阅读说明：本技术 一种sers薄膜的制备方法 (Preparation method of SERS film ) 是由 耿潇雨 顾辰杰 李祥 郭志豪 赖魁 于 2021-07-27 设计创作，主要内容包括：本发明公开了一种SERS薄膜的制备方法,包括如下步骤：步骤S1：将明胶和去离子水混合进行水热,再加入硝酸银,形成混合溶液；步骤S2：将混合溶液旋涂至衬底上,然后干燥去除水分,以在衬底上形成硝酸银-明胶薄膜；步骤S3：在惰性气体氛围下对硝酸银-明胶薄膜退火,以使得明胶逐渐碳化转变为碳骨架结构并同时对银离子进行还原,进而得到SERS薄膜。明胶将一部分银离子还原成银纳米颗粒,同时逐渐形成多孔结构。明胶持续对剩下的银离子进行还原,还原出的银纳米颗粒逐渐生长,在此基础上明胶逐渐碳化形成碳骨架结构,碳骨架结构确保相邻的银纳米颗粒之间的间距,避免相邻的银纳米颗粒过于靠近,同时也对银纳米颗粒的生长尺寸进行限制,避免银纳米颗粒生长过大。(The invention discloses a preparation method of an SERS film, which comprises the following steps: step S1: mixing gelatin and deionized water, carrying out hydrothermal treatment, and adding silver nitrate to form a mixed solution; step S2: spin-coating the mixed solution on a substrate, and drying to remove moisture to form a silver nitrate-gelatin film on the substrate; step S3: and annealing the silver nitrate-gelatin film in an inert gas atmosphere to gradually carbonize the gelatin into a carbon skeleton structure and reduce silver ions at the same time, thereby obtaining the SERS film. Gelatin reduces a portion of the silver ions to silver nanoparticles while gradually forming a porous structure. Gelatin lasts and reduces remaining silver ion, and the silver nanoparticle that reduces out grows gradually, and gelatin carbonization gradually forms carbon skeleton texture on this basis, and carbon skeleton texture ensures the interval between the adjacent silver nanoparticle, avoids adjacent silver nanoparticle too close to, also restricts the growth size of silver nanoparticle simultaneously, avoids silver nanoparticle to grow too big.)

1. A preparation method of the SERS film is characterized by comprising the following steps:

step S1: mixing gelatin and deionized water, carrying out hydrothermal treatment, and adding silver nitrate to form a mixed solution;

step S2: spin-coating the mixed solution on a substrate, and drying to remove moisture to form a silver nitrate-gelatin film on the substrate;

step S3: and annealing the silver nitrate-gelatin film in an inert gas atmosphere to gradually carbonize the gelatin into a carbon skeleton structure and reduce silver ions at the same time, thereby obtaining the SERS film.

2. The method for preparing a SERS film according to claim 1, wherein the drying temperature in step S2 is 80 ℃.

3. The method of preparing a SERS film according to claim 1, wherein the concentration of gelatin in the mixed solution is 0.1g/ml, the concentration of silver nitrate is 0.01g/ml in step S1, and the thickness of the silver nitrate-gelatin film is 0.8 to 3.2 μm in step S2.

4. The method for preparing a SERS film according to claim 3, wherein the silver nitrate-gelatin film has a thickness of 1.1-1.2 μm.

5. The method for preparing a SERS film as recited in claim 4, wherein the annealing temperature in step S3 is 600-800 ℃.

6. The method for preparing a SERS film according to claim 5, wherein the annealing time is not less than 40h when the annealing temperature is 600 ℃ in step S3.

7. The method for preparing a SERS film as recited in claim 5, wherein the annealing time is not more than 0.5h when the annealing temperature is 800 ℃ in step S3.

8. The method for preparing a SERS film according to claim 1, wherein the substrate is a silicon wafer.

[ technical field ] A method for producing a semiconductor device

The invention relates to a preparation method of an SERS film, belonging to the field of SERS films.

