阅读说明：本技术 一种外转子电机驱动的精密气浮转台 (Precise air-flotation rotary table driven by outer rotor motor ) 是由 王斌 龚林 王彪 王争光 丁辉 于 2021-08-19 设计创作，主要内容包括：本发明公开了一种外转子电机驱动的精密气浮转台,包括有安装底板、设置在安装底板上的气浮轴承组件、设置在气浮轴承组件上部的上止推板、设置在气浮轴承组件下部的下止推板、用于驱动上止推板和下止推板做回转运动的电机组件,所述电机组件设置在气浮轴承组件的中部且与气浮轴承组件同轴设置,所述电机组件包括有从外到内依次设置的电机转子、电机定子以及电极轴,电机转子与上止推板、下止推板固定；用定制的外转子无框力矩电机替换常规力矩电机,改变了传统的转台电机的布置方式,实现电机内置,减少了电机对气浮轴承的影响；采用外转子电机,电机转子设置在外圈,在设备上加工外圆,加工难度低。(The invention discloses a precise air-floating rotary table driven by an outer rotor motor, which comprises an installation base plate, an air-floating bearing assembly arranged on the installation base plate, an upper stop push plate arranged at the upper part of the air-floating bearing assembly, a lower thrust plate arranged at the lower part of the air-floating bearing assembly, and a motor assembly used for driving the upper stop push plate and the lower thrust plate to do rotary motion, wherein the motor assembly is arranged in the middle of the air-floating bearing assembly and is coaxial with the air-floating bearing assembly; the customized outer rotor frameless torque motor is used for replacing a conventional torque motor, the arrangement mode of the traditional turntable motor is changed, the motor is built-in, and the influence of the motor on the air bearing is reduced; an outer rotor motor is adopted, a motor rotor is arranged on an outer ring, an outer circle is machined on equipment, and machining difficulty is low.)

1. The utility model provides an outer rotor motor driven accurate air supporting revolving stage, including mounting plate (1), the air supporting bearing subassembly of setting on mounting plate (1), set up and go up push pedal (4) on air supporting bearing subassembly upper portion, set up thrust plate (5) down in air supporting bearing subassembly lower part, be used for driving and go up push pedal (4) and thrust plate (5) down and do rotary motion's motor element, its characterized in that: the motor assembly is arranged in the middle of the air bearing assembly and is coaxially arranged with the air bearing assembly, the motor assembly comprises a motor rotor (71), a motor stator (72) and an electrode shaft (73), the motor rotor (71), the motor stator and the electrode shaft are sequentially arranged from outside to inside, and the motor rotor (71) is fixed with the upper stop push plate (4) and the lower thrust plate (5).

2. The precise air-floatation rotary table driven by an external rotor motor according to claim 1, characterized in that: the air-bearing assembly comprises an air-bearing (2), a bearing outer sleeve (3) arranged on the outer side of the air-bearing (2), an air passage arranged on the air-bearing (2), a throttler (23) arranged on the air passage, and an air inlet joint (31) arranged on the bearing outer sleeve (3), wherein the air passage comprises an axial air passage (21) and a radial air passage (22), the axial air passage (21) is parallel to the axis of the air-bearing (2), the radial air passage (22) is perpendicular to the axis of the air-bearing (2), and the axial air passage (21) is communicated with the radial air passage (22).

3. The precise air-floatation rotary table driven by an external rotor motor according to claim 2, characterized in that: the radial horizontal plane at the axial center of the electrode rotor (71) and the radial horizontal plane at the axial center of the air bearing (2) are positioned on the same horizontal plane.

4. The precise air-floatation rotary table driven by an external rotor motor according to claim 2, characterized in that: at least one radial air passage (22) is arranged on one axial air passage (21), and at least one axial air passage (21) is arranged on one radial air passage (22).

5. The precise air-floatation rotary table driven by an external rotor motor according to claim 4, characterized in that: the axial air passages (21) are at least provided with 3, and the radial air passages (22) are at least provided with 3.

6. The precise air-floatation rotary table driven by an external rotor motor according to claim 2, characterized in that: an air floating ring (6) is arranged between the air bearing (2) and the motor rotor (71), the air floating ring (6) is fixedly connected with the upper stop push plate (4) and the lower stop push plate (5), and the electrode rotor (71) is fixedly arranged on the air floating ring (6).

7. The precise air-floatation rotary table driven by an external rotor motor according to claim 6, characterized in that: the end parts of the axial air passage (21) close to the upper stop push plate (4) and the lower thrust plate (5) and the end parts of the radial air passages (22) close to the air floating ring (6) are respectively provided with a throttle mounting hole, and the throttle (23) is arranged in the throttle mounting holes.

