Display panel, manufacturing method thereof and display device
阅读说明:本技术 一种显示面板、其制作方法及显示装置 (Display panel, manufacturing method thereof and display device ) 是由 张扬 闫梁臣 周斌 刘军 李伟 宋嘉文 潘洋 王轩昂 冯波 于 2019-11-19 设计创作,主要内容包括:本发明公开了一种显示面板、其制作方法及显示装置,该显示面板,包括:衬底基板,位于衬底基板之上驱动电路,以及位于驱动电路背离衬底基板一侧的平坦层,位于平坦层背离衬底基板一侧的像素界定层;平坦层在背离衬底基板的一侧具有凹槽,部分像素界定层位于凹槽内;凹槽在衬底基板上的正投影位于像素界定层的图形在衬底基板上的正投影的范围内。本发明实施例提供的上述显示面板中,通过在平坦层背离衬底基板的一侧设置凹槽,并且部分像素界定层位于凹槽内,从而增大了像素界定层与平坦层之间的接触面积,防止像素界定层脱落。(The invention discloses a display panel, a manufacturing method thereof and a display device, wherein the display panel comprises: the pixel structure comprises a substrate base plate, a driving circuit, a flat layer and a pixel defining layer, wherein the driving circuit is positioned on the substrate base plate; the flat layer is provided with a groove at one side far away from the substrate, and part of the pixel defining layer is positioned in the groove; the orthographic projection of the groove on the substrate base plate is positioned in the range of the orthographic projection of the pattern of the pixel defining layer on the substrate base plate. In the display panel provided by the embodiment of the invention, the groove is arranged on one side of the flat layer, which is far away from the substrate, and part of the pixel defining layer is positioned in the groove, so that the contact area between the pixel defining layer and the flat layer is increased, and the pixel defining layer is prevented from falling off.)
1. A display panel, comprising: the pixel structure comprises a substrate, a driving circuit, a flat layer and a pixel definition layer, wherein the driving circuit is positioned on the substrate, the flat layer is positioned on one side, away from the substrate, of the driving circuit, and the pixel definition layer is positioned on one side, away from the substrate, of the flat layer;
the flat layer is provided with a groove on one side facing away from the substrate base plate, and part of the pixel defining layer is positioned in the groove;
the orthographic projection of the groove on the substrate base plate is positioned in the range of the orthographic projection of the pattern of the pixel defining layer on the substrate base plate.
2. The display panel of claim 1, further comprising: a plurality of first electrodes between the planarization layer and the pixel defining layer;
the orthographic projection of the groove on the substrate base plate and the orthographic projection of the first electrode on the substrate base plate are not overlapped.
3. The display panel according to claim 2, wherein an orthographic projection of the groove on the substrate base plate surrounds an orthographic projection of the first electrode on the substrate base plate.
4. A display panel as claimed in claim 3 characterized in that at least two of the recesses are provided around the same first electrode.
5. The display panel according to claim 3, wherein each of the first electrodes is surrounded by the groove.
6. The display panel of claim 2, further comprising: a passivation layer between the driving circuit and the planarization layer, and a plurality of via holes penetrating the planarization layer and the passivation layer;
the first electrode is electrically connected with the driving circuit through the through hole;
the orthographic projection of the through hole on the substrate base plate and the orthographic projection of the groove on the substrate base plate are not overlapped.
7. A method for manufacturing the display panel according to any one of claims 1 to 6, comprising:
forming each film layer in the driving circuit on the substrate;
forming a flat layer on the driving circuit, and patterning the flat layer to form a groove on one side of the flat layer, which is far away from the substrate;
a pattern of pixel definition layers is formed over the planarization layer.
8. The method of manufacturing of claim 7, further comprising, prior to said forming a planar layer over said driver circuit:
forming a passivation layer over the driving circuit;
the patterning the planarization layer includes:
and forming the groove and a through hole penetrating through the flat layer and the passivation layer by adopting the same composition process.
9. The method of manufacturing of claim 7, further comprising, prior to said forming a planar layer over said driver circuit:
forming a passivation layer over the driving circuit;
the patterning the planarization layer includes:
forming a photoresist layer over the planarization layer;
exposing the photoresist layer by using a half-tone mask to form a first via hole and a first pit; the first via hole corresponds to a position of a through hole penetrating through the flat layer and the passivation layer to be formed, and the first pit corresponds to a position of a groove in the flat layer to be formed;
etching the flat layer and the passivation layer to form a second pit penetrating through the flat layer and part of the passivation layer;
ashing the photoresist layer to form a second through hole at the position of the first pit;
and etching the flat layer to form the groove and etching the passivation layer to form a through hole penetrating through the flat layer and the passivation layer by adopting the same composition process.
