阅读说明：本技术 一种镀膜电极系统 (Film-coated electrode system ) 是由 邓必龙 郑利勇 于 2021-01-20 设计创作，主要内容包括：本发明涉及气相沉积技术领域,尤其涉及一种镀膜电极系统,其包括第一电极组件,沿竖直方向设置；多个第二电极组件,沿竖直方向设置,且多个所述第二电极组件绕所述第一电极组件的周向间隔设置；工件架组件,沿竖直方向设置在所述第一电极组件和所述第二电极组件之间,待镀膜的工件沿竖直方向放置在所述工件架组件上；公转组件,用于驱动所述工件架组件绕第一电极组件的中心转动；自转组件,与所述工件架组件传动连接,用于驱动所述工件架组件绕自身轴线转动。本发明能够提高成膜的均匀性和镀膜效率。(The invention relates to the technical field of vapor deposition, in particular to a coated electrode system, which comprises a first electrode assembly, a second electrode assembly and a third electrode assembly, wherein the first electrode assembly is arranged along the vertical direction; a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly; the workpiece frame assembly is arranged between the first electrode assembly and the second electrode assembly along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly along the vertical direction; the revolution component is used for driving the workpiece frame component to rotate around the center of the first electrode component; and the rotation assembly is in transmission connection with the workpiece frame assembly and is used for driving the workpiece frame assembly to rotate around the axis of the rotation assembly. The invention can improve the uniformity of film formation and the film coating efficiency.)

1. A coated electrode system, comprising:

a first electrode assembly (1) arranged in a vertical direction;

a plurality of second electrode assemblies (2) arranged in a vertical direction, and the plurality of second electrode assemblies (2) are arranged at intervals around the circumference of the first electrode assembly (1);

the workpiece frame assembly (3) is arranged between the first electrode assembly (1) and the second electrode assembly (2) along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly (3) along the vertical direction;

the revolution component (4) is used for driving the workpiece holder component (3) to rotate around the center of the first electrode component (1);

and the rotation assembly (5) is in transmission connection with the workpiece frame assembly (3) and is used for driving the workpiece frame assembly (3) to rotate around the axis of the workpiece frame assembly.

2. A coated electrode system according to claim 1, wherein the first electrode assembly (1) comprises: the electrode comprises an electrode shaft (13), a first radio-frequency electrode plate (11) and a first grounding electrode plate (12);

the electrode shaft (13) is arranged along the vertical direction, the first radio-frequency electrode plate (11) and the first grounding electrode plate (12) are parallel to each other and perpendicular to the electrode shaft (13), and are arranged on the electrode shaft (13) at intervals in a staggered mode, the first radio-frequency electrode plate (11) is electrically connected with a radio-frequency power supply, the first grounding electrode plate (12) is mutually insulated from the first radio-frequency electrode plate (11), and the electrode shaft (13) is mutually insulated from the first radio-frequency electrode plate (11).

3. The coated electrode system according to claim 2, wherein the second electrode assembly (2) comprises a mounting bracket, a second radio frequency electrode pad (23) and a second ground electrode pad (24);

the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plates (23) and the second grounding electrode plates (24) are parallel to each other and perpendicular to the fixing frame, the second radio-frequency electrode plates are arranged on the fixing frame in a staggered mode at intervals, the second radio-frequency electrode plates (23) are electrically connected with the radio-frequency power supply, the second grounding electrode plates (24) are mutually insulated from the second radio-frequency electrode plates (23), the second radio-frequency electrode plates (23) are mutually insulated from the fixing frame, the first radio-frequency electrode plates (11) are at the same height as the second radio-frequency electrode plates (23), and the first grounding electrode plates (12) are at the same height as the second grounding electrode plates (24).

4. A coated electrode system according to claim 3, wherein the fixing frame comprises two arc-shaped members (21) and a connecting member (22) which are arranged in parallel and spaced apart from each other, the connecting member (22) is arranged along the vertical direction, and two ends of the connecting member (22) are respectively connected with the two arc-shaped members (21).

