Material micro-pushing device used with AFM and using method thereof

文档序号:696410 发布日期:2021-05-04 浏览:7次 中文

阅读说明:本技术 一种与afm联用的材料微顶推装置及其使用方法 (Material micro-pushing device used with AFM and using method thereof ) 是由 刘易洲 许福 胡朝辉 丁燕怀 罗文波 于 2021-01-19 设计创作,主要内容包括:一种与AFM联用的材料微顶推装置及其使用方法,顶推装置和AFM替换底座,顶推装置设置在AFM替换底座上。该顶推装置包括AFM替换底座、丝杆、支撑臂、上部装配式卡扣、限位及加载模块、螺杆式机械顶推装置、铰链、实验样品、探针、AFM悬臂、限位钢片、限位孔位、丝母。螺杆式机械顶推装置顶端与卡扣嵌套连接。螺杆式机械顶推装置放置在在AFM扫描管上方,AFM替换底座起到增高坐垫的作用。本发明与AFM联用获取材料的表面形貌信息、动力学响应、粘附力、动态模量、耗散值等数据。本发明通过螺杆式机械顶推装置可以精确控制实验样品的向上位移和速度,同时采用限位片较为精确地控制实验样品向上的最大位移。(A material micro pushing device used with an AFM and a using method thereof are provided, wherein the pushing device and an AFM replacing base are provided, and the pushing device is arranged on the AFM replacing base. The pushing device comprises an AFM replacing base, a screw rod, a supporting arm, an upper assembled buckle, a limiting and loading module, a screw type mechanical pushing device, a hinge, an experimental sample, a probe, an AFM cantilever, a limiting steel sheet, a limiting hole position and a nut. The top end of the screw type mechanical pushing device is connected with the buckle in a nested mode. The screw type mechanical pushing device is placed above the AFM scanning tube, and the AFM replacement base plays a role in heightening the cushion. The method is used together with AFM to obtain the data of surface appearance information, dynamic response, adhesion, dynamic modulus, dissipation value and the like of the material. The invention can accurately control the upward displacement and the speed of the experimental sample through the screw type mechanical pushing device, and simultaneously, the maximum upward displacement of the experimental sample is more accurately controlled by adopting the limiting piece.)

1. A material micro-thruster used with an atomic force microscope is characterized in that: a pushing device (A) and an AFM replacement base (B); the pushing device (A) is arranged on the AFM replacing base (B); the pushing device (A) comprises an AFM replacing base (1), a screw rod (2), a supporting arm (3), an upper assembled buckle (4), a limiting and loading module (5), a screw type mechanical pushing device (6), a hinge (7), an experimental sample (8), a probe (9), an AFM cantilever (10), a limiting sheet (11), a limiting hole position (12) and a screw nut (13); the screw type mechanical pushing device (6) is positioned between AFM replacement bases (1), a limiting and loading module (5) is arranged in the screw type mechanical pushing device, and the top end of the screw type mechanical pushing device is connected with an upper assembly type buckle (4) and the screw type mechanical pushing device (6) in a nested mode; the upper part assembly type buckle (4) and the reserved limiting hole position (12) are limited by inserting a designed limiting steel sheet (11), and an experimental sample (8) is erected on the upper part assembly type buckle (4) and is fixed by solid/liquid with strong adhesiveness; after the film sample is combined with the experimental sample (8), the fixed baffle is positioned at one end of the base, is integrally connected with the base and then is contacted with the probe (9) at the upper end.

2. The thrustor of claim 1, wherein: the screw type mechanical pushing device (6) comprises a screw jack (201), a buckle (202) and a limiting and loading module (5); wherein, the limit and loading module (5) is arranged inside the screw jack (201), and the buckle (202) is arranged above the screw jack (201) and is connected with the screw jack (201).

3. The thrustor of claim 2, wherein: the buckle (202) is arranged in an assembling mode and is connected with the screw jack (201) in a nesting mode; a limiting hole position (12) is arranged at the nested connection position of the buckle (202) and the screw jack (201); preferably, the height of the position limiting hole is 0.1-1.0mm, preferably 0.2-0.5mm, and more preferably 0.3-0.4 mm; preferably, the device is provided with two limiting hole positions (12), and the two limiting hole positions (12) are symmetrically arranged by taking the central line of the cylinder body (201) as a symmetry axis.

4. The apparatus of claim 2 or 3, wherein: the device (A) also comprises a limiting sheet (11); the limiting piece (11) is arranged at the limiting hole position (12) and penetrates through the limiting hole position (12) and the limiting and loading module (5); the thickness of the limiting sheet (11) is 0.1-1.0 mm; preferably, the number of the limiting pieces (11) is 1-10, and different limiting and loading modules (5) are limited by the maximum upward displacement by changing the number of the limiting pieces (11) arranged at the limiting hole positions (12); preferably, the limiting sheet (11) is made of metal.

5. The apparatus according to any one of claims 2-4, wherein: the screw type mechanical pushing device (6) is cylindrical.

6. A method of using a material micro-thruster for use with an atomic force microscope or using a device according to any of claims 1 to 5, the method comprising the steps of:

1) placing the screw type mechanical pushing device (6) on an AFM replacement base (B), and fixing an experimental sample (8) on a buckle (202);

2) a screw jack (201) rotates at a nut (13) at the lower part of the screw type mechanical pushing device (6), and a limiting and loading module (5) moves upwards;

3) the limiting and loading module (5) pushes the middle part of the experimental sample to generate upward displacement, and the AFM cantilever (10) controls the probe (9) to perform characterization of various properties on the experimental sample;

4) and (3) repeating the steps 2) and 3), changing the displacement of the limiting and loading module (5), and representing various performances of the experimental sample in different bending states by the AFM.

7. The method of claim 6, wherein: the step 2) is specifically as follows: the screw jack (201) provides upward rotation power for the screw type mechanical pushing device (6) to push the limiting and loading module (5) to move upwards; and meanwhile, the number of threads of the screw rod (2) is controlled to push the upward rotation amount of the limiting and loading module (5), and the moving speed and upward displacement of the limiting and loading module (5) are controlled.

8. The method according to claim 6 or 7, characterized in that: the step 3) is specifically as follows: the limiting and loading module (5) pushes the middle part of the experimental sample (8) to generate upward displacement, and the limiting piece (11) limits the maximum upward displacement of the limiting and loading module (5).

9. The method of claim 8, wherein: the number of the limiting pieces (11) is 1-10, the number of the limiting pieces (11) is changed, and different limiting and loading modules (5) are used for limiting the uplink displacement.

Technical Field

The invention relates to a pushing device and a using method thereof, in particular to a material micro-pushing device used with an atomic force microscope and a using method thereof, and belongs to the field of microscopic materials.

Background

Traditional mechanical experimental research is difficult to obtain a microstructure evolution image corresponding to a material in a deformation process, and although important atomic or molecular scale information can be provided through molecular simulation, the simulation is usually based on severe limit conditions, such as an ideal high strain rate, an ultra-low temperature or an extremely small sample size, and the like, and is difficult to verify for experiments. In-situ observation of the property changes of force, electricity, heat, magnetism, light and the like on the surface of the material in the deformation process is an important way for researching the material structure mechanism corresponding to the property changes of the material. When the in-situ observation scale reaches the nanometer level or even the atomic level, the information obtained by the observation can provide important basis and verification for various theoretical and simulation researches of materials.

An Atomic Force Microscope (AFM) is an analytical instrument that can be used to study the surface structure of solid materials including insulators. AFM can carry out atom-level resolution detection on physicochemical properties and appearances of nano regions of materials in air and liquid environments or directly carry out nano operation. The surface structure and properties of the substance are studied by detecting the infinitesimal interatomic interaction force between the surface of the sample to be tested and the miniature force sensitive element. One end of the micro cantilever extremely sensitive to weak force is fixed, the micro needle point at the other end is close to the sample, at the moment, the needle point interacts with the sample, and the acting force enables the micro cantilever to deform or change the motion state. When a sample is scanned, the change is detected by using the sensor, and the distribution information of the acting force can be obtained, so that the surface appearance structure information and the surface roughness information can be obtained with the nanometer resolution.

