阅读说明：本技术 一种籽晶提升自平衡升装置 (Seed crystal lifting self-balancing lifting device ) 是由 曹玉宝 尹嘉琦 江佳飞 辛珊 许梦 于 2021-08-25 设计创作，主要内容包括：本发明公开了一种籽晶提升自平衡升装置,包括基座,基座的顶部设有工作台,工作台的顶部设有提升箱,工作台顶部中间位置设有旋转中心,提升箱一端贯穿设有花键轴,花键轴位于提升箱内部的外侧设有卷丝轴,提升箱内的顶部设有导轮机构,工作台一侧设有用于保持动态平衡的配重调节机构,配重调节机构上设有用于进行配重补偿的配重补偿机构,本发明通过设置配重调节机构,用来为整个设备工作时保持动态平衡,在配重调节机构上设置配重补偿机构,用来对配重块进行重量的改变,通过这几种结构之间的配合解决了卷丝轴移动出现重心偏移导致设备稳定降低和产品质量降低的问题。(The invention discloses a seed crystal lifting self-balancing lifting device, which comprises a base, wherein the top of the base is provided with a workbench, the top of the workbench is provided with a lifting box, the middle position of the top of the workbench is provided with a rotating center, one end of the lifting box is provided with a spline shaft in a penetrating way, the outer side of the spline shaft, which is positioned in the lifting box, is provided with a wire winding shaft, the top in the lifting box is provided with a guide wheel mechanism, one side of the workbench is provided with a balance weight adjusting mechanism for keeping dynamic balance, the balance weight adjusting mechanism is provided with a balance weight compensating mechanism for carrying out balance weight compensation, the invention is provided with the balance weight adjusting mechanism for keeping dynamic balance when the whole equipment works, a counterweight compensation mechanism is arranged on the counterweight adjusting mechanism and is used for changing the weight of the counterweight block, the problems of equipment stability reduction and product quality reduction caused by gravity center shift of the moving wire winding shaft are solved through the cooperation of the structures.)

1. The utility model provides a seed crystal promotes from rising device, includes base (1), its characterized in that: the top of base (1) is equipped with workstation (2), the top of workstation (2) is equipped with lifting box (3), workstation (2) top intermediate position is equipped with rotation center (4), lifting box (3) one end is run through and is equipped with integral key shaft (5), the outside that integral key shaft (5) are located lifting box (3) inside is equipped with serving (6), the top in lifting box (3) is equipped with guide mechanism (7), workstation (2) one side is equipped with counter weight adjustment mechanism (8) that are used for keeping dynamic balance, be equipped with on counter weight adjustment mechanism (8) and be used for carrying out counter weight compensation mechanism (9).

2. The seed crystal lifting self-balancing device of claim 1, wherein: the spline shaft (5) comprises a limiting sleeve (51) arranged on the outer side, a plurality of limiting convex blocks (52) distributed at equal angles are arranged on the outer side of the limiting sleeve (51), the limiting sleeve (51) is arranged on the outer side of one section of the spline shaft (5) arranged in the lifting box (3), and a wire winding shaft (6) is arranged on the outer side of the limiting sleeve (51).

3. The seed crystal lifting self-balancing device of claim 2, wherein: the seed crystal winding device is characterized in that the wire winding shaft (6) comprises a spiral groove (61) formed in the outer side, the spiral groove (61) is used for winding a seed crystal rope, two ends of the wire winding shaft (6) are provided with baffle plates (62), one end of the wire winding shaft (6) is provided with a through shaft hole (63), and the bearing (94) is connected with the outer side of the limiting sleeve (51).

4. The seed crystal lifting self-balancing device of claim 1, wherein: the guide wheel mechanism (7) comprises an installation block (71) arranged at the top in the lifting box (3), a square hole (72) is formed in the installation block (71), a guide wheel (73) is arranged inside the square hole (72), a surrounding guide groove (74) is formed in the outer side of the guide wheel (73), and the guide groove (74) is used for guiding when the seed crystal rope is wound.

5. The seed crystal lifting self-balancing device of claim 1, wherein: counterweight adjusting mechanism (8) is including setting up in counter weight box (81) of workstation (2) one side, square counterweight hole (82) have been seted up to the position that the top of counter weight box (81) is close to one end, be provided with between the inside both ends of counter weight box (81) and be used for keeping equipment dynamic balance's moving member (83), be provided with power transmission's driving medium (84) between integral key shaft (5) and moving member (83).

