阅读说明：本技术 一种基于光场调控的多光束激光放大扫描加工系统及方法 (Multi-beam laser amplification scanning processing system and method based on light field regulation ) 是由 闵超庆 孙涛 王文君 梅雪松 运侠伦 孙铮 孙孝飞 于 2020-07-17 设计创作，主要内容包括：本发明提供的一种基于光场调控的多光束激光放大扫描加工系统及方法,包括以下步骤：将发出的激光进行扩束；将扩束后的激光利用全息图进行调制,得到预设光场分布的多光束激光；将多光束激光进行能量放大,得到高功率的多光束激光；控制高功率多光束激光对待加工工件进行扫描加工；本发明提出的基于光场调控的多光束激光放大扫描加工系统及方法,可灵活调控光束并进行功率放大,能够实现高精度、高质量、高效率、无限幅面的激光加工,具有广泛的应用前景。(The invention provides a multi-beam laser amplification scanning processing system and method based on light field regulation, which comprises the following steps: expanding the emitted laser; modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution; performing energy amplification on the multi-beam laser to obtain high-power multi-beam laser; controlling high-power multi-beam laser to scan and process a workpiece to be processed; the multi-beam laser amplification scanning processing system and method based on light field regulation can flexibly regulate and control the light beam and amplify the power, can realize high-precision, high-quality, high-efficiency and infinite breadth laser processing, and have wide application prospect.)

1. A multi-beam laser amplification scanning processing method based on light field regulation is characterized by comprising the following steps:

expanding the emitted laser;

modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution;

performing energy amplification on the multi-beam laser to obtain high-power multi-beam laser;

and controlling the high-power multi-beam laser to carry out scanning array processing on the workpiece to be processed.

2. The multi-beam laser amplification scanning processing method based on light field regulation and control of claim 1, characterized in that the laser emitted by the laser (1) is expanded and modulated by the optical modulation module (2) to obtain multi-beam laser with preset light field distribution; then, the obtained multi-beam laser is incident to a laser amplification module (3), and the energy of the multi-beam laser is amplified through the laser amplification module (3) to obtain the high-power multi-beam laser; then the high-power multi-beam laser is incident to the scanning galvanometer (4) to carry out scanning array processing on the workpiece to be processed.

3. The multi-beam laser amplification scanning processing method based on light field regulation and control of claim 2, characterized in that the optical modulation module (2) comprises a λ/2 wave plate (13), a beam expander (14), a diffractive optical element and a fourier lens (16), wherein laser output by the laser (1) is incident to the beam expander (14) through the λ/2 wave plate (13); the light beam output by the beam expander (14) is incident to a diffractive optical element, and the multi-beam laser output by the diffractive optical element is incident to a laser amplification module (3) through a Fourier lens (16).

4. The multi-beam laser amplification scanning processing method based on light field regulation and control of claim 2 is characterized in that the laser amplification module (3) comprises a first polarization beam splitter (17), a laser amplification unit and a pump source (12), wherein the multi-beam laser output by the optical modulation module (2) is incident to the laser amplification unit through the first polarization beam splitter (17); the multi-beam laser output by the laser amplification unit is incident to the scanning galvanometer (4); meanwhile, the laser output by the pumping source (12) is incident to a laser amplification unit.

5. The multi-beam laser amplification scanning processing method based on light field regulation and control is characterized in that the laser amplification unit comprises a gain medium (11), a lambda/4 wave plate (18) and a second reflecting mirror (19), wherein the multi-beam output by the first polarization beam splitter (17) is incident to the gain medium (11); the multiple beams output by the gain medium (11) are incident to a lambda/4 wave plate (18); the laser output by the lambda/4 wave plate (18) is incident to the second reflecting mirror (19); the laser output by the second reflecting mirror (19) is reflected to the first polarization beam splitter (17) through the lambda/4 wave plate (18) and the gain medium (11) in sequence; the laser light output by the pump source (12) is incident on the gain medium (11).

6. The multi-beam laser amplification scanning processing method based on light field regulation and control of claim 4 is characterized in that the laser amplification unit comprises an optical parametric amplifier (20), a lambda/4 wave plate (18) and a second polarization beam splitter (21), wherein the multi-beam output by the first polarization beam splitter (17) is incident to the optical parametric amplifier (20); the multiple beams output by the optical parametric amplifier (20) are incident to a lambda/4 wave plate (18), and the laser output by the lambda/4 wave plate (18) is incident to a second polarization beam splitter (21); the laser output by the second polarization beam splitter (21) is reflected to the first polarization beam splitter (17) through a lambda/4 wave plate (18) and an optical parametric amplifier (20) in sequence; the laser light output by the pump source (12) is incident on a second polarization beam splitter (21).