5. The coated electrode system according to claim 2, wherein the revolution assembly (4) comprises a revolution driving gear (41) and a revolution driven gear, the revolution driving gear (41) is engaged with the revolution driven gear, the revolution driven gear is rotatably disposed on the electrode shaft (13), and the workpiece holder assembly (3) is rotatably disposed on the revolution driven gear.

6. The coated electrode system according to claim 5, wherein the revolving driven gear comprises a rim portion (42) and a platform portion (43) connected to each other, the rim portion (42) is engaged with the revolving driving gear (41), and a side of the platform portion (43) facing away from the rim portion (42) is provided with the workpiece holder assembly (3).

7. The coated electrode system according to claim 5, wherein the rotation assembly (5) comprises a rotation driving gear (51) and a rotation relay gear (52), the rotation driving gear (51) is rotatably disposed on the revolution driven gear, the rotation relay gear (52) is engaged with the rotation driving gear (51), and the rotation relay gear (52) is in transmission connection with the workpiece holder assembly (3).

8. A film-coated electrode system according to claim 7, wherein the work carrier assembly (3) comprises a rotation driven gear (31) and a work carrier, the rotation driven gear (31) is engaged with the rotation relay gear (52), the work carrier is connected with the rotation driven gear (31), and the work carrier is disposed between the first electrode assembly (1) and the second electrode assembly (2).

9. A coated electrode system according to claim 8, wherein the workpiece holder includes a workpiece tray (33), a fixed shaft and a connecting flange (32), the fixed shaft is disposed on the connecting flange (32) in a vertical direction, the workpiece tray (33) is disposed on the fixed shaft and is located between the first radio frequency electrode sheet (11) and the first ground electrode sheet (12), and the connecting flange (32) is connected to the rotation driven gear (31).

10. A coated electrode system according to claim 8, wherein the work carrier assembly (3) is provided in plurality at intervals along the circumference of the rotation relay gear (52).

Technical Field

The invention relates to the technical field of vapor deposition, in particular to a coated electrode system.

Background

At present, a cylindrical waterproof coating PECVD (chemical vapor deposition) electrode system is mainly used for coating a product by adopting an electric field formed between a vertical electrode plate and the wall of a vacuum chamber. However, the space of the electric field area is small, the occupation ratio of plasma formed by the excitation of the waterproof macromolecules is small, and the plasma generated in the electric field can reach the workpiece to be coated through diffusion movement at a certain distance, so that the uniformity of film formation is poor, and the efficiency is low.

Therefore, a coated electrode system is needed to solve the above technical problems.

Disclosure of Invention

The invention aims to provide a film-coating electrode system which can improve the uniformity of film formation and the film-coating efficiency.

In order to achieve the purpose, the invention adopts the following technical scheme:

a coated electrode system comprising:

a first electrode assembly disposed in a vertical direction;

a plurality of second electrode assemblies disposed in a vertical direction, the plurality of second electrode assemblies being disposed at intervals around a circumference of the first electrode assembly;

the workpiece frame assembly is arranged between the first electrode assembly and the second electrode assembly along the vertical direction, and a workpiece to be coated is placed on the workpiece frame assembly along the vertical direction;

the revolution component is used for driving the workpiece frame component to rotate around the center of the first electrode component;

and the rotation assembly is in transmission connection with the workpiece frame assembly and is used for driving the workpiece frame assembly to rotate around the axis of the rotation assembly.

Further, the first electrode assembly includes: the electrode comprises an electrode shaft, a first radio-frequency electrode plate and a first grounding electrode plate;

the electrode shaft is arranged along the vertical direction, the first radio-frequency electrode plate and the first grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the first radio-frequency electrode plate and the first grounding electrode plate are arranged on the electrode shaft at intervals in a staggered mode, the first radio-frequency electrode plate is electrically connected with a radio-frequency power supply, the first grounding electrode plate and the first radio-frequency electrode plate are insulated from each other, and the electrode shaft and the first radio-frequency electrode plate are insulated from each other.

