阅读说明：本技术 一种全向微流体惯性阈值加速度计 (Omnidirectional microfluid inertial threshold accelerometer ) 是由 陈文国 王瑞 王慧颖 于 2021-01-29 设计创作，主要内容包括：本发明公开了一种全向微流体惯性阈值加速度计,包括衬底、液滴固定凸块、通道凸块、封装盖、导电液滴和信号电极；液滴固定凸块和通道凸块呈圆周阵列分布在衬底上,其间隙分别形成微流体通道、空气循环通道和储液腔；封装盖与衬底对应设置,并通过螺栓固定；导电液滴设置在储液腔内；信号电极与微流体通道对应；微流体通道外端通过密封胶密封；通过使用导电液滴和微流体通道结构,形成“固-液”接触式机构,惯性加速度超过设计阈值时,导电液滴向微流体通道内流动并与信号电极接触,信号电极瞬间导通,当惯性消失,导电液滴重新回复到初始状态,信号电极断开,可实现水平面对高精度的惯性测量、高精度的角度测量,并且使用寿命得到大幅提升。(The invention discloses an omnidirectional microfluid inertial threshold accelerometer, which comprises a substrate, a liquid drop fixing lug, a channel lug, a packaging cover, a conductive liquid drop and a signal electrode, wherein the liquid drop fixing lug is arranged on the substrate; the liquid drop fixing lugs and the channel lugs are distributed on the substrate in a circumferential array, and gaps among the liquid drop fixing lugs and the channel lugs form a micro-fluid channel, an air circulation channel and a liquid storage cavity respectively; the packaging cover and the substrate are arranged correspondingly and fixed through bolts; the conductive liquid drops are arranged in the liquid storage cavity; the signal electrode corresponds to the microfluidic channel; the outer end of the microfluid channel is sealed by sealant; by using the conductive liquid drop and the microfluidic channel structure, a solid-liquid contact type mechanism is formed, when the inertial acceleration exceeds a designed threshold value, the conductive liquid drop flows into the microfluidic channel and is in contact with the signal electrode, the signal electrode is instantly conducted, when the inertia disappears, the conductive liquid drop returns to an initial state again, the signal electrode is disconnected, high-precision inertial measurement and high-precision angle measurement of the horizontal plane can be realized, and the service life is greatly prolonged.)

1. An omnidirectional microfluidic inertial threshold accelerometer, comprising a substrate (1), a droplet fixing bump (2), a channel bump (3), a package cover (4), a conductive droplet (5) and a signal electrode (6);

the liquid drop fixing lugs (2) and the channel lugs (3) are respectively provided with a plurality of blocks which are respectively distributed at the positions close to the middle part and the edge of the top plane of the substrate (1) in a circumferential array, corresponding gaps are arranged between the side walls of every two adjacent liquid drop fixing lugs (2) and between the side walls of the two channel lugs (3) to jointly form a micro-fluid channel (7) extending from the middle part to the edge of the substrate (1), and a gap is arranged between each channel lug (3) and the corresponding liquid drop fixing lug (2) to form an annular air circulation channel (8);

the packaging cover (4) is arranged corresponding to the substrate (1), and the bottom plane of the packaging cover is abutted against the top planes of the channel bump (3) and the liquid drop fixing bump (2) and is fixed through a bolt;

one end of the plurality of liquid drop fixing lugs (2) close to the middle part of the substrate (1) and the top plane of the substrate (1) and the bottom plane of the packaging cover (4) form a liquid storage cavity together; the conductive liquid drops (5) are arranged in the liquid storage cavity;

the signal electrodes (6) are provided with a plurality of pieces, respectively correspond to the microfluidic channels (7), extend inwards along the outer sides of the microfluidic channels (7), and are fixed on the lower end face of the packaging cover (4);

one end of the microfluidic channel (7) close to the edges of the substrate (1) and the packaging cover (4) is sealed through sealing glue.

