阅读说明：本技术 一种视觉耦合压电定位的微纳芯片高通量测试机器人 (Micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning function ) 是由 曹宁 沈斐玲 于 2020-06-05 设计创作，主要内容包括：本发明属于微纳技术、微机电系统领域,具体涉及一种视觉耦合压电定位的微纳芯片高通量测试机器人,包括固定于扫描电镜样品台上的圆形基础平台,圆形基础平台上设有压电升降式第一周向旋转平台、压电升降式第二周向旋转平台,压电升降式第一周向旋转平台包括第一旋转检测装置,压电升降式第二周向旋转平台包括第二旋转检测装置,第一旋转检测装置与第二旋转检测装置的端部均设有微纳芯片放置槽,第一旋转检测装置与第二旋转检测装置旋转后,两者的端部相交配合形成微纳芯片观测区。通过第一旋转检测装置与第二旋转检测装置的相互配合,实现不同待测微纳芯片的自动组合,达到高通量测试目的,显著提高测试效率,具有性能测试多元化、自动化的优点。(The invention belongs to the fields of micro-nano technology and micro-electro-mechanical systems, and particularly relates to a micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning, which comprises a circular base platform fixed on a scanning electron microscope sample platform, wherein a piezoelectric lifting type first circumferential rotating platform and a piezoelectric lifting type second circumferential rotating platform are arranged on the circular base platform, the piezoelectric lifting type first circumferential rotating platform comprises a first rotation detection device, the piezoelectric lifting type second circumferential rotating platform comprises a second rotation detection device, micro-nano chip placing grooves are formed in the end parts of the first rotation detection device and the second rotation detection device, and after the first rotation detection device and the second rotation detection device rotate, the end parts of the first rotation detection device and the second rotation detection device are intersected and matched to form a micro-nano chip observation area. Through the mutual cooperation of the first rotary detection device and the second rotary detection device, the automatic combination of different micro-nano chips to be tested is realized, the aim of high-flux test is achieved, the test efficiency is obviously improved, and the device has the advantages of diversification and automation of performance test.)

1. A micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning is characterized by comprising a circular base platform fixed on a scanning electron microscope sample table, wherein a piezoelectric lifting type first circumferential rotating platform and a piezoelectric lifting type second circumferential rotating platform are arranged on the circular base platform, the piezoelectric lifting type first circumferential rotating platform comprises a first rotation detection device, the piezoelectric lifting type second circumferential rotating platform comprises a second rotation detection device matched with the first rotation detection device, micro-nano chip placing grooves are formed in the end portions of the first rotation detection device and the second rotation detection device, and after the first rotation detection device and the second rotation detection device rotate, the end portions of the first rotation detection device and the second rotation detection device are crossed and matched to form a micro-nano chip observation area; and the circular base platform is provided with a visual detection device matched with the first rotation detection device and the second rotation detection device.

2. The visual coupling piezoelectric positioning micro-nano chip high-throughput testing robot is characterized in that a square hole matched with a micro-nano chip placing groove at the end part of a second rotation detection device is further formed in the end part of the first rotation detection device, when the first rotation detection device is intersected with the second rotation detection device, the micro-nano chip placing groove at the end part of the second rotation detection device is placed under the square hole of the first rotation detection device, and at the moment, the micro-nano chip placing grooves at the end parts of the first rotation detection device and the second rotation detection device which are intersected are both located in the detection range of a scanning electron microscope.

3. The micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning according to claim 2, wherein a plurality of clamping grooves are formed in the micro-nano chip placing groove.

4. The visual coupling piezoelectric positioning micro-nano chip high-throughput testing robot is characterized in that the piezoelectric lifting type first circumferential rotating platform comprises a first rotating rod rotatably connected with the circular base platform, a first piezoelectric telescopic rod is fixed at the top end of the first rotating rod, a first rotating support rod is fixed at the top end of the first piezoelectric telescopic rod, and the first rotation detection device is fixed on the first rotating support rod; the piezoelectric lifting type second circumferential rotating platform comprises a second rotating rod which is rotatably connected with the circular base platform, a second piezoelectric telescopic rod is fixed at the top end of the second rotating rod, a second rotating support rod is fixed at the top end of the second piezoelectric telescopic rod, and the second rotation detection device is fixed on the second rotating support rod.