8. The precise air-floatation rotary table driven by an external rotor motor according to claim 2, characterized in that: an air distribution groove (24) is formed in the position, relative to the bearing outer sleeve (3) and the radial air passage (22), of the air bearing (2), and the air inlet joint (31) is arranged in the position, relative to the air distribution groove (24), of the bearing outer sleeve (3).

9. The precise air-floatation rotary table driven by an external rotor motor according to claim 8, characterized in that: the air distribution groove (24) is annular and is communicated with any one of the radial air discharge passages (22).

10. The precise air-floatation rotary table driven by an external rotor motor according to claim 1, characterized in that: the lower thrust plate (5) is provided with a feedback assembly used for determining the position, and the feedback assembly comprises a grating ruler coil (81) arranged on the lower thrust plate (5) and a grating ruler reading head (82) arranged on the mounting base plate (1).

Technical Field

The invention belongs to the technical field of air-flotation rotary tables, and relates to a precise air-flotation rotary table driven by an outer rotor motor.

Background

The air-floating rotary table suspends the main shaft and the rotary platform in the air and can stably rotate with high precision, the suspending effect is realized by leading in compressed air, the gap of pressure relief is extremely small, and the suspension of the main shaft and the rotary platform is ensured. Because of the many advantages of air-floating turrets, more and more high-precision applications are now in use. The air-float turntable has the advantages, is widely applied to the detection of wafers, silicon wafers and the like in the semiconductor industry, and is a very important rotary component.

As shown in fig. 1, the structure of a common air-floating turntable is mainly composed of a bearing assembly composed of a rotor 9 and an air-floating bearing, and an electric control assembly composed of a torque motor and a grating 8, wherein the electric control assembly is located outside the bearing assembly; because the torque rotation center and the rotation center of the air bearing cannot be concentric when the motor is powered on, and because of the cogging force of the motor, the factors may cause larger vibration in the air floating rotary table with higher precision (<100nm) and high rigidity, thereby influencing the precision of the air floating rotary table.

Disclosure of Invention

The invention aims to solve the problems in the prior art, and provides a precise air-floating rotary table driven by an outer rotor motor, which comprises an installation base plate, an air-floating bearing assembly arranged on the installation base plate, an upper stop push plate arranged at the upper part of the air-floating bearing assembly, a lower thrust plate arranged at the lower part of the air-floating bearing assembly, and a motor assembly used for driving the upper stop push plate and the lower thrust plate to do rotary motion.

Further specifically, the air-bearing assembly comprises an air-bearing, a bearing outer sleeve arranged outside the air-bearing, an air passage arranged on the air-bearing, a restrictor arranged on the air passage, and an air inlet joint arranged on the bearing outer sleeve, wherein the air passage comprises an axial air passage and a radial air passage, the axial air passage is parallel to the axis of the air-bearing, the radial air passage is perpendicular to the axis of the air-bearing, and the axial air passage is communicated with the radial air passage.

More specifically, the radial horizontal plane at the axial center of the electrode rotor and the radial horizontal plane at the axial center of the air bearing are located on the same horizontal plane.

Further specifically, at least one radial air passage is arranged on one axial air passage, and at least one axial air passage is arranged on one radial air passage.

Further specifically, the axial air passages are at least provided with 3, and the radial air passages are at least provided with 3.

Further specifically, an air floating ring is arranged between the air floating bearing and the motor rotor, the air floating ring is fixedly connected with the upper stop push plate and the lower thrust plate, and the electrode rotor is fixedly arranged on the air floating ring.

Further specifically, the end parts of the axial air passage, which are close to the upper stop push plate and the lower stop push plate, and the end parts of the radial air passage, which are close to the air floating ring, are provided with a throttle mounting hole, and the throttle is arranged in the throttle mounting hole.

More specifically, an air distribution groove is formed in the position, relative to the bearing outer sleeve and the radial air passage, of the air bearing, and the air inlet joint is arranged at the position, relative to the air distribution groove, of the bearing outer sleeve.

More specifically, the air distribution groove is annular and is communicated with any radial air passage.

Further specifically, a feedback assembly for determining a position is arranged on the lower thrust plate, and the feedback assembly comprises a grating ruler coil arranged on the lower thrust plate and a grating ruler reading head arranged on the mounting base plate.

