阅读说明：本技术 一种基于声表面波的微构件非接触式操控装置及方法 (Micro-component non-contact control device and method based on surface acoustic waves ) 是由 汪延成 盘何旻 梅德庆 许诚瑶 翁婉玉 于 2021-07-28 设计创作，主要内容包括：本发明公开了一种基于声表面波的微构件非接触式操控装置及方法。装置包括铌酸锂晶片、波导基底、操控腔室和八个叉指电极,操控腔室的底面粘贴有波导基底,粘贴有波导基底的操控腔室固定安装在铌酸锂晶片的中心,微构件放置在操控腔室中,铌酸锂晶片上沿着操控腔室侧面依次固定安装有八个叉指电极,每一个叉指电极均与外部的信号发生器的输出通道相连,每一个叉指电极与其下方的铌酸锂晶片均构成一个声表面波叉指换能器。方法用于实施装置的非接触式操控。本发明能实现多种模式下的微构件可控非接触平移、组装以及旋转的精准调控,具有操作简便、可控性强、设备简单、非接触以及精度高等特点。(The invention discloses a micro-component non-contact control device and method based on surface acoustic waves. The device comprises a lithium niobate wafer, a waveguide substrate, a control chamber and eight interdigital electrodes, wherein the waveguide substrate is pasted on the bottom surface of the control chamber, the control chamber pasted with the waveguide substrate is fixedly arranged at the center of the lithium niobate wafer, a micro-component is placed in the control chamber, the eight interdigital electrodes are sequentially and fixedly arranged on the lithium niobate wafer along the side surface of the control chamber, each interdigital electrode is connected with an output channel of an external signal generator, and each interdigital electrode and the lithium niobate wafer below the interdigital electrode form a surface acoustic wave interdigital transducer. The method is used for implementing contactless manipulation of a device. The invention can realize the controllable non-contact translation, assembly and accurate regulation and control of rotation of the micro-component in various modes, and has the characteristics of simple and convenient operation, strong controllability, simple equipment, non-contact, high precision and the like.)

1. The utility model provides a little component non-contact controlling means based on surface acoustic wave which characterized in that: the device comprises a lithium niobate wafer (1), a control chamber (2), a waveguide substrate (3) and eight interdigital electrodes;

the bottom surface of the control chamber (2) is adhered with a waveguide substrate (3), the control chamber (2) adhered with the waveguide substrate (3) is fixedly arranged at the center of the lithium niobate wafer (1), the micro-component is arranged in the control chamber (2), eight interdigital electrodes are sequentially and fixedly arranged on the lithium niobate wafer (1) along the side surface of the control chamber (2), the electrode open ends of the eight interdigital electrodes are respectively arranged opposite to each side surface of the control chamber (2), each interdigital electrode is connected with an output channel of an external signal generator, and each interdigital electrode and the lithium niobate wafer (1) below the interdigital electrode form a surface acoustic wave interdigital transducer; after an external signal generator applies an electric signal, the direction of each surface acoustic wave interdigital transducer for emitting surface acoustic waves (15) is distributed along the radial direction of the lithium niobate wafer (1), and the surface acoustic waves (15) drive the micro-component in the control chamber (2) to perform non-contact translation or rotation of the micro-component, so that the assembly of the micro-component is realized.

2. A surface acoustic wave-based micro-component non-contact manipulation device as claimed in claim 1, wherein:

the control chamber (2) is a regular octagonal chamber, and the electrode open ends of the eight interdigital electrodes are respectively opposite to eight side surfaces of the control chamber (2); the waveguide substrate (3) at the bottom of the manipulation chamber (2) is also in the shape of a regular octagon and has the same size as the manipulation chamber (2).

