阅读说明：本技术 晶体生长悬浮提拉炉 (Crystal growth suspension pulling furnace ) 是由 邾根祥 朱沫浥 王伟 安唐林 于 2019-10-29 设计创作，主要内容包括：本发明提供一种单晶生长悬浮提拉炉,包括水冷铜坩埚、不锈钢腔室、感应射频电源、整体电路控制装置、水冷机、抽真空组件、提拉机构和坩埚升降机构；水冷铜坩埚设在不锈钢腔室内部并与其滑动连接,不锈钢腔室底部设有坩埚升降机构,坩埚升降机构锈钢腔室密封连接,坩埚升降机构上端与水冷铜坩埚连接,不锈钢腔室外侧与抽真空组件连接,抽真空组件安装在支架上,本发明相对于以往的晶体生长炉结构小,各方面功能可以精确控制,适合用研究所和各大院校针对金属晶体的研究,各个控制部分采用模块化,可自由进行选择,为金属单晶生长的研究提供了更大的可能性。(The invention provides a single crystal growth suspension pulling furnace, which comprises a water-cooled copper crucible, a stainless steel cavity, an induction radio frequency power supply, an integral circuit control device, a water cooler, a vacuumizing assembly, a pulling mechanism and a crucible lifting mechanism, wherein the water-cooled copper crucible is arranged in the stainless steel cavity; the water-cooled copper crucible is arranged in the stainless steel cavity and is in sliding connection with the stainless steel cavity, the crucible lifting mechanism is arranged at the bottom of the stainless steel cavity, the stainless steel cavity of the crucible lifting mechanism is in sealing connection with the water-cooled copper crucible, the upper end of the crucible lifting mechanism is connected with the water-cooled copper crucible, the outer side of the stainless steel cavity is connected with the vacuumizing assembly, and the vacuumizing assembly is installed on the support.)

1. A single crystal growth suspension pulling furnace comprises a water-cooled copper crucible, a stainless steel cavity, an induction radio frequency power supply, an integral circuit control device, a water cooler, a vacuumizing assembly, a pulling mechanism and a crucible lifting mechanism; the method is characterized in that: the water-cooled copper crucible is arranged inside the stainless steel cavity and is in sliding connection with the stainless steel cavity, the crucible lifting mechanism is arranged at the bottom of the stainless steel cavity, the stainless steel cavity of the crucible lifting mechanism is in sealing connection with the water-cooled copper crucible, the upper end of the crucible lifting mechanism is connected with the water-cooled copper crucible, the outer side of the stainless steel cavity is connected with the vacuumizing assembly, the vacuumizing assembly is installed on the support, and the vacuumizing assembly, the water cooler, the stainless steel cavity, the induction radio frequency power supply, the lifting mechanism and the crucible lifting mechanism are controlled through the integral circuit control device.

2. A crystal growth suspension puller as set forth in claim 1 wherein: the water-cooled copper crucible is composed of 16 water-cooled copper petals, and the maximum molten sample amount is 60 g.

3. A crystal growth suspension puller as set forth in claim 1 wherein: the stainless steel water-cooling vacuum chamber adopts a 304 stainless steel double-layer water-cooling chamber body, the temperature is ensured to be less than or equal to 40 ℃ when the equipment works, an observation window, a four-core ceramic peak motor, a vacuum pressure gauge and a vacuumizing hole are arranged on the chamber body, and the vacuumizing hole is communicated with the vacuumizing assembly.

4. A crystal growth suspension puller as set forth in claim 1 wherein: and in the vacuumizing part, a molecular pump system, a vacuum pump and an electric gate valve are adopted to vacuumize the cavity.

5. A crystal growth suspension puller as set forth in claim 1 wherein: the lifting mechanism is provided with water cooling, the water cooling internal refrigeration is also conveyed through a water cooling machine, and the lifting mechanism has two modes of manual operation and automatic operation.

