阅读说明：本技术 一种将石墨烯悬浮膜制成电容的夹具 (Clamp for manufacturing capacitor from graphene suspension film ) 是由 李隆 杨霖 侯成宇 于 2021-06-21 设计创作，主要内容包括：一种将石墨烯悬浮膜制成电容的夹具,本发明涉及一种将石墨烯悬浮膜制成电容的夹具,为解决现有的电容两极板间距无法尽可能的小会影响所制作的电容的容值大小；石墨烯悬浮膜和引出线的接触电阻大会影响电容变化时电荷的输出；引出线的厚度会增加电容两极板之间距离,且不能保证两极板平行的问题,上端盖与下端盖固定安装,负极板安装在下端盖内,附着有石墨烯悬浮膜的硅片安装在下端盖的第一凹槽内,且石墨烯悬浮膜一侧朝向第一凹槽的底面,薄片安装在石墨烯悬浮膜与第一凹槽底面之间,正极引出线与石墨烯悬浮膜连接,在硅片和上端盖之间安装有柔性材料,本夹具用于在石墨烯悬浮膜制成电容正极板时对其进行固定,属于夹具领域。(The invention discloses a clamp for manufacturing a capacitor from a graphene suspension film, relates to a clamp for manufacturing a capacitor from a graphene suspension film, and aims to solve the problem that the capacitance value of the manufactured capacitor is influenced because the distance between two polar plates of the conventional capacitor cannot be as small as possible; the contact resistance of the graphene suspension film and the outgoing line greatly influences the output of charges when the capacitance changes; the thickness of lead-out wire can increase the distance between the electric capacity bipolar plate, and can not guarantee the parallel problem of bipolar plate, upper end cover and lower end cover fixed mounting, the negative plate is installed in the lower end cover, the silicon chip that has attached to graphite alkene suspension membrane is installed in the first recess of lower end cover, and graphite alkene suspension membrane one side towards the bottom surface of first recess, the thin slice is installed between graphite alkene suspension membrane and first recess bottom surface, anodal lead-out wire is connected with graphite alkene suspension membrane, install flexible material between silicon chip and upper end cover, this anchor clamps are used for fixing it when graphite alkene suspension membrane becomes electric capacity positive plate, belong to the anchor clamps field.)

1. The utility model provides a make anchor clamps of electric capacity with graphite alkene suspension film which characterized in that: the device comprises an upper end cover (1), a lower end cover (2), a negative plate (3), a sheet (4) and a positive lead-out wire (A);

the upper end cover (1) and the lower end cover (2) are fixedly installed, the negative plate (3) is installed in the lower end cover (2), the upper end cover (1) comprises a plate body (1-1) and a boss (1-2), the boss (1-2) is machined in the center of the lower surface of the plate body (1-1), a first through hole (1-1-1) is machined in the center of the plate body (1-1), the lower end cover (2) is a cylinder, a first groove (2-1) is machined in the center of the upper surface of the cylinder, a second through hole (2-2) and two first positive electrode holes (2-3) are machined in the lower surface of the cylinder, the boss (1-2) of the upper end cover (1) is installed in the first groove (2-1) of the lower end cover (2), and a graphene suspension film (7) is attached to a silicon wafer (5), the silicon wafer (5) attached with the graphene suspension film (7) is arranged inside a first groove (2-1) of the lower end cover (2), the silicon wafer (5) attached with the graphene suspension film (7) is positioned between a boss (1-2) of the upper end cover (1) and the inner bottom end face of the first groove (2-1), one side of the silicon wafer (5) attached with the graphene suspension film (7) faces the bottom end face of the first groove (2-1) in the lower end cover (2), a second groove (4-1) and two second positive electrode holes (4-2) are processed on the upper surface of the thin sheet (4), the second groove (4-1) is positioned at the center of the thin sheet (4), the two second positive electrode holes (4-2) are positioned at one side of the second groove (4-1), and the thin sheet (4) is fixedly arranged on the inner bottom end face of the first groove (2-1) of the lower end cover (2), and the sheet (4) is positioned between the graphene suspension film (7) and the inner bottom end face of the first groove (2-1), the upper surface of the sheet (4) is opposite to the graphene suspension film (7), the lower surface of the sheet (4) is superposed with the inner bottom end face of the first groove (2-1), one end of each positive lead wire (A) penetrates through each first positive hole (2-3) on the lower surface of the lower end cover (2) and is fixedly connected with the graphene suspension film (7), each positive lead wire (A) is perpendicular to the graphene suspension film (7), the other end of each positive lead wire (A) is exposed out of the lower surface of the lower end cover (2) by 10mm, and a flexible material (6) is arranged between the silicon wafer (5) and the upper end cover (1).

2. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: each positive lead-out wire (A) is connected with the graphene suspension film (7) by adopting flexible conductive adhesive.

3. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the upper end cover (1) is circular, the diameter of the boss (1-2) is smaller than that of the plate body (1-1), and the height of the plate body (1-1) is smaller than that of the boss (1-2).

4. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 2, wherein: a plurality of first threaded through holes (1-1-2) are processed on the upper surface of a plate body (1-1) of the upper end cover (1), and the first threaded through holes (1-1-2) are distributed on the outer sides of the first through holes (1-1-1) in an annular mode.

5. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: a plurality of second threaded through holes (2-4) are annularly processed on the upper surface of the cylinder of the lower end cover (2), and a plurality of vent holes (2-5) are processed on the lower surface of the cylinder.

6. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the second through hole (2-2) on the lower end cover (2) comprises a circular through hole (2-2-1) and a rectangular through hole (2-2-2), and the circular through hole (2-2-1) is communicated with the rectangular through hole (2-2-2).

7. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the negative plate (3) comprises a circular plate body (3-1) and a rectangular plate body (3-2), the circumferential surface of the circular plate body (3-1) is fixedly connected with the short side face of one end of the rectangular plate body (3-2), a third through hole (3-2-1) is processed on the upper surface of the other end of the rectangular plate body (3-2), and the negative plate (3) is fixedly installed in the second through hole (2-2) of the lower end cover (2).

8. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 1, wherein: the second groove (4-1) on the sheet (4) comprises a circular groove (4-1-1) and a plurality of U-shaped grooves (4-1-2), one end of each U-shaped groove (4-1-2) is communicated with the circular groove (4-1-1), a fourth through hole (4-1-3) is machined in the bottom face of the other end of each U-shaped groove (4-1-2), and each fourth through hole (4-1-3) is arranged corresponding to each vent hole (2-5).

9. The fixture for manufacturing the capacitor from the graphene suspension film as claimed in claim 8, wherein: the thickness of the thin sheet (4) is 30 μm, and the depth of the second groove (4-1) is 20 μm.

Technical Field

The invention relates to a clamp for manufacturing a capacitor from a graphene suspension film, and belongs to the field of clamps.

Background

With the development of graphene performance by researchers, graphene has more and more applications, and the manufacture of a capacitive sound pickup by using excellent mechanical and electrical properties of a graphene film becomes one of research hotspots.

At present, a carrier is needed to be prepared for a graphene suspension film, generally, the carrier is a silicon wafer, a graphene film is prepared at a porous part after holes are formed in the silicon wafer to form the suspension film, if the graphene suspension film is used for manufacturing a capacitive pickup, the silicon wafer with the graphene suspension film is needed to be manufactured into a positive capacitor plate, and particularly, a positive electrode lead-out wire of the positive capacitor plate is needed to be designed. And the bottom plate of a preparation capacitor metal material to a preparation insulating pad separates graphite alkene suspension membrane and negative plate, the problem that is difficult to solve that meets at present is:

