Conductive self-lubricating composite coating and preparation method thereof
阅读说明：本技术 一种导电自润滑复合涂层及其制备方法 (Conductive self-lubricating composite coating and preparation method thereof ) 是由 宋惠 江南 褚伍波 杨国永 易剑 李�赫 王博 于 2021-09-08 设计创作，主要内容包括：本发明公开了一种导电自润滑复合涂层,包括基体,基体表面由内而外依次为金刚石层、类金刚石层和石墨烯层。本发明通过热丝化学气相沉积法制备金刚石层,并对金刚石层进行激光处理原位生成类金刚石层,进一步在类金刚石层上通过化学键合-热处理制备石墨烯层,制备方法简单、重复性好。多层协同作用有效缓解了复合涂层的应力,减少了摩擦服役过程中的脆性断裂,实现了复合涂层摩擦性能和功能性的双向优化,最外层的石墨烯层改善了复合涂层的导电性能、自润滑性能和防腐性能,极大的拓宽该导电自润滑复合涂层的服役范围,该导电自润滑复合涂层在流体润滑、边界润滑、干摩擦、高载、高速等服役环境下均具有较低的摩擦系数与磨损率。(The invention discloses a conductive self-lubricating composite coating, which comprises a substrate, wherein a diamond layer, a diamond-like carbon layer and a graphene layer are sequentially arranged on the surface of the substrate from inside to outside. According to the invention, the diamond layer is prepared by a hot wire chemical vapor deposition method, the diamond layer is subjected to laser treatment to generate the diamond-like carbon layer in situ, and the graphene layer is further prepared on the diamond-like carbon layer by chemical bonding-thermal treatment. The stress of the composite coating is effectively relieved by the synergistic effect of the multiple layers, brittle fracture in the friction service process is reduced, bidirectional optimization of the friction performance and functionality of the composite coating is realized, the conductivity, the self-lubricating performance and the corrosion resistance of the composite coating are improved by the graphene layer on the outermost layer, the service range of the conductive self-lubricating composite coating is greatly widened, and the conductive self-lubricating composite coating has lower friction coefficient and wear rate in service environments such as fluid lubrication, boundary lubrication, dry friction, high load, high speed and the like.)
1. The utility model provides a self-lubricating composite coating that electrically conducts, includes the base member, its characterized in that, base member surface from interior to exterior is diamond layer, diamond-like carbon layer and graphite alkene layer in proper order.
2. The conductive self-lubricating composite coating according to claim 1, wherein the diamond layer has a thickness of 5 to 20 μm, and the diamond-like layer has a thickness of 1 to 5 μm.
3. The conductive self-lubricating composite coating according to claim 1, wherein the graphene layers are 1-10 layers.
4. The method for preparing an electrically conductive self-lubricating composite coating according to claim 1, comprising the steps of:
(1) depositing a diamond layer on the surface of the matrix through hot filament chemical vapor deposition to obtain a matrix-diamond layer;
(2) carrying out laser treatment on the diamond layer to generate a diamond-like carbon layer in situ to obtain a substrate-diamond-like carbon layer;
(3) and (3) oxidizing the surface of the substrate-diamond-like carbon layer, grafting a silane coupling agent, bonding graphene oxide, and performing heat treatment to generate a graphene layer to obtain the conductive self-lubricating composite coating.
5. The method for preparing the conductive self-lubricating composite coating according to claim 4, wherein in the step (1), the conductive self-lubricating composite coating is preparedThe hot wire chemical vapor deposition of the diamond layer adopts tantalum wire and CH4The flow rate is 4-20 sccm, H2The flow rate is 200-400 sccm, N2The flow rate is 0-30 sccm, the power of a single tantalum wire is 800-1000W, the deposition pressure is 1.5-2.5 KPa, and the deposition time is 1-10 h.
6. The method for preparing the conductive self-lubricating composite coating according to claim 4, wherein in the step (2), the laser treatment parameters are as follows: the laser has the wavelength of 1.064 mu m, the spot diameter of 25-50 mu m, the laser pulse power of 8-10W, the pulse frequency of 1-5 kHz, the pulse width of 4-25 mu s, the scanning speed of 5-8 mm/s and the spot overlapping rate of 90-95%.
