阅读说明：本技术 一种晶体生长装置及晶体生长方法 (Crystal growth device and crystal growth method ) 是由 齐红基 王晓亮 赛青林 于 2021-08-06 设计创作，主要内容包括：本发明公开了一种晶体生长装置及晶体生长方法,晶体生长装置包括：壳体,设置第一通孔；籽晶杆移动组件,设置于壳体外；籽晶杆,与籽晶杆移动组件连接并穿过第一通孔；坩埚,位于壳体内,并用于装载熔体,坩埚位于籽晶杆下方；加热装置,围绕坩埚设置；红外测温器,设置于壳体,红外测温器用于检测熔体的温度；升降装置,设置于所述坩埚的底部,并用于根据测温器测量的温度调整坩埚的位置；或设置于加热装置的底部,并用于根据测温器测量的温度调整加热装置的位置。通过红外测温器测量熔体的温度,并根据测温器测量的温度调整坩埚的位置或加热装置的位置,从而确保熔体的液面处的温度稳定,以确保晶体稳定生长,提高晶体的质量。(The invention discloses a crystal growth device and a crystal growth method, wherein the crystal growth device comprises: a housing provided with a first through hole; the seed crystal rod moving assembly is arranged outside the shell; the seed rod is connected with the seed rod moving assembly and penetrates through the first through hole; the crucible is positioned in the shell and used for loading the melt, and the crucible is positioned below the seed crystal rod; a heating device disposed around the crucible; the infrared temperature detector is arranged on the shell and used for detecting the temperature of the melt; the lifting device is arranged at the bottom of the crucible and used for adjusting the position of the crucible according to the temperature measured by the temperature measurer; or the temperature sensor is arranged at the bottom of the heating device and used for adjusting the position of the heating device according to the temperature measured by the temperature detector. The temperature of the melt is measured by the infrared temperature measuring device, and the position of the crucible or the position of the heating device is adjusted according to the temperature measured by the temperature measuring device, so that the temperature of the liquid level of the melt is stable, the stable growth of the crystal is ensured, and the quality of the crystal is improved.)

1. A crystal growth apparatus, comprising:

the shell is provided with a first through hole;

a seed rod moving assembly disposed outside the housing;

the seed rod is connected with the seed rod moving assembly and penetrates through the first through hole;

the crucible is positioned in the shell and used for loading melt, and the crucible is positioned below the seed rod;

a heating device disposed around the crucible;

the infrared temperature detector is arranged on the shell and used for detecting the temperature of the melt;

the lifting device is arranged at the bottom of the crucible and used for adjusting the position of the crucible according to the temperature measured by the temperature measurer; or the lifting device is arranged at the bottom of the heating device and used for adjusting the position of the heating device according to the temperature measured by the temperature measurer.

2. The crystal growth apparatus of claim 1, wherein the housing is provided with a second through hole, and the infrared temperature detector is arranged at the second through hole;

the crystal growth apparatus further includes:

the heat insulation cover is positioned in the shell and is provided with a third through hole;

the temperature sensing head of the infrared temperature measurer faces the crucible, and the second through hole and the third through hole are both located between the crucible and the temperature sensing head.

3. The crystal growth apparatus of claim 2, wherein a mold is disposed within the crucible, the temperature sensing head being directed toward an upper surface of the mold.

4. The crystal growth apparatus of claim 1, wherein the housing is provided with a fourth through hole;

when the lifting device is disposed at the bottom of the crucible, the lifting device includes:

a lifting assembly disposed outside the housing;

and the support assembly is arranged on the lifting assembly and penetrates through the fourth through hole and is connected with the crucible.

5. The crystal growth apparatus of claim 4, wherein the support assembly comprises:

the supporting disc is connected with the crucible;

the supporting rod is connected with the supporting disk, and an accommodating space is formed in the supporting rod;

a cooling member located in the receiving space to cool the support rod.

6. The crystal growth apparatus of claim 1, wherein the seed rod movement assembly comprises:

the Z-axis lifting device is arranged outside the shell;

wherein, Z axle elevating gear with the seed rod is connected.

7. The crystal growth apparatus of claim 6, wherein the seed rod movement assembly further comprises:

the X-axis translation device is arranged on the Z-axis lifting device;

the Y-axis translation device is arranged on the X-axis translation device;

the weighing shell is connected with the Y-axis translation device;

a weighing sensor disposed within the housing;

the rotating piece is arranged on the weighing sensor;

the rotating piece is connected with the seed rod and used for driving the seed rod to rotate.

8. A crystal growth method, which is applied to the crystal growth apparatus according to any one of claims 1 to 7;

the crystal growth method comprises the following steps:

providing seed crystals and raw materials, loading the seed crystals on seed rods, and putting the raw materials into a crucible;

heating the crucible with a heating device to melt the feedstock into a melt;

measuring a first temperature of the melt by using an infrared temperature detector;

when the first temperature is a first preset temperature, moving the seed rod to the surface of the melt by using the seed rod moving assembly so as to grow a crystal on the seed crystal;

in the crystal growth process, measuring by using the infrared temperature detector to obtain a second temperature of the melt;

and when the second temperature is not the second preset temperature, changing the position of the seed rod by adopting a seed rod moving assembly, and changing the position of the crucible or the position of the heating device by adopting a lifting device so as to adjust the second temperature of the melt.

9. The crystal growth method of claim 8, wherein a mold is disposed within the crucible; the infrared temperature detector comprises: the temperature sensing head of the first infrared temperature detector faces the melt on the upper surface of the die;

the method for measuring the first temperature of the melt by using the infrared temperature detector comprises the following steps:

and measuring to obtain a first temperature of the melt by using the first infrared temperature detector.

10. The crystal growth method of claim 8, wherein the infrared temperature detector further comprises: the temperature sensing head of the second infrared temperature detector faces the melt in the crucible;

in the crystal growth process, the second temperature of the melt is measured by the infrared temperature detector, and the method comprises the following steps:

and in the crystal growth process, measuring by using the second infrared temperature detector to obtain a second temperature of the melt.

Technical Field

The invention relates to the technical field of crystal growth, in particular to a crystal growth device and a crystal growth method.

Background

During the crystal growth process, the temperature of the crystal growth interface is crucial to the crystal growth. In the prior art, along with the continuous growth of crystals, a crucible and a heating device are fixedly arranged, the liquid level of a melt in the crucible is always in a slow descending state, and the temperature of the liquid level of the melt is also always changed, so that the quality of the grown crystals is influenced.