To date, AFM has been widely used in material research, and one important reason why AFM can be widely used is that it is open, and various properties of a sample can be measured by changing a probe, an imaging mode or a force between a tip and the sample based on a basic operation system of AFM, and thus, derived functional modes of AFM include: friction, conductivity, surface potential, thermal, electrochemical, capacitive, magnetic, electrostatic, chemical, phase shift, nanoindentation, nanofabrication, and the like. Therefore, the AFM can obtain the surface topography information of the material, and has good performance in the aspect of micro-nano mechanical characterization. The method is characterized in that a Peak Force Quantitative mechanical Mapping (QNM-AFM) mode of AFM is an important material structure characterization means, PF and QNM respectively represent Peak Force Peak and Quantitative nanomechanics, the characterization of dynamic modulus, rigidity, adhesion, deformation, dissipation performance and the like can be realized by measuring the instantaneous Force of a tip, and the method has the advantages of high-resolution characterization of mechanical properties, no damage to a tip and a sample, and definite quantification of various material data. Meanwhile, the micro-nano mechanical characterization result provided by Peak Force QNM is helpful for researchers to explore the microstructure of the material.

By combining the high-precision and multifunctional characteristics of AFM, the evolution image of the structure of the material under the action of heat can be obtained by in-situ heating and other modes. However, in-situ observation during deformation (e.g. in tension) is usually affected by factors such as sample size, space of the device test area, etc., and it is especially difficult to capture details of the structural evolution during deformation, especially at different deformation states, at the nanometer scale. On the other hand, if the micro-nano characteristic changes of the material can be characterized in real time based on the AFM in a certain constant strain state in the deformation process of the material, namely in the stress relaxation process, and the structural evolution information of the material is analyzed based on the corresponding changes, the material can be expected to make an important breakthrough in the field of material research, particularly in the aspects of the nature of rheological behavior of the material and the like.

Patent application No. CN201611112345.1 "amorphous alloy thin strip stretching device used with nanoindenter and method of using the same" and patent application No. CN201611112339.6 "amorphous alloy thin strip stretching device used with nanoindenter and method of using the same" disclose a material stretching device used in cooperation with nanoindenter, but the device is only suitable for nanoindenters with larger working space, and can only realize characterization of indentation hardness of materials under different tensile stress states and in a stress relaxation process. The ideal device for realizing the change of other various properties including mechanical properties of the material in the deformation process and the rheological process needs to be capable of realizing controllable and high-precision continuous deformation and being used with various modes of AFM. The material micro-thruster used in combination with the AFM of the present invention can meet the above requirements.

Disclosure of Invention

In order to realize controllable and high-precision continuous deformation of a material in the deformation process and the rheological process and to be used with various modes of AFM, the invention provides a material micro-pushing device used with an atomic force microscope and a use method thereof. The device and the using method thereof provided by the invention can realize that the AFM acquires the information of the material in various modes, and can accurately acquire the characterization results of the selected region at different times in the stress relaxation process.

According to a first embodiment of the present invention, there is provided a material micro-thruster for use with an atomic force microscope, the thruster comprising: a pushing device and an AFM replacement base; the pushing device is arranged on the AFM replacing base; the pushing device comprises an AFM replacing base, a screw rod, a supporting arm, an upper assembled buckle, a limiting and loading module, a screw type mechanical pushing device, a hinge, an experimental sample, a probe, an AFM cantilever, a limiting sheet, a limiting hole position and a screw nut; the screw type mechanical pushing device is positioned between AFM replacing bases, a limiting and loading module is arranged in the screw type mechanical pushing device, and the top end of the screw type mechanical pushing device is connected with an upper assembly type buckle in a nested mode; an upper assembly type buckle is reserved with a limiting hole position, limiting is carried out by inserting a designed limiting steel sheet, and an experimental sample is erected on the upper assembly type buckle and is fixed by solid/liquid with strong adhesiveness; after the film sample is combined with the experimental sample, the fixed baffle is positioned at one end of the base and is integrally connected with the base, and the upper end of the fixed baffle is contacted with the probe.

In the invention, the screw type mechanical pushing device comprises a screw jack, a buckle, a limiting module and a loading module. The limiting and loading module is arranged inside the device. The buckle is arranged above the screw jack and connected with the screw jack.

In the invention, the buckle is an assembly type device and is connected with the screw type mechanical pushing device in a nested mode. And a limiting hole position is arranged at the nested connection position of the buckle and the screw type mechanical pushing device. The height of the limiting hole is 0.1-1.0mm, preferably 0.2-0.5mm, and more preferably 0.3-0.4 mm. Preferably, the device is provided with two limiting hole positions, and the two limiting hole positions are symmetrically arranged by taking the central line of the screw type mechanical pushing device as a symmetry axis.