3. A surface acoustic wave-based micro-component non-contact manipulation device as claimed in claim 1, wherein: the signal generator applies an electric signal with required frequency and amplitude to the interdigital electrode, the current interdigital electrode is used as a surface acoustic wave source to send a surface acoustic wave (15) with corresponding amplitude and frequency to the inside of the control chamber (2), a thrust along the sound wave propagation direction is applied to a micro-component in the control chamber (2) within the control range of the current interdigital electrode, and the micro-component is captured to a sound pressure node and moves along the sound wave propagation direction.

4. A saw-based micro-component non-contact translational and rotational manipulation device as claimed in claim 1, wherein: the eight interdigital electrodes are respectively an interdigital electrode (4), an interdigital electrode (5), an interdigital electrode (6), an interdigital electrode (7), an interdigital electrode (8), an interdigital electrode (9), an interdigital electrode (10) and an interdigital electrode (11), and are uniformly arranged on the side surface of the control chamber (2) in the anticlockwise direction according to the sequence of the interdigital electrode (4) to the interdigital electrode (11).

5. A surface acoustic wave-based micro-component non-contact manipulation method of a micro-component non-contact manipulation device according to any one of claims 1 to 4, comprising the steps of:

step 1: firstly, adding a magnetic functional medium into a prepolymer solution, manufacturing a magnetic micro-component by a 3D printing technology, wherein the micro-component comprises a head micro-component (12), a body micro-component (13) and a tail micro-component (14), then sequentially placing the head micro-component (12), the body micro-component (13) and the tail micro-component (14) into a control chamber (2), and then injecting deionized water into the control chamber (2) for transmitting sound energy;

step 2: starting a signal generator connected with the third interdigital electrode (6), applying an electric signal to the third interdigital electrode (6) to enable a surface acoustic wave interdigital transducer corresponding to the third interdigital electrode (6) to generate a surface acoustic wave (15) on the lithium niobate wafer (1) and excite the surface acoustic wave interdigital transducer into the control chamber (2), a three-number surface acoustic wave coverage area is formed in the manipulation chamber (2) and is in the direction from the side boundary of the manipulation chamber (2) where the three-number interdigital electrode (6) is located to the center of the manipulation chamber (2), a body micro-component (13) and a tail micro-component (14) which are located in the three-number surface acoustic wave coverage area move along the propagation direction of the acoustic wave after receiving the thrust of the acoustic wave, and finally move to a sound pressure node of the three-number surface acoustic wave coverage area and are located at the center of the manipulation chamber (2), the central axes of the body micro-component (13) and the tail micro-component (14) are aligned with the central axis of the control chamber (2) under the action of the sound pressure node;

and step 3: the signal generator connected with the third interdigital electrode (6) is closed, the signal generator connected with the seventh interdigital electrode (10) is started, the head micro-component (12) positioned in the seventh surface acoustic wave coverage area moves along the sound wave propagation direction after being subjected to sound wave thrust, and finally moves to the sound pressure node of the seventh surface acoustic wave coverage area and is positioned at the center of the control chamber (2), and the central axis of the head micro-component (12) is aligned with the central axes of the body part (13) and the tail part (14) moved in the step 2;

the signal generator connected with the seventh interdigital electrode (10) is closed, the signal generator connected with the first interdigital electrode (4) is started, the head micro component (12) positioned in the first surface acoustic wave coverage area moves along the sound wave propagation direction after being subjected to sound wave thrust, and finally the head micro component moves to a sound pressure node of the first surface acoustic wave coverage area to be in micro assembly with the body micro component (13);

closing a signal generator connected with the first interdigital electrode (4), starting the signal generator connected with the fifth interdigital electrode (8), moving a tail micro component (14) positioned in a fifth surface acoustic wave coverage area along the sound wave propagation direction after receiving sound wave thrust, and finally moving the tail micro component to a sound pressure node of the fifth surface acoustic wave coverage area to finish micro assembly with a body micro component (13), thereby finishing non-contact translation and assembly of the micro component;

and 4, step 4: the micro-component which completes translation and micro-assembly realizes rotation regulation and control through the opening and closing combination of different interdigital electrodes.