7. The method for preparing the conductive self-lubricating composite coating according to claim 4, wherein in the step (3), the surface oxidation treatment process comprises the following steps: adding the matrix-diamond-like carbon layer into the etching solution, and carrying out water bath at 80-90 ℃ for 30-40 min; the etching solution is a Piranha solution which is 98 percent H with the volume ratio of 7:32SO4Solution and 30% H2O2Mixed solution of the solutions.
8. The method for preparing the conductive self-lubricating composite coating according to claim 4, wherein in the step (3), the process for grafting the silane coupling agent comprises the following steps: adding the oxidized substrate-diamond-like carbon layer into 5-8 mol/L silane coupling agent solution for soaking for 30-40 min; the silane coupling agent solution is acetone/water solution of 3-aminopropyl triethoxysilane.
9. The method for preparing the conductive self-lubricating composite coating according to claim 4, wherein in the step (3), the graphene oxide bonding process comprises: and adding the substrate-diamond-like carbon layer grafted with the silane coupling agent into 0.5-1.2 mg/L graphene oxide solution.
10. The preparation method of the conductive self-lubricating composite coating according to claim 4, wherein the steps of the silane coupling agent grafting process, the graphene oxide bonding process and the heat treatment are repeated 1-10 times to form 1-10 graphene layers.
Technical Field
The invention relates to the technical field of composite coatings, in particular to a conductive self-lubricating composite coating and a preparation method thereof.
Background
In recent years, with rapid development in the fields of aerospace, rail transit, electronic communication, and the like, more severe requirements are placed on the properties of a coating, such as electrical conductivity, frictional wear, and the like. The traditional single-function lubricating coating is difficult to bear harsh service working conditions, and the problem of surface lubrication of friction parts by using a material with multi-environment self-lubricating performance and conductive function is one of the important research points in the field.
The diamond coating has the excellent characteristics of high hardness, extremely low friction coefficient and wear rate, high temperature resistance, stable physical and chemical properties and the like, and can be used as an ideal lubricating protective material for the surface of a friction part. However, diamond is non-conductive and high in hardness, and brittle fracture is easy to occur in the long-term service process, so that friction failure is caused. In recent years, most researches focus on improving the conductive lubricating property of the coating by combining different coating preparation technologies and compounding of different material components so as to meet the requirements of special working conditions, however, the compounding of multiple preparation technologies and the compounding of different lubricating phases lead the preparation process to be more complicated and the process stability to be poorer. Therefore, the problem to be solved by at present is how to prepare a functional coating with self-lubrication, conductivity, wear resistance, corrosion resistance and high temperature resistance on the surface of a friction part by using a single coating preparation technology and combining a plurality of surface modification means.
Chinese patent publication No. CN208395256U discloses a diamond-like composite coating, which includes a diamond-like surface coating and a composite transition layer arranged in a layered structure; the composite transition layer comprises a metal coating, a first metal transition layer, a diamond-like intermediate coating and a second metal transition layer which are alternately arranged in sequence. The technical problems that in the prior art, the binding force between the diamond-like carbon layer and the metal substrate is poor and the diamond-like carbon layer is easy to fall off are solved, but the structure of the diamond-like carbon composite coating is complex.
Chinese patent publication No. CN106756880B discloses a diamond/diamond-like carbon multilayer composite coating, and the preparation method comprises the following steps: introducing methane under a vacuum condition, carrying out a first coating process, and depositing a diamond coating on the surface of the substrate; under the vacuum condition, adjusting the heating temperature and the methane concentration to carry out a second coating process, and depositing a diamond-like coating on the surface of the diamond coating; and repeating the first coating process and the second coating process to prepare the multilayer composite structure with the diamond layer and the diamond-like carbon layer alternately deposited. The invention realizes the preparation of the diamond/diamond-like multi-layer composite coating by adjusting the temperature and the methane concentration.
Chinese patent publication No. CN109722642A discloses a workpiece with a diamond/graphene composite lubricating film, which includes a workpiece body and a diamond/graphene composite lubricating film disposed on the surface of the workpiece body, where the diamond/graphene composite lubricating film includes a super-nano diamond film disposed on the surface of the workpiece body and a graphene layer disposed on the super-nano diamond film.
Disclosure of Invention
The invention provides a conductive self-lubricating composite coating which is simple and efficient in preparation process, good in stability and strong in interlayer bonding force of the composite coating, wherein the conductive performance, the self-lubricating performance and the corrosion resistance of the coating are improved under the synergistic effect of a diamond layer, a diamond-like carbon layer and a graphene layer, and the service range of the conductive self-lubricating composite coating is widened.
