阅读说明：本技术 一种三面导向的液体静压超精密滑台 (Three-surface-oriented hydrostatic pressure ultra-precise sliding table ) 是由 谷秋梅 于 2019-12-13 设计创作，主要内容包括：本发明涉及一种三面导向的液体静压超精密移动滑台,其包括导轨座和滑台本体,滑台本体由上溜板组件、两件侧溜板组件和下溜板组件通过连接件连接安装固定而成。在上溜板、下溜板以及侧溜板的表面上均设置有多个矩形沉槽,在每个沉槽的中央安装有节流器,在沉槽的台肩上安装有O型密封圈用于实现节流器和各个溜板之间的连接密封,每个节流器的正后方都设有沉头通孔,其上安装有堵头,在各个溜板的两端设置有油孔与所有的节流器贯通,且每个油孔上安装有堵头,以在各个溜板组件上实现闭环油路系统。发明的优点是：结构合理,使用效果好,可以与超精密机床系统相配合,可以实现三面导向的零接触式精确直线运,实现精确的位置定位。(The invention relates to a three-surface-oriented hydrostatic ultra-precise movable sliding table which comprises a guide rail seat and a sliding table body, wherein the sliding table body is formed by connecting, installing and fixing an upper sliding plate assembly, two side sliding plate assemblies and a lower sliding plate assembly through connecting pieces. A plurality of rectangular sinking grooves are formed in the surfaces of the upper slide carriage, the lower slide carriage and the side slide carriages, a throttleer is installed in the center of each sinking groove, an O-shaped sealing ring is installed on a circular bead of each sinking groove and used for realizing connection and sealing between the throttleer and each slide carriage, a countersunk through hole is formed right behind each throttleer and provided with a plug, oil holes are formed in the two ends of each slide carriage and communicated with all the throttleers, and each oil hole is provided with a plug so as to realize a closed-loop oil circuit system on each slide carriage assembly. The invention has the advantages that: the three-side guide zero-contact type precise linear motion machine tool has the advantages of reasonable structure, good use effect, and capability of being matched with an ultra-precise machine tool system, realizing zero-contact type precise linear motion with three-side guide, and realizing precise position positioning.)

1. The utility model provides a hydrostatic pressure ultra-precision slip table of trilateral direction which characterized in that: comprises a guide rail seat (1) and a sliding table body (2), the cross section of the guide rail seat (1) is T-shaped, a groove is arranged in the middle of the guide rail seat for installing a driving device and a position feedback device, the sliding table body (2) is formed by connecting, installing and fixing an upper slide carriage assembly (3), two side slide carriage assemblies (4) and a lower slide carriage assembly (5) through connecting pieces,

the surface of an upper slide carriage (3-1) of the upper slide carriage assembly (3) is provided with a plurality of rectangular sinking grooves, the center of each sinking groove is provided with an upper slide carriage throttleer (3-3), a shoulder of each sinking groove is provided with an upper slide carriage O-shaped sealing ring (3-2) for realizing the connection and sealing of the upper slide carriage throttleer (3-3) and the upper slide carriage (3-1), a countersunk through hole is arranged right behind each upper slide carriage throttleer (3-3), a plug (3-4) is arranged on each countersunk through hole, oil holes are arranged on the peripheral side surface of each upper slide carriage (3-1) and communicated with all the upper slide carriage throttleers (3-3), and a plug (3-4) is arranged on each oil hole to realize a closed-loop oil circuit system on the upper slide carriage assembly;

the surface of a side slide carriage (4-1) of the side slide carriage assembly (4) is also provided with a plurality of rectangular sinking grooves, the center of each sinking groove is provided with a side slide carriage throttleer (4-3), a shoulder of each sinking groove is provided with a side slide carriage O-shaped sealing ring (4-2) for realizing the connection and sealing of the side slide carriage throttleer (4-3) and the side slide carriage (4-1), a sunk through hole is arranged right behind each throttleer and provided with a plug, oil holes are arranged at two ends of the side slide carriage (4-1) and communicated with all the side slide carriage throttleers (4-3), and the plugs are arranged on the oil holes to realize a closed-loop oil circuit system on the side slide carriage assembly;

