阅读说明：本技术 一种提高铜片氧化层均匀性的氧化炉 (Oxidation furnace for improving uniformity of copper sheet oxidation layer ) 是由 许海仙 张振文 张洋 史常东 于 2021-07-30 设计创作，主要内容包括：本发明陶瓷覆铜板技术领域,公开了一种提高铜片氧化层均匀性的氧化炉,包括：炉体,包括分别设置在炉体两端的进料口和出料口,进料口和出料口处设置有密封气帘；传送带,用于输送铜片,由进料口到出料口贯穿炉体；多个热电偶,正对传送带安装在炉体内,且沿传送带输送方向依次排布；供氧管道；多个弥散气盒,沿传送带输送方向在炉体内排布,分别与供氧管道连通且在连通处设置有用于控制炉体内气体浓度、流速、流向的气阀；测温热电偶和测氧仪,设置在弥散气盒靠近传送带的一侧；保证了铜片氧化环境的稳定,使铜片表面氧化膜厚度均一。(The invention discloses an oxidation furnace for improving the uniformity of an oxide layer of a copper sheet, belonging to the technical field of ceramic copper-clad plates, and comprising: the furnace body comprises a feeding hole and a discharging hole which are respectively arranged at two ends of the furnace body, and sealing air curtains are arranged at the feeding hole and the discharging hole; the conveying belt is used for conveying copper sheets and penetrates through the furnace body from the feeding hole to the discharging hole; the thermocouples are arranged in the furnace body opposite to the conveyor belt and are sequentially arranged along the conveying direction of the conveyor belt; an oxygen supply conduit; the plurality of dispersion gas boxes are arranged in the furnace body along the conveying direction of the conveying belt, are respectively communicated with the oxygen supply pipeline, and are provided with gas valves for controlling the concentration, flow rate and flow direction of gas in the furnace body at the communicated positions; the temperature thermocouple and the oxygen meter are arranged on one side of the dispersion gas box close to the conveyor belt; the stability of the oxidation environment of the copper sheet is ensured, and the thickness of the oxide film on the surface of the copper sheet is uniform.)

1. An oxidation furnace for improving the uniformity of an oxide layer of a copper sheet is characterized by comprising:

the furnace body comprises a feeding hole and a discharging hole which are respectively arranged at two ends of the furnace body, and sealing air curtains are arranged at the feeding hole and the discharging hole;

the conveying belt is used for conveying copper sheets and penetrates through the furnace body from the feeding hole to the discharging hole;

the thermocouples are arranged in the furnace body opposite to the conveyor belt and are sequentially arranged along the conveying direction of the conveyor belt;

an oxygen supply conduit;

the plurality of dispersion gas boxes are arranged in the furnace body along the conveying direction of the conveying belt, are respectively communicated with the oxygen supply pipeline, and are provided with gas valves for controlling the concentration, flow rate and flow direction of gas in the furnace body at the communicated positions;

and the plurality of temperature measuring thermocouples and the oxygen measuring instrument are arranged on one side of the dispersion gas box close to the conveyor belt.

2. The oxidation furnace for improving the uniformity of the oxide layer of the copper sheet according to claim 1, wherein: the upper part and the lower part of each thermocouple are respectively provided with one dispersion gas box, so that the plurality of dispersion gas boxes are respectively arranged above and below the conveyor belt along the conveying direction of the conveyor belt.

3. The oxidation furnace for improving the uniformity of the oxide layer of the copper sheet according to claim 1, wherein: comprises a cooling box arranged at the discharge end of a conveyor belt.

4. The oxidation furnace for improving the uniformity of the oxide layer of the copper sheet according to claim 1, wherein: the device comprises an exhaust pipe arranged at the feed end of a conveyor belt, wherein the pipe orifice of the exhaust pipe is aligned with the feed inlet of a furnace body.