1. the radius of the graphene suspension film is very small, the area of a positive plate of the capacitor is very small, the capacitance value of the formed capacitor is very small, in order to increase the capacitance, the diameter of the graphene suspension film can be increased at present, or the distance between two polar plates of the capacitor is reduced, but the diameter of the graphene suspension film cannot be increased without limit, so that the distance between the two polar plates of the capacitor is reduced to be minimum in the existing document and is 8 micrometers, the distance between the two polar plates of the capacitor is reduced to be short circuit between the two polar plates easily caused by vibration of the suspension film, because the 8 micrometers are smaller, in order that the two polar plates of the capacitor are not broken down by an electric field, the direct current bias voltage born between the two polar plates can be smaller, and the output charge quantity and the capacitance value of the manufactured capacitor are directly influenced.

2. The graphene suspension film is the positive electrode of the capacitor, and the contact resistance between the suspension film and the positive electrode lead-out wire is very large, so that the output of charges generated when the capacitor changes is influenced.

3. The capacitor is connected with the positive lead-out wire in a traditional mode, the positive lead-out wire generally has certain thickness, the distance between two polar plates of the capacitor is too large, and the parallelism between the two polar plates cannot be guaranteed.

In summary, the following problems exist:

1. the capacitance value of the manufactured capacitor is influenced by the fact that the distance between two electrode plates of the conventional capacitor cannot be as small as possible.

2. The graphene suspension film is used as the anode of the capacitor, and the contact resistance between the graphene suspension film and the anode outgoing line is very large, so that the output of charges can be influenced when the capacitor changes.

3. The traditional mode is used for connecting the positive lead-out wire, so that the distance between two polar plates of the capacitor is too large due to the fact that the positive lead-out wire has a certain thickness, and the parallelism between the two polar plates cannot be guaranteed.

Disclosure of Invention

The invention further provides a clamp for manufacturing a capacitor from the graphene suspension film.

The technical scheme adopted by the invention is as follows:

the upper end cover and the lower end cover are fixedly installed, the negative plate is installed in the lower end cover and comprises a plate body and a boss, the boss is machined in the center of the lower surface of the plate body, a first through hole is machined in the center of the plate body, the lower end cover is a cylinder, a first groove is machined in the center of the upper surface of the cylinder, a second through hole and two first positive electrode holes are machined in the lower surface of the cylinder, the boss of the upper end cover is installed in the first groove of the lower end cover, a graphene suspension film is attached to a silicon wafer, the silicon wafer with the graphene suspension film attached thereto is installed inside the first groove of the lower end cover, the silicon wafer with the graphene suspension film attached thereto is located between the boss of the upper end cover and the inner surface of the first groove, one side of the silicon wafer with the graphene suspension film attached thereto faces to the bottom end surface of the first groove in the lower end cover, the upper surface of thin slice is processed with second recess and two second anodal holes, the second recess is located the center department of thin slice, two second anodal holes are located one side of second recess, thin slice fixed mounting is on the inside bottom face of the first recess of lower extreme cover, and the thin slice is located between the inside bottom face of graphite alkene suspension membrane and first recess, the upper surface and the graphite alkene suspension membrane of thin slice set up relatively, the lower surface of thin slice and the coincidence of the inside bottom face of first recess, every anodal hole and graphite alkene suspension membrane fixed connection on the lower extreme cover lower surface are all passed to the one end of every anodal lead-out wire, and every anodal lead-out wire all sets up with graphite alkene suspension membrane vertically, the lower surface 10mm of lower extreme cover is all exposed to the other end of every anodal lead-out wire, install flexible material between silicon chip and upper extreme cover.

Compared with the prior art, the invention has the following effects:

1. the slice is arranged on the bottom end face of the inner part of the lower end cover of the clamp, and the slice increases the dielectric constant, so that the capacitance value of the capacitor is increased, the two-pole plate short circuit cannot be caused even if the capacitor is saturated, and the manufactured capacitive pickup can complete the acoustoelectric conversion.