6. The surface acoustic wave-based micro-component non-contact type translation and rotation control method according to claim 5, wherein the open and close combination of different interdigital electrodes in step 4 realizes pose rotation control of the micro-component by 45 °, 90 °, 135 ° and 180 °.

Technical Field

The invention relates to a micro-component non-contact control device and method in the field of micro-mechanical components, in particular to a micro-component non-contact control device and method based on surface acoustic waves.

Background

Micromechanical components with dimensions in the millimeter and micrometer range have become one of the hot spots in the research fields of drug delivery, chemical analysis, and minimally invasive surgery in recent years due to their unique application scenarios in the medical and biochemical fields. The micro-components manufactured by the 3D printing process have small enough size and biocompatible surface, have wide application in biomedicine, can realize accurate cargo transportation by loading drug particles, biological reagents, living cells and the like, can be used as a small-sized surgical tool for treating diseases in a surgical operation, and can detect metal ions and other substances in organisms to make early diagnosis of the diseases.

The driving mechanism is the basis on which the micro-component can be applied. On the millimeter scale as well as on the micrometer scale, the movement of the micro-component is influenced by two main factors, namely the low reynolds number condition and the brownian motion of the fluid medium, so that the movement of the micro-component has to take the environmental effect into consideration, and therefore, the micro-component needs to be provided with enough power to overcome the environmental resistance. At present, scholars at home and abroad mainly drive the micro-component by inducing chemical reaction or external fields such as an electric field, a magnetic field, an optical field and the like, but the method needs the chemical property, the electrical property, the magnetic property, the optical property and the like required by the chemical reaction in the micro-component. However, in the biomedical field, cells and drugs rarely have uniform chemical properties in most cases, and do not have obvious photoelectromagnetic properties, and high-intensity optical and electromagnetic fields are easy to burn biological cells so as to influence the biological activity of the biological cells.

The surface acoustic wave driving technology is a non-contact type manipulation technology, and an ultrasonic energy field is formed in a space, so that an object in a manipulation area moves to the propagation direction of the ultrasonic energy field under the action of acoustic radiation force and is kept stable finally at the boundary of the action area. Because the acoustic radiation force always points to the direction of reducing the pressure gradient, and the distribution rule of the pressure gradient field is determined by the ultrasonic energy field, the precise linear motion and the rotary motion of the micro-size object can be realized, and no specific requirements are required on the shape and the physical properties of the manipulated object, so that the micro-component non-contact precise driving and controlling device is very suitable for the non-contact precise driving and controlling of the micro-component.

Disclosure of Invention

In order to solve the problem of accurate driving of a micro-component, the invention provides a micro-component non-contact control device and method based on surface acoustic waves by utilizing the acting force of the surface acoustic waves on a micro-size object. High-frequency surface acoustic waves form a sound pressure field in a certain range of the control chamber, so that pressure gradient force is generated to push the micro-component located in the action area to move, translation and micro-assembly of the micro-component are completed, the assembled micro-component is controlled to be opened and combined by adjusting and controlling interdigital transducers which are oppositely arranged, and sound pressure fields in different directions are formed, so that rotation control of the micro-component is completed.

The technical scheme adopted by the invention for solving the technical problems is as follows:

micro-component non-contact control device based on surface acoustic waves

The device comprises a lithium niobate wafer, a control chamber, a waveguide substrate and eight interdigital electrodes;

the bottom surface of the control cavity is adhered with a waveguide substrate, the control cavity adhered with the waveguide substrate is fixedly arranged at the center of the lithium niobate wafer, the micro-component is arranged in the control cavity, eight interdigital electrodes are fixedly arranged on the lithium niobate wafer along the side surface of the control cavity in sequence, the electrode opening ends of the eight interdigital electrodes are respectively arranged right opposite to each side surface of the control cavity, each interdigital electrode is connected with an output channel of an external signal generator, and each interdigital electrode and the lithium niobate wafer below the interdigital electrode form a surface acoustic wave interdigital transducer; after an external signal generator applies an electric signal, each surface acoustic wave interdigital transducer emits surface acoustic waves which are distributed along the radial direction of the lithium niobate wafer, and the surface acoustic waves drive the micro-component in the control chamber to perform non-contact translation or rotation of the micro-component, so that the assembly of the micro-component is realized.