The technical scheme is as follows:
the utility model provides a conductive self-lubricating composite coating, includes the base member, and the base member surface is diamond layer, diamond-like carbon layer and graphite alkene layer by interior to outer in proper order.
The substrate includes but is not limited to ceramic substrate, alloy substrate, metal substrate, silicon substrate, high temperature resistant glass substrate, etc.
The diamond layer comprises a micron diamond layer, a nanometer diamond layer or an ultra-fine nanometer diamond layer; the size of diamond grains in the nano diamond layer is 10-100 nm; the diamond crystal grain size in the superfine nano diamond layer is 1-10 nm.
Preferably, the thickness of the diamond-like carbon layer is 5-20 μm, and the thickness of the diamond-like carbon layer is 1-5 μm.
Preferably, in the conductive self-lubricating composite coating, the number of graphene layers is 1-10.
The invention also provides a preparation method of the conductive self-lubricating composite coating, which comprises the following steps:
(1) depositing a diamond layer on the surface of the matrix through hot filament chemical vapor deposition to obtain a matrix-diamond layer;
(2) carrying out laser treatment on the diamond layer to generate a diamond-like carbon layer in situ to obtain a substrate-diamond-like carbon layer;
(3) and (3) oxidizing the surface of the substrate-diamond-like carbon layer, grafting a silane coupling agent, bonding graphene oxide, and performing heat treatment to generate a graphene layer to obtain the conductive self-lubricating composite coating.
The invention prepares the conductive self-lubricating composite coating on the surface of a substrate by utilizing a hot wire chemical vapor deposition coating preparation technology and combining surface modification means such as laser treatment, chemical bonding-heat treatment and the like.
Preferably, the substrate is pretreated before the diamond layer is deposited, and the pretreatment process comprises the following steps: sequentially cleaning the matrix by using alcohol, acetone and distilled water to remove oil stains and impurities on the surface of the matrix; in order to facilitate nucleation in the growth process of the coating, the cleaned matrix is placed in the nano diamond powder ethanol suspension for ultrasonic oscillation, taken out, ultrasonically cleaned in absolute ethanol, taken out and dried by nitrogen.
Further preferably, the ultrasonic oscillation time is 30min, and the ultrasonic cleaning time is 10 min.
In the step (1), tantalum wires and CH are adopted when the hot wire chemical vapor deposition diamond layer is formed4The flow rate is 4-20 sccm, H2The flow rate is 200-400 sccm, N2The flow rate is 0-30 sccm, the power of a single tantalum wire is 800-1000W, the deposition pressure is 1.5-2.5 KPa, and the deposition time is 1-10 h. The parameters are favorable for nucleation and growth of diamond, and the nano diamond layer or the superfine nano diamond layer is prepared.
Preferably, the deposition time is 6-10 h, and the diamond layer is more compact as the deposition time increases.
The laser beam has high energy density, the surface structure of the diamond layer is converted by laser treatment, and part of carbon is sp3Structural transformation to sp2Structure of forming sp3Bond and sp2Bond coexisting diamond-like carbon layer.
In the step (2), the laser processing parameters are as follows: the laser has the wavelength of 1.064 mu m, the spot diameter of 25-50 mu m, the laser pulse power of 8-10W, the pulse frequency of 1-5 kHz, the pulse width of 4-25 mu s, the scanning speed of 5-8 mm/s and the spot overlapping rate of 90-95%.
Adopt laser processing to induce diamond layer surface normal position to generate diamond-like carbon layer, among the laser processing process, the high energy that the laser beam produced makes diamond structure produce certain stress release when taking place the phase transition for cohesion is big between diamond layer and the diamond-like carbon layer, and diamond layer and diamond-like carbon layer combine each other simultaneously, can effectively regulate and control the high stress and the high fragility of diamond layer, and then reduces the brittle fracture of friction in-service process, in addition, sp2The introduction of the bond may also reduce the coefficient of friction during service.
Preferably, in the step (3), the surface oxidation treatment process is as follows: adding the matrix-diamond-like carbon layer into the etching solution, and carrying out water bath at 80-90 ℃ for 30-40 min.
Further preferably, the etching is performedThe etching solution is a Piranha solution which is 98 percent of H with the volume ratio of 7:32SO4Solution and 30% H2O2Mixed solution of the solutions.
