阅读说明：本技术 一种旋转电极镀膜系统 (Rotary electrode coating system ) 是由 邓必龙 郑利勇 于 2021-01-20 设计创作，主要内容包括：本发明涉及气相沉积技术领域,尤其涉及一种旋转电极镀膜系统,其包括电极组件,包括：电极架组件、射频电极片和接地电极片；所述射频电极片和所述接地电极片平行间隔设置在所述电极架组件上,所述射频电极片与射频电源电连接,所述接地电极片与所述射频电极片相互绝缘；公转组件,用于驱动电极架组件绕设定中心转动；自转组件,与所述电极架组件传动连接,用于驱动所述电极架组件绕自身轴线转动。本发明能够提高成膜的均匀性和镀膜效率。(The invention relates to the technical field of vapor deposition, in particular to a rotary electrode coating system, which comprises an electrode assembly and comprises: the electrode holder assembly, the radio-frequency electrode plate and the grounding electrode plate; the radio-frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly in parallel at intervals, the radio-frequency electrode plate is electrically connected with a radio-frequency power supply, and the grounding electrode plate and the radio-frequency electrode plate are mutually insulated; the revolution component is used for driving the electrode frame component to rotate around the set center; and the rotation assembly is in transmission connection with the electrode frame assembly and is used for driving the electrode frame assembly to rotate around the axis of the electrode frame assembly. The invention can improve the uniformity of film formation and the film coating efficiency.)

1. A rotary electrode coating system, comprising:

electrode assembly (1) comprising: an electrode holder assembly, a radio frequency electrode pad (12) and a ground electrode pad (14);

the radio-frequency electrode plates (12) and the grounding electrode plates (14) are arranged on the electrode frame assembly in parallel at intervals, the radio-frequency electrode plates (12) are electrically connected with a radio-frequency power supply, and the grounding electrode plates (14) are mutually insulated from the radio-frequency electrode plates (12);

a revolution component (2) for driving the electrode frame component to rotate around a set center;

and the rotation assembly (3) is in transmission connection with the electrode holder assembly and is used for driving the electrode holder assembly to rotate around the axis of the electrode holder assembly, and the set center and the axis of the electrode holder assembly are arranged at intervals.

2. The system of claim 1, wherein the revolution assembly (2) comprises a revolution driving gear (21) and a revolution driven gear (22), the revolution driving gear (21) is engaged with the revolution driven gear (22), the electrode holder assembly is rotatably disposed on the revolution driven gear (22), and the set center is the rotation center of the revolution driven gear (22).

3. The system according to claim 2, wherein the rotation assembly (3) comprises a rotation driving gear (31) and a rotation shaft (32), the rotation driving gear (31) is fixedly sleeved on the rotation shaft (32), and the rotation driving gear (31) is in transmission connection with the electrode holder assembly.

4. The rotary electrode coating system according to claim 3, wherein the rotating shaft (32) is disposed through the revolving driven gear (22) and is coaxial with the revolving driven gear (22).

5. The rotary electrode coating system according to claim 3, wherein the electrode holder assembly comprises an electrode holder (11) and a rotation driven gear (16), the rotation driven gear (16) is rotatably arranged on the revolution driven gear (22) and is meshed with the rotation driving gear (31), the electrode holder (11) is arranged on the rotation driven gear (16), and the radio frequency electrode plate (12) and the grounding electrode plate (14) are both arranged on the electrode holder (11).

6. The rotary electrode coating system according to claim 1, wherein a plurality of radio-frequency electrode plates (12) and grounding electrode plates (14) are arranged at intervals along the height direction of the electrode holder assembly, and the radio-frequency electrode plates (12) and the grounding electrode plates (14) are arranged in a one-to-one correspondence manner.

7. A rotary electrode coating system according to claim 3, further comprising a rotary electrode assembly (4), wherein the rotary electrode assembly (4) comprises a first rotary electrode assembly and a second rotary electrode assembly connected to each other, the upper end of the rotary shaft (32) is rotatably disposed on the first rotary electrode assembly, and the electrode holder assembly is rotatably disposed on the second rotary electrode assembly.

8. The rotary electrode coating system according to claim 7, wherein the first rotary electrode assembly comprises a first outer ring member (41) and a first inner ring member (43) which are coaxially arranged, a first relay roller (42) is arranged between the first outer ring member (41) and the first inner ring member (43), and the first inner ring member (43) is fixedly sleeved on the rotating shaft (32).

9. The rotary electrode coating system according to claim 7, wherein the second rotary electrode assembly comprises a second outer ring member (44) and a second inner ring member (46) which are coaxially arranged, a second relay roller (45) is arranged between the second outer ring member (44) and the second inner ring member (46), the second inner ring member (46) is fixedly sleeved on the electrode holder assembly, and the second outer ring member (44) is electrically connected with the radio-frequency electrode sheet (12).