5. The visual coupling piezoelectric positioning micro-nano chip high-throughput testing robot is characterized in that the first rotation detection device comprises a plurality of circumferential rotating rods which have the same structure and are coaxially arranged on a first rotating support rod, and the plurality of circumferential rotating rods are arranged on the first rotating support rod in a vertically staggered manner; the second rotation detection device comprises a plurality of circumferential rotating rods which are same in structure and coaxially arranged on the second rotation supporting rod, and the circumferential rotating rods are arranged on the second rotation supporting rod in an up-and-down staggered mode.

6. The visual coupling piezoelectric positioning micro-nano chip high-throughput testing robot is characterized in that a first driving device for driving a first rotary rod to rotate and a second driving device for driving a second rotary rod to rotate are further arranged on the circular base platform, the first driving device and the second driving device respectively comprise piezoelectric micro motors fixed on the circular base platform, output shafts of the piezoelectric micro motors are connected with driving gears, and driven gears meshed with the corresponding driving gears are fixed on the first rotary rod and the second rotary rod.

7. The vision-coupled piezoelectric positioning micro-nano chip high-throughput testing robot is characterized in that the vision detection device comprises a first vision detection device for carrying out image feedback on end face outlines of the first rotation detection device and the second rotation detection device, and a second vision detection device for carrying out image feedback on end intersection positions of the first rotation detection device and the second rotation detection device; the first visual detection device comprises a first visual piezoelectric telescopic rod fixed on the circular base platform and a first camera device fixed at the top of the first visual piezoelectric telescopic rod; the second visual detection device comprises a second visual piezoelectric telescopic rod fixed on the circular base platform and a second camera device fixed at the top of the second visual piezoelectric telescopic rod.

8. The method for carrying out the high-flux test on the micro-nano chip by utilizing the micro-nano chip high-flux test robot with the visual coupling piezoelectric positioning is characterized by comprising the following steps:

(1) placing the micro-nano chip: placing the micro-nano chip in micro-nano chip placing grooves of a first rotation detection device and a second rotation detection device;

(2) visual inspection device height initialization: respectively controlling the first vision piezoelectric telescopic rod and the second vision piezoelectric telescopic rod to stretch to the first camera device and the second camera device, wherein the horizontal line of the center of the visual field of the first camera device and the horizontal line of the center of the visual field of the second camera device are all flush with the upper surface of a circumferential rotating rod to be detected in the first rotation detection device;

(3) the method comprises the steps that a first rotation detection device and a second rotation detection device are rotationally positioned based on a first camera device, so that the first rotation detection device and the second rotation detection device are intersected, two intersected circumferential rotating rods are positioned on the same vertical plane, at the moment, a micro-nano chip placing groove on the circumferential rotating rod on the second rotation detection device in an intersected state is positioned under a square hole of the circumferential rotating rod on the first rotation detection device, and the micro-nano chip placing grooves on the two intersected circumferential rotating rods are both positioned under an objective lens of a scanning electron microscope;

(4) performing visual imaging on the intersection position of the circumferential rotating rod on the first rotation detection device and the circumferential rotating rod on the second rotation detection device based on the second camera device to obtain an initial height difference L between the lower surface of the circumferential rotating rod on the first rotation detection device and the upper surface of the circumferential rotating rod on the second rotation detection device;

(5) based on visual imaging feedback of a second camera device, controlling the first piezoelectric telescopic rod to contract or the second piezoelectric telescopic rod to extend, and adjusting the height difference between the two circumferential rotating rods in an intersecting state until the height difference between the two circumferential rotating rods is 0, wherein the micro-nano chip placing grooves on the two intersecting circumferential rotating rods are both positioned in an observation area of a scanning electron microscope;

(6) controlling a scanning electron microscope to simultaneously detect the micro-nano chips on the two intersected circumferential rotating rods;

(7) and (4) respectively controlling the first rotating rod and the second rotating rod to rotate according to detection requirements, repeating the steps (2) to (6), and sequentially and simultaneously detecting the micro-nano chips on the circumferential rotating rods with different combinations.

