阅读说明：本技术 一种x射线小角散射与x射线成像联用的光学系统 (Optical system associated with a kind of low-angle scattering of X-rays and x-ray imaging ) 是由 边风刚 洪春霞 周平 王玉柱 于 2019-09-02 设计创作，主要内容包括：本发明提供一种X射线小角散射与X射线成像联用的光学系统,包括：真空腔；布置于真空腔内的束流阻挡器,包括：依次叠置的二极管、闪烁体、第一透镜组和反射棱镜；布置于真空腔外的X射线小角散射探测器；沿与X射线入射方向垂直的方向安装的X射线成像机构,包括：第二透镜组和X射线成像探测器,以及一维调焦电机；以及计算机；其中,X射线照射到样品,发生小角散射后的X射线通过X射线小角散射探测器采集,穿过样品的直通X射线经过束流阻挡器转换为可见光并被90度折射后在X射线成像探测器上成像,从而实现X射线小角散射和X射线成像的同时测量。根据本发明,提供了一种可实现对X射线小角散射和X射线成像同时检测的光学系统。(The present invention provides optical system associated with a kind of low-angle scattering of X-rays and x-ray imaging, comprising: vacuum chamber；The line stopper being arranged in vacuum chamber, comprising: diode, scintillator, the first lens group and the reflecting prism being sequentially stacked；The low-angle scattering of X-rays detector being arranged in outside vacuum chamber；The x-ray imaging mechanism installed along the direction vertical with X-ray incident direction, comprising: the second lens group and x-ray imaging detector and one-dimensional focusing motor；And computer；Wherein, x-ray bombardment is to sample, X-ray after small-angle scattering occurs is acquired by low-angle scattering of X-rays detector, straight-through X-ray across sample is imaged on x-ray imaging detector after line stopper is converted to visible light and is reflected by 90 degree, thus measurement while realizing low-angle scattering of X-rays and x-ray imaging.According to the present invention, a kind of optical system that can be achieved to low-angle scattering of X-rays and x-ray imaging while detection is provided.)

1. optical system associated with a kind of low-angle scattering of X-rays and x-ray imaging characterized by comprising

Vacuum chamber with an accommodation space, the top of the vacuum chamber include a window；

The line stopper being arranged in along X-ray incident direction in the vacuum chamber, comprising: the diode that is sequentially stacked, flashing Body, the first lens group and reflecting prism；

The low-angle scattering of X-rays detector outside the vacuum chamber, the low-angle scattering of X-rays are arranged in along X-ray incident direction Detector is located at the rear end of line stopper；

The x-ray imaging mechanism outside the vacuum chamber is installed on along the direction vertical with X-ray incident direction, comprising: with it is described The second lens group and x-ray imaging detector of window alignment, and one for assisting the x-ray imaging detector focusing Dimension focusing motor；And

The computer being connect with the x-ray imaging detector signal；

Wherein, X-ray is irradiated to sample along X-ray incident direction, and the X-ray after small-angle scattering occurs is small by the X-ray The acquisition of angle scattering detector, the straight-through X-ray across the sample are converted to visible light and by 90 by the line stopper It is imaged on the x-ray imaging detector after degree refraction, is measured while realizing low-angle scattering of X-rays and x-ray imaging.

2. optical system according to claim 1, which is characterized in that the diode is silicon photoelectric diode；The sudden strain of a muscle Bright body is made of YAG:Ce material.

3. optical system according to claim 1, which is characterized in that first lens group is by convex lens, concavees lens, convex Lens, convex lens, convex lens, concavees lens so successively compress be composed, second lens group by convex lens, convex lens, Concavees lens successively compress be composed in this way.

4. optical system according to claim 1, which is characterized in that the reflecting prism is using right angle made of glass Reflecting prism.

5. optical system according to claim 1, which is characterized in that second lens group is installed on by quartz glass system At it is columnar structured in, it is described columnar structured to be installed on the window by flange.

6. optical system according to claim 5, which is characterized in that the columnar structured outside is provided with dust-proof anti- The protective device of visible light interference.

7. optical system according to claim 1, which is characterized in that the line stopper is installed on institute by a bracket It states in vacuum chamber.

8. optical system according to claim 7, which is characterized in that the bracket can pass through two-dimensional adjustment support platform tune Section is set, and the two-dimensional adjustment support platform includes horizontal position adjustment module and upright position adjustment module.

9. optical system according to claim 8, which is characterized in that the one-dimensional focusing motor and two-dimensional adjustment support are flat Platform passes through the general electric machine controller of experiment centre and driver is driven.

10. optical system according to claim 1, which is characterized in that the diode, scintillator, the first lens group with And reflecting prism is successively installed in a cylindrical lens barrel, the line stopper further includes being installed on the cylindrical lens barrel The sheet lead of rear end, for stopping straight-through damage of the X-ray to the low-angle scattering of X-rays detector.

