阅读说明：本技术 压电振动板及压电振动器件 (Piezoelectric vibrating plate and piezoelectric vibrating device ) 是由 名古屋涉 于 2020-05-28 设计创作，主要内容包括：晶体振动片(10)具备振动部(11)、包围着该振动部(11)的外周的外框部(12)、将振动部(11)与外框部(12)连结的保持部(13),在振动部(11)的一个主面上形成有第一激励电极(111),在振动部(11)的另一个主面上形成有第二激励电极(112),第二激励电极(112)具有相互平行的平行边(112e、112g),在第一激励电极(111)上设有俯视时相对第二激励电极(112)比平行边(112e、112g)之间的部分更向外侧突出的突出部(111c、111d),突出部(111c、111d)具有俯视时不平行于平行边(112e、112g)的外缘形状。基于该结构,在由保持部将振动部与外框部连结的带框体的压电振动板、及具备这样的压电振动板的压电振动器件中,能够减少乱真而提高电气特性。(The crystal resonator plate (10) is provided with a vibrating section (11), an outer frame section (12) surrounding the outer periphery of the vibrating section (11), and a holding section (13) connecting the vibrating section (11) and the outer frame section (12), wherein a first excitation electrode (111) is formed on one main surface of the vibrating section (11), a second excitation electrode (112) is formed on the other main surface of the vibrating section (11), the second excitation electrode (112) has parallel sides (112e, 112g) parallel to each other, the first excitation electrode (111) is provided with protruding sections (111c, 111d) protruding outward from the second excitation electrode (112) in plan view than the portion between the parallel sides (112e, 112g), and the protruding sections (111c, 111d) have an outer edge shape not parallel to the parallel sides (112e, 112g) in plan view. With this configuration, in the piezoelectric vibrating plate with a frame in which the vibrating portion is coupled to the outer frame portion by the holding portion, and the piezoelectric vibrating device including the piezoelectric vibrating plate, it is possible to reduce spurious and improve electrical characteristics.)

1. A piezoelectric vibrating plate which operates by thickness shear vibration, characterized in that:

the piezoelectric vibrating plate includes a vibrating portion, an outer frame portion surrounding an outer periphery of the vibrating portion, and a holding portion connecting the vibrating portion and the outer frame portion, wherein a cutout portion formed by cutting out the piezoelectric vibrating plate is provided between the vibrating portion and the outer frame portion,

a first excitation electrode formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode formed on the other main surface of the vibrating portion,

at least one protruding portion protruding from one of the first excitation electrode and the second excitation electrode in a plan view is formed on the other excitation electrode,

the other excitation electrode has at least one pair of parallel sides parallel to each other,

the protruding portion is configured to protrude outward from a portion between the parallel sides in a plan view, and has an outer edge shape that is not parallel to the parallel sides in a plan view.

2. A piezoelectric vibrating plate which operates by thickness shear vibration, characterized in that:

the piezoelectric vibrating plate includes a vibrating portion, an outer frame portion surrounding an outer periphery of the vibrating portion, and a holding portion connecting the vibrating portion and the outer frame portion, wherein a cutout portion formed by cutting out the piezoelectric vibrating plate is provided between the vibrating portion and the outer frame portion,

a first excitation electrode formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode formed on the other main surface of the vibrating portion,

the first excitation electrode and the second excitation electrode are both formed in a shape that is line-symmetric with respect to a straight line parallel to the X axis of the piezoelectric vibrating plate,

at least one protruding portion protruding outward without overlapping the other excitation electrode in a plan view is provided on one of the first excitation electrode and the second excitation electrode, and the protruding portion has an outer edge shape that is not parallel to the X axis in a plan view.

3. The piezoelectric vibrating plate according to claim 1 or 2, wherein:

the center of gravity of the one excitation electrode is set at a position substantially coincident with the center of gravity of the other excitation electrode in a plan view.

4. A piezoelectric vibrating plate which operates by thickness shear vibration, characterized in that:

the piezoelectric vibrating plate includes a vibrating portion, an outer frame portion surrounding an outer periphery of the vibrating portion, and a holding portion connecting the vibrating portion and the outer frame portion, wherein a cutout portion formed by cutting out the piezoelectric vibrating plate is provided between the vibrating portion and the outer frame portion,

a first excitation electrode formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode formed on the other main surface of the vibrating portion,

the center of gravity of the first excitation electrode is set at a position substantially coinciding with the center of gravity of the second excitation electrode in a plan view,

one of the first excitation electrode and the second excitation electrode is disposed obliquely to the other excitation electrode in a plan view.

5. The piezoelectric vibrating plate according to claim 4, wherein:

the one excitation electrode is provided with protruding portions protruding outward without overlapping the other excitation electrode in a plan view at positions on both sides of the center of gravity of the first excitation electrode, and each protruding portion has an outer edge shape that is not parallel to an outer edge of the other excitation electrode in a plan view.

6. The piezoelectric vibrating plate according to any one of claims 1 to 5, wherein:

the area of the other excitation electrode is larger than the area of the one excitation electrode.

7. The piezoelectric vibrating plate according to any one of claims 1 to 6, wherein:

a first lead-out wiring connected to the first excitation electrode is formed on one main surface of the holding portion,

a second lead-out wiring connected to the second excitation electrode is formed on the other main surface of the holding portion,

the first lead-out wiring and the second lead-out wiring extend in the same direction.

8. The piezoelectric vibrating plate according to claim 7, wherein:

one of the first lead-out wiring and the second lead-out wiring is arranged so as to be shifted from the other in a plan view.

9. A piezoelectric vibrating plate according to any one of claims 1 to 8, wherein:

the one excitation electrode is formed in a diamond shape,

the other excitation electrode is formed in a rectangular shape.

10. A piezoelectric vibrating plate according to any one of claims 1 to 9, wherein:

only one of the holding portions is provided.

11. A piezoelectric vibration device provided with the piezoelectric vibration plate according to any one of claims 1 to 10, characterized in that:

the piezoelectric vibration plate includes a first sealing member covering the first excitation electrode of the piezoelectric vibration plate, and a second sealing member covering the second excitation electrode of the piezoelectric vibration plate,

the first sealing member is joined to the piezoelectric vibration plate, and the second sealing member is joined to the piezoelectric vibration plate, whereby the vibration portion of the piezoelectric vibration plate is hermetically sealed.

Technical Field

The present invention relates to a piezoelectric vibrating plate and a piezoelectric vibrating device.

Background

For example, in a piezoelectric resonator device (for example, a piezoelectric resonator, a piezoelectric oscillator, or the like) including a piezoelectric vibrating plate that operates by thickness shear vibration such as an AT-cut crystal vibrating plate, a pair of excitation electrodes to which an ac voltage is applied are formed on the front and back surfaces of the piezoelectric vibrating plate so as to face each other. In recent years, with the progress of higher frequencies (for example, frequencies of about 150 MHz) of such piezoelectric vibration devices, spurious vibrations may occur in the vicinity of the main vibration of the piezoelectric vibration device, and characteristics of the piezoelectric vibration device may be adversely affected. Conventionally, it is known that spurious noise can be reduced by disposing a pair of excitation electrodes of a piezoelectric vibrating plate in a displaced manner (for example, see patent document 1).

In addition, a piezoelectric vibration plate including a vibration portion, an outer frame portion surrounding an outer periphery of the vibration portion, and a holding portion connecting the vibration portion and the outer frame portion is known in the related art (for example, see patent document 1). In the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the pair of excitation electrodes are formed in substantially the same shape (mainly rectangular shape) and are arranged at substantially the same position in a plan view, and therefore, measures for reducing spurious are still insufficient.