2. The omnidirectional microfluidic inertial threshold accelerometer according to claim 1, wherein one end of each of two adjacent channel bumps (3) near the edge of the substrate (1) is notched through the microfluidic channel (7), and forms a sealing opening (9) together with the top end surface of the substrate (1) and the bottom end surface of the sealing cover (4) and is sealed by a sealant.

3. The omnidirectional microfluidic inertial threshold accelerometer according to claim 2, wherein the droplet fixing bump (2) and the channel bump (3) are each provided with 3-36 bumps having a height of 100 μm-5 mm.

4. An omnidirectional microfluidic inertial threshold accelerometer according to claim 3, wherein said drop fixing bump (2) is a sector with its axial end facing said reservoir and its end rounded;

the channel bump (3) is a fan-shaped annular cylinder, and the arc surface of the inner side of the channel bump corresponds to the arc surface of the outer side of the liquid drop fixing bump (2) to form an annular air circulation channel (8).

5. An omnidirectional microfluidic inertial threshold accelerometer according to claim 4, wherein the distance between said air circulation channel (8) and said reservoir is greater than the distance between the end of said signal electrode (6) proximate to said reservoir and said reservoir.

6. An omnidirectional microfluidic inertial threshold accelerometer according to claim 5, wherein said substrate (1) and said encapsulation cover (4) are made of semiconductor material or insulating material.

7. The omnidirectional microfluidic inertial threshold accelerometer of claim 6, wherein said semiconductor material or insulating material is: silicon, silicate glass, polymethyl methacrylate, quartz glass, or polydimethylsiloxane.

8. The omnidirectional microfluidic inertial threshold accelerometer of claim 7, wherein said conductive liquid droplet (5) is mercury, a gallium-based liquid metal, or a liquid conductive ink, the volume of which is the same size as said reservoir.

9. The omnidirectional microfluidic inertial threshold accelerometer according to claim 8, wherein said signal electrode (6) is made of nickel, chromium, copper or gold.

10. An omnidirectional microfluidic inertial threshold accelerometer according to claim 9, wherein said substrate (1), said drop fixing bump (2) and said channel bump (3) are integrally prepared; the signal electrode (6) is fixed on the bottom end face of the packaging cover (4) by adopting an electroplating or sputtering deposition process.

Technical Field

The invention relates to the technical field of sensors, in particular to an omnidirectional microfluid inertial threshold accelerometer based on microfluidic chip design.

Background

The inertial threshold accelerometer is a sensing device integrating sensing and execution, is a passive device, and has wide potential application requirements in the fields of consumer electronics, aerospace, military mechanical equipment and the like. With the development of an internet of things system, the demand of an inertia detection/detection device in the internet of things system is large, and particularly, a passive inertia threshold sensor has great advantages in the performance of a remote internet of things system with difficulty in power supply or the interior of the internet of things system with difficulty in battery replacement. However, in an integrated installation system, in order to be able to monitor acceleration thresholds in multiple directions, it is often necessary to install multiple single-axis threshold accelerometers in different directions, so that the integration degree of the system is reduced, and the proposed omnidirectional threshold accelerometer can improve the system integration degree in the integrated installation. Therefore, an omnidirectional threshold accelerometer is the best choice for current integrated system applications.

At present, the research and development of the inertia threshold deceleration meter mainly adopts a solid-solid contact type mechanical structure design, the contact resistance of the structure design is large, and the collision contact between the mechanical structures causes the structural damage. Therefore, the solid-liquid contact type structure design is provided for overcoming the defects of the solid-solid contact type inertial threshold value sensor, and has great advantages in prolonging the service life of the device and improving the performance of the device.

However, in the current market, a threshold sensor designed by using a liquid conductive liquid as a sensing element is blank in the market and cannot meet the market demand.

Therefore, how to provide an accelerometer designed by a solid-liquid contact mechanical structure is a problem that needs to be solved by those skilled in the art.

