阅读说明：本技术 一种玻璃基板内部缺陷处理及成分分析的方法 (Method for processing internal defects of glass substrate and analyzing components of glass substrate ) 是由 彭寿 张冲 舒众众 刘文瑞 张晓东 冯冠奇 于 2019-09-02 设计创作，主要内容包括：本发明涉及一种玻璃基板内部缺陷处理及成分分析方法,其特征在于：将待测玻璃样片(8)放在便携式放大目镜的场透镜(2),并将玻璃样片内部缺陷确定在场透镜镜面十字刻度线交叉处(9)上；手持玻璃刀支撑部(5),用刀轮(4)手动切割玻璃内部缺陷表面,使玻璃暴露出内部缺陷；将暴露出内部缺陷的玻璃样片切面(11)做镀金处理,在切面表面形成一层适中密度的膜层。本发明优点：结构简单实用、操作方便、适用范围广、效率高,满足生产过程中玻璃基板内部缺陷大小在10μm以上的缺陷成分分析的需要。(The invention relates to a method for processing internal defects of a glass substrate and analyzing components, which is characterized by comprising the following steps: placing a glass sample (8) to be detected on a field lens (2) of a portable magnifying eyepiece, and determining the internal defects of the glass sample on the crossed part (9) of the cross scale line of the mirror surface of the field lens; the glass cutter supporting part (5) is held by hand, and the surface of the internal defect of the glass is manually cut by using the cutter wheel (4) so that the internal defect of the glass is exposed; the section (11) of the glass sample wafer with the exposed internal defects is subjected to gold plating treatment, and a film layer with moderate density is formed on the surface of the section. The invention has the advantages that: the device has the advantages of simple and practical structure, convenient operation, wide application range and high efficiency, and meets the requirement of defect component analysis of the glass substrate with the defect size of more than 10 mu m in the production process.)

1. A method for processing internal defects of a glass substrate and analyzing components is characterized by adopting the following equipment: the portable magnifying eyepiece comprises an eyepiece lens (1), a field lens (2) and field lens cross scale marks (3), and the handheld glass knife comprises a knife flywheel (4) and a supporting part (5);

the method comprises the following steps:

(1) Placing a glass sample (8) of internal defect components to be detected on a field lens (2) of a portable magnifying eyepiece, and determining the internal defects of the glass sample on the intersection (9) of the cross scale lines of the mirror surface of the field lens;

(2) A glass cutter supporting part (5) is held by hand, and the surface of the internal defect of the glass is manually cut by a cutter wheel (4) to expose the internal defect of the glass;

(3) And gold plating the section (11) of the glass sample wafer with the exposed internal defects to form a film layer with moderate density on the surface of the section, wherein the film layer with moderate density can ensure that all the exposed internal defects can present clear images under a high-voltage electron beam of a scanning electron microscope without causing metal waste.

2. the method of claim 1, wherein the method comprises: the gold plating treatment in the step (3) is preferably an ion vacuum sputtering method, the distance from the height of the sample platform to the gold sputtering target is 3.0-10cm, the vacuum degree is 0.04-0.10mbar, and the coating time is 15-40 s.

3. The method of claim 1, wherein the method comprises: the gold plating treatment in the step (3) is preferably an ion vacuum sputtering method, the distance from the height of the sample platform to the gold sputtering target is 6.0cm, the vacuum degree is 0.08mbar, and the coating time is 30 s.

Technical Field

The invention belongs to the technical field of glass substrate detection, and relates to a method for processing internal defects of a glass substrate and analyzing components of the glass substrate.