[ patent document 1 ]: japanese patent No. 5104867

[ patent document 2 ]: japanese laid-open patent publication No. 2010-252051

Disclosure of Invention

In view of the above circumstances, an object of the present invention is to reduce spurious and improve electrical characteristics in a piezoelectric vibrating plate with a frame in which a vibrating portion is coupled to an outer frame portion by a holding portion, and a piezoelectric vibrating device including such a piezoelectric vibrating plate.

As a means for solving the above-described problems, the present invention adopts the following configuration. That is, the present invention is a piezoelectric vibrating plate which operates by thickness shear vibration, characterized in that: comprises a vibration part, an outer frame part surrounding the outer periphery of the vibration part, and a holding part connecting the vibration part and the outer frame part, a cutout portion formed by cutting out the piezoelectric vibrating plate is provided between the vibrating portion and the outer frame portion, a first excitation electrode formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode formed on the other main surface of the vibrating portion, at least one protruding portion protruding from one of the first excitation electrode and the second excitation electrode in a plan view is formed on the other excitation electrode, the other excitation electrode has at least one pair of parallel sides parallel to each other, and the protruding portion is configured to protrude outward from a portion between the parallel sides in a plan view and has an outer edge shape not parallel to the parallel sides in a plan view.

In the above configuration, the protruding portion of one excitation electrode has an outer edge shape that is not parallel to the parallel side of the other excitation electrode in a plan view, and therefore, it is possible to reduce distortion caused by the outer edge shape of one excitation electrode. Therefore, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the spurious is reduced and the electrical characteristics can be improved. In particular, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, since the connecting point for direct electromechanical connection is not formed in the vibrating portion in the step after the vibrating portion is formed, there is no occurrence of a spurious phenomenon caused by the formation of the connecting point. In other words, it is possible to reduce the spurious caused by the excitation electrode and suppress further spurious caused by the process after the formation of the vibrating portion. In addition, in the vibrating portion of such a frame-attached piezoelectric vibrating plate, since the excitation electrode can be formed without taking the connection point into consideration, the degree of freedom in designing the excitation electrode is improved, and the size and position of the electrode are easily adjusted. In particular, by forming the excitation electrode to be large, electrical characteristics can be improved; by arranging the center of the vibrating portion to substantially coincide with the center of the excitation electrode in a plan view, it is possible to suppress the generation of an asymmetric vibration mode which becomes spurious.

The present invention is a piezoelectric vibrating plate that operates by thickness shear vibration, including a vibrating portion, an outer frame portion surrounding an outer periphery of the vibrating portion, and a holding portion connecting the vibrating portion and the outer frame portion, wherein a cutout portion formed by cutting out the piezoelectric vibrating plate is provided between the vibrating portion and the outer frame portion, a first excitation electrode is formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode is formed on the other main surface of the vibrating portion, both the first excitation electrode and the second excitation electrode are configured to have a shape symmetrical with respect to a straight line parallel to an X axis of the piezoelectric vibrating plate, and at least one protruding portion protruding outward without overlapping the other excitation electrode in a plan view is provided on one excitation electrode of the first excitation electrode and the second excitation electrode, the protrusion has an outer edge shape which is not parallel to the X-axis in a plan view.

With the above configuration, since the protruding portion of one excitation electrode has an outer edge shape that is not parallel to the X axis in a plan view, it is possible to reduce the distortion caused by the outer edge shape of one excitation electrode. Therefore, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the spurious is reduced and the electrical characteristics can be improved. In particular, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, since the connecting point for direct electromechanical connection is not formed in the vibrating portion in the step after the vibrating portion is formed, there is no occurrence of a spurious phenomenon caused by the formation of the connecting point. In other words, it is possible to reduce the spurious caused by the excitation electrode and suppress further spurious caused by the process after the formation of the vibrating portion. In the vibrating portion of such a frame-equipped piezoelectric vibrating plate, since the excitation electrode can be formed without taking the connection point into consideration, the degree of freedom in designing the excitation electrode is improved, and the size and position of the electrode can be easily adjusted. In particular, by forming the excitation electrode to be large, electrical characteristics can be improved; by arranging the center of the vibrating portion to substantially coincide with the center of the excitation electrode in a plan view, it is possible to suppress the generation of an asymmetric vibration mode which becomes spurious.

In the above configuration, it is preferable that the center of gravity of the one excitation electrode is set to a position substantially matching the center of gravity of the other excitation electrode in a plan view. With this configuration, the protruding portion of one excitation electrode can be formed in a shape that is line-symmetric with respect to a straight line that passes through the center of gravity of the one excitation electrode and is parallel to the X axis. This can reduce spurious caused by the asymmetry of the protruding portion of one excitation electrode.

Further, the present invention is a piezoelectric vibrating plate which operates by thickness shear vibration, characterized in that: the piezoelectric vibration plate includes a vibrating portion, an outer frame portion surrounding an outer periphery of the vibrating portion, and a holding portion connecting the vibrating portion and the outer frame portion, wherein a cutout portion formed by cutting out the piezoelectric vibration plate is provided between the vibrating portion and the outer frame portion, a first excitation electrode is formed on one main surface of the vibrating portion, a second excitation electrode paired with the first excitation electrode is formed on the other main surface of the vibrating portion, a center of gravity of the first excitation electrode is set at a position substantially coincident with a center of gravity of the second excitation electrode in a plan view, and one excitation electrode of the first excitation electrode and the second excitation electrode is disposed so as to be inclined with respect to the other excitation electrode in a plan view.

With the above configuration, since one excitation electrode is disposed obliquely to the other excitation electrode in a plan view, it is possible to reduce distortion caused by the outer edge shape of one excitation electrode. Thus, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the spurious is reduced and the electrical characteristics are improved. In particular, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, since the connecting point for direct electromechanical connection is not formed in the vibrating portion in the step after the vibrating portion is formed, there is no occurrence of a spurious phenomenon caused by the formation of the connecting point. In other words, it is possible to reduce the spurious caused by the excitation electrode and suppress further spurious caused by the process after the formation of the vibrating portion. In the vibrating portion of such a frame-equipped piezoelectric vibrating plate, since the excitation electrode can be formed without taking the connection point into consideration, the degree of freedom in designing the excitation electrode is improved, and the size and position of the electrode can be easily adjusted. In particular, by forming the excitation electrode to be large, electrical characteristics can be improved; by arranging the center of the vibrating portion to substantially coincide with the center of the excitation electrode in a plan view, it is possible to suppress the generation of an asymmetric vibration mode which becomes spurious. The term "obliquely arranged" includes rotation, displacement (sliding), protrusion, and expansion/contraction of one excitation electrode with respect to the other excitation electrode.

In the above configuration, it is preferable that the one excitation electrode is provided with protruding portions protruding outward without overlapping the other excitation electrode in a plan view at positions on both sides of the center of gravity of the first excitation electrode, and each protruding portion has an outer edge shape that is not parallel to an outer edge of the other excitation electrode in a plan view. With this configuration, since the protruding portions provided at the positions on both sides of the center of gravity of the first excitation electrode have an outer edge shape that is not parallel to the outer edge of the other excitation electrode in plan view, it is possible to reduce distortion caused by the outer edge shape of the one excitation electrode. Further, since the center of gravity of the one excitation electrode is set at a position substantially coincident with the center of gravity of the other excitation electrode in a plan view, the protruding portion of the one excitation electrode can be formed in a shape line-symmetrical to a straight line passing through the center of gravity of the one excitation electrode and being parallel to the outer edge of the other excitation electrode. This can reduce spurious caused by the asymmetry of the protruding portion of one excitation electrode.