9. The method for testing the high flux of the micro-nano chip according to claim 8, wherein the specific process of rotationally positioning the first rotation detection device and the second rotation detection device based on the first camera device in the step (3) is as follows:

A. inputting preset cross section profiles of two circumferential rotating rods to be intersected into a computer system;

B. the first rotating rod and the second rotating rod are respectively driven to rotate, and the circumferential rotating rod fixed on the first rotating rod and the circumferential rotating rod fixed on the second rotating rod are respectively driven to rotate;

C. the end faces of the circumferential rotating rods on the first rotation detection device and the circumferential rotating rods on the second rotation detection device are imaged in real time based on the first camera device, whether the end face outlines of the two circumferential rotating rods are completely matched with a preset cross section outline or not is judged, the end face outlines of the two circumferential rotating rods are fed back to the computer system, and the first rotating rod and the second rotating rod are stopped from rotating until the end face outlines of the two circumferential rotating rods are completely matched.

Technical Field

The invention belongs to the fields of micro-nano technology and micro-electro-mechanical systems, and particularly relates to a micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning.

Background

The micro-nano chip is used as a main common tool in the field of micro-nano testing, has the advantages of high testing efficiency, small size, high testing sensitivity and the like, and is widely applied to the occasions of micro-nano material performance testing and chip detection in laboratory research, industrial fields and the like. Generally, a single chip is often adopted in a traditional test method based on a micro-nano chip, so that the test efficiency is low, the test mode is single, and the special occasion requirements of efficiently testing the micro-nano chip in a combined manner cannot be met. In addition, the micro-nano chip test is mostly operated manually, damage is easily caused in the using process, the test efficiency is influenced, and the cost is increased. After a certain micro-nano chip is tested, the next tested target micro-nano chip generally needs to be manually operated, but the problems of time and labor waste, low precision and the like easily exist due to the small size of the micro-nano chip, and the method is more important particularly in the occasions with higher automation degree required by the micro-nano chip test.

Disclosure of Invention

The invention aims to provide a micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning, which solves the problems of single testing chip and low automation degree in the prior art, realizes high throughput and automation of testing a micro-nano chip, and has the advantages of high testing efficiency and high automation degree.

Based on the purpose, the invention adopts the following technical scheme: a micro-nano chip high-throughput testing robot with visual coupling piezoelectric positioning comprises a circular base platform fixed on a scanning electron microscope sample platform, wherein a piezoelectric lifting type first circumferential rotating platform and a piezoelectric lifting type second circumferential rotating platform are arranged on the circular base platform, the piezoelectric lifting type first circumferential rotating platform comprises a first rotation detection device, the piezoelectric lifting type second circumferential rotating platform comprises a second rotation detection device matched with the first rotation detection device, micro-nano chip placing grooves are formed in the end portions of the first rotation detection device and the second rotation detection device, and after the first rotation detection device and the second rotation detection device rotate, the end portions of the first rotation detection device and the second rotation detection device are crossed and matched to form a micro-nano chip observation area; and the circular base platform is provided with a visual detection device matched with the first rotation detection device and the second rotation detection device.

Further, the end of the first rotary detection device is also provided with a square hole matched with the micro-nano chip placing groove at the end of the second rotary detection device, when the first rotary detection device is intersected with the second rotary detection device, the micro-nano chip placing groove at the end of the second rotary detection device is arranged under the square hole of the first rotary detection device, and at the moment, the micro-nano chip placing grooves at the ends of the first rotary detection device and the second rotary detection device which are intersected are both positioned in the detection range of the scanning electron microscope.

Furthermore, a plurality of clamping grooves are formed in the micro-nano chip placing groove, and a single clamping groove is used for placing a single micro-nano chip.

