阅读说明：本技术 半导体工艺设备及开门机构 (Semiconductor process equipment and door opening mechanism ) 是由 闫士泉 谢远祥 姚晶 韩子迦 于 2020-12-28 设计创作，主要内容包括：本发明公开一种开门机构,开门机构包括向第一方向移动的第一伸缩机构、向第二方向移动的第二伸缩机构和门体连接部,其中第一所述机构、第二伸缩机构、门体连接部和门体依次相连,本申请通过机械部件之间的装配连接关系以及第一伸缩件和第二伸缩件具备的运动方式,即可实现第一伸缩机构和第二伸缩机构的联动,进而实现门体的开关动作,相比电气控制方式能够省去电气布局成本,并且也能够降低对门体开关动作的控制难度,本申请还提出一种半导体工艺设备。(The invention discloses a door opening mechanism which comprises a first telescopic mechanism moving towards a first direction, a second telescopic mechanism moving towards a second direction and a door body connecting part, wherein the first telescopic mechanism, the second telescopic mechanism, the door body connecting part and a door body are sequentially connected.)

1. The door opening mechanism (100) is applied to semiconductor process equipment (200), the semiconductor process equipment (200) comprises a door body (210), and the door opening mechanism (100) is characterized by comprising a first telescopic mechanism (110), a second telescopic mechanism (120) and a door body connecting part (130) which are sequentially connected, wherein the door body connecting part (130) is used for being connected with the door body (210),

the first telescopic mechanism (110) is used for inputting fluid to the second telescopic mechanism (120) so as to drive the second telescopic mechanism (120) to move in a first direction and the door body (210) to move in a second direction, wherein the first direction is intersected with the second direction.

2. The door opening mechanism (100) according to claim 1, wherein: the first telescopic mechanism (110) comprises a first piston rod (111), the first piston rod (111) is connected with the second telescopic mechanism (120) and is used for driving the second telescopic mechanism (120) to move in the first direction,

the second telescopic mechanism comprises a second piston rod (121), and the second piston rod (121) is connected with the door body connecting part (130) and used for driving the door body (210) to move in the second direction.

3. The door opening mechanism (100) according to claim 2, wherein: the first telescopic mechanism (110) further comprises a first cylinder (114), the first piston rod (111) is partially positioned in the first cylinder (114), and the first piston rod (111) can divide the first cylinder (114) into a first rod cavity (112) and a first non-rod cavity (113);

the second telescopic mechanism (120) further comprises a second cylinder (124), the second piston rod (121) is partially located in the second cylinder (124), and the second piston rod (121) can divide the second cylinder (124) into a second rod-containing cavity (122) and a second rod-free cavity (123);

the first rod cavity (112) is communicated with the second rod cavity (122), the first rodless cavity (113) is communicated with the second rodless cavity (123), the first rodless cavity (113) is provided with a first fluid port (1131), and the first rod cavity (112) is provided with a second fluid port (1121).

4. A door opening mechanism according to claim 3, wherein a first connecting channel (1111) is formed in the first piston rod (111), the first connecting channel (1111) communicating the first rodless chamber (113) and the second rodless chamber (123).

5. The door opening mechanism according to claim 4, wherein the end of the second cylinder (124) is an open end, the end of the first piston rod (111) is sealed at the open end, and the end of the first piston rod (111), the second cylinder (124) and the second piston rod (121) enclose the second rodless chamber (123).

6. A door opening mechanism according to claim 3, wherein a second connecting channel (1112) is formed in the first piston rod (111), and the second connecting channel (1112) communicates the second rod chamber (122) and the first rod chamber (112).

7. The door opening mechanism according to claim 6, wherein the second connecting channel (1112) communicates with the second rod chamber (122) through a connecting member (140), the connecting member (140) being connected between the first piston rod (111) and the second cylinder (124).

8. The door opening mechanism according to claim 3, wherein a portion of the second piston rod (121) is slidably disposed in the second cylinder (124) and is slidably engaged with the second cylinder (124), the door opening mechanism (100) further comprises an elastic member (150), the elastic member (150) is disposed in the second cylinder (124), and the elastic member (150) is elastically supported between the piston of the second piston rod (121) and the second cylinder (124), and the elastic member (150) can extend and contract along with the movement of the second piston rod (121).