In the above configuration, it is preferable that the area of the other excitation electrode is larger than the area of the one excitation electrode. With this configuration, the frequency of the piezoelectric diaphragm can be easily adjusted by performing ion beam etching or the like on the other excitation electrode having a larger area. In the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the first excitation electrode and the second excitation electrode are configured to have substantially the same shape (mainly rectangular shape) and are arranged at substantially the same position in a plan view as described above. However, by making the areas of the first excitation electrode and the second excitation electrode different from each other, a frequency adjustment region can be secured in the other excitation electrode having a larger area, which is advantageous for the frequency adjustment of the piezoelectric diaphragm. When the area of the other excitation electrode is smaller than that of the one excitation electrode, the normal temperature CI value of the piezoelectric diaphragm may become high, and the temperature change in CI value may become unstable. However, by making the area of the other excitation electrode larger than the area of the one excitation electrode, the characteristics of the piezoelectric vibrating plate (the room temperature CI value, the temperature characteristics of the CI value) can be maintained well.

In the above configuration, it is preferable that a first lead-out wiring connected to the first excitation electrode is formed on one main surface of the holding portion, a second lead-out wiring connected to the second excitation electrode is formed on the other main surface of the holding portion, and the first lead-out wiring and the second lead-out wiring extend in the same direction. With this configuration, since the first lead-out wiring and the second lead-out wiring extend in the same direction, the first lead-out wiring, the second lead-out wiring, and the wirings connected to the first lead-out wiring and the second lead-out wiring can be simplified, and complicated wirings can be omitted, which is advantageous in reducing the size of the piezoelectric vibrating plate, as compared with a case where the first lead-out wiring and the second lead-out wiring extend in different directions.

In the above configuration, it is preferable that one of the first lead-out wiring and the second lead-out wiring is arranged so that the other lead-out wiring is shifted in a plan view. Here, there is a possibility that the overlapping portion of the first lead-out wiring and the second lead-out wiring vibrates and the vibration leaks to the outer frame portion. Therefore, by reducing the overlapping portion of the first lead-out wiring and the second lead-out wiring as much as possible, it is possible to suppress the vibration generated in the first lead-out wiring and the second lead-out wiring, and to suppress the leakage of the vibration to the outer frame portion.

In the above configuration, it is preferable that the one excitation electrode is formed in a diamond shape, and the other excitation electrode is formed in a rectangular shape. With this configuration, all the outer edges of the excitation electrodes are not parallel to the X axis in a plan view. Therefore, the distortion caused by the outer edge shape of one excitation electrode can be effectively reduced. In the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the first excitation electrode and the second excitation electrode are conventionally configured to have the same shape (mainly rectangular shape) and are arranged at positions substantially identical in a plan view. By configuring the other excitation electrode to be rectangular in this manner, the frequency of the piezoelectric vibrating plate can be adjusted using a mask and a jig for the rectangular electrode, which are similar to those used in the related art, and this is advantageous for frequency adjustment.

In the above configuration, it is preferable that only one of the holding portions is provided. With this configuration, it is possible to prevent the vibration from leaking from the vibration section to the outer frame section via the holding section as much as possible, and to cause the vibration section to perform piezoelectric vibration more efficiently, thereby improving the electrical characteristics.

Further, the present invention is a piezoelectric vibration device including a piezoelectric vibration plate having any one of the above-described structures, characterized in that: the piezoelectric vibration plate includes a first sealing member covering the first excitation electrode of the piezoelectric vibration plate and a second sealing member covering the second excitation electrode of the piezoelectric vibration plate, and the first sealing member is joined to the piezoelectric vibration plate and the second sealing member is joined to the piezoelectric vibration plate, whereby the vibration portion of the piezoelectric vibration plate is hermetically sealed. The piezoelectric vibration device including the piezoelectric vibration plate having the above-described structure can obtain the same operation and effect as those of the piezoelectric vibration plate.

The invention has the following effects:

according to the present invention, since the protruding portion of one excitation electrode has an outer edge shape that is not parallel to the parallel side of the other excitation electrode in a plan view, it is possible to reduce the distortion caused by the outer edge shape of one excitation electrode. Therefore, in the piezoelectric vibrating plate with a frame body in which the vibrating portion and the outer frame portion are coupled by the holding portion, the spurious is reduced and the electrical characteristics can be improved.

Drawings

Fig. 1 is a schematic configuration diagram schematically showing each component of the crystal resonator according to the present embodiment.

Fig. 2 is a schematic plan view of the first principal surface side of the first sealing member of the crystal resonator.

Fig. 3 is a schematic plan view of the second principal surface side of the first sealing member of the crystal resonator.

Fig. 4 is a schematic plan view of the first main surface side of the crystal resonator plate according to the present embodiment.

Fig. 5 is a schematic plan view of the second main surface side of the crystal resonator plate according to the present embodiment.

Fig. 6 is a schematic plan view of the first main surface side of the second sealing member of the crystal resonator.

Fig. 7 is a schematic plan view of the second principal surface side of the second sealing member of the crystal resonator.

Fig. 8 is a schematic plan view showing a positional relationship among the first excitation electrode, the second excitation electrode, the first lead-out wiring, the second lead-out wiring, and the like of the crystal resonator plate.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following embodiments, a case where the piezoelectric resonator device to which the present invention is applied is a crystal resonator will be described.

First, a basic configuration of the crystal oscillator 100 according to the present embodiment will be described. As shown in fig. 1, the crystal resonator 100 includes a crystal resonator element (piezoelectric resonator plate) 10, a first sealing member 20, and a second sealing member 30. In the crystal resonator 100, the crystal resonator element 10 is bonded to the first sealing member 20; the crystal resonator plate 10 is bonded to the second sealing member 30, thereby forming a package having a substantially rectangular parallelepiped sandwich structure. That is, in the crystal resonator 100, the first sealing member 20 and the second sealing member 30 are bonded to the two main surfaces of the crystal resonator element 10, respectively, to form an internal space (empty chamber) of the package, and the vibrating portion 11 (see fig. 4 and 5) is hermetically sealed in the internal space.

The crystal resonator 100 according to the present embodiment has a package size of, for example, 1.0 × 0.8mm, and is reduced in size and height. In addition, as the size is reduced, castellations are not formed on the package, and through holes to be described later are used to conduct the electrodes. The crystal resonator 100 is electrically connected to an external circuit board (not shown) provided outside by solder.

Next, the crystal resonator element 10, the first sealing member 20, and the second sealing member 30 in the crystal resonator 100 will be described with reference to fig. 1 to 7. Here, the respective members each having a single structure and not yet joined will be described. Fig. 2 to 7 show only one configuration example of each of the crystal resonator element 10, the first sealing member 20, and the second sealing member 30, and they are not intended to limit the present invention.