[ background of the invention ]

SERS is a molecular detection method with high sensitivity, and usually employs gold or silver as a substrate to prepare a multilayer structure to enhance electromagnetic enhancement effect. The multilayer structure is complicated in preparation process, and needs to be annealed for multiple times, so that a long time is generally consumed for preparing the SERS thin film. In addition, magnetron sputtering is generally adopted in the film forming process of gold or silver, which results in high preparation cost.

[ summary of the invention ]

The invention aims to overcome the defects of the prior art and provide a preparation method of a SERS film.

The technical scheme adopted by the invention is as follows:

a preparation method of the SERS film comprises the following steps:

step S1: mixing gelatin and deionized water, carrying out hydrothermal treatment, and adding silver nitrate to form a mixed solution;

step S2: spin-coating the mixed solution on a substrate, and drying to remove moisture to form a silver nitrate-gelatin film on the substrate;

step S3: and annealing the silver nitrate-gelatin film in an inert gas atmosphere to gradually carbonize the gelatin into a carbon skeleton structure and reduce silver ions at the same time, thereby obtaining the SERS film.

The invention has the beneficial effects that:

the method adopts a one-step method to mix spin coating and single annealing, simultaneously prepares the carbon skeleton structure and the silver nanoparticles on the substrate, avoids complex operations such as magnetron sputtering and the like, directly obtains the SERS film, greatly simplifies the preparation process and reduces the preparation cost. During the drying process of step S2, the gelatin reduces a part of the silver ions to silver nanoparticles while gradually forming a porous structure. In the annealing process of step S3, the gelatin continuously reduces the remaining silver ions, the reduced silver nanoparticles gradually grow, and on this basis, the gelatin gradually carbonizes to form a carbon skeleton structure, which ensures the distance between adjacent silver nanoparticles, prevents the adjacent silver nanoparticles from being too close to each other, and also limits the growth size of the silver nanoparticles, thereby preventing the silver nanoparticles from growing too large. Through the control effect of the carbon skeleton structure on the growth of the silver nanoparticles, the finally obtained SERS film can ensure that the SERS film has excellent electromagnetic enhancement performance due to the particle spacing and the particle size value of the silver nanoparticles. In addition, the carbon skeleton structure can additionally provide certain chemical enhancement performance, so that the detection precision of the SERS film is improved from the two aspects of electromagnetic enhancement performance and chemical enhancement performance.

The drying temperature in step S2 of the present invention is 80 ℃.

In the step S1, the concentration of gelatin in the mixed solution is 0.1g/ml, the concentration of silver nitrate is 0.01g/ml, and in the step S2, the thickness of the silver nitrate-gelatin film is 0.8-3.2 μm.

The thickness of the silver nitrate-gelatin film is 1.1-1.2 mu m.

In step S3 of the present invention, the annealing temperature is 600-800 ℃.

According to the invention, when the annealing temperature in the step S3 is 600 ℃, the annealing time is not less than 40 h.

According to the invention, when the annealing temperature in the step S3 is 800 ℃, the annealing time is not more than 0.5 h.

The substrate is a silicon wafer.

Other features and advantages of the present invention will be disclosed in more detail in the following detailed description of the invention and the accompanying drawings.

[ description of the drawings ]

The invention is further described below with reference to the accompanying drawings:

FIG. 1 is an SEM image of SERS films of examples 1-9 of the present invention;

FIG. 2 is a Raman spectrum of SERS films of examples 1-9 of the present invention;

FIG. 3 is a Raman spectrum of sample F1600/800 according to an embodiment of the present invention for different concentrations of R6G;

FIG. 4 is a plot of Raman intensity as a function of R6G concentration for sample F1600/800 according to an embodiment of the present invention;

FIG. 5 is a Raman spectrum of example 4 of the present invention and comparative examples 1 and 2;

FIG. 6 is a graph of annealing time as a function of Raman intensity for inventive example 4 and comparative examples 1 and 2 (Raman shift 1360 cm)^-1)；

FIG. 7 is a Raman spectrum of example 5 of the present invention and comparative examples 3 and 4;

FIG. 8 is a graph of annealing time as a function of Raman intensity for inventive example 5 and comparative examples 3 and 4 (Raman shift 1360 cm)^-1)；

FIG. 9 is a Raman spectrum of example 5 of the present invention and comparative examples 5 and 6;

FIG. 10 is an SEM photograph of comparative example 6 of the present invention;

FIG. 11 is a Raman spectrum of example 5 of the present invention and a reference example;

fig. 12 is a comparison histogram of raman intensity of example 5 of the present invention and the reference example.

[ detailed description ] embodiments

The technical solutions of the embodiments of the present invention are explained and illustrated below with reference to the drawings of the embodiments of the present invention, but the following embodiments are only preferred embodiments of the present invention, and not all embodiments. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative effort belong to the protection scope of the present invention.

In the following description, the appearances of the indicating orientation or positional relationship such as the terms "inner", "outer", "upper", "lower", "left", "right", etc. are only for convenience in describing the embodiments and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.

Example 1:

the embodiment provides a preparation method of a SERS film, which comprises the following steps:

step S1: adding 2g of gelatin into 20ml of deionized water, heating for 2h under water bath stirring at 50 ℃, adding 0.2g of silver nitrate to form a mixed solution, and then stirring for 10 min;

step S2: spin-coat 100. mu.L of the mixed solution onto a silicon substrate (3X 3 cm)²) The spin coating speed is 800rpm, the spin coating time is 40s, then the drying is carried out for 1h at the temperature of 80 ℃ to remove moisture, a silver nitrate-gelatin film is formed on the silicon substrate, and the final thickness of the silver nitrate-gelatin film is measured to be about 3 mu m by a step profiler;

step S3: annealing the silver nitrate-gelatin film in an argon atmosphere, firstly carrying out annealing process at 200 ℃ for 1h, then raising the temperature to 600 ℃ and maintaining for 30min, and finally naturally cooling to obtain the SERS film.

Example 2:

this example is different from example 1 in that the final heating temperature in step S3 is 800 ℃.

Example 3:

this example is different from example 1 in that the final heating temperature in step S3 was 1000 ℃.

Example 4:

this example is different from example 1 in that the spin coating speed in step S2 was 1600rpm, and the thickness of the final silver nitrate-gelatin film was measured by a step meter to be about 1.17. mu.m.

Example 5:

the present embodiment is different from embodiment 2 in that the spin coating speed in step S2 is 1600 rpm.

Example 6:

the present embodiment is different from embodiment 3 in that the spin coating speed in step S2 is 1600 rpm.

Example 7:

this example is different from example 4 in that the spin coating speed in step S2 was 2400rpm, and the thickness of the final silver nitrate-gelatin film was measured by a step meter to be about 0.835. mu.m.

Example 8:

the present embodiment is different from embodiment 5 in that the spin coating speed in step S2 is 2400 rpm.

Example 9:

the present embodiment is different from embodiment 6 in that the spin coating speed in step S2 is 2400 rpm.

The differences in the test conditions for examples 1-9 are clearly shown in table 1.