6. The seed crystal lifting self-balancing device of claim 5, wherein: moving member (83) are including setting up in fixed plate (831) of two symmetries at the inside both ends of counter weight box (81), it is provided with axle sleeve (832) to run through on fixed plate (831), both sides be provided with between axle sleeve (832) and be used for pivoted lead screw (833), the outside of lead screw (833) is provided with keeps centrobaric balancing weight (834), the top of balancing weight (834) is provided with spacing post (835) of two symmetries, be provided with driving medium (84) between lead screw (833) and integral key shaft (5).

7. The seed crystal lifting self-balancing device of claim 6, wherein: driving medium (84) are including setting up first sprocket (841) in integral key shaft (5) outside, lead screw (833) are close to the outside of one end and are provided with second sprocket (842), the outside of first sprocket (841) and second sprocket (842) is equipped with chain (843), chain (843) are used for first sprocket (841) and second sprocket (842) synchronous rotation to use.

8. The seed crystal lifting self-balancing device of claim 1, wherein: the counterweight compensation mechanism (9) comprises two symmetrical guide pillars (91) arranged at the tops of counterweight boxes (81) on two sides of a counterweight hole (82), a moving block (92) is arranged on the outer side of each guide pillar (91), two springs (93) are arranged between the top of each moving block (92) and the top of each counterweight box (81), the two springs (93) are arranged on the outer sides of the guide pillars (91), a bearing (94) is arranged inside each moving block (92), a screw rod (95) is arranged on the inner side of each bearing (94), a rotating block (96) is arranged at the top end of each screw rod (95), a plurality of counterweight compensation blocks (97) distributed in sequence are arranged on the outer side of each screw rod (95), and two symmetrical limiting holes (98) penetrating through the counterweight compensation blocks (97) are formed in the plurality of the counterweight compensation blocks (97).

Technical Field

The invention relates to the technical field of a czochralski crystal growing furnace device, in particular to a seed crystal lifting self-balancing lifting device.

Background

The single crystal silicon growth furnace is a manufacturing apparatus for producing single crystal silicon by the czochralski method. The seed crystal is a small crystal with the same crystal orientation as the needed crystal, is a seed for growing single crystal, and is also called seed crystal. Seed crystals with different crystal orientations are used as seed crystals, and single crystals with different crystal orientations can be obtained.

The existing common seed crystal lifting device needs to continuously wind the seed crystal rope in a rotating way of the wire winding shaft along with the lifting of the crystal in the crystal growing process of equipment, and continuously deflects to one side while rotating and being guided by the guide wheel. The existing fixed counterweight block structure fixes the counterweight structure. The shift of the center of gravity due to the movement of the winding shaft cannot be compensated. And the rotating mechanism with large superposed mass can further amplify the influence of gravity center shift on the stability of the whole mechanism in the dynamic rotating process, thereby further reducing the stability of the existing equipment and the product quality. Therefore, a seed crystal lifting self-balancing lifting device is provided.

Disclosure of Invention

The invention aims to provide a seed crystal lifting self-balancing lifting device to solve the problems in the background technology.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a seed brilliant promotes self-balancing and rises device, includes the base, the top of base is equipped with the workstation, the top of workstation is equipped with the lifting box, workstation top intermediate position is equipped with the center of rotation, lifting box one end is run through and is equipped with the integral key shaft, the integral key shaft is located the outside of lifting box inside and is equipped with the winding shaft, lifting box's top is equipped with guide pulley mechanism, workstation one side is equipped with the counter weight adjustment mechanism that is used for keeping dynamic balance, be equipped with the counter weight compensation mechanism that is used for carrying out the counter weight compensation on the counter weight adjustment mechanism.

Preferably, the spline shaft comprises a limiting sleeve arranged on the outer side, a plurality of limiting lugs distributed at equal angles are arranged on the outer side of the limiting sleeve, the limiting sleeve is arranged on the outer side of one section of the spline shaft arranged in the lifting box, and a wire winding shaft is arranged on the outer side of the limiting sleeve.

Preferably, the wire winding shaft comprises a spiral groove formed in the outer side, the spiral groove is used for winding the seed crystal rope, two ends of the wire winding shaft are provided with baffles, one end of the wire winding shaft is provided with a through shaft hole, and the bearing is connected with the outer side of the limiting sleeve.

Preferably, the guide wheel mechanism comprises an installation block arranged at the top in the lifting box, a square hole is formed in the installation block, a guide wheel is arranged inside the square hole, a surrounding guide groove is formed in the outer side of the guide wheel, and the guide groove is used for guiding the seed crystal when the seed crystal is wound.