The invention relates to a precise air-float rotary table driven by an outer rotor motor, which can realize the following technical effects: the customized outer rotor frameless torque motor is used for replacing a conventional torque motor, the arrangement mode of the traditional turntable motor is changed, the motor is built-in, and the influence of the motor on the air bearing is reduced; an outer rotor motor is adopted, a motor rotor is arranged on an outer ring, an outer circle is machined on equipment, and machining difficulty is low.

Drawings

FIG. 1 is a prior art schematic of the present invention;

FIG. 2 is a schematic cross-sectional structural view of the present invention;

FIG. 3 is an enlarged view at A of FIG. 2 of the present invention;

fig. 4 is an enlarged view of the invention at B in fig. 2.

In the figure: 1. mounting a bottom plate; 2. an air bearing; 21. an axial air passage; 22. a radial air passage; 23. a restrictor; 24. a gas distribution tank; 3. a bearing housing; 31. an air inlet joint; 4. an upper stop push plate; 5. a lower thrust plate; 6. an air floating ring; 71. an electrode rotor; 72. a motor stator; 73. a motor shaft; 8. a grating; 81. a grating ruler circle; 82. a grating ruler reading head; 9. and a rotor.

Detailed Description

In order to make the implementation objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The described embodiments are only some, but not all embodiments of the invention. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the scope of the present invention. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

A precise air-float rotary table driven by an outer rotor motor is disclosed, as shown in figure 2, figure 3 and figure 4, comprising a mounting base plate 1, an air-float bearing assembly arranged on the mounting base plate 1, an upper stop push plate 4 arranged on the upper part of the air-float bearing assembly, a lower thrust plate 5 arranged on the lower part of the air-float bearing assembly, and a motor assembly for driving the upper stop push plate 4 and the lower thrust plate 5 to do rotary motion, the upper thrust plate 4 and the lower thrust plate 5 are not in contact with the air bearing assembly, the motor assembly is arranged in the middle of the air bearing assembly and is coaxial with the air bearing assembly, the motor component comprises a motor rotor 71, a motor stator 72 and an electrode shaft 73 which are arranged from outside to inside in sequence, the motor rotor 71, the motor stator 72 and the motor shaft 73 are coaxially arranged, the motor rotor 71 is fixed with the upper stop push plate 4 and the lower stop push plate 5, and the motor component is an outer rotor motor; the customized outer rotor frameless torque motor is used for replacing a conventional torque motor, the motor arrangement mode of a traditional air floatation rotary table is changed, the motor is built-in, the height of the air floatation rotary table is reduced, and the influence of the motor on an air floatation bearing is reduced; the outer rotor motor is adopted, the motor rotor is arranged on the outer ring, the outer circle is machined on the equipment, the machining difficulty is low, and the operation is convenient.

As shown in fig. 2 and 3, the air-bearing assembly includes an air-bearing 2, a bearing housing 3 disposed outside the air-bearing 2, an air passage disposed on the air-bearing 2, a restrictor 23 disposed on the air passage, and an air inlet connector 31 disposed on the bearing housing 3, the bearing housing 3 is fixedly disposed on the mounting base 1, the air-bearing 2 is fixedly disposed on the bearing housing 3, the air passage is disposed in the air-bearing 2, the number and shape of the air passage are set according to the requirement, the bearing housing 3 is provided with an air inlet, the air inlet connector 31 is disposed in the air inlet, and compressed air enters the air passage from the air inlet connector 31; the air passage is provided with an axial air passage 21 and a radial air passage 22, the axial air passage 21 is parallel to the axis of the air bearing 2, the radial air passage 22 is perpendicular to the axis of the air bearing 2, and the axial air passage 21 is communicated with the radial air passage 22; in general, at least one radial air passage 22 is arranged on one axial air passage 21, at least one axial air passage 21 is arranged on one radial air passage 22, the number of the axial air passages 21 and the number of the radial air passages 22 are automatically adjusted according to the size of the air-floatation rotary table, and when the air-floatation rotary table is too high, the number of the axial air passages 21 can be automatically adjusted according to the height, for example, two axial air passages 21, three axial air passages 21 and the like are arranged on one radial air passage 22 in parallel, so that a better effect is achieved; when the radial area of the air-floating rotary table is too large, two radial air passages 22, three radial air passages 22 and the like can be arranged on one axial air passage 21 in parallel, and the number of the radial air passages 22 is automatically adjusted to achieve a better effect; the axial air passage 21 and the radial air passage 22 are communicated regardless of the arrangement of the axial air passage 21 and the radial air passage 22; in order to ensure the stability of the air-floating rotary table, at least 3 axial air passages 21 are arranged, and at least 3 radial air passages 22 are arranged.