TABLE 1

Referring to FIG. 1, by batch-wise comparing examples 1-3, 4-6, and 7-9, it can be seen that as the annealing temperature increases, the pores gradually decrease. The principle is that organic components in the silver nitrate-gelatin film tend to volatilize more than those in the case of carbonization at 600 ℃, and meanwhile, the growth speed of silver nanoparticles is slow, so that pores in a carbon skeleton structure cannot be effectively filled, and therefore the particle size of the silver nanoparticles is too small, and the pore diameter between adjacent nanoparticles is too large. Taking sample F800/600 as an example, a small amount of silver nanoparticles can be seen, and it is also confirmed that gelatin hardly reduces silver ions sufficiently at 600 ℃, and more silver nanoparticles can be seen in sample F800/800, which shows that the reaction of gelatin and silver ions can be more sufficient at 800 ℃, and the particle size of silver nanoparticles is increased, so that pores in a carbon skeleton structure are filled well, the distance between silver nanoparticles is reduced, but the carbon skeleton structure has a limiting effect on the distance between silver nanoparticles, so that overgrowth of silver nanoparticles can be inhibited, the particle size of silver nanoparticles is prevented from being too large, and adjacent silver nanoparticles are prevented from being too close. In addition, volatilization of organic components in the silver nitrate-gelatin film at 800 ℃ is effectively inhibited, carbonization is more sufficient, and therefore, the number of pores in the carbon skeleton structure is less compared with that of the sample F800/600. In sample F800/1000, it can be seen that the organic component is fully carbonized at 1000 deg.C, so that the pores in the carbon skeleton structure are sharply reduced, and it appears very dense. Meanwhile, the silver nanoparticles are fewer because the temperature of 1000 ℃ is slightly higher than the melting point of silver, so the silver nanoparticles can melt and penetrate into pores at the bottom of the carbon skeleton structure, silver is relatively freely dispersed in the carbon skeleton structure, and the carbon skeleton structure cannot effectively limit the space between the silver nanoparticles, so that the space between the silver nanoparticles is too small. By comparing the samples F800/1000, F1600/1000 and F2400/1000, the silver nanoparticles solidified after melting at the bottom of the carbon skeleton structure can be clearly exposed along with the reduction of the thickness of the SERS film, and particularly for the sample F2400/1000, the particle size of the silver nanoparticles is small, and the distance between the silver nanoparticles is also small.

For the above reasons, an annealing temperature of 800 ℃ is an ideal temperature for preparing the SERS film. The main reason of generalization has three points, firstly, 800 ℃ has suppressed the volatilization of organic ingredients such as gelatin, make it fully carbonize and form carbon skeleton texture, the hole in the carbon skeleton texture has been reduced, thereby the growth to silver nanoparticle is induced, secondly, silver nanoparticle can be with very fast speed stable growth, effectively fill the hole in the carbon skeleton texture, thereby contact area between silver nanoparticle and the carbon skeleton texture has been ensured, receive the restriction of carbon skeleton texture simultaneously, the particle size that silver nanoparticle grows can not be too big, adjacent silver nanoparticle also can not be too close to, help the promotion of SERS film detection precision, thirdly, silver ion's reduction rate and the carbonization speed phase-match of organic ingredients such as gelatin, thereby effectively guaranteed silver ion's abundant reduction, avoid silver ion's waste.

At 10^-4The raman spectra of the samples of examples 1 to 9 were tested with R6G at M concentration as the detection object, see fig. 2.

Examples 1-9 samples were shifted in Raman by 608cm^-1The raman intensities of (a) are shown in table 2.

TABLE 2

Examples 1-9 samples were shifted in Raman 772cm^-1The raman intensities of (a) are shown in table 3.

TABLE 3

Examples 1-9 samples were shifted by 1360cm in Raman^-1The raman intensities of (a) are shown in table 4.

TABLE 4

In tables 2-4, the same Raman shift and fixed spin rate, the Raman intensity increased first and then decreased with increasing annealing temperature, reaching a maximum at 800 ℃ and being consistent with the SEM analysis results. It is also worth noting that the raman intensity at 1000 ℃ is less than that at 600 ℃ at the same raman shift and fixed spin coating speed, which may be caused by too fast carbonization speed of gelatin at 1000 ℃ resulting in partial silver ions not being fully reduced and remaining in the carbon skeleton structure, and thus insufficient silver nano-ions, resulting in insufficient enhancement of raman spectrum.