As shown in fig. 4 and 5, the crystal resonator element 10 according to the present embodiment is a piezoelectric substrate made of crystal, and both main surfaces (a first main surface 101 and a second main surface 102) thereof are processed (mirror-finished) to be flat and smooth surfaces. In the present embodiment, an AT-cut crystal wafer that performs thickness shear vibration is used as the crystal resonator plate 10. In the crystal resonator plate 10 shown in fig. 4 and 5, the two main surfaces (101, 102) of the crystal resonator plate 10 are on the XZ' plane. In the XZ 'plane, a direction parallel to the short side direction of the crystal resonator plate 10 is an X-axis direction, and a direction parallel to the long side direction of the crystal resonator plate 10 is a Z' -axis direction. The AT cut is a machining method in which a cut is made AT an angle of 35 ° 15' around the X axis with respect to the Z axis, from among the electric axis (X axis), the mechanical axis (Y axis), and the optical axis (Z axis) which are three crystal axes of the artificial crystal. In the AT-cut quartz plate, the X-axis coincides with the crystal axis of the quartz. The Y ' axis and the Z ' axis are axes inclined by approximately 35 DEG 15 ' (the cutting angle can be changed slightly within a range for adjusting the frequency-temperature characteristics of the AT-cut crystal oscillator) with respect to the Y axis and the Z axis of the crystal. The Y '-axis direction and the Z' -axis direction correspond to the dicing direction in dicing the AT-cut water crystal wafer.

A pair of excitation electrodes (a first excitation electrode 111 and a second excitation electrode 112) is formed on both main surfaces (101 and 102) of the crystal resonator element 10. The crystal resonator plate 10 includes a vibration portion 11 formed substantially in a rectangular shape, an outer frame 12 surrounding an outer periphery of the vibration portion 11, and a holding portion 13 holding the vibration portion 11 by coupling the vibration portion 11 to the outer frame 12. That is, the crystal resonator plate 10 has a structure in which the vibrating portion 11, the outer frame portion 12, and the holding portion 13 are integrally provided. The holding portion 13 extends (protrudes) in the-Z 'direction to the outer frame portion 12 from only one corner portion located in the + X direction and the-Z' direction of the vibrating portion 11. Between the vibrating portion 11 and the outer frame portion 12, a cutting portion 10a is provided for cutting the crystal resonator plate 10. In the present embodiment, the crystal resonator plate 10 is provided with only one holding portion 13 that connects the vibrating portion 11 and the outer frame portion 12, and the cutout portion 10a is continuously formed so as to surround the outer periphery of the vibrating portion 11.

The first excitation electrode 111 is provided on the first main surface 101 side of the vibrating portion 11, and the second excitation electrode 112 is provided on the second main surface 102 side of the vibrating portion 11. In the present embodiment, the first excitation electrode (one excitation electrode) 111 is formed in a diamond shape, and the second excitation electrode (the other excitation electrode) 112 is formed in a square shape. Lead wirings (a first lead wiring 113 and a second lead wiring 114) for connecting the excitation electrodes to external electrode terminals are connected to the first excitation electrode 111 and the second excitation electrode 112. The first lead-out wiring 113 is led out from the first excitation electrode 111, and is connected to the connection bonding pattern 14 formed on the outer frame portion 12 via the holding portion 13. The second lead wiring 114 is led from the second excitation electrode 112, and is connected to the connection bonding pattern 15 formed on the outer frame portion 12 via the holding portion 13. The first excitation electrode 111 and the second excitation electrode 112 will be described in detail later.

On both main surfaces (the first main surface 101 and the second main surface 102) of the crystal resonator plate 10, vibration-side sealing portions for bonding the crystal resonator plate 10 to the first sealing member 20 and the second sealing member 30 are provided, respectively. A vibration-side first bonding pattern 121 is formed as a vibration-side seal portion of the first main surface 101; a vibration-side second bonding pattern 122 is formed as a vibration-side seal portion of the second main surface 102. The vibration side first bonding pattern 121 and the vibration side second bonding pattern 122 are provided on the outer frame portion 12, and are configured to be annular in plan view.

As shown in fig. 4 and 5, five through holes penetrating between the first main surface 101 and the second main surface 102 are formed in the crystal resonator plate 10. Specifically, the four first through holes 161 are provided in the regions of the four corners (corner portions) of the outer frame portion 12, respectively. The second through-hole 162 is provided on one side of the vibrating portion 11 in the Z 'axis direction (the side in the-Z' direction in fig. 4 and 5) in the outer frame portion 12. Connection bonding patterns 123 are formed around the first through holes 161, respectively. Further, around the second through-hole 162, a connection bonding pattern 124 is formed on the first main surface 101 side, and a connection bonding pattern 15 is formed on the second main surface 102 side.

Of the first through-hole 161 and the second through-hole 162, a through-electrode for electrically connecting the electrode formed on the first main surface 101 and the electrode formed on the second main surface 102 is formed along the inner wall surface of each through-hole. The intermediate portion of each of the first through-hole 161 and the second through-hole 162 is a hollow penetrating portion that penetrates between the first main surface 101 and the second main surface 102.

As shown in fig. 2 and 3, the first sealing member 20 is a rectangular parallelepiped substrate formed of one AT-cut crystal piece, and the second main surface 202 (the surface to be bonded to the crystal resonator plate 10) of the first sealing member 20 is formed (mirror-finished) as a flat and smooth surface. Further, the first sealing member 20 does not have a vibrating portion, but the thermal expansion coefficient of the crystal resonator element 10 is made the same as that of the first sealing member 20 by using the AT-cut crystal piece as in the crystal resonator element 10, and the thermal deformation of the crystal resonator 100 can be suppressed. The directions of the X axis, the Y axis, and the Z' axis of the first sealing member 20 are also the same as those of the crystal resonator plate 10.

As shown in fig. 2, the first metal film 22 for wiring, the second metal film 23, and the third metal film 28 for shielding are formed on the first main surface 201 (the main surface on the outer side not facing the crystal resonator plate 10) of the first sealing member 20. The first and second metal films 22 and 23 for wiring are provided as wirings for electrically connecting the first and second excitation electrodes 111 and 112 of the crystal resonator element 10 and the external electrode terminal 32 of the second sealing member 30. The first metal film 22 and the second metal film 23 are provided at both ends in the Z ' -axis direction, the first metal film 22 is provided on the + Z ' -direction side, and the second metal film 23 is provided on the-Z ' -direction side. The first metal film 22 and the second metal film 23 are configured to extend in the X-axis direction. The first metal film 22 is formed in an approximately rectangular shape, and a protrusion 22a protruding in the-Z' direction is provided in a portion of the first metal film 22 on the + X direction side. The second metal film 23 is formed in an approximately rectangular shape, and a protrusion 23a protruding in the + Z' direction is provided in a portion on the-X direction side of the second metal film 23.

The third metal film 28 is provided between the first metal film 22 and the second metal film 23, and is disposed at a predetermined interval from the first metal film 22 and the second metal film 23. In the region where the first metal film 22 and the second metal film 23 are not formed on the first main surface 201 of the first seal member 20, the third metal film 28 is almost provided.

As shown in fig. 2 and 3, the first sealing member 20 has six through-holes formed therein, which penetrate between the first main surface 201 and the second main surface 202. Specifically, four third through-holes 211 are provided in the regions of four corners (corner portions) of the first sealing member 20. The fourth through hole 212 and the fifth through hole 213 are provided in the + Z 'direction and the Z' direction in fig. 2 and 3, respectively.