2. This anchor clamps places a small amount of flexible conducting resin in the contact department of graphite alkene suspension membrane and anodal lead-out wire, the good contact of graphite alkene suspension membrane and anodal lead-out wire has been guaranteed, the area of contact of anodal lead-out wire and graphite alkene suspension membrane has been increased, play the effect that reduces contact resistance, the influence of the thickness of anodal lead-out wire to electric capacity biplate depth of parallelism has been reduced, because flexible conducting resin is flexible, can extrude control thickness to it through the screw between adjustment anchor clamps upper end cover and the lower end cover, can effectually reduce the contact resistance of graphite alkene suspension membrane and anodal lead-out wire, the influence degree to charge output has been reduced when electric capacity changes, reduce the influence of the thickness of anodal lead-out wire to electric capacity biplate depth of parallelism.

3. The fixture is characterized in that a first positive pole hole is formed in a lower end cover of the fixture, a second positive pole hole is formed in a sheet, positive pole outgoing lines perpendicular to a graphene suspension film are embedded in the first positive pole hole and the second positive pole hole in advance, one end of each positive pole outgoing line sequentially penetrates through the first positive pole hole and the second positive pole hole to be flush with the upper surface of the sheet, and the fixture is arranged to be connected with a capacitor positive plate with an upper end cover abutting against, so that the distance between two polar plates of a capacitor cannot be increased due to the thickness of the positive pole outgoing lines;

4. the fixture fixes the graphene suspension film by fixing the silicon wafer on which the graphene suspension film is placed, and the silicon wafer on which the graphene suspension film is placed can be replaced when the graphene suspension film needs to be replaced, so that the fixture is simple to operate and easy to learn, and the silicon wafer can be replaced at any time;

drawings

FIG. 1 is a front view of the present clamp;

FIG. 2 is a side view of the present clip;

FIG. 3 is a rear view of the present clip;

FIG. 4 is a schematic view of the present clip;

fig. 5 is a schematic structural view of the upper end cap 1;

fig. 6 is a front structural view of the lower cap 2;

FIG. 7 is a rear view of the lower cap 2;

fig. 8 is a schematic structural view of the negative plate 3;

fig. 9 is a side view of the negative electrode plate 3;

fig. 10 is a front view of the sheet 4;

fig. 11 is a rear view of the negative electrode plate 3;

Detailed Description

The first embodiment is as follows: the present embodiment will be described with reference to fig. 1 to 11, which illustrate a fixture for manufacturing a graphene suspension film into a capacitor according to the present embodiment,