Preferably, the counterweight adjusting mechanism comprises a counterweight box arranged on one side of the workbench, a square counterweight hole is formed in the position, close to one end, of the top of the counterweight box, a moving member used for keeping dynamic balance of equipment is arranged between the two ends of the inner portion of the counterweight box, and a power transmission member is arranged between the spline shaft and the moving member.

Preferably, the moving member is including setting up in the fixed plate of two symmetries at the inside both ends of counter weight box, run through on the fixed plate and be provided with the axle sleeve, both sides be provided with between the axle sleeve and be used for the pivoted lead screw, the outside of lead screw is provided with the balancing weight that keeps the focus, the top of balancing weight is provided with the spacing post of two symmetries, be provided with the driving medium between lead screw and the integral key shaft.

Preferably, the driving medium is including setting up the first sprocket in the integral key shaft outside, the outside that the lead screw is close to one end is provided with the second sprocket, the outside of first sprocket and second sprocket is equipped with the chain, the chain is used for first sprocket and the synchronous rotation of second sprocket to use.

Preferably, the counterweight compensation mechanism comprises two symmetrical guide pillars arranged at the tops of counterweight boxes on two sides of the counterweight hole, a moving block is arranged on the outer side of each guide pillar, two springs are arranged between the moving block and the tops of the counterweight boxes, the two springs are arranged on the outer sides of the guide pillars, a bearing is arranged inside the moving block, a screw rod is arranged on the inner side of the bearing, a rotating block is arranged at the top end of the screw rod, a plurality of counterweight compensation blocks which are distributed in sequence are arranged on the outer side of the screw rod, and two symmetrical limiting holes which penetrate through the counterweight compensation blocks are formed in the counterweight compensation blocks.

Compared with the prior art, the invention has the beneficial effects that:

1. according to the invention, the wire winding shaft is arranged in the lifting box and used for winding the seed crystal rope, the spline shaft is connected in the middle of the wire winding shaft and used for enabling the wire winding shaft to rotate, the guide wheel mechanism is arranged at the top in the lifting box and used for guiding the seed crystal rope, the balance weight adjusting mechanism is arranged on one side of the workbench and used for dynamically compensating the whole device, the balance weight compensating mechanism is arranged on the balance weight adjusting mechanism and used for compensating the weight of the balance weight block, and through the matching of the structures, the problems of stable and fixed reduction of equipment and reduction of product quality caused by gravity center offset generated by the movement of the wire winding shaft are solved.

2. The seed crystal balancing device is provided with the moving part for compensating the movement of the balancing weight so that equipment can reach the gravity center balance, the transmission part is arranged between the spline shaft and the moving part for enabling the balancing weight on the moving part to keep the synchronization with the moving direction and the moving speed of the wire winding shaft, the balancing weight compensation mechanism is provided with a plurality of balancing weight compensation blocks for coping with the lifting of seed crystal products with different qualities so as to compensate the gravity center, the center of the workbench is provided with the rotating center, so that the seed crystal products can always keep the center rotation, and the seed crystal rope is always positioned at the rotating center through the guide wheel.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic structural view of the present invention;

FIG. 3 is a schematic view of the spline shaft structure of the present invention;

FIG. 4 is a schematic view of a structure of a winding shaft according to the present invention;

FIG. 5 is a schematic view of a guide wheel mechanism according to the present invention;

FIG. 6 is a schematic view of a counterweight adjustment mechanism according to the present invention;

FIG. 7 is a schematic view of a moving part of the present invention;

FIG. 8 is a schematic view of the transmission member of the present invention;

fig. 9 is a schematic structural diagram of the heavy compensation mechanism of the present invention.

