阅读说明：本技术 高纵横比结构叠层移位和倾斜的透射x射线临界尺寸表征 (High aspect ratio structure stack shift and tilt transmission X-ray critical dimension characterization ) 是由 亚当·金斯伯格 马克·詹姆斯·韦尔默朗 保罗·安东尼·瑞恩 马修·沃明顿 于 2021-04-21 设计创作，主要内容包括：本申请涉及高纵横比结构叠层移位和倾斜的透射X射线临界尺寸表征。一种用于X射线测量的方法包括生成X射线射束并将X射线射束引导到至少包括堆叠在彼此上的第一和第二层的样品,该X射线射束入射在样品位置上,第一和第二层在该样品位置处包括相应的第一和第二高纵横比(HAR)结构。响应于X射线射束根据在样品和X射线射束之间的倾斜角来测量从样品位置发射的X射线散射剖面。基于根据倾斜角测量的X射线散射剖面来估计在第一和第二层之间的移位以及第一和第二层的特征倾斜。(The application relates to transmission X-ray critical dimension characterization of high aspect ratio structural stack shift and tilt. A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam being incident on a sample location at which the first and second layers include respective first and second High Aspect Ratio (HAR) structures. An X-ray scatter profile emitted from the sample location is measured in response to the X-ray beam as a function of the tilt angle between the sample and the X-ray beam. The displacement between the first and second layers and the characteristic tilt of the first and second layers are estimated based on the X-ray scatter profile measured from the tilt angle.)