Disclosure of Invention

Accordingly, the present invention is directed to an omnidirectional microfluidic inertial threshold accelerometer that solves, at least in part, the above problems of the prior art.

In order to achieve the purpose, the invention adopts the following technical scheme:

an omnidirectional microfluidic inertial threshold accelerometer comprises a substrate, a droplet fixing bump, a channel bump, a packaging cover, a conductive droplet and a signal electrode;

the liquid drop fixing lugs and the channel lugs are respectively provided with a plurality of blocks which are respectively distributed in the positions close to the middle part and the edge of the top plane of the substrate in a circumferential array, corresponding gaps are arranged between the side walls of every two adjacent liquid drop fixing lugs and between the side walls of the two channel lugs to jointly form a micro-fluid channel extending from the middle part to the edge of the substrate, and a gap is arranged between each channel lug and the corresponding liquid drop fixing lug to form an annular air circulation channel;

the packaging cover is arranged corresponding to the substrate, and the bottom plane of the packaging cover is abutted against the top planes of the channel bump and the liquid drop fixing bump and is fixed through a bolt;

one end of the liquid drop fixing lugs, which is close to the middle part of the substrate, and the top plane of the substrate and the bottom plane of the packaging cover form a liquid storage cavity together; the conductive liquid drop is arranged in the liquid storage cavity;

the signal electrodes are provided with a plurality of pieces which respectively correspond to the microfluidic channels, extend inwards along the outer sides of the microfluidic channels and are fixed on the lower end faces of the packaging covers;

one end of the microfluidic channel close to the edges of the substrate and the encapsulation cover is sealed by a sealant.

According to the technical scheme, compared with the prior art, the omnidirectional microfluid inertial threshold accelerometer is disclosed, aiming at the defects of a solid-solid contact type mechanical mechanism of an inertial threshold sensor, the solid-liquid contact type mechanism is realized by using a conductive liquid drop and a microfluid channel structure, and the omnidirectional threshold acceleration detection of a horizontal plane is realized by using the surface tension of conductive liquid under the microscale and the capillary force of the microfluid channel; when the inertia acceleration exceeds a designed threshold value, the conductive liquid drops flow into the microfluidic channel and are in contact with the signal electrodes, so that the signal electrodes are instantly conducted, after the inertia disappears, the conductive liquid drops return to the initial state again, the signal electrodes are disconnected, and due to the central symmetry structural design and the plurality of signal electrodes, the high-precision inertial measurement and high-precision angle measurement of the horizontal plane can be realized, and the service life is greatly prolonged.

Preferably, in the omnidirectional microfluidic inertial threshold accelerometer, a gap penetrating through the microfluidic channel is formed at one end of each of two adjacent channel bumps close to the edge of the substrate, a packaging opening is formed by the channel bumps, the top end face of the substrate and the bottom end face of the packaging cover, and the channel bumps are sealed by a sealant; this scheme can be sealed with inner structure, forms overall structure, prevents the loss of electrically conductive liquid drop, guarantees its operating condition.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the liquid drop fixing bump and the channel bump are both provided with 3 to 36 blocks, and the height is 100 micrometers to 5 millimeters.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the liquid drop fixing bump is a sector, an axial end of the sector faces the liquid storage cavity, and an end of the sector is rounded;

the channel bump is a fan-shaped annular cylinder, and the arc-shaped surface of the inner side of the channel bump corresponds to the arc-shaped surface of the outer side of the liquid drop fixing bump to form an annular air circulation channel; when receiving inertial force in this scheme, the electrically conductive liquid drop moves into microfluid passageway to one side, and the extrusion air flows in air cycle passageway, guarantees the accuracy nature of detecting.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, a distance between the air circulation channel and the reservoir is greater than a distance between an end of the signal electrode close to the reservoir and the reservoir; the scheme provides a longer flow area for the conductive liquid drops, and prevents the conductive liquid drops from flowing into the air circulation channel to influence the precision of data.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the substrate and the package cover are made of semiconductor material or insulating material.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the semiconductor material or the insulating material is: silicon, silicate glass, polymethyl methacrylate, quartz glass, or polydimethylsiloxane.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the conductive liquid drop is mercury, gallium-based liquid metal, or liquid conductive ink, and has a volume size the same as that of the liquid storage cavity.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the signal electrode is made of nickel, chromium, copper or gold.

Preferably, in the above omnidirectional microfluidic inertial threshold accelerometer, the substrate, the droplet fixing bump and the channel bump are integrally prepared; the signal electrode is fixed on the bottom end face of the packaging cover by adopting an electroplating or sputtering deposition process.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic diagram of the structure provided by the present invention;

FIG. 2 is a schematic view of the present invention with the package board and signal electrodes removed;

FIG. 3 is a schematic diagram of the structure of the package plate and the signal electrode of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Referring to fig. 1-3, an omnidirectional microfluidic inertial threshold accelerometer according to the present invention includes:

the liquid crystal display comprises a substrate 1, a liquid drop fixing lug 2, a channel lug 3, a packaging cover 4, a conductive liquid drop 5 and a signal electrode 6;

the liquid drop fixing lugs 2 and the channel lugs 3 are respectively provided with a plurality of blocks which are respectively distributed in the positions close to the middle part and the edge of the top plane of the substrate 1 in a circumferential array, corresponding gaps are arranged between the side walls of every two adjacent liquid drop fixing lugs 2 and between the side walls of the two channel lugs 3 to jointly form a micro-fluid channel 7 extending from the middle part to the edge of the substrate 1, and a gap is arranged between each channel lug 3 and the corresponding liquid drop fixing lug 2 to form an annular air circulation channel 8;

the packaging cover 4 is arranged corresponding to the substrate 1, and the bottom plane of the packaging cover is abutted against the top planes of the channel bump 3 and the liquid drop fixing bump 2 and is fixed through a bolt;

one end of the plurality of liquid drop fixing lugs 2 close to the middle part of the substrate 1, the top plane of the substrate 1 and the bottom plane of the packaging cover 4 form a liquid storage cavity together; the conductive liquid drops 5 are arranged in the liquid storage cavity;

the conductive liquid drops 5 are arranged in the liquid storage cavity;

the signal electrode 6 is provided with a plurality of pieces which respectively correspond to the microfluidic channels 7, extend inwards along the outer sides of the microfluidic channels 7 and are fixed on the lower end face of the packaging cover 4;

the end of the microfluidic channel 7 close to the edge of the substrate 1 and the encapsulation cover 4 is sealed by a sealing compound.

Specifically, the substrate 1 is a regular polygon plate, the number of edges of the regular polygon plate is 3-36, the diameter is 1-100 mm, and the thickness is 0.5-6 mm. .

Specifically, the shape of the encapsulation cover 4 corresponds to the substrate 1, the diameter size is 5-100 mm, and the thickness is 0.5-6 mm.

Specifically, the length of the microfluidic channel 7 is 0.29-98 mm, and the width is 0.02-3 mm.

Specifically, the diameter of the liquid storage cavity is 0.1-10 mm, the depth is 0.1-5 mm, and the shape and the size of the conductive liquid drop 5 correspond to the liquid storage cavity.

In the above embodiment of the present invention, the end of the two adjacent channel bumps 3 near the edge of the substrate 1 is provided with a notch penetrating through the microfluidic channel 7, and forms a package opening 9 together with the top end surface of the substrate 1 and the bottom end surface of the package cover 4, and is sealed by a sealant.

Specifically, the encapsulation opening 9 corresponds to the microfluidic channel 7, and has a length of 0.2-2.5 mm, a width of 0.2-2 mm, and a depth of 0.2-2 mm.

In the above embodiment of the present invention, 3 to 36 droplet fixing bumps 2 and 36 channel bumps 3 are provided.