Furthermore, the piezoelectric lifting type first circumferential rotating platform comprises a first rotating rod which is rotatably connected with the circular base platform, a first piezoelectric telescopic rod is fixed at the top end of the first rotating rod, a first rotating support rod is fixed at the top end of the first piezoelectric telescopic rod, and a first rotation detection device is fixed on the first rotating support rod; the piezoelectric lifting type second circumferential rotating platform comprises a second rotating rod which is rotatably connected with the circular base platform, a second piezoelectric telescopic rod is fixed at the top end of the second rotating rod, a second rotating support rod is fixed at the top end of the second piezoelectric telescopic rod, and a second rotation detection device is fixed on the second rotating support rod.

Furthermore, the first rotation detection device comprises a plurality of circumferential rotating rods which have the same structure and are coaxially arranged on the first rotation supporting rod, and the circumferential rotating rods are arranged on the first rotation supporting rod in a vertically staggered manner; the second rotation detection device comprises a plurality of circumferential rotating rods which are same in structure and coaxially arranged on the second rotation supporting rod, and the plurality of circumferential rotating rods are arranged on the second rotation supporting rod in an up-down staggered mode.

Furthermore, the number of the circumferential rotating rods in the first rotation detection device is 2-4, and the included angles of the projections of the two adjacent circumferential rotating rods on the horizontal plane are equal; the number of the circumferential rotating rods in the second rotation detection device is 2-4, and the included angles of the projections of the two adjacent circumferential rotating rods on the horizontal plane are equal.

Further, a clamping groove is formed in a micro-nano chip placing groove on the circumferential rotating rod in the first rotation detection device; three clamping grooves are formed in the micro-nano chip placing grooves in the circumferential rotary rods in the second rotary detection device, and square holes in the circumferential rotary rods in the first rotary detection device are matched with the micro-nano chip placing grooves in the circumferential rotary rods in the second rotary detection device.

Furthermore, a first driving device for driving the first rotary rod to rotate and a second driving device for driving the second rotary rod to rotate are further arranged on the circular base platform, the first driving device and the second driving device respectively comprise piezoelectric micro motors fixed on the circular base platform, output shafts of the piezoelectric micro motors are connected with driving gears, and driven gears meshed with the corresponding driving gears are fixed on the first rotary rod and the second rotary rod.

Further, the visual detection device comprises a first visual detection device for carrying out image feedback on the end surface outline of the first rotation detection device and the second rotation detection device, and a second visual detection device for carrying out image feedback on the end part intersection position of the first rotation detection device and the second rotation detection device; the first visual detection device comprises a first visual piezoelectric telescopic rod fixed on the circular base platform and a first camera device fixed at the top of the first visual piezoelectric telescopic rod; the second vision detection device comprises a second vision piezoelectric telescopic rod fixed on the circular base platform and a second camera device fixed at the top of the second vision piezoelectric telescopic rod.

The method for carrying out the high-flux test on the micro-nano chip by utilizing the micro-nano chip high-flux test robot with the visual coupling piezoelectric positioning comprises the following steps:

(1) placing the micro-nano chip: placing the micro-nano chip in micro-nano chip placing grooves of a first rotation detection device and a second rotation detection device;

(2) visual inspection device height initialization: respectively controlling the first vision piezoelectric telescopic rod and the second vision piezoelectric telescopic rod to stretch to the first camera device and the second camera device, wherein the horizontal line of the center of the visual field of the first camera device and the horizontal line of the center of the visual field of the second camera device are all flush with the upper surface of a circumferential rotating rod to be detected in the first rotation detection device;

(3) the method comprises the steps that a first rotation detection device and a second rotation detection device are rotationally positioned based on a first camera device, so that the first rotation detection device and the second rotation detection device are intersected, two intersected circumferential rotating rods are positioned on the same vertical plane, at the moment, a micro-nano chip placing groove on the circumferential rotating rod on the second rotation detection device in an intersected state is positioned under a square hole of the circumferential rotating rod on the first rotation detection device, and the micro-nano chip placing grooves on the two intersected circumferential rotating rods are both positioned under an objective lens of a scanning electron microscope;

(4) performing visual imaging on the intersection position of the circumferential rotating rod on the first rotation detection device and the circumferential rotating rod on the second rotation detection device based on the second camera device to obtain an initial height difference L between the lower surface of the circumferential rotating rod on the first rotation detection device and the upper surface of the circumferential rotating rod on the second rotation detection device;

