阅读说明：本技术 一种具有过流保护能力的横向igbt (A kind of transversal I GBT with overcurrent protection ability ) 是由 张金平 王康 陈子珣 刘竞秀 李泽宏 张波 于 2019-08-29 设计创作，主要内容包括：本发明属于功率半导体器件技术领域,涉及一种具有过流保护能力的横向IGBT。本发明提出了一种具有过流保护能力的横向IGBT结构,通过在传统的横向IGBT结构基础上集成一个PMOS结构,同时在PMOS上连接一个二极管与电阻,PMOS结构能够提供检测电流,当检测电流流过PMOS上连接的电阻时,会在电阻上产生一个压降,通过检测电阻上压降的大小可以迅速判断器件是否发生过流现象从而保护器件。(The invention belongs to power semiconductor device technology fields, are related to a kind of transversal I GBT with overcurrent protection ability.The transversal I GBT structure with overcurrent protection ability that the invention proposes a kind of; by integrating a PMOS structure in traditional transversal I GBT structure basis; a diode and resistance are connected on PMOS simultaneously; PMOS structure is capable of providing detection electric current; when detection electric current flows through the resistance connected on PMOS; a pressure drop can be generated on resistance, can judge whether device occurs over-current phenomenon avoidance to protect device rapidly by the size of pressure drop in detection resistance.)

1. a kind of transversal I GBT with overcurrent protection ability, structure cell include: the lining being cascading from bottom to up Hearth electrode (1) is located at underlayer electrode (1) supreme P-type semiconductor substrate (2), is located at burying on P-type semiconductor substrate (2) Oxygen layer (3) is located at the drift region N- (4) above buried oxide layer (3)；Determined with three-dimensional of the three-dimensional cartesian coordinate system to device Justice: definition device transverse direction is X-direction, device vertical direction is Y direction, the i.e. third dimension direction of device longitudinal direction is Z-direction；It is characterized in that, being respectively provided with groove structure and N-type field at the drift region N- (4) the upper layer both ends along Z-direction Trapping layer (8), shown groove structure include gate electrode (61), gate dielectric layer (51), separate gate electrodes (62), separation gate dielectric layer (52), spacer medium layer (53)；N-type charge storage layer is provided with above the drift region N- (4) and along groove structure side (15)；P-type base area (7) are provided with above the N-type charge storage layer (15) and along groove structure side；In the p-type base It is provided with and is arranged side by side and the mutually independent contact zone P+ (10) and N+ emitter region (9) above area (7) and along groove structure side； It is arranged side by side along Z-direction and along the groove structure other side above the drift region N- (4) and has mutually independent p-type doped layer (18), n type buried layer (17), p type buried layer (16)；There are P+ collecting zone (11) above the N-type field stop layer (8)；In the P There are collector electrode metal (14) above+collecting zone (11)；Above the gate electrode (61), gate dielectric layer (51) top, isolation There are dielectric layer (12) above dielectric layer (53)；Above the separate gate electrodes (62), dielectric layer (12) top, the contact zone P+ (10) top has emitter metal (13) with above N+ emitter region (9)；There is contact metal above P-doped zone (18) (19)；Diode (20), resistance (21), the diode are in series between shown contact metal (19) and emitter metal (20) anode and contact metal (19) are shorted, and cathode and resistance (21) are shorted, described resistance (21) one end and diode (20) yin Extremely short to connect, the other end and emitter metal (13) are shorted；Resistance (21) both ends have voltage detecting interface AB；The grid electricity Pole (61) passes through gate dielectric layer (51) and the contact zone P+ (10), N+ emitter region (9), p-type base area (7), N-type charge storage layer (15), the drift region N- (4) connect, and the gate electrode (61) is connect by spacer medium layer (53) with separate gate electrodes (62)；Institute Separate gate electrodes (62) are stated to connect by separation gate dielectric layer (52) and p type buried layer (16), n type buried layer (17), p-type doped layer (18) It connects；The doping concentration of the N-type charge storage layer (15) is greater than or equal to the doping concentration of the drift region N- (4)；The p-type doping Layer (18) is greater than or equal to groove along the depth of Y-direction along the depth of Y-direction, and the diode (20) is PN junction diode, Xiao One of special based diode and SiC diode；The contact metal (19) is Ohmic contact or Schottky contacts.