the oil-water circulation type closed-loop oil circuit system is characterized in that a plurality of rectangular sinking grooves are formed in a lower slide plate (5-1) of the lower slide plate assembly (5), a lower slide plate throttle (5-3) is installed in the center of each sinking groove, a lower slide plate O-shaped sealing ring (5-2) is installed on a shoulder of each sinking groove and used for achieving connection and sealing of the lower slide plate throttle (5-3) and the lower slide plate (5-1), a sinking head through hole is formed right behind each throttle and provided with a plug, oil holes are formed in two ends of the lower slide plate (5-1) and communicated with all the lower slide plate throttles, and each oil hole is provided with a plug so as to achieve a closed-loop oil circuit system on the lower slide plate assembly.

2. The hydrostatic ultra-precision slide of claim 1, wherein: the upper slide carriage restrictor (3-3), the side slide carriage restrictor (4-3) and the lower slide carriage restrictor (5-3) are all arranged in counter bores at the centers of the counter grooves at corresponding positions through threaded knobs.

3. The hydrostatic ultra-precision slide of claim 1, wherein: the surface of the upper slide carriage (3-1) is provided with 8 rectangular sinking grooves, and the surfaces of the side slide carriage (4-1) and the lower slide carriage (5-1) are provided with 4 rectangular sinking grooves.

4. The hydrostatic ultra-precision slipway of claim 1 or 2, characterized in that: the side slide carriage assembly (4) is also provided with 8 sealing ring grooves at the oil hole ports of the upper slide carriage assembly and the lower slide carriage assembly (4-1), and a side plate O-shaped sealing ring (4-4) is arranged in the grooves and used for installing and fixing the side slide carriage assembly (4-1), the upper slide carriage assembly (3) and the lower slide carriage assembly (5) to form an oil path sealing closed ring.

Technical Field

The invention relates to an ultra-precise mobile positioning device, in particular to a three-surface-oriented hydrostatic pressure ultra-precise mobile sliding table.

Background

With the rapid development of industrial technology, the requirements on the design and manufacture of ultra-precise moving sliding tables are higher and higher, and with the progress of servo control technology and sensing technology, a machine tool can execute precise movement in a submicron level under the control of a numerical control system. Therefore, the requirements for the structure of the movable slide table matched with the machine tool are higher and higher. The existing movable sliding table is simple in structure and poor in using effect, and cannot meet the using requirements of the existing machine tool. Therefore, a new technical solution should be provided to solve the above problems.

Disclosure of Invention

The purpose of the invention is: aiming at the defects, the hydrostatic pressure ultra-precision sliding table with three guide surfaces is reasonable in structure and good in using effect.

In order to achieve the purpose, the invention adopts the technical scheme that:

a three-surface-oriented hydrostatic ultra-precise sliding table comprises a guide rail seat and a sliding table body, wherein the cross section of the guide rail seat is T-shaped, a groove is arranged in the middle of the guide rail seat and used for installing a driving device and a position feedback device, the sliding table body is formed by connecting, installing and fixing an upper slide carriage assembly, two side slide carriage assemblies and a lower slide carriage assembly through connecting pieces,

the surface of an upper slide carriage of the upper slide carriage assembly is provided with a plurality of rectangular sinking grooves, the center of each sinking groove is provided with an upper slide carriage restrictor, the circular shoulder of each sinking groove is provided with an upper slide carriage O-shaped sealing ring for realizing the connection and sealing of the upper slide carriage restrictor and the upper slide carriage, a countersunk through hole is arranged right behind each upper slide carriage restrictor, each countersunk through hole is provided with a plug, the side surface of the periphery of the upper slide carriage is provided with oil holes communicated with all the upper slide carriage restrictors, and each oil hole is provided with a plug so as to realize a closed-loop oil circuit system on the upper slide carriage assembly;