The control chamber is a regular octagonal chamber, and the electrode open ends of the eight interdigital electrodes are respectively opposite to eight side surfaces of the control chamber; the waveguide substrate at the bottom of the control chamber is also in a regular octagon shape and has the same size as the control chamber.

The signal generator applies an electric signal with required frequency and amplitude to the interdigital electrode, the current interdigital electrode is used as a surface acoustic wave source to send surface acoustic waves with corresponding amplitude and frequency to the inside of the control chamber, a thrust force along the sound wave propagation direction is applied to a micro-component in the control chamber within the control range of the current interdigital electrode, and the micro-component is captured to a sound pressure node and moves along the sound wave propagation direction.

The eight interdigital electrodes are respectively a first interdigital electrode, a second interdigital electrode, a third interdigital electrode, a fourth interdigital electrode, a fifth interdigital electrode, a sixth interdigital electrode, a seventh interdigital electrode and an eighth interdigital electrode, and are uniformly arranged on the side surface of the control chamber in the anticlockwise direction according to the sequence of the first interdigital electrode and the eighth interdigital electrode.

Surface acoustic wave-based micro-component non-contact control method

The method comprises the following steps:

step 1: firstly, adding a magnetic functional medium into a prepolymer solution, manufacturing a magnetic micro-component by a 3D printing technology, wherein the micro-component comprises a head micro-component, a body micro-component and a tail micro-component, then sequentially placing the head micro-component, the body micro-component and the tail micro-component into a control chamber, and then injecting deionized water into the control chamber for transmitting sound energy;

step 2: starting a signal generator connected with the third interdigital electrode, applying an electric signal to the third interdigital electrode to enable a surface acoustic wave interdigital transducer corresponding to the third interdigital electrode to generate a surface acoustic wave on a lithium niobate wafer and excite the surface acoustic wave interdigital transducer into a control chamber, forming a third surface acoustic wave coverage area in the control chamber, wherein the direction of the third surface acoustic wave coverage area is from the side boundary of the control chamber where the third interdigital electrode is located to the center of the control chamber, moving a body micro-component and a tail micro-component which are located in the third surface acoustic wave coverage area along the sound wave propagation direction after being subjected to sound wave thrust, finally moving the body micro-component and the tail micro-component to a sound pressure node of the third surface acoustic wave coverage area and locating the sound pressure node at the center of the control chamber, and enabling the central axes of the body micro-component and the tail micro-component to be aligned with the central axis of the control chamber under the action of the sound pressure node;

and step 3: closing the signal generator connected with the third interdigital electrode, starting the signal generator connected with the seventh interdigital electrode, moving the head micro-component positioned in the seventh surface acoustic wave coverage area along the acoustic wave propagation direction after receiving the acoustic wave thrust, finally moving the head micro-component to the acoustic pressure node of the seventh surface acoustic wave coverage area and positioning the head micro-component at the center of the control chamber, and aligning the central axis of the head micro-component with the central axes of the body part and the tail part moved in the step 2;

closing the signal generator connected with the seventh interdigital electrode, starting the signal generator connected with the first interdigital electrode, moving the head micro-component positioned in the first surface acoustic wave coverage area along the sound wave propagation direction after receiving sound wave thrust, and finally moving the head micro-component to a sound pressure node of the first surface acoustic wave coverage area to finish micro-assembly with the body micro-component;

closing the signal generator connected with the first interdigital electrode, starting the signal generator connected with the fifth interdigital electrode, moving the tail micro-component positioned in the fifth surface acoustic wave coverage area along the sound wave propagation direction after receiving sound wave thrust, and finally moving the tail micro-component to the sound pressure node of the fifth surface acoustic wave coverage area to finish micro-assembly with the body micro-component, thereby finishing non-contact translation and assembly of the micro-component;

and 4, step 4: the micro-component which completes translation and micro-assembly realizes rotation regulation and control through the opening and closing combination of different interdigital electrodes.