2. a kind of transversal I GBT with overcurrent protection ability, structure cell include: the lining being cascading from bottom to up Hearth electrode (1) is located at underlayer electrode (1) supreme P-type semiconductor substrate (2), is located at burying on P-type semiconductor substrate (2) Oxygen layer (3) is located at the drift region N- (4) above buried oxide layer (3)；Determined with three-dimensional of the three-dimensional cartesian coordinate system to device Justice: definition device transverse direction is X-direction, device vertical direction is Y direction, the i.e. third dimension direction of device longitudinal direction is Z-direction；It is characterized in that, being respectively provided with groove structure and N-type field at the drift region N- (4) the upper layer both ends along Z-direction Trapping layer (8), shown groove structure include gate electrode (61), gate dielectric layer (51), separate gate electrodes (62), separation gate dielectric layer (52), spacer medium layer (53)；N-type charge storage layer is provided with above the drift region N- (4) and along groove structure side (15)；P-type base area (7) are provided with above the N-type charge storage layer (15) and along groove structure side；In the p-type base It is provided with and is arranged side by side and the mutually independent contact zone P+ (10) and N+ emitter region (9) above area (7) and along groove structure side； It is arranged side by side along Z-direction and along the groove structure other side above the drift region N- (4) and has mutually independent p-type doped layer (18), n type buried layer (17), p type buried layer (16)；There are P+ collecting zone (11) above the N-type field stop layer (8)；In the P There are collector electrode metal (14) above+collecting zone (11)；Above the gate electrode (61), gate dielectric layer (51) top, isolation There are dielectric layer (12) above dielectric layer (53)；Above the separate gate electrodes (62), dielectric layer (12) top, the contact zone P+ (10) top has emitter metal (13) with above N+ emitter region (9)；There is contact metal above P-doped zone (18) (19)；Diode (20), resistance (21), the diode are in series between shown contact metal (19) and emitter metal (20) anode and contact metal (19) are shorted, and cathode and resistance (21) are shorted, described resistance (21) one end and diode (20) yin Extremely short to connect, the other end and emitter metal (13) are shorted；Resistance (21) both ends have voltage detecting interface AB；The grid electricity Pole (61) passes through gate dielectric layer (51) and the contact zone P+ (10), N+ emitter region (9), p-type base area (7), N-type charge storage layer (15), the drift region N- (4), separate gate electrodes (62) connection；The separate gate electrodes (62) pass through separation gate dielectric layer (52) and P Type buried layer (16), n type buried layer (17), p-type doped layer (18) connection, the separate gate (62) pass through dielectric layer (54) and N-type electricity Lotus accumulation layer (15), the drift region N- (4) connection；The doping concentration of the N-type charge storage layer (15) is drifted about more than or equal to N- The doping concentration in area (4)；The p-type doped layer (18) is greater than or equal to depth of the groove along Y-direction, institute along the depth of Y-direction Stating diode (20) is one of PN junction diode, Schottky diode, SiC diode；The contact metal (19) is Europe Nurse contact or Schottky contacts.

3. a kind of IGBT with overcurrent protection ability according to claim 1, it is characterised in that above P type buried layer A diode in place diode (20) is integrated, the diode integrated is by P-type semiconductor (201), N-type semiconductor (202), sun Pole metal (23), cathodic metal (24) are constituted, and are located at below P-type semiconductor (201), the dielectric layer below N-type semiconductor (202) (22) to isolating diode and IGBT device.