10. The rotary electrode coating system according to claim 8, wherein the first outer ring member (41) is provided with an opening, a locking assembly (47) is disposed at the position of the opening, and the locking assembly (47) comprises:

two connecting ear plates (471) which are arranged at two ends of the opening part at intervals;

the mounting shaft (472) penetrates through the two connecting lug plates (471);

and the elastic piece (473) is sleeved on the installation shaft (472), one end of the elastic piece is abutted to the end part of the installation shaft (472), and the other end of the elastic piece is abutted to one of the connection lug plates (471).

Technical Field

The invention relates to the technical field of vapor deposition, in particular to a rotary electrode coating system.

Background

At present, an electrode coating system of PECVD (chemical vapor deposition) mainly utilizes electric fields formed between fixed electrode plates with different polarities to excite plasmas to coat a product. However, in the use process of the fixed electrode plate, the concentration of the plasma excited in the electric field is caused to be different due to the uneven distribution of the flow field of the monomer, so that the uniformity of the formed film is poor.

Therefore, a rotary electrode coating system is needed to solve the above technical problems.

Disclosure of Invention

The invention aims to provide a rotary electrode coating system which can improve the uniformity and the coating efficiency of film formation.

In order to achieve the purpose, the invention adopts the following technical scheme:

a rotary electrode coating system comprising:

an electrode assembly, comprising: the electrode holder assembly, the radio-frequency electrode plate and the grounding electrode plate;

the radio-frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly in parallel at intervals, the radio-frequency electrode plate is electrically connected with a radio-frequency power supply, and the grounding electrode plate and the radio-frequency electrode plate are mutually insulated;

the revolution component is used for driving the electrode frame component to rotate around the set center;

and the rotation assembly is in transmission connection with the electrode holder assembly and is used for driving the electrode holder assembly to rotate around the axis of the electrode holder assembly, and the set center and the axis of the electrode holder assembly are arranged at intervals.

Furthermore, the revolution assembly comprises a revolution driving gear and a revolution driven gear, the revolution driving gear is meshed with the revolution driven gear, the electrode holder assembly is rotatably arranged on the revolution driven gear, and the set center is the rotation center of the revolution driven gear.

Furthermore, the rotation assembly comprises a rotation driving gear and a rotating shaft, the rotation driving gear is fixedly sleeved on the rotating shaft, and the rotation driving gear is in transmission connection with the electrode holder assembly.

Furthermore, the rotating shaft penetrates through the revolution driven gear and is arranged coaxially with the revolution driven gear.

Furthermore, the electrode holder assembly comprises an electrode holder and an autorotation driven gear, the autorotation driven gear is rotatably arranged on the revolution driven gear and meshed with the autorotation driving gear, the electrode holder is arranged on the autorotation driven gear, and the radio frequency electrode slice and the grounding electrode slice are both arranged on the electrode holder.

Furthermore, the radio-frequency electrode plates and the grounding electrode plates are arranged at intervals along the height direction of the electrode holder assembly, and the radio-frequency electrode plates and the grounding electrode plates are arranged in a one-to-one correspondence manner.

Further, the electrode assembly further comprises a rotating electrode device, the rotating electrode device comprises a first rotating electrode assembly and a second rotating electrode assembly which are connected with each other, the upper end of the rotating shaft is rotatably arranged on the first rotating electrode assembly, and the electrode frame assembly is rotatably arranged on the second rotating electrode assembly.

Further, the first rotating electrode assembly comprises a first outer ring member and a first inner ring member which are coaxially arranged, a first relay roller is arranged between the first outer ring member and the first inner ring member, and the first inner ring member is fixedly sleeved on the rotating shaft.

Further, the second rotating electrode assembly comprises a second outer ring piece and a second inner ring piece which are coaxially arranged, a second relay roller is arranged between the second outer ring piece and the second inner ring piece, the second inner ring piece is fixedly sleeved on the electrode frame assembly, and the second outer ring piece is electrically connected with the radio-frequency electrode plate.

Further, be provided with the opening on the first outer ring spare, be provided with locking Assembly in the position of opening, locking Assembly includes:

the two connecting lug plates are arranged at two ends of the opening part at intervals;

the mounting shaft penetrates through the two connecting lug plates;

the elastic piece is sleeved on the installation shaft, one end of the elastic piece is abutted to the end of the installation shaft, and the other end of the elastic piece is abutted to one of the connection lug plates.