And 4, the opening and closing combination of different interdigital electrodes in the step 4 realizes the posture rotation regulation and control of the micro-component at 45 degrees, 90 degrees, 135 degrees and 180 degrees.

The invention has the beneficial effects that:

1) the interdigital transducer array generates different action areas and action directions of surface acoustic wave fields in different opening modes, so that accurate translation and rotation control of a micro-component in a control cavity can be realized;

2) the device is simple, the operation is simple and convenient, the micro-component can be accurately controlled in a non-contact way, and no specific requirement is made on the physical and chemical properties of the controlled object;

3) the invention has the characteristics of easy combination with other microfluidic technologies and low energy consumption.

In summary, the invention can realize the non-contact part accurate assembly and the rotation accurate control of the micro-component, and has the characteristics of simple and convenient operation, strong controllability, simple equipment, non-contact, high precision and the like.

Drawings

FIG. 1 is a schematic diagram of the apparatus of the present invention;

FIG. 2 is a top view of the device structure of the present invention;

FIG. 3 is a schematic diagram of an embodiment of an interdigital electrode is shown in an interdigital electrode;

FIG. 4 is a schematic diagram of an embodiment of actuating a seventh interdigital electrode to drive a head micro-member to translate and align with the center line of the remaining micro-members;

FIG. 5 is a schematic diagram of an embodiment of starting a first interdigital electrode to drive micro-assembly of a head micro-member and a body micro-member;

FIG. 6 is a schematic diagram of an embodiment of an exemplary method for initiating micro-assembly of a trailing micro-member with a body micro-member by a number five interdigitated electrodes;

FIG. 7 is a schematic illustration of a completed micro-component assembly process of an embodiment;

FIG. 8 is a schematic diagram of an embodiment of starting the interdigital electrodes No. four and No. eight to realize 45 ° precise rotation of the assembled microstructure;

FIG. 9 is a schematic diagram of the assembled micro-component 90 DEG precision rotation by starting the interdigital electrodes I and V according to the embodiment;

FIG. 10 is a schematic diagram of an exemplary embodiment of starting the interdigital electrodes II and VI to achieve a 135 ° precision rotation of the assembled microstructure;

fig. 11 is a schematic diagram of the embodiment that the interdigital electrodes III and VII are started to realize the 180-degree precise rotation of the assembled microstructure.

In the figure: 1. the device comprises a lithium niobate wafer, 2, a control chamber, 3, a waveguide substrate, 4, a first interdigital electrode, 5, a second interdigital electrode, 6, a third interdigital electrode, 7, a fourth interdigital electrode, 8, a fifth interdigital electrode, 9, a sixth interdigital electrode, 10, a seventh interdigital electrode, 11, an eighth interdigital electrode, 12, a head micro-component, 13, a body micro-component, 14, a tail micro-component, 15 and a surface acoustic wave.

Detailed Description

The present invention will be further described with reference to the following drawings and examples, but the embodiments of the present invention are not limited thereto.

