阅读说明：本技术 加工机及压力调整方法 (Processing machine and pressure adjusting method ) 是由 石井雄大 见波弘志 于 2020-03-19 设计创作，主要内容包括：本发明涉及加工机及压力调整方法。加工机(10)包括：支承驱动轴(12)的静压轴承(14)；根据伺服电动机(18A)的旋转而输出用于向静压轴承(14)供给的流体的流体输出部(18)；检测从流体输出部(18)输出的流体的物理量的传感器(20)；和根据流体的物理量来控制伺服电动机(18A)的转速的控制部(22)。(The invention relates to a processing machine and a pressure adjusting method. The processing machine (10) comprises: a hydrostatic bearing (14) for supporting the drive shaft (12); a fluid output unit (18) that outputs fluid for supplying to the hydrostatic bearing (14) in accordance with the rotation of the servo motor (18A); a sensor (20) that detects a physical quantity of the fluid output from the fluid output unit (18); and a control unit (22) for controlling the rotational speed of the servo motor (18A) in accordance with the physical quantity of the fluid.)

1. A processing machine that processes a processing object, the processing machine comprising:

a hydrostatic bearing supporting the drive shaft;

a fluid output unit that outputs fluid to be supplied to the hydrostatic bearing in accordance with rotation of the servo motor;

a sensor that detects a physical quantity of the fluid output from the fluid output portion; and

and a control unit that controls the rotational speed of the servo motor based on the physical quantity of the fluid.

2. The converting machine of claim 1,

the physical quantity includes at least one of pressure, flow rate, and temperature.

3. Processing machine according to claim 1 or 2,

having an electric motor for driving the drive shaft,

the control unit controls the rotation speed of the servo motor based on a current value supplied to the motor and a physical quantity of the fluid.

4. A processing machine according to any one of claims 1 to 3,

an atmosphere sensor for detecting a physical amount of atmosphere around the processing machine,

the control unit controls the rotation speed of the servo motor based on the physical quantity of the atmosphere and the physical quantity of the fluid.

5. A pressure adjustment method for a processing machine having a fluid output unit that outputs a fluid to be supplied to a hydrostatic bearing that supports a drive shaft, in accordance with rotation of a servo motor, the pressure adjustment method comprising:

an acquisition step of acquiring a physical quantity of the fluid output from the fluid output unit; and

a control step of controlling a rotation speed of the servo motor based on the physical quantity of the fluid acquired in the acquisition step.

6. The pressure adjustment method according to claim 5,

the physical quantity includes at least one of pressure, flow rate, and temperature.

7. The pressure adjustment method according to claim 5 or 6,

in the acquiring step, a value of a current supplied to a motor for driving the drive shaft and a physical quantity of the fluid are acquired,

in the controlling step, the rotation speed of the servo motor is controlled based on the current value and the physical quantity of the fluid.

8. The pressure adjustment method according to any one of claims 5 to 7,

in the acquiring step, a physical quantity of the atmosphere around the processing machine and a physical quantity of the fluid are acquired,

in the controlling step, the rotation speed of the servo motor is controlled based on the physical quantity of the atmosphere and the physical quantity of the fluid.

Technical Field

The present invention relates to a processing machine and a pressure adjustment method for adjusting the pressure of fluid supplied to a hydrostatic bearing that supports a drive shaft.

Background

In a processing machine, a drive shaft may be supported by floating it by a fluid. In this case, the drive shaft is supported by a hydrostatic bearing. Japanese patent laying-open No. 2018-025253 discloses a fluid control system that supplies fluid to a hydrostatic bearing so that the pressure of the fluid supplied to the hydrostatic bearing is maintained constant.

Disclosure of Invention

However, the state of the fluid floating up the drive shaft may change depending on heat generation of a motor for driving the drive shaft, environmental changes around the drive shaft, and the like. If the state of the fluid changes slightly, the distance between the shaft and the hydrostatic bearing changes, and thus the machining accuracy tends to become unstable. In particular, this tendency is easily conspicuous when the object is machined in accordance with a command of 100nm or less specified by the machining program.

Therefore, an object of the present invention is to provide a processing machine and a pressure adjustment method that can suppress the instability of processing accuracy due to a change in the state of a fluid.

A first aspect of the present invention is a processing machine that processes a processing object, including: a hydrostatic bearing supporting the drive shaft; a fluid output unit that outputs fluid for supplying to the hydrostatic bearing in accordance with rotation of a servo motor; a sensor that detects a physical quantity of the fluid output from the fluid output portion; and a control unit that controls the rotational speed of the servo motor in accordance with the physical amount of the fluid.

A second aspect of the present invention is a pressure adjustment method for a processing machine having a fluid output unit that outputs a fluid to be supplied to a hydrostatic bearing that supports a drive shaft, in accordance with rotation of a servo motor, the pressure adjustment method including: an acquisition step of acquiring a physical quantity of the fluid output from the fluid output unit; and a control step of controlling the rotation speed of the servo motor based on the physical quantity of the fluid acquired in the acquisition step.

According to the present invention, even if the physical quantity of the fluid output from the fluid output portion changes, the fluid of the output quantity corresponding to the physical quantity is supplied from the fluid output portion to the hydrostatic bearing, and therefore, the instability of the machining accuracy due to the change in the state of the fluid can be suppressed.

The above objects, features and advantages will be readily apparent from the following description of the embodiments with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic diagram showing the structure of a processing machine.

Fig. 2 is a graph showing a relationship between the pressure and the temperature of the fluid.

Fig. 3 is a diagram showing a relationship between the pressure of the fluid and the rotational speed of the servo motor.

Fig. 4 is a flowchart showing a flow of the pressure adjustment process performed by the control unit.

Fig. 5 is a diagram showing a processing machine according to modification 3.

Fig. 6 is a diagram showing a processing machine according to modification 4.

Detailed Description

Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.