Through electrodes for electrically connecting the electrode formed on the first main surface 201 and the electrode formed on the second main surface 202 are formed in the third through hole 211, the fourth through hole 212, and the fifth through hole 213 along inner wall surfaces of the through holes. Further, the intermediate portions of the third through-hole 211, the fourth through-hole 212, and the fifth through-hole 213 are hollow penetrating portions that penetrate between the first main surface 201 and the second main surface 202. The through electrodes of the two third through holes (the third through holes 211 located at the corners in the + X direction and the + Z 'direction and the third through holes 211 located at the corners in the-X direction and the-Z' direction in fig. 2 and 3) located at opposite corners of the first main surface 201 of the first sealing member 20 are electrically connected to each other through the third metal film 28. The through electrodes of the third through holes 211 and the fourth through holes 212 located at the corners in the-X direction and the + Z' direction are electrically connected to each other through the first metal film 22. The through electrodes of the third through holes 211 and the fifth through holes 213 located at the corners in the + X direction and the-Z' direction are electrically connected to each other through the second metal film 23.

A sealing side first bonding pattern 24 as a sealing side first sealing portion for bonding to the crystal resonator plate 10 is formed on the second main surface 202 of the first sealing member 20. The seal-side first bonding pattern 24 is formed in an annular shape in plan view. In addition, the second main surface 202 of the first sealing member 20 is formed with connection bonding patterns 25 around the third through-holes 211, respectively. A connection bonding pattern 261 is formed around the fourth through-hole 212, and a connection bonding pattern 262 is formed around the fifth through-hole 213. Further, a connection bonding pattern 263 is formed on the opposite side (the side in the (-Z' direction) of the long axis direction of the first sealing member 20 with respect to the connection bonding pattern 261, and the connection bonding pattern 261 and the connection bonding pattern 263 are connected by a wiring pattern 27.

As shown in fig. 6 and 7, the second sealing member 30 is a rectangular parallelepiped substrate formed of one AT-cut crystal piece, and the first main surface 301 (the surface to be bonded to the crystal resonator plate 10) of the second sealing member 30 is formed (mirror-finished) as a flat and smooth surface. In addition, the second sealing member 30 is also an AT-cut crystal piece as in the crystal resonator plate 10, and preferably, the X-axis, the Y-axis, and the Z' -axis are oriented in the same direction as the crystal resonator plate 10.

A sealing-side second bonding pattern 31 as a sealing-side second sealing portion for bonding with the crystal resonator plate 10 is formed on the first main surface 301 of the second sealing member 30. The sealing-side second bonding pattern 31 is formed in a ring shape in a plan view.

The second main surface 302 (the outer main surface not facing the crystal resonator plate 10) of the second sealing member 30 is provided with four external electrode terminals 32 for electrical connection to an external circuit board provided outside the crystal resonator 100. The external electrode terminals 32 are located at four corners (corner portions) of the second main surface 302 of the second sealing member 30, respectively.

As shown in fig. 6 and 7, the second sealing member 30 is provided with four through holes penetrating between the first main surface 301 and the second main surface 302. Specifically, the four sixth through holes 33 are provided in the regions of the four corners (corner portions) of the second sealing member 30. In the sixth through-hole 33, a through-electrode for electrically connecting the electrode formed on the first principal surface 301 and the electrode formed on the second principal surface 302 is formed along the inner wall surface of each of the sixth through-holes 33. In this way, the through electrode formed on the inner wall surface of the sixth through hole 33 allows the electrode formed on the first main surface 301 to be electrically connected to the external electrode terminal 32 formed on the second main surface 302. Further, the intermediate portion of each of the sixth through holes 33 is a hollow penetrating portion that penetrates between the first main surface 301 and the second main surface 302. Further, in the first main surface 301 of the second sealing member 30, connection bonding patterns 34 are formed around the sixth through holes 33, respectively.

In the crystal resonator 100 including the crystal resonator element 10, the first sealing member 20, and the second sealing member 30, the crystal resonator element 10 and the first sealing member 20 are diffusion bonded in a state where the vibration-side first bonding pattern 121 and the sealing-side first bonding pattern 24 overlap each other; the crystal resonator plate 10 and the second sealing member 30 are diffusion bonded in a state where the vibration-side second bonding pattern 122 and the sealing-side second bonding pattern 31 overlap each other, thereby forming a package having a sandwich structure as shown in fig. 1. Thereby, the internal space of the package, i.e., the accommodating space of the vibrating portion 11 is hermetically sealed.

In this case, the connection bonding patterns are also diffusion bonded in a state of being overlapped with each other. In this way, the crystal resonator 100 can electrically conduct the first excitation electrode 111, the second excitation electrode 112, and the external electrode terminal 32 by bonding the connection bonding patterns to each other. Specifically, the first excitation electrode 111 is connected to the external electrode terminal 32 via the first lead line 113, the wiring pattern 27, the fourth through-hole 212, the first metal film 22, the third through-hole 211, the first through-hole 161, and the sixth through-hole 33 in this order. The second excitation electrode 112 is connected to the external electrode terminal 32 via the second lead-out wiring 114, the second through-hole 162, the fifth through-hole 213, the second metal film 23, the third through-hole 211, the first through-hole 161, and the sixth through-hole 33 in this order. The third metal film 28 is grounded (grounded by a part of the external electrode terminal 32) through the third through-hole 211, the first through-hole 161, and the sixth through-hole 33 in this order.

In the crystal resonator 100, each bonding pattern is preferably formed by laminating a plurality of layers on a crystal wafer, and a Ti (titanium) layer and an Au (gold) layer are preferably formed by evaporation from the lowermost layer side thereof. Further, it is preferable that other wirings and electrodes formed on the crystal resonator 100 have the same structure as the bonding pattern, so that the bonding pattern, the wirings, and the electrodes can be simultaneously patterned.

In the crystal resonator 100 having the above-described configuration, the sealing portions (sealing paths) 115 and 116 that hermetically seal the vibrating portion 11 of the crystal resonator plate 10 are configured to be annular in plan view. The seal path 115 is formed by diffusion bonding of the vibration side first bonding pattern 121 and the seal side first bonding pattern 24, and the outer edge shape and the inner edge shape of the seal path 115 are configured to be approximately octagonal. Similarly, the seal path 116 is formed by diffusion bonding of the vibration-side second bonding pattern 122 and the seal-side second bonding pattern 31, and the outer edge shape and the inner edge shape of the seal path 116 are configured to be substantially octagonal.

In the crystal resonator 100 in which the sealing path 115 and the sealing path 116 are formed by diffusion bonding in this way, a gap of 1.00 μm or less is formed between the first sealing member 20 and the crystal resonator plate 10, and a gap of 1.00 μm or less is formed between the second sealing member 30 and the crystal resonator plate 10. In other words, the thickness of the sealing path 115 between the first sealing member 20 and the crystal resonator plate 10 is 1.00 μm or less, and the thickness of the sealing path 116 between the second sealing member 30 and the crystal resonator plate 10 is 1.00 μm or less (specifically, 0.15 μm to 1.00 μm in the case of Au — Au bonding in the present embodiment). In the case of the conventional metal paste sealing material using Sn (tin), the thickness is 5 μm to 20 μm as a comparative example.

Next, the first excitation electrode 111 and the second excitation electrode 112 of the crystal resonator element 10 according to the present embodiment will be described with reference to fig. 4, 5, and 8.

In the present embodiment, as described above, the first excitation electrode (one excitation electrode) 111 is formed in a diamond shape, and the second excitation electrode (the other excitation electrode) 112 is formed in a square shape. The first excitation electrode 111 is formed in a line-symmetric shape with respect to a straight line L1 passing through the center of gravity (center) 111a of the first excitation electrode 111 and parallel to the X axis. The second excitation electrode 112 is formed in a line-symmetric shape with respect to a straight line L2 passing through the center of gravity (center) 112a of the second excitation electrode 112 and parallel to the X axis. The center of gravity 111a of the first excitation electrode 111 is set at a position substantially coinciding with the center of gravity 112a of the second excitation electrode 112 in a plan view.

