阅读说明：本技术 电动机的控制装置 (Control device for motor ) 是由 藤原弘 田泽徹 于 2018-12-19 设计创作，主要内容包括：电动机的控制装置包括位置控制部、指令加速度计算部、第一减法运算器以及第二减法运算器。位置控制部被输入用于指定负载的目标位置的位置指令信号和表示驱动负载的电动机的位置的电动机位置信号,输出转矩指令信号。指令加速度计算部被输入位置指令信号,输出表示位置指令信号的加速度的指令加速度信号。第一减法运算器从表示负载的加速度的负载加速度信号减去指令加速度信号,来输出负载加速度校正信号。第二减法运算器从转矩指令信号减去对负载加速度校正信号乘以规定的加权系数所得到的值,来输出转矩指令校正信号。转矩指令校正信号用于控制向电动机的定子绕组通电的电流。(A control device for an electric motor includes a position control unit, a command acceleration calculation unit, a first subtraction unit, and a second subtraction unit. The position control unit receives a position command signal for specifying a target position of the load and a motor position signal indicating a position of a motor for driving the load, and outputs a torque command signal. The command acceleration calculating unit receives the position command signal and outputs a command acceleration signal indicating an acceleration of the position command signal. The first subtractor subtracts the command acceleration signal from a load acceleration signal indicating the acceleration of the load, and outputs a load acceleration correction signal. The second subtractor subtracts a value obtained by multiplying the load acceleration correction signal by a predetermined weighting coefficient from the torque command signal, and outputs a torque command correction signal. The torque command correction signal is used to control the current that energizes the stator windings of the motor.)

1. A control device of an electric motor for driving a load, comprising:

a position control unit to which a position command signal for specifying a target position of the load and a motor position signal indicating a position of the motor for driving the load are input, and which outputs a torque command signal;

a command acceleration calculation unit to which the position command signal is input and which outputs a command acceleration signal indicating an acceleration of the position command signal;

a first subtractor that subtracts the command acceleration signal from a load acceleration signal indicating an acceleration of the load to output a load acceleration correction signal; and

a second subtractor that subtracts a value obtained by multiplying the load acceleration correction signal by a predetermined weighting coefficient from the torque command signal to output a torque command correction signal,

wherein the torque command correction signal is used to control a current that energizes a stator winding of the electric motor.

2. The control device of an electric motor according to claim 1,

the command acceleration calculation unit generates a load speed signal by multiplying a signal obtained by applying a filtering process equivalent to a transfer characteristic of the motor position signal with respect to the position command signal to the command acceleration signal by a weighting coefficient.

3. The control device of an electric motor according to claim 1,

the command acceleration calculation unit generates a load speed signal by multiplying a signal obtained by applying a filtering process equivalent to a transmission characteristic of the motor position signal with respect to the position command signal when the load and the motor are rigid bodies, to the command acceleration signal, by a weighting coefficient.

Technical Field

The present invention relates to a motor control device that controls a driving operation such as a speed or a position of a motor with respect to the motor and a mechanical load driven by the motor. In particular, the present invention relates to a motor control device having a control structure for suppressing vibration due to antiresonance of a mechanical load generated during driving or the like.

Background

Such a motor control device internally has a feedback control system for matching a position command input from a host controller with the positions of the motor and a load (mechanical load) to be controlled. Such a motor control device calculates a torque command value for matching a position command with a motor position based on the position command and a position detection value of the motor, and controls a current to be supplied to a stator winding of the motor so that the same torque as the torque command value is generated in the motor, thereby controlling the positions of the motor and a load (mechanical load) to be controlled. However, when the mechanical rigidity of the joint between the motor and the load (mechanical load) to be controlled is low, vibration due to antiresonance is likely to occur in the load (mechanical load) to be controlled at the time of acceleration/deceleration or at the time of disturbance application, and it is recognized that the stability and disturbance suppression performance are further improved as compared with the conventional one.

To solve the problem, a conventional feed control device is configured to: an acceleration sensor is provided on a slider, which is a load (mechanical load) to be controlled, and an acceleration feedback loop for subtracting a value obtained by multiplying an acceleration detection value of the load (mechanical load) to be controlled by an acceleration feedback gain, which is a weighting coefficient, from a torque command value is provided to suppress vibration generated in the load (mechanical load) to be controlled at the time of acceleration and deceleration or at the time of disturbance application (for example, see patent document 1).