Accordingly, the prior art is yet to be improved and developed.

Disclosure of Invention

The present invention provides a crystal growth apparatus and a crystal growth method, which aim to solve the problem of unstable temperature at the liquid level of the melt during crystal growth in the prior art.

The technical scheme adopted by the invention for solving the technical problem is as follows:

a crystal growth apparatus, comprising:

the shell is provided with a first through hole;

a seed rod moving assembly disposed outside the housing;

the seed rod is connected with the seed rod moving assembly and penetrates through the first through hole;

the crucible is positioned in the shell and used for loading melt, and the crucible is positioned below the seed rod;

a heating device disposed around the crucible;

the infrared temperature detector is arranged on the shell and used for detecting the temperature of the melt;

the lifting device is arranged at the bottom of the crucible and used for adjusting the position of the crucible according to the temperature measured by the temperature measurer; or the lifting device is arranged at the bottom of the heating device and used for adjusting the position of the heating device according to the temperature measured by the temperature measurer.

In the crystal growth device, the shell is provided with a second through hole, and the infrared temperature detector is arranged at the second through hole;

the crystal growth apparatus further includes:

the heat insulation cover is positioned in the shell and is provided with a third through hole;

the temperature sensing head of the infrared temperature measurer faces the crucible, and the second through hole and the third through hole are both located between the crucible and the temperature sensing head.

The crystal growth device is characterized in that a mold is arranged in the crucible, and the temperature sensing head faces to the upper surface of the mold.

The crystal growth device, wherein the shell is provided with a fourth through hole;

when the lifting device is disposed at the bottom of the crucible, the lifting device includes:

a lifting assembly disposed outside the housing;

and the support assembly is arranged on the lifting assembly and penetrates through the fourth through hole and is connected with the crucible.

The crystal growth apparatus of, wherein the support assembly comprises:

the supporting disc is connected with the crucible;

the supporting rod is connected with the supporting disk, and an accommodating space is formed in the supporting rod;

a cooling member located in the receiving space to cool the support rod.

The crystal growth apparatus of, wherein the seed rod moving assembly includes:

the Z-axis lifting device is arranged outside the shell;

wherein, Z axle elevating gear with the seed rod is connected.

The crystal growth apparatus, wherein the seed rod moving assembly further comprises:

the X-axis translation device is arranged on the Z-axis lifting device;

the Y-axis translation device is arranged on the X-axis translation device;

the weighing shell is connected with the Y-axis translation device;

a weighing sensor disposed within the housing;

the rotating piece is arranged on the weighing sensor;

the rotating piece is connected with the seed rod and used for driving the seed rod to rotate.

A crystal growth method, wherein the method is applied to a crystal growth apparatus as defined in any one of the above;

the crystal growth method comprises the following steps:

providing seed crystals and raw materials, loading the seed crystals on seed rods, and putting the raw materials into a crucible;

heating the crucible with a heating device to melt the feedstock into a melt;

measuring a first temperature of the melt by using an infrared temperature detector;

when the first temperature is a first preset temperature, moving the seed rod to the surface of the melt by using the seed rod moving assembly so as to grow a crystal on the seed crystal;

in the crystal growth process, measuring by using the infrared temperature detector to obtain a second temperature of the melt;

and when the second temperature is not the second preset temperature, changing the position of the seed rod by adopting a seed rod moving assembly, and changing the position of the crucible or the position of the heating device by adopting a lifting device so as to adjust the second temperature of the melt.

The crystal growth method comprises the following steps that a mold is arranged in the crucible; the infrared temperature detector comprises: the temperature sensing head of the first infrared temperature detector faces the melt on the upper surface of the die;

the method for measuring the first temperature of the melt by using the infrared temperature detector comprises the following steps:

and measuring to obtain a first temperature of the melt by using the first infrared temperature detector.

The crystal growth method, wherein the infrared temperature detector further comprises: the temperature sensing head of the second infrared temperature detector faces the melt in the crucible;

in the crystal growth process, the second temperature of the melt is measured by the infrared temperature detector, and the method comprises the following steps:

and in the crystal growth process, measuring by using the second infrared temperature detector to obtain a second temperature of the melt.

Has the advantages that: the temperature of the melt is measured by the infrared temperature measuring device, and the position of the crucible or the position of the heating device is adjusted according to the temperature measured by the temperature measuring device, so that the temperature of the melt is adjusted, the temperature of the liquid level of the melt is ensured to be stable, the stable growth of the crystal is ensured, and the quality of the crystal is improved.

Drawings

FIG. 1 is a cross-sectional view of a crystal growing apparatus according to the present invention.

Fig. 2 is an enlarged view of fig. 1.

FIG. 3 is a perspective view of a crystal growing apparatus according to the present invention.

FIG. 4 is a sectional view of the crucible, the heat retaining cover and the heating device of the present invention.

FIG. 5 is a perspective view of the crucible, the heat retaining cover, and the heating device of the present invention.

FIG. 6 is a sectional view of the crucible and the mold of the present invention.

Fig. 7 is a first cross-sectional view of the elevator apparatus of the present invention.

Fig. 8 is a perspective view of the lifting device of the present invention.

Fig. 9 is a schematic structural view of the lifting device of the present invention.

Fig. 10 is a second sectional view of the lifting device of the present invention.

FIG. 11 is a perspective view of a seed rod moving apparatus according to the present invention.

Fig. 12 is a cross-sectional view of a load cell and a rotating member in the present invention.

Fig. 13 is a schematic structural view of a Z-axis translation device in accordance with the present invention.

Fig. 14 is a first structural schematic diagram of the X-axis translation device and the Y-axis translation device of the present invention.

Fig. 15 is a second structural schematic diagram of the X-axis translation device and the Y-axis translation device in the present invention.

Fig. 16 is a schematic view of a third structure of the X-axis translation device and the Y-axis translation device in the present invention.