10. A display device, comprising: a display panel according to any one of claims 1 to 6.
Technical Field
The present invention relates to the field of display technologies, and in particular, to a display panel, a manufacturing method thereof, and a display device.
Background
Since an Organic Light-Emitting Diode (OLED) has the advantages of self-luminescence, high contrast, fast response speed, flexible display, simple process, and the like, the OLED is gradually becoming the mainstream of display industry development. At present, an organic electroluminescent layer in an OLED display has two manufacturing methods, namely an evaporation method and an ink-jet printing method, wherein the ink-jet printing method is suitable for macromolecular luminescent materials and micromolecular luminescent materials, the material utilization rate is high, the equipment cost is low, the high yield is realized, and the large-scale and large-size product production is easier.
However, in order to achieve a good display effect, it is necessary to form a light emitting layer having a uniform thickness in a pixel region, which requires a very good flatness of the pixel region. The flat layer is generally made of an organic siloxane resin material with high polarity, in addition, a pixel defining layer is also arranged above the flat layer for defining a pixel area and preventing ink from overflowing to the periphery, the material of the pixel defining layer is generally a fluorine-containing material with low polarity, and the adhesion between the pixel defining layer and the flat layer is insufficient due to the large polarity difference between the pixel defining layer and the flat layer, so that the pixel defining layer is easy to fall off, and the display quality is influenced.
Disclosure of Invention
The embodiment of the invention provides a display panel, a manufacturing method thereof and a display device, which are used for solving the problem that a pixel defining layer is easy to fall off due to insufficient adhesion between the pixel defining layer and a flat layer in the prior art.
In a first aspect, an embodiment of the present invention provides a display panel, including: the pixel structure comprises a substrate, a driving circuit, a flat layer and a pixel definition layer, wherein the driving circuit is positioned on the substrate, the flat layer is positioned on one side, away from the substrate, of the driving circuit, and the pixel definition layer is positioned on one side, away from the substrate, of the flat layer;
the flat layer is provided with a groove on one side facing away from the substrate base plate, and part of the pixel defining layer is positioned in the groove;
the orthographic projection of the groove on the substrate base plate is positioned in the range of the orthographic projection of the pattern of the pixel defining layer on the substrate base plate.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the display panel further includes: a plurality of first electrodes between the planarization layer and the pixel defining layer;
the orthographic projection of the groove on the substrate base plate and the orthographic projection of the first electrode on the substrate base plate are not overlapped.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, an orthogonal projection of the groove on the substrate base surrounds an orthogonal projection of the first electrode on the substrate base.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, at least two grooves are disposed around the same first electrode.
In a possible implementation manner, in the display panel provided by the embodiment of the present invention, each of the first electrodes is surrounded by the groove.
In a possible implementation manner, in the display panel provided in the embodiment of the present invention, the display panel further includes: a passivation layer between the driving circuit and the planarization layer, and a plurality of via holes penetrating the planarization layer and the passivation layer;
the first electrode is electrically connected with the driving circuit through the through hole;
the orthographic projection of the through hole on the substrate base plate and the orthographic projection of the groove on the substrate base plate are not overlapped.
In a second aspect, an embodiment of the present invention further provides a method for manufacturing the display panel, including:
forming each film layer in the driving circuit on the substrate;
forming a flat layer on the driving circuit, and patterning the flat layer to form a groove on one side of the flat layer, which is far away from the substrate;
a pattern of pixel definition layers is formed over the planarization layer.
In a possible implementation manner, in the above manufacturing method provided in an embodiment of the present invention, before forming a planarization layer over the driving circuit, the method further includes:
forming a passivation layer over the driving circuit;
the patterning the planarization layer includes:
and forming the groove and a through hole penetrating through the flat layer and the passivation layer by adopting the same composition process.
In a possible implementation manner, in the above manufacturing method provided in an embodiment of the present invention, before forming a planarization layer over the driving circuit, the method further includes:
forming a passivation layer over the driving circuit;
the patterning the planarization layer includes:
forming a photoresist layer over the planarization layer;
exposing the photoresist layer by using a half-tone mask to form a first via hole and a first pit; the first via hole corresponds to a position of a through hole penetrating through the flat layer and the passivation layer to be formed, and the first pit corresponds to a position of a groove in the flat layer to be formed;
etching the flat layer and the passivation layer to form a second pit penetrating through the flat layer and part of the passivation layer;
ashing the photoresist layer to form a second through hole at the position of the first pit;
and etching the flat layer to form the groove and etching the passivation layer to form a through hole penetrating through the flat layer and the passivation layer by adopting the same composition process.
In a third aspect, an embodiment of the present invention further provides a display device, including: the display panel is provided.