the graphene suspension film comprises an upper end cover 1, a lower end cover 2, a negative plate 3, a sheet 4 and an anode outgoing line A, wherein the upper end cover 1 and the lower end cover 2 are fixedly installed by screws, the negative plate 3 is installed in the lower end cover 2, the upper end cover 1 comprises a plate body 1-1 and a boss 1-2, the boss 1-2 is processed at the central position of the lower surface of the plate body 1-1, a first through hole 1-1-1 is processed at the central position of the plate body 1-1, the first through hole 1-1-1 is used for enabling the graphene suspension film to receive sound signals with certain sound intensity, the lower end cover 2 is a cylinder, a first groove 2-1 is processed at the central position of the upper surface of the cylinder, a second through hole 2-2 and two first anode holes 2-3 are processed at the lower surface of the cylinder, the boss 1-2 of the upper end cover 1 is installed in the first groove 2-1 of the lower end cover 2, the graphene suspension membrane 7 is attached to the silicon wafer 5, the silicon wafer 5 attached with the graphene suspension membrane 7 is installed inside the first groove 2-1 of the lower end cover 2, the silicon wafer 5 attached with the graphene suspension membrane 7 is located between the boss 1-2 of the upper end cover 1 and the bottom end face of the inside of the first groove 2-1, the middle of the silicon wafer 5 attached with the graphene suspension membrane 7 is provided with a hole, so that the graphene suspension membrane 7 is formed, the graphene film attached to the silicon wafer 5 is arranged at the part except the graphene suspension membrane 7, namely the coverage area of graphene on the silicon wafer 5 is larger, but only the graphene suspension membrane 7 is arranged on the hole in the middle, so that the positive lead-out wire A of the positive electrode plate of the capacitor can be contacted with the graphene suspension membrane 7, the positive lead-out wire A cannot be directly contacted with the graphene suspension membrane 7, and the vibration of the graphene suspension membrane 7 can be influenced if the positive lead-out wire is directly contacted with the graphene suspension membrane 7, the capacitance positive plate is a silicon chip 5 attached with a graphene suspension film 7, and two benefits are provided, one is that the positive lead-out wire A can be ensured not to exceed the upper surface of the slice 4 in the processing process, the distance between two electrode plates of the capacitance can not be increased, the other benefit is that the diameter of the clamp is about 4cm, if the clamp is led out like the negative plate 3, the positive lead-out wire A is longer and has a certain attenuation effect on signals, the positive lead-out wire A of the capacitance positive plate is connected in a vertical mode, the length of the positive lead-out wire A can be controlled within 1cm, the loss of the signals can be reduced as much as possible, when the silicon chip 5 is installed, a hole in the middle of the silicon chip 5 is ensured to be concentric with a circular plate body 3-1 of the clamp negative plate 3 as far as possible, one side of the silicon chip 5 attached with the graphene suspension film 7 faces to the bottom end surface of a first groove 2-1 in a lower end cover 2, the purpose is to enable an anode lead-out wire A to contact with a graphene suspension film 7 to form an electric path, the anode lead-out wire A of a positive plate is conveniently placed, a second groove 4-1 and two second anode holes 4-2 are processed on the upper surface of a sheet 4, the second groove 4-1 is positioned at the center of the sheet 4, the two second anode holes 4-2 are positioned at one side of the second groove 4-1, the sheet 4 is fixedly arranged on the inner bottom end face of a first groove 2-1 of a lower end cover 2, the sheet 4 is positioned between the graphene suspension film 7 and the inner bottom end face of the first groove 2-1, the upper surface of the sheet 4 is arranged opposite to the graphene suspension film 7, and the purpose is to form a ventilation path by utilizing the space between a fourth through hole 4-1-2 on the second groove 4-1 on the upper surface of the sheet 4 and the graphene suspension film 7, only if the graphene suspension film 7 is enabled to be ventilated up and down, the graphene suspension film 7 clamped in the middle of the clamp can vibrate freely, and because the distance between the two electrode plates is very small at present in order to increase the capacitance value of the capacitor, the thin sheet 4 can avoid the short circuit of the two electrode plates of the capacitor caused by the vibration of the graphene suspension film 7; the dielectric constant is increased due to the existence of the sheet 4, so that the capacitance value of the capacitor is increased, the capacitive sound pickup is facilitated to finish sound-electricity conversion, the lower surface of the sheet 4 is overlapped with the inner bottom end surface of the first groove 2-1, one end of each positive lead wire A penetrates through each first positive hole 2-3 on the lower surface of the lower end cover 2 and is fixedly connected with the graphene suspension film 7, each positive lead wire A is perpendicular to the graphene suspension film 7, the length of each positive lead wire A is controlled within 1cm, the loss of signals can be reduced, the other end of each positive lead wire A is exposed out of the lower surface of the lower end cover 2 by 10mm, the positive lead wires A perpendicular to the graphene suspension film are embedded in the first positive holes 2-3 and the second positive holes 4-2, one end of each positive lead wire A sequentially penetrates through the first positive holes 2-3 and the second positive holes 4-2 and is flush with the upper surface of the sheet 4, so set up, prevent that every anodal lead-out wire A from being sealed by thin slice 4 and leading to the insulation, guaranteed the good contact of every anodal lead-out wire A and graphite alkene suspended membrane 7, be in order to connect the electric capacity positive plate that upper end cover 1 is pushing up, just so can guarantee can not increase the distance between the electric capacity biplate because of anodal lead-out wire A's thickness, this anchor clamps connect the anodal lead-out wire A of electric capacity positive plate with perpendicular mode, can be with anodal lead-out wire A length control within 1cm, can reduce the loss of signal, install flexible material 6 between silicon chip 5 and upper end cover 1, flexible material 6 is foam material about 2mm, the anchor clamps are non-metallic structure except that individual position, such as materials such as resin, nylon, plastics, select non-metallic material purpose not influence the stray parameter of the electric capacity of making with graphite alkene suspended membrane 7.