Further, the second electrode assembly comprises a fixed frame, a second radio-frequency electrode plate and a second grounding electrode plate;

the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plate and the second grounding electrode plate are parallel to each other and perpendicular to the electrode shaft, the second radio-frequency electrode plate and the second grounding electrode plate are arranged on the fixing frame in a staggered mode at intervals, the second radio-frequency electrode plate is electrically connected with the radio-frequency power supply, the second grounding electrode plate is insulated from the second radio-frequency electrode plate, the second radio-frequency electrode plate is insulated from the fixing frame, the first radio-frequency electrode plate is located at the same height as the second radio-frequency electrode plate, and the first grounding electrode plate is located at the same height as the second grounding electrode plate.

Further, the mount includes two arc pieces and connecting piece that parallel interval set up, the connecting piece sets up along vertical direction, the both ends of connecting piece respectively with two the arc piece is connected.

Furthermore, the revolution assembly comprises a revolution driving gear and a revolution driven gear, the revolution driving gear is meshed with the revolution driven gear, the revolution driven gear is rotatably arranged on the electrode shaft, and the workpiece holder assembly is rotatably arranged on the revolution driven gear.

Further, revolution driven gear includes interconnect's ring gear portion and platform portion, the ring gear portion with the revolution driving gear meshes mutually, the platform portion deviates from one side of ring gear portion is provided with work rest assembly.

Furthermore, the rotation assembly comprises a rotation driving gear and a rotation relay gear, the rotation driving gear is rotatably arranged on the revolution driven gear, the rotation relay gear is meshed with the rotation driving gear, and the rotation relay gear is in transmission connection with the workpiece frame assembly.

Further, the workpiece holder assembly includes a rotation driven gear engaged with the rotation relay gear, and a workpiece holder connected with the rotation driven gear, the workpiece holder being disposed between the first electrode assembly and the second electrode assembly.

Furthermore, the workpiece frame comprises a workpiece disc, a fixed shaft and a connecting flange, the fixed shaft is arranged on the connecting flange along the vertical direction, the workpiece disc is arranged on the fixed shaft and is positioned between the first radio-frequency electrode plate and the first grounding electrode plate, and the connecting flange is connected with the rotation driven gear.

Further, the plurality of work carrier assemblies are arranged at intervals along the circumferential direction of the rotation relay gear.

The invention has the beneficial effects that:

according to the film coating electrode system, the first electrode assembly and the plurality of second electrode assemblies are arranged in the vertical direction, the workpiece holder assembly is arranged between the first electrode assembly and the second electrode assembly, and a product on the workpiece holder assembly is positioned in an electric field by arranging the workpiece holder assembly between the first electrode assembly and the second electrode assembly, so that plasma generated in the electric field can be rapidly diffused to the product, and the film coating efficiency is improved; the revolution component can drive the workpiece frame component to rotate around the center of the first electrode component, and the rotation component is in transmission connection with the workpiece frame component and drives the workpiece frame component to rotate around the axis of the rotation component. The rotation and revolution of the workpiece frame assembly are driven to enable the product to be subjected to film forming in different positions and areas with different plasma concentrations, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film forming is improved.

Drawings

FIG. 1 is a schematic view of a coated electrode system of the present invention;

FIG. 2 is a front view of a first electrode assembly of a coated electrode system of the present invention;

FIG. 3 is a front view of a second electrode assembly in a membrane electrode assembly according to the present invention;

FIG. 4 is a front view of the revolving assembly and the rotating assembly of the coated electrode system of the present invention;

FIG. 5 is a schematic view of a workpiece holder in a coated electrode system according to the present invention.

In the figure:

1. a first electrode assembly; 11. a first radio frequency electrode pad; 12. a first ground electrode sheet; 13. an electrode shaft; 14. a first connecting piece; 2. a second electrode assembly; 21. an arcuate member; 22. a connecting member; 23. a second radio frequency electrode pad; 24. a second ground electrode pad; 3. a workpiece carrier assembly; 31. a self-rotation driven gear; 32. a connecting flange; 33. a workpiece tray; 4. a revolution component; 41. a revolution driving gear; 42. a rim portion; 43. a platform part; 5. a rotation assembly; 51. a rotation driving gear; 52. and a rotation relay gear.