Description of reference numerals:

10. a housing; 11. a first through hole; 12. a first pipe body; 13. a first mounting seat; 14. a second through hole; 15. a fourth via hole; 20. an infrared temperature detector; 21. a temperature sensing head; 30. a seed rod; 31. a crucible; 32. a heating device; 33. a heat-preserving cover; 331. a third through hole; 34. a mold; 40. a lifting device; 41. a lifting assembly; 411. a base; 412. a lifting screw; 413. a lifting drive member; 414. a lifting connecting piece; 415. a lifting guide rail; 416. a lifting slide block; 42. a support assembly; 421. a support disc; 422. a support bar; 50. a Z-axis lifting device; 51. a column; 52. a Z-axis guide rail; 53. a Z-axis screw; 54. a Z-axis drive member; 55. a Z-axis connector; 56. a Z-axis slide block; 57. a fifth through hole; 60. an X-axis translation device; 61. an X-axis guide rail; 62. an X-axis slider; 63. an X-axis screw; 64. an X-axis drive member; 65. an X-axis connector; 66. a sixth through hole; 70. a Y-axis translation device; 71. a Y-axis guide rail; 72. a Y-axis slider; 73. a Y-axis screw; 74. a Y-axis drive member; 75. a Y-axis connector; 76. a seventh via hole; 80. weighing the shell; 81. an eighth through hole; 82. a weighing sensor; 83. a rotating member; 831. a second mounting seat; 832. a motor; 833. a bearing; 84. a second tube.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

The inventor finds that the crucible and the heating device are fixedly arranged, the liquid level of the melt in the crucible is always in a slowly-descending state, and the temperature at the liquid level of the melt is also always changed. For example, when the induction coil is used for heating a crucible, the temperature of the crucible position corresponding to the middle position of the induction coil is higher, the temperature of the crucible positions corresponding to the two ends of the induction coil is lower, and in the vertical direction of the crucible, along with the reduction of the liquid level of the melt, the temperature at the liquid level of the melt is increased and then reduced, which is not beneficial to the growth of crystals.

Referring to fig. 1-16, embodiments of a crystal growth apparatus are provided.

As shown in fig. 1 to 4 and fig. 7, a crystal growth apparatus of the present invention includes:

the device comprises a shell 10, wherein a first through hole 11 is formed in the shell 10;

a seed rod 30 moving assembly disposed outside the housing 10;

the seed rod 30 penetrates through the first through hole 11 and is connected with the seed rod 30 moving component;

a crucible 31, wherein the crucible 31 is positioned in the shell 10 and is used for loading melt, and the crucible 31 is positioned below the seed rod 30;

a heating device 32, the heating device 32 being disposed around the crucible 31;

the infrared temperature detector 20, the said infrared temperature detector 20 is set up in the said body 10, the said infrared temperature detector 20 is used for detecting the temperature of the melt;

the lifting device 40 is arranged at the bottom of the crucible 31 and is used for adjusting the position of the crucible 31 according to the temperature measured by the temperature measurer; or the lifting device 40 is arranged at the bottom of the heating device 32 and is used for adjusting the position of the heating device 32 according to the temperature measured by the temperature measurer.

Specifically, the crucible 31 is used for loading a melt, and for example, after gallium oxide powder is placed in the crucible 31, the crucible 31 is heated by the heating device 32, and the gallium oxide powder is melted to obtain a gallium oxide melt. The infrared temperature detector 20 is used for converting the radiation energy of the infrared rays emitted by the melt into an electric signal, and the temperature of the melt can be determined according to the converted electric signal.

It is worth to be noted that the temperature of the melt is measured by the infrared temperature detector 20, and the position of the crucible 31 is adjusted according to the temperature measured by the temperature detector, so that the temperature of the melt is adjusted, the temperature of the liquid level of the melt is ensured to be stable, the stable growth of the crystal is ensured, and the quality of the crystal is improved.

Specifically, in order that crystal growth is not affected by the outside, the crucible 31 is placed in the housing 10, and the crucible 31 is isolated from the outside by the housing 10. The heating device 32 is a device for heating the crucible 31, and the heating device 32 may be an induction coil, but other heating devices 32, such as a resistance heating device, may be used. The induction coil may be located outside the heat-retaining cover 33. The induction coil generates a high-frequency magnetic field, the crucible 31 generates an induction current under the action of the high-frequency magnetic field, and the crucible 31 itself generates heat to heat the crucible by the action of the induction current and the magnetic field in the crucible 31. The crucible 31 is made of a conductive material, and specifically, the crucible 31 may be an iridium crucible 31 or an iridium alloy crucible 31.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 1 to fig. 3, a second through hole 14 is disposed on the housing 10, and the infrared temperature detector 20 is disposed at the second through hole 14; the crystal growth apparatus further includes:

the heat-preservation cover 33 is positioned in the shell 10, and the heat-preservation cover 33 is provided with a third through hole 331;

the temperature sensing head 21 of the infrared temperature detector 20 faces the crucible 31, and the second through hole 14 and the third through hole 331 are located between the crucible 31 and the temperature sensing head 21.

Specifically, in order to maintain the temperature in the crucible 31, a heat-insulating cover 33 is provided outside the crucible 31, and the heat-insulating cover 33 may be made of a heat-insulating material, for example, zirconia or the like, to form the heat-insulating cover 33. The heat-retaining cover 33 is divided into two parts, and the heat-retaining cover 33 includes: an upper cover and a lower cover, the lower cover is arranged around the crucible 31 and used for maintaining the temperature at the crucible 31 to be stable, the upper cover is positioned on the lower cover and the crucible 31 and used for maintaining the temperature above the crucible 31 to be stable.

Specifically, by arranging the infrared temperature detector 20 on the housing 10, the temperature sensing head 21 of the infrared temperature detector 20 faces the crucible 31, and the second through hole 14 and the third through hole 331 are both located between the crucible 31 and the temperature sensing head 21, the infrared rays radiated by the melt in the crucible 31 can sequentially pass through the third through hole 331 and the second through hole 14 and directly reach the temperature sensing head 21 of the infrared temperature detector 20, so that the infrared temperature detector 20 can accurately measure the temperature of the melt in the crucible 31.

The crystal growth device of the invention adopts a melting method to grow crystals, and the melting method comprises the following steps: the crystal pulling method adopts a seed crystal rod 30 to directly lower a seed crystal to the liquid level of a melt, and when a temperature sensing head 21 points to a crucible 31, the temperature of the melt in the crucible 31 can be directly detected. In the mold guiding method, a mold 34 is placed in a crucible 31, the mold 34 siphons a melt in the crucible 31 to an upper surface of the mold 34, and a seed crystal is lowered to the upper surface of the mold 34 using a seed rod 30.

It should be noted that the seed rod 30 is required to pass through the heat-insulating cover 33 when being lowered to the liquid level of the melt, for example, the third through hole 331 may pass through the heat-insulating cover 33, that is, the third through hole 331 not only allows the seed rod 30 to pass through, but also allows infrared rays radiated from the melt to pass through. When the third through hole 331 is shared, it is advantageous to improve the heat insulating effect of the heat insulating cover 33. And the third through hole 331 is located at the top of the heat-preserving cover 33, and the third through hole 331 is located at one end of the heat-preserving cover 33 far away from the crucible 31, so that the influence of the third through hole 331 on the temperature in the heat-preserving cover 33 and the temperature of the crucible 31 is reduced.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 1, 6 and 7, a mold 34 is disposed in the crucible 31, and the temperature sensing head 21 faces an upper surface of the mold 34.

Specifically, since the temperature at which the seed crystal contacts the melt is important for the growth of the crystal, by directing the temperature sensing head 21 toward the upper surface of the mold 34, the temperature sensing head 21 can directly detect the temperature of the melt at the upper surface of the mold 34 when the melt is siphoned to the upper surface of the mold 34.

In a preferred implementation manner of the embodiment of the present invention, there are two second through holes 14, and the infrared temperature detector 20 includes: a first infrared temperature detector 20 and a second infrared temperature detector 20.

Specifically, in order to increase the accuracy of temperature measurement, a plurality of infrared thermometers 20 may be used, and of course, when a plurality of infrared thermometers 20 are used, a plurality of second through holes 14 are provided correspondingly. In this embodiment, two infrared thermometers 20 are used, and there are two second through holes 14. The two infrared thermometers 20 are respectively directed to different positions of the crucible 31, so that the temperatures of the different positions of the crucible 31 can be detected. For example, a mold 34 is placed in the crucible 31, the first infrared temperature detector 20 faces the upper surface of the mold 34, and the second infrared temperature detector 20 faces the crucible 31, so that the first infrared temperature detector 20 can measure the temperature of the melt on the upper surface of the mold 34, and the second infrared temperature detector 20 can measure the temperature of the melt in the crucible 31.

In a preferred implementation manner of the embodiment of the present invention, the third through hole 331 is an elongated through hole, and the central axes of the two second through holes 14 pass through the elongated through hole.

Specifically, the third through hole 331 is a long strip-shaped through hole, and the central axes of the two second through holes 14 pass through the long strip-shaped through holes, that is, the first infrared temperature detector 20 and the second infrared temperature detector 20 share one third through hole 331, so that the number of the third through holes 331 on the heat-insulating cover 33 can be reduced, and the heat-insulating effect of the heat-insulating cover 33 can be improved.

The two second through holes 14 are located at two sides of the first through hole 11, and the two second through holes 14 and the first through hole 11 are located on the same straight line, and the straight line is parallel to the length direction of the long strip-shaped through hole.

The two second through holes 14 are respectively located at two sides of the first through hole 11, and the seed rod 30 can be inserted into the third through hole 331. Specifically, the shell 10 is provided with a first through hole 11, the seed rod 30 is inserted into the shell 10 from the first through hole 11, and the seed rod 30 is inserted into the heat-insulating cover 33 from the third through hole 331 and reaches the crucible 31. The first through hole 11 may be positioned directly above the third through hole 331, and after the seed rod 30 is inserted into the first through hole 11, the seed rod 30 may be inserted into the third through hole 331 by continuously moving the seed rod 30.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 1-2, a first tube 12 is disposed in the second through hole 14, and the first tube 12 extends in a direction away from the crucible 31; a first mounting seat 13 is arranged on the first pipe body 12; the infrared temperature detector 20 is arranged on the first mounting seat 13.

Specifically, in order to prevent the infrared temperature detector 20 from being damaged, the first pipe 12 is disposed in the second through hole 14 of the housing 10, and the first mounting seat 13 is disposed on the first pipe 12, and the first mounting seat 13 is used for mounting the infrared temperature detector 20.

The present application will be described with an example in which the elevating device is provided at the bottom of the crucible 20.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 7 to 8, the housing 10 is provided with a fourth through hole 15; when the lifting device is disposed at the bottom of the crucible, the lifting device 40 includes:

the lifting assembly 41, the lifting assembly 41 is arranged outside the shell 10;

and a support member 42, wherein the support member 42 is disposed on the lifting member 41, and the support member 42 passes through the fourth through hole 15 and is connected to the crucible 31 (of course, when the lifting member is disposed at the bottom of the heating member, the support member 42 passes through the fourth through hole 15 and is connected to the heating member 32).

Specifically, the supporting member 42 is rod-shaped, one end of the supporting member 42 is connected to the bottom of the crucible 31, and the other end is connected to the lifting member 41, and the supporting member 42 can drive the crucible 31 to rise or fall under the driving of the lifting member 41.

Specifically, the support assembly 42 includes:

a support plate 421, wherein the support plate 421 is connected with the crucible 31 (of course, when the lifting device is arranged at the bottom of the heating device, the support plate 421 is connected with the heating device 32); the supporting rod 422 is connected with the supporting plate 421, and an accommodating space is formed in the supporting rod 422; a cooling member positioned in the receiving space to cool the support rod 422.

Specifically, as shown in fig. 6 to 10, in the present embodiment, the support rod 422 is vertically disposed, the top end of the support rod 422 is connected to a support plate 421, the support plate 421 may be a circular disc or other shapes, the bottom end of the support rod 422 is connected to the lifting assembly 41, the interior of the support rod 422 is a hollow structure for placing a cooling element, and the cooling element can adjust the temperature of the support rod 422.

Further, the cooling element may be a water-cooling element. Specifically, water-cooling spare is that the adoption water carries out refrigerated cooling spare, for example, sets up the inlet tube in the accommodation space, and accommodation space's opening part is connected with the outlet pipe, and the inlet tube can lead to water, and the water of inlet tube can enter into accommodation space in, and the water in the accommodation space passes through outlet pipe discharge accommodation space to the realization cools off supporting component 42.