The second embodiment is as follows: the embodiment is described with reference to fig. 2, and the embodiment describes a fixture for manufacturing a graphene suspension film into a capacitor, each positive lead-out wire a is connected with the graphene suspension film 7 by using a flexible conductive adhesive, so that the positive lead-out wires a are ensured to be in good contact with the graphene suspension film 7, the contact area between the positive lead-out wires a and the graphene suspension film 7 is increased, the effect of reducing the contact resistance is achieved, and the problem of the thickness of a small amount of conductive adhesive is solved.

The third concrete implementation mode: the embodiment is described with reference to fig. 5, in the embodiment, the upper end cover 1 is circular, the diameter of the boss 1-2 is smaller than that of the plate body 1-1, the height of the plate body 1-1 is smaller than that of the boss 1-2, and the arrangement is such that, if the plate body 1-1 is only a cover and does not have the boss 1-2, the filling is needed from the bottom of the plate body 1-1 of the upper end cover 1 to the bottom of the lower end cover 2, the more filling material, the more uneven pressure is transmitted to the silicon wafer, and the arrangement is such that the possibility of silicon wafer cracking caused by unbalanced stress is reduced, and the other embodiments are the same as the first or second embodiment.

The fourth concrete implementation mode: referring to fig. 5, the embodiment is described, in which a plurality of first threaded through holes 1-1-2 are formed in an upper surface of a plate body 1-1 of an upper end cap 1, the plurality of first threaded through holes 1-1-2 are annularly distributed on an outer side of the first through holes 1-1-1, the number of the first threaded through holes 1-1-2 is four, the first threaded through holes 1-1-2 are used to fix the upper end cap 1 and the lower end cap 2 into a whole, and the rest is the same as the first, second or third embodiment.

The fifth concrete implementation mode: the embodiment is described with reference to fig. 6 and 7, and the fixture for manufacturing a graphene suspension film into a capacitor according to the embodiment is characterized in that a plurality of second threaded through holes 2-4 are annularly formed on an upper surface of a cylinder of a lower end cap 2, the second threaded through holes 2-4 are used for fixing an upper end cap 1 and the lower end cap 2, the second threaded through holes 2-4 are arranged corresponding to the first threaded through holes 1-1-2, a plurality of vent holes 2-5 are further formed on a lower surface of the cylinder, and the plurality of vent holes 2-5 are arranged to form vent holes on the other surface of the graphene suspension film 7, which receives an acoustic signal, so that the graphene suspension film 7 can freely vibrate after being impacted by sound.

The sixth specific implementation mode: referring to fig. 6 and 7, the embodiment describes a fixture for manufacturing a graphene suspension film into a capacitor, the second through hole 2-2 of the lower end cap 2 includes a circular through hole 2-2-1 and a rectangular through hole 2-2-2, the circular through hole 2-2-1 is communicated with the rectangular through hole 2-2-2, the second through hole 2-2 is used for installing a negative plate 3, and the rest is the same as the first, second, third, fourth or fifth embodiment.