the surface of a side slide carriage of the side slide carriage assembly is also provided with a plurality of rectangular sinking grooves, the center of each sinking groove is provided with a side slide carriage throttleer, a shoulder of each sinking groove is provided with a side slide carriage O-shaped sealing ring for realizing the connection and sealing of the side slide carriage throttleer and the side slide carriage, a countersunk through hole is arranged right behind each throttleer and provided with a plug, oil holes are arranged at two ends of each side slide carriage and communicated with all the side slide carriage throttleers, and the oil holes are provided with plugs so as to realize a closed-loop oil circuit system on the side slide carriage assembly;

the lower slide carriage of the lower slide carriage assembly is provided with a plurality of rectangular sinking grooves, the center of each sinking groove is provided with a lower slide carriage throttle, a shoulder of each sinking groove is provided with a lower slide carriage O-shaped sealing ring for realizing the connection and sealing of the lower slide carriage throttle and the lower slide carriage, a countersunk through hole is arranged right behind each throttle, a plug is arranged on each through hole, oil holes are formed in the two ends of the lower slide carriage and communicated with all the lower slide carriage throttles, and each oil hole is provided with a plug so as to realize a closed-loop oil circuit system on the lower slide carriage assembly.

The further technical scheme is as follows:

the upper slide carriage restrictor, the side slide carriage restrictor and the lower slide carriage restrictor are all arranged in counter bores at the centers of the sinking grooves at corresponding positions through threaded knobs.

The surface of the upper slide carriage is provided with 8 rectangular sinking grooves, and the surfaces of the side slide carriage and the lower slide carriage are provided with 4 rectangular sinking grooves.

The side slide carriage assembly is also provided with 8 sealing ring grooves at the oil hole ports on the upper side and the lower side of the side slide carriage, and a side plate O-shaped sealing ring is arranged in the grooves and used for installing and fixing the side slide carriage, the upper slide carriage assembly and the lower slide carriage assembly to form an oil path sealing closed ring.

Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:

1. the three-surface-oriented hydrostatic pressure ultra-precise sliding table is matched with an ultra-precise machine tool system, and can realize zero-contact precise linear motion of three surfaces and precise position positioning through the action of the driving device and the position feedback device.

2. According to the three-surface-oriented hydrostatic ultra-precise sliding table, the countersunk through hole and the plug structure are arranged behind the restrictor, so that the restrictor can be conveniently blocked and maintained in the later period.

3. According to the three-surface-oriented hydrostatic ultra-precision sliding table, the upper slide carriage assembly, the lower slide carriage assembly and the side slide carriage assembly are respectively provided with the oil inlet and the plug, so that a closed-loop oil circuit system is realized, and the lubricating effect and the operation requirement of the precision sliding table are ensured.

Drawings

FIG. 1 is a front view of the present invention.

FIG. 2 is a top view of the present invention.

Figure 3 is a schematic view of the upper slide assembly.

Fig. 4 is a back view of fig. 3.

FIG. 5 is a schematic view of the structure of FIG. 4A-A.

FIG. 6 is a schematic view of the structure shown in FIG. 4B-B.

FIG. 7 is a schematic view of the construction of a side slide assembly.

Fig. 8 is a back view of fig. 7.

FIG. 9 is a schematic view of the structure of FIG. 7A-A.

FIG. 10 is a schematic view of the structure of the lower carriage assembly.

Fig. 11 is a back view of fig. 10.

FIG. 12 is a schematic view of the structure of FIG. 10A-A.

In the attached drawings, 1, a guide rail seat, 2, a sliding table body, 3, an upper slide carriage assembly, 3-1, an upper slide carriage, 3-2, an O-shaped sealing ring of the upper slide carriage, 3-3, an upper slide carriage restrictor, 3-4, a plug, 4, a side slide carriage assembly, 4-1, a side slide carriage, 4-2, an O-shaped sealing ring of the side slide carriage, 4-3, the side slide carriage restrictor, 5, a lower slide carriage assembly, 5-1, a lower slide carriage, 5-2, an O-shaped sealing ring of the lower slide carriage, 5-3 and the lower slide carriage restrictor are included.

Detailed Description

The invention is further described with reference to the following figures and examples: