阅读说明：本技术 一种防止金属污染的hf-pecvd法制石墨烯装置 (Prevent metal pollution's HF-PECVD legal system graphite alkene device ) 是由 刘柏祥 于 2020-07-28 设计创作，主要内容包括：一种防止金属污染的HF-PECVD法制石墨烯装置,包括机体以及设置于所述机体中的热丝管,所述热丝管中设有两个电极块,所述电极块之间连接有钨丝,所述热丝管左端设有与外界连通的进气口,所述机体中设有位于所述热丝管右侧的石墨烯腔,所述热丝管右端和所述石墨烯腔相连通,所述石墨烯腔右壁上设有与外界连通的出口,所述机体中设有位于所述石墨烯腔右侧的处理腔,所述处理腔左端设有与外界连通的入口,本装置可以自动除去沉淀石墨烯时产生的金属污染,并通过碘将污染变为碘化钨最后重新分解为钨并附着在钨丝上,同时本装置可以根据钨丝变化的重量从而加入不同量的碘蒸汽对污染物进行处理。(A device for preparing graphene by an HF-PECVD method for preventing metal pollution comprises a machine body and a hot wire tube arranged in the machine body, two electrode blocks are arranged in the hot wire tube, a tungsten wire is connected between the electrode blocks, an air inlet communicated with the outside is arranged at the left end of the hot wire tube, a graphene cavity positioned on the right side of the hot wire tube is arranged in the machine body, the right end of the hot wire tube is communicated with the graphene cavity, an outlet communicated with the outside is arranged on the right wall of the graphene cavity, a processing cavity positioned on the right side of the graphene cavity is arranged in the machine body, the left end of the processing cavity is provided with an inlet communicated with the outside, the device can automatically remove metal pollution generated during graphene precipitation, the pollution is changed into tungsten iodide through iodine, the tungsten iodide is finally decomposed again and attached to a tungsten filament, meanwhile, the device can add iodine vapor with different amounts to treat pollutants according to the changed weight of the tungsten filament.)

1. The utility model provides a prevent metallic contamination's HF-PECVD legal system graphite alkene device, includes the organism and sets up the hot wire pipe in the organism, its characterized in that: the hot wire tube is internally provided with two electrode blocks, a tungsten wire is connected between the electrode blocks, the left end of the hot wire tube is provided with an air inlet communicated with the outside, the machine body is internally provided with a graphene cavity positioned on the right side of the hot wire tube, the right end of the hot wire tube is communicated with the graphene cavity, the right wall of the graphene cavity is provided with an outlet communicated with the outside, the machine body is internally provided with a processing cavity positioned on the right side of the graphene cavity, the left end of the processing cavity is provided with an inlet communicated with the outside, the graphene cavity is internally provided with a first sliding chute of which the right end extends into the processing cavity, the first sliding chute is provided with a heating plate in a sliding manner, the heating plate is provided with a metal substrate, the machine body is internally provided with a transmission cavity positioned on the right side of the processing cavity, the transmission cavity is internally provided with a door opening mechanism which can control the opening and closing of the outlet and the, the left end of the motor shaft is in power connection with the motor shaft, a first gear is fixedly arranged on the motor shaft, a clamping mechanism is arranged in the transmission cavity and can clamp and convey a metal substrate into the treatment cavity, a gear shaft is rotatably arranged in the transmission cavity, a second gear meshed with the first gear is fixedly arranged on the gear shaft, a third gear is fixedly arranged on the gear shaft, a first bevel gear is fixedly arranged on the gear shaft, a reel shaft is rotatably arranged in the transmission cavity, a fourth gear meshed with the third gear is fixedly arranged on the reel shaft, a first reel is fixedly arranged on the reel shaft, a recovery cavity positioned on the upper side of the hot wire tube is arranged in the machine body, the recovery cavity is communicated with the treatment cavity through a tungsten iodide tube, a first chute is arranged on the bottom wall of the recovery cavity, and a first magnet is slidably arranged on the first chute, a first pull wire is connected between the first magnet and the first reel, a first spring is connected between the first magnet and the upper wall of the recovery cavity, an extrusion pipe is arranged in the recovery cavity, a fixed plate is arranged in the extrusion pipe, a second spring is connected with the upper ends of the fixed plate and the extrusion pipe, a second magnet is arranged at the lower end of the fixed plate, a second chute is arranged in the recovery cavity, a negative weight block is arranged on the second chute in a sliding manner, an iodine steam cavity positioned at the front side of the treatment cavity is arranged in the machine body, an exhaust pipe is arranged between the upper end of the iodine steam cavity and the extrusion pipe, a valve is arranged in the exhaust pipe, an iodine exhaust pipe is arranged between the lower end of the iodine steam cavity and the recovery cavity, a third chute is arranged in the iodine steam cavity, a push plate is arranged on the third chute in a sliding manner, and a third spring is connected between the push plate and the top wall of the iodine, an iodine steam pipe is arranged between the iodine steam cavity and the treatment cavity, and air pressure valves are arranged in the iodine steam pipe and the iodine discharging pipe.