Detailed Description

The technical scheme of the invention is further explained by combining the attached drawings and the embodiment. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.

In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In order to improve the uniformity of film formation and the film coating efficiency, the invention provides a film coating electrode system as shown in figures 1-5. This coating film electrode system includes: a first electrode assembly 1, a plurality of second electrode assemblies 2, a work carrier assembly 3, a revolution assembly 4 and a rotation assembly 5.

Wherein the first electrode assembly 1 is arranged in a vertical direction; the plurality of second electrode assemblies 2 are arranged in the vertical direction, and the plurality of second electrode assemblies 2 are arranged at intervals around the circumference of the first electrode assembly 1; the work piece frame component 3 is arranged between the first electrode component 1 and the second electrode component 2 along the vertical direction, and a work piece to be coated is placed on the work piece frame component 3 along the vertical direction; the revolution component 4 is used for driving the work piece component 3 to rotate around the center of the first electrode component 1; the rotation assembly 5 is in transmission connection with the workpiece frame assembly 3 and is used for driving the workpiece frame assembly 3 to rotate around the axis of the workpiece frame assembly.

The workpiece holder assembly 3 is arranged on the first electrode assembly 1 and the second electrode assembly 2, so that a product on the workpiece holder assembly 3 is positioned in an electric field, and plasma generated in the electric field can be rapidly diffused to the product, and the film coating efficiency is improved; the revolution component 4 can drive the workpiece frame component 3 to rotate around the center of the first electrode component 1, and the rotation component 5 is in transmission connection with the workpiece frame component 3 and drives the workpiece frame component 3 to rotate around the axis of the rotation component. The rotation and revolution of the workpiece frame assembly 3 are driven to enable the product to be subjected to film forming in different positions and areas with different plasma concentrations, so that the difference of the plasma concentrations caused by different positions is reduced, and the uniformity of film forming is improved.

Further, the first electrode assembly 1 includes: an electrode shaft 13, a first radio frequency electrode plate 11 and a first ground electrode plate 12; the electrode shaft 13 is arranged along the vertical direction, the first radio-frequency electrode plate 11 and the first grounding electrode plate 12 are parallel to each other and perpendicular to the electrode shaft 13, and are arranged on the electrode shaft 13 at intervals in a staggered mode, the first radio-frequency electrode plate 11 is electrically connected with a radio-frequency power supply, the first grounding electrode plate 12 is insulated from the first radio-frequency electrode plate 11, and the first radio-frequency electrode plate 11 is insulated from the electrode shaft 13. In order to further improve the film coating efficiency, optionally, a plurality of first ground electrode plates 12 and a plurality of first radio-frequency electrode plates 11 are arranged in parallel at intervals, and the first ground electrode plates 12 and the first radio-frequency electrode plates 11 are arranged in a one-to-one correspondence manner. The product on the work piece holder assembly 3 can be arranged between the adjacent first radio-frequency electrode plate 11 and the first grounding electrode plate 12, so that the film coating efficiency is further improved.

In order to facilitate connection with the radio frequency power supply, optionally, a first connection tab 14 is provided along the vertical direction, the first radio frequency electrode pads 11 are all connected with the first connection tab 14, the first ground electrode pad 12 is connected with the electrode shaft 13, and the first radio frequency electrode pads 11 are insulated from the electrode shaft 13.

Further, the second electrode assembly 2 includes a holder, a second radio-frequency electrode pad 23, and a second ground electrode pad 24; the fixing frame is arranged along the vertical direction, the second radio-frequency electrode plates 23 and the second grounding electrode plates 24 are parallel to each other and perpendicular to the fixing frame, and are arranged on the fixing frame at intervals in a staggered manner, the second radio-frequency electrode plates 23 are electrically connected with a radio-frequency power supply, the second grounding electrode plates 24 are insulated from the second radio-frequency electrode plates 23, and the second radio-frequency electrode plates 23 are insulated from the fixing frame; the first radio-frequency electrode pad 11 and the second radio-frequency electrode pad 23 are at the same height, and the first ground electrode pad 12 and the second ground electrode pad 24 are at the same height. With the above arrangement, it is convenient to arrange the workpiece holder assembly 3 between the first electrode assembly 1 and the second electrode assembly 2. Likewise, in order to further improve the film coating efficiency, optionally, a plurality of second ground electrode pads 24 and a plurality of second radio-frequency electrode pads 23 are arranged in parallel at intervals, and the second ground electrode pads 24 and the second radio-frequency electrode pads 23 are arranged in a one-to-one correspondence manner. Products on the work piece assembly 3 can be arranged between the adjacent second radio-frequency electrode plate 23 and the second grounding electrode plate 24, so that the film coating efficiency is further improved.