In a preferred embodiment, as shown in fig. 6 and 7, the lifting assembly 41 and the crucible 31 are respectively located at two sides of the housing 10, that is, the lifting assembly 41 is located at the outer side of the housing 10; the support rod 422 is positioned in the fourth through hole 15; a sealing corrugated pipe is arranged outside the supporting rod 422, and two ends of the sealing corrugated pipe are respectively connected with the supporting rod 422 and the shell 10.

Specifically, the lifting assembly 41 is located on the outer side of the housing 10, the crucible 31 is located on the inner side of the housing 10, the support rod 422 penetrates through the fourth through hole 15 and is connected to the bottom of the crucible 31, a sealing corrugated pipe is further arranged outside the support rod 422, one end of the sealing corrugated pipe is closely attached to the support rod 422, and the other end of the sealing corrugated pipe is connected to the fourth through hole 15 on the housing 10.

Further, as shown in fig. 6 and 7, in order to better fix and seal the bellows, a bellows flange is further disposed at the middle of the support rod 422, the bellows flange may be fixedly disposed on the support rod 422, the number of the bellows flanges may be one or more, one end of the bellows is fixedly connected to the bellows flange, and the other end of the bellows is connected to the fourth through hole 15 on the housing 10.

In a preferred implementation, as shown in fig. 6-10, the lifting assembly 41 includes: a base 411, the base 411 being disposed on the housing 10; the lifting screw 412, the lifting screw 412 is rotatably connected with the base 411; the lifting driving member 413 is disposed on the base 411, and the lifting driving member 413 is connected to the lifting screw 412 to drive the lifting screw 412 to rotate; the lifting connecting member 414 is disposed on the supporting member 42, and the lifting connecting member 414 is rotatably connected to the lifting screw 412.

Specifically, the base 411 is disposed at the lower end of the housing 10, the base 411 may be detachably connected to the housing 10, the lifting screw 412 is disposed in parallel with the supporting rod 422, the lifting screw 412 is at least one or more, in this embodiment, the lifting screw 412 is one, the lifting screw 412 is disposed in the base 411, the lifting screw 412 is rotatably connected to the base 411, the lifting connector 414 is disposed on the supporting component 42, the lifting connector 414 is used for connecting the lifting screw 412 and the supporting component 42, in a preferred embodiment, the lifting screw 412 is a lead screw, and the lead screw is fixed to the lifting connector 414 through a matching lead screw nut.

As shown in fig. 6-10, the lifting driving member 413 is disposed on the base 411, the lifting driving member 413 may be a lifting deceleration motor 832, and specifically, the lifting deceleration motor 832 may be disposed at a lower end of the lead screw, and the lead screw lifting deceleration motor 832 is connected via a lifting coupler so as to transmit a driving force from the lifting deceleration motor 832 to the lead screw, and when the lifting deceleration motor 832 drives the lead screw to rotate, the supporting rod 422 is driven to move up or down, that is, the crucible 31 is driven to move up or down. Further, a lifting coupler outer sleeve is further arranged outside the lifting coupler and used for being connected with the speed reducing motor 832, and the safety of the lifting device 40 is improved.

In addition to the above embodiments, as shown in fig. 9, the base 411 is provided with a lifting guide 415; the lifting connecting piece 414 is provided with a lifting slider 416, and the lifting slider 416 is connected with the lifting guide rail 415 in a sliding manner.

Specifically, in this embodiment, a lifting guide 415 is disposed on the base 411, the lifting guide 415 is disposed along a vertical direction, the lifting connecting member 414 is detachably and fixedly connected to the supporting rod 422 of the screw assembly, and the lifting connecting member 414 is provided with a lifting slider 416, the lifting slider 416 is matched with the lifting guide 415, specifically, when the lifting driving member 413 drives the lifting screw 412 to rotate, the rotation of the lifting screw 412 causes the lifting slider 416 on the lifting connecting member 414 to move up and down on the lifting guide 415, so that the supporting rod 422 drives the crucible 31 to move up and down. Meanwhile, a screw fixing plate is disposed at a position of the base 411 adjacent to the housing 10, and the screw fixing plate is rotatably connected to the lifting screw 412.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 3 and 13, the seed rod 30 moving assembly includes:

a Z-axis lifting device 50, wherein the Z-axis lifting device 50 is arranged outside the shell 10;

wherein, the Z-axis lifting device 50 is connected with the seed rod 30.

Specifically, the seed rod 30 is lifted and lowered in the Z-axis direction by the Z-axis lifting device 50. That is, the grown crystal is moved in the Z-axis direction (vertical direction), thereby achieving the growth of the crystal.

The Z-axis lifting device 50 includes:

a column 51 provided to the housing 10;

a Z-axis guide rail 52 provided to the column 51;

a Z-axis screw 53 rotatably connected to the column 51;

the Z-axis driving piece 54 is arranged on the upright post 51, and the Z-axis driving piece 54 is connected with the Z-axis screw 53 to drive the Z-axis screw 53 to rotate;

the Z-axis connecting piece 55 is rotatably connected with the Z-axis screw 53;

and the Z-axis sliding block 56 is connected with the Z-axis connecting piece 55, the Z-axis sliding block 56 is in sliding connection with the Z-axis guide rail 52, and the Z-axis sliding block 56 is connected with the seed rod 30.

Specifically, the upright 51 may be disposed on the housing 10, or may be directly mounted on the ground, a Z-axis guide rail 52 is disposed on the upright 51, the Z-axis guide rail 52 is a guide rail extending along a vertical direction, the Z-axis slider 56 is slidably connected to the Z-axis guide rail 52, and the Z-axis slider 56 slides along a length direction (i.e., a vertical direction) of the Z-axis guide rail 52, so as to drive the seed rod 30 to move up and down.

Z axle screw 53 rotates with stand 51 and is connected, specifically, Z axle screw 53 both ends are rotated with stand 51 through the bearing and are connected, Z axle driving piece 54 is used for driving Z axle screw 53 to rotate, Z axle connecting piece 55 one end is connected with Z axle slider 56, the other end rotates with Z axle screw 53 and is connected, when Z axle connecting piece 55 rotates with Z axle screw 53, Z axle connecting piece 55 moves along the length direction (that is vertical direction) of Z axle screw 53, then Z axle connecting piece 55 can drive Z axle slider 56 and move along the length direction (that is vertical direction) of Z axle screw 53.