4. a kind of IGBT with overcurrent protection ability according to claim 3, it is characterised in that resistance (21) are integrated To device surface, resistance (21) is made of DOPOS doped polycrystalline silicon (26), contact metal (27), contact metal (28), dielectric layer (25) To isolation resistance and device.

5. a kind of IGBT with overcurrent protection ability according to claim 1, it is characterised in that the transverse direction in the present invention IGBT device semiconductor material use Si, SiC, GaAs or GaN, trench fill material using polycrystalline Si, SiC, GaAs or GaN, and different materials combination can also be used in each section using identical material.

6. a kind of IGBT with overcurrent protection ability according to claim 1, feature the device architecture not only Suitable for transversal I GBT device, device p-type collecting zone (11) is changed to N+ layers, the structure is equally applicable to (Silicon-on-insulator) MOSFET lateral device Part.

Technical field

The invention belongs to power semiconductor device technology fields, are related to a kind of transversal I GBT with overcurrent protection ability.

Background technique

From insulated gate bipolar transistor the 1980s (IGBT) by invention since, because its combine MOSFET (absolutely Edge type field-effect tube) with the working mechanism of BJT (bipolar junction transistor), with MOSFET be easy to drive, input impedance is low, The fast advantage of switching speed, and have the advantages that the on state current of BJT is big, conduction voltage drop is low, loss is small, stability is good.Thus It is widely used in the every field such as traffic, communication, household electrical appliance and aerospace.The utilization of IGBT significantly improves electricity Power electronic system.

Transversal I GBT is because its feature that can be integrated receives extensive attention, and currently marketed transversal I GBT is (such as Fig. 1 institute Show) use more and more frequently, in most applications, always be using current transformer or current sensor to IGBT device Part carries out over-current detection, this Period Process length, low-response, problem is more, and when there is overcurrent, device can be because these factors can Device can be caused to fail because of overcurrent, in order to guarantee efficiency that IGBT is used, it is necessary to using a kind of quick and easy, corresponding speed Fast over-current protection method protects IGBT device, or even the normal operation of protection whole system.

Summary of the invention

The present invention proposes a kind of with overcurrent protection ability to overcome the shortcomings of existing IGBT over-current protection method Transversal I GBT structure while being connected on PMOS by integrating a PMOS structure in traditional transversal I GBT structure basis A diode and resistance are connect, PMOS structure is capable of providing detection electric current, when detection electric current flows through the resistance connected on PMOS, A pressure drop can be generated on resistance, it is existing to judge whether device occurs overcurrent rapidly by the size of pressure drop in detection resistance As.

Technical scheme is as follows:

A kind of transversal I GBT structure with overcurrent protection ability, cellular schematic diagram as shown in Figure 2 (its along CD line line, The sectional view of EF line and GH line difference is as shown in figure 3, figure 4 and figure 5), comprising: the underlayer electrode being cascading from bottom to up 1, the P-type semiconductor substrate 2 supreme positioned at underlayer electrode 1, the buried oxide layer 3 on P-type semiconductor 2 are located in buried oxide layer 3 The drift region N- 4 of side；It is characterized in that, being provided with groove structure, N-type field stop layer along Z-direction above the drift region N- 4 8, shown groove structure includes gate electrode 61, gate dielectric layer 51, separate gate electrodes 62, separation gate dielectric layer 52, spacer medium layer 53；N-type charge storage layer 15 is provided with above the drift region N- 4 and along groove structure side；In the N-type charge storage P-type base area 7 is provided with above layer 15 and along groove structure side；It is arranged above the p-type base area 7 and along groove structure side It is arranged side by side and the mutually independent contact zone P+ 10 and N+ emitter region 9；Along Z-direction and along ditch above the drift region N- 4 The slot structure other side, which is arranged side by side, mutually independent p-type doped layer 18, n type buried layer 17, p type buried layer 16；It is hindered in the N-type field Only there is above layer 8 P+ collecting zone 11；There is collector electrode metal 14 above the P+ collecting zone 11；On the gate electrode 61 Above side, gate dielectric layer 51, there is dielectric layer 12 above spacer medium layer 53；Above the separate gate electrodes 62, dielectric layer There is emitter metal 13 above 12 tops, 10 top of the contact zone P+ and N+ emitter region 9；Have above P-doped zone 18 and connects Touch metal 19；Diode 20, resistance 21,20 sun of diode are in series between shown contact metal 19 and emitter metal Pole and contact metal 19 are shorted, and cathode and resistance 21 are shorted, and described 21 one end of resistance and 20 cathode of diode are shorted, the other end with Emitter metal 13 is shorted；21 both ends of resistance have voltage detecting interface AB.