Under the condition of fixing the carbonization annealing temperature at the same Raman shift position, the Raman intensity is increased and then decreased along with the increase of the spin coating speed (the decrease of the film thickness). However, it is to be noted that, at the same raman shift, the raman intensity at the spin speed of 2400rpm is lower than the raman intensity at the spin speed of 800rpm at the temperature of 800 ℃ for the carburizing and annealing, but the raman intensity at the spin speed of 2400rpm is higher than the raman intensity at the spin speed of 800rpm at the temperature of 600 ℃ or 1000 ℃ for the carburizing and annealing. The reason for this may be as follows:

when the annealing temperature is 600 ℃, the thickness of the SERS film is larger when the spin-coating speed is 800rpm, organic components such as gelatin and the like at the bottom of the SERS film are insufficiently carbonized, and enough silver nanoparticles are not filled at the bottom of the SERS film, so that the adverse effect on Raman enhancement is achieved, and when the spin-coating speed is 2400rpm, the thickness of the SERS film is reduced, and the corresponding annealed SERS film is more uniform integrally;

when the annealing temperature is 1000 ℃, silver nanoparticles on the top of the SERS film are reduced, a large amount of silver nanoparticles are deposited on the bottom of the SERS film, the thickness of the SERS film is larger when the spin-coating speed is 800rpm, the uniformity difference between the top and the bottom of the SERS film is larger, the Raman enhancement is not facilitated, and when the spin-coating speed is 2400rpm, the thickness of the SERS film is reduced, and the corresponding difference is slowed down;

when the annealing temperature is 800 ℃, the thickness of the SERS film is larger, but the difference between the top and the bottom of the SERS film is smaller due to the suitable annealing temperature, so that the difference can not obviously react on the Raman intensity no matter the spin-coating speed is 800rpm or 2400rpm, and meanwhile, the Raman enhancement characteristic of the SERS film is better than that of the SERS film when the spin-coating speed is 2400 rpm.

Also see Table 2, Raman shift 608cm^-1The raman enhancement of (a) is dominated by a chemical enhancement mechanism, the raman enhancement of sample F800/600 is 888, the raman enhancement of sample F1600/600 is 3759, the difference between them is 2871, the raman enhancement of sample F800/800 is 13545, the raman enhancement of sample F1600/800 is 30495, the difference between them is 16950, and the two differences (16950 and 2871) are nearly 6-fold relationship, thus it can be seen that although the raman intensity change at the carbonization annealing temperature of 600 ℃ is not sensitive to the change of the SERS film thickness, the raman intensity changes significantly with the change of the SERS film thickness at the carbonization annealing temperature of 800 ℃. Therefore, when the annealing temperature is 800 ℃, the thickness of the SERS film is changed, so that the Raman intensity can obtain a larger adjusting range, and different Raman detection precision requirements can be met.

The same is similarly reflected in tables 3 and 4, and therefore, further description is omitted.

From the above table, it can be found that sample F1600/800 is the optimum sample. For testing the limit detection accuracy of F1600/800, 10 pairs are provided respectively^-4、10^-5、10^-6、10^-7And 10^-8M concentration of R6G was measured. Referring to FIG. 3, at 10^-8M, weak Raman signals can still be detected, so that F1600/800 has extremely high detection precision.

Referring to fig. 4, lgC is obtained by taking lg as the concentration of R6G, and it can be seen that there is a good linear fit relationship between lgC and raman intensity, which determines the coefficient R²And 0.988, which shows that the concentration of R6G can be effectively estimated and quantitative measurement can be realized by measuring the Raman spectrum.

Comparative example 1:

this comparative example differs from F1600/600 of example 4 in that the annealing time at 600 ℃ is 1 h.

Comparative example 2:

this comparative example differs from F1600/600 of example 4 in that the annealing time at 600 ℃ is 1.5 h.

The samples obtained in example 4 and comparative examples 1 and 2 were each compared with 10^-4The M concentration of R6G was measured, wherein the sample in example 4 was prepared again and subjected to the influence of slight differences in environment and experimental drugs, and the Raman intensity was different from that of the sample in example 4. At 10^-4R6G at M concentration was used as an object of detection, and referring to fig. 5 to 6, it was found that the raman intensity slowly increased with the increase in the carbonization annealing time, and the relationship between the raman intensity and the carbonization annealing time was nearly linear. It can be seen that the raman intensity can be adjusted by the annealing time under the annealing temperature conditions of 1600rpm and 600 ℃.