In the invention, the device also comprises a limiting sheet. The limiting piece is arranged at the limiting hole position and penetrates through the limiting hole position and the limiting and loading module. The thickness of the limiting sheet is 0.1-1.0 mm. Preferably, the number of the limiting pieces is 1-10, and different limiting and loading module uplink maximum displacement limiting can be realized by changing the number of the limiting pieces arranged at the limiting hole positions. Preferably, the stopper material is metal.

In the invention, the screw type mechanical pushing device is cylindrical.

In the invention, the device is connected with an Atomic Force Microscope (AFM), and the AFM comprises an AFM replacing base, an AFM cantilever and a probe; the screw type mechanical pushing device is arranged between AFM replacing bases; the AFM cantilever is arranged on one side of the screw type mechanical pushing device, and the probe is arranged above the screw type mechanical pushing device and is connected with the AFM cantilever.

In accordance with a second embodiment of the present invention, a method of using a material micro-pusher in conjunction with an atomic force microscope is provided.

A method of using a material micro-thruster for use with an atomic force microscope, the method comprising the steps of:

1) placing the screw type mechanical pushing device on an AFM (atomic force microscope) replacing base, and fixing an experimental sample on a buckle;

2) the screw jack provides upward rotation power for the screw type mechanical pushing device to push the limiting and loading module to move upwards;

3) the limiting and loading module pushes the middle part of the experimental sample to generate upward displacement, and the AFM cantilever control probe performs characterization on various performances of the experimental sample.

4) And (3) repeating the steps 2) and 3), changing the displacement of the limiting and loading module, and characterizing various performances of the experimental sample in different bending states by the AFM.

In the invention, the step 2) is specifically as follows: the number of the screw threads of the screw rod is controlled to push the upward rotation amount of the limiting and loading module (5), and the moving speed and upward displacement of the limiting and loading module (5) are controlled.

In the invention, the step 3) is specifically as follows: the limiting and loading module pushes the middle part of the experimental sample to generate upward displacement, and the limiting piece limits the maximum upward displacement of the limiting and loading module. Preferably, the number of the limiting pieces is 1-10, and the number of the limiting pieces is changed to realize the uplink maximum displacement limiting of different limiting and loading modules.

In the invention, the screw type mechanical pushing device generates upward displacement by the screw jack, and the limit and loading module arranged in the screw type mechanical pushing device moves upward in the screw type mechanical pushing device under the action of the screw jack. When the top of the limiting and loading module reaches the bottom of the experimental sample, the experimental sample generates upward displacement in the middle part, so that the experimental sample is in an upward stressed and bent state, and the top of the experimental sample is in a tensile stress state. On the basis, the performance of the composite material is characterized by AFM.

In the invention, the buckle is an assembly type buckle, so that the buckle is convenient to disassemble and assemble, the sample is convenient to replace, and other performance characterizations are also convenient for the sample before the experiment starts and after the experiment finishes.

In the invention, a limiting hole position is arranged at the center of the top of the limiting and loading module at the joint of the buckle and the screw type mechanical pushing device, and a limiting sheet is arranged in the limiting hole position. The limiting piece penetrates through the limiting hole position and the center of the limiting and loading module, and when the bottom of the limiting and loading module upwards moves to a certain height, the limiting piece limits the displacement of the limiting and loading module. In addition, different upward maximum displacements of the limiting and loading modules can be realized by increasing or reducing the number of the limiting sheets. The upward displacement of the experimental sample can be accurately controlled through the limiting sheet, and the probe and the cantilever of the AFM are prevented from being damaged.

In the invention, when the top of the limiting and loading module contacts the bottom of the experimental sample, the gap in the middle of the limiting and loading module just reaches the limiting hole position, and at the moment, a limiting piece is inserted into the gap of the limiting hole position and the limiting and loading module to limit the maximum upward displacement of the limiting and loading module (or the limiting piece originally exists and passes through the limiting hole position and the limiting and loading module, but the downward displacement of the limiting and loading module is limited).

In the invention, a double control mode is adopted, and on one hand, the ascending displacement and speed of the limiting and loading module are calculated and obtained through the conversion relation of screw threads in a jack in the screw type mechanical pushing device. On the other hand, the maximum displacement limit of the limiting and loading module is realized through the limiting sheet. And then the AFM acquires the data of surface topography information, dynamic response, adhesion, dynamic modulus, dissipation value and the like of the material.