5. The oxidation furnace for improving the uniformity of the oxide layer of the copper sheet according to claim 1, wherein: a plurality of temperature zones are sequentially arranged in the furnace body along the direction from the feed inlet to the discharge outlet, and the temperature is sequentially increased; the temperature and the oxygen content in each temperature zone are respectively measured by a temperature measuring thermocouple and an oxygen measuring instrument, and the gas releasing speed of the dispersion gas box and the power of the thermocouple are controlled, so that each temperature zone has a uniform temperature field.

Technical Field

The invention relates to the technical field of ceramic copper-clad plates, in particular to an oxidation furnace for improving the uniformity of an oxide layer of a copper sheet.

Background

The copper-clad ceramic plate is composed of a copper sheet and ceramic, the copper sheet and the ceramic after oxidation are sintered together in a high-temperature environment, and then a circuit is prepared by an etching process. Compared with a PCB (printed circuit board), the ceramic copper-clad plate has the advantages of high thermal conductivity, high insulation and voltage resistance, heat resistance and the like. The copper sheet is high-purity oxygen-free copper, the Cu content exceeds 99.99%, the oxygen content is less than or equal to 5ppm, the impurity content is less than or equal to 5ppm, the electrical conductivity is 101% IACS, the thermal conductivity is about 40W/(m.K), and the thickness of the copper sheet is generally 0.3 mm. Therefore, the ceramic copper-clad plate has excellent conductivity and very strong current-carrying capacity.

The temperature, time and oxygen concentration are the key factors for determining the thickness of the oxide layer of the copper sheet. In the prior art, an open muffle oxidation furnace and a plug-in type sample injection method are adopted to oxidize pure copper sheets. The methods do not control the air flow in the oxidation furnace body, and the air flow in the oxidation furnace body depends on the temperature gradient effect and naturally flows. However, after the copper sheet is conveyed by the conveyor belt into the oxidation furnace, the copper sheet, the fixture and the conveyor belt absorb heat, so that the gas flow directions in the furnace body caused by temperature changes are slightly different in different batches of production, and further, the thickness and uniformity of the oxidation layer of the copper sheet are slightly different. In addition, the muffle heating temperature zone is used for heating three surfaces, the bottom temperature is slightly reduced, and the thickness of an oxide layer at the bottom of the inserted sheet type copper sheet is lower. Therefore, in the prior art, the oxide layer of the ceramic copper-clad plate has different thicknesses and poor uniformity, so that the ceramic copper-clad plate has low peel strength and high porosity.

Disclosure of Invention

In order to solve the technical problem, the invention provides an oxidation furnace for improving the uniformity of an oxidation layer of a copper sheet.

In order to solve the technical problems, the invention adopts the following technical scheme:

an oxidation furnace for improving the uniformity of an oxide layer of a copper sheet comprises:

the furnace body comprises a feeding hole and a discharging hole which are respectively arranged at two ends of the furnace body, and sealing air curtains are arranged at the feeding hole and the discharging hole;

the conveying belt is used for conveying copper sheets and penetrates through the furnace body from the feeding hole to the discharging hole;

the thermocouples are arranged in the furnace body opposite to the conveyor belt and are sequentially arranged along the conveying direction of the conveyor belt;

an oxygen supply conduit;

and the plurality of dispersion gas boxes are arranged in the furnace body along the conveying direction of the conveying belt, are respectively communicated with the oxygen supply pipeline and are provided with gas valves used for controlling the concentration, the flow speed and the flow direction of gas in the furnace body at the communicated positions.

And the temperature thermocouple and the oxygen meter are arranged on one side of the dispersion gas box close to the conveyor belt.

Furthermore, the upper part and the lower part of each thermocouple are respectively provided with one dispersion gas box, so that the plurality of dispersion gas boxes are respectively arranged above and below the conveyor belt along the conveying direction of the conveyor belt.

Further, the cooling box is arranged at the discharge end of the conveyor belt.

Further, the device comprises an exhaust pipe arranged at the feeding end of the conveyor belt, and the pipe orifice of the exhaust pipe is aligned with the feeding hole of the furnace body.