Comparative example 3:

this comparative example differs from F1600/800 of example 5 in that the annealing time at 800 ℃ is 1 h.

Comparative example 4:

this comparative example differs from F1600/800 of example 5 in that the annealing time at 800 ℃ is 1.5 h.

The samples obtained in example 5 and comparative examples 3 and 4 were each compared with 10^-4The M concentration of R6G was measured, wherein the sample in example 5 was prepared again and subjected to the influence of slight differences in environment and experimental drugs, and the Raman intensity was different from that of the sample in example 5. At 10^-4R6G at M concentration was used as the detection target, as seen in FIGS. 7-8, and it can be seen that as the concentration of M recedesThe increase of the fire time and the decrease of the Raman intensity are very severe, especially when the annealing time is 1h compared with the annealing time of 0.5 h. The reason for this is that too long heating time leads to too large silver nanoparticle growth and even begins to damage the carbon skeleton structure. The raman intensity can therefore already reach a maximum (about 47000) when the annealing time is only 0.5 h. And this maximum (about 47000) is also quite large compared to the raman intensity of the sample of comparative example 2 (about 3400). If the sample prepared in comparative example 2 is further heat-annealed, it takes almost 35 hours to reach the raman intensity of the sample in example 5 even though the raman intensity of the sample continuously changes according to the trend in fig. 6. It can be seen that annealing the sample for only 0.5h in example 5 not only greatly reduces the annealing time, but also maximizes the raman intensity.

Comparative example 5:

this comparative example differs from example 5 in that the gelatin was replaced with glycerol.

Comparative example 6:

this comparative example differs from example 5 in that gelatin is replaced with glucose.

Referring to FIG. 9, at 10^-4When R6G at the M concentration was used as a detection target, the raman intensity was similar between comparative example 5 and comparative example 6 using glycerol and glucose, but the raman intensity of the sample in example 5 (similarly prepared) was significantly higher than that of the sample in the former 2. The reason is shown in fig. 10, in the case of using glucose, a carbon skeleton structure is not formed in the carbonization process, and thus, a good induction effect cannot be achieved in the growth process of silver nanoparticles, which greatly limits raman enhancement. The same applies to glycerol in comparative example 5. It follows that the use of gelatin is an important factor in the formation of a carbon backbone structure for raman enhancement.

Reference example:

this reference example first spin-coated a 1g/ml aqueous solution of gelatin on a silicon substrate, followed by drying to form a gelatin thin film of about 1.17 μm, and then carbonized at 800 deg.c to form a carbon skeleton structure. And then performing magnetron sputtering of silver on the carbon skeleton structure.

Referring to FIGS. 11 and 12, the sample of example 5 was again prepared for comparison with the sample prepared in the reference example at 10^-4R6G at the M concentration was used as a detection target, and it can be seen that the raman intensity of example 5 is significantly superior to that of the reference example. The reason is that silver is magnetron sputtered on the carbon skeleton structure, so that silver nanoparticles cannot effectively enter the carbon skeleton structure, and corresponding silver nanoparticles cannot be induced by the carbon skeleton structure in the magnetron sputtering process, so that the increase of the Raman intensity of the silver nanoparticles is limited. Unlike example 5, the chemical strengthening mechanism of the carbon skeleton structure and the electromagnetic strengthening mechanism of the silver nanoparticles in the reference example do not have a good synergistic effect with each other.

While the invention has been described with reference to specific embodiments thereof, it will be understood by those skilled in the art that the invention is not limited thereto, and may be embodied in many different forms without departing from the spirit and scope of the invention as set forth in the following claims. Any modification which does not depart from the functional and structural principles of the present invention is intended to be included within the scope of the claims.