阅读说明：本技术 一种气浮转台 (Air-float rotary table ) 是由 黄明 龚维纬 崔海龙 张小强 夏欢 张新疆 冯艳冰 钱林弘 俞利庆 陈刚利 郑越 于 2021-08-25 设计创作，主要内容包括：本发明公开了一种气浮转台,包括节流器安装座、转子、上止推板、下止推板和驱动组件,转子同轴设置在所述节流器安装座的圆通孔内；所述上止推板的下侧面与所述转子的上端连接；所述下止推板的上侧面与所述转子的下端连接；工作时,所述上止推板与所述节流器安装座之间设置有第一气膜,所述下止推板与所述节流器安装座之间设置有第二气膜,所述节流器安装座与所述转子之间设置有径向气膜。本发明通过在节流器安装座的上侧面、下侧面和内侧面设置出气口,并通过空气在节流器安装座与上止推板、下止推板和转子之间形成气膜,从而减小摩擦并形成气浮工作台,并通过同源的气泵供气来实现轴向运动精度和径向运动精度的匹配。(The invention discloses an air-floating turntable which comprises a throttler mounting seat, a rotor, an upper stop push plate, a lower thrust plate and a driving assembly, wherein the rotor is coaxially arranged in a circular through hole of the throttler mounting seat; the lower side surface of the upper stop push plate is connected with the upper end of the rotor; the upper side surface of the lower thrust plate is connected with the lower end of the rotor; during operation, go up the top thrust push pedal with be provided with first gas film between the throttle mount pad, down the thrust plate with be provided with the second gas film between the throttle mount pad, the throttle mount pad with be provided with radial gas film between the rotor. According to the invention, the air outlets are arranged on the upper side surface, the lower side surface and the inner side surface of the restrictor mounting seat, and the air film is formed among the restrictor mounting seat, the upper stop push plate, the lower thrust plate and the rotor through air, so that friction is reduced, an air floatation workbench is formed, and the matching of axial movement precision and radial movement precision is realized through air supply of a homologous air pump.)

1. An air-bearing rotary table, comprising:

the throttle mounting seat is provided with an upper side surface and a lower side surface, a round through hole communicated with the upper side surface and the lower side surface is formed in the throttle mounting seat, a first air outlet is formed in the upper side surface of the throttle mounting seat, a second air outlet is formed in the lower side surface of the throttle mounting seat, a radial air outlet is formed in the inner side surface of the throttle mounting seat, and an air supply passage communicated with the first air outlet, the second air outlet and the radial air outlet is formed in the throttle mounting seat;

the rotor is coaxially arranged in the circular through hole of the throttle mounting seat;

the upper stop push plate is arranged above the upper side surface, and the lower side surface of the upper stop push plate is connected with the upper end of the rotor;

a lower thrust plate disposed below the lower side surface, an upper side surface of the lower thrust plate being connected to a lower end of the rotor;

the driving assembly is connected with the lower thrust plate and drives the lower thrust plate, the rotor and the upper thrust plate to coaxially rotate along the central axis of the rotor;

the outer diameter of the rotor is smaller than the inner diameter of the circular through hole, and the distance between the lower side surface of the upper stop pushing plate and the upper side surface of the lower thrust plate is larger than the thickness of the throttle mounting seat;

during operation, go up the top thrust push pedal with be provided with first gas film between the throttle mount pad, down the thrust plate with be provided with the second gas film between the throttle mount pad, the throttle mount pad with be provided with radial gas film between the rotor.

2. The air-floating turntable of claim 1, further comprising:

the upper side surface of the throttle mounting seat is provided with an upper groove for mounting the upper thrust throttle, and the first air outlet is arranged in the upper groove;

the lower side surface of the restrictor mounting seat is provided with a lower groove for mounting the lower thrust restrictor, and the second air outlet is arranged in the lower groove;

the radial restrictor comprises a radial restrictor, wherein an annular groove used for installing the radial restrictor is formed in the inner side surface of a restrictor installation seat, and a radial air outlet is formed in the annular groove.