In addition, the area of the second excitation electrode 112 formed in a square shape is larger than the area of the first excitation electrode 111 formed in a diamond shape. Of the four sides (112e, 112f, 112g, 112h) of the second excitation electrode 112, there is at least one pair of parallel sides (112e, 112g) parallel to each other, and the parallel sides 112e and 112g extend parallel to the X axis. The first excitation electrode 111 is formed with at least one protruding portion that protrudes outward beyond a portion between the parallel sides 112e and 112g (a portion sandwiched between the parallel sides 112e and 112g) without completely overlapping the second excitation electrode 112 in plan view. In the present embodiment, a protruding portion 111c protruding outward (toward the + Z 'direction) from a side 112e on the + Z' direction side of the parallel side 112e and the parallel side 112g of the second excitation electrode 112, and a protruding portion 111d protruding outward (toward the-Z 'direction) from a side 112g on the Z' direction side of the parallel side 112e and the parallel side 112g of the second excitation electrode 112 are provided. That is, the first excitation electrode 111 has the protruding portions 111c and 111d at both ends in the Z' axis direction. The protruding portions 111c and 111d are provided on both sides of the center of gravity 111a of the first excitation electrode 111, and in this case, they are provided at both ends of the first excitation electrode 111 in the Z' axis direction. The projections 111c and 111d have outer edge shapes that do not extend along (are not parallel to) the parallel sides 112e and 112g in a plan view. In this way, the protruding portions 111c and 111d protrude outward from the portion between the parallel sides 112e and 112g in plan view, and have an outer edge shape that does not follow the parallel sides 112e and 112g in plan view. In other words, the protruding portions 111c and 111d have outer edge shapes that are not parallel to the X axis in plan view.

In this embodiment, from another viewpoint, the center of gravity (center) 111a of the first excitation electrode 111 is set to substantially coincide with the center of gravity (center) 112a of the second excitation electrode 112 in a plan view, and the first excitation electrode 111 is disposed so as to be inclined with respect to the second excitation electrode 112 in a plan view. Here, "obliquely arranged" means that the outer edge of one of the first excitation electrode 111 and the second excitation electrode 112 is obliquely arranged with respect to the outer edge of the other excitation electrode, and means that the one excitation electrode is rotated or displaced (slid) with respect to the other excitation electrode, has a protrusion, or has an expansion/contraction. This will be specifically described below.

As described above, the first excitation electrode (one excitation electrode) 111 is formed in a diamond shape, and the second excitation electrode (the other excitation electrode) 112 is formed in a square shape. The first excitation electrode 111 is formed in a line-symmetric shape with respect to a straight line L1 passing through the center of gravity 111a of the first excitation electrode 111 and parallel to the X axis. The second excitation electrode 112 is formed in a line-symmetric shape with respect to a straight line L2 passing through the center of gravity 112a of the second excitation electrode 112 and parallel to the X axis.

Four sides (111e, 111f, 111g, and 111h) which are outer edges of the first excitation electrode 111 are arranged obliquely to four sides (112e, 112f, 112g, and 112h) which are outer edges of the second excitation electrode 112. Four sides (112e, 112f, 112g, 112h) of the second excitation electrode 112 each extend in a direction parallel to the X-axis or Z '-axis, while four sides (111e, 111f, 111g, 111h) of the first excitation electrode 111 each extend in a direction parallel to the X-axis or Z' -axis. That is, four sides (111e, 111f, 111g, and 111h) of the first excitation electrode 111 extend in a direction inclined to the X axis and the Z' axis.

One side 111e of the first excitation electrode 111 is inclined by about 45 ° with respect to one side 112e (or one side 112f) of the second excitation electrode 112 and extends in a direction inclined to the X-axis and the Z' -axis. One side 111f of the first excitation electrode 111 is inclined at about 45 ° with respect to one side 112f (or one side 112g) of the second excitation electrode 112 and extends in a direction inclined to the X-axis and the Z' -axis. One side 111g of the first excitation electrode 111 is inclined by about 45 ° with respect to one side 112g (or one side 112h) of the second excitation electrode 112, and extends in a direction inclined to the X-axis and the Z' -axis. One side 111h of the first excitation electrode 111 is inclined by about 45 ° with respect to one side 112h (or one side 112e) of the second excitation electrode 112 and extends in a direction inclined to the X-axis and the Z' -axis.

In the present embodiment, a first lead wiring 113 connected to the first excitation electrode 111 is formed on the first main surface of the holding portion 13, and a second lead wiring 114 connected to the second excitation electrode 112 is formed on the second main surface of the holding portion 13. The first lead-out wiring 113 extends from a corner (top) of the first excitation electrode 111 toward the-Z' direction. The second extraction wiring 114 extends from a corner (top) of the second excitation electrode 112 toward the-Z' direction. The first lead-out wiring 113 and the second lead-out wiring 114 are configured to have substantially the same width. One of the first lead-out wiring 113 and the second lead-out wiring 114 is arranged to be shifted from the other in a plan view. In this embodiment, since the first lead-out wiring 113 and the second lead-out wiring 114 partially overlap each other, most of the first lead-out wiring 113 and the second lead-out wiring 114 do not overlap each other. A boundary 111b (fig. 4) between the first excitation electrode 111 and the first lead-out wiring 113 and a boundary 112b (fig. 5) between the second excitation electrode 112 and the second lead-out wiring 114 are indicated by dashed-dotted lines.

The protrusions 111c and 111d are substantially triangular and have outer edge shapes that are not parallel to the parallel sides 112e and 112g in a plan view. Specifically, the projecting end (+ Z' -direction side end) of the projecting portion 111c is angular in plan view, not along the parallel side 112 e. In other words, the protruding end of the protruding portion 111c is not parallel to the X axis in a plan view, and has an angular shape. In the present embodiment, the protruding portion 111c is substantially triangular, and all of the outer edge of the protruding portion 111c is not parallel to the parallel side 112e and not parallel to the X axis in a plan view.

The projecting end (-Z' -direction side end) of the projecting portion 111d is angular in plan view, not along the parallel side 112 g. In other words, the protruding end of the protruding portion 111d is not parallel to the X axis in a plan view, and has an angular shape. In the present embodiment, the protruding portion 111d is formed in a substantially triangular shape, and all portions of the outer edge of the protruding portion 111d are not parallel to the parallel side 112g and not parallel to the X axis in a plan view.

According to the present embodiment, since the protruding portions 111c and 111d of the first excitation electrode 111 have outer edge shapes that are not parallel to the parallel sides 112e and 112g and not parallel to the X axis in a plan view, it is possible to reduce the distortion caused by the outer edge shape of the first excitation electrode 111. In other words, it is considered that the outer edge shape of the first excitation electrode 111 has a large spurious due to the portion parallel to the X axis, and therefore, in the present embodiment, by making the protruding portions 111c and 111d of the first excitation electrode 111 have an outer edge shape not parallel to the X axis, it is possible to reduce spurious due to the outer edge shape of the first excitation electrode 111. Therefore, in the case of the crystal resonator element 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, the spurious phenomenon can be reduced and the electrical characteristics can be improved.

