阅读说明：本技术 离子切割校准装置、校准方法及离子切割装置 (Ion cutting calibration device, calibration method and ion cutting device ) 是由 杜忠明 杨继进 周飞 陈卫 于 2019-09-20 设计创作，主要内容包括：本发明提供一种离子切割校准装置、校准方法及离子切割装置。该离子切割校准装置包括第一校准组件和第二校准组件,第一校准组件具有第一校准面,第二校准组件具有第二校准面；待校准样品和样品托板设置在第一校准面上,以调整待校准样品在样品托板上的位置,并形成初校准样品；初校准样品设置在第二校准面上,第二校准面与离子切割装置的挡板相对设置,以调整初校准样品与离子切割装置的挡板的相对位置,并形成校准样品。该离子切割装置包括离子发生器、挡板以及上述的离子切割校准装置。本发明提高了校准装样的准确性,减少了校准样品表面的离子划痕,缩短了离子切割的时间,从而提高了离子切割的效率。(The invention provides an ion cutting calibration device, a calibration method and an ion cutting device. The ion cutting calibration device comprises a first calibration component and a second calibration component, wherein the first calibration component is provided with a first calibration surface, and the second calibration component is provided with a second calibration surface; the sample to be calibrated and the sample supporting plate are arranged on the first calibration surface so as to adjust the position of the sample to be calibrated on the sample supporting plate and form an initial calibration sample; the initial calibration sample is arranged on the second calibration surface, and the second calibration surface is arranged opposite to the baffle of the ion cutting device so as to adjust the relative position of the initial calibration sample and the baffle of the ion cutting device and form a calibration sample. The ion cutting device comprises an ion generator, a baffle plate and the ion cutting calibration device. The invention improves the accuracy of the calibration sample loading, reduces the ion scratches on the surface of the calibration sample, and shortens the time of ion cutting, thereby improving the efficiency of the ion cutting.)

1. An ion cutting calibration device is used for sample calibration of the ion cutting device and is characterized by comprising a first calibration component and a second calibration component, wherein the first calibration component is provided with a first calibration surface, and the second calibration component is provided with a second calibration surface;

a sample to be calibrated and a sample supporting plate are arranged on the first calibration surface so as to adjust the position of the sample to be calibrated on the sample supporting plate and form an initial calibration sample;

the primary calibration sample is arranged on the second calibration surface, and the second calibration surface is arranged opposite to the baffle of the ion cutting device so as to adjust the relative position of the primary calibration sample and the baffle of the ion cutting device and form a calibration sample.

2. The ion cutting calibration device according to claim 1, wherein the first calibration assembly comprises a base plate and a reference backup plate disposed on the base plate, a side surface of the reference backup plate having two reference surfaces with different surface heights;

the reference surface with the lower surface height is a first reference surface, the reference surface with the higher surface height is a second reference surface, the first reference surface and the second reference surface are connected through a connecting surface between the first reference surface and the second reference surface, and the first reference surface and the second reference surface form the first calibration surface together;

and the sample to be calibrated and the sample supporting plate are respectively abutted against the first reference surface and the second reference surface so as to adjust the position of the sample to be calibrated on the sample supporting plate and form an initial calibration sample.

3. The ion cutting calibration device of claim 2, wherein the surface of the base plate has first and second planes of different heights, the first and second planes being connected by a side surface therebetween;

when the reference backup plate is arranged on the bottom plate, the reference backup plate is positioned on the first plane with lower height, and the first reference surface abuts against the side surface;

the sample supporting plate is located on a second plane with a higher height, the end portion, close to one side of the reference backup plate, of the sample supporting plate abuts against the first reference surface, and the end portion, close to one side of the reference backup plate, of the sample to be calibrated abuts against the second reference surface.

4. The ion cutting calibration apparatus of claim 3, wherein the second calibration assembly comprises a first reference stage and a second reference stage coupled to the first reference stage, the second calibration surface being located on the first reference stage.

5. The ion cutting calibration device of claim 4, wherein the first and second reference stages are connected by a snap assembly comprising a snap tab on one of the first and second reference stages and a snap slot on the other of the first and second reference stages, the snap tab snap fitting into the snap slot when the first and second reference stages are connected.