Further, the mount includes two arc parts 21 and connecting piece 22 that parallel interval set up, and connecting piece 22 sets up along vertical direction, and the both ends of connecting piece 22 are connected with two arc parts 21 respectively. By using the arc-shaped member 21, the fixing frame is easily arranged along the circumferential direction of the first electrode assembly 1 and is concentric with the center of the first electrode assembly 1. The connecting piece 22 connects the arc pieces 21, and the structure can be simplified.

Further, the revolution assembly 4 includes a revolution driving gear 41 and a revolution driven gear, the revolution driving gear 41 is engaged with the revolution driven gear, the revolution driven gear is rotatably disposed on the electrode shaft 13, and the work head assembly 3 is rotatably disposed on the revolution driven gear. The revolution driving gear 41 drives the revolution driven gear to drive the work piece frame assembly 3 to rotate along with the revolution driven gear, so that the work piece frame assembly 3 rotates around the center of the first electrode assembly 1, and the uniformity of film coating is improved.

Further, the revolution driven gear includes a ring gear portion 42 and a land portion 43 connected to each other, the ring gear portion 42 is engaged with the revolution driving gear 41, and a side of the land portion 43 facing away from the ring gear portion 42 is provided with the work carrier assembly 3. The provision of the terrace portion 43 and the ring gear portion 42 facilitates reduction in weight of the revolving driven gear, and also facilitates mounting of the first electrode assembly 1 and the workpiece holder assembly 3 on the terrace portion 43.

Further, the rotation assembly 5 includes a rotation driving gear 51 and a rotation relay gear 52, the rotation driving gear 51 is rotatably disposed on the revolution driven gear, the rotation relay gear 52 is engaged with the rotation driving gear 51, and the rotation relay gear 52 is in transmission connection with the work head assembly 3. The rotation of the work carrier assembly 3 around its axis is realized by driving the rotation driving gear 51 to drive the rotation relay gear 52 to rotate the work carrier assembly 3.

Further, the work carrier assembly 3 includes a rotation driven gear 31 and a work carrier, the rotation driven gear 31 is engaged with the rotation relay gear 52, the work carrier is connected with the rotation driven gear 31, and the work carrier is disposed between the first electrode assembly 1 and the second electrode assembly 2. The rotation relay gear 52 drives the rotation driven gear 31 to drive the workpiece holder to rotate, so that the workpiece holder rotates, and the uniformity of the coating film can be improved.

Further, the workpiece holder includes a workpiece tray 33, a fixed shaft and a connecting flange 32, the fixed shaft is disposed on the connecting flange 32 along the vertical direction, the workpiece tray 33 is disposed on the fixed shaft and is located between the first radio frequency electrode plate 11 and the first ground electrode plate 12, and the connecting flange 32 is connected with the rotation driven gear 31. In order to further improve the coating efficiency, the workpiece disk 33 is provided in plurality at intervals along the axial direction of the fixed shaft. The connecting flange 32 is arranged to facilitate connection with the rotation driven gear 31, and the workpiece disc 33 is arranged to facilitate placement of products.

In order to further improve the plating efficiency, a plurality of the work carrier assemblies 3 are optionally provided at intervals in the circumferential direction of the rotation relay gear 52. By providing the rotation relay gear 52, the plurality of rotation driven gears 31 can be driven to rotate at the same time, and thus the rotation of the plurality of work rests can be realized.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.