Specifically, the Z-axis link 55 and the Z-axis screw 53 may form a ball screw that converts a rotary motion into a linear motion, that is, a rotary motion in which the Z-axis screw 53 is driven by the Z-axis driver 54, into a linear motion in which the Z-axis slider 56 is driven by the Z-axis link 55, the linear motion being a linear motion in the Z-axis direction.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 11 to 16, the seed rod 30 moving assembly further includes:

the X-axis translation device 60 is arranged on the Z-axis lifting device 50;

a Y-axis translation device 70, wherein the Y-axis translation device 70 is arranged on the X-axis translation device 60;

a weighing shell 80, the weighing shell 80 being connected to the Y-axis translation device 70;

a load cell 82 disposed within the housing 10;

a rotor 83 provided to the load cell 82;

the rotating piece 83 is connected with the seed rod 30, and the rotating piece 83 is used for driving the seed rod 30 to rotate.

The X-axis translation device 60 is a device which moves along the X-axis direction in the horizontal plane, the Y-axis translation device 70 is a device which moves along the Y-axis direction in the horizontal plane, the rotating member 83 is a device which rotates the seed rod 30 in the horizontal plane, the position of the seed rod 30 in the X-axis direction can be adjusted through the X-axis translation device 60, the position of the seed rod 30 in the Y-axis direction can be adjusted through the Y-axis translation device 70, the position of the seed rod 30 in the horizontal plane can be adjusted through combining the X-axis translation device 60 and the Y-axis translation device 70, the seed rod 30 can be rotated through the rotating member 83, namely, the seed rod 30 is driven to rotate, and the direction which the seed rod 30 faces can be changed. Particularly, in the case of the guided mode method, the seed crystal is grown in a plate shape, the plate-shaped seed crystal needs to be parallel to the upper surface of the die 34, and once the plate-shaped seed crystal is angled with respect to the upper surface of the die 34, the seed crystal rod 30 needs to be rotated by the rotating member 83 so that the plate-shaped seed crystal is parallel to the upper surface of the die 34 again.

It should be noted that, in the present invention, the X-axis translation device 60 is disposed on the Z-axis lifting device 50, the Y-axis translation device 70 is disposed, the seed rod 30 is connected to the rotation member 83, the rotation member 83 is connected to the weighing shell 80 through the weighing sensor 82, the weighing shell 80 is connected to the Y-axis translation device 70, and the position of the seed rod 30 in the horizontal plane can be adjusted through the X-axis translation device 60, the Y-axis translation device 70 and the rotation member 83, so as to adjust the position of the seed crystal on the seed rod 30 in the horizontal plane.

Since the atmosphere of the crystal is important to the crystal growth in the crystal growth process, the rotating member 83 is arranged in the weighing shell 80, and the weighing shell 80 is connected with the shell 10, so that gas leakage in the shell 10 caused by the movement of the seed rod 30 can be avoided, of course, the weighing shell 80 is provided with the eighth through hole 81, the seed rod 30 extends out of the weighing shell 80 from the eighth through hole 81, the shell 10 is provided with the first through hole 11, and the seed rod 30 extends into the shell 10 from the first through hole 11.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 12, a load cell 82 is disposed on an inner side wall of the weighing shell 80, the rotating member 83 is located below the load cell 82 and connected to the load cell 82, and the load cell 82 is spaced from a top wall of the weighing shell 80.

Specifically, the load cell 82 is located within the weigh housing 80, which may protect the load cell 82 from being affected. The seed rod 30 is connected to the load cell 82, and the weight of the seed rod 30 is fixed before crystal growth, and the weight detected by the load cell 82 is a fixed value. When the seed rod 30 is connected to the load cell 82, the seed rod 30 moves downward, and the load cell 82 deforms downward.

It should be noted that, by arranging the weighing sensor 82 on the seed rod 30, the weighing sensor 82 is connected with the inner side wall of the weighing shell 80, the weighing sensor 82 detects the weight of the seed rod 30, and if the seed rod 30 collides with other devices, the weighing sensor 82 detects that the weight of the seed rod 30 is reduced, so that the seed rod 30 can be prevented from damaging other devices.

Weighing sensor 82 sets up on the inside wall of shell 80 weighs, not set up on the roof of shell 80 weighs, seed rod 30 is when touchhing other devices (e.g., mould 34), seed rod 30 can the rebound, weighing sensor 82 also can upwards produce deformation, the position is kept away to the deformation that can weighing sensor 82 in the interval between weighing sensor 82 and the roof, thereby can detect seed rod 30 fast and touch other devices, and prevent that seed rod 30 from damaging other devices, also avoid the seed crystal to damage.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 12, the load cell 82 is horizontally disposed, and two ends of the load cell 82 are respectively connected to the weighing shell 80 and the seed rod 30.

Specifically, the weighing sensor 82 is horizontally arranged, and when the weighing shell 80 and the seed rod 30 are respectively connected to two ends of the weighing sensor 82, the weight change of the seed rod 30 can be greatly reflected, so that the response time of the weighing sensor 82 is conveniently shortened. The load cell 82 is horizontally disposed to allow the load cell 82 to flex upward to avoid the load cell 82 interfering with the upward movement of the seed rod 30 when the seed rod 30 encounters another device.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 12, the rotating member 83 includes:

a second mounting seat 831 connected to the weighing sensor 82;

a motor 832 disposed on the second mounting seat 831, an output shaft of the motor 832 being connected to the seed rod 30;

and a bearing 833, wherein an outer ring of the bearing 833 is disposed in the second mounting seat 831, and an inner ring of the bearing 833 is connected to the seed rod 30.

Specifically, when the motor 832 is activated, the output shaft rotates and rotates the seed rod 30. The motor 832 can adopt a stepping motor 832, and the rotation of the seed rod 30 in a small range can be realized. In order to enable the seed rod 30 to rotate stably, the bearing 833 is arranged on the second mounting seat 831, the outer ring of the bearing 833 is connected with the second mounting seat 831, the inner ring of the bearing 833 is connected with the seed rod 30, and when the seed rod 30 rotates under the driving of the motor 832, displacement or shaking cannot occur in a horizontal plane, so that the rotating stability of the seed rod 30 is improved.