2. The apparatus for preparing graphene by HF-PECVD method for preventing metal contamination according to claim 1, wherein: the left side of the machine body is provided with an electric sliding rail, a first sliding block is arranged on the electric sliding rail in a sliding mode, and the first sliding block can control the air inlet to be opened and closed.

3. The apparatus for preparing graphene by HF-PECVD method for preventing metal contamination according to claim 1, wherein: the door opening mechanism comprises a bevel gear shaft which is rotatably arranged in the transmission cavity, the bevel gear shaft is rotatably arranged between the front wall and the rear wall of the transmission cavity, a second bevel gear meshed with the first bevel gear is fixedly arranged on the bevel gear shaft, a second wire wheel is fixedly arranged on the bevel gear shaft, a fourth sliding groove is formed between the processing cavity and the graphene cavity, an iron door is slidably arranged on the fourth sliding groove, and a second pull wire is connected between the second wire wheel and the iron door.

4. The apparatus for preparing graphene by HF-PECVD method for preventing metal contamination according to claim 1, wherein: the clamping mechanism comprises a thread groove arranged in the transmission cavity, a threaded rod is arranged on the thread groove in a rotating mode, a long gear meshed with the first gear is fixedly arranged on the threaded rod, a fifth chute is arranged in the treatment cavity, a second sliding block is arranged on the fifth chute in a sliding mode, a third spring is connected between the second sliding block and the fifth chute, a clamping block is arranged at the left end of the second sliding block, and the clamping block is connected with the second sliding block through a hinged shaft.

Technical Field

The invention relates to the technical field of new material processing, in particular to a device for preparing graphene by an HF-PECVD method, which can prevent metal pollution.

Background

The HF-PECVD method utilizes high temperature (above 2000 ℃) generated by a hot wire (tantalum wire or tungsten wire) to excite plasma to deposit graphene on a metal substrate (copper foil or nickel foil is main), and has the advantages that the uniformity of a sample can be adjusted, but metal pollution is brought by the tantalum wire or the tungsten wire under the action of high temperature, high-quality graphene cannot be obtained generally, the tungsten wire is continuously consumed and cannot be reused, and the invention improves the problems.

Disclosure of Invention

The invention aims to solve the technical problem of providing a device for preparing graphene by an HF-PECVD method, which can prevent metal pollution and overcome the problems.

The invention is realized by the following technical scheme.