Technical field

The present invention relates to optical imaging field, relate more specifically to associated with a kind of low-angle scattering of X-rays and x-ray imaging Optical system.

Background technique

Low-angle scattering of X-rays, which refers to, to interact when X-ray transparent sample with the electronics in sample, close to former The scattering phenomenon occurred in the small angle range that 2 °~5 ° of light beam, electronics of the X-ray of scattering in the distribution and substance in space Density fluctuation is closely related.Process of setting is to be related to solute migration, temperature point comprising complicated thermodynamics and kinetics process Cloth, institutional framework are from microcosmic to the differentiation etc. of macroscopic view.Interrelated between each factor when solidification, the coupling of multiple physical field is Its feature protruded.X-ray imaging technology is almost currently the only achievable observation immiscible alloy dynamic microscopic growth in real time The laboratory facilities of behavior, however Solidification Structure is developed and is acted on by multi- scenarios methods such as temperature field, solute field, flow field, pressure fields Complicated factor influence.Since the temporal correlation of process of setting, the high temperature opacity of alloy melt, institutional framework are across scale The reasons such as differentiation carry out the real-time quantification of trans-scale in-situ to multi- scenarios method in process of setting and characterize, are always worldwide difficulty Topic.Existing inspection apparatus is usually only capable of 1-2 parameters of detection in the prior art, therefore cannot disclose the solidifying of such a complexity Gu process.

Summary of the invention

The object of the present invention is to provide optical systems associated with a kind of low-angle scattering of X-rays and x-ray imaging, to solve The prior art can not carry out the real-time quantification of trans-scale in-situ to the process of setting in Solidification Structure evolution process and characterize The problem of.

In order to solve the above-mentioned technical problem, the invention adopts the following technical scheme:

Optical system associated with a kind of low-angle scattering of X-rays and x-ray imaging is provided, comprising: with an accommodation space Vacuum chamber, the top of the vacuum chamber include a window；The line in the vacuum chamber is arranged in along X-ray incident direction to stop Device, comprising: diode, scintillator, the first lens group and the reflecting prism being sequentially stacked；It is arranged in along X-ray incident direction Low-angle scattering of X-rays detector outside the vacuum chamber, after the low-angle scattering of X-rays detector is located at line stopper End；The x-ray imaging mechanism outside the vacuum chamber is installed on along the direction vertical with X-ray incident direction, comprising: with the window The second lens group and x-ray imaging detector of mouth alignment, and the one-dimensional focusing for x-ray imaging detector focusing Motor；And the computer being connect with the x-ray imaging detector signal, for quick obtaining electric signal and reconstruction image； Wherein, X-ray after being irradiated to sample, adopted by the low-angle scattering of X-rays detector by the X-ray after small-angle scattering occurs Collection, across the sample straight-through X-ray by the line stopper be converted to visible light and by 90 degree reflect after in the X It is imaged on radial imaging detector, thus measurement while realizing low-angle scattering of X-rays and x-ray imaging.

Preferably, the diode is silicon photoelectric diode；The scintillator is by YAG: Ce material (cerium dopping yttroalumite pomegranate Stone) it is made, have the characteristics that chemical stability is high, hardness is big, high-melting-point and service life are long, for X-ray to be converted to visible light.

Preferably, the first lens group is by four convex lenses and two concavees lens are sequentially stacked, being pressed against each other is composed, tool Body is set as convex lens, concavees lens, convex lens, convex lens, convex lens, concavees lens (along optical path direction) and successively compresses in this way, Second lens group is by two convex lenses and a concavees lens are sequentially stacked, being pressed against each other is composed, be specifically configured to convex lens, Convex lens, concavees lens (from the bottom up) successively compress in this way.In the preferred embodiment, first lens group and the second lens group Structure setting is that inventor is come out by detailed Optical System Design, and the technical effect that can be optimal differentiates imaging Rate reaches 1 μm or less.The setting is not conventional technical means in the art, be realize low-angle scattering of X-rays of the present invention and X-ray at One of particularly preferred scheme as associated with Detection Techniques.

Preferably, the reflecting prism is using right-angle reflecting prism made of glass, which reflects visible light And to X-ray transparent, X-ray unabsorbed in optical path is separated with the visible light that scintillator issues.

Preferably, second lens group is installed in columnar structured made of quartz glass, the cylinder-shaped knot Structure is installed on the window by flange.

Preferably, the columnar structured outside is provided with the protective device of dust-proof anti-visible light interference.

Preferably, the line stopper is installed in the vacuum chamber by a bracket.Preferably, the bracket is by stainless Steel material is made.

Preferably, the bracket can pass through two-dimensional adjustment support platform adjusting position, the two-dimensional adjustment support platform packet Include horizontal position adjustment module and upright position adjustment module.

