阅读说明：本技术 一种利用双能衍射测量应变分布的方法及装置 (A kind of method and device using dual intensity diffractometry Strain Distribution ) 是由 易栖如 张�杰 黎刚 王艳萍 姜晓明 于 2019-08-29 设计创作，主要内容包括：本发明涉及一种利用双能衍射测量应变分布的方法及装置,属于材料应力测量技术领域,解决了现有技术中测量装置和数据分析复杂、很难得到大面积应变分布信息、难以直接测量第一类应变分布的问题。该方法包括以下步骤：分别获得以E1、E2能量X射线照射下产生的第一衍射斑和第二衍射斑；获得第一衍射斑和第二衍射斑的像素点在不同旋转角度时的光强及对应像素点在光强最大时对应的旋转角度差；根据能量E1、能量E2和旋转角度差确定第一衍射斑中像素点对应的布拉格角；利用布拉格角确定第一衍射斑像素点对应位置的应变,以获得样品待测晶面的第一类应变分布。该方法测量简单、误差小、可以得到大面积应变分布信息、可直接测量第一类应变分布。(The present invention relates to a kind of method and devices using dual intensity diffractometry Strain Distribution, belong to material stress field of measuring technique, solves the problems, such as that measuring device in the prior art and data analysis are complicated, hardly result in large area Strain Distribution information, be difficult to directly measure first kind Strain Distribution.Lower the first diffraction spot and the second diffraction spot generated is irradiated with E1, E2 Energy X-ray method includes the following steps: obtaining respectively；Obtain light intensity and corresponding pixel points of the pixel of the first diffraction spot and the second diffraction spot in different rotary angle corresponding rotation differential seat angle in light intensity maximum；The corresponding Bragg angle of pixel is determined in the first diffraction spot according to ENERGY E 1, ENERGY E 2 and rotation differential seat angle；Determine the strain of the first diffraction spot pixel corresponding position, using Bragg angle to obtain the first kind Strain Distribution of sample crystal face to be measured.This method measurement is simple, error is small, available large area Strain Distribution information, can directly measure first kind Strain Distribution.)

1. a kind of method using dual intensity diffractometry Strain Distribution, which comprises the following steps:

It obtains respectively and lower the first diffraction spot and the second diffraction spot generated is irradiated with E1, E2 Energy X-ray；

Obtain light intensity of the pixel of the first diffraction spot and the second diffraction spot in different rotary angle；

Obtain the corresponding rotation differential seat angle in light intensity maximum of the corresponding pixel points in the first diffraction spot and the second diffraction spot；

Determine that pixel is corresponding in the first diffraction spot according to the rotation differential seat angle of the ENERGY E 1, ENERGY E 2 and corresponding pixel points Bragg angle；

The strain of the first diffraction spot pixel corresponding position is determined using the Bragg angle, to obtain sample crystal face to be measured First kind Strain Distribution.

2. a kind of method using dual intensity diffractometry Strain Distribution according to claim 1, which is characterized in that under The mode of stating obtains light intensity of the diffraction spot pixel in different rotary angle, and the diffraction spot includes that the first diffraction spot and second is spread out Penetrate spot:

Sample to be tested is placed on adjustment platform, adjustment sample crystal face to be measured is parallel to incident X-rays and putting down where rotary shaft Face keeps the normal of sample crystal face to be measured vertical with incident X-rays, the rotary shaft is perpendicular to described when rotating angle is 0 ° Adjust platform plane；

Sample to be tested is rotated around rotary shaft, determines the angular range that can generate diffraction spot in rotary course, in the angle model It is described to spread out to set step-length rotation sample to be tested in enclosing, and using detector record rotation angle and corresponding diffraction spot information Penetrate the light intensity that spot information includes pixel；

Divided using Intensity threshold and extract diffraction spot information, to obtain light of the pixel of diffraction spot in different rotary angle By force.

3. a kind of method using dual intensity diffractometry Strain Distribution according to claim 2, which is characterized in that the benefit Diffraction spot information is extracted with light intensity Threshold segmentation, is that light intensity is greater than to the diffraction of the setting by the way that diffraction intensity threshold value is arranged The pixel information of Intensity threshold extracts, to extract diffraction spot information.

4. a kind of method using dual intensity diffractometry Strain Distribution according to claim 3, which is characterized in that further include The pixel of the first diffraction spot and the second diffraction spot is corresponded by following methods:

It is added the first diffraction spot, light intensity of the pixel in different rotary angle of the second diffraction spot to obtain image 1, figure respectively As 2；

Realize that pixel corresponds by comparison described image 1 and image 2.