(5) based on visual imaging feedback of a second camera device, controlling the first piezoelectric telescopic rod to contract or the second piezoelectric telescopic rod to extend, and adjusting the height difference between the two circumferential rotating rods in an intersecting state until the height difference between the two circumferential rotating rods is 0, wherein the micro-nano chip placing grooves on the two intersecting circumferential rotating rods are both positioned in an observation area of a scanning electron microscope;

(6) controlling a scanning electron microscope to simultaneously detect the micro-nano chips on the two intersected circumferential rotating rods;

(7) and (3) respectively controlling the first rotating rod and the second rotating rod to rotate according to detection requirements, repeating the steps (2) to (6), and sequentially and simultaneously detecting the micro-nano chips on the circumferential rotating rods with different combinations to achieve the aim of high-flux test.

Further, the specific process of performing rotational positioning on the first rotation detection device and the second rotation detection device based on the first camera device in the step (3) is as follows:

A. inputting preset cross section profiles of two circumferential rotating rods to be intersected into a computer system;

B. the first rotating rod and the second rotating rod are respectively driven to rotate, and the circumferential rotating rod fixed on the first rotating rod and the circumferential rotating rod fixed on the second rotating rod are respectively driven to rotate;

C. the end faces of the circumferential rotating rods on the first rotation detection device and the circumferential rotating rods on the second rotation detection device are imaged in real time based on the first camera device, whether the end face outlines of the two circumferential rotating rods are completely matched with a preset cross section outline or not is judged, the end face outlines of the two circumferential rotating rods are fed back to the computer system, and the first rotating rod and the second rotating rod are stopped from rotating until the end face outlines of the two circumferential rotating rods are completely matched.

Compared with the prior art, the invention has the following beneficial effects:

(1) the micro-nano chip high-throughput testing robot comprises a first rotation detection device and a second rotation detection device, micro-nano chip placing grooves are formed in the end portions of the first rotation detection device and the second rotation detection device, micro-nano chip tests of different combinations are achieved through rotation matching of the first rotation detection device and the second rotation detection device, the number of micro-nano chips observed at one time can be increased, the high-throughput testing purpose is achieved, and the multi-sample comparison testing purpose can be achieved through changing the combination of the micro-nano chips to be tested.

(2) According to the invention, the square hole matched with the micro-nano chip placing groove at the end part of the second rotary detection device is arranged at the end part of the first rotary detection device, so that when the first rotary detection device is matched with the second rotary detection device, the micro-nano chip placing groove at the end part of the second rotary detection device is positioned under the square hole, the transverse distance between the micro-nano chip placing grooves on the first rotary detection device and the second rotary detection device is favorably shortened, and the micro-nano chips placed in the micro-nano chip placing grooves are all positioned in the detection range of a scanning electron microscope, namely, in the detection limit range of the scanning electron microscope, the number of the micro-nano chips to be detected is further increased by a mode that the first rotary detection device and the second rotary detection device are overlapped up and down during detection, and the purpose of high flux detection is achieved.

(3) According to the invention, the plurality of clamping grooves are formed in the micro-nano chip placing groove, so that the simultaneous detection of a plurality of micro-nano chips is facilitated, and the testing efficiency is improved.

(4) According to the invention, the first piezoelectric telescopic rod and the first rotary rod are sequentially fixed at the bottom of the first rotation detection device, the second piezoelectric telescopic rod and the second rotary rod are sequentially fixed at the bottom of the second rotation detection device, the vertical displacement and the rotary angle of the first rotation detection device are accurately controlled through the first piezoelectric telescopic rod and the first rotary rod, and the vertical displacement and the rotary angle of the second rotation detection device are accurately controlled through the second piezoelectric telescopic rod and the second rotary rod, so that the positioning and matching of the first rotation detection device and the second rotation detection device are realized, and the smooth proceeding of the detection process is ensured; in addition, by controlling the rotation fit of the first rotation detection device and the second rotation detection device, the simultaneous testing of the micro-nano chips in various different combinations and the comparison testing of multiple samples can be realized, and the testing efficiency is improved.