The one-dimensional focusing motor and two-dimensional adjustment support platform pass through the general electric machine controller of experiment centre and driving Device is driven, to carry out attitude regulation.

Preferably, diode, scintillator, the first lens group and reflecting prism are successively installed on a cylindrical lens barrel In, which further includes the sheet lead for being installed on cylindrical mirror tube rear end, for stopping straight-through X-ray to the X-ray The damage of small-angle scattering detector.Optionally, the diameter of cylindrical lens barrel is 10mm.

Preferably, the window is made of quartz glass.

As described in background technology part content, since the high temperature of the temporal correlation of process of setting, alloy melt is impermeable Bright property, institutional framework carry out the real-time quantification of trans-scale in-situ to multi- scenarios method in process of setting across reasons such as Scale Evolutions Characterization, is always global problem.However, such a low-angle scattering of X-rays provided according to the present invention and x-ray imaging join Optical system can solve opaque high-temperature metal melt using x-ray imaging and small-angle scattering joint technology in real time Relevant parameter in process of setting (such as smooth, solute field and strain field) can not Quantitative in situ in real time across the problem of size measurement.

Usually used line stopper generally uses in shanghai light source small-angle scattering line station, conventional small-angle scattering experiment Surface is stainless steel material, inside is device that lead for retractable pencil material is constituted, for stopping straight-through X-ray, avoids x-ray bombardment to small Irremediable damage is caused to detector on the detector of angle, the maximum invention of a kind of optical system provided according to the present invention Point is that X can be penetrated by providing one kind by the diode, scintillator, the first lens group and the reflecting prism that are sequentially stacked Linear light spot carries out the line stopper that high-space resolution, high dynamic range, high frame frequency are imaged, wherein diode is straight for detecting Light passing electric current, scintillator are used to be converted to X-ray visible light, and the first lens group is used to carry out visible light disperse function, reflection Prism is for reflecting visible light, thus dexterously realize that X-ray is converted into visible light using the line stopper, it in addition will also be existing Vacuum pipe transform the vacuum pipe for being equipped with clear quartz window as, detected in conjunction with the second lens group and x-ray imaging Device carries out the online survey of x-ray imaging while acquiring low-angle scattering of X-rays signal by low-angle scattering of X-rays detector Amount.

Optical system associated with a kind of low-angle scattering of X-rays and x-ray imaging provided according to the present invention, by providing one Kind improved line stopper, and being designed using a kind of structure of innovation, by low-angle scattering of X-rays detector and X-ray at As detector has been integrated into inside optical system, after x-ray bombardment is to sample, on the one hand, after small-angle scattering occurs Scattered signal is acquired by low-angle scattering of X-rays detector, on the other hand, the X-ray across sample turns by line stopper It is changed to visible light and is imaged on x-ray imaging detector after 90 degree of refractions, to realize low-angle scattering of X-rays and X-ray It is measured while imaging, to solve in Solidification Structure evolution process to the real-time quantification table of process of setting trans-scale in-situ Sign problem provides feasible technical solution.In addition, one-dimensional focusing motor and two-dimensional adjustment support platform use line station general Motor driver and electric machine controller carry out attitude regulation, it is ensured that the optical system accurately measures.

In short, optical system associated with such a low-angle scattering of X-rays provided according to the present invention and x-ray imaging, It can be used for the X-ray light spot in vacuum cavity on halved tie flow resistance lug-latch and carry out high-resolution, high dynamic and the spy of high acquisition rate It surveys, it can be achieved that detected simultaneously to low-angle scattering of X-rays and x-ray imaging, is first realization low-angle scattering of X-rays and X in the world Optical imaging system associated with radial imaging.

Detailed description of the invention

Fig. 1 is that a kind of low-angle scattering of X-rays provided according to a preferred embodiment of the present invention and x-ray imaging are combined Optical system overall structure diagram；

Fig. 2 is the detail enlarged diagram of line stopper as shown in fig. 1.

Specific embodiment

Below in conjunction with specific embodiment, the present invention will be further described.It should be understood that following embodiment is merely to illustrate this The range of invention and is not intended to limit the present invention.

As shown in Figure 1, being a kind of low-angle scattering of X-rays provided according to a preferred embodiment of the present invention and X-ray Optical system associated with imaging specifically includes that the vacuum chamber 1 with an accommodation space；It is arranged in very along 20 incident direction of X-ray Line stopper 2 in cavity 1, as shown in Fig. 2, the line stopper 2 include: the diode 21 being sequentially stacked, scintillator 22, First lens group 23 and reflecting prism 24；The low-angle scattering of X-rays outside vacuum chamber 1 is arranged in along 20 incident direction of X-ray to visit Device 3 is surveyed, positioned at the rear end of line stopper 2；Second be installed on along the direction vertical with X-ray incident direction outside vacuum chamber 1 Lens group 4 and x-ray imaging detector 5, for the one-dimensional focusing motor 6 that x-ray imaging detector 5 is focused, and and X-ray The computer (not shown go out) of 5 signal of imaging detector connection, for quick obtaining electric signal and reconstruction image.

According to the preferred embodiment, the top of vacuum chamber 1 includes a window 11, which is made of quartz glass.

According to the preferred embodiment, diode 21 uses silicon photoelectric diode, is used for real-time monitoring light intensity.

According to the preferred embodiment, scintillator 22 has high-resolution, being used for will by being made with a thickness of YAG: Ce of 20 μm Incident X-rays switch to visible light.

According to the preferred embodiment, the first lens group 23 is sequentially stacked by four convex lenses and two concavees lens, is pressed each other Tight integration forms, and is specifically configured to convex lens, concavees lens, convex lens, convex lens, convex lens, concavees lens (along optical path direction) It successively compresses in this way, for carrying out disperse function to visible light, aperture is chosen as 6mm.

According to the preferred embodiment, reflecting prism 24 be using right-angle reflecting prism made of glass, for by X-ray at As being observed on the x-ray imaging detector 5 outside vacuum chamber 1 after 90 degree of signal refractions.

According to the preferred embodiment, the second lens group 4 is sequentially stacked by two convex lenses and a concavees lens, is pressed against each other Be composed, be specifically configured to convex lens, convex lens, concavees lens (from the bottom up) and successively compress in this way, for visible light into Row convergence effect, aperture are chosen as 120mm, which is installed in columnar structured 7 made of quartz glass, This columnar structured 7 is installed on vacuum chamber 1 by flange, and flange is connect by screw with vacuum chamber 1, this columnar structured 7 Outside be equipped with organ hood 8, for prevent visible light interference and dust enter.

According to the preferred embodiment, the organ hood 8 and columnar structured 7 and its second internal lens group 4 and X Radial imaging detector 5 is linked into an integrated entity by connector, is commonly mounted on the flange for being mounted with window 11.

According to the preferred embodiment, line stopper 2 is also installed in vacuum chamber 1 by a bracket 9, and the bracket 9 is not by Rust Steel material is made.

According to the preferred embodiment, bracket 9 can pass through 10 adjusting position of two-dimensional adjustment support platform, two-dimensional adjustment support Platform 10 include horizontal position adjustment module and upright position adjustment module, with realize halved tie flow resistance lug-latch 2 in the horizontal direction and The movement of vertical direction guarantees that line stopper 2 is always positioned at the center of synchronous X-ray.

According to the preferred embodiment, line stopper 2 further include be installed on cylindrical mirror tube rear end with a thickness of 6 millimeters Sheet lead 25 avoids that straight-through X-ray is stopped to cause to damage to low-angle scattering of X-rays detector 3, which can determine according to the actual situation System.

According to the preferred embodiment, one-dimensional focusing motor 6 is carried out by the general electric machine controller of experiment centre and driver Driving, for assisting x-ray imaging detector 5 to focus.

According to the optical system that above preferred embodiment provides, its working principles are as follows:

After being irradiated to sample 30, the X-ray after small-angle scattering occurs is detected X-ray 20 by low-angle scattering of X-rays Device 3 acquire, across sample 30 straight-through X-ray by line stopper 2 be converted to visible light and by 90 degree reflect after in X-ray It is imaged on imaging detector 5, thus measurement while realizing low-angle scattering of X-rays and x-ray imaging.

Low-angle scattering of X-rays and x-ray imaging the combination optical system provided according to the present invention uses vacuum chamber internal beam Flow resistance lug-latch combined vacuum chamber outer lens group scheme, can detect incident X-ray energy range is 5keV~20keV, and line stops Device size is smaller, and scintillator detection resolution is high, and imaging detector acquisition rate is fast (100fps), the control and data of detector Acquisition interface can be write based on synchrotron radiation light source control system platform, meet the specific requirements and cloth of synchrotron radiation station Office, can be integrated with the other integration of equipments of experiment centre.

In short, optical system associated with such a low-angle scattering of X-rays provided according to the present invention and x-ray imaging, It can be used for the X-ray light spot in big vacuum cavity on halved tie flow resistance lug-latch and carry out high-resolution, high dynamic and high acquisition rate Detection, it can be achieved that detected simultaneously to low-angle scattering of X-rays and x-ray imaging, be in the world first realization low-angle scattering of X-rays and Optical imaging system associated with x-ray imaging.

Above-described, only presently preferred embodiments of the present invention, the range being not intended to limit the invention, of the invention is upper Stating embodiment can also make a variety of changes.Letter made by all claims applied according to the present invention and description Single, equivalent changes and modifications, fall within the claims of the invention patent.The not detailed description of the present invention is normal Advise technology contents.