a second location and from the second location to the first location. The vehicle also includes a robot configured to load a first photoresist canister into the first container at a first location, load a second photoresist canister into the second container at a second location, remove the cap from the second photoresist canister and remove the sleeve from the first photoresist canister, couple the sleeve of the first photoresist canister to the second photoresist canister, and unload the second photoresist canister from the second container at the first location.

In some embodiments, the vehicle further comprises: first and second rotatable pedestals for respectively securing the first and second containers to the first and second rotatable pedestals and rotating the first and second containers along the horizontal plane. In some embodiments, the robot arm includes a grip for removing the cap from the second photoresist canister and the sleeve from the first photoresist canister by clamping to respective outer sidewalls of the cap and the sleeve. In some embodiments, the gripping portion is further configured to load and unload the first and second containers by coupling to carrier insertion portions at respective bottom surfaces of the first and second containers and lifting the first and second containers. In some embodiments, the vehicle further includes a vehicle body for coupling the first rotatable pedestal, the second rotatable pedestal, the robot arm, and the wheel. In some embodiments, the vehicle further comprises an imaging device secured to the vehicle body for monitoring loading and unloading of the first and second containers. In some embodiments, the gripping portion includes a clamp structure connected to the clamp base and clamps facing in different lateral directions.

In some embodiments, a computer system for replacing photoresist canisters includes a memory and a processor. The memory is configured to store programs and data for use in replacing photoresist canisters. The processor is configured to receive a request signal for replacement of the first photoresist canister. The request signal includes a first location associated with a first photoresist canister. The processor is further configured to send the vehicle to a first location and control the vehicle to load a first photoresist canister onto the vehicle, transport the first photoresist canister to a second location where a second photoresist canister is located, and load the second photoresist canister onto the vehicle. The processor is further configured to remove the cap portion of the second photoresist canister and remove the sleeve of the first photoresist canister, couple the sleeve of the first photoresist canister to the second photoresist canister, and transport the second photoresist canister to the first location.

In some embodiments, the processor is further configured to: the method includes controlling the vehicle to load a first photoresist bottle can onto the vehicle by inserting a robotic arm of the vehicle into the first container and lifting the first container onto a first rotatable pedestal of the vehicle, and controlling the vehicle to load a second photoresist bottle can onto the vehicle by inserting a robotic arm of the vehicle into the second container and lifting the second container onto a second rotatable pedestal of the vehicle. In some embodiments, the memory is further configured to store a map including a first location and a second location, and the processor is further configured to locate the first location and the second location on the map, and to control the vehicle to approach the first location and the second location according to the map. In some embodiments, removing the cap portion of the second photoresist canister and the sleeve of the first photoresist canister comprises: clamping onto the outer side wall of the lid and the outer side wall of the sleeve, rotating the first and second rotatable pedestals of the vehicle, respectively, in a direction in which the lid and the sleeve are coupled to the second and first photoresist canisters, respectively. In some embodiments, the processor is further configured to control the vehicle to monitor the position of the sleeve by monitoring a real-time position of a weight attached to the hose inserted through the sleeve.

It should be noted that the detailed description section, not the abstract of the disclosure, is intended to be used for interpreting the claims. The abstract section of the disclosure may set forth one or more, but not all contemplated exemplary embodiments, and, accordingly, is not intended to limit the appended claims.

The foregoing disclosure summarizes features of several embodiments so that those skilled in the art may better understand the form of the disclosure. Those skilled in the art will appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art will also recognize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions and alterations herein without departing from the spirit and scope of the appended claims.