In the figure: 1-a base; 2-a workbench; 3-lifting the box; 4-center of rotation; 5-spline shaft; 6-winding a wire shaft; 7-a guide wheel mechanism; 8-a counterweight adjustment mechanism; 9-a counterweight compensation mechanism; 51-a stop collar; 52-limit bump; 61-helical groove; 62-a baffle; 63-shaft hole; 71-a mounting block; 72-square hole; 73-a guide wheel; 74-a guide groove; 81-a weight box; 82-a weight port; 83-a moving member; 84-a transmission member; 831-fixed plate; 832-shaft sleeve; 833-lead screw; 834-counterweight block; 835-limit column; 841-a first sprocket; 842-a second sprocket; 843-a chain; 91-guide column; 92-a moving block; 93-a spring; 94-a bearing; 95-screw rod; 96-turning block; 97-a counterweight compensation block; 98-limiting hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-9, the present invention provides a technical solution: a seed crystal lifting self-balancing lifting device is characterized in that a winding shaft 6 is arranged inside a lifting box 3 and used for winding a seed crystal rope, a spline shaft 5 is connected in the middle of the winding shaft 6 and used for enabling the winding shaft 6 to rotate, a guide wheel mechanism 7 is arranged at the top inside the lifting box 3 and used for guiding the seed crystal rope, a balance weight adjusting mechanism 8 is arranged on one side of a workbench 2 and used for dynamically compensating the whole device, a balance weight compensating mechanism 9 is arranged on the balance weight adjusting mechanism 8 and used for compensating the weight of a balance weight 834, a moving member 83 is arranged and used for compensating the movement of the balance weight 834 so that equipment can reach center of gravity balance, a transmission member 84 is arranged between the spline shaft 5 and the moving member 83 and used for enabling the balance weight 834 on the moving member 83 to keep synchronous with the moving direction and the moving speed of the winding shaft 6, through set up a plurality of counter weight compensation pieces 97 on counter weight compensation mechanism 9, it makes the focus compensation to deal with the seed crystal product promotion of different masses, sets up rotation center 4 in workstation 2 central point, can make the seed crystal product keep the centre rotation always to make the seed crystal rope be located rotation center 4 always through leading wheel 73, through the cooperation between these several kinds of structures, solved and rolled up silk axle 6 and removed the focus skew and lead to equipment stability to decide the problem that reduces and product quality reduces.

This seed crystal promotes from balancing device includes base 1, the top of base 1 is connected with workstation 2, the top of workstation 2 is connected installs lifting box 3, the top central point of workstation 2 puts and is connected with rotation center 4, rotation center 4 is located lifting box 3's inside, rotation center 4 is for placing the seed crystal product usefulness, lifting box 3 internal rotation is connected with integral key shaft 5, the one end of integral key shaft 5 runs through lifting box 3's one end, integral key shaft 5 is arranged in lifting box 3 internal portion's the outside rotation and is connected with wire winding shaft 6, wire winding shaft 6 is used for the rolling seed crystal rope, wire winding shaft 6 is connected with guide wheel mechanism 7 on one side lifting box 3's top, guide wheel mechanism 7 is used for keeping the seed crystal rope to be located rotation center 4, one side of workstation 2 is connected with the counter weight adjustment mechanism 8 that is used for keeping equipment dynamic balance, the position that counter weight adjustment mechanism 8's top is close to one end is connected with the counter weight compensation mechanism 9 that is used for changing balancing weight 834 weight.

The base 1 is fixed at the bottom, and all parts above the workbench 2 connected with the top of the base 1 do circular motion around the base. In order to always position the seed crystal string at the rotation center 4, a guide wheel 73 is provided near the winding shaft 6, and the seed crystal string is guided and moved laterally as the winding shaft 6 is wound and rotated. Dynamic balancing weights 834 are formed through calculation of related algorithms, the weights of the balancing weights 834 are compensated, the whole gravity center offset is compensated, and therefore under the dynamic condition, the gravity center is kept unchanged and is always coincided with the rotation center 4, dynamic balance is achieved, and stability and product quality of equipment are improved.

Spline shaft 5 is connected in the inside partly outside of lifting box 3 and is connected with stop collar 51, and stop collar 51's the outside is connected with spacing lug 52, and spacing lug 52 is equipped with a plurality of equiangular distributions in the stop collar 51 outside, and book spool 6 includes the helicla flute 61 that the outside was seted up, and helicla flute 61 is used for the seed crystal rope to promote the winding with the both ends of rolling up spool 6 and is connected with baffle 62, and the axle hole 63 shaft hole 63 that runs through is seted up at book spool 6 middle part is used for rolling up spool 6 and connects in the stop collar 51 outside.

Guide wheel mechanism 7 has seted up quad slit 72 including connecting the installation piece 71 at the top in lifting box 3 on the installation piece 71, rotates between the inside both ends of quad slit 72 and is connected with leading wheel 73, and annular guide way 74 has been seted up to the outside of leading wheel 73, and guide way 74 can be located rotation center 4 when being used for the seed crystal rope winding.

The counterweight adjusting mechanism 8 comprises a counterweight box 81 connected to one side of the workbench 2, a square counterweight hole 82 is formed in the position, close to one end, of the top of the counterweight box 81, a moving member 83 used for keeping dynamic balance of equipment is connected to the inside of the counterweight box 81, a transmission member 84 used for providing transmission force is connected between the spline shaft 5 and the moving member 83, the transmission member 84 drives the moving member 83 to move, and the moving member 83 and the wire winding shaft 6 move towards the same square direction and move at the same speed.