6. A crystal growth suspension puller as set forth in claim 1 wherein: the crucible lifting mechanism adopts a dynamic sealing system, and the distance between the crucible and the induction coil is adjusted by finely adjusting the upper position and the lower position of the crucible by hand cranking, so that a proper magnetic field and an observation angle are ensured during smelting.

Technical Field

The invention relates to the technical field of crystal growth equipment, in particular to a crystal growth suspension pulling furnace.

Background

At present, the crystal growth furnace is widely applied to research institutes and experiments. Most of the crystal growing furnaces in the prior art are used for pulling and growing various oxide single crystals and metal single crystals in laboratories, and the furnaces for unilateral metal single crystal growth are not related at home.

Disclosure of Invention

The present invention is directed to a crystal growth suspension pulling furnace, which solves the above problems of the prior art.

The technical problem solved by the invention is realized by adopting the following technical scheme:

a single crystal growth suspension pulling furnace comprises a water-cooled copper crucible, a stainless steel cavity, an induction radio frequency power supply, an integral circuit control device, a water cooler, a vacuumizing assembly, a pulling mechanism and a crucible lifting mechanism; the water-cooled copper crucible is arranged inside the stainless steel cavity and is in sliding connection with the stainless steel cavity, the crucible lifting mechanism is arranged at the bottom of the stainless steel cavity, the stainless steel cavity of the crucible lifting mechanism is in sealing connection with the water-cooled copper crucible, the upper end of the crucible lifting mechanism is connected with the water-cooled copper crucible, the outer side of the stainless steel cavity is connected with the vacuumizing assembly, the vacuumizing assembly is installed on the support, and the vacuumizing assembly, the water cooler, the stainless steel cavity, the induction radio frequency power supply, the lifting mechanism and the crucible lifting mechanism are controlled through the integral circuit control device.

Preferably, the water-cooled copper crucible is composed of 16 water-cooled copper segments, and the maximum molten sample amount is 60 g.

Preferably, the stainless steel water-cooling vacuum chamber adopts a 304 stainless steel double-layer water-cooling chamber body, the temperature is ensured to be less than or equal to 40 ℃ when the equipment works, an observation window, a four-core ceramic peak motor, a vacuum pressure gauge and a vacuumizing hole are arranged on the chamber body, and the vacuumizing hole is communicated with the vacuumizing assembly.

Preferably, the vacuumizing part is used for vacuumizing the cavity by adopting a molecular pump system, a vacuum pump and an electric gate valve.

Preferably, the lifting mechanism is water-cooled, the water-cooled internal refrigeration is also conveyed through a water cooler, and the lifting mechanism has a manual mode and an automatic mode.

Preferably, the crucible lifting mechanism adopts a dynamic sealing system, the upper position and the lower position of the crucible are finely adjusted by hand cranking, the distance between the crucible and the induction coil is adjusted, and a proper magnetic field and an observation angle are ensured during smelting.

Compared with the prior art, the invention has the beneficial effects that:

1. the suspension pulling furnace for the growth of the metal single crystal is firstly put forward to build a set of crystal growth furnace, and the blank of domestic research and work is filled.

2. The water-cooled copper crucible part is composed of 16 water-cooled copper petals, so that water cooling is ensured in the sample smelting process, the growth temperature of metal crystals is ensured, and the durability and safety of the crucible are ensured. Compared with the existing ceramic crucible, graphite crucible or iridium crucible at home and abroad, the water cooling structure is added, which is a structure that the crucible does not have in the past.

3. The crucible up-and-down moving mechanism adopts a hand-operated lifting screw rod, can move the position of the crucible, and ensures the proper smelting height and observation angle.

4. Compared with the prior crystal growing furnace, the crystal growing furnace has the advantages of small structure, light weight and accurately controlled functions in all aspects, is suitable for researches on metal crystals by research institutes and colleges, adopts modularization for each control part, can be freely selected, and provides greater possibility for the researches on the growth of the metal single crystals.