7. A multi-beam laser amplification scanning processing system based on light field regulation is characterized by comprising a laser (1), an optical modulation module (2), a laser amplification module (3) and a scanning galvanometer (4), wherein the laser (1) is used for generating laser and emitting the laser to the beam modulation module (2); the light beam modulation module (2) is used for modulating the received laser to generate multi-beam laser with preset light field distribution; the obtained multi-beam laser is incident to a laser amplification module (3); the laser amplification module (3) is used for carrying out energy amplification on the received multi-beam laser to obtain high-power multi-beam laser which is incident to the scanning galvanometer (4); and the scanning galvanometer (4) is used for controlling the received high-power multi-beam laser to carry out scanning array processing on the substitute processing workpiece.

8. The multi-beam laser amplification scanning processing system based on light field regulation and control of claim 7, wherein the optical modulation module (2) comprises a lambda/2 wave plate (13), a beam expander (14), a diffractive optical element and a Fourier lens (16), wherein laser output by the laser (1) is incident to the beam expander (14) through the lambda/2 wave plate (13); the light beam output by the beam expander (14) is incident to a diffractive optical element, and the multi-beam laser output by the diffractive optical element is incident to a laser amplification module (3) through a Fourier lens (16).

9. The multiple-beam laser amplification scanning processing system based on light field regulation and control of claim 7, characterized in that the laser amplification module (3) comprises a first polarization beam splitter (17), a laser amplification unit and a pump source (12), wherein the multiple-beam laser output by the optical modulation module (2) is incident to the laser amplification unit through the first polarization beam splitter (17); the multi-beam laser output by the laser amplification unit is incident to the scanning galvanometer (4); meanwhile, the laser output by the pumping source (12) is incident to a laser amplification unit.

10. The multiple-beam laser amplification scanning processing system based on light field regulation and control of claim 9, characterized in that the laser amplification unit comprises an optical parametric amplifier (20), a λ/4 wave plate (18) and a second polarization beam splitter (21), wherein the multiple beams output by the first polarization beam splitter (17) are incident to the optical parametric amplifier (20); the multiple beams output by the optical parametric amplifier (20) are incident to a lambda/4 wave plate (18), and the laser output by the lambda/4 wave plate (18) is incident to a second polarization beam splitter (21); the laser output by the second polarization beam splitter (21) is reflected to the first polarization beam splitter (17) through a lambda/4 wave plate (18) and an optical parametric amplifier (20) in sequence; the laser light output by the pump source (12) is incident on a second polarization beam splitter (21).

Technical Field

The invention belongs to the technical field of laser amplification and laser application, and particularly relates to a multi-beam laser amplification scanning processing system and method based on light field regulation.

Background

The laser processing has the characteristics of high precision, high quality, wide range of processable materials, no tool abrasion and the like, so that the laser processing is widely applied to the fields of aerospace, automobiles, ships, electronic communication, biomedical treatment and the like. With the continuous development of laser technology, many processing occasions often need to process large-area group holes with various shapes and quantities, such as melt-blown fabric spinneret plates, turbine blade air film holes and the like, and the group holes have high requirements on the precision and quality of micropores and also need high overall processing efficiency. The current laser processing usually adopts single-point gaussian light for processing, and has the defects of low processing efficiency, low energy utilization rate, poor adaptability and the like, so that the laser processing efficiency can be improved by adopting a multi-beam parallel processing method.

Moreover, researches show that different light field distributions such as Bessel light, vector light, flat top light, super Gaussian light and the like have different processing effects on laser processing, and the accuracy and the quality of the laser processing can be further improved by proper light field distribution. Some current optical field regulation and control are usually completed by complex optical paths, the damage threshold of optical elements such as a spatial light modulator and a digital micromirror device is limited, the energy of modulated split beam is extremely low, and high-power, high-efficiency and high-precision laser processing is difficult to realize, so that the research on the multi-beam laser amplification scanning processing system and method based on the optical field regulation and control has important significance.

Disclosure of Invention

The invention aims to provide a multi-beam laser amplification scanning processing system and method based on light field regulation, which solve the defects of low processing efficiency, low energy utilization rate and poor adaptability in the existing laser processing process.