In the configuration represented by patent document 1 and the like, the vibration caused by the mechanical rigidity is reduced as the acceleration feedback gain is increased. On the other hand, the torque required for the acceleration/deceleration operation of the load is subtracted from the torque command value. Therefore, there are the following problems: the command follow-up performance is deteriorated, and operation delay, overshoot, undershoot, or the like occurs during the stop, and stability and vibration suppression cannot be achieved at the same time. In other words, there is a trade-off relationship between the acceleration feedback gain (acceleration feedback amount) and the command tracking performance, and further improvement is desired in order to achieve both stability and vibration suppression.

Disclosure of Invention

The present invention is intended to solve the conventional problems. An object of the present invention is to provide a control device for a motor having a load acceleration feedback system, in which stability and vibration suppression can be simultaneously achieved by obtaining a vibration suppression effect by load acceleration feedback while maintaining a command follow-up performance. That is, the present invention provides a control device for an electric motor, which can reduce or avoid a trade-off relationship between a load acceleration feedback gain (acceleration feedback amount) and a command follow-up performance, and improve a vibration suppression effect by acceleration feedback from a load side while maintaining the command follow-up performance.

In order to solve the above problems, the inventors of the present application have repeatedly conducted experiments and have intensively studied. Then, a new control device for an electric motor has been found which improves the vibration suppression effect by the acceleration feedback from the load side while maintaining the command follow-up performance. The details thereof are as follows.

A first aspect of the present invention is a control device for an electric motor that drives a load (mechanical load), the control device including a position control unit, a command acceleration calculation unit, a first subtraction unit, and a second subtraction unit. The position control unit receives a position command signal for specifying a target position of the load and a motor position signal indicating a position of a motor for driving the load, and outputs a torque command signal. The command acceleration calculating unit receives the position command signal and outputs a command acceleration signal indicating an acceleration of the position command signal. The first subtractor subtracts the command acceleration signal from a load acceleration signal indicating the acceleration of the load, and outputs a load acceleration correction signal. The second subtractor subtracts a value obtained by multiplying the load acceleration correction signal by a predetermined weighting coefficient from the torque command signal, and outputs a torque command correction signal. The torque command correction signal is used to control the current that energizes the stator windings of the motor.

In a second aspect, in the motor control device according to the first aspect, the command acceleration calculation unit generates the load speed signal by multiplying a signal obtained by applying a filtering process equivalent to a transfer characteristic of the motor position signal with respect to the position command signal to the command acceleration signal by a weighting coefficient.

Further, in the third aspect, in the motor control device according to the first aspect, the command acceleration calculation unit generates the load speed signal by multiplying a signal obtained by applying a filtering process equivalent to a transmission characteristic of the motor position signal with respect to the position command signal when the load and the motor are rigid bodies to the command acceleration signal by the weighting coefficient.

By solving the above problems, in a control device for an electric motor having a load acceleration feedback system, subtraction of acceleration/deceleration torque by load acceleration feedback can be prevented by subtracting command acceleration information from fed back load acceleration information in advance. Therefore, the vibration suppression effect by the load acceleration feedback can be improved while maintaining the command follow-up performance without causing a decrease in the command follow-up performance by the load acceleration feedback. Thus, stability and vibration suppression can be simultaneously achieved.

A control device for an electric motor according to the present invention subtracts command acceleration information from fed back load acceleration information in advance. The motor control device of the present invention can prevent subtraction of acceleration/deceleration torque due to load acceleration feedback, and can improve the vibration suppression effect due to load acceleration feedback while maintaining the command tracking performance, and is industrially valuable.

Drawings

Fig. 1 is a diagram showing an example of a configuration of a motor control device according to an embodiment of the present invention.

Fig. 2 is a diagram illustrating an example of the configuration of the load acceleration correction unit according to the embodiment of the present invention.

Fig. 3 is a diagram showing another example of the configuration of the motor control device according to the embodiment of the present invention.

Fig. 4 is a diagram showing still another example of the configuration of the motor control device according to the embodiment of the present invention.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiment.

(embodiment mode)

Fig. 1 is a diagram showing an example of a configuration of a motor control device according to an embodiment of the present invention. The motor control device 100 shown in fig. 1 is connected to a motor 201, a position detector 202 for detecting the position of the motor 201, and an acceleration detector 205 for detecting the acceleration of a load 204 to be driven, which is connected to the motor 201 via a joint 203. The motor control device 100 receives a position command signal from a host controller, not shown, and controls the current flowing through the stator winding of the motor so that the position command signal matches the position of the motor and the load machine.

