阅读说明：本技术 膜下缺陷检测方法及膜下缺陷检测设备 (Under-film defect detection method and under-film defect detection equipment ) 是由 洪日 周振华 赵云飞 刘瑶 于 2017-12-15 设计创作，主要内容包括：一种膜下缺陷检测方法及膜下缺陷检测设备(100),膜下缺陷检测方法包括步骤：通过光学显微镜(10)对被检测物(Y)进行检测,确定被检测物(Y)的缺陷的第一坐标信息(S10)；根据光学显微镜(10)与扫描装置(20)及切割装置(30)的位置关系和第一坐标信息,确定被检测物(Y)的缺陷与扫描装置(20)的第二坐标信息,及确定被检测物(Y)的缺陷与切割装置(30)的第三坐标信息(S20)；及根据第三坐标信息,控制切割装置(30)对被检测物(Y)进行切割,及根据第二坐标信息,控制扫描装置(20)对切割后的被检测物(Y)的缺陷进行扫描(S30)。(under-film defect detection method and under-film defect detection equipment (100), the under-film defect detection method comprises the steps of detecting an object to be detected (Y) through an optical microscope (10) to determine th coordinate information (S10) of the defect of the object to be detected (Y), determining second coordinate information of the defect of the object to be detected (Y) and a scanning device (20) and third coordinate information (S20) of the defect of the object to be detected (Y) and a cutting device (30) according to the position relation of the optical microscope (10) and the scanning device (20) and the th coordinate information, controlling the cutting device (30) to cut the object to be detected (Y) according to the third coordinate information, and controlling the scanning device (20) to scan the defect of the cut object to be detected (Y) according to the second coordinate information (S30).)