The invention relates to a device for preparing graphene by an HF-PECVD method for preventing metal pollution, which comprises a machine body and a hot wire tube arranged in the machine body, wherein two electrode blocks are arranged in the hot wire tube, a tungsten wire is connected between the electrode blocks, the left end of the hot wire tube is provided with an air inlet communicated with the outside, a graphene cavity positioned at the right side of the hot wire tube is arranged in the machine body, the right end of the hot wire tube is communicated with the graphene cavity, the right wall of the graphene cavity is provided with an outlet communicated with the outside, a treatment cavity positioned at the right side of the graphene cavity is arranged in the machine body, the left end of the treatment cavity is provided with an inlet communicated with the outside, the right end of the graphene cavity is provided with a first sliding groove extending into the treatment cavity, a heating plate is arranged on the first sliding groove in a sliding manner, a metal substrate is arranged on the heating plate, and a transmission cavity positioned at the right side, the device is characterized in that a door opening mechanism is arranged in the transmission cavity, the door opening mechanism can control the opening and closing of the outlet and the inlet, a motor is arranged on the right wall of the transmission cavity, the left end of the motor shaft is in power connection with a motor shaft, a first gear is fixedly arranged on the motor shaft, a clamping mechanism is arranged in the transmission cavity, the clamping mechanism can clamp and clamp the metal substrate and convey the metal substrate into the treatment cavity, a gear shaft is rotatably arranged in the transmission cavity, a second gear meshed with the first gear is fixedly arranged on the gear shaft, a third gear is fixedly arranged on the gear shaft, a first bevel gear is fixedly arranged on the gear shaft, a line shaft is rotatably arranged in the transmission cavity, a fourth gear meshed with the third gear is fixedly arranged on the line shaft, a first line wheel is fixedly arranged on the line shaft, and a recovery cavity positioned on the upper side of the hot wire tube is arranged in the machine body, the recycling chamber is communicated with the treatment chamber through a tungsten iodide tube, a first chute is arranged on the bottom wall of the recycling chamber, a first magnet is arranged on the first chute in a sliding manner, a first pull wire is connected between the first magnet and the first reel, a first spring is connected between the first magnet and the upper wall of the recycling chamber, an extrusion tube is arranged in the recycling chamber, a fixed plate is arranged in the extrusion tube, a second spring is connected with the upper ends of the fixed plate and the extrusion tube, a second magnet is arranged at the lower end of the fixed plate, a second chute is arranged in the recycling chamber, a negative weight block is arranged on the second chute in a sliding manner, an iodine steam chamber is arranged in the front side of the treatment chamber in the machine body, an exhaust pipe is arranged between the upper end of the iodine steam chamber and the extrusion tube, a valve is arranged in the exhaust pipe, and an iodine discharge pipe is arranged between the lower end of the iodine steam chamber and the recycling chamber, the iodine steam treatment device is characterized in that a third sliding groove is formed in the iodine steam cavity, a pushing plate is arranged on the third sliding groove in a sliding mode, a third spring is connected between the pushing plate and the top wall of the iodine steam cavity, an iodine steam pipe is arranged between the iodine steam cavity and the treatment cavity, and a pneumatic valve is arranged in the iodine steam pipe and the iodine discharging pipe.

Furthermore, an electric slide rail is arranged on the left side of the machine body, a first slide block is arranged on the electric slide rail in a sliding mode, and the first slide block can control the air inlet to be opened or closed.

Furthermore, the mechanism of opening the door sets up including rotating in the bevel gear axle in the transmission chamber, it is equipped with the bevel gear axle to rotate between the front and back wall in transmission chamber, the last fixed second bevel gear that is equipped with first bevel gear meshing of bevel gear axle, the last fixed second reel that is equipped with of bevel gear axle, the treatment chamber with be equipped with the fourth spout between the graphite alkene chamber, the fourth spout goes up to slide and is equipped with the iron gate, the second reel with be connected with the second between the iron gate and act as go-between.

Further, press from both sides and get mechanism including set up in the thread groove in the transmission chamber, it is equipped with the threaded rod to rotate on the thread groove, fixed be equipped with on the threaded rod with first gear engagement's long gear, be equipped with the fifth spout in the treatment chamber, it is equipped with the second slider to slide on the fifth spout, the second slider with be connected with the third spring between the fifth spout, the second slider left end is equipped with the clamp splice, the clamp splice with the second slider passes through the hinge coupling hub connection.

The invention has the beneficial effects that: the device can automatically remove metal pollution generated during graphene precipitation, and the pollution is changed into tungsten iodide through iodine, and the tungsten iodide is finally decomposed into tungsten again and attached to a tungsten filament, and meanwhile, the device can add iodine steam with different quantities to treat the pollutants according to the changed weight of the tungsten filament.

Drawings

In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the structure at A-A in FIG. 1;

FIG. 3 is a schematic view of the structure at B-B in FIG. 1;

fig. 4 is a schematic view of the structure at C-C in fig. 2.

Detailed Description

The invention will now be described in detail with reference to fig. 1-4, wherein for ease of description the orientations described hereinafter are now defined as follows: the up, down, left, right, and front-back directions described below correspond to the up, down, left, right, and front-back directions in the projection relationship of fig. 1 itself.