The invention has the following beneficial effects:
the display panel, the manufacturing method thereof and the display device provided by the embodiment of the invention comprise the following steps: the pixel structure comprises a substrate base plate, a driving circuit, a flat layer and a pixel defining layer, wherein the driving circuit is positioned on the substrate base plate; the flat layer is provided with a groove at one side far away from the substrate, and part of the pixel defining layer is positioned in the groove; the orthographic projection of the groove on the substrate base plate is positioned in the range of the orthographic projection of the pattern of the pixel defining layer on the substrate base plate. In the display panel provided by the embodiment of the invention, the groove is arranged on one side of the flat layer, which is far away from the substrate, and part of the pixel defining layer is positioned in the groove, so that the contact area between the pixel defining layer and the flat layer is increased, and the pixel defining layer is prevented from falling off.
Drawings
Fig. 1 is a schematic top view of a display panel according to an embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view taken along dashed line L in FIG. 1;
FIGS. 3 to 7 are schematic top views of display panels before forming a pixel defining layer;
fig. 8 is a flowchart illustrating a method for manufacturing the display panel according to an embodiment of the present invention;
fig. 9a to 9d are schematic structural diagrams of steps in the above-described manufacturing method according to an embodiment of the present invention;
fig. 10 is a second flowchart of a method for manufacturing the display panel according to the embodiment of the invention;
fig. 11a to 11d are schematic structural diagrams of steps in the above-described manufacturing method according to an embodiment of the present invention.
Detailed Description
Aiming at the problem that the pixel defining layer is easy to fall off due to insufficient adhesion between the pixel defining layer and the flat layer in the prior art, the embodiment of the invention provides a display panel, a manufacturing method thereof and a display device.
Embodiments of a display panel, a method for manufacturing the same, and a display device according to embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The thicknesses and shapes of the various film layers in the drawings are not to be considered true proportions, but are merely intended to illustrate the present invention.
In a first aspect, an embodiment of the present invention provides a display panel, fig. 1 is a schematic top view structure diagram of the display panel provided in the embodiment of the present invention, and fig. 2 is a schematic cross-sectional diagram of a dotted line L in fig. 1, as shown in fig. 1 and fig. 2, including: a
the
the orthographic projection of the groove U on the
In the display panel provided by the embodiment of the invention, the groove is arranged on one side of the flat layer, which is far away from the substrate, and part of the pixel defining layer is positioned in the groove, so that the contact area between the pixel defining layer and the flat layer is increased, and the pixel defining layer is prevented from falling off.
The display panel provided by the embodiment of the invention can be an organic electroluminescence (OLED) display panel, so that the display panel provided by the embodiment of the invention can realize a flexible, bendable or foldable display panel besides a conventional display function.
The display panel may include a plurality of pixel units, each of the drawings in the embodiment of the present invention is only illustrated by taking a complete pixel unit as an example, and when the display panel is implemented in detail, the number of the pixel units may be set according to actual requirements, which is not limited herein.
In order to realize the screen display, the display panel may further include: a plurality of
The
Referring to fig. 1 and 2, a driving
The
In addition, the orthographic projection of the groove U in the
The groove U is arranged on the side, away from the
In specific implementation, as shown in fig. 1 and fig. 2, the display panel provided in the embodiment of the present invention may further include: a plurality of
the orthographic projection of the groove U on the
As shown in fig. 1, the orthographic projection of the opening T in the
In order to more clearly illustrate the position and shape of the groove U, fig. 3 to 7 show schematic top-view structures of the display panel before forming the pixel defining layer, and the shape of the pattern of the pixel defining layer can refer to the schematic top-view structure of the display panel shown in fig. 1.
In practical applications, as shown in fig. 3, in the display panel provided by the embodiment of the present invention, an orthographic projection of the groove U on the substrate base surrounds an orthographic projection of the
The groove U is in a ring structure around the
Further, in the display panel provided in the embodiment of the present invention, as shown in fig. 4, at least two grooves U are disposed around the same
By arranging at least two circles of grooves U around the
In practical implementation, in the display panel provided in the embodiment of the present invention, each of the first electrodes is surrounded by the groove. The grooves are arranged around each first electrode, so that the contact area between the pixel defining layer and the flat layer can be further increased, the bonding force between the pixel defining layer and the flat layer can be further increased, the grooves can be uniformly distributed in the display panel, the bonding force between the pixel defining layer and the flat layer is uniformly distributed, and the pixel defining layer is less prone to falling off.
In practical application, the number of turns of the grooves arranged around each first electrode is the same, or the number of turns of the grooves arranged around the first electrode in the region where the first electrode is easy to fall off is large, the number of the grooves can be arranged according to practical requirements, and the number and distribution of the grooves are not limited.