As shown in fig. 1 and 2, the apparatus includes a lithium niobate wafer 1, a manipulation chamber 2, a waveguide substrate 3, and eight interdigital electrodes;

the bottom surface of the control chamber 2 is adhered with a waveguide substrate 3, the control chamber 2 adhered with the waveguide substrate 3 is fixedly arranged at the center of the lithium niobate wafer 1, namely the waveguide substrate 3 is adhered at the center of the lithium niobate wafer 1, the micro-component is made to have magnetism by a 3D printing manufacturing process and is arranged in the control chamber 2, eight interdigital electrodes are fixedly arranged on the lithium niobate wafer 1 along the side surface of the control chamber 2 in sequence, the electrode opening ends of the eight interdigital electrodes are respectively arranged opposite to all side surfaces of the control chamber 2, each interdigital electrode is connected with an output channel of an external signal generator, and each interdigital electrode and the lithium niobate wafer 1 below the interdigital electrode form a surface acoustic wave interdigital transducer; after an external signal generator applies an electric signal, the direction of each surface acoustic wave interdigital transducer emitting the surface acoustic waves 15 is distributed along the radial direction of the lithium niobate wafer 1, and the surface acoustic waves 15 drive the micro-component in the control chamber 2 to perform non-contact translation or rotation of the micro-component, so that the assembly of the micro-component is realized.

The control chamber 2 is a regular octagonal chamber, and the electrode open ends of the eight interdigital electrodes are respectively opposite to eight side surfaces of the control chamber 2; the waveguide substrate 3 at the bottom of the manipulation chamber 2 is also in the shape of a regular octagon and has the same size as the manipulation chamber 2, and the waveguide substrate 3 is used for conducting the surface acoustic wave 15 and absorbing a part of the acoustic energy, so that the manipulation range of a single interdigital electrode is limited from the corresponding side surface of the manipulation chamber 2 to the center of the manipulation chamber 2.

The signal generator applies an electric signal with required frequency and amplitude to the interdigital electrode, the current interdigital electrode is used as a surface acoustic wave source to send a surface acoustic wave 15 with corresponding amplitude and frequency to the inside of the control chamber 2, a thrust along the sound wave propagation direction is applied to a micro-component in the control range of the current interdigital electrode in the control chamber 2, and the micro-component is captured to a sound pressure node and moves along the sound wave propagation direction.

The eight interdigital electrodes are respectively a first interdigital electrode 4, a second interdigital electrode 5, a third interdigital electrode 6, a fourth interdigital electrode 7, a fifth interdigital electrode 8, a sixth interdigital electrode 9, a seventh interdigital electrode 10 and an eighth interdigital electrode 11, and are uniformly arranged on the side surface of the control chamber 2 in the counterclockwise direction according to the sequence of the first interdigital electrode 4 to the eighth interdigital electrode 11.

The method comprises the following steps:

step 1: firstly, adding a magnetic functional medium into a prepolymer solution, manufacturing a magnetic micro-component for subsequent micro-component assembly by a 3D printing technology, wherein the micro-component comprises a head micro-component 12, a body micro-component 13 and a tail micro-component 14, then sequentially placing the head micro-component 12, the body micro-component 13 and the tail micro-component 14 at positions close to the seven-numbered interdigital electrode 10, the three-numbered interdigital electrode 6 and a position between the three-numbered interdigital electrode 6 and the four-numbered interdigital electrode 7 in a control chamber 2 respectively, and then injecting deionized water into the control chamber 2 for transmitting acoustic energy;

step 2: as shown in fig. 3, a signal generator connected to the interdigital electrode No. three 6 is started, an electrical signal is applied to the interdigital electrode No. three 6, so that the surface acoustic wave interdigital transducer corresponding to the interdigital electrode No. three 6 generates a surface acoustic wave 15 on the lithium niobate wafer 1 and excites the surface acoustic wave into the manipulation chamber 2, a surface acoustic wave coverage area with a direction from the side boundary No. three of the manipulation chamber 2 where the interdigital electrode No. three 6 is located to the center of the manipulation chamber 2 is formed in the manipulation chamber 2, the body micro-component 13 and the tail micro-component 14 located in the surface acoustic wave coverage area move along the acoustic wave propagation direction after receiving the acoustic wave thrust, and finally move to the sound pressure node of the surface acoustic wave coverage area No. three and located at the center of the manipulation chamber 2, wherein the acoustic wave has energy loss during the transmission, and the energy reaches the critical force sound field for pushing the micro-component when propagating to the center of the manipulation chamber 10, and the center position of the manipulation chamber 10 is the valley position of the sound pressure node of the surface acoustic wave coverage area. The critical position can be controlled by regulating the weight of the micro-component in the actual implementation process. The central axes of the body micro-component 13 and the tail micro-component 14 are aligned with the central axis of the control chamber 2 under the action of the stripe-shaped sound pressure node;