The position detector 202 detects the position of the motor, and sets the detected position of the motor as a motor position signal θ_mAnd outputs the result to the motor control device 100. The acceleration detector 205 detects the acceleration of the load, which is detectedThe measured acceleration of the load is taken as a load acceleration signal A_LAnd outputs the result to the motor control device 100.

The structure of the motor control device 100 will be described. The motor control device 100 includes therein a position control unit 101, a speed control unit 102, a torque control unit 103, a speed conversion unit 104, a load acceleration correction unit 105, a command acceleration calculation unit 106, a subtraction unit 107, and a subtraction unit 108.

Position control unit 101 receives position command signal θ_SAnd motor position signal theta_mOutputs a speed command signal omega_S. The speed control unit 102 receives a speed command signal ω_SAnd a speed conversion part 104 based on the motor position signal theta_mCalculated motor speed signal omega_mOutput a torque command signal τ_S. The torque control unit 103 receives the slave torque command signal τ_SSubtracting a load acceleration feedback torque signal τ described later_accResulting torque command correction signal τ_inControlling the current to be supplied to the stator winding of the motor so that a torque command correction signal tau is generated in the motor_inThe same torque.

The command acceleration calculation unit 106 receives the position command signal θ_SAnd outputs a command acceleration signal A representing the acceleration of the position command_S。

The load acceleration correction unit 105 receives the load acceleration signal a_LSubtracting the command acceleration signal A_SResulting load acceleration correction signal A'_LOutput load acceleration feedback torque signal tau_acc。

In this way, the motor control device 100 internally has a cascade-type feedback control system that feeds back the motor position, the motor speed, and the load speed so that the position command matches the positions of the motor and the load.

Next, the configuration of the motor control device will be described in detail. Position control unit 101 receives position command signal θ_SAnd motor position signal theta_mThe output is used for reducing the difference between the twoSpeed command signal ω_S. The position control unit 101 performs, for example, a proportional control operation of outputting a position command signal θ_SAnd motor position signal theta_mA signal obtained by multiplying the weighting coefficient is used as the speed command signal ω_SAnd (6) outputting. The position control unit 101 performs, for example, a proportional control operation of outputting a position command signal θ_SWith motor position signal theta_mA value obtained by multiplying the difference by a weighting coefficient is used as the speed command signal ω_SAnd (6) outputting.

The speed control unit 102 receives a speed command signal ω_SAnd motor speed signal omega_mAnd outputs a torque command signal tau for reducing the difference between the torque command signal and the torque command signal_S. The speed control unit 102 performs, for example, a proportional-integral operation in which the sum of two values is defined as the torque command signal τ_SAn output, one of the two values being for a speed command signal ω_SWith motor speed signal omega_mIs multiplied by a weighting coefficient, and the other of the two values is a value obtained by multiplying the speed command signal ω by the weight coefficient_SWith motor speed signal omega_mThe integrated value of the difference value of (b) is multiplied by a weighting coefficient.

The speed conversion unit 104 receives the motor position signal θ_mOutputs a motor speed signal omega representing the motor speed_m. Speed conversion unit 104 processes motor position signal θ_mA differential operation is performed, and the calculation result is used as a motor speed signal omega_mAnd (6) outputting.

The command acceleration calculation unit 106 receives the position command signal θ_SOutputs a command signal theta representing the position_SCommand acceleration signal A of acceleration_S. The command acceleration calculating unit 106 calculates the position command signal θ by, for example_SPerforming second order differential operation to calculate command acceleration signal A_S。

The subtractor 107 receives the load acceleration signal A from the load acceleration signal_LSubtracting the command acceleration signal A_STo output load accelerationDegree correction signal A'_L. Load acceleration correction signal A 'is input to load acceleration correction unit 105'_LCorrecting signal A 'for load acceleration'_LMultiplying the value by a weighting coefficient to obtain a value as the load acceleration feedback torque signal tau_accAnd (6) outputting.

The subtractor 108 outputs the slave torque command signal τ_SSubtracting the load acceleration feedback torque signal tau_accThe obtained value is used as a torque command correction signal tau_inAnd outputs the result to the torque control unit 103.

The load acceleration correction unit 105 is configured to: will be paired with the slave load acceleration signal A_LSubtracting the command acceleration signal A_SResulting load acceleration correction signal A'_LMultiplying the value by a weighting coefficient to obtain a value as the load acceleration feedback torque signal tau_accAnd (6) outputting. Suppose that the load acceleration signal A is to be applied_LMultiplying the value by a weighting coefficient to obtain a value as the load acceleration feedback torque signal tau_accWhen outputting, in order to make the motor position signal theta_mOr load position theta_LTracking position command signal theta_SWhen the motor or the load is subjected to acceleration/deceleration operation, the torque command signal τ is used as the slave_SSubtracting the load acceleration feedback torque signal tau_acc. In this case, the slave torque command signal τ is caused to_SThe load acceleration feedback torque signal τ is subtracted from the torque required for the acceleration/deceleration operation included in (1)_acc. With respect to slave torque command signal τ_SSubtracting the load acceleration feedback torque signal tau_accThe operation in the case of (3) will be described with reference to the operation principle of the load acceleration correction unit 105.

Fig. 2 is a diagram showing an example of the configuration of the load acceleration correction unit 105 according to the embodiment of the present invention. Load acceleration correction signal A 'is input to load acceleration correction unit 105'_LCorrecting signal A 'for load acceleration'_LMultiplying by a load acceleration feedback gain K as a weighting factor_accThe obtained value is used as a load acceleration feedback torque signal tau_accAnd (6) outputting. At this time, if the command acceleration signal A is set_SWhen it is 0, it is aimed at the rotationMoment command signal tau_SIn terms of motor position signal θ_mTransfer function G of_τS→θm(s) is represented by the formula (1). Load position theta for torque command signal_LTransfer function G of_τS→θL(s) is represented by the formula (2).

[ numerical formula 1]

[ numerical formula 2]

[ numerical formula 3]

[ numerical formula 4]

Variables and operators in the formulae are explained. s is the laplacian operator. J. the design is a square_mIs the inertia of the motor 201. J. the design is a square_LIs the inertia of load 204. Omega'_PIs derived from the torque command signal tau_STo motor position signal theta_mThe resonance frequency in the transfer characteristic of (1). Omega_ZIs derived from the torque command signal tau_STo motor position signal theta_mThe anti-resonance frequency in the transfer characteristic of (1). Load acceleration feedback gain K_accAnd resonant frequency of ω'_PThe relationship (c) is represented by the following formula (3). Coefficient of elasticity K_SAnd inertia J of load 204_LWith antiresonance frequency omega_ZThe relationship (2) is expressed by the formula (4). In the formulae (3) and (4), K_SIndicating the elastic coefficient of the engaging portion 203. When the load 204 is driven by the motor 201 in the motor control device 100, the anti-resonance frequency ω is excited in the load 204 by the acceleration/deceleration operation_ZThe vibration of (2) becomes a factor of hindering the stability at the time of stopping.

When the equation (1) is concerned, the load acceleration feedback gain K is set_accAt increased resonance frequency ω'_PIncreased, antiresonant frequency omega_ZAnd is not changed. The greater the difference between the resonance frequency and the anti-resonance frequency, the smaller the gain at the anti-resonance frequency and, therefore, the smaller the effect of anti-resonance. On the other hand, as can be seen from equations (1) and (2), the torque command signal τ is obtained_SIn terms of motor position signal θ_mAnd the load position theta_LThe relationship (2) is the relationship of the following expression (5).

[ numerical formula 5]

According to the equation (5), the motor position signal θ_mAnd the load position theta_LRelationship of (D) and load acceleration feedback gain K_accRegardless, it is always constant. Therefore, in the formula (1), the load acceleration feedback gain K is increased_accWhen aiming at the torque command signal tau_SIn terms of motor position signal θ_mOf the transfer characteristic of_ZWhen the lower gain is smaller, the torque command signal tau is applied_SLoad position in terms of θ_LOf the transfer characteristic of_ZThe lower gain also becomes smaller. Therefore, the antiresonance frequency ω of the load 204 due to the acceleration/deceleration action_ZThe vibration of (2) also becomes small.

As described above, the feedback of the load acceleration by the load acceleration correction unit 105 has an effect of reducing the gain at the antiresonant frequency, that is, the sensitivity, as shown in the above formulas. As a result, when motor 201 or load 204 is driven by motor control device 100, anti-resonance vibration generated in load 204 during acceleration/deceleration can be reduced.

As described above, the load acceleration signal a is corrected by the load acceleration correction unit 105_LFeedback can be performed, and an effect of suppressing vibration due to antiresonance can be obtained.

On the other hand, in order to position the motorNumber theta_mAnd a load acceleration signal A_LTracking position command signal theta_SWhen the acceleration/deceleration operation is performed, the load acceleration signal A is not used_LSubtracting the command acceleration signal A_STo convert the load acceleration signal A_LDirectly input to the load acceleration correction unit 105 to calculate the load acceleration feedback torque signal τ_accIn the case of (2), the load acceleration feedback causes a problem of deterioration in stability.

When performing acceleration and deceleration operations, it is necessary to control the motor so that a torque proportional to a desired acceleration is generated. In the motor control device 100, the torque required for acceleration/deceleration is calculated by the position control unit 101 and the speed control unit 102, and the calculated torque is used as the torque command signal τ_SAnd (6) outputting. However, without the load acceleration signal A_LSubtracting the command acceleration signal A_STo convert the load acceleration signal A_LDirectly input to the load acceleration correction unit 105 to calculate the load acceleration feedback torque signal τ_accIn the case of (1), the slave torque command signal τ_SSubtracting the load acceleration feedback torque signal tau_accTherefore, the torque required for the acceleration/deceleration operation is also reduced, and the command follow-up performance is degraded. The position control unit 101 and the speed control unit 102 compensate for the insufficient torque required for the acceleration/deceleration operation again, and thereby control is performed such that the motor position signal θ is controlled_mAnd the load position theta_LAnd position command signal theta_SAnd (5) the consistency is achieved. However, since the position control unit 101 and the speed control unit 102 are feedback control, a delay occurs in the control. Due to this control delay, an operation delay, an overshoot, an undershoot, or the like occurs during the stop, resulting in a decrease in stability. That is, the larger the load acceleration feedback gain (acceleration feedback amount), the lower the command tracking performance. The load acceleration feedback gain (acceleration feedback amount) is in a trade-off relation with the command tracking performance.

The load acceleration signal A to be fed back_LA command acceleration signal A representing acceleration during acceleration/deceleration operation is subtracted in advance_SResulting load acceleration correction signal A'_LIs inputted to the load acceleration correction unit 105 to calculate the load acceleration feedback torque signal tau_accAccordingly, the torque required for the acceleration/deceleration operation of motor 201 and load 204 is not reduced by the load acceleration feedback. Therefore, an effect of improving operation delay, overshoot, undershoot, or the like during the stop period can be obtained.

As described above, in the present embodiment, in the control device of the motor having the load acceleration feedback system therein, the command acceleration information is subtracted from the fed-back load acceleration information in advance, thereby preventing subtraction of the acceleration/deceleration torque due to the load acceleration feedback. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while maintaining the command follow-up performance. Therefore, stability and vibration suppression can be achieved at the same time.

In the present embodiment, the result of subtracting the command acceleration from the load acceleration is fed back. However, the following configuration may be adopted: the acceleration information obtained by applying a filtering process equivalent to the transfer characteristic of the motor position signal with respect to the position command signal to the command acceleration is subtracted from the load acceleration. Fig. 3 is a diagram showing another example of the configuration of the motor control device according to the embodiment of the present invention. In fig. 3, the same components as those shown in fig. 1 are denoted by the same reference numerals, and description thereof is omitted. The filter processing unit 109 of the motor control device 100 shown in fig. 3 performs filter processing equivalent to the transfer characteristic of the motor position signal with respect to the position command signal, and outputs acceleration information. With this configuration, the acceleration at the time of actually performing the acceleration/deceleration operation is subtracted from the fed-back load acceleration information in advance, and the subtraction of the acceleration/deceleration torque by the load acceleration feedback can be prevented. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while further maintaining the command follow-up performance. Thus, stability and vibration suppression can be simultaneously achieved.

In the present embodiment, the result of subtracting the command acceleration from the load acceleration is fed back. However, the following configuration may be adopted: the acceleration information obtained by subtracting the command acceleration from the load acceleration is equivalent to the transmission characteristic of the motor position with respect to the position command signal when the rigidity of the joint portion of the motor and the load is high, that is, when the motor and the load are rigid bodies. In this case, the filter processing unit 109 of the motor control device 100 shown in fig. 3 performs filter processing equivalent to the transmission characteristic of the motor position with respect to the position command signal when the rigidity of the joint portion of the motor and the load is high, that is, when the motor and the load are rigid bodies, and outputs acceleration information. With this configuration, the acceleration at the time of actually performing the acceleration/deceleration operation is subtracted from the fed-back load acceleration information in advance, and the subtraction of the acceleration/deceleration torque by the load acceleration feedback can be prevented. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while further maintaining the command follow-up performance. Therefore, stability and vibration suppression can be achieved at the same time.