(5) According to the invention, the plurality of circumferential rotating rods are arranged on the first rotating supporting rod or the second rotating supporting rod in a vertically staggered manner, so that when the micro-nano chips on two intersecting circumferential rotating rods are tested, the blockage of other circumferential rotating rods to the detection visual field can be avoided, and the smooth detection process is facilitated.

(6) The invention adopts a first driving device which is arranged on a circular base platform and drives a first rotating rod to rotate and a second driving device which drives a second rotating rod to rotate, wherein the first driving device and the second driving device both comprise piezoelectric micromotors fixed on the circular base platform, the output shafts of the piezoelectric micromotors are connected with driving gears, and driven gears which are meshed with the corresponding driving gears are fixed on the first rotating rod and the second rotating rod; through the rotation of controlling corresponding piezoelectricity micromotor output shaft to transmit the rotation of piezoelectricity micromotor output shaft to first rotary rod or second rotary rod through driving gear and driven gear in proper order, and finally export the rotation for first rotary rod or second rotary rod, have control simple, the accurate advantage in location.

(7) According to the invention, the visual detection device matched with the first rotation detection device and the second rotation detection device is arranged, and the visual detection device is used for carrying out visual imaging feedback on the end parts of the circumferential rotating rods in the first rotation detection device and the second rotation detection device and the intersection positions of the two circumferential rotating rods, so that the control and positioning of the first rotating rod, the first piezoelectric telescopic rod, the second rotating rod and the second piezoelectric telescopic rod on the first rotation detection device and the second rotation detection device are respectively facilitated, the positioning precision is improved, and the purpose of automatic testing is realized.

(8) According to the method for testing the micro-nano chips by using the micro-nano chip high-throughput testing robot, the simultaneous detection of a plurality of micro-nano chips can be realized, the purpose of high-throughput testing is achieved, in addition, the simultaneous detection of a plurality of micro-nano chips with different combinations can be realized through the mutual matching of the rotary rods with different circumferential directions, and the purpose of multi-sample comparison testing is achieved.

In conclusion, the problems that the existing micro-nano chip testing process is easy to damage, low in efficiency, single in testing chip, low in automation degree and the like are solved, the automatic combination of different micro-nano chips to be tested is realized through the mutual matching of the first rotation detection device and the second rotation detection device, the purpose of high-flux testing is achieved, the testing efficiency is obviously improved, and the multi-functional micro-nano chip testing device has the advantage of diversified performance testing; by means of visual coupling piezoelectric positioning, lifting displacement and rotation angle of the circumferential rotating rod are accurately controlled, accurate control over the circumferential rotating rod in the test process is improved, the test process is guaranteed to be smoothly carried out, and the automation degree of micro-nano chip testing is improved.

Drawings

FIG. 1 is a front view of the robot structure of the present invention;

FIG. 2 is a top view of the robot structure of the present invention;

FIG. 3 is a left side view of the robot configuration of the present invention;

FIG. 4 is a schematic view of an end structure of a circumferential rotating rod;

FIG. 5 is a flowchart of a robot control method of the present invention;

FIG. 6 is a preset cross-sectional profile of the first visual inspection device;

fig. 7 is a schematic view illustrating a state of a height difference between an upper surface a of the fourth circumferential rotating rod and a lower surface B of the first circumferential rotating rod.

In the figure: 1. a circular base platform; 2. a first rotating rod; 3. a first piezoelectric telescopic rod; 4. a first rotating support rod; 5. a second rotating rod; 6. a second piezoelectric telescopic rod; 7. a second rotating support rod; 8. a square hole; 9. a card slot; 10. a first circumferential rotating rod; 11. a second circumferential rotating rod; 12. a third circumferential rotating rod; 13. a fourth circumferential rotating rod; 14. a fifth circumferential rotating rod; 15. a sixth circumferential rotating rod; 16. a first vision piezoelectric telescopic rod; 17. a first image pickup device; 18. a second visual piezoelectric telescopic rod; 19. a second image pickup device; 20. a piezoelectric micromotor; 21. a driving gear; 22. a driven gear.

Detailed Description