3. The air-floating rotary table according to claim 2, wherein said upper groove is an annular groove, said upper thrust restrictor is disposed in said upper groove, and said upper thrust restrictor is a ring made of porous medium adapted to said upper groove;

the lower groove is an annular groove, the lower thrust throttler is arranged in the lower groove, and the lower thrust throttler is a circular ring formed by porous media matched with the lower groove;

the radial restrictor is arranged in the annular groove and is a cylinder formed by porous media matched with the annular groove;

the thickness of the upper thrust restrictor is not less than the depth of the upper groove, the thickness of the lower thrust restrictor is not less than the depth of the lower groove, and the thickness of the radial restrictor is not more than the depth of the annular groove.

4. The air-floating turntable as claimed in claim 2, wherein said radial restrictor is provided with:

the circumferential air passage is arranged on the outer side surface of the radial restrictor, and the central axis of the circumferential air passage is superposed with the central axis of the radial restrictor;

the axial air passage is arranged on the outer side surface of the radial restrictor, the axial air passage is parallel to the central axis of the radial restrictor, and the axial air passage is crossed with and communicated with the circumferential air passage;

and the annular reinforcing rib is arranged on the outer side surface of the radial restrictor.

5. The air-bearing turntable of claim 2, wherein said drive assembly comprises:

a stator sleeve disposed below the lower thrust plate, the stator sleeve being positionally fixed relative to the throttle mount;

the motor stator is arranged in the stator sleeve, and the outer side surface of the motor stator is fixedly connected with the stator sleeve;

and the motor rotor is arranged in the motor stator, the motor electronics and the motor rotor are driven to rotate relatively through electromagnetic force, and the lower thrust plate is coaxial and fixedly connected with the motor rotor.

6. The air-floating rotary table according to claim 5, wherein said driving assembly comprises a grating scale displacement sensor, said grating scale displacement sensor comprises:

the scale grating is annularly arranged and is coaxially and fixedly connected with the lower thrust plate through a grating mounting seat;

the grating reading head is coaxially and fixedly connected with the stator sleeve through a reading head mounting seat;

the grating reading head and the scale grating are correspondingly arranged, and the grating reading head detects the rotation angle of the scale grating.

7. The air-floating rotary table according to claim 1, wherein the upper side surface of said upper stop push plate is set to be a working table surface, a dust cover is arranged between said upper stop push plate and said restrictor mounting seat, and said dust cover comprises:

the lower end of the dust cover vertical tube is fixedly connected with the throttle mounting seat;

and the outer ring of the dust cover circular ring is fixedly connected with the upper end of the dust cover vertical cylinder, and the upper side surface of the upper stop push plate is provided with a groove matched with the dust cover circular ring.

8. The air-floating rotary table as claimed in claim 5, wherein said stator sleeve is fixedly connected to said restrictor mount via a housing, and said lower thrust plate is disposed within said housing.

9. The air-floating rotary table as claimed in claim 5, wherein said motor stator is fixedly connected with said stator sleeve by a stator pressing plate, and a bottom cover for closing said stator pressing plate and said stator sleeve is connected to a lower end of said stator pressing plate.

10. The air-floating rotary table as claimed in claim 6, wherein said upper thrust plate is a circular plate structure, and said lower thrust plate comprises:

a lower thrust plate circular plate which is arranged below the throttle mounting seat, and the upper side surface of the lower thrust plate circular plate is connected with the lower end of the rotor;

the grating mounting seat is fixedly connected with the lower end of the lower thrust plate shaft in a coaxial mode.

Technical Field

The invention relates to the field of numerical control machines, in particular to an air-floating rotary table.

Background

In the process of processing a workpiece by a numerical control machine tool, the workpiece needs to be driven to rotate by a turntable, nanoscale rotary motion needs to be realized in a precise numerical control machine tool and a precise metering instrument, and the static characteristic and the rotary precision of rotation are important factors influencing the detection and metering precision of the precise numerical control machine tool.

In the connection mode of part of turntables at the present stage, the situation that the axial motion precision and the radial motion precision are not matched can occur, and the requirements of ultra-precision machining and detection are difficult to realize.

Disclosure of Invention

The invention aims to solve the technical problem that the axial movement precision and the radial movement precision of a rotary table are not matched, and aims to provide an air-floating rotary table to solve the problem of the rotation precision of the rotary table.

The invention is realized by the following technical scheme:

an air-bearing rotary table comprising:

the throttle mounting seat is provided with an upper side surface and a lower side surface, a round through hole communicated with the upper side surface and the lower side surface is formed in the throttle mounting seat, a first air outlet is formed in the upper side surface of the throttle mounting seat, a second air outlet is formed in the lower side surface of the throttle mounting seat, a radial air outlet is formed in the inner side surface of the throttle mounting seat, and an air supply passage communicated with the first air outlet, the second air outlet and the radial air outlet is formed in the throttle mounting seat;

the rotor is coaxially arranged in the circular through hole of the throttle mounting seat;

the upper stop push plate is arranged above the upper side surface, and the lower side surface of the upper stop push plate is connected with the upper end of the rotor;

a lower thrust plate disposed below the lower side surface, an upper side surface of the lower thrust plate being connected to a lower end of the rotor;

the driving assembly is connected with the lower thrust plate and drives the lower thrust plate, the rotor and the upper thrust plate to coaxially rotate along the central axis of the rotor;

the outer diameter of the rotor is smaller than the inner diameter of the circular through hole, and the distance between the lower side surface of the upper stop pushing plate and the upper side surface of the lower thrust plate is larger than the thickness of the throttle mounting seat;

during operation, go up the top thrust push pedal with be provided with first gas film between the throttle mount pad, down the thrust plate with be provided with the second gas film between the throttle mount pad, the throttle mount pad with be provided with radial gas film between the rotor.

Further, the air-floating rotary table further comprises:

the upper side surface of the throttle mounting seat is provided with an upper groove for mounting the upper thrust throttle, and the first air outlet is arranged in the upper groove;

the lower side surface of the restrictor mounting seat is provided with a lower groove for mounting the lower thrust restrictor, and the second air outlet is arranged in the lower groove;

the radial restrictor comprises a radial restrictor, wherein an annular groove used for installing the radial restrictor is formed in the inner side surface of a restrictor installation seat, and a radial air outlet is formed in the annular groove.

Specifically, the upper groove is an annular groove, the upper thrust restrictor is arranged in the upper groove, and the upper thrust restrictor is a circular ring formed by porous media matched with the upper groove;

the lower groove is an annular groove, the lower thrust throttler is arranged in the lower groove, and the lower thrust throttler is a circular ring formed by porous media matched with the lower groove;

the radial restrictor is arranged in the annular groove and is a cylinder formed by porous media matched with the annular groove;

the thickness of the upper thrust restrictor is not less than the depth of the upper groove, the thickness of the lower thrust restrictor is not less than the depth of the lower groove, and the thickness of the radial restrictor is not more than the depth of the annular groove.

Preferably, the radial restrictor is provided with:

the circumferential air passage is arranged on the outer side surface of the radial restrictor, and the central axis of the circumferential air passage is superposed with the central axis of the radial restrictor;

the axial air passage is arranged on the outer side surface of the radial restrictor, the axial air passage is parallel to the central axis of the radial restrictor, and the axial air passage is crossed with and communicated with the circumferential air passage;

and the annular reinforcing rib is arranged on the outer side surface of the radial restrictor.

Specifically, the drive assembly includes:

a stator sleeve disposed below the lower thrust plate, the stator sleeve being fixed in position relative to the lower thrust plate;

the motor stator is arranged in the stator sleeve, and the outer side surface of the motor stator is fixedly connected with the stator sleeve;

and the motor rotor is arranged in the motor stator, the motor electronics and the motor rotor are driven to rotate relatively through electromagnetic force, and the lower thrust plate is coaxial and fixedly connected with the motor rotor.

Further, drive assembly includes grating chi displacement sensor, grating chi displacement sensor includes:

the scale grating is annularly arranged and is coaxially and fixedly connected with the lower thrust plate through a grating mounting seat;

the grating reading head is coaxially and fixedly connected with the stator sleeve through a reading head mounting seat;

the grating reading head and the scale grating are correspondingly arranged, and the grating reading head detects the rotation angle of the scale grating.

Preferably, set up go up the side of going up the dead push pedal and be table surface, go up the dead push pedal with be provided with the dust cover between the throttle mount pad, the dust cover includes:

the lower end of the dust cover vertical tube is fixedly connected with the throttle mounting seat;

and the outer ring of the dust cover circular ring is fixedly connected with the upper end of the dust cover vertical cylinder, and the upper side surface of the upper stop push plate is provided with a groove matched with the dust cover circular ring.

Specifically, the stator sleeve and the throttle mounting seat are fixedly connected through a shell, and the lower thrust plate is arranged in the shell.

Preferably, the motor stator is fixedly connected with the stator sleeve through a stator pressing plate, and a bottom cover for closing the stator pressing plate and the stator sleeve is connected to the lower end of the stator pressing plate.

Specifically, go up the thrust plate and be the circular plate structure, lower thrust plate includes:

a lower thrust plate circular plate which is arranged below the throttle mounting seat, and the upper side surface of the lower thrust plate circular plate is connected with the lower end of the rotor;

the grating mounting seat is fixedly connected with the lower end of the lower thrust plate shaft in a coaxial mode.

Compared with the prior art, the invention has the following advantages and beneficial effects:

according to the invention, the air outlets are arranged on the upper side surface, the lower side surface and the inner side surface of the restrictor mounting seat, and the air film is formed among the restrictor mounting seat, the upper stop push plate, the lower thrust plate and the rotor through air, so that friction is reduced, an air floatation workbench is formed, and the matching of axial movement precision and radial movement precision is realized through air supply of a homologous air pump.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the principles of the invention.

Fig. 1 is a schematic structural diagram of an air-floating rotary table according to the present invention.

Fig. 2 is a cross-sectional view of an air-floating turntable according to the present invention.

Fig. 3 is a schematic view of the construction of a radial restrictor according to the invention.

Reference numerals: the device comprises a dust cover 1, a top stop push plate 2, an upper thrust restrictor 3, a restrictor mounting seat 4, a radial restrictor 5, a rotor 6, a lower thrust restrictor 7, a lower thrust plate 8, a shell 9, a stator sleeve 10, a motor stator 11, a motor rotor 12, a grating mounting seat 13, a scale grating 14, a grating reading head 15, a reading head mounting seat 16, a bottom cover 17, a stator pressing plate 18, a reinforcing rib 19, a circumferential air passage 20 and an axial air passage 21.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limitations of the invention.

It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.

In the present invention, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Example one

An air-float rotary table comprises a throttle mounting seat 4, a rotor 6, an upper stop push plate 2, a lower thrust plate 8 and a driving assembly.

In this embodiment, the upper stop push plate 2, the rotor 6 and the lower thrust plate 8 are sequentially connected and have an i-shaped structure, and the i-shaped structure is driven by the driving assembly to rotate along the central axis of the rotor 6.

The throttle mounting seat 4 is used for fixing the position of the I-shaped structure, so that a workpiece can be placed on the upper side surface of the upper thrust plate 2 to realize rotary motion.

The throttler mount pad 4 has last side and downside, and inside is provided with the circular through-hole that communicates last side and downside, goes up side and downside parallel arrangement, and for the description convenience, will go up the side setting in the top of downside, the vertical setting of circular through-hole.

A first air outlet is formed in the upper side face of the restrictor mounting seat 4, a second air outlet is formed in the lower side face of the restrictor mounting seat 4, a radial air outlet is formed in the inner side face of the restrictor mounting seat 4, and an air supply passage communicated with the first air outlet, the second air outlet and the radial air outlet is formed in the restrictor mounting seat 4;

the air supply passage can be a uniform passage, namely, the air supply to the first air outlet, the second air outlet and the radial air outlet is realized by the same air source.

The air supply passages can also be mutually independent passages, namely the first air outlet supplies air through an independent air source, the second air outlet supplies air through an independent air source, and the radial air outlet supplies air through an independent air source.

The specific situation can be adjusted according to the actual requirement.

The rotor 6 is coaxially arranged in a circular through hole of the throttler mounting seat 4, the upper stop pushing plate 2 is arranged above the upper side surface, the lower side surface of the upper stop pushing plate 2 is connected with the upper end of the rotor 6, the thrust plate is arranged below the lower side surface, and the upper side surface of the lower thrust plate 8 is connected with the lower end of the rotor 6;

go up the top thrust plate 2 level and set up in the top of throttle mount pad 4, lower thrust plate 8 level sets up in the below of throttle mount pad 4, and rotor 6 sets up in the circular through-hole of throttle mount pad 4, has then realized that throttle mount pad 4 and "worker" style of calligraphy structure's rigidity.

In addition, in the embodiment, the size needs to be limited, that is, the outer diameter of the rotor 6 is smaller than the inner diameter of the circular through hole, and the distance between the lower side surface of the upper stop push plate 2 and the upper side surface of the lower thrust plate 8 is greater than the thickness of the throttle mounting seat 4;

during operation, a first air film is arranged between the upper stop push plate 2 and the restrictor mounting seat 4, a second air film is arranged between the lower thrust plate 8 and the restrictor mounting seat 4, and a radial air film is arranged between the restrictor mounting seat 4 and the rotor 6.

Through the air supply to first gas outlet, second gas outlet and radial gas outlet air feed for form the air film between upper thrust plate 2, lower thrust plate 8, rotor 6 and throttle mount pad 4, play the effect of axial support to upper thrust plate 2, lower thrust plate 8, can be used for bearing the work piece of treating processing, and play the effect of radial support through rotor 6, increase the stability in radial direction.

In the embodiment, the rotary motion is realized by driving the driving assembly, the driving assembly is connected with the lower thrust plate 8, and the driving assembly drives the lower thrust plate 8, the rotor 6 and the upper stop push plate 2 to coaxially rotate along the central axis of the rotor 6.

Example two

In the above embodiment, air is discharged through the first air outlet, the second air outlet and the radial air outlet all the time, and there may be a case of unstable air pressure, which results in poor precision of radial movement and axial movement, so in this embodiment, the air-floating turntable further includes an upper thrust restrictor 3, a lower thrust restrictor 7 and a radial restrictor 5.

The upper thrust restrictor 3 is a circular ring formed by porous media matched with the upper groove, and the lower thrust restrictor 7 is a circular ring radial restrictor 5 formed by porous media matched with the lower groove, and is a cylinder formed by porous media matched with the annular groove.

The porous medium has moderate permeability and uniform ventilation, so that the porous medium generates more uniform air film pressure distribution relative to small hole throttling, and has higher bearing capacity and supporting rigidity for the upper thrust plate 2, the lower thrust plate 8 and the rotor 6.

The upper side surface of the throttle mounting seat 4 is provided with an upper groove for mounting the upper thrust throttle 3, the first air outlet is arranged in the upper groove, and after air blown out from the first air outlet enters the upper thrust throttle 3, the air is blown out from the upper thrust throttle 3 through small holes communicated with each other in the upper thrust throttle 3, so that the air is uniformly blown out from the upper surface of the upper thrust throttle 3.

The lower side surface of the restrictor mounting seat 4 is provided with a lower groove for mounting the lower thrust restrictor 7, the second air outlet is arranged in the lower groove, and air blown out from the second air outlet enters the lower thrust restrictor 7 and then is uniformly blown out from the lower surface of the lower thrust restrictor 7 through the mutually communicated small holes in the lower thrust restrictor 7.

The inner side surface of the restrictor mounting seat 4 is provided with an annular groove for mounting the radial restrictor 5, a radial air outlet is arranged in the annular groove, and air blown out from the radial air outlet enters the radial restrictor 5 and then passes through mutually communicated small holes in the radial restrictor 5, so that the uniform air is blown out from the inner surface of the radial restrictor 5.

In order to avoid interference to the positional relationship between the i-shaped structure and the restrictor installation seat 4 due to the installation of the upper thrust restrictor 3, the lower thrust restrictor 7 and the radial restrictor 5, when the restrictor is installed,

it is preferable to ensure that the upper thrust restrictor 3 is located in the upper groove, that is, the inner diameter of the upper groove is equal to the inner diameter of the upper thrust restrictor 3, the outer diameter of the upper groove is equal to the outer diameter of the upper thrust restrictor 3, and the depth of the upper groove is equal to the depth of the upper thrust restrictor 3.

Similarly, it is ensured that the lower thrust restrictor 7 is located in the lower groove, that is, the inner diameter of the lower groove is equal to the inner diameter of the lower thrust restrictor 7, the outer diameter of the lower groove is equal to the outer diameter of the lower thrust restrictor 7, and the depth of the lower groove is equal to the depth of the lower thrust restrictor 7.

The radial throttler 5 is ensured to be positioned in the annular groove, namely the inner diameter of the annular groove is equal to the inner diameter of the radial throttler 5, the outer diameter of the annular groove is equal to the outer diameter of the radial throttler 5, and the height of the annular groove is equal to the height of the radial throttler 5.

Therefore, the final structure is that the upper groove is an annular groove, the upper thrust restrictor 3 is arranged in the upper groove, the lower groove is an annular groove, the lower thrust restrictor 7 is arranged in the lower groove, the radial restrictor 5 is arranged in the annular groove, the thickness of the upper thrust restrictor 3 is not less than the depth of the upper groove, the thickness of the lower thrust restrictor 7 is not less than the depth of the lower groove, and the thickness of the radial restrictor 5 is not more than the depth of the annular groove.

Under the condition of gas supply, gas is blown out of the surface of the upper thrust restrictor 3, so that the upper stop push plate 2 floats and forms a layer of gas film; the lower thrust restrictor 7 floats the lower thrust plate 8 to form a layer of air film;

the thickness of the air films at the upper side and the lower side can be automatically adjusted according to the mass of the rotary motion part and the supported part;

the radial throttle 5 acts as a radial support for the rotor 6. The upper thrust, the lower thrust and the radial bearing force act together to support the workbench, so that the air floatation rotary table is large in bearing capacity and high in rigidity and rotation precision.

EXAMPLE III

This embodiment is an optimization for the second embodiment, and in practical use, because the workpiece to be rotated needs to be placed on the upper thrust plate 2, and the whole components (the upper thrust plate 2, the rotor 6, the lower thrust plate 8 and the driving assembly) have a certain weight, it may happen that the first air film bears a larger pressure than the second air film.

Therefore, the upper thrust restrictor 3 and the lower thrust restrictor 7 are designed asymmetrically.

Under the condition that the first air outlet, the second air outlet and the third air outlet adopt the same air source, the air permeability of the upper thrust restrictor 3 is slightly larger than that of the lower thrust restrictor 7, under the same air supply pressure and air film thickness, the force borne by the upper thrust plate 2 is larger than that of the lower thrust plate 8, the self gravity of the air floatation rotary table rotary part and the supported part is balanced, the thicknesses of the first air film and the second air film are kept balanced, and the axial rotary precision of the air floatation rotary table is improved.

The same gas source is adopted, and the following advantages are achieved: the inlet pressure of the upper thrust throttler, the lower thrust throttler and the radial throttler 5 is the same, so that the air source pressure fluctuation has a better volume ratio, and the uniformity of the pressure in the air channel and the rotation precision of the air floatation rotary table are improved.

In another embodiment, the air pressure of the air source introduced into the first air outlet is controlled to be greater than the air pressure of the air source introduced into the second air outlet under the condition that different air sources are adopted by the first air outlet, the second air outlet and the third air outlet.

Example four

The radial throttle 5 is provided with a circumferential air passage 20, an axial air passage 21 and an annular reinforcing rib 19.

The circumferential air passage 20 is arranged on the outer side surface of the radial restrictor 5, and the central axis of the circumferential air passage 20 is superposed with the central axis of the radial restrictor 5;

the axial air passage 21 is arranged on the outer side surface of the radial restrictor 5, the axial air passage 21 is parallel to the central axis of the radial restrictor 5, and the axial air passage 21 is crossed and communicated with the circumferential air passage 20;

through setting up crisscross circumference air flue 20 and axial air flue 21, can make the air of radial gas outlet follow the even distribution of air flue at the lateral surface of radial flow controller 5 earlier, then at the aperture that gets into in the radial flow controller 5, finally blow off from the medial surface of radial flow controller 5, realize the evenly distributed of radial air film, promote the atmospheric pressure homogeneity between radial flow controller 5 and the rotor 6, promote the gyration progress.

The annular reinforcing rib 19 is arranged on the outer side surface of the radial restrictor 5, and the stability of the radial restrictor 5 is increased by the radial reinforcing rib 19.

When the elastic modulus and the shear modulus of the radial restrictor 5 are small, the deformation of the restrictor caused by gas pressure can be reduced by increasing the width and the number of the reinforcing ribs 19, and the uniformity of air floatation pressure distribution and the rotation precision of the air floatation rotary table are increased.

EXAMPLE five

The embodiment provides a driving assembly, which is used for driving an I-shaped structure to rotate so as to drive a workpiece to be processed above an upper stop push plate 2 to rotate.

The drive assembly comprises a stator sleeve 10, motor electronics and a motor mover 12.

The stator sleeve 10 is fixedly arranged below the lower thrust plate 8, and the position of the stator sleeve 10 relative to the throttle mounting seat 4 needs to be ensured to be fixed, and the stator sleeve can be fixedly connected with the throttle mounting seat 4 through a connecting device or can be directly fixedly connected with an external frame through the connecting device.

The motor stator 11 is arranged in the stator sleeve 10, the outer side surface of the motor rotor is fixedly connected with the stator sleeve, the motor rotor 12 is arranged in the motor stator 11, the motor rotor and the motor rotor 12 are driven to rotate relatively through electromagnetic force, and the lower thrust plate 8 is coaxial with and fixedly connected with the motor rotor 12.

The motor stator 11 and the motor rotor 12 are paired components, a coil and a magnet are arranged in the motor stator and the motor rotor 12, a magnetic field generated by electrifying the coil reacts with the magnet to drive the motor rotor 12 to rotate, and the motor rotor 12 is fixedly connected with the lower thrust plate 8, so that the lower thrust plate 8 is driven to rotate.

EXAMPLE six

When the five driving assemblies in the embodiment work, the rotation angle of the driving assemblies needs to be detected, and the control, driving, executing and feedback processes of the air floatation turntable can be completed, so that the precise control is realized, therefore, the embodiment provides a grating ruler displacement sensor which comprises a scale grating 14 and a grating reading head 15.

The scale grating 14 is annularly arranged and is coaxially and fixedly connected with the lower thrust plate 8 through a grating mounting seat 13, and the grating reading head 15 is coaxially and fixedly connected with the stator sleeve 10 through a reading head mounting seat 16;

wherein, grating reading head 15 and scale grating 14 correspond the setting, and grating reading head 15 detects the turned angle of scale grating 14.

A pulse signal sent by the motor controller drives the motor rotor 12 to rotate for a certain angle; the grating reading head 15 can sweep the number of the reticle lines rotated by the scale grating 14 within a certain time, so as to read the rotation angle of the motor rotor 12;

the displacement sensor of the grating ruler is a measuring feedback device which works by utilizing the optical principle of the grating. Grating scales are often applied to closed-loop servo systems of numerically controlled machine tools and can be used for detecting linear displacement or angular displacement. The signal output by the sensor is digital pulse, and the sensor has the characteristics of large detection range, high detection precision and high response speed.