Compared with the prior art, the invention has the following advantages:

1. the device has small overall dimension and convenient assembly and disassembly, and is used with AFM to acquire data such as surface appearance information, dynamic response, adhesion, dynamic modulus, dissipation value and the like of the material;

2. the buckle is in an assembling type, so that the sample is convenient to disassemble, assemble and replace, and the sample can be conveniently characterized in other performances before and after the experiment is started and finished;

3. the upward displacement and speed of the experimental sample can be accurately controlled through the screw jack device.

4. The upward maximum displacement of the experimental sample can be controlled more accurately through the limiting piece.

Drawings

FIG. 1 is a schematic structural view of a material micro-thruster for use with an atomic force microscope in accordance with the present invention;

FIG. 2 is a top view of the material micro-thruster of the present invention in use with an atomic force microscope;

FIG. 3 is a schematic diagram of a screw-type mechanical pusher of the material micro-pusher used in conjunction with an atomic force microscope of the present invention;

FIG. 4 is a side view of a screw-type mechanical pusher of the material micro-pusher used in conjunction with an atomic force microscope of the present invention;

FIG. 5 is a cross-sectional view of a screw-type mechanical pusher of the material micro-pusher used in conjunction with an atomic force microscope of the present invention;

reference numerals: a: a material micro-pusher; b: replacing the base by AFM; 1: AFM replacement mount, 2: screw rod, 3: support arm, 4: upper assembled buckle, 5: limiting and loading module, 6: screw type mechanical pushing device, 7: hinge, 8: experimental sample, 9: a probe, 10: AFM cantilever, 11: limiting steel sheets and 12: limiting hole positions and 13: a screw nut.

Detailed Description

In accordance with a first embodiment of the present invention, a material micro-pusher for use with an atomic force microscope is provided.

A material micro-thruster used with an atomic force microscope is characterized in that: a pushing device and an AFM replacement base; the pushing device is arranged on the AFM replacing base; the pushing device comprises an AFM replacing base, a screw rod, a supporting arm, an upper assembled buckle, a limiting and loading module, a screw type mechanical pushing device, a hinge, an experimental sample, a probe, an AFM cantilever, a limiting sheet, a limiting hole position and a screw nut; the screw type mechanical pushing device is positioned between AFM replacing bases, a limiting and loading module is arranged in the screw type mechanical pushing device, and the top end of the screw type mechanical pushing device is connected with an upper assembly type buckle in a nested mode; an upper assembly type buckle is reserved with a limiting hole position, limiting is carried out by inserting a designed limiting steel sheet, and an experimental sample is erected on the upper assembly type buckle and is fixed by solid/liquid with strong adhesiveness; after the film sample is combined with the experimental sample, the fixed baffle is positioned at one end of the base and is integrally connected with the base, and the upper end of the fixed baffle is contacted with the probe.

Preferably, the screw type mechanical pushing device comprises a screw jack, a buckle, a limiting module and a loading module. The limiting and loading module is arranged inside the device. The buckle is arranged above the screw jack and connected with the screw jack.

Preferably, the snap is an assembly type device and is nested with the screw type mechanical pushing device. And a limiting hole position is arranged at the nested connection position of the buckle and the screw type mechanical pushing device. The height of the limiting hole is 0.1-1.0mm, preferably 0.2-0.5mm, and more preferably 0.3-0.4 mm. Preferably, the device is provided with two limiting hole positions, and the two limiting hole positions are symmetrically arranged by taking the central line of the screw type mechanical pushing device as a symmetry axis.

In the invention, the device A also comprises a limiting sheet 11; the limiting sheet 11 is arranged at the limiting hole position 12 and penetrates through the limiting hole position 12 and the limiting and loading module 203; the thickness of the limiting sheet 11 is 0.1-1.0 mm; preferably, the number of the limiting pieces 11 is 1-10, and different limiting and loading modules 203 can perform uplink maximum displacement limiting by changing the number of the limiting pieces 11 arranged at the limiting hole positions 12; preferably, the material of the limiting sheet 11 is metal.

In the present invention, the screw-type mechanical pushing device 2 is cylindrical.

In accordance with a second embodiment of the present invention, a method of using a material micro-pusher in conjunction with an atomic force microscope is provided.