Preferably, in the step (3), the process for grafting the silane coupling agent comprises: and adding the oxidized substrate-diamond-like carbon layer into 5-8 mol/L silane coupling agent solution for soaking for 30-40 min.
More preferably, the silane coupling agent solution is an acetone/water solution of 3-Aminopropyltriethoxysilane (APTES).
After the diamond-like carbon layer is subjected to peroxidation treatment and grafted by a silane coupling agent, the surface of the diamond-like carbon layer has a large number of active amino groups, and the diamond-like carbon layer can react with groups such as hydroxyl, carboxyl and the like of graphene oxide to form a diamond-GO composite coating structure.
Preferably, in the step (3), the process for bonding graphene oxide includes: and adding the substrate-diamond-like carbon layer grafted with the silane coupling agent into 0.5-1.2 mg/L graphene oxide solution.
Preferably, in the step (3), the heat treatment conditions are as follows: keeping the temperature at 200-250 ℃ for 1-2 h under argon atmosphere.
The silane coupling agent grafting process, the graphene bonding process and the heat treatment step can be repeated, and graphene layers with different layers are constructed according to requirements.
Preferably, the steps of the silane coupling agent grafting process, the graphene oxide bonding process and the heat treatment are repeated for 1-10 times to form 1-10 graphene layers.
The conductive self-lubricating composite coating can be applied to the preparation of sliding electric contact parts of high-end equipment.
Compared with the prior art, the invention has the advantages that:
(1) in the conductive self-lubricating composite coating, the diamond-like carbon layer is obtained by in-situ induction of the structure transformation of the diamond layer, heterogeneous elements are prevented from being introduced by mutual compounding of allotropes, in addition, graphene is grafted to the diamond-like carbon layer through chemical bonding, the number of graphene layers is controllable, and the coatings have good bonding force.
(2) In the conductive self-lubricating composite coating, the diamond layer is formed by sp3Structural carbon, the diamond-like carbon layer consisting of sp2And sp3Carbon of the structure is hybridized, and the graphene layer is sp2Structural carbon composition, diamond layer hardness high, brittleness high, but sp2The introduction of the structural carbon can reduce the hardness of the coating, increase graphite phases, improve toughness, relieve the stress of the composite coating and reduce brittle fracture in the friction service process.
(3) The conductive self-lubricating composite coating realizes the bidirectional optimization of the friction performance and the functionality of the composite coating, the electric conductivity, the self-lubricating performance and the corrosion resistance of the composite coating are improved by the synergistic effect of the diamond layer, the diamond-like carbon layer and the graphene layer, and the service range of the conductive self-lubricating composite coating is greatly widened.
(4) The preparation method of the conductive self-lubricating composite coating is simple and has good repeatability; in the preparation process, the hot wire chemical vapor deposition mode is stable in process, laser treatment is rapid and efficient, the chemical bonding-heat treatment process is simple and controllable, and the preparation method has good applicability to the preparation of high-quality surface protective coatings.
(5) The conductive self-lubricating composite coating not only can reduce friction and wear under the condition of fluid lubrication, but also can provide continuous lubrication and keep good conductivity in high-speed, high-load and dry-friction environments, and has lower friction coefficient and wear rate in service environments such as fluid lubrication, boundary lubrication, dry friction, high load and high speed.
Drawings
FIG. 1 is a flow chart of the preparation of the conductive self-lubricating composite coating in examples 1-3.
Fig. 2 is a schematic structural view of the conductive self-lubricating composite coating in examples 1 to 3.
Fig. 3 is a surface topography of the conductive self-lubricating composite coating in example 1.
Fig. 4 is a graph showing a change in friction coefficient of the conductive self-lubricating composite coating layer according to example 1.
Detailed Description
The invention is further elucidated with reference to the figures and the examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention.
In examples 1 to 3, the preparation process of the conductive self-lubricating composite coating is shown in fig. 1, and the structure of the conductive self-lubricating composite coating is shown in fig. 2.
Example 1
Pretreatment: sequentially cleaning a ceramic matrix by using alcohol, acetone and distilled water to remove oil stains and impurities on the surface of the matrix; in order to facilitate nucleation in the growth process of the coating, the cleaned substrate is placed in the nano diamond powder ethanol suspension for ultrasonic oscillation for 30min, taken out, then ultrasonically cleaned in absolute ethanol for 10min, taken out and dried by nitrogen.