9. The door opening mechanism according to claim 8, wherein the elastic member (150) is sleeved on the rod body of the second piston rod (121), and the elastic member (150) can extend and retract along the rod body of the second piston rod (121).

10. Semiconductor processing equipment (200) characterized by comprising a cavity (230), a door body (210) and the door opening mechanism (100) of any one of claims 1 to 9, wherein the cavity (230) is provided with an opening (220), and the door opening mechanism (100) is used for driving the door body (210) to move so as to block or avoid the opening (220).

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to semiconductor process equipment and a door opening mechanism.

Background

Semiconductor processing equipment is used for processing semiconductor workpieces. In the processing process, the semiconductor workpiece needs to enter and exit the semiconductor processing equipment, so that the door body of the semiconductor processing equipment needs to be opened and closed frequently. In the related art, the door opening mechanism firstly moves the door body out of the opening of the semiconductor chamber, then moves towards one side of the opening, and finally realizes door opening. The door closing process is reversed. In the process, the door body is required to act according to a specific sequence to achieve the purpose of opening and closing the door, so that the cost of electrical layout and the control difficulty are increased.

Disclosure of Invention

The invention discloses semiconductor process equipment and a door opening mechanism thereof, which aim to solve the problems of high electrical layout cost and high control difficulty of the conventional door opening mechanism.

In order to solve the problems, the invention adopts the following technical scheme:

the utility model provides a mechanism of opening door, is applied to semiconductor process equipment, semiconductor process equipment includes the door body, the mechanism of opening door is including the first telescopic machanism, second telescopic machanism and the door body connecting portion that connect gradually, door body connecting portion be used for with the door body links to each other, first telescopic machanism be used for to second telescopic machanism input fluid, in order to drive second telescopic machanism remove in the first direction and the door body removes in the second direction, wherein, the first direction with the second direction is crossing.

Furthermore, first telescopic machanism includes first piston rod, first piston rod with second telescopic machanism links to each other, and is used for driving second telescopic machanism is in the first direction removes, second telescopic machanism includes the second piston rod, the second piston rod with door body connecting portion link to each other, and is used for driving the door body is in the second direction removes.

Further, the first telescopic mechanism further comprises a first cylinder body, the first piston rod part is located in the first cylinder body, and the first cylinder body can be divided into a first rod cavity and a first non-rod cavity by the first piston rod; the second telescopic mechanism further comprises a second cylinder body, the second piston rod part is positioned in the second cylinder body, and the second piston rod can divide the second cylinder body into a second rod cavity and a second rodless cavity; the first rod cavity is communicated with the second rod cavity, the first rodless cavity is communicated with the second rodless cavity, the first rodless cavity is provided with a first fluid port, and the first rod cavity is provided with a second fluid port.

Furthermore, a first connecting channel is formed in the first piston rod and is communicated with the first rodless cavity and the second rodless cavity.

Furthermore, the end of the second cylinder body is an open end, the end of the first piston rod is blocked at the open end, and the end of the first piston rod, the second cylinder body and the second piston rod enclose the second rodless cavity.

Furthermore, a second connecting channel is formed in the first piston rod and is communicated with the second rod cavity and the first rod cavity.

Further, the second connecting channel is communicated with the second rod cavity through a connecting piece, and the connecting piece is connected between the first piston rod and the second cylinder body.

Furthermore, a part of the second piston rod is slidably disposed in the second cylinder and is in sliding fit with the second cylinder, the door opening mechanism further includes an elastic member, the elastic member is disposed in the second cylinder and is elastically supported between the piston of the second piston rod and the second cylinder, and the elastic member can extend and retract along with the movement of the second piston rod.

Furthermore, the elastic piece is sleeved on the rod body of the second piston rod, and the elastic piece can stretch along the rod body of the second piston rod.

The cavity is provided with an opening, and the door opening mechanism is used for driving the door body to move so as to plug or avoid the opening.