6. The ion cutting calibration device of claim 5, wherein the first reference stage comprises a base;

the base is provided with a first cavity, a first rotating piece is arranged in the first cavity, and a rotating shaft of the first rotating piece is positioned in a first direction; a second cavity is arranged in the first rotating part, a second rotating part is arranged in the second cavity, a rotating shaft of the second rotating part is positioned in a second direction, and the first direction and the second direction are two directions which are perpendicular to each other in space;

the second rotating part is provided with a sliding groove extending along the first direction, a notch of the sliding groove is opposite to the baffle, the sample supporting plate is located in the sliding groove, the initial calibration sample connected with the sample supporting plate is exposed outside the sliding groove through the notch, and the initial calibration sample and the baffle are opposite to each other along the second direction.

7. The ion cutting calibration device of claim 6, wherein the second reference stage comprises a base and a fixed base disposed opposite the base, the first reference stage being connected to the fixed base;

a push plate is arranged on one side, close to the fixed seat, of the base, and a first adjusting piece for adjusting the position of the push plate in the first direction and a second adjusting piece for adjusting the position of the push plate in the second direction are arranged on the base;

when the first reference platform is connected to the second reference platform, the end part of the push plate is positioned at the first end of the sliding groove and abuts against the sample supporting plate in the sliding groove so as to push the sample supporting plate to slide between the first end and the second end of the sliding groove in a reciprocating manner.

8. The ion cutting calibration device of claim 7, wherein a plurality of locking members are provided on the base; at least one first locking piece for locking the rotating position of the first rotating piece in the base is arranged between the base and the first rotating piece; at least one second locking piece for locking the rotating position of the second rotating piece in the first rotating piece is arranged between the first rotating piece and the second rotating piece;

an elastic part is arranged between the sliding groove and the sample supporting plate, and the sample supporting plate slides in the sliding groove in a reciprocating manner under the combined action of the pushing force of the pushing plate and the elastic restoring force of the elastic part; at least one third locking piece for locking the moving position of the sample supporting plate in the sliding groove is arranged between the sample supporting plate and the sliding groove.

9. An ion cutting calibration method applied to the ion cutting calibration device according to any one of claims 1 to 8, comprising:

mounting a sample to be calibrated and a sample supporting plate on a first calibration surface of a first calibration assembly, adjusting the position of the sample to be calibrated on the sample supporting plate, and forming an initial calibration sample;

and arranging the primary calibration sample on a second calibration surface of a second calibration component, wherein the second calibration surface is arranged opposite to the baffle plate of the ion cutting device, adjusting the relative position of the primary calibration sample and the baffle plate of the ion cutting device, and forming a calibration sample.

10. An ion cutting device, comprising an ion generator, a baffle plate, and the ion cutting calibration device of any one of claims 1 to 8;

the sample to be calibrated and the sample supporting plate are arranged on the ion cutting calibration device, the baffle is positioned between the sample to be calibrated and the ion generator, and the ion emitting end of the ion generator faces to the baffle and the sample to be calibrated.

Technical Field

The invention relates to a sample surface treatment technology, in particular to an ion cutting calibration device, a calibration method and an ion cutting device.

Background

Sample calibration plays an extremely important role in many scenarios. For example, before ion cutting, a part of the sample which is not to be cut needs to be shielded by a baffle plate, a part which needs to be subjected to ion cutting is exposed, a part of the sample which is higher than the baffle plate is a part to be cut of the sample, and then the part to be cut is bombarded by ions so as to obtain a flat sample cutting surface. Therefore, accurate sample loading has great influence on the cutting effect of the ions.

Disclosure of Invention

In order to solve the technical problems, the invention provides an ion cutting calibration device, a calibration method and an ion cutting device, which can effectively avoid the problem that the calibration sample loading of the ion cutting calibration device is not accurate enough, reduce ion scratches on the surface of a calibration sample, shorten the ion cutting time and improve the ion cutting efficiency.