As described above, the motor control device 100 according to the present embodiment is a motor control device 100 that drives a load (mechanical load), and includes the position control unit 101, the command acceleration calculation unit 106, the subtractor 107 corresponding to the first subtractor, and the subtractor 108 corresponding to the second subtractor. The position control unit 101 receives a position command signal θ for specifying a target position of a load_SAnd a motor position signal theta indicating a position of the motor driving the load_mOutput a torque command signal τ_S. The command acceleration calculation unit 106 receives the position command signal θ_SOutputs a command signal theta representing the position_SCommand acceleration signal A of acceleration_S. The first subtraction unit derives a load acceleration signal A representing the acceleration of the load_LSubtracting the command acceleration signal A_STo output a load acceleration correction signal A'_L. Second subtractor slave torque command signal tau_SSubtracting the correction for load acceleration signal A'_LMultiplying the value by a predetermined weighting coefficient to output a torque command correction signal tau_in. Torque command correction signal τ_inFor controlling the current to energise the stator windings of the motor.

Thus, in the control device 100 for an electric motor having a load acceleration feedback system therein, subtraction of the acceleration/deceleration torque by the load acceleration feedback can be prevented by subtracting the command acceleration information from the fed back load acceleration information in advance. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while maintaining the command follow-up performance. Thus, stability and vibration suppression can be simultaneously achieved.

In addition, the command acceleration calculating unit 106 may also calculate the command acceleration signal a by combining the signals_SThe load speed signal is generated by multiplying a signal obtained by performing a filtering process with respect to the position command signal θ by a weighting coefficient_SIn terms of motor position signal θ_mThe transfer characteristic of (a) is equivalent to the processing. Fig. 4 is a diagram showing still another example of the configuration of the motor control device according to the embodiment of the present invention. In fig. 4, the same components as those shown in fig. 3 are denoted by the same reference numerals, and description thereof is omitted. In the weighting coefficient multiplication unit 110 of the motor control device 100 shown in fig. 4, a signal obtained by the filter processing performed by the filter processing unit 109 is multiplied by a weighting coefficient. The command acceleration calculation unit 106 may include a filter processing unit 109 and a weighting coefficient multiplication unit 110.

In addition, the command acceleration calculating unit 106 may also calculate the command acceleration signal a by combining the signals_SA load speed signal is generated by multiplying a signal obtained by performing filtering processing on a position command signal theta in the case where a load and a motor are rigid bodies by a weighting coefficient_SIn terms of motor position signal θ_mThe transfer characteristic of (a) is equivalent to the processing. In the filter processing unit 109 of the motor control device 100 shown in fig. 4, it is implemented that the rigidity of the joint portion between the motor and the load is high, that is, the motor and the load are providedIn the case of a rigid body, the signal is output by performing filtering processing equivalent to the transmission characteristic of the motor position with respect to the position command signal. In the weighting coefficient multiplication unit 110 of the motor control device 100 shown in fig. 4, a signal obtained by the filter processing performed by the filter processing unit 109 is multiplied by a weighting coefficient. The command acceleration calculation unit 106 may include a filter processing unit 109 and a weighting coefficient multiplication unit 110.

Industrial applicability

As described above, the control device for an electric motor according to the present invention obtains the vibration suppression effect by the load acceleration feedback while maintaining the command follow-up performance. Therefore, stability and vibration suppression can be achieved at the same time. The following control device for an electric motor can be provided: by alleviating or avoiding the trade-off relationship between the load acceleration feedback gain (acceleration feedback amount) and the command tracking performance, it is possible to improve the vibration suppression effect by the acceleration feedback from the load side while maintaining the command tracking performance. Therefore, the present invention is suitable for use in a control device for a motor used in a semiconductor manufacturing apparatus, an electronic component mounting apparatus, or the like.

Description of the reference numerals

100: a control device for the motor; 101: a position control unit; 102: a speed control unit; 103: a torque control unit; 104: a speed conversion unit; 105: a load acceleration correction unit; 106: a command acceleration calculation unit; 107: a subtraction operator; 108: a subtraction operator; 109: a filter processing unit; 110: a weighting coefficient multiplication unit; 201: an electric motor; 202: a position detector; 203: a joint portion; 204: a load; 205: an acceleration detector.