The technical scheme adopted by the invention can achieve the following beneficial effects:

through first telescopic machanism, the second telescopic machanism, door body connecting portion and the door body connect gradually, so that first telescopic machanism drives the second telescopic machanism and removes to the first direction, the door body removes to the second direction, make this application only through the motion mode that the assembly connection relation between the mechanical parts and first extensible member and second extensible member possess, just can realize the linkage of first telescopic machanism and second telescopic machanism, and then the switch action of the control door body, compare the electrical control mode and can save the electrical layout cost, and also can reduce the control degree of difficulty to door body switch action.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a storage state diagram of a door opening mechanism disclosed in the embodiment of the present invention;

FIG. 2 is an extended view of the door opening mechanism disclosed in the embodiments of the present invention;

FIG. 3 is a diagram of a semiconductor processing apparatus shut down according to an embodiment of the present invention;

fig. 4 is a diagram illustrating an open state of semiconductor processing equipment according to an embodiment of the present invention.

Description of reference numerals:

200-semiconductor process equipment,

210-door body, 220-opening, 230-cavity, 240-wafer box,

300-wafer, a,

100-a door opening mechanism,

110-a first telescopic mechanism,

111-first piston rod, 1111-first connecting channel, 1112-second connecting channel,

112-a first rod cavity, 1121-a second fluid port,

113-first lumen, 1131-first fluid port,

114-a first cylinder,

120-a second telescopic mechanism,

121-a second piston rod, 122-a second rod cavity,

123-a second rodless cavity,

124-the second cylinder body,

130-door body connecting part, 140-connecting part and 150-elastic part.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The technical solutions disclosed in the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

Referring to fig. 1 to 4, a door opening mechanism 100 is applied to a semiconductor processing apparatus 200. The semiconductor process apparatus 200 includes a chamber 230, a door 210, and a door opening mechanism 100. The cavity 230 is provided with an opening 220. The door opening mechanism 100 is used for driving the door body 210 to move so as to block or avoid the opening 220, so that a corresponding product to be processed is accessed to the cavity 230, for example, the semiconductor processing equipment 200 is a reaction furnace for processing a silicon wafer, a wafer box 240 is arranged in the cavity 230, and the wafer box 240 can store a wafer 300 inside.

As shown in fig. 1 and 2, the door opening mechanism 100 includes a first telescoping mechanism 110, a second telescoping mechanism 120 and a door body connecting portion 130, which are connected in sequence, and the door body connecting portion 130 is used for connecting with a door body 210.

The first telescoping mechanism 110 is used for inputting fluid (such as hydraulic oil, gas, etc.) to the second telescoping mechanism 120, so that the door opening mechanism 100 moves under the drive of the fluid, and the door 210 performs opening and closing actions along with the movement of the door opening mechanism 100, specifically as follows:

in the process that the first telescopic mechanism 110 inputs fluid to the second telescopic mechanism 120, the second telescopic mechanism 120 moves the whole body to the first direction, so as to drive the door body 210 to move to the first direction along with the second telescopic mechanism 120; meanwhile, the second telescopic mechanism 120 receives the driving force provided by the fluid, and will perform telescopic motion in the second direction, so as to drive the door 210 to move in the second direction along with the second telescopic mechanism 120.

In summary, the second telescoping mechanism 120 can drive the door 210 to move in the first direction and the second direction by fluid driving, so as to realize the opening and closing of the door 210. It should be noted that the first direction and the second direction intersect with each other, so that the door body 210 can move in two different directions.

In a further embodiment, to optimize the movement path of the door 210, the first direction and the second direction may be perpendicular to each other, for example, the second direction is a longitudinal movement direction of the door 210, the longitudinal movement direction is a penetrating direction of the opening 220, and the first direction is a lateral movement direction of the door 210. Therefore, the door body 210 can be separated from the cavity 230 by longitudinal movement along the second direction, and the door body 210 can be dislocated from the opening 220 by transverse movement along the first direction, so that access of processed parts such as the wafer 300 in the cavity 230 is facilitated, and opening and closing actions of the door body 210 are also facilitated to be controlled.