The second mount 831 includes: the frame and the L-shaped piece of being connected with the frame, L-shaped piece is connected with weighing sensor 82, and motor 832 and bearing 833 are located in the frame. By providing the L-shaped member such that the central axis of the motor 832 passes through the middle of the load cell 82, that is, the central axis of the seed rod 30 also passes through the middle of the load cell 82, the center of gravity of the rotating member 83 and the seed rod 30 is located below the middle of the load cell 82, facilitating accurate weighing by the load cell 82.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 11 to 16, the X-axis translation device 60 includes:

an X-axis guide rail 61 provided to the Z-axis slider 56;

an X-axis slider 62 slidably connected to the X-axis guide rail 61;

an X-axis screw 63 rotatably connected to the Z-axis slider 56;

the X-axis driving piece 64 is arranged on the Z-axis sliding block 56, and the X-axis driving piece 64 is connected with the X-axis screw 63 to drive the X-axis screw 63 to rotate;

and the X-axis connecting piece 65 is arranged on the X-axis sliding block 62, and the X-axis connecting piece 65 is rotationally connected with the X-axis screw 63.

Specifically, the Z-axis slider 56 is provided with an X-axis guide rail 61, the X-axis guide rail 61 is a guide rail extending in the X-axis direction in the horizontal plane, the X-axis slider 62 is slidably connected to the X-axis guide rail 61, and the X-axis slider 62 slides along the length direction (i.e., the X-axis direction) of the X-axis guide rail 61, so as to drive the seed rod 30 to move in the X-axis direction.

The X-axis screw 63 is rotatably connected to the Z-axis slider 56, specifically, two ends of the X-axis screw 63 are rotatably connected to the Z-axis slider 56 through bearings, the X-axis driving member 64 is used for driving the X-axis screw 63 to rotate, one end of the X-axis connecting member 65 is connected to the X-axis slider 62, and the other end of the X-axis connecting member 65 is rotatably connected to the X-axis screw 63, when the X-axis connecting member 65 and the X-axis screw 63 rotate, the X-axis connecting member 65 moves along a length direction (i.e., an X-axis direction) of the X-axis screw 63, and then the X-axis connecting member 65 can drive the X-axis slider 62 to move along the length direction (i.e., the X-axis direction) of the X-axis screw 63.

Specifically, the X-axis connector 65 and the X-axis screw 63 may form a ball screw that converts a rotary motion into a linear motion, that is, a rotary motion in which the X-axis driver 64 drives the X-axis screw 63, into a linear motion in which the X-axis connector 65 drives the X-axis slider 62, the linear motion being a linear motion in the X-axis direction.

In a preferred implementation of the embodiment of the present invention, as shown in fig. 11 to 16, the Y-axis translation device 70 includes:

a Y-axis guide 71 provided to the X-axis slider 62;

a Y-axis slider 72 slidably connected to the Y-axis guide rail 71;

a Y-axis screw 73 rotatably connected to the X-axis slider 62;

a Y-axis driving member 74 disposed on the X-axis slider 62, wherein the Y-axis driving member 74 is connected to the Y-axis screw 73 to drive the Y-axis screw 73 to rotate;

and the Y-axis connecting piece 75 is arranged on the Y-axis sliding block 72, and the Y-axis connecting piece 75 is rotationally connected with the Y-axis screw rod 73.

Specifically, the X-axis slider 62 is provided with a Y-axis guide rail 71, the Y-axis guide rail 71 is a guide rail extending in the Y-axis direction in the horizontal plane, the Y-axis slider 72 is slidably connected to the Y-axis guide rail 71, and the Y-axis slider 72 can drive the seed rod 30 to move in the Y-axis direction by sliding along the length direction (i.e., the Y-axis direction) of the Y-axis guide rail 71.

The Y-axis screw 73 is rotatably connected to the X-axis slider 62, specifically, two ends of the Y-axis screw 73 are rotatably connected to the X-axis slider 62 through bearings, the Y-axis driving member 74 is used for driving the Y-axis screw 73 to rotate, one end of the Y-axis connecting member 75 is connected to the Y-axis slider 72, and the other end is rotatably connected to the Y-axis screw 73, when the Y-axis connecting member 75 and the Y-axis screw 73 rotate, the Y-axis connecting member 75 moves along a length direction (i.e., a Y-axis direction) of the Y-axis screw 73, and then the Y-axis connecting member 75 can drive the Y-axis slider 72 to move along the length direction (i.e., the Y-axis direction) of the Y-axis screw 73.

Specifically, the Y-axis link 75 and the Y-axis screw 73 may form a ball screw that converts a rotary motion into a linear motion, that is, a rotary motion in which the Y-axis driver 74 drives the Y-axis screw 73, into a linear motion in which the Y-axis link 75 drives the Y-axis slider 72, the linear motion being a linear motion in the Y-axis direction.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 12, 14 and 16, a fifth through hole 57 is disposed on the Z-axis sliding block 56, a sixth through hole 66 is disposed on the X-axis translation device 60, a seventh through hole 76 is disposed on the Y-axis translation device 70, and an eighth through hole 81 is disposed on the weighing shell 80; the seed rod 30 sequentially passes through the eighth through hole 81, the seventh through hole 76, the sixth through hole 66, and the fifth through hole 57.

Specifically, the Z-axis sliding block 56, the X-axis translation device 60, the Y-axis translation device 70 and the weighing shell 80 are sequentially arranged, the weighing shell 80 is located above the Z-axis sliding block 56, the shell 10 is located below the Z-axis sliding block 56, because the seed rod 30 needs to extend into the shell 10, the seed rod 30 needs to sequentially penetrate through the weighing shell 80, the Y-axis translation device 70, the X-axis translation device 60 and the Z-axis sliding block 56, the eighth through hole 81 is arranged at the bottom of the weighing shell 80, the seventh through hole 76 is arranged on the Y-axis sliding block 72, the sixth through hole 66 is arranged on the X-axis sliding block 62, and the fifth through hole 57 is arranged on the Z-axis sliding block 56. The seed rod 30 passes through the eighth through hole 81, the seventh through hole 76, the sixth through hole 66, and the fifth through hole 57 in this order.

In a preferred implementation manner of the embodiment of the present invention, as shown in fig. 12, 14 and 16, a second tube 84 is disposed at an edge of the eighth through hole 81, the second tube 84 surrounds the seed rod 30, and the second tube 84 passes through the seventh through hole 76, the sixth through hole 66 and the fifth through hole 57 in sequence; a sealing bellows is disposed on the second tube 84 and surrounds the seed rod 30.