Hot wire chemical vapor deposition: placing the pretreated ceramic substrate in a hot wire cavity, selecting a tantalum wire with the diameter of 0.35mm during deposition, and setting the power of a single wire to be 900W and CH4The flow rate was 4sccm, H2The flow rate is 200sccm, the deposition pressure is 2.0KPa, and after 6.5 hours of deposition, the substrate with the diamond layer is taken out. The initial thickness of the diamond coating was about 8 μm.
Laser processing: and carrying out laser surface treatment on the substrate with the diamond layer, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 30 mu m, the pulse power of the laser is 8W, the pulse frequency is 2kHz, the pulse width is 4 mu s, the scanning speed is 8mm/s, and the overlapping rate of the light spots is 90%.
Oxidation treatment: the substrate-diamond-like carbon layer was added to Piranha solution (98% H in volume ratio 7: 3)2SO4Solution and 30% H2O2Mixed solution of the solutions), performing surface oxidation treatment, performing water bath at 90 ℃ for 30min, taking out, performing ultrasonic cleaning in ultrapure water, and drying by nitrogen after cleaning.
Grafting of a silane coupling agent: preparing an acetone/ultrapure water mixed solvent with a volume ratio of 5:1, adding 2mL of an APTES solution, finally keeping the concentration of the acetone/aqueous solution of the APTES at 5mol/L, soaking the oxidized substrate-diamond-like carbon layer in the silane coupling agent solution for 30min, taking out a sample, sequentially carrying out ultrasonic cleaning in acetone and ultrapure water, and drying by using nitrogen after the cleaning is finished. And adding the substrate-diamond-like carbon layer grafted with the silane coupling agent into a 1mg/L graphene oxide solution to form a diamond-like carbon-GO composite coating structure.
And (3) heat treatment: and (3) placing the substrate with the GO-diamond-like carbon-diamond composite coating in a tubular furnace, heating to 200 ℃ in an argon atmosphere, keeping the temperature for 1.5h, and reducing the graphene oxide into graphene to generate a graphene layer.
Repeating the steps of the silane coupling agent grafting process, the graphene oxide bonding process and the heat treatment for 3 times to prepare the conductive self-lubricating composite coating with 3 graphene layers.
In this embodiment, in the conductive self-lubricating composite coating, the thickness of the diamond layer is about 6 μm, the thickness of the diamond-like carbon is about 2 μm, and the surface topography of the conductive self-lubricating composite coating is as shown in fig. 3, which shows that the graphene layer is successfully bonded on the diamond-like carbon layer.
In this embodiment, a friction coefficient change curve of the conductive self-lubricating composite coating is shown in fig. 4, and in a water environment and under a load of 20N (high load), the average friction coefficient of the coating of this embodiment is only 0.02; and the friction coefficient under the atmospheric environment (namely dry friction) is only 0.05-0.06; the boundary friction is a lubrication state between fluid lubrication and dry friction, and the coating of the embodiment has good tribological properties in the dry friction state and the water lubrication state, so that the boundary friction state is small and has excellent tribological properties.
Example 2
Pretreatment: sequentially cleaning a silicon substrate by using alcohol, acetone and distilled water to remove oil stains and impurities on the surface of the substrate; in order to facilitate nucleation in the growth process of the coating, the cleaned substrate is placed in the nano diamond powder ethanol suspension for ultrasonic oscillation for 30min, taken out, then ultrasonically cleaned in absolute ethanol for 10min, taken out and dried by nitrogen.
Hot wire chemical vapor deposition: placing the pretreated substrate in a hot wire cavity, selecting a tantalum wire with the diameter of 0.35mm during deposition, setting the power of a single wire to be 1000W and CH4The flow rate was 6sccm, H2Flow rate of 200sccm, sinkThe pressure of the gas is 2.0KPa, and after 7.5 hours of deposition, the basal body with the diamond layer is taken out. The initial thickness of the diamond coating was about 10 μm.
Laser processing: and carrying out laser surface treatment on the substrate with the diamond layer, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 50 mu m, the pulse power of the laser is 10W, the pulse frequency is 5kHz, the pulse width is 25 mu s, the scanning speed is 5mm/s, and the overlapping rate of the light spots is 95%.
Oxidation treatment: the substrate-diamond-like carbon layer was added to Piranha solution (98% H in volume ratio 7: 3)2SO4Solution and 30% H2O2Mixed solution of the solutions), performing surface oxidation treatment, performing water bath at 90 ℃ for 30min, taking out, performing ultrasonic cleaning in ultrapure water, and drying by nitrogen after cleaning.