Specifically, the height of the liquid drop fixing projection 2 is 0.1-5 mm

In the above embodiment of the present invention, the liquid drop fixing projection 2 is a sector, the axial end of which faces the liquid storage chamber and the end of which is rounded;

the channel projection 3 is a fan-shaped annular cylinder, and the arc surface of the inner side of the channel projection corresponds to the arc surface of the outer side of the liquid drop fixing projection to form an annular air circulation channel 8.

Specifically, the fillet radius of fillet processing is 0.1-1 mm.

In the above embodiment of the present invention, the distance between the air circulation channel 8 and the liquid storage cavity is greater than the distance between the end of the signal electrode 6 close to the liquid storage cavity and the liquid storage cavity.

Specifically, the distance between the air circulation channel 8 and the liquid storage cavity is 0.5-5 mm, and the channel width is 0.3-3 mm.

In the above-described embodiments of the present invention, the substrate 1 and the package cover 4 are made of a semiconductor material or an insulating material.

In the above embodiments of the present invention, the semiconductor material or the insulating material is: silicon, silicate glass, polymethyl methacrylate, quartz glass, or polydimethylsiloxane.

In the above embodiments of the present invention, the conductive liquid droplet 5 is mercury, gallium-based liquid metal, or liquid conductive ink, and the volume size thereof is the same as the size of the liquid storage cavity.

In the above-described embodiment of the present invention, the signal electrode 6 is made of nickel, chromium, copper, or gold.

Specifically, signal electrode 6 is the L type, and its minor face setting is on the encapsulation lid 4 that corresponds 9 tops of encapsulation mouthful, and long limit is inboard along the outside of micro fluid channel 7 extension to the inboard, and its long limit length is 0.3 ~ 100mm, and the linewidth is 0.008 ~ 1.4mm, and thickness is 0.001 ~ 1 mm.

In the above embodiment of the present invention, the substrate 1, the droplet fixing bump 2, and the channel bump 3 are integrally prepared; the signal electrode 6 is fixed on the bottom end face of the packaging cover 4 by adopting an electroplating or sputtering deposition process.

Specifically, the liquid drop fixing bump 2 and the channel bump 3 are integrated with the substrate 1 and are prepared by etching processing on the substrate 1 or by reverse molding; the signal electrode 6 and the packaging cover 4 are integrated, and the signal electrode 6 is grown through metal electroplating of the positive photoresist mold

Specifically, the substrate 1, the encapsulation cover 4 and the channel bumps 3 at corresponding positions are all provided with corresponding positioning bolt holes, and the positioning bolt holes are sequentially penetrated and fixed through bolts.

Specifically, the positioning bolt holes on the substrate 1, the packaging cover 4 and the channel protrusions 3 can be etched by chemical solution, or can be prepared by methods such as laser drilling.

Specifically, after the substrate 1 and the encapsulation cover 4 are encapsulated in an oxygen-free environment by using bonding methods such as hot pressing, cold pressing and the like, a trace sample injector is used for injecting the conductive liquid drops 5 into the liquid storage cavity from the microfluidic channel 7, and finally sealant is used for encapsulating in the encapsulation opening 92 to complete device preparation.

Specifically, the principle of the invention is as follows:

the conductive liquid drop 5 is arranged in the liquid storage cavity and is positioned at the central position of the integral structure, the microfluidic channel 7 is distributed in a 360-degree space at the central position, the conductive liquid drop 5 has a tendency of flowing in the microfluidic channel 7 in a 360-degree plane space under the driving of inertia, when the inertial acceleration exceeds a design threshold value, the conductive liquid drop 5 flows into the microfluidic channel 7 and is in contact with the signal electrode 6, the signal electrode 6 is instantly conducted, and after the inertia disappears, the conductive liquid drop 5 returns to the initial state again and is disconnected with the signal electrode 6.

Due to the centrosymmetric structural design and the arrangement of the plurality of signal electrodes 6, the device can realize high-precision inertial measurement and high-precision angle measurement of the horizontal plane.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.