5. a kind of method using dual intensity diffractometry Strain Distribution according to claim 4, which is characterized in that under The mode of stating obtains the first diffraction spot and the second diffraction spot corresponding pixel points corresponding rotation differential seat angle in light intensity maximum:

The rocking curve of pixel is determined according to light intensity of the diffraction spot pixel in different rotary angle, the rocking curve Abscissa is rotation angle, and ordinate is corresponding light intensity；

Corresponding rotation angle when determining pixel light intensity value maximum according to the corresponding rotation angle of rocking curve peak position；

Corresponding rotation angle obtains the first diffraction spot when according to the pixel light intensity value maximum and the second diffraction spot corresponds to picture Vegetarian refreshments corresponding rotation differential seat angle in light intensity maximum.

6. a kind of method using dual intensity diffractometry Strain Distribution according to claim 5, which is characterized in that described The corresponding Bragg angle of pixel is determined in the first diffraction spot according to the rotation differential seat angle of ENERGY E 1, ENERGY E 2 and corresponding pixel points, Specific formula are as follows:

Wherein, θ₁For the corresponding Bragg angle of pixel in the first diffraction spot, Δ ω is the rotation differential seat angle of corresponding pixel points.

7. a kind of method using dual intensity diffractometry Strain Distribution according to claim 6, which is characterized in that utilize institute State the strain that Bragg angle determines the pixel corresponding position of the first diffraction spot by following formula:

ε=- cot θ₀×(θ₁-θ₀),

Wherein, θ₀When distribution unstressed for sample to be tested E1 Energy X-ray irradiation under the corresponding Prague of diffraction spot pixel Angle.

8. a kind of method using dual intensity diffractometry Strain Distribution according to claim 7, which is characterized in that the θ₀ It is determined by following formula:

Wherein, d is interplanar distance, and λ is the wavelength of the X-ray of E1 energy.

9. a kind of method using dual intensity diffractometry Strain Distribution according to claim 8, which is characterized in that further include Under the irradiation of E1 Energy X-ray, the second class Strain Distribution of sample crystal face to be measured is obtained according to the rocking curve of pixel:

Wherein, β is the full width at half maximum of rocking curve.

10. a kind of device using dual intensity diffractometry Strain Distribution characterized by comprising

Synchrotron Radiation, for generating the X-ray comprising different-energy；

Monochromator, for selecting the X-ray of single energy；

Platform is adjusted, for fixing, translating or rotating sample to be tested；

Detector, the diffraction generated for receiving sample crystal face to be measured sample under the x-ray bombardment of different-energy crystal face to be measured Spot, and record diffraction spot information and corresponding rotation angle；

Strain Distribution processor, for irradiating lower the first diffraction spot generated and the second diffraction spot picture according to E1, E2 Energy X-ray Light intensity of the vegetarian refreshments in different rotary angle obtains rotation differential seat angle of the corresponding pixel points in light intensity maximum, according to the correspondence The rotation differential seat angle of pixel determines the corresponding Bragg angle of pixel in the first diffraction spot, determines using the Bragg angle The strain of one diffraction spot pixel corresponding position, to obtain the first kind Strain Distribution of sample crystal face to be measured；

The Strain Distribution processor is also used in the case where E1 Energy X-ray irradiates, according to the first diffraction spot pixel not The second class Strain Distribution of sample crystal face to be measured is obtained with the light intensity at rotation angle.

Technical field

The present invention relates to material stress field of measuring technique more particularly to a kind of using dual intensity diffractometry Strain Distribution Method and apparatus.

Background technique

Fatigue, defect, the slight crack etc. of engineering material in use can seriously affect the service life of material, and stress The distribution of strain often has important relation with the failure procedure of material.Therefore, the measurement of engineering material internal stress is particularly significant.

There are many methods strained using neutron and synchrotron radiation survey engineering material stress at present.But it is most of traditional Measurement method can only test sample surface Strain Distribution, and can only point-by-point sampling and measuring.Stress based on synchrotron radiation X-ray In measurement, using the mean stress Strain Distribution information of the high energy homogeneous X-ray analysis available sample entirety of residual stress, but Need to realize the positioning of sample by slit or collimator, also, existing based on synchrotron radiation X ray imaging survey The method of amount ess-strain is mainly that the measure of the change stress of the second kind Strain Distribution of rocking curve broadening, i.e. intercrystalline is utilized Stress distribution.The distribution of stress of the first kind strain is usually measured using the method for XRD diffraction.Currently, not occurring also Stress of the first kind Strain Distribution is directly measured using the method for synchrotron radiation X-ray imaging.

Summary of the invention

In view of above-mentioned analysis, the present invention is intended to provide a kind of method and dress using dual intensity diffractometry Strain Distribution It sets, to solve the problems, such as that existing measurement method is complicated, be difficult to large area measurement and can not directly measure first kind Strain Distribution.

On the one hand, the present invention provides a kind of methods using dual intensity diffractometry Strain Distribution.This method includes following Step: it obtains respectively and lower the first diffraction spot and the second diffraction spot generated is irradiated with E1, E2 Energy X-ray；Obtain the first diffraction The light intensity of spot and the pixel of the second diffraction spot in different rotary angle；Obtain pair in the first diffraction spot and the second diffraction spot Answer pixel corresponding rotation differential seat angle in light intensity maximum；According to the rotation of the ENERGY E 1, ENERGY E 2 and corresponding pixel points Differential seat angle determines the corresponding Bragg angle of pixel in the first diffraction spot；The first diffraction spot pixel is determined using the Bragg angle The strain of point corresponding position, to obtain the first kind Strain Distribution of sample crystal face to be measured.

Further, light intensity of the diffraction spot pixel in different rotary angle, the diffraction are obtained by following manner Spot includes the first diffraction spot and the second diffraction spot:

Sample to be tested is placed on adjustment platform, adjustment sample crystal face to be measured is parallel to where incident X-rays and rotary shaft Plane, rotate angle be 0 ° when, keep the normal of sample crystal face to be measured vertical with incident X-rays, the rotary shaft perpendicular to The adjustment platform plane；

Sample to be tested is rotated around rotary shaft, the angular range that can generate diffraction spot in rotary course is determined, at the angle To set step-length rotation sample to be tested in degree range, and utilize detector record rotation angle and corresponding diffraction spot information, institute State the light intensity that diffraction spot information includes pixel；

Divided using Intensity threshold and extract diffraction spot information, to obtain the pixel of diffraction spot in different rotary angle Light intensity.

Further, divided using Intensity threshold and extract diffraction spot information, be by the way that diffraction intensity threshold value is arranged, by light intensity Pixel information greater than the diffraction intensity threshold value of the setting extracts, to extract diffraction spot information.

Further, the pixel of the first diffraction spot and the second diffraction spot is corresponded by following methods:

It is added the first diffraction spot, light intensity of the pixel in different rotary angle of the second diffraction spot to obtain image respectively 1, image 2；

Realize that pixel corresponds by comparison described image 1 and image 2.

Further, the first diffraction spot and the second diffraction spot corresponding pixel points are obtained in light intensity maximum by following manner Corresponding rotation differential seat angle:

The rocking curve of pixel is determined according to light intensity of the diffraction spot pixel in different rotary angle, it is described to wave song The abscissa of line is rotation angle, and ordinate is corresponding light intensity；

Corresponding rotation angle when determining pixel light intensity value maximum according to the corresponding rotation angle of rocking curve peak position；

Corresponding rotation angle obtains the first diffraction spot and the second diffraction spot pair when according to the pixel light intensity value maximum Answer pixel corresponding rotation differential seat angle in light intensity maximum.

Further, picture in the first diffraction spot is determined according to the rotation differential seat angle of ENERGY E 1, ENERGY E 2 and corresponding pixel points The corresponding Bragg angle of vegetarian refreshments, specific formula are as follows:

Wherein, θ₁For the corresponding Bragg angle of pixel in the first diffraction spot, Δ ω is the rotation angle of corresponding pixel points Difference.

Further, the pixel corresponding position of the first diffraction spot is determined by following formula using the Bragg angle Strain:

ε=- cot θ₀×(θ₁-θ₀),

Wherein, θ₀When distribution unstressed for sample to be tested E1 Energy X-ray irradiation under the corresponding cloth of diffraction spot pixel Glug angle.

Further, the θ₀It is determined by following formula:

Wherein, d is interplanar distance, and λ is the wavelength of the X-ray of E1 energy.

Further, under the irradiation of E1 Energy X-ray, the of sample crystal face to be measured is obtained according to the rocking curve of pixel Two class Strain Distributions:

Wherein, β is the full width at half maximum of rocking curve.