Further, a kind of transversal I GBT structure with overcurrent protection ability, cellular schematic diagram (its as shown in Figure 6 Along CD line line, EF line and GH line sectional view respectively as shown in Fig. 7, Fig. 8, Fig. 9), it is characterized in that separate gate electrodes 62 are made L-shaped surrounds gate electrode 61.

Further, a kind of transversal I GBT structure with overcurrent protection ability, cellular schematic diagram (its as shown in Figure 10 Along CD line line, EF line and GH line sectional view respectively as shown in Figure 11, Figure 12, Figure 13), it is characterized in that diode 20 is integrated into Device inside, the diode 20 is by P-type semiconductor 201, N-type semiconductor 202, positive contact metal 23, cathode contacts metal 24 are constituted, 22 isolating diode of dielectric layer and IGBT device.

Transversal I GBT device semiconductor material in the further present invention uses Si, SiC, GaAs or GaN, and groove is filled out Material is filled using polycrystalline Si, SiC, GaAs or GaN, and different materials group can also be used using identical material in each section It closes.

Further, the device architecture is applicable not only to transversal I GBT device, and device p-type collecting zone 11 is changed to N+ Layer, the structure are equally applicable to lateral MOSFET device.

The working principle of the invention

When emitter 13, underlayer electrode 1 connect low potential, collector 14 connects high potential, and gate electrode 61 connects greater than its threshold value electricity When the high potential of pressure, device is in forward conduction state, and electric current flows away from the MOS channel of IGBT, when collector voltage continues to increase When big, the PMOS structure being made of p type buried layer 16, n type buried layer 117, p-type doped layer 18 and separate gate electrodes 62 is opened, PMOS Structure provides additional access for the flowing in hole, has electric current on the resistance 21 being connected with PMOS and flows through, can be on resistance 21 Generate a pressure drop, when device work in stable state, flow through the electric current on resistance 21 be it is constant, when device is because of external rings When border or operating circuit break down and lead to occur over-current phenomenon avoidance, flowing through the electric current on resistance 21 can be increased with it, thereon Pressure drop also increases with it, by the pressure drop in interface AB detection resistance 21 can judge rapidly device whether occur over-current phenomenon avoidance from And the overcurrent protection mechanism outside triggering protects device not damage.

Beneficial effects of the present invention are shown:

It is proposed by the present invention a kind of with overcurrent protection ability for the deficiency of existing transversal I GBT over-current protection method Transversal I GBT structure while being connected on PMOS by integrating a PMOS structure in traditional transversal I GBT structure basis A diode and resistance are connect, PMOS structure is capable of providing detection electric current, when detection electric current flows through the resistance connected on PMOS, A pressure drop can be generated on resistance, it is existing to judge whether device occurs overcurrent rapidly by the size of pressure drop in detection resistance As, and the over-current protection method is simple, efficiently, the trouble free service of device can be effectively ensured.