Background

with the rapid development of the liquid crystal display device industry, the demand for glass substrates as essential parts of liquid crystal display devices is increasing day by day. The glass substrate material as a high-quality component has strict requirements on the quality of glass, so that the requirements on the glass melting process conditions are higher. In the melting process of the glass industrial production, defective stones caused by incomplete melting and the like, such as silicozirconium stones, tin oxide stones and the like, can appear. In addition, the platinum material used in the production process has the conditions of surface looseness, volatilization, oxidation and the like at high temperature, and can bring some internal defects to the glass, such as platinum particles, needle-shaped platinum and the like, and the defects can reduce the service life of the platinum channel and the like. Therefore, it is important to produce a high-quality glass substrate to effectively provide a solution by detecting the internal defect components.

At present, the components of the internal defects of the glass are generally tested by an X-ray fluorescence spectrometry method, a chemical titration method and the like, wherein the X-ray fluorescence spectrometry method cannot accurately analyze the components of the tiny defects, the chemical analysis method often involves strong acid and strong alkali reagents in the defect dissolving process, and has the problems of potential safety hazards and the like.

disclosure of Invention

The invention aims to provide a method for processing internal defects and analyzing components of a glass substrate, aiming at the defects of the existing method for detecting the internal defects of the ultrathin TFT-LCD glass substrate (the X-ray fluorescence spectrometry cannot accurately analyze tiny defect components, and the chemical analysis method often involves strong acid and strong alkali reagents in the defect dissolving process, so that the potential safety hazard exists and the like); the method can be used for carrying out rapid analysis on the glass sample wafer with internal micro defects by means of manual cutting treatment without contacting strong acid and strong alkali reagents, and can provide a solution for production in time.

in order to achieve the purpose, the technical scheme adopted by the invention is as follows:

A method for processing internal defects of a glass substrate and analyzing components is characterized by adopting the following equipment: the portable magnifying eyepiece comprises an eyepiece lens (1), a field lens (2) and field lens cross scale marks (3), and the handheld glass knife comprises a knife flywheel (4) and a supporting part (5);

the method comprises the following steps:

(1) Placing a glass sample (8) of internal defect components to be detected on a field lens (2) of a portable magnifying eyepiece, and determining the internal defects of the glass sample on the intersection (9) of the cross scale lines of the mirror surface of the field lens;

(2) a glass cutter supporting part (5) is held by hand, and the surface of the internal defect of the glass is manually cut by a cutter wheel (4) to expose the internal defect of the glass;

(3) And gold plating the section (11) of the glass sample wafer with the exposed internal defects to form a film layer with moderate density on the surface of the section, wherein the film layer with moderate density can ensure that all the exposed internal defects can present clear images under a high-voltage electron beam of a scanning electron microscope without causing metal waste.

Further, the gold plating treatment in the step (3) is preferably an ion vacuum sputtering method, the distance from the height of the sample platform to the gold sputtering target is 3.0-10cm, the vacuum degree is 0.04-0.10mbar, and the coating time is 15-40 s.

Further, the gold plating treatment in the step (3) is preferably an ion vacuum sputtering method, the distance from the height of the sample stage to the gold sputtering target is 6.0cm, the vacuum degree is 0.08mbar, and the coating time is 30 s.

The invention has the advantages that: a portable magnifying eyepiece is used for determining the position of a glass internal defect and serving as a support, and a handheld glass cutter is used for cutting a glass sample wafer to expose the internal defect; the device has the advantages of simple and practical structure, convenient operation, wide application range and high efficiency, meets the requirement of defect component analysis of the glass substrate with the defect size of more than 10 mu m in the production process, and can reduce the waste of metal particles by optimized gold plating processing parameters.

drawings

FIG. 1 is a schematic view of a portable magnifying eyepiece;

FIG. 2 is a schematic view of a hand-held glass knife;

FIG. 3 is a schematic view of the operation of a glass coupon for sampling internal defects in glass according to the present invention;

FIG. 4 is a schematic view of a glass coupon after the internal defect of the glass of the present invention has been sampled;

FIG. 5 is a schematic diagram of gold plating of a glass coupon after preparation of a glass internal defect sample according to the present invention.

Detailed Description