EXAMPLE seven

In order to realize the dustproof performance, avoid inside impurity etc. get into the air supporting revolving stage, cause the destruction to inside spare part, this embodiment provides and is used for dustproof and fixed dust cover 1, shell, bottom 17 isotructure.

The upper side face of the upper stop push plate 2 is set as a working table face, a dust cover 1 is arranged between the upper stop push plate 2 and the throttler mounting seat 4, and the dust cover 1 comprises a dust cover 1 vertical tube and a dust cover 1 circular ring.

The lower end of the vertical cylinder of the dust cover 1 is fixedly connected with the throttle mounting seat 4, the outer ring of the circular ring of the dust cover 1 is fixedly connected with the upper end of the vertical cylinder of the dust cover 1, and the upper side surface of the upper stop push plate 2 is provided with a groove matched with the circular ring of the dust cover 1.

Through setting up dust cover 1, can realize ending the leakproofness between push pedal 2 and the throttle mount pad 4, avoid magazines such as dust to get into and go up between push pedal 2, rotor 6, lower thrust plate 8 and the throttle mount pad 4.

Stator sleeve 10 and throttle mount 4 are fixedly connected through casing 9, and lower thrust plate 8 sets up in casing 9, and the fixed connection of stator sleeve 10 and throttle mount 4 has been realized through casing 9 in this embodiment, has realized the fixed position function promptly, has possessed dirt-proof function again.

The motor stator 11 is fixedly connected with the stator sleeve 10 through a stator pressing plate 18, and the lower end of the stator pressing plate 18 is connected with a bottom cover 17 for closing the stator pressing plate 18 and the stator sleeve 10.

By setting the end cover and the stator pressing plate 18, the functions of fixing and dust prevention are realized.

Example eight

The present embodiment provides an embodiment of the upper thrust plate 2 and the lower thrust plate 8.

Since the upper thrust plate 2 needs to rotate along the central axis, it may be configured as a circular plate structure for rotational stability.

Because the lower thrust plate 8 needs to be connected with the driving assembly and the grating scale displacement sensor, the lower thrust plate 8 is configured to include a lower thrust plate circular plate and a lower thrust plate shaft.

The lower thrust plate circular plate is arranged below the throttler mounting seat 4, and the upper side surface of the lower thrust plate circular plate is connected with the lower end of the rotor 6;

the lower thrust plate shaft is vertically arranged, the upper end of the lower thrust plate shaft is coaxially and fixedly connected with the lower side of the lower thrust plate circular plate, the motor rotor 12 is fixedly connected with the outer side face of the lower thrust plate shaft, and the grating mounting seat 13 is coaxially and fixedly connected with the lower end of the lower thrust plate shaft.

An I-shaped structure is formed by the lower thrust plate circular plate, the rotating shaft and the upper stop push plate 2, and the lower thrust plate shaft is connected with the motor rotor 12 and the grating mounting seat 13.

Example nine

The present embodiment is optimized for the i-shaped member in the above embodiments.

The upper thrust plate 2, the lower thrust plate 8 and the rotor 6 in this embodiment are connected by bolts.

By adopting the technical scheme, the bolt connection enables the connection of the upper thrust plate 2, the lower thrust plate 8 and the rotor 6 to be more compact; meanwhile, the adjustment of the axial gas film thickness can be realized by screwing and unscrewing the screw, and even the separation of the upper stop push plate 2, the lower thrust plate 8 and the rotor 6 is convenient to mount and dismount.

In the description herein, reference to the description of the terms "one embodiment/mode," "some embodiments/modes," "example," "specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment/mode or example is included in at least one embodiment/mode or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to be the same embodiment/mode or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments/modes or examples. Furthermore, the various embodiments/aspects or examples and features of the various embodiments/aspects or examples described in this specification can be combined and combined by one skilled in the art without conflicting therewith.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

It will be understood by those skilled in the art that the foregoing embodiments are merely for clarity of description and are not intended to limit the scope of the invention. It will be apparent to those skilled in the art that other variations or modifications may be made on the above invention and still be within the scope of the invention.