In order to achieve the purpose, the invention adopts the technical scheme that:

the invention provides a multi-beam laser amplification scanning processing system based on light field regulation, which comprises the following steps:

expanding the emitted laser;

modulating the expanded laser by utilizing a hologram to obtain multi-beam laser with preset light field distribution;

performing energy amplification on the multi-beam laser to obtain high-power multi-beam laser;

and controlling the high-power multi-beam laser to scan and process the workpiece to be processed.

Preferably, the laser emitted by the laser is expanded and modulated by the optical modulation module to obtain multi-beam laser with preset light field distribution; then, the obtained multi-beam laser is incident to a laser amplification module, and the energy of the multi-beam laser is amplified through the laser amplification module to obtain the high-power multi-beam laser; and then the high-power multi-beam laser is incident to the scanning galvanometer to carry out scanning array processing on the workpiece to be processed.

Preferably, the optical modulation module is used for expanding the beam and modulating the hologram to obtain multi-beam laser with preset light field distribution; the optical modulation module comprises a lambda/2 wave plate, a beam expander, a diffractive optical element and a Fourier lens, wherein laser output by the laser enters the beam expander through the lambda/2 wave plate; the light beam output by the beam expander is incident to the diffractive optical element, and the multi-beam laser output by the diffractive optical element is incident to the laser amplification module through the Fourier lens.

Preferably, the laser amplification module is used for carrying out energy amplification on the multi-beam laser to obtain the high-power multi-beam laser; the laser amplification module comprises a first polarization beam splitter, a laser amplification unit and a pumping source, wherein the multi-beam laser output by the optical modulation module is incident to the laser amplification unit through the first polarization beam splitter; multiple beams of laser output by the laser amplification unit are incident to the scanning galvanometer; meanwhile, the laser output by the pumping source is incident to the laser amplification unit.

Preferably, the laser amplification unit comprises a gain medium, a lambda/4 wave plate and a second reflector, wherein the multi-beam output by the first polarization beam splitter is incident to the gain medium; multiple beams output by the gain medium are incident to the lambda/4 wave plate; the laser output by the lambda/4 wave plate is incident to the second reflecting mirror; the laser output by the second reflector is reflected to the first polarization beam splitter through the lambda/4 wave plate and the gain medium in sequence; and laser output by the pump source is incident to the gain medium.

Preferably, the laser amplification unit comprises an optical parametric amplifier, a lambda/4 wave plate and a second polarization beam splitter, wherein the multiple beams output by the first polarization beam splitter are incident to the optical parametric amplifier; the multiple beams output by the optical parametric amplifier are incident to a lambda/4 wave plate, and the laser output by the lambda/4 wave plate is incident to a second polarization beam splitter; the laser output by the second polarization beam splitter is reflected to the first polarization beam splitter through the lambda/4 wave plate and the optical parametric amplifier in sequence; and laser output by the pump source is incident to the second polarization beam splitter.

A multi-beam laser amplification scanning processing system based on light field regulation comprises a laser, an optical modulation module, a laser amplification module and a scanning galvanometer, wherein the laser is used for generating laser and emitting the laser to the beam modulation module; the light beam modulation module is used for modulating the received laser to generate multi-beam laser with preset light field distribution; the obtained multi-beam laser is incident to a laser amplification module; the laser amplification module is used for carrying out energy amplification on the received multi-beam laser to obtain high-power multi-beam laser which is incident to the scanning galvanometer; and the scanning galvanometer is used for controlling the received high-power multi-beam laser to carry out scanning array processing on the substitute processing workpiece.

Preferably, the optical modulation module comprises a lambda/2 wave plate, a beam expander, a diffractive optical element and a fourier lens, wherein laser output by the laser passes through the lambda/2 wave plate and is incident to the beam expander; the light beam output by the beam expander is incident to the diffractive optical element, and the multi-beam laser output by the diffractive optical element is incident to the laser amplification module through the Fourier lens.

Preferably, the laser amplification module includes a first polarization beam splitter, a laser amplification unit and a pump source, wherein the multiple beam laser output by the optical modulation module is incident to the laser amplification unit through the first polarization beam splitter; multiple beams of laser output by the laser amplification unit are incident to the scanning galvanometer; meanwhile, the laser output by the pumping source is incident to the laser amplification unit.

Preferably, the laser amplification unit comprises an optical parametric amplifier, a lambda/4 wave plate and a second polarization beam splitter, wherein the multiple beams output by the first polarization beam splitter are incident to the optical parametric amplifier; the multiple beams output by the optical parametric amplifier are incident to a lambda/4 wave plate, and the laser output by the lambda/4 wave plate is incident to a second polarization beam splitter; the laser output by the second polarization beam splitter is reflected to the first polarization beam splitter through the lambda/4 wave plate and the optical parametric amplifier in sequence; and laser output by the pump source is incident to the second polarization beam splitter.

Compared with the prior art, the invention has the beneficial effects that:

according to the multi-beam laser amplification scanning processing system based on light field regulation, laser emitted from a laser enters an optical modulation module, and the light field distribution of laser beams can be freely regulated and controlled through the change of a hologram loaded by a diffractive optical element, so that the multi-beam output of target light field distribution is realized; then the laser beam is incident to a laser amplification module, and the laser amplification module performs power amplification on the shaped light beam so as to reduce the loss of the laser in the optical modulation process and enhance the energy of the split laser; the amplified laser is incident into a scanning galvanometer, and the scanning galvanometer controls a light beam and cooperates with a motion table to complete scanning processing; the invention can customize laser input with optimal light field distribution aiming at different processing materials, can well improve the precision, quality and efficiency of the material processing process, can directly focus on array micropores with high precision in one step, and can avoid positioning errors while improving the efficiency; the scanning galvanometer can realize direct control of multiple beams, array scanning while multiple beams can be realized, and the scanning galvanometer is matched with a motion table to carry out cooperative motion to realize infinite window scanning processing, so that the processing range and the processing efficiency of laser processing are expanded, and infinite breadth array processing is realized. The multi-beam laser amplification scanning processing system and method based on light field regulation can flexibly regulate and control light beams and amplify power, can realize high-precision, high-quality, high-efficiency and infinite breadth laser processing, and have wide application prospect; meanwhile, the laser processing efficiency is increased by orders of magnitude, the laser processing requirement can be better met, and the laser processing device has wide application significance in the field of laser processing.

The invention provides a multi-beam laser amplification scanning processing method based on light field regulation, which comprises the steps of expanding beams, modulating a hologram and amplifying power of laser in sequence to obtain high-power multi-beam laser, wherein the multi-beam laser can compensate the influence of low multi-beam laser energy caused by low damage threshold, low beam energy utilization rate and low beam splitting energy of a beam shaping device on difficult processing of high-threshold materials such as copper and aluminum, the power of the beam splitting laser is improved, and the processing effect of large area, high efficiency, high power and high precision can be realized by matching a scanning galvanometer and a motion table to carry out cooperative scanning processing, so that the laser processing efficiency is increased in order of magnitude, the laser processing requirement can be better met, and the method has wide application significance in the field of laser processing.

Drawings

FIG. 1 is a schematic diagram of a system according to an embodiment of the present invention;

FIG. 2 is a system configuration diagram of embodiment 1 of the present invention;

FIG. 3 is a system configuration diagram of embodiment 2 of the present invention;

FIG. 4 is a system configuration diagram of embodiment 3 of the present invention;

FIG. 5 is a hologram produced by a computational holography algorithm according to an embodiment of the present invention;

FIG. 6 is a diagram of a workpiece to be machined set by a computer;

the system comprises a laser 1, a laser 2, an optical modulation module 3, a laser amplification module 4, a scanning galvanometer 5, a motion table 6, a computer 8, a spatial light modulator 10, a laser shaping beam splitter 11, a gain medium 12, a pumping source 13, a lambda/2 wave plate 14, a beam expander 15, a first reflector 16, a Fourier lens 17, a first polarization beam splitter 18, a lambda/4 wave plate 19, a second reflector 20, an optical parametric amplifier 21, a second polarization beam splitter 22 and a motion control card.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Referring to fig. 1, a basic module of the system of the multi-beam laser amplification scanning processing system based on light field regulation and control provided by the present invention includes a laser 1, an optical modulation module 2, a laser amplification module 3, a scanning galvanometer 4, a motion stage 5 and a computer 6, wherein the laser 1 is used for emitting laser and is incident to the beam modulation module 2; the light beam modulation module 2 is used for modulating the received laser to generate multi-beam laser with preset light field distribution; multiple beams of laser are incident to the laser amplification module 3; the laser amplification module 3 is used for performing power amplification on the received multi-beam laser, so as to obtain high-power multi-beam laser output; high-power multi-beam laser is incident to the scanning galvanometer 4; the scanning galvanometer 4 is used for controlling the received multi-beam laser and performs scanning array processing on a workpiece to be processed by cooperating with the motion table 5; and the computer 6 is respectively connected with the laser 1, the beam modulation module 2, the laser amplification module 3 and the scanning galvanometer 4 and is used for controlling laser parameters, laser field distribution, laser amplification factor and infinite window cooperative scanning processing.

The pulse width of the laser 1 can be changed according to requirements; a continuous laser, a quasi-continuous laser, a nanosecond laser, a picosecond laser and a femtosecond laser can be used as seed sources, and the energy and the frequency of the lasers can be adjusted.

The optical modulation module 2 comprises a diffractive optical element, which is a spatial light modulator 8, a digital micro-mirror device or a laser shaping beam splitter 10.

The laser amplification module 3 mainly comprises a laser gain medium 11 and a pumping source 12, wherein the laser gain medium mainly comprises a laser crystal (such as Nd: YAG, Nd: YVO4, titanium-doped sapphire and other solid crystals), a nonlinear crystal (such as LBO crystal or KDP crystal) and an optical fiber gain medium (such as Yb3+ gain fiber, Nd3+ gain fiber and the like).

The pump source 12 is primarily a semiconductor pump laser or flash lamp pump.

The pumping mode of the laser amplification module 3 can adopt end pumping or side pumping according to the beam quality and energy requirements, and adopt the end pumping to output multi-beam high-quality laser and adopt the side pumping to output multi-beam high-energy laser.

The optical modulation module 2 comprises a lambda/2 wave plate 13, a beam expander 14, a diffractive optical element and a Fourier lens 16, wherein laser output by the laser 1 is incident to the beam expander 14 through the lambda/2 wave plate 13; the light beam output from the beam expander 14 is incident on the diffractive optical element, and the multibeam laser light output from the diffractive optical element is incident on the laser amplification module 3 through the fourier lens 16.

The diffraction optical element is a spatial light modulator 8, a digital micro-mirror device or a laser shaping beam splitter 10, wherein holograms are loaded on the spatial light modulator 8 and the digital micro-mirror device; when the diffractive optical element is a spatial light modulator 8 or a digital micro-mirror device, the light beam output by the beam expander 14 is incident on the spatial light modulator 8 or the digital micro-mirror device through the first reflector 15.

The laser amplification module 3 comprises a first polarization beam splitter 17, a laser amplification unit and a pumping source 12, wherein multiple laser beams output by the optical modulation module 2 are incident to the laser amplification unit through the first polarization beam splitter 17; the multi-beam laser output by the laser amplification unit is incident to the scanning galvanometer 4; meanwhile, the laser light output from the pump source 12 is incident on a laser amplification unit.

The laser amplification unit comprises a gain medium 11, a lambda/4 wave plate 18 and a second reflecting mirror 19, wherein the multi-beam output by the first polarization beam splitter 17 is incident to the gain medium 11; the multiple beams output by the gain medium 11 are incident to a lambda/4 wave plate 18; the laser output by the lambda/4 wave plate 18 is incident on the second reflecting mirror 19; the laser output by the second reflecting mirror 19 is reflected to the first polarization beam splitter 17 through the lambda/4 wave plate 18 and the gain medium 11 in sequence; the laser light output from the pump source 12 is incident on the gain medium 11.

The laser amplification unit comprises an optical parametric amplifier 20, a lambda/4 wave plate 18 and a second polarization beam splitter 21, wherein the multiple beams output by the first polarization beam splitter 17 are incident to the optical parametric amplifier 20; the multiple beams output by the optical parametric amplifier 20 are incident to the λ/4 wave plate 18, and the laser output by the λ/4 wave plate 18 is incident to the second polarization beam splitter 21; the laser output by the second polarization beam splitter 21 is reflected to the first polarization beam splitter 17 through the lambda/4 wave plate 18 and the optical parametric amplifier 20 in sequence; the laser light output from the pump source 12 is incident on the second polarization beam splitter 21.

The computer 6 is also connected with a motion control card 22, and is connected with the laser 1, the scanning galvanometer 4 and the motion platform 5 through the motion control card 22.

The processing process of the invention comprises the following steps:

the processing path of the multi-beam laser is set under the control of the computer 6 and then transmitted to the motion control card 22; the cooperative motion of the scanning galvanometer 4 and the motion platform 5 is controlled by the motion control card 22, so that the array scanning processing of the parts to be processed, such as micro holes, micro grooves, patterns and the like arranged in an array, is realized.