Drawings

FIG. 1 is an overall block diagram of the present invention;

FIG. 2 is a view showing the internal structure of a stainless steel chamber according to the present invention;

figure 3 is a block diagram of the vacuum assembly of the present invention.

Detailed Description

In order to make the technical means, the creation features, the achievement purposes and the effects of the invention easy to understand, the invention is further described below by combining the specific drawings.

As shown in figure 1 of the drawings, in which,

a single crystal growth suspension pulling furnace comprises a water-cooled copper crucible, a stainless steel cavity, an induction radio frequency power supply, an integral circuit control device, a water cooler, a vacuumizing assembly, a pulling mechanism and a crucible lifting mechanism; the water-cooled copper crucible is arranged inside the stainless steel cavity and is in sliding connection with the stainless steel cavity, the crucible lifting mechanism is arranged at the bottom of the stainless steel cavity, the stainless steel cavity of the crucible lifting mechanism is in sealing connection with the water-cooled copper crucible, the upper end of the crucible lifting mechanism is connected with the water-cooled copper crucible, the outer side of the stainless steel cavity is connected with the vacuumizing assembly, the vacuumizing assembly is installed on the support, and the vacuumizing assembly, the water cooler, the stainless steel cavity, the induction radio frequency power supply, the lifting mechanism and the crucible lifting mechanism are controlled through the integral circuit control device.

The water-cooled copper crucible is composed of 16 water-cooled copper lobes, the maximum melting sample amount is 60g, good coupling and good magnetic suspension can be realized, and the metal single crystal can grow in a stable suspension state.

The stainless steel water-cooling vacuum chamber adopts a 304 stainless steel double-layer water-cooling cavity body, the temperature is ensured to be less than or equal to 40 ℃ when the equipment works, and an observation window is arranged on the cavity body to allow a customer to observe the sample smelting process. The cavity is provided with a four-core ceramic peak motor which is convenient for testing the temperature in the cavity, and the cavity is also provided with a vacuum pressure gauge, a vacuum pumping hole and the like.

The induction radio frequency power supply obtains the suspension melting Ni through experiments requiring maximum input power, oscillation power supply, heating current, input voltage, water cooling and the like, and the shaking is observed by naked eyes without influencing the pulling of single crystal.

The whole circuit control part requires the radio frequency power supply, the vacuum pump, the molecular pump and the lifting mechanism to be controlled and integrated on the control cabinet, so that the operation is convenient.

The water cooler supplies water to the whole equipment, provides water cooling, and controls each water channel by the water separator.

And in the vacuumizing part, a molecular pump system, a vacuum pump and an electric gate valve are adopted to vacuumize the cavity. The requirements of the experiment are met.

The lifting rod of the lifting mechanism is water-cooled, can be quickly lifted and lowered by manual operation. The function of freely switching between manual operation and automatic operation is adopted, and after the metal single crystal grows, the crystal needs to be quickly pulled to drop the melt.

Crucible elevating system adopts the dynamic seal system, can finely tune the position from top to bottom of the crucible through hand, adjusts crucible and induction coil's distance, ensures suitable magnetic field and observation angle when smelting.

When the device works, the vacuum degree of the stainless steel water cooling vacuum chamber is firstly pumped to a required numerical value through the vacuum pumping pump part, the vacuum pump is closed, the water cooling machine and the induction radio frequency power supply are started, the water cooling machine supplies water continuously and provides water cooling, each water channel is controlled by the water separator, the induction radio frequency power supply adjusts the instrument of the induction power supply through the integral control circuit part, the current is controlled, the current is adjusted according to actual conditions, when all metal materials are melted, the lifting rod of the lifting mechanism is lowered to the liquid level, and then the lifting rod slowly moves upwards and pulls the metal single crystal. After the growth of the metal single crystal is finished, the crystal is quickly pulled to drop the melt through the pulling mechanism.

The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.