Specifically, since the weighing shell 80 communicates with the housing 10, the weighing shell 80 and the housing 10 are typically connected by a sealing bellows, and the crystal is grown in a condition isolated from the external environment, more specifically, in a certain atmosphere, so that, by providing the sealing bellows, even if the weighing shell 80 is in a moving process, the weighing shell 80 is in a sealing connection with the housing 10 through the sealing bellows, the movement of the weighing shell 80 does not cause a change in the atmosphere inside the housing 10. In order to avoid interference of the sealing bellows on the X-axis translation device 60 and the Z-axis slide block 56 in the process of moving the seed rod 30, the second tube body 84 is connected to the bottom of the weighing shell 80, and the second tube body 84 sequentially penetrates through the seventh through hole 76, the sixth through hole 66 and the fifth through hole 57, compared with the sealing bellows, the second tube body 84 is not easy to deform, and in the process of moving the seed rod 30, the second tube body 84 does not touch the edge of the seventh through hole 76, the edge of the sixth through hole 66 and the edge of the fifth through hole 57, so that interference on the X-axis translation device 60 and the Z-axis slide block 56 is avoided.

Then, a seal bellows is provided in the second tube 84 so that the seal bellows does not affect the seed rod 30 when the seal bellows is extended or contracted since the seal bellows is expandable and contractible. One end of the sealing corrugated pipe is connected with the edge of the second pipe body 84 through a KF flange, and the other end of the sealing corrugated pipe is connected with the shell 10, thereby ensuring that the gas composition in the furnace body is not changed when the seed rod 30 moves along the Z-axis direction, namely, the furnace body is connected with the shell 10.

Based on the crystal growth apparatus of the above embodiment, the present invention further provides a preferred embodiment of a crystal growth method:

the crystal growth method provided by the embodiment of the invention comprises the following steps:

step S100, providing seed crystals and raw materials, loading the seed crystals on seed rods, and putting the raw materials into a crucible.

Specifically, the feedstock refers to a feedstock for growing a crystal, and the feedstock and seed are determined according to the crystal desired to be grown, for example, when growing a gallium oxide crystal, then the feedstock may be gallium oxide powder and the seed is a gallium oxide seed. At the time of crystal growth, a seed crystal is loaded on a seed rod, and a raw material is introduced into a crucible. Prior to heating, the desired gas may be introduced into the housing, for example, a gas of a composition comprising: oxygen, inert gases, and carbon dioxide.

And S200, heating the crucible by adopting a heating device to melt the raw materials into a melt.

Specifically, the crucible is heated by a heating device to melt the raw material to obtain a melt. For example, the heating device uses an induction coil, and a high-frequency current is supplied to the induction coil to heat the crucible. When the raw materials are heated, the raw materials can be rapidly heated by adopting higher power to melt the raw materials, and then the power is reduced to stabilize the melt at a first preset temperature, wherein the first preset temperature is the seeding temperature in the crystal growth process.

And step S300, measuring by using an infrared temperature measurer to obtain a first temperature of the melt.

Specifically, during heating of the feedstock, an infrared temperature detector may be used to detect the temperature of the feedstock, and prior to crystal growth, a first temperature of the melt is detected.

A mold is arranged in the crucible; the infrared temperature detector comprises: the temperature sensing head of the first infrared temperature detector faces the melt on the upper surface of the die. Step S300 specifically includes:

and S310, measuring by using the first infrared temperature detector to obtain a first temperature of the melt.

Specifically, because the first infrared temperature detector is aligned with the upper surface of the mold, the temperature of the melt on the upper surface of the mold can be detected, and when the mold guiding method is adopted, the temperature of the melt when the seed crystal is contacted with the upper surface of the mold is reflected more accurately.

And S400, when the first temperature is a first preset temperature, moving the seed rod to the surface of the melt by using the seed rod moving assembly to grow crystals on the seed crystals.

Specifically, when the first temperature is the first preset temperature, which indicates that crystal growth can be performed, the seed rod is lowered by using the seed rod moving assembly to enable the seed crystal to be in contact with the surface of the melt, then the seed rod is slowly lifted, and the melt continuously grows on the seed crystal, so that crystal growth is started.

And S500, in the crystal growth process, measuring by using the infrared temperature detector to obtain a second temperature of the melt.

Specifically, during the crystal growth process, the infrared temperature detector is continuously used to measure the second temperature of the melt.

The infrared temperature detector further comprises: and the temperature sensing head of the second infrared temperature detector faces the melt in the crucible. Step S500 specifically includes:

and in the crystal growth process, measuring by using the second infrared temperature detector to obtain a second temperature of the melt.

Specifically, in the crystal growth process, because the grown crystal can shield the melt on the upper surface of the mold, the first infrared temperature detector cannot accurately measure the temperature of the melt on the upper surface of the mold, and therefore the second infrared temperature detector is adopted to measure the temperature of the melt in the crucible to obtain the second temperature of the melt.

And S600, when the second temperature is not the second preset temperature, changing the position of the seed rod by adopting a seed rod moving assembly, and changing the position of the crucible or the position of the heating device by adopting a lifting device so as to adjust the second temperature of the melt.

Specifically, in the process of crystal growth, because the melt is continuously solidified into the crystal, the melt in the crucible is continuously reduced, the liquid level of the melt is continuously reduced, the temperature of the melt is continuously changed, and the crystal growth conditions are different at different temperatures, so that the temperature of the melt needs to be adjusted.

In order to determine the temperatures of the melts of the crucibles at different positions in the heating device, the crucibles can be lifted to different positions, and the temperatures corresponding to the different positions of the cones are detected by an infrared temperature measuring device. The speed of the melt level descent is fixed during the crystal growth, particularly during the steady crystal growth phase, and the amplitude by which the position of the crucible can be changed by the lifting device can also be determined by adjusting the temperature of the melt. It should be noted that the crystal growth process generally includes: seeding stage, necking stage, shoulder expanding stage and stable growth stage.

The second preset temperature refers to a temperature in a crystal growth process, and specifically may be a temperature in a stable growth stage in the crystal growth process, and when the second temperature of the melt measured by the infrared temperature detector is not the second preset temperature, the lifting device is used to change the position of the crucible to adjust the second temperature of the melt, so that the second temperature of the melt is stabilized at the second preset temperature.

It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.