In order to achieve the above technical effects, in a first aspect, the present invention provides an ion cutting calibration apparatus for sample calibration of an ion cutting apparatus, including a first calibration component and a second calibration component, where the first calibration component has a first calibration surface, and the second calibration component has a second calibration surface.

And arranging a sample to be calibrated and a sample supporting plate on the first calibration surface so as to adjust the position of the sample to be calibrated on the sample supporting plate and form an initial calibration sample.

The primary calibration sample is arranged on the second calibration surface, and the second calibration surface is arranged opposite to the baffle of the ion cutting device so as to adjust the relative position of the primary calibration sample and the baffle of the ion cutting device and form a calibration sample.

Optionally, the first calibration assembly comprises a base plate and a reference backup plate arranged on the base plate, wherein the side surface of the reference backup plate is provided with two reference surfaces with different surface heights;

the reference surface with the lower surface height is a first reference surface, the reference surface with the higher surface height is a second reference surface, the first reference surface and the second reference surface are connected through a connecting surface between the first reference surface and the second reference surface, and the first reference surface and the second reference surface form the first calibration surface together;

and the sample to be calibrated and the sample supporting plate are respectively abutted against the first reference surface and the second reference surface so as to adjust the position of the sample to be calibrated on the sample supporting plate and form an initial calibration sample.

Optionally, the surface of the base plate has a first plane and a second plane with different heights, the first plane and the second plane being connected by a side face located therebetween;

when the reference backup plate is arranged on the bottom plate, the reference backup plate is positioned on the first plane with lower height, and the first reference surface abuts against the side surface;

the sample supporting plate is located on a second plane with a higher height, the end portion, close to one side of the reference backup plate, of the sample supporting plate abuts against the first reference surface, and the end portion, close to one side of the reference backup plate, of the sample to be calibrated abuts against the second reference surface.

Optionally, the second calibration assembly comprises a first reference table and a second reference table connected to the first reference table, the second calibration surface being located on the first reference table.

Optionally, the first reference table and the second reference table are connected through a clamping assembly, the clamping assembly comprises a clamping head located on one of the first reference table and the second reference table and a clamping groove located on the other of the first reference table and the second reference table, and when the first reference table and the second reference table are connected, the clamping head is clamped in the clamping groove.

Optionally, the first reference stage comprises a base.

The base is provided with a first cavity, a first rotating piece is arranged in the first cavity, and a rotating shaft of the first rotating piece is positioned in a first direction; the first rotating part is internally provided with a first cavity, the first cavity is internally provided with a first rotating part, a rotating shaft of the first rotating part is positioned in a first direction, and the first direction are perpendicular to each other in space.

The second rotating part is provided with a sliding groove extending along the first direction, a notch of the sliding groove is opposite to the baffle, the sample supporting plate is located in the sliding groove, the initial calibration sample connected with the sample supporting plate is exposed outside the sliding groove through the notch, and the initial calibration sample and the baffle are opposite to each other along the second direction.

Optionally, the second reference table includes a base and a fixed seat disposed opposite to the base, and the first reference table is connected to the fixed seat.

The base is provided with a push plate on one side close to the fixed seat, the base is provided with a first adjusting piece for adjusting the position of the push plate in the first direction and a second adjusting piece for adjusting the position of the push plate in the second direction.

When the first reference platform is connected to the second reference platform, the end part of the push plate is positioned at the first end of the sliding groove and abuts against the sample supporting plate in the sliding groove so as to push the sample supporting plate to slide between the first end and the second end of the sliding groove in a reciprocating manner.

Optionally, a plurality of locking pieces are arranged on the base; at least one first locking piece for locking the rotating position of the first rotating piece in the base is arranged between the base and the first rotating piece; at least one second locking piece used for locking the rotating position of the second rotating piece in the first rotating piece is arranged between the first rotating piece and the second rotating piece.

An elastic part is arranged between the sliding groove and the sample supporting plate, and the sample supporting plate slides in the sliding groove in a reciprocating manner under the combined action of the pushing force of the pushing plate and the elastic restoring force of the elastic part; at least one third locking piece for locking the moving position of the sample supporting plate in the sliding groove is arranged between the sample supporting plate and the sliding groove.

