阅读说明：本技术 一种反射式高能电子衍射仪的图像采集处理系统 (Image acquisition and processing system of reflection type high-energy electron diffractometer ) 是由 刘伟 申晋 于 2021-01-28 设计创作，主要内容包括：一种反射式高能电子衍射仪的图像采集处理系统,属于电子衍射技术领域。包括主机,在主机上设置有荧光屏,在荧光屏的前侧设置有工业相机(5),其特征在于：在所述的荧光屏处安装有支架,支架的端部套设在荧光屏的外圈,所述工业相机(5)固定在支架的另一端并正对荧光屏。在本反射式高能电子衍射仪的图像采集处理系统中,通过设置支架,支架的端部套设在荧光屏的外圈,有效排除了外部因素对荧光屏成像时的影响,提高了工业相机对图像捕获的质量以及衍射图案的清晰度,进一步避免了对衍射图案后续处理的影响。通过在支撑筒的端部上方设置安装平台,通过安装平台在支撑筒的内表面形成平面,有助于将工业相机固定在支撑筒的内部。(An image acquisition and processing system of a reflection-type high-energy electron diffractometer belongs to the technical field of electron diffraction. Including the host computer, be provided with the fluorescent screen on the host computer, be provided with industry camera (5) in the front side of fluorescent screen, its characterized in that: the fluorescent screen is provided with a bracket, the end part of the bracket is sleeved on the outer ring of the fluorescent screen, and the industrial camera (5) is fixed at the other end of the bracket and is opposite to the fluorescent screen. In the image acquisition and processing system of the reflection-type high-energy electron diffractometer, the bracket is arranged, and the end part of the bracket is sleeved on the outer ring of the fluorescent screen, so that the influence of external factors on the fluorescent screen during imaging is effectively eliminated, the quality of image capture and the definition of diffraction patterns by an industrial camera are improved, and the influence on the subsequent processing of the diffraction patterns is further avoided. By providing a mounting platform above the end of the support cylinder, the mounting platform forms a flat surface on the inner surface of the support cylinder, which helps to secure the industrial camera inside the support cylinder.)

1. The utility model provides an image acquisition processing system of reflection-type high energy electron diffractometer, includes the host computer, is provided with the fluorescent screen on the host computer, is provided with industrial camera (5) in the front side of fluorescent screen, its characterized in that: the fluorescent screen is provided with a bracket, the end part of the bracket is sleeved on the outer ring of the fluorescent screen, and the industrial camera (5) is fixed at the other end of the bracket and is opposite to the fluorescent screen.

2. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 1, wherein: the support comprises a supporting cylinder (2), a fixing edge (3) is arranged at one end of the supporting cylinder (2), and the industrial camera (5) is fixed at the other end of the supporting cylinder (2).

3. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 2, wherein: the outer ring of the fixed edge (3) is axially provided with a plurality of fixed holes (1), and the fixed edge (3) is fixed on the outer ring of the fluorescent screen through the fixed holes (1).

4. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 2, wherein: the diameter of the fixed edge (3) is larger than that of the supporting cylinder (2).

5. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 2, wherein: an installation platform (4) is arranged above one end part of the supporting cylinder (2), the installation platform (4) forms a plane on the inner surface of the supporting cylinder (2), and the industrial camera (5) is fixed in the supporting cylinder (2) through the plane.

6. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 2, wherein: a plurality of mounting holes are further formed in the outer end face of one end, where the industrial camera (5) is mounted, of the supporting cylinder (2), and a rear cover (6) is fixed through the mounting holes.

7. The image acquisition and processing system of the reflective high-energy electron diffractometer according to claim 1, wherein: the output end of the industrial camera (5) is connected with a computer.

Technical Field

An image acquisition and processing system of a reflection-type high-energy electron diffractometer belongs to the technical field of electron diffraction.