In particular, in the case of the crystal resonator plate 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, a connection point for direct electromechanical connection is not formed in the vibration portion 11 in a step after the vibration portion 11 is formed, and thus, there is no occurrence of spurious caused by the formation of the connection point. In other words, it is possible to reduce the spurious caused by the excitation electrodes 111 and 112 and suppress further spurious caused by the process after the formation of the vibrating portion 11. In the vibrating portion 11 of the crystal resonator plate 10 with a frame, since the excitation electrode 111 and the excitation electrode 112 can be configured without taking the connection point into consideration, the degree of freedom in designing the excitation electrode 111 and the excitation electrode 112 is improved, and the size and the position of the electrodes are easily adjusted. In particular, by forming the excitation electrodes 111 and 112 large, electrical characteristics can be improved; by arranging the center of the vibrating portion 11 to substantially coincide with the centers of the excitation electrodes 111 and 112 in a plan view, it is possible to suppress the generation of an asymmetric vibration mode which is spurious.

In the case of the crystal resonator element 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are connected by the holding portion 13, unlike the conventional art, a holding electrode for holding the crystal resonator element 10 is not necessary. Therefore, the installation space of the holding electrode can be omitted, and the center of gravity (center) 111a of the first excitation electrode 111 and the center of gravity (center) 112a of the second excitation electrode 112 can be brought close to the center of the vibrating portion 11. In this case, since only one holding portion 13 is provided in the crystal resonator plate 10, leakage of vibration from the vibrating portion 11 to the outer frame portion 12 via the holding portion 13 can be suppressed as much as possible. Specifically, since the holding portion 13 is provided at the corner portion where the displacement of the piezoelectric vibration is small in the outer peripheral end portion of the vibrating portion 11, the leakage of the piezoelectric vibration to the outer frame portion 12 via the holding portion 13 can be suppressed as compared with the case where the holding portion 13 is provided at a portion other than the corner portion (the center portion of the side), and the piezoelectric vibration can be more effectively performed in the vibrating portion 11, so that the electrical characteristics can be improved. Further, as compared with the case where two or more holding portions 13 are provided, the stress acting on the vibrating portion 11 can be reduced, and the frequency shift of the piezoelectric vibration due to such stress can be reduced, thereby improving the stability of the piezoelectric vibration.

In addition, according to the present embodiment, since the first excitation electrode 111 is disposed obliquely to the second excitation electrode 112 in a plan view, it is possible to reduce spurious caused by the outer edge shape of the first excitation electrode 111. In other words, it is considered that the distortion due to the portion following the outer edge shape of the second excitation electrode 112 is large in the outer edge shape of the first excitation electrode 111, and in the present embodiment, since the four sides (111e, 111f, 111g, and 111h) of the first excitation electrode 111 are arranged obliquely with respect to the four sides (112e, 112f, 112g, and 112h) of the second excitation electrode 112, the distortion due to the outer edge shape of the first excitation electrode 111 can be reduced. Therefore, in the so-called frame-attached crystal resonator plate 10 in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, it is possible to reduce spurious and improve electrical characteristics.

In particular, in the case of the crystal resonator plate 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, a connection point for direct electromechanical connection is not formed in the vibration portion 11 in a step after the formation of the vibration portion 11, and thus, there is no occurrence of spurious caused by the formation of the connection point. In other words, it is possible to reduce the spurious caused by the excitation electrodes 111 and 112 and suppress further spurious caused by the process after the formation of the vibrating portion 11. In the vibrating portion 11 of the crystal resonator plate 10 with a frame, since the excitation electrode 111 and the excitation electrode 112 can be formed without taking the connection point into consideration, the degree of freedom in designing the excitation electrode 111 and the excitation electrode 112 is improved, and the size and the position of the electrodes are easily adjusted. In particular, by forming the excitation electrodes 111 and 112 to be large, electrical characteristics can be improved; by arranging the center of the vibrating portion 11 to substantially coincide with the centers of the excitation electrodes 111 and 112 in a plan view, it is possible to suppress the generation of an asymmetric vibration mode which is spurious.

In the present embodiment, the protruding portions 111c and 111d are provided at positions on both sides of the center of gravity 111a of the first excitation electrode 111, and both the protruding portions 111c and 111d have outer edge shapes that are not parallel to the outer edge of the second excitation electrode 112 and not parallel to the X axis in a plan view, and therefore, it is possible to reduce spurious caused by the outer edge shape of the first excitation electrode 111. In other words, it is considered that the outer edge shape of the first excitation electrode 111 has a large amount of spurious caused by the portion parallel to the X axis, and therefore, in the present embodiment, by configuring the outer edge shapes of the protruding portion 111c and the protruding portion 111d of the first excitation electrode 111 to be non-parallel to the X axis, spurious caused by the outer edge shape of the first excitation electrode 111 can be reduced.

Here, since the second excitation electrode 112 is formed in a rectangular shape and the first excitation electrode 111 is formed in a diamond shape, all of the outer edges (four sides (111e, 111f, 111g, and 111h)) of the first excitation electrode 111 are not parallel to the four sides (112e, 112f, 112g, and 112h) of the second excitation electrode 112 in a plan view and are not parallel to the X axis. Therefore, the distortion due to the outer edge shape of the first excitation electrode 111 can be reduced more effectively. In the case of the crystal resonator plate 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, the first excitation electrode and the second excitation electrode are conventionally configured to have the same shape (mainly rectangular shape) and are arranged at substantially the same position in a plan view. However, by configuring the second excitation electrode 112 to have a rectangular shape, the frequency of the crystal resonator plate 10 can be adjusted using a mask or jig for a rectangular electrode similar to that in the related art, which is advantageous for frequency adjustment.

Further, since the center of gravity 111a of the first excitation electrode 111 is set at a position substantially coincident with the center of gravity 112a of the second excitation electrode 112 in a plan view, the protruding portions 111c and 111d located at both ends of the first excitation electrode 111 in the Z' axis direction can be configured to have a line-symmetrical shape with respect to a straight line L1 passing through the center of gravity 111a of the first excitation electrode 111 and parallel to the X axis (parallel side 112e, parallel side 112 g). This can reduce spurious caused by the asymmetry between the projection 111c and the projection 111d of the first excitation electrode 111.

Further, since the area of the second excitation electrode 112 is larger than that of the first excitation electrode 111, the frequency of the crystal resonator plate 10 can be easily adjusted by performing, for example, ion beam etching or the like on the second excitation electrode 112 having a larger area. In other words, the second excitation electrode 112 having a larger area can be used as an electrode for frequency adjustment. In the case of the crystal resonator plate 10 with a frame in which the vibration portion 11 and the outer frame portion 12 are coupled by the holding portion 13, the first excitation electrode and the second excitation electrode are configured to have the same shape (mainly rectangular shape) and are arranged at positions substantially matching each other in a plan view as described above. However, by making the areas of the first excitation electrode 111 and the second excitation electrode 112 different from each other, a frequency adjustment region can be secured in the second excitation electrode 112 having a larger area, which is advantageous for the frequency adjustment of the crystal resonator plate 10. When the area of the second excitation electrode 112 is smaller than the area of the first excitation electrode 111, the normal temperature CI value of the crystal resonator plate 10 may be high, and the temperature change in CI value may be unstable. However, by making the area of the second excitation electrode 112 larger than the area of the first excitation electrode 111, the characteristics of the crystal resonator plate 10 (the room temperature CI value, the temperature characteristics of the CI value) can be maintained well.