In a second aspect, the present invention provides an ion cutting calibration method, applied to the ion cutting calibration apparatus described above, including:

and mounting the sample to be calibrated and the sample supporting plate on a first calibration surface of a first calibration assembly, adjusting the position of the sample to be calibrated on the sample supporting plate, and forming an initial calibration sample.

And arranging the primary calibration sample on a second calibration surface of a second calibration component, wherein the second calibration surface is arranged opposite to the baffle plate of the ion cutting device, adjusting the relative position of the primary calibration sample and the baffle plate of the ion cutting device, and forming a calibration sample.

In a third aspect, the present invention also provides an ion cutting device, comprising an ion generator, a baffle plate and the ion cutting calibration device as described above.

The sample to be calibrated and the sample supporting plate are arranged on the ion cutting calibration device, the baffle is positioned between the sample to be calibrated and the ion generator, and the ion emitting end of the ion generator faces to the baffle and the sample to be calibrated.

The invention provides an ion cutting calibration device, a calibration method and an ion cutting device. Adjusting the position of the sample to be calibrated on the sample supporting plate by arranging the sample to be calibrated and the sample supporting plate on the first calibration surface to form an initial calibration sample; through setting up the initial calibration sample on the face is calibrated to the second, the face is calibrated to the second and the baffle of ion cutting device sets up relatively to the relative position of adjustment initial calibration sample and ion cutting device's baffle, with form calibration sample, improved the accuracy of calibration dress appearance, reduced the ion mar on calibration sample surface, also reduced the dress appearance degree of difficulty of ion cutting simultaneously. The ion cutting device comprises an ion generator, a baffle and the ion cutting calibrating device, wherein a sample to be calibrated and a sample supporting plate are arranged on the ion cutting calibrating device, the baffle is positioned between the sample to be calibrated and the ion generator, and an ion emitting end of the ion generator faces the baffle and the sample to be calibrated, so that the ion cutting time is shortened, and the ion cutting efficiency is improved.

The construction of the present invention and other objects and advantages thereof will be more apparent from the following description of the preferred embodiments taken in conjunction with the accompanying drawings.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a first calibration assembly of an ion cutting calibration apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram illustrating a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram illustrating a first reference stage in a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram illustrating a second reference stage in a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a base and a first rotating member of a first reference stage in a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a first rotating member and a second rotating member of a first reference stage in a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a second rotating member and a sliding chute of a first reference stage in a second calibration assembly of the ion cutting calibration apparatus according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of a sample tray of an ion cutting calibration apparatus according to an embodiment of the present invention;

fig. 9 is a schematic flow chart of an ion cutting calibration method according to a second embodiment of the present invention.

Description of reference numerals:

1-a first calibration assembly;

2-a second calibration assembly;

3-a sample to be calibrated;

4-sample pallet;

41-a first fin;

42-a second fin;

5-primary calibration sample;

6-a baffle plate;

11-a base plate;

111-a first plane;

112-a second plane;

113-side;

12-a reference backup plate;

121-a first reference plane;

122-a second datum plane;

21-a first reference stage;

211-a bayonet joint;

212-a base;

2121-a first card slot;

213-a first rotating member;

2131-a second card slot;

2132-a rotating shaft of the first rotating member;

214-a second rotating member;

2141-a third card slot;

2142-a rotating shaft of the second rotating member;

2143-fasteners;

215-a chute;

2151-first end;

2152-second end;

216 — a first locking member;

217-a second locking element;

218-a guide post;

22-a second reference stage;

221-a clamping groove;

222-a base;

2221-a first adjustment member;

2222-a second adjustment member;

223-a fixed seat;

224-push plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the preferred embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar components or components having the same or similar functions throughout. The described embodiments are only some, but not all embodiments of the invention. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

In the present invention, unless otherwise explicitly specified or limited, terms such as "mounted," "connected," "fixed," and the like are to be construed broadly, and may for example be fixedly connected, detachably connected, or integrally formed; it can be mechanically coupled, directly coupled, indirectly coupled through intervening media, coupled between two elements, or coupled between two elements in a mutual relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.