A method of using a material micro-thruster for use with an atomic force microscope, the method comprising the steps of:

1) placing the screw type mechanical pushing device on an AFM (atomic force microscope) replacing base, and fixing an experimental sample on a buckle;

2) the screw jack provides upward rotation power for the screw type mechanical pushing device to push the limiting and loading module to move upwards;

3) the limiting and loading module pushes the middle part of the experimental sample to generate upward displacement, and the AFM cantilever control probe performs characterization on various performances of the experimental sample.

4) And (3) repeating the steps 2) and 3), changing the displacement of the limiting and loading module, and characterizing various performances of the experimental sample in different bending states by the AFM.

Preferably, step 2) is specifically: the number of the screw threads of the screw rod is controlled to push the upward rotation amount of the limiting and loading module (5), and the moving speed and upward displacement of the limiting and loading module (5) are controlled.

Preferably, step 3) is specifically: the limiting and loading module pushes the middle part of the experimental sample to generate upward displacement, and the limiting piece limits the maximum upward displacement of the limiting and loading module. Preferably, the number of the limiting pieces is 1-10, and the number of the limiting pieces is changed to realize the uplink maximum displacement limiting of different limiting and loading modules.

Example 1

A material micro-thruster used with an atomic force microscope, a thruster A and an AFM replacement base B; the pushing device A is arranged on the AFM replacing base B. The pushing device comprises an AFM replacing base, a screw rod, a supporting arm, an upper assembled buckle, a limiting and loading module, a screw type mechanical pushing device, a hinge, an experimental sample, a probe, an AFM cantilever, a limiting sheet, a limiting hole position and a screw nut; the screw type mechanical pushing device is positioned between AFM replacing bases, a limiting and loading module is arranged in the screw type mechanical pushing device, and the top end of the screw type mechanical pushing device is connected with an upper assembly type buckle in a nested mode; an upper assembly type buckle is reserved with a limiting hole position, limiting is carried out by inserting a designed limiting steel sheet, and an experimental sample is erected on the upper assembly type buckle and is fixed by solid/liquid with strong adhesiveness; after the film sample is combined with the experimental sample, the fixed baffle is positioned at one end of the base and is integrally connected with the base, and the upper end of the fixed baffle is contacted with the probe.

Example 2

Embodiment 1 is repeated except that the screw type mechanical thrustor comprises a screw jack, a buckle, a limiting module and a loading module. The limiting and loading module is arranged inside the device. The buckle is arranged above the screw jack and connected with the screw jack.

Example 3

Example 2 is repeated except that the snap 202 is a snap-on device and nestingly engages the screw-type mechanical pusher 2. A limiting hole position 12 is arranged at the nested connection position of the buckle 202 and the screw type mechanical pushing device 2; the height of the limiting hole position 12 is 3.0 mm; the device is provided with two limiting hole positions 12, and the two limiting hole positions 12 are symmetrically arranged by taking the central line of the cylinder 201 as a symmetry axis.

Example 4

Example 3 is repeated except that the device a further comprises a limiting sheet 11; the limiting sheet 11 is arranged at the limiting hole position 12 and penetrates through the limiting hole position 12 and the limiting and loading module 203. The thickness of the limiting pieces 11 is 0.06mm, and the number of the limiting pieces is 5. The limiting sheet 11 is made of metal.

Example 5

Example 4 was repeated except that the screw-type mechanical thruster 2 was cylindrical.

Example 7

A method of using the material micro-thruster used in conjunction with an atomic force microscope, using the device of example 5, the method comprising: the screw type mechanical pushing device 2 is placed on the AFM replacement base 1, and the experimental sample is fixed on the buckle 202. The screw jack provides upward rotation power for the screw type mechanical pushing device to push the limiting and loading module to move upwards. Meanwhile, 5 limiting sheets 11 with the thickness of 0.06mm are placed in the limiting hole positions 12, so that the upward displacement of the middle part of the experimental sample is 0.3mm, and the AFM cantilever control probe is used for representing various performances of the experimental sample. The control system adjusts the liquid quantity conveyed by the pump body into the screw type mechanical pushing device 2 to change the displacement of the limiting and loading module 203, 5 limiting pieces 11 with the thickness of 0.06mm are placed in the limiting hole positions 12, the upward displacement of the middle part of the experimental sample is 0.3mm, and the AFM cantilever control probe carries out characterization on data such as surface appearance information, dynamic response, adhesion force, dynamic modulus, dissipation value and the like on the experimental sample.

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