The device for preparing graphene by HF-PECVD method for preventing metal pollution, which is described in conjunction with the accompanying drawings 1-4, mainly comprises a machine body 10 and a hot wire tube 14 arranged in the machine body 10, wherein two electrode blocks 25 are arranged in the hot wire tube 14, a tungsten wire 26 is connected between the electrode blocks 25, an air inlet 15 communicated with the outside is arranged at the left end of the hot wire tube 14, a graphene cavity 13 positioned at the right side of the hot wire tube 14 is arranged in the machine body 10, the right end of the hot wire tube 14 is communicated with the graphene cavity 13, an outlet 51 communicated with the outside is arranged on the right wall of the graphene cavity 13, a processing cavity 12 positioned at the right side of the graphene cavity 13 is arranged in the machine body 10, an inlet 48 communicated with the outside is arranged at the left end of the processing cavity 12, a first sliding groove 70 extending from the right end to the processing cavity 12 is arranged in the graphene cavity 13, and a heating plate 53 is slidably arranged on the first sliding groove 70, the heating plate 53 is provided with a metal substrate 52, the machine body 10 is provided with a transmission cavity 11 positioned at the right side of the treatment cavity 12, the transmission cavity 11 is provided with a door opening mechanism 90, the door opening mechanism 90 can control the opening and closing of the outlet 51 and the inlet 48, the right wall of the transmission cavity 11 is provided with a motor 39, the left end of the motor shaft 38 is in power connection with a motor shaft 38, the motor shaft 38 is fixedly provided with a first gear 37, the transmission cavity 11 is provided with a clamping mechanism 91, the clamping mechanism 91 can clamp the metal substrate 52 and convey the metal substrate to the treatment cavity 12, the transmission cavity 11 is rotatably provided with a gear shaft 35, the gear shaft 35 is fixedly provided with a second gear 36 meshed with the first gear 37, the gear shaft 35 is fixedly provided with a third gear 34, the gear shaft 35 is fixedly provided with a first bevel gear 33, the transmission cavity 11 is rotatably provided with a line shaft 19, the wire reel 19 is fixedly provided with a fourth gear 29 engaged with the third gear 34, the wire reel 19 is fixedly provided with a first wire wheel 20, the machine body 10 is internally provided with a recovery cavity 18 positioned at the upper side of the hot wire tube 14, the recovery cavity 18 is communicated with the treatment cavity 12 through a tungsten iodide tube 27, the bottom wall of the recovery cavity 18 is provided with a first chute 23, the first chute 23 is provided with a first magnet 24 in a sliding manner, a first pull wire 21 is connected between the first magnet 24 and the first wire wheel 20, a first spring 22 is connected between the first magnet 24 and the upper wall of the recovery cavity 18, the recovery cavity 18 is internally provided with an extrusion tube 55, the extrusion tube 55 is internally provided with a fixing plate 57, the fixing plate 57 and the upper end of the extrusion tube 55 are connected with a second spring 54, the lower end of the fixing plate 57 is provided with a second magnet 58, the recovery cavity 18 is internally provided with a second chute 68, slide on the second spout 68 and be equipped with negative weight 59, be equipped with in the organism 10 and be located the iodine steam chamber 61 of processing chamber 12 front side, iodine steam chamber 61 upper end with be equipped with blast pipe 56 between the extrusion pipe 55, be equipped with valve 67 in the blast pipe 56, iodine steam chamber 61 lower extreme with retrieve and be equipped with between the chamber 18 and arrange iodine pipe 65, be equipped with third spout 64 in the iodine steam chamber 61, it is equipped with push pedal 63 to slide on the third spout 64, push pedal 63 with be connected with third spring 62 between the iodine steam chamber 61 roof, iodine steam chamber 61 with be equipped with iodine steam pipe 45 between the processing chamber 12, iodine steam pipe 45 with be equipped with pneumatic valve 66 in arranging iodine pipe 65.

Advantageously, the left side of the body 10 is provided with a power slide 17, the power slide 17 is slidably provided with a first slide block 16, and the first slide block 16 can control the opening and closing of the air inlet 15.

Advantageously, the door opening mechanism 90 includes a bevel gear shaft 31 rotatably disposed in the transmission cavity 11, the bevel gear shaft 31 is rotatably disposed between the front wall and the rear wall of the transmission cavity 11, a second bevel gear 30 engaged with the first bevel gear 33 is fixedly disposed on the bevel gear shaft 31, a second bevel gear 32 is fixedly disposed on the bevel gear shaft 31, a fourth sliding groove 74 is disposed between the processing cavity 12 and the graphene cavity 13, an iron gate 50 is slidably disposed on the fourth sliding groove 74, and a second pull wire 49 is connected between the second bevel gear 32 and the iron gate 50.