The invention has the beneficial effects that:

according to the rotary electrode coating system provided by the invention, the radio-frequency electrode plate and the grounding electrode plate are arranged on the electrode frame assembly at intervals in parallel, the radio-frequency electrode plate is electrically connected with the radio-frequency power supply, the grounding electrode plate and the radio-frequency electrode plate are insulated from each other, and a product to be coated is arranged between the radio-frequency electrode plate and the grounding electrode plate; the radio-frequency electrode plate and the grounding electrode plate can rotate around a set center under the drive of the revolution component, or rotate around the axis of the radio-frequency electrode plate and the grounding electrode plate under the drive of the rotation component, and products to be coated can be subjected to film formation in different regions and at different plasma concentrations through rotation or revolution of the radio-frequency electrode plate and the grounding electrode plate, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of the film formation is improved.

Drawings

FIG. 1 is a schematic view of a rotary electrode coating system of the present invention;

FIG. 2 is a schematic view of an electrode assembly in a rotary electrode coating system according to the present invention;

FIG. 3 is a schematic view of a revolution component and a rotation component in a rotary electrode coating system according to the present invention;

FIG. 4 is a schematic diagram of a rotary electrode assembly in a rotary electrode coating system according to the present invention.

In the figure:

1. an electrode assembly; 11. an electrode holder; 12. a radio frequency electrode sheet; 13. a first connecting piece; 14. a grounding electrode plate; 15. a second connecting sheet; 16. a self-rotation driven gear; 2. a revolution component; 21. a revolution driving gear; 22. a revolution driven gear; 3. a rotation assembly; 31. a rotation driving gear; 32. a rotating shaft; 4. a rotating electrode device; 41. a first outer ring member; 42. a first relay roller; 43. a first inner ring member; 44. a second outer ring member; 45. a second relay roller; 46. a second inner ring member; 47. a locking assembly; 471. connecting the ear plates; 472. installing a shaft; 473. an elastic member; 48. a sheet is fixed.

Detailed Description

The technical scheme of the invention is further explained by combining the attached drawings and the embodiment. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.

In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In order to improve the uniformity and coating efficiency of chemical vapor deposition, the invention provides a rotary electrode coating system as shown in fig. 1-4. This rotary electrode coating system includes: an electrode assembly 1, a revolution assembly 2 and a rotation assembly 3.

Wherein, electrode subassembly 1 includes: an electrode holder assembly, a radio frequency electrode pad 12 and a ground electrode pad 14; the radio-frequency electrode plates 12 and the grounding electrode plates 14 are arranged on the electrode frame assembly in parallel at intervals, the radio-frequency electrode plates 12 are electrically connected with a radio-frequency power supply, and the grounding electrode plates 14 are mutually insulated from the radio-frequency electrode plates 12; the revolution component 2 is used for driving the electrode frame component to rotate around the set center; the rotation assembly 3 is in transmission connection with the electrode holder assembly and used for driving the electrode holder assembly to rotate around the axis of the electrode holder assembly, and the set center is arranged at an interval with the axis of the electrode holder assembly.

The radio-frequency electrode plates 12 and the grounding electrode plates 14 are arranged on the electrode frame assembly in parallel at intervals, the radio-frequency electrode plates 12 are electrically connected with a radio-frequency power supply, the grounding electrode plates 14 and the radio-frequency electrode plates 12 are insulated from each other, a product to be coated is arranged between the radio-frequency electrode plates 12 and the grounding electrode plates 14, and the time for plasma to move to the surface of the product is shortened because the product is positioned in an electric field, so that the coating efficiency is improved; the radio-frequency electrode plate 12 and the grounding electrode plate 14 can rotate around a set center under the drive of the revolution component 2, or rotate around the axis of the radio-frequency electrode plate 12 and the grounding electrode plate 14 under the drive of the rotation component 3, and products to be coated can be subjected to film forming in different regions and at different plasma concentrations through rotation or revolution of the radio-frequency electrode plate 12 and the grounding electrode plate 14, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of the film forming is improved.

Further, the revolution assembly 2 includes a revolution driving gear 21 and a revolution driven gear 22, the revolution driving gear 21 is engaged with the revolution driven gear 22, and the electrode holder assembly is rotatably disposed on the revolution driven gear 22. By driving the revolution driving gear 21 to thereby drive the revolution driven gear 22, the electrode carrier assembly is rotated about the axis of the revolution driven gear 22 with the set center being the rotation center of the revolution driven gear 22.

Further, rotation subassembly 3 includes rotation driving gear 31 and pivot 32, and rotation driving gear 31 fixed cover is established on pivot 32, and rotation driving gear 31 is connected with the transmission of electrode holder subassembly. The rotation driving gear 31 is driven to rotate through the driving rotating shaft 32 so as to drive the electrode holder assembly to rotate, and the electrode holder assembly rotates around the axis of the electrode holder assembly. The products to be coated can be subjected to film formation in different regions and at different plasma concentrations through the rotation or revolution of the radio-frequency electrode plate 12 and the grounding electrode plate 14, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of the film formation is improved.