In an alternative, as shown in fig. 1 and 2, the door body connecting portion 130 may be detachably connected to the door body 210 to facilitate the assembly and disassembly of the door opening mechanism 100 on the semiconductor process equipment 200 for replacement and maintenance. More specifically, the door connecting portion 130 is specifically a vacuum adsorption mechanism, and the door connecting portion 130 is connected to the door 210 in a vacuum adsorption manner.

Further, as shown in fig. 1 and 2, the first telescoping mechanism 110 may include a first piston rod 111, and the first piston rod 111 is connected to the second telescoping mechanism 120 and is configured to move the second telescoping mechanism 120 in the first direction. The second telescopic mechanism may include a second piston rod 121, and the second piston rod 121 is connected to the door connecting portion 130 and is configured to drive the door 210 to move in the second direction.

In this way, the first telescoping mechanism 110 and the second telescoping mechanism 120 are both piston mechanisms, such as a cylinder assembly or a hydraulic cylinder assembly, the fluid may be compressed air adaptive to the cylinder assembly or hydraulic oil adaptive to the hydraulic cylinder assembly, and the fluid is input or output to the first telescoping mechanism 110 and the second telescoping mechanism 120, that is, the first telescoping mechanism 110 is extended and retracted in the first direction through the first piston rod 111, and the second telescoping mechanism 120 is extended and retracted in the second direction through the second piston rod 121, so that the door 210 is moved in the first direction and the second direction.

In a further embodiment, as shown in fig. 1 and 2, the first telescoping mechanism 110 may further include a first cylinder 114. The first piston rod 111 is partially located within the first cylinder 114, and the first piston rod 111 can divide the first cylinder 114 into a first rod chamber 112 and a first non-rod chamber 113. The rod body of first piston rod 111 is located in first rod chamber 112.

The second telescoping mechanism 120 may also include a second cylinder 124. The second piston rod 121 is partially located within the second cylinder 124, and the second piston rod 121 can divide the second cylinder 124 into a second rod chamber 122 and a second rodless chamber 123. The rod body of the second piston rod 121 is located in the second rod chamber 122.

The first rod cavity 112 is communicated with the second rod cavity 122, the first rodless cavity 113 is communicated with the second rodless cavity 123, the first rodless cavity 113 is provided with a first fluid port 1131, and the first rod cavity 112 is provided with a second fluid port 1121.

Thus, as shown in fig. 1 and fig. 3, when fluid is injected into the first fluid port 1131, the fluid flows into the first rod-less chamber 113, and the fluid drives the first piston rod 111 from the side of the first rod-less chamber 113, so that the first piston rod 111 extends in the first direction, and the second telescoping mechanism 120 is driven to move in the first direction; meanwhile, the fluid flows into the second rodless cavity 123 through the first rodless cavity 113, and the fluid drives the second piston rod 121 from the side of the second rodless cavity 123, so that the second piston rod 121 extends in the second direction, and the door body 210 moves in the second direction. When the first rodless cavity 113 and the second rodless cavity 123 are filled with fluid, the door opening mechanism 100 is in an extended state, so that the door body 210 blocks the opening 220.

As shown in fig. 2 and 4, when fluid is injected into the second fluid port 1121, the fluid flows into the first rod chamber 112, so that the fluid drives the first piston rod 111 from the first rod chamber 112 side, the first piston rod 111 retracts in the first direction, and the second telescoping mechanism 120 is driven to move in the first direction; meanwhile, the fluid flows into the second rod chamber 122 through the rod chamber 112, so that the fluid drives the second piston rod 121 from the second rod chamber 122 side, the second piston rod 121 retracts in the second direction, and the door 210 moves in the second direction. When the first rod chamber 112 and the second rod chamber 122 are filled with fluid, the first telescoping mechanism 110 is in a retracted state, so that the door 210 avoids the opening 220.

As described above, by selecting different fluid injection directions (injecting fluid into the first fluid port 1131 or the second fluid port 1121), the first telescoping mechanism 110 can be extended and retracted, and the opening and closing operation of the door 210 can be controlled, so that the control is easier and more convenient.