Advantageously, the gripping mechanism 91 comprises a threaded groove 42 disposed in the transmission chamber 11, a threaded rod 41 is rotatably disposed on the threaded groove 42, a long gear 40 engaged with the first gear 37 is fixedly disposed on the threaded rod 41, a fifth sliding groove 72 is disposed in the treatment chamber 12, a second sliding block 71 is slidably disposed on the fifth sliding groove 72, a third spring 69 is connected between the second sliding block 71 and the fifth sliding groove 72, a clamping block 44 is disposed at the left end of the second sliding block 71, and the clamping block 44 and the second sliding block 71 are connected by a hinge shaft 43.

The working steps are as follows: the first sliding block 16 slides along the electric sliding rail 17 to open the air inlet 15, the electrode block 25 is electrified and increases the temperature of the tungsten wire 26, methane enters the graphene cavity 13 through the air inlet 15 and the tungsten wire 26 to generate graphene on the metal substrate 52, after the manufacturing is completed, the first sliding block 16 slides along the electric sliding rail 17 to reclose the air inlet 15, the first magnet 24 is started to attract the electrode block 25, the motor 39 is started to drive the motor shaft 38, the first gear 37, the second gear 36, the gear shaft 35, the first bevel gear 33, the second bevel gear 30, the bevel gear shaft 31 and the second gear 32 to rotate and pull the second pull wire 49 to make the iron door 50 slide upwards along the fourth sliding groove 74 to open the outlet 51 and the inlet 48, the first gear 37 rotates to drive the long gear 40 and the threaded rod 41 to rotate, so as to push the second sliding block 71 to move downwards and leftwards along the fifth sliding groove 72 to a certain position, the clamping block 44 rotates along the hinged shaft 43 to clamp, when the gear shaft 35 rotates, the fourth gear 29, the wire shaft 19 and the first wire wheel 20 are driven to rotate, the first pull wire 21 is pulled to enable the first magnet 24, the electrode block 25 and the tungsten wire 26 to move upwards along the first sliding chute 23, the second magnet 58 releases the negative weight 59, when the first magnet 24 slides along the first sliding chute 23, the negative weight 59 is pushed to move along the second sliding chute 68 through the suction cup 60, when the first magnet 24 moves to a certain distance, the electrode block 25 is released by the first magnet 24, the electrode block 25 is attracted by the second magnet 58, the motor 39 rotates reversely to drive the motor shaft 38, the first gear 37, the second gear 36, the gear shaft 35, the first bevel gear 33, the second bevel gear 30, the bevel gear shaft 31 and the second wire wheel 32 to rotate, so that the entry 48 and the exit 51 are closed again under the action of gravity, the first gear 37 rotates to drive the long gear 40 and the threaded rod 41 to rotate, the threaded rod 41 and the second sliding block 71 are not abutted any more, the second sliding block 71 moves back to the initial position along the fifth sliding groove 72 under the action of the third spring 69, the gear shaft 35 drives the fourth gear 29, the line shaft 19 and the first line wheel 20 to rotate to loosen the first pull wire 21 so that the first magnet 24 returns to the initial position under the action of the first spring 22, the valve 67 is started to move upwards under the action of the second spring 54 due to the weight reduction of the tungsten filament 26, the fixing plate 57 and the second magnet 58 extrude the air in the extrusion pipe 55 into the iodine steam cavity 61 through the exhaust pipe 56, so that the extrusion push plate 63 is extruded to enable the push plate 63 to slide along the third sliding groove 64, the air pressure valve 66 is pressed to open the iodine steam in the iodine steam cavity 61 to enter the processing cavity 12 through the iodine steam pipe 45, the heating plate 53 is heated so that the tungsten on the metal substrate 52 reacts with the iodine steam to generate tungsten iodide, the generated tungsten iodide enters the recovery cavity 18 through the tungsten iodide pipe 27, because tungsten iodide is not stably decomposed to regenerate tungsten and iodine vapor on the tungsten wire 26, the generated iodine vapor is returned to the iodine vapor chamber 61 from the iodine discharge pipe 65, and then the motor 39 is started to replace the electrode block 25 and the heating plate 53 to the initial position.

The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.