Background

A Reflection-type High-Energy Electron Diffraction (RHEED) is the most important real-time monitoring tool for observing crystal growth. It grazes high-energy electrons to the surface of the crystal through a very small glancing angle, forms a diffraction pattern on the screen in the forward direction, and captures the diffraction pattern by a camera. Important information such as film thickness, components, crystal growth mechanism and the like is obtained through the diffraction pattern, and the crystal growth mode, the structural characteristics and the surface smoothness are visually displayed. The crystal growth orientation can also be judged through diffraction patterns in different directions, and lattice parameters and the like can be obtained from the space of diffraction fringes.

In the process of crystal growth, if the crystal grows layer by layer, each unit cell growth process is a period, the intensity of a diffraction peak can change periodically in each period, and according to the oscillation of the intensity of the diffraction peak, RHEED can accurately give information such as the number of atomic and molecular layers, growth mode and the like of a thin film or crystal growth. Because RHEED obtains information such as lattice spacing and the like through diffraction spot positions, and realizes the function of on-line monitoring through the change of the spot positions, the image capturing quality is required to be higher, however, in the prior art, the influence on fluorescent screen imaging is caused by external reasons, so that the situation that the diffraction pattern is not clear enough is easy to occur after the shooting process of a camera, and the subsequent processing of the diffraction pattern is further influenced.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the image acquisition and processing system of the reflective high-energy electron diffractometer overcomes the defects of the prior art, and provides the image acquisition and processing system of the reflective high-energy electron diffractometer, wherein the end part of the support is sleeved on the outer ring of the fluorescent screen, so that the influence of external factors on fluorescent screen imaging is effectively eliminated, the quality of image capture and the definition of diffraction patterns of an industrial camera are improved, and the influence on subsequent processing of the diffraction patterns is further avoided.

The technical scheme adopted by the invention for solving the technical problems is as follows: the image acquisition and processing system of the reflection-type high-energy electron diffractometer comprises a host, wherein a fluorescent screen is arranged on the host, and an industrial camera is arranged on the front side of the fluorescent screen, and is characterized in that: the bracket is arranged at the fluorescent screen, the end part of the bracket is sleeved on the outer ring of the fluorescent screen, and the industrial camera is fixed at the other end of the bracket and is opposite to the fluorescent screen.

Preferably, the support comprises a supporting cylinder, a fixing edge is arranged at one end of the supporting cylinder, and the industrial camera is fixed at the other end of the supporting cylinder.

Preferably, a plurality of fixing holes are axially formed in the outer ring of the fixing edge, and the fixing edge is fixed on the outer ring of the fluorescent screen through the fixing holes.

Preferably, the diameter of the fixing edge is larger than that of the support cylinder.

Preferably, a mounting platform is arranged above one end of the supporting cylinder, the mounting platform forms a plane on the inner surface of the supporting cylinder, and the industrial camera is fixed in the supporting cylinder through the plane.

Preferably, the outer end face of one end of the support cylinder, on which the industrial camera is mounted, is further provided with a plurality of mounting holes, and a rear cover is fixed through the mounting holes.

Preferably, the output end of the industrial camera is connected with a computer.

Compared with the prior art, the invention has the beneficial effects that:

in the image acquisition and processing system of the reflection-type high-energy electron diffractometer, the bracket is arranged, and the end part of the bracket is sleeved on the outer ring of the fluorescent screen, so that the influence of external factors on the fluorescent screen during imaging is effectively eliminated, the quality of image capture and the definition of diffraction patterns by an industrial camera are improved, and the influence on the subsequent processing of the diffraction patterns is further avoided.

By providing a mounting platform above the end of the support cylinder, the mounting platform forms a flat surface on the inner surface of the support cylinder, which helps to secure the industrial camera inside the support cylinder.

Drawings

Fig. 1 is a schematic view of an acquisition bracket structure of an image acquisition processing system of a reflection-type high-energy electron diffractometer.

Fig. 2 is a front view of an image collecting and processing system collecting bracket of the reflective high-energy electron diffractometer.

Fig. 3 is a top view of an image collecting and processing system collecting bracket of the reflective high-energy electron diffractometer.

Fig. 4 is a right view of the collecting bracket of the image collecting and processing system of the reflective high-energy electron diffractometer.

Fig. 5 is a left view of the collecting bracket of the image collecting and processing system of the reflective high-energy electron diffractometer.