In another alternative, an external mechanism may be added to connect first telescoping mechanism 110. Specifically, the external connection mechanism is provided with a first end and a second end. The external mechanism stores fluid, and has a first end connected to the first fluid port 1131 and a second end connected to the second fluid port 1121. Thus, the external mechanism, the first end, the first rod chamber 112 and the second rod chamber 122 are connected in sequence to form a first loop; the external mechanism, the second end, the first rodless cavity 113, and the second rodless cavity 123 form a second circuit.

Thus, when the external mechanism inputs fluid into the first circuit, the first telescopic mechanism 110 can extend out, and the fluid in the first telescopic mechanism 110 flows back to the external mechanism through the second circuit; when the external mechanism inputs fluid into the second loop, the second telescoping mechanism 110 can be retracted, and the fluid in the first telescoping mechanism 110 flows back to the external mechanism through the first loop, so that the fluid is reused, and the use cost is reduced while the control is easy.

Alternatively, the first rod chamber 112 may be connected to the second rod chamber 122 via an external line, and the first rod chamber 113 may be connected to the second rod chamber 123 via an external line. The external pipeline may adopt a redundant design, so that when the second telescopic mechanism 120 is wholly transversely moved towards the first direction, the external pipeline may be adapted to the change of the relative position between the second telescopic mechanism 120 and the first telescopic mechanism 110 by stretching or bending.

In a more specific embodiment, as shown in fig. 1 and 2, first connection channel 1111 and second connection channel 1112 are formed in first piston rod 111. The first connection passage 1111 communicates the first rod chamber 113 and the second rod chamber 123. The second connecting passage 1112 communicates the second rod chamber 122 with the first rod chamber 112.

Compare the mode that connects in external pipeline like this, first connection channel 1111 and second connection channel 1112 can make the fluid circulate in the inside of mechanism of opening the door 100, need not to increase other annexes to make mechanism of opening the door 100's structure obtain simplifying, also can prevent to collide with external pipeline and cause fluid to reveal etc. unusually.

In a further embodiment, as shown in fig. 1 and 2, the second connecting channel 1112 may be in communication 122 with the second rod lumen via a connector 140. The connecting member 140 is connected between the first piston rod 111 and the second cylinder 124, such that the first rod chamber 112, the second connecting channel 1112, the connecting member 140 and the second rod chamber 122 are sequentially connected to achieve mutual communication, and the structural layout and the connection mode of the door opening mechanism 100 are more reasonable. It should be noted that the connection member 140 may be a hard tube or a hose for communication between the first piston rod 111 and the second cylinder 124.

In some embodiments, as shown in fig. 1 and 2, the end of the second cylinder 124 is an open end, and the end of the first piston rod 111 is sealed at the open end. The end of the first piston rod 111, the second cylinder 124 and the second piston rod 121 enclose a second rodless chamber 123. Such a layout and connection makes the structure of the door opening mechanism 100 more compact.

In an alternative, the first piston rod 111 and the second cylinder 124 may be connected to each other by an integrated design. And as a concrete scheme that this application chose for use, the tip of first piston rod 111 is provided with the blanking cover, and this blanking cover and first piston rod 111 carry out mode such as integrated into one piece, bolted connection, riveting and welding mutual fastening. The first piston rod 111 and the second cylinder 124 are connected by fitting the closing cap into the open end of the second cylinder 124.

In some embodiments, as shown in fig. 1 and 2, a portion of the second piston rod 121 is slidably disposed within the second cylinder 124 and is in sliding engagement with the second cylinder 124. The door opening mechanism 100 may further include an elastic member 150, and the elastic member 150 is provided inside the second cylinder 124. The elastic member 150 is elastically supported between the piston of the second piston rod 121 and the second cylinder 124.