Further, the rotating shaft 32 is disposed through the revolving driven gear 22 and is coaxially disposed with the revolving driven gear 22. By arranging the rotating shaft 32 on the revolution driven gear 22, the structural complexity of the revolution component 2 and the rotation component 3 can be reduced, the occupied space of the revolution component 2 and the rotation component 3 can be reduced, and the compact structure can be ensured.

Further, the electrode holder assembly comprises an electrode holder 11 and a rotation driven gear 16, the rotation driven gear 16 is rotatably arranged on the revolution driven gear 22 and is meshed with the rotation driving gear 31, the electrode holder 11 is arranged on the rotation driven gear 16, and the radio-frequency electrode slice 12 and the grounding electrode slice 14 are both arranged on the electrode holder 11. The rotation of the radio-frequency electrode plate 12 and the grounding electrode plate 14 is realized through the meshing transmission of the rotation driven gear 16 and the rotation driving gear 31.

Further, a plurality of radio frequency electrode pads 12 and ground electrode pads 14 are arranged at intervals along the height direction of the electrode holder assembly, and the radio frequency electrode pads 12 and the ground electrode pads 14 are arranged in a one-to-one correspondence manner. In order to facilitate the connection of the rf electrode pads 12 with the rf power supply and the grounding electrode pads 14 to ground, in this embodiment, a first connecting pad 13 and a second connecting pad 15 are disposed on the electrode holder 11, the first connecting pad 13 is electrically connected with the rf power supply, the rf electrode pads 12 are all connected with the first connecting pad 13, the second connecting pad 15 is grounded, and the grounding electrode pads 14 are all connected with the second connecting pad 15. By arranging the plurality of radio-frequency electrode plates 12 and the plurality of grounding electrode plates 14, products to be plated can be arranged on the adjacent radio-frequency electrode plates 12 and the adjacent grounding electrode plates 14, and therefore the plating efficiency is further improved.

Further, the rotary electrode coating system further comprises a rotary electrode assembly 4, wherein the rotary electrode assembly 4 comprises a first rotary electrode assembly and a second rotary electrode assembly which are connected with each other, the upper end of the rotating shaft 32 is rotatably arranged on the first rotary electrode assembly, and the electrode holder assembly is rotatably arranged on the second rotary electrode assembly. Stability of the rotation of the shaft 32 and the electrode holder assembly can be ensured by providing the first rotating electrode assembly and the second electrode rotating assembly.

Further, the first rotating electrode assembly includes a first outer ring member 41 and a first inner ring member 43 which are coaxially arranged, a first relay roller 42 is arranged between the first outer ring member 41 and the first inner ring member 43, and the first inner ring member 43 is fixedly sleeved on the rotating shaft 32. The first inner ring member 43 rotates relative to the first outer ring member 41 via the first relay roller 42, ensuring the smoothness of the rotation of the first inner ring member 43.

Further, the second rotating electrode assembly comprises a second outer ring member 44 and a second inner ring member 46 which are coaxially arranged, a second relay roller 45 is arranged between the second outer ring member 44 and the second inner ring member 46, the second inner ring member 46 is fixedly sleeved on the connecting shaft of the electrode holder assembly, and the second outer ring member 44 is electrically connected with the radio-frequency electrode plate 12 through a fixing sheet 48. In the embodiment, in order to further improve the film coating efficiency, a plurality of electrode assemblies 1 are arranged on the revolving driven gear 22 at intervals, the radio frequency power supply is connected with the first inner ring member 43, and then is transmitted to the second outer ring member 44 through the first relay rotor and the first outer ring member 41, so that the plurality of electrode assemblies 1 can be communicated with the radio frequency power supply.

Since the rotating shaft 32 may cause abrasion of the first inner ring member 43 during rotation, thereby causing a reduction in stability of transmission between the first relay roller 42 and the first outer ring member 41, further, an opening portion is provided on the first outer ring member 41, and a locking assembly 47 is provided at the position of the opening portion, the locking assembly 47 includes: two connecting ear plates 471 are arranged at two ends of the opening part at intervals; the mounting shaft 472 is arranged on the two connecting ear plates 471 in a penetrating way; the elastic member 473 is sleeved on the mounting shaft 472, and one end of the elastic member is abutted to the end of the mounting shaft 472, and the other end of the elastic member is abutted to one of the connecting lug plates 471. The first outer ring member 41 can be tightened at the opening portion of the first outer ring member 41 by the elastic force of the elastic member 473, thereby ensuring the stability of the transmission of the first outer ring member 41 and the first relay roller 42.

Further, in order to prevent the second inner ring member 46 from being worn, thereby causing a reduction in the stability of the transmission between the second relay roller 45 and the second outer ring member 44, further, the second outer ring member 44 is also provided with an opening portion, and a locking member 47 is also provided at the position of the opening portion.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.