The first lead-out wiring 113 and the second lead-out wiring 114 extend in the same direction, and one lead-out wiring is arranged so as to be shifted from the other lead-out wiring in a plan view. Here, there is a possibility that the portion where the first lead-out wiring 113 and the second lead-out wiring 114 overlap vibrates and the vibration leaks 12 to the outer frame portion. Therefore, by reducing the overlapping portion of the first lead-out wiring 113 and the second lead-out wiring 114 as much as possible, it is possible to suppress the vibration generated in the first lead-out wiring 113 and the second lead-out wiring 114, and to prevent the vibration from leaking 12 to the outer frame portion. In this embodiment, since the first lead-out wiring 113 and the second lead-out wiring 114 extend in the-Z' direction from the corner (top) of the first excitation electrode 111 and the corner (top) of the second excitation electrode 112, the first lead-out wiring 113 and the second lead-out wiring 114 can be easily arranged in a staggered manner. Further, since the first lead-out wiring 113 and the second lead-out wiring 114 extend in the same direction, the first lead-out wiring 113 and the second lead-out wiring 114, and the wirings connected to the first lead-out wiring 113 and the second lead-out wiring 114 can be simplified, and the complicated wirings can be omitted, which is advantageous in downsizing the crystal resonator element 10, as compared with the case where the first lead-out wiring 113 and the second lead-out wiring 114 extend in different directions.

In addition, in the crystal resonator 100 including the crystal resonator element 10, the same operation and effect as those of the crystal resonator element 10 can be obtained.

The embodiments disclosed herein are examples in all aspects and are not intended to be construed as limiting. Therefore, the technical scope of the present invention is not to be interpreted only in accordance with the above-described embodiments, but is defined based on the description of the claims. And all changes which come within the meaning and range of equivalency of the claims are intended to be embraced therein.

In the above embodiment, the first excitation electrode 111 formed in a rhombic shape is provided on the first main surface 101 of the crystal resonator plate 10, and the second excitation electrode 112 formed in a rectangular shape is provided on the second main surface 102 of the crystal resonator plate 10; however, the first excitation electrode 111 formed in a rectangular shape may be provided on the first main surface 101 of the crystal resonator plate 10, and the second excitation electrode 112 formed in a rhombic shape may be provided on the second main surface 102 of the crystal resonator plate 10. In this case, the protruding portions provided at both ends of the second excitation electrode 112 in the Z' -axis direction may have an outer edge shape that is not parallel to the parallel sides of the first excitation electrode 111 in plan view.

The shape, arrangement position, and the like of the first excitation electrode 111 and the second excitation electrode 112; the shapes, arrangement positions, and the like of the protruding portions 111c and 111d of the first excitation electrode 111; the arrangement positions of the first lead-out wiring 113 and the second lead-out wiring 114 are merely examples, and various modifications can be made. The shape of the first excitation electrode 111 may be a shape other than a rhombus, such as a rectangle, a parallelogram, an ellipse, an oblong, a hexagon, an octagon, or the like. The shape of the second excitation electrode 112 may be other than a rectangle, for example, a parallelogram, an ellipse, an oblong, a hexagon, an octagon, or the like. The shape of the protruding portions 111c and 111d of the first excitation electrode 111 may be other than a triangle, for example, a semicircular shape.

In addition, the center of gravity 111a of the first excitation electrode 111 and the center of gravity 112a of the second excitation electrode 112 may not substantially coincide in a plan view. The first excitation electrode 111 may not have a line-symmetric shape with respect to a straight line L1 passing through the center of gravity 111a of the first excitation electrode 111 and parallel to the X axis. The second excitation electrode 112 may not have a line-symmetric shape with respect to a straight line L2 passing through the center of gravity 112a of the second excitation electrode 112 and parallel to the X axis.

The projecting end of the projecting portion 111c of the first excitation electrode 111 may be not parallel to the parallel side 112e in plan view or not parallel to the X axis, and not all portions of the outer edge of the projecting portion 111c may be not parallel to the parallel side 112e in plan view. As long as the projecting end of the projecting portion 111d of the first excitation electrode 111 is not parallel to the parallel side 112g in plan view and not parallel to the X axis, not all portions of the outer edge of the projecting portion 111d may be not parallel to the parallel side 112g in plan view. The protruding ends of the protruding portion 111c and the protruding portion 111d of the first excitation electrode 111 may also be arc-shaped.

The parallel sides 112e and 112g of the second excitation electrode 112 may not be parallel to the X axis. The first excitation electrode 111 may be provided with a protrusion at one of the two ends in the Z' -axis direction. Three or more protrusions of the first excitation electrode 111 may be provided. In these cases, the protruding end of the protruding portion of the first excitation electrode 111 may have an outer edge shape that is not parallel to the parallel side of the second excitation electrode 112 and not parallel to the X axis in a plan view.

In the above embodiment, the four sides (111e, 111f, 111g, and 111h) of the first excitation electrode 111 are arranged obliquely with respect to the four sides (112e, 112f, 112g, and 112h) of the second excitation electrode 112 and are configured to have the shapes of the protrusions 111c and 111d, but the first excitation electrode 111 and the second excitation electrode 112 may be configured to have the same shape (for example, square, diamond, and oval), and one of the first excitation electrode 111 and the second excitation electrode 112 may be configured to have a shape rotated about the center of gravity 111a of the first excitation electrode 111 with respect to the other excitation electrode. For example, the first excitation electrode 111 and the second excitation electrode 112 are formed in a square shape, and the first excitation electrode 111 is formed in a shape rotated around the center of gravity 111a of the first excitation electrode 111 with respect to the second excitation electrode 112. In this case, the first excitation electrode 111 and the second excitation electrode 112 may have mutually similar shapes.

Further, the first excitation electrode 111 and the second excitation electrode 112 may be formed in the same shape (for example, square, diamond, oval, or the like), and one of the first excitation electrode 111 and the second excitation electrode 112 may be formed in a shape that is expanded (expanded or contracted) in the X-axis direction or the Z' -axis direction with respect to the other excitation electrode.

In addition, in a plan view, all portions of the first lead-out wiring 113 and the second lead-out wiring 114 may not completely overlap with each other. The first and second lead-out wirings 113 and 114 may extend in different directions from each other. In the above embodiment, the first lead-out wiring 113 and the second lead-out wiring 114 extend from the corner (top) of the first excitation electrode 111 and the corner (top) of the second excitation electrode 112, respectively, but the present invention is not limited to this, and the first lead-out wiring 113 and the second lead-out wiring 114 may extend from the middle portion of any one of the four sides of the first excitation electrode 111 and the second excitation electrode 112, respectively.

In addition, the crystal resonator plate 10 may be provided with two or more holding portions 13 for coupling the vibrating portion 11 and the outer frame portion 12.

In the above-described embodiment, the case where the present invention is applied to the crystal resonator 100 has been described, but the present invention is not limited to this, and for example, the present invention may be applied to a crystal oscillator or the like.

In the above embodiment, the first sealing member 20 and the second sealing member 30 are made of quartz plates, but the present invention is not limited thereto, and the first sealing member 20 and the second sealing member 30 may be made of glass, for example.

The application claims priority based on Japanese application No. 2019-102950 No. 5/31 in 2019, Japanese application No. 2019-102951 No. 5/31 in 2019, and Japanese application No. 2019-115542 No. 6/21 in 2019. It goes without saying that all of the contents thereof are introduced in the present application.

< description of reference numerals >

10 Crystal vibrating piece (piezoelectric vibrating plate)

11 vibration part

12 outer frame part

13 holding part

20 first sealing member

30 second seal member

100 crystal resonator (piezoelectric vibrating device)

111 first excitation electrode (one excitation electrode)

111a center of gravity

111c, 111d projection

112 second excitation electrode (the other excitation electrode)

112a center of gravity

112e, 112g parallel edges

L1, L2 straight line.