According to the above technical scheme, beneficial effects of the present invention are as follows:

1, the method being imaged using dual intensity synchrotron radiation X ray, avoids the point-by-point sampling and measuring of traditional measurement method, Measurement process and data analysis are simple, and can obtain the Strain Distribution information of large area；

It 2, can be with using the method for dual intensity synchrotron radiation X ray imaging according to the rocking curve of diffraction spot pixel Sample is directly obtained in the first kind and the second class Strain Distribution information of two-dimensional directional, is residual inside intuitive observation engineering material Residue stress provides effective means to the influence mode of component usage performance.

On the other hand, the present invention provides a kind of devices using dual intensity diffractometry Strain Distribution.The device includes: one Kind utilizes the device of dual intensity diffractometry Strain Distribution characterized by comprising Synchrotron Radiation, for generating comprising not Co-energy X-ray；Monochromator, for selecting the X-ray of single energy；Platform is adjusted, for fixing, translating or rotate to test sample Product；Detector, the diffraction generated for receiving sample crystal face to be measured sample under the x-ray bombardment of different-energy crystal face to be measured Spot, and record diffraction spot information and corresponding rotation angle；Strain Distribution processor, for being irradiated according to E1, E2 Energy X-ray The light intensity of first diffraction spot of lower generation and the second diffraction spot pixel in different rotary angle obtains corresponding pixel points in light Rotation differential seat angle when strong maximum determines that pixel is corresponding in the first diffraction spot according to the rotation differential seat angle of the corresponding pixel points Bragg angle, the strain of the first diffraction spot pixel corresponding position is determined using the Bragg angle, is waited for obtain sample Survey the first kind Strain Distribution of crystal face；The Strain Distribution processor is also used in the case where E1 Energy X-ray irradiates, according to described Light intensity of the first diffraction spot pixel at different rotary angle obtains the second class Strain Distribution of sample crystal face to be measured.

Since the device using dual intensity diffractometry Strain Distribution in the present invention is answered with above-mentioned using dual intensity diffractometry The Method And Principle of variation cloth is identical, so the device also has technical effect corresponding with the above method.

Other features and advantages of the present invention will illustrate in the following description, also, certain advantages can be from specification In become apparent, or understand through the implementation of the invention.The objectives and other advantages of the invention can by specification with And it is achieved and obtained in specifically noted content in attached drawing.

Detailed description of the invention

Attached drawing is only used for showing the purpose of specific embodiment, and is not to be construed as limiting the invention, in entire attached drawing In, identical reference symbol indicates identical component.

Fig. 1 is the method flow diagram using dual intensity diffractometry Strain Distribution；

Fig. 2 is a kind of schematic diagram when being implemented using the method for dual intensity diffractometry Strain Distribution；

Fig. 3 is the schematic device using dual intensity diffractometry Strain Distribution.

Specific embodiment

Specifically describing the preferred embodiment of the present invention with reference to the accompanying drawing, wherein attached drawing constitutes the application a part, and Together with embodiments of the present invention for illustrating the principle of the present invention, it is not intended to limit the scope of the present invention.

Embodiment of the method

A specific embodiment of the invention, discloses a kind of method of dual intensity diffractometry Strain Distribution, such as Fig. 1 institute Show.The present invention, with the diffraction spot of group crystal grain, is spread out under different-energy x-ray bombardment using two energy measurement samples by sample It is mobile to obtain the peak position of sample different zones to penetrate the difference of peak position, to obtain Strain Distribution information.

Sample therein is tabular, and material can be alloy, such as can be the nickel base superalloy with a thickness of 1 millimeter.

Sample generates the cloth of the corresponding pixel points of diffraction spot under the mobile corresponding different-energy x-ray bombardment of diffraction maximum position Glug angular difference value, similarly, can according under single energy x-ray bombardment sample generate diffraction spot pixel Bragg angle with The difference that the pixel Bragg angle of diffraction spot is generated under sample unstress state determines that the peak position of sample is mobile, to obtain sample The first kind Strain Distribution of product.

Fig. 1 shows the flow chart of a specific embodiment of this method, comprising the following steps: is obtained respectively with E1, E2 Lower the first diffraction spot and the second diffraction spot generated of Energy X-ray irradiation；Obtain the pixel of the first diffraction spot and the second diffraction spot Light intensity of the point in different rotary angle；The corresponding pixel points in the first diffraction spot and the second diffraction spot are obtained in light intensity maximum Corresponding rotation differential seat angle；The first diffraction spot is determined according to the rotation differential seat angle of the ENERGY E 1, ENERGY E 2 and corresponding pixel points The corresponding Bragg angle of middle pixel；The strain that the first diffraction spot pixel corresponding position is determined using the Bragg angle, from And obtain the first kind Strain Distribution of sample crystal face to be measured.