Moving member 83 is including connecting the fixed plate 831 of two symmetries at the both ends in the counterweight box 81, through connection has two axle sleeves 832 on two fixed plate 831, it is connected with lead screw 833 to rotate between the axle sleeve 832 of both sides, the outside of lead screw 833 is connected with the balancing weight 834, the balancing weight 834 moves in the outside of lead screw 833, the top of balancing weight 834 is connected with the spacing post 835 of two symmetries, rotation through lead screw 833, the balancing weight 834 moves along with the direction of rolling up the removal of silk axle 6, carry out dynamic compensation to the barycentric bias that rolls up silk axle 6 and produce.

The driving medium 84 includes to rotate and connects the first sprocket 841 of arranging the portion outside lifting box 3 outside in the spline shaft 5 outside, and first sprocket 841 rotates along with spline shaft 5 synchronous, and second sprocket 842 rotates to be connected in the outside that lead screw 833 is close to one end, and first sprocket 841 is connected with chain 843 with the outside of second sprocket 842, and through the rotation of spline shaft 5, first sprocket 841 drives second sprocket 842 through chain 843 and rotates to it rotates to drive lead screw 833.

The counterweight compensation mechanism 9 comprises two symmetrical guide posts 91 connected to the top of the counterweight box 81, the two guide posts 91 are connected to two ends of the counterweight hole 82, the outer sides of the two guide posts 91 are slidably connected with a moving block 92, two symmetrical springs 93 are connected between the moving block 92 and the top of the counterweight box 81, the two springs 93 are connected to the outer sides of the guide posts 91, a bearing 94 is connected to the inner side of the moving block 92 in a penetrating manner, a screw 95 is rotatably connected to the inner side of the bearing 94, a rotating block 96 is connected to the top end of the screw 95, a plurality of counterweight compensation blocks 97 are sequentially distributed on the outer side of the screw 95, two symmetrical limiting holes 98 are formed in each of the plurality of counterweight compensation blocks 97, the moving block 92 is compressed by the spring 93 by pressing the moving block 92, the counterweight compensation block 97 on the outer side of the screw 95 is in contact with the top of the counterweight 834 through the two limiting holes 98 and the two limiting posts 835 at the top of the counterweight 834, rotating the rotating block 96 rotates the screw 95 slowly releasing the moving block 92 so that the counterweight compensation block 97 can be connected to the top of the counterweight 834.

The working principle is as follows: firstly, a seed crystal product is placed at a rotating center 4, one end of a seed crystal rope is connected with a spiral groove 61 of a wire winding shaft 6 and is guided by a guide groove 74 on the outer side of a guide wheel 73, an outer side motor is started, an external motor drives a spline shaft 5 to rotate, on one hand, the spline shaft 5 drives the wire winding shaft 6 to rotate, the seed crystal rope is continuously wound inside the spiral groove 61 on the outer side of the wire winding shaft 6 when the wire winding shaft 6 rotates, the wire winding shaft 6 moves on the outer side of the spline shaft 5 along with the winding of the spiral groove 61, on the other hand, the spline shaft 5 drives a first chain wheel 841 to rotate, the first chain wheel 841 drives a second chain wheel 842 to rotate through a chain 843, the second chain wheel 842 drives a lead screw 833 to rotate through shaft sleeves 832 on two ends, the lead screw 833 drives a clump weight 834 on the outer side to move inside a counterweight box 81 when rotating, the moving speed and the squareness are synchronous with the wire winding shaft 6, if the lifting of the seed crystal product with different qualities is required, the weight of the balancing weight 834 needs to be changed, the moving block 92 is pressed at first, the moving block 92 moves through the two guide posts 91, the balancing weight compensation block 97 connected to the outer side of the screw 95 is connected with the two limiting holes 98 at the top of the balancing weight 834 through the two limiting holes 98, the rotating block 96 rotates, the screw 95 rotates through the bearing 94, the balancing weight compensation block 97 moves to the top of the balancing weight 834 slowly, the moving block 92 is released slowly while rotating, the screw 95 is moved away from the balancing weight 834 through resilience of the spring 93, the compensated balancing weight compensation block 97 is left at the top of the balancing weight 834, seed crystal lifting is carried out subsequently, when the balancing weight compensation block 97 is required to be taken back, the previous action is repeated, the rotating block 96 is rotated reversely, the screw 95 is rotated reversely, and the balancing weight compensation block 97 is rotated to the outer side of the screw 95.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.