Furthermore, a plurality of temperature zones are sequentially arranged in the furnace body along the direction from the feed inlet to the discharge outlet, and the temperature is sequentially increased; the temperature and the oxygen content in each temperature zone are respectively measured by a temperature measuring thermocouple and an oxygen measuring instrument, and the gas releasing speed of the dispersion gas box and the power of the thermocouple are controlled, so that each temperature zone has a uniform temperature field.

Compared with the prior art, the invention has the beneficial technical effects that:

according to the invention, the copper sheet is placed and conveyed by the conveyor belt, so that the instability of heat and atmosphere in the furnace body caused by sample conveying of the clamp is avoided, the stability of the oxidation environment of the copper sheet is ensured, and the automatic production is facilitated; the upper and lower dispersion air boxes are adopted to convey air with certain concentration into the furnace body, and air curtain air seals are adopted at the inlet and the outlet of two ends of the furnace body, so that the stability of the atmosphere in the furnace body is ensured; the thickness of the oxide film on the surface of the copper sheet is uniform by controlling the flow speed and the flow direction of gas in the oxidation furnace body and ensuring a uniform temperature field in a temperature zone.

Drawings

FIG. 1 is a schematic structural view of the present invention as a whole;

FIG. 2 is a schematic structural diagram of a temperature thermocouple and an oxygen meter according to the present invention;

FIG. 3 is a schematic diagram of the construction of the dispersion box of the present invention;

FIG. 4 is a schematic structural diagram of an oxide layer thickness measuring point according to the present invention.

Detailed Description

A preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

As shown in figures 1 to 3, the oxidation furnace for improving the uniformity of the oxidation layer of the copper sheet comprises a furnace body, a conveyor belt 16, a thermocouple 17, an oxygen supply pipeline, a dispersion gas box 12, a temperature thermocouple 23, an oxygen meter 22, a cooling box 14 and an exhaust pipe 11.

The furnace body is hollow, a feed inlet 15 and a discharge outlet 13 are respectively arranged at two ends of the furnace body, the conveyor belt 16 bears copper sheets, the copper sheets enter the furnace body from the feed inlet 15, and then leave the furnace body from the discharge outlet 13 and enter the cooling box 14. The feed inlet 15 and the discharge outlet 13 are both provided with a sealing gas curtain, so that the gas in the furnace body is prevented from diffusing outwards quickly, and the stability of the atmosphere in the furnace body is ensured.

The thermocouple 17 has a plurality of, and the direction of arranging of thermocouple 17 is the same with the extending direction of conveyer belt 16, can heat the gas in the furnace body evenly, makes the furnace body have the even temperature field under more approaching ideal condition.

The dispersion gas box is provided with air holes; the dispersion gas boxes 12 are provided with a plurality of dispersion gas boxes 12, the arrangement form of the dispersion gas boxes is the same as that of the thermocouples 17, the dispersion gas boxes 12 are also arranged along the extension direction of the conveyor belt 16 and uniformly release gas into the furnace body, each dispersion gas box 12 is respectively communicated with an oxygen supply pipeline, the communication position is controlled by one gas valve 24, and the gas valves 24 can control the flow speed and the flow direction of the gas released into the furnace body by the dispersion gas boxes 12; the oxygen supply pipeline is communicated with an air source.

The temperature thermocouple 23 and the oxygen meter 22 are arranged beside each dispersion gas box 12, the temperature thermocouple 23 is used for measuring the temperature around the temperature thermocouple, and the oxygen meter 22 is used for measuring the oxygen content around the temperature thermocouple 23; when the temperature beside the diffusion gas box deviates from the set temperature, the power of the thermocouple 17 corresponding to the area or the speed of the gas released by the dispersion gas box 12 can be changed; when the oxygen content is insufficient, the rate of gas release from the dispersion gas box 12 can be increased while slightly increasing the power of the thermocouple 17 to maintain the temperature within the set temperature range.