As shown in fig. 2, 3 and 4, in order to ensure the distance between the air bearing 2 and the motor rotor 71 and the processing of each air floating surface, an air floating ring 6 is arranged between the air bearing 2 and the motor rotor 71, the air floating ring 6 is arranged according to the distance between the air bearing 2 and the motor assembly, in order to ensure the precision level of the flatness and the parallelism, the surface of the air floating ring 6 needs to be precisely polished, and the air floating ring 6 has better processing compared with the motor assembly and lower processing difficulty; the upper thrust plate 4 is fixedly arranged at the upper part of the air floating ring 6, the lower thrust plate 5 is fixedly connected at the lower part of the air floating ring 6, the motor rotor 71 is fixedly connected at the inner side of the air floating ring 67, and the motor rotor 71 drives the air floating ring 6, the upper thrust plate 4 and the lower thrust plate 5 to rotate around the motor shaft 73; the radial horizontal plane at the axial center of the electrode rotor 71 and the radial horizontal plane at the axial center of the air-floating bearing 2 are positioned on the same horizontal plane, so that the working stability of the air-floating rotary table is ensured.

As shown in fig. 2 and 3, a restrictor mounting hole is formed in each of the end portions of the axial air passage 21 close to the upper thrust plate 45 and the lower thrust plate, and the end portion of the radial air passage 22 close to the air floating ring 6, the restrictor 23 is arranged in the restrictor mounting hole, and each of the axial air passage 21 and the radial air passage 22 is provided with the restrictor 23; an air distribution groove 24 is formed in the position, opposite to the bearing outer sleeve 3 and the radial air passages 22, of the air floatation bearing 2, the radial air passages 22 in the same row are communicated with the air distribution groove 24, the air inlet joint 31 is arranged in the position, opposite to the air distribution groove 24, of the bearing outer sleeve 3, the air distribution groove 24 is annular and is communicated with any row of radial air passages 22, when only one row of radial air passages 22 is arranged, the air distribution groove 24 is formed in the radial air passages 22, when multiple rows of radial air passages 22 are formed, the air distribution groove 24 can be arranged in the radial air passage 22 in which the row of radial air passages 22 are arranged according to needs, a plug is arranged at one end, close to the bearing outer sleeve 3, of the radial air passages 22 which are not provided with the air distribution groove 24, or the air distribution grooves 24 are arranged in the radial air passages 22 in multiple rows, and the number of the air inlet joint 31 is the same as that of the air distribution grooves 24; compressed air enters the air distribution groove 24 from the air inlet joint 31, the air distribution groove 24 distributes the compressed air to all radial air passages 22 in the same row, then flows to the axial air passage 21 from the radial air passages 22, finally reaches the throttler 23, the compressed air flowing out of the throttler 23 forms an axial upper thrust air-bearing surface with the upper thrust plate 4 through the air-bearing 2, forms an axial lower thrust air-bearing surface with the lower thrust plate 5 through the air-bearing 2, forms a radial air-bearing surface with the air-bearing ring 6 through the air-bearing 2, and the air-bearing stably operates under the combined action of all the air-bearing surfaces.

As shown in fig. 2 and 3, a feedback assembly for determining a position is disposed on the lower thrust plate 5, the feedback assembly includes a grating scale ring 81 disposed on the lower thrust plate 5, and a grating scale reading head 82 disposed on the mounting base plate 1, the grating scale ring 81 can float and rotate with the lower thrust plate 5, and the grating scale reading head 82 is fixedly disposed; the grating ruler circle 81 rotates, and the grating ruler reading head 82 reads and uploads the signal of the grating ruler circle 81, so that the high-precision control of the air floatation rotary table is achieved.

The precise air floatation rotary table driven by the outer rotor motor can achieve the following technical effects that the outer rotor motor is used for replacing a conventional torque motor, the outer rotor motor can be arranged in the middle of an air floatation bearing assembly, and the outer rotor motor is processed in an excircle mode, so that the processing difficulty is low compared with the processing of an inner hole; an axial air passage 21 and a radial air passage 22 are arranged to ensure that the upper stop push plate 4, the air floatation ring 6, the lower thrust plate 5, the motor rotor 71 and the grating ruler coil 81 are in a stable suspension state; the grating ruler circle 81 and the grating ruler reading head 82 are arranged to ensure that the air floatation rotary table can have higher rotation precision and positioning precision.

The preferred embodiments of the present invention have been described in detail with reference to the accompanying drawings, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications can be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.

It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.

In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.