In addition, the orthographic projection of the groove on the substrate may be set to half surround the orthographic projection of the first electrode on the substrate, as shown in fig. 5, the groove U may be set to surround the
In addition, as shown in fig. 7, the groove U may also be a strip structure located on one side of the
In fig. 3 to fig. 7, the grooves are illustrated as being located at the edge of the first electrode, and in practical applications, the first electrode and the grooves may have a certain distance therebetween, which is not limited herein.
Specifically, in order to guarantee that the groove can effectively increase the binding force between the pixel defining layer and the flat layer, the width of the groove can be set to be within the range of 0.5-5 um, and the depth can be set to be within the range of 0.1-4 um.
In practical applications, as shown in fig. 1 and fig. 2, the display panel provided in the embodiment of the present invention may further include: a
the
the orthographic projection of the through hole V on the
The
The groove U is set to avoid the position of the through hole V, so that the through hole V can be prevented from affecting the contact between the pixel defining layer and the planarization layer, and the groove U can be prevented from affecting the electrical connection between the
In a second aspect, based on the same inventive concept, an embodiment of the present invention further provides a manufacturing method of the display panel. Because the principle of the manufacturing method for solving the problems is similar to that of the display panel, the implementation of the manufacturing method can be referred to that of the display panel, and repeated details are not repeated.
As shown in fig. 8, the method for manufacturing the display panel according to the embodiment of the present invention includes:
s201, forming each film layer in a driving circuit on a substrate;
s202, forming a flat layer on the driving circuit, and patterning the flat layer to form a groove on one side of the flat layer, which is far away from the substrate;
s203, forming a pattern of a pixel defining layer on the flat layer.
According to the manufacturing method of the display panel, provided by the embodiment of the invention, the flat layer is patterned to form the groove on the side, away from the substrate, of the flat layer, so that part of the pixel defining layer formed subsequently can be embedded into the groove, the contact area between the pixel defining layer and the flat layer is increased, the bonding force between the pixel defining layer and the flat layer is increased, and the pixel defining layer is effectively prevented from falling off.
In step S201, referring to fig. 9a, each film layer in the
Specifically, in the manufacturing method provided by the embodiment of the present invention, before the step S202, the manufacturing method may further include:
referring to fig. 9a, a
the above step S202 can have various implementations, and two specific implementations are described as examples below.
The implementation mode is as follows:
in step S202, the patterning of the planarization layer includes:
and forming a groove and a through hole penetrating through the flat layer and the passivation layer by adopting the same patterning process. The grooves and the through holes are manufactured by the same composition process, so that a mask can be saved, and a manufacturing process can be saved, thereby saving the manufacturing cost.
Specifically, as shown in fig. 9b, a
As shown in fig. 9d, after the step S202 and before the step S203, the method may further include: a plurality of
The implementation mode two is as follows:
as shown in fig. 10, in step S202, the patterning of the planarization layer includes:
s301, referring to fig. 11a, forming a
s302, referring to fig. 11b, exposing the
by using the halftone mask, it is possible to set the transmittance of the regions corresponding to the through-holes V and the grooves U to be different, and thus, when the
S303, referring to fig. 11c, etching the
Only the
In the actual process, the dry etching gas ratio and the dry etching time of the dry etching process in step S303 need to be controlled to ensure that the
S304, referring to fig. 11d, performing an ashing process on the
S305, etching the
In the second implementation, the first via W1 corresponding to the via V to be formed is first formed by exposure in step S302, so that the
In step S203, a pixel defining layer is formed on the planarization layer, and a portion of the pixel defining layer is embedded into the groove on the surface of the planarization layer, so as to increase the bonding force between the pixel defining layer and the planarization layer, a layer of photoresist is formed on the pixel defining layer, and after the photoresist is exposed, the pixel defining layer is etched to obtain a plurality of openings in the pixel defining layer, and the orthogonal projection of the openings in the pixel defining layer on the substrate and the orthogonal projection of the groove on the planarization layer on the substrate are not overlapped with each other, so as to obtain the structure shown in fig. 2.
In a third aspect, based on the same inventive concept, an embodiment of the present invention provides a display device, including the above display panel, where the display device may be applied to any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, and a navigator. Since the principle of the display device to solve the problem is similar to that of the display panel, the display device can be implemented by the display panel, and repeated descriptions are omitted.
In the display panel, the manufacturing method thereof and the display device provided by the embodiment of the invention, the groove is arranged on one side of the flat layer, which is far away from the substrate, and part of the pixel defining layer is positioned in the groove, so that the contact area between the pixel defining layer and the flat layer is increased, and the pixel defining layer is prevented from falling off.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
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