Detailed description of the invention

Fig. 1 is the half cellular structural schematic diagram of traditional transversal I GBT, wherein 1 is underlayer electrode, and 2 be P type substrate, and 3 be to bury Layer dielectric layer, 4 be the drift region N-, and 5 be gate dielectric layer, and 6 be gate electrode, and 7 be p-type base area, and 8 be N-type field stop layer, and 9 be N+ hair Area is penetrated, 10 be the contact zone P+, and 11 be P+ collecting zone, and 12 be dielectric layer, and 13 be emitter metal.

Fig. 2 is a kind of IGBT structure cellular schematic diagram with overcurrent protection ability that the embodiment of the present invention 1 proposes.

Fig. 3 is a kind of sectional view of IGBT structure with overcurrent protection ability along CD line of the proposition of the embodiment of the present invention 1.

Fig. 4 is a kind of sectional view of IGBT structure with overcurrent protection ability along EF line of the proposition of the embodiment of the present invention 1.

Fig. 5 is a kind of sectional view of IGBT structure with overcurrent protection ability along GH line of the proposition of the embodiment of the present invention 1.

Fig. 6 is a kind of IGBT structure cellular schematic diagram with overcurrent protection ability that the embodiment of the present invention 2 proposes.

Fig. 7 is a kind of sectional view of IGBT structure with overcurrent protection ability along CD line of the proposition of the embodiment of the present invention 2.

Fig. 8 is a kind of sectional view of IGBT structure with overcurrent protection ability along EF line of the proposition of the embodiment of the present invention 2.

Fig. 9 is a kind of sectional view of IGBT structure with overcurrent protection ability along GH line of the proposition of the embodiment of the present invention 2.

Figure 10 is a kind of IGBT structure cellular schematic diagram with overcurrent protection ability that the embodiment of the present invention 3 proposes.

Figure 11 is a kind of section of IGBT structure with overcurrent protection ability along CD line of the proposition of the embodiment of the present invention 3 Figure.

Figure 12 is a kind of section of IGBT structure with overcurrent protection ability along EF line of the proposition of the embodiment of the present invention 3 Figure.

Figure 13 is a kind of section of IGBT structure with overcurrent protection ability along GH line of the proposition of the embodiment of the present invention 3 Figure.

Figure 14 is a kind of IGBT structure cellular schematic diagram with overcurrent protection ability that the embodiment of the present invention 4 proposes.

Figure 15 is a kind of section of IGBT structure with overcurrent protection ability along CD line of the proposition of the embodiment of the present invention 4 Figure.

Figure 16 is a kind of section of IGBT structure with overcurrent protection ability along EF line of the proposition of the embodiment of the present invention 4 Figure.

Figure 17 is a kind of section of IGBT structure with overcurrent protection ability along GH line of the proposition of the embodiment of the present invention 4 Figure.

Fig. 2 is into Figure 17, wherein 1 is underlayer electrode, 2 be P type substrate, and 3 be buried layer dielectric layer, and 4 be the drift region N-, and 51 are Gate dielectric layer, 52 be separation gate dielectric layer, and 53 be spacer medium layer, and 61 be gate electrode, and 62 be separate gate electrodes, and 7 be p-type base Area, 8 be N-type field stop layer, and 9 be N+ emitter region, and 10 be the contact zone P+, and 11 be P+ collecting zone, and 12 be dielectric layer, and 13 be emitter Metal, 14 be collector electrode metal, and 15 be N-type charge storage layer, and 16 be p type buried layer, and 17 be n type buried layer, and 18 be p-type doped layer, 19 be contact metal, and 20 be diode, and 21 be resistance, and 22 be spacer medium layer, and 201 be p-type doped semiconductor, and 202 be that N-type is mixed Miscellaneous semiconductor, 23 be anode metal, and 24 be cathodic metal, and 25 be spacer medium layer, and 26 be DOPOS doped polycrystalline silicon, and 27 be contact gold Belong to, 28 be contact metal.

Specific embodiment

Below in conjunction with attached drawing, the principle of the present invention and characteristic are described further, illustrated embodiment is served only for explaining The present invention not limits the scope of the invention.