The elastic element 150 may be any flexible structure unit capable of generating elastic deformation and can stretch and retract along with the movement of the second piston rod 121, for example, the elastic element 150 may be a spring and is sleeved on the rod body of the second piston rod 121. The elastic member 150 is arranged to sequentially move the first telescoping mechanism 110 and the second telescoping mechanism 120, and the principle is described in detail below by taking the elastic member 150 as a spring:

as shown in fig. 1 and 4, when the first telescoping mechanism 110 is in the retracted state, the elastic member 150 is in the extended state, and the door 210 is in the open state. At this time, fluid is injected into the first fluid port 1131, the fluid first passes through the first rod-less chamber 113, and the elastic member 150 prevents the fluid from passing through the second rod-less chamber 123, so that the fluid pushes the first piston rod 111 to extend along the first direction, and along with the extension of the first piston rod 111, the fluid in the first rod-containing chamber 112 is squeezed and discharged through the second fluid port 1121; the fluid then enters the second rodless chamber 123 through the first connection channel 1111 and pushes the second piston rod 121 to extend in the second direction, and with the extension of the second piston rod 121, the elastic member 150 is gradually compressed, and the fluid in the second rod chamber 122 is squeezed and enters the first rod chamber 112 through the second connection channel 1112 and is discharged through the second fluid port 1121.

Thus, as shown in fig. 2 and 3, the movement state of the door opening mechanism 100 is represented as: first, the first piston rod 111 moves along the first direction, i.e. moves laterally to the extended state, and drives the second telescoping mechanism 120 to move laterally as a whole. The second piston rod 121 is then moved in the second direction, i.e., longitudinally moved to the extended state, to effect switching of the door opening mechanism 100 to the extended state. Thus, the door 210 can first move to the front of the opening 220 and then move longitudinally to close the opening 220.

As shown in fig. 2 and 3, when the first telescoping mechanism 110 is in the extended state, the elastic member 150 is in the compressed state, and the door 210 is in the closed state. At this time, fluid is injected into the second fluid port 1121, the fluid is introduced into the first rod chamber 112, and the elastic member 150 will generate boosting force on the second piston rod 121 to induce fluid flow, so that the fluid in the first rod chamber 112 flows into the second rod chamber 122 through the second connecting channel 1112 and the connecting member 140 in sequence, and further pushes the second piston rod 121 to retract along the second direction, and along with the retraction of the second piston rod 121, the elastic member 150 gradually extends, and the fluid in the second rod-free chamber 123 is extruded, flows into the first rod chamber 113 through the first connecting channel 1111, and is discharged from the first fluid port 1131; fluid will then also enter first rod chamber 112 and push first piston rod 111 to retract in the first direction, and with the retraction of first piston rod 111, fluid in first rod chamber 113 will also be squeezed and expelled through first fluid port 1131.

Thus, as shown in fig. 2, the motion state of the door opening mechanism 100 is represented by: first, the second piston rod 121 moves in the second direction, i.e., moves longitudinally to the retracted state, and then the first piston rod 111 moves in the first direction, i.e., moves laterally to the retracted state, and drives the second retracting mechanism 120 to move laterally, so as to switch the door opening mechanism 100 to the retracted state. Thus, as shown in fig. 4, the door 210 can be moved longitudinally to separate from the opening 220 and then moved transversely to be dislocated from the opening 220, so as to avoid the opening 220.

In summary, through the arrangement of the elastic member 150, the first telescopic mechanism 110 and the second telescopic mechanism 120 can move in a specific sequence, and further the door body 210 can avoid and block the opening 220 according to a preset movement path, so that the control is more accurate.

Meanwhile, as an alternative, the elastic element 150 may also be disposed in the second rod chamber 122 and arranged around the second piston rod 121 in a plurality of ways, so as to enable the first telescopic mechanism 110 and the second telescopic mechanism 120 to move in sequence.

Meanwhile, the elastic element 150 may also be an elastic pad, an elastic strip, or the like to replace a spring, but the elastic element 150 is a spring and is sleeved on the rod body of the second piston rod 121, so that the rod body of the second piston rod 121 can guide the spring, that is, the spring can extend and retract along the rod body of the second piston rod 121, thereby avoiding the deflection and dislocation in the extending and retracting process.

In the above embodiments of the present invention, the difference between the embodiments is mainly described, and different optimization features between the embodiments can be combined to form a better embodiment as long as they are not contradictory, and further description is omitted here in view of brevity of the text.

The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.