Wherein: 1. fixing hole 2, support section of thick bamboo 3, fixed limit 4, mounting platform 5, industrial camera 6, back lid.

Detailed Description

Fig. 1 to 5 are preferred embodiments of the present invention, and the present invention will be further described with reference to fig. 1 to 5.

An image acquisition and processing system of a reflection-type high-energy electron diffractometer comprises a host, wherein a fluorescent screen for displaying diffraction images is arranged on the host, a bracket is fixed on the front side of the fluorescent screen, and an industrial camera 5 (shown in figures 1-5) is fixed on the front side of the fluorescent screen through the bracket. The output end of the industrial camera 5 is connected with the computer, and the acquired image information is sent to the computer.

As shown in fig. 1 to 5, the bracket includes a support cylinder 2, one end of the support cylinder 2 is fixed to the main body, and the industrial camera 5 is fixed to the other end of the support cylinder 2.

The end part of the supporting cylinder 2 is provided with a fixed edge 3, the diameter of the fixed edge 3 is larger than that of the supporting cylinder 2, a plurality of fixed holes 1 are axially formed in the outer ring of the fixed edge 3, the fixed edge 3 is placed behind the outer ring of the fluorescent screen, and the fixed edge 3 is fixed with the fluorescent screen after the fixed bolt of the outer ring of the fluorescent screen penetrates through the corresponding fixed hole 1.

The mounting platform 4 is arranged above the end part of the other end of the supporting cylinder 2, a plane is formed on the inner surface of the supporting cylinder 2 through the mounting platform 4, the industrial camera 5 is fixed inside the supporting cylinder 2 through the plane, and the lens of the industrial camera 5 is over against the display screen of the host through the supporting cylinder 2. A plurality of mounting holes are further formed in the outer end face of the support cylinder 2, on which the industrial camera 5 is mounted, and a rear cover 6 is fixed through the mounting holes. By arranging the supporting cylinder 2, the influence of external factors (light sources) on fluorescent screen imaging is effectively eliminated, the quality of image capture and the definition of diffraction patterns by the industrial camera 5 are improved, and the influence on subsequent processing of the diffraction patterns is further avoided.

The resolution used for the industrial camera 5 is 1920 x 1200, the pixel size is 3.75 μm, and the frame rate can be up to 222 fps. When the working distance of the lens is 300mm, the magnification is 0.084, the width of the visual field is 64.3mm, the height of the visual field is 48.2mm, and the visual field of the camera can completely cover the whole fluorescent screen.

After the industrial camera 5 is used for capturing the diffraction light spots, the images collected by the industrial camera 5 are sent to a computer, and the image information is further processed by processing software in the computer. The processing software comprises a diffraction image display window and an oscillation curve display window, camera parameters can be set in the diffraction image display window, and the settable parameters comprise: exposure time, gain, frame rate, scaling of actual image pixels, image holding location, etc.

The processing software realizes feedback adjustment according to the quality of the image, controls the exposure and the focal length of the industrial camera 5 and obtains a clear and available image. Image processing methods can be divided into still image processing and moving image processing for different research purposes. The static image processing can be divided into a single image mode, a multi-image mode, a focusing mode (displaying color spot outline, curved surface graph and contour graph in real time) and the like, and the obtained image is as clear as possible and has high resolution. Dynamic image processing can be classified into a scanning mode (monitoring diffraction spots, obtaining parameters such as intensity oscillation, growth rate, and crystal lattice), a video recording mode, an overlay mode (monitoring background noise and diffraction spot transition), and a growth rate mode (obtaining diffraction spot intensity). Moving image processing has a larger amount of information than still image processing.

The processing software can also process and edit the images in two dimensions, three dimensions, height linear shapes of intensity and the like. The data can be continuously collected and stored for more than or equal to 12 hours in one experiment, and the number of stored images is more than or equal to 100. At any working air pressure below 100Pa, intensity oscillation of RHEED can be observed to be more than or equal to 50 periods.

The foregoing is directed to preferred embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow. However, any simple modification, equivalent change and modification of the above embodiments according to the technical essence of the present invention are within the protection scope of the technical solution of the present invention.