The space around the conveyor belt 16 in the furnace body is divided into a plurality of temperature zones along the conveying direction of the conveyor belt 16, and the number of the temperature zones is set according to the process requirement. Each temperature zone is provided with a set of control devices, and each set of control device comprises at least one temperature thermocouple 23, at least one oxygen meter 22, at least one dispersion gas box 12 and at least one thermocouple 17. If the temperature zones are more and the size of each temperature zone is very small, the control device in the temperature zone can only comprise a temperature thermocouple 23, an oxygen meter 22, a dispersion gas box 12 and a thermocouple 17, because the temperature zone is very small at the moment, the temperature difference of each point in the temperature zone is very small, the single-point measurement value obtained by the temperature thermocouple 23 can represent the temperature of the whole temperature zone, the oxygen meter 22 is similar, and the uniformity control of the gas in the temperature zone can be realized by the single dispersion gas box 12; when the temperature zones are few and the size of each temperature zone is large, the control device of each temperature zone should comprise more temperature thermocouples 23, oxygen measuring instruments 22, dispersion gas boxes 12 and thermocouples 17, respectively perform temperature measurement and oxygen content measurement on multiple points, obtain the temperature distribution condition of the whole temperature zone through an algorithm, and control the dispersion gas boxes 12 and the thermocouples 17 to ensure that the temperature and the gas in the temperature zones are uniformly distributed, for example, when the temperature of a certain local part in the temperature zone is too high, the local temperature can be reduced by measures of reducing the power of the thermocouples nearby and increasing the gas feeding speed of the dispersion gas boxes to the local part.

The dispersion gas box 12, the thermocouple 17, the temperature thermocouple 23 and the oxygen meter 22 are all arranged along the conveying belt, when the temperature is divided more, the size of each temperature zone is small, and the dispersion gas box 12, the thermocouple 17, the temperature thermocouple 23 and the oxygen meter 22 in the temperature zone are naturally few; when the temperature division is less, the size of each temperature zone is large, and the dispersion gas box 12, the thermocouple 17, the temperature thermocouple 23 and the oxygen meter 22 in the temperature zone are naturally more; can be quickly adapted to different processes.

The dispersion gas boxes 12 are arranged above and below the thermocouple 17, so that the uniformity of gas in the furnace body can be improved.

The temperature of the feeding hole is lower, and the temperature of the discharging hole is lower, so that the gas in the furnace body is blown out through the feeding hole 15, and the exhaust pipe 11 is aligned with the feeding hole 15 for exhausting.

The specific operation of the invention in use is as follows:

1. selecting a copper sheet with the thickness of 0.3mm for oxidation;

2. opening the power supply and the air supply of the oxidation furnace, setting 5 temperature zones, wherein the temperature is respectively from the feed inlet to the discharge outlet: the air flow rate of the dispersion gas box from the feed port to the discharge port is respectively as follows at 150 ℃, 180 ℃, 200 ℃, 230 ℃ and 250 ℃: 2L/min, 2.5L/min, 3L/min, 4L/min, 5L/min;

3. after each temperature zone in the furnace body reaches the designated temperature, opening a conveyer belt switch, setting the speed to be 100mm/min, operating for 30min, and keeping each temperature zone to have a uniform temperature field in the period;

4. horizontally placing a plurality of copper sheets with the thickness of 0.3mm on a conveyor belt, wherein the distance between the copper sheets is more than 1 cm;

5. and (3) detecting the thickness of the oxidized copper sheet and the performance of the prepared ceramic copper-clad plate product, thereby ensuring that the ceramic copper-clad plate has excellent peel strength and porosity.

The copper sheet processed by the present invention and the copper sheet obtained by inserting the sample were subjected to peel strength test and porosity test, and the thickness of the oxide layer was measured at the point A, B, C, D, E in fig. 4, respectively, to obtain the following results.

As can be seen from the table above, the copper sheet oxide layer processed by the device of the invention has uniform thickness, the peeling strength of the ceramic copper-clad plate is improved to a certain extent, and the porosity is reduced to 0.1%.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.