The seventh embodiment: referring to fig. 8 and 9, the embodiment is described, which is a fixture for manufacturing a graphene suspension film into a capacitor, wherein a negative plate 3 includes a circular plate 3-1 and a rectangular plate 3-2, a circumferential surface of the circular plate 3-1 is fixedly connected to a short side surface of one end of the rectangular plate 3-2, a third through hole 3-2-1 is formed in an upper surface of the other end of the rectangular plate 3-2, a diameter of the third through hole 3-2-1 is 3mm in order to facilitate electrical connection, the circular plate 3-1 of the negative plate 3 is embedded in the second through hole 2-2 of the lower end cap 2, the negative plate 3 is embedded in the second through hole 2-2 and is fixed by glue, a bottom end surface of the first groove 2-1 of the lower end cap 2 is polished to expose the negative plate 3, the negative plate 3 is a metal plate structure with good electric conduction, and the capacitance value of the capacitor is increased by reducing the distance between two plates of the capacitor, so that the surface roughness, especially the flatness, of the negative plate 3 is ensured to be higher than a micron level, and the other parts are the same as those of the first embodiment, the second embodiment, the third embodiment, the fourth embodiment, the fifth embodiment or the sixth embodiment.

The specific implementation mode is eight: referring to fig. 10 and 11 to illustrate the present embodiment, which is a fixture for manufacturing a graphene suspension film into a capacitor, the second groove 4-1 of the sheet 4 includes a circular groove 4-1-1 and a plurality of U-shaped grooves 4-1-2, one end of each U-shaped groove 4-1-2 is communicated with the circular groove 4-1-1, a fourth through hole 4-1-3 is processed on the bottom surface of the other end of each U-shaped groove 4-1-2, each fourth through hole 4-1-3 is arranged corresponding to each vent hole 2-5, this is so arranged that when the graphene suspension membrane 7 vibrates, there is air circulation under the graphene suspension membrane 7, and the others are the same as those in the first, second, third, fourth, fifth, sixth, or seventh embodiments.

The specific implementation method nine: in the embodiment, which will be described with reference to fig. 10 and 11, the thickness of the sheet 4 is 30 μm, the depth of the second groove 4-1 is 20 μm, and the rest of the process is the same as that of the first, second, third, fourth, fifth, sixth, seventh, or eighth embodiment.

Principle of operation

When the clamp is used, the circular plate body 3-1 of the negative plate 3 is embedded in the second through hole 2-2 of the lower end cover 2, the bottom end face of the first groove 2-1 of the lower end cover 2 is polished after installation is finished, the negative plate 3 is exposed, the sheet 4 is fixedly installed on the bottom end face of the first groove 2-1 of the lower end cover 2, the lower surface of the sheet 4 is in contact with the bottom end face of the first groove 2-1 of the lower end cover 2, each fourth through hole 4-1-3 on the sheet 4 is arranged corresponding to each through hole 2-5, the graphene suspension film 7 is attached to the silicon wafer 5, the silicon wafer 5 attached with the graphene suspension film 7 is installed inside the first groove 2-1 of the lower end cover 2, and one side of the silicon wafer 5 attached with the graphene suspension film 7 faces to the bottom end face of the first groove 2-1 in the lower end cover 2, the sheet 4 is positioned between the graphene suspension film 7 and the inner bottom end face of the first groove 2-1, grooves and holes on the sheet 4 are arranged corresponding to the graphene suspension film 7, one end of each positive lead wire A penetrates through each first positive hole 2-3 on the lower surface of the lower end cover 2 and each second positive hole 4-2 of the sheet 4 to be vertically connected with the graphene suspension film 7 through a small amount of flexible conductive adhesive, the other end of each positive lead wire A is exposed out of the lower surface of the lower end cover 2 by 10mm, a flexible material 6 is arranged between the silicon wafer 5 and the upper end cover 1, the upper end cover 1 is fixedly arranged with the lower end cover 2 through screws, a boss 1-2 of the upper end cover 1 is arranged in the first groove 2-1 of the lower end cover 2, the screws sequentially penetrate through the first threaded through holes 1-1-2 of the upper end cover 1 and the second threaded through holes 2-4 of the lower end cover 2, and finishing the installation.