Grafting of a silane coupling agent: preparing an acetone/ultrapure water mixed solvent with a volume ratio of 5:1, adding 2mL of an APTES solution, finally keeping the concentration of the acetone/water solution of the APTES at 6mol/L, soaking the oxidized substrate-diamond-like carbon layer in the silane coupling agent solution for 35min, taking out a sample, sequentially carrying out ultrasonic cleaning in acetone and ultrapure water, and drying by using nitrogen after the cleaning is finished. And adding the substrate-diamond-like carbon layer grafted with the silane coupling agent into 0.8mg/L graphene oxide solution to form a diamond-like carbon-GO composite coating structure.
And (3) heat treatment: and (3) placing the substrate with the GO-diamond-like carbon-diamond composite coating in a tubular furnace, heating to 200 ℃ under an argon atmosphere, keeping for 1h, and reducing the graphene oxide into graphene to generate a graphene layer.
And repeating the steps of the silane coupling agent grafting process, the graphene oxide bonding process and the heat treatment for 7 times to prepare the conductive self-lubricating composite coating with 7 graphene layers.
In this embodiment, the diamond layer has a thickness of about 7 μm and the diamond-like carbon has a thickness of about 3 μm.
Example 3
Pretreatment: sequentially cleaning a silicon substrate by using alcohol, acetone and distilled water to remove oil stains and impurities on the surface of the substrate; in order to facilitate nucleation in the growth process of the coating, the cleaned substrate is placed in the nano diamond powder ethanol suspension for ultrasonic oscillation for 30min, taken out, then ultrasonically cleaned in absolute ethanol for 10min, taken out and dried by nitrogen.
Hot wire chemical vapor deposition: placing the pretreated substrate in a hot wire cavity, selecting a tantalum wire with the diameter of 0.35mm during deposition, setting the power of a single wire to be 1000W and CH4The flow rate was 10sccm, H2The flow rate is 200sccm, N2The flow rate is 30sccm, the deposition pressure is 2.5KPa, and after 8 hours of deposition, the substrate with the diamond layer is taken out. The initial thickness of the diamond coating was about 11 μm.
Laser processing: and carrying out laser surface treatment on the substrate with the diamond layer, wherein the wavelength of a laser is 1.064 mu m, the diameter of a light spot is 40 mu m, the pulse power of the laser is 9W, the pulse frequency is 4kHz, the pulse width is 20 mu s, the scanning speed is 6mm/s, and the overlapping rate of the light spots is 92%.
Oxidation treatment: the substrate-diamond-like carbon layer was added to Piranha solution (98% H in volume ratio 7: 3)2SO4Solution and 30% H2O2Mixed solution of the solutions), performing surface oxidation treatment, performing water bath at 90 ℃ for 30min, taking out, performing ultrasonic cleaning in ultrapure water, and drying by nitrogen after cleaning.
Grafting of a silane coupling agent: preparing an acetone/ultrapure water mixed solvent with a volume ratio of 5:1, adding 2mL of an APTES solution, finally keeping the concentration of the acetone/aqueous solution of the APTES at 5mol/L, soaking the oxidized diamond-like carbon-diamond layer substrate in the silane coupling agent solution for 30min, taking out the sample, sequentially carrying out ultrasonic cleaning in acetone and ultrapure water, and drying by using nitrogen after the cleaning is finished. And adding the substrate-diamond-like carbon layer grafted with the silane coupling agent into a 1mg/L graphene oxide solution to form a diamond-like carbon-GO composite coating structure.
And (3) heat treatment: and (3) placing the substrate with the GO-diamond-like carbon-diamond composite coating in a tubular furnace, heating to 200 ℃ under an argon atmosphere, keeping for 2h, and reducing the graphene oxide into graphene to generate a graphene layer.
And repeating the steps of the silane coupling agent grafting process, the graphene oxide bonding process and the heat treatment for 7 times to prepare the conductive self-lubricating composite coating with 7 graphene layers.
In this embodiment, the diamond layer has a thickness of about 9 μm and the diamond-like carbon has a thickness of about 2 μm.
The embodiments described above are intended to illustrate the technical solutions of the present invention in detail, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modification, supplement or similar substitution made within the scope of the principles of the present invention should be included in the protection scope of the present invention.
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