and step 3: as shown in fig. 4, the signal generator connected with the interdigital electrode No. three 6 is turned off, the signal generator connected with the interdigital electrode No. seven 10 is turned on, the head micro-component 12 located in the surface acoustic wave coverage area No. seven moves along the propagation direction of the acoustic wave after being subjected to the acoustic wave thrust, and finally moves to the sound pressure node of the surface acoustic wave coverage area No. seven and is located at the center of the manipulation chamber 2, and the central axis of the head micro-component 12 is aligned with the central axes of the body part 13 and the tail part 14 moving in step 2;

as shown in fig. 5, the signal generator connected to the seventh interdigital electrode 10 is turned off, the signal generator connected to the first interdigital electrode 4 is turned on, the head micro-component 12 located in the first surface acoustic wave coverage area moves along the propagation direction of the acoustic wave after being pushed by the acoustic wave, and finally moves to the sound pressure node of the first surface acoustic wave coverage area, and the micro-component 13 completes micro-assembly with the attractive force generated by the magnetism of the head micro-component 12;

as shown in fig. 6, the signal generator connected to the first interdigital electrode 4 is turned off, the signal generator connected to the fifth interdigital electrode 8 is turned on, the tail micro-component 14 located in the coverage area of the fifth surface acoustic wave moves along the propagation direction of the acoustic wave after being pushed by the acoustic wave, and finally moves to the sound pressure node of the coverage area of the fifth surface acoustic wave, and the micro-component 13 completes the micro-assembly by the attraction force generated by the magnetism of the tail micro-component 14, so that the non-contact translation and assembly of the micro-component are completed, as shown in fig. 7;

and 4, step 4: the micro-component which completes translation and micro-assembly realizes rotation regulation and control through the opening and closing combination of different interdigital electrodes. By starting a signal generator connected with the four interdigital electrodes 7 and the eight interdigital electrodes 11 which are oppositely arranged, the corresponding interdigital transducers generate surface acoustic waves on the lithium niobate wafer 1 and excite the surface acoustic waves into the control chamber 2 to form a sound pressure field which is obliquely distributed at 45 degrees, so that the micro-component is driven to rotate to the position where the sound potential energy in the sound pressure field is the lowest, and 45-degree anticlockwise rotation is completed, as shown in fig. 8.

The signal generator is started in sequence to start the first interdigital electrode 4, the fifth interdigital electrode 8, the second interdigital electrode 5, the sixth interdigital electrode 9, the third interdigital electrode 6 and the seventh interdigital electrode 10 which are oppositely arranged, so that the corresponding interdigital transducers generate surface acoustic waves on the lithium niobate wafer 1 and excite the surface acoustic waves into the control chamber 2, sound pressure fields distributed in different directions are formed respectively, and the anticlockwise rotation of 90 degrees, 135 degrees and 180 degrees of the assembled micro-component is realized in sequence, as shown in fig. 9, fig. 10 and fig. 11, and therefore the non-contact accurate translation and rotation control of the micro-component in a plane can be realized based on the principle.

The embodiment shows that the invention realizes the micro-component non-contact translation and rotation control device and method based on the surface acoustic wave, and the device and the method have the advantages of simple operation, low energy consumption and wide application range.