阅读说明：本技术 一种三波段激光双聚焦头激光加工系统和方法 (Three-band laser double-focusing-head laser processing system and method ) 是由 韩坤 李伟林 王雨峰 董润 徐梓潇 杨敬儒 于 2020-06-05 设计创作，主要内容包括：本发明涉及一种三波段激光双聚焦头激光加工系统和方法。通过三波段激光光束分束处理和双聚焦头设计,能够实现一个装置同时匹配紫外、可见和红外三波段激光传输和加工；使用复合光束进行照明,在进行紫外光加工时使用可见和红外光进行照明,而在使用可见和红外光加工时,使用紫外光进行照明,此时CCD捕获的光仅包括照明光,不包括加工的光,可以更加清晰的对加工位置进行成像和观察；利用多个精密二维调整架和平移支架,便于激光光束传输方向精密调节和成像控制,降低对入射激光光束方向调节要求,满足多种激光光源、多种规格聚焦镜或场镜的加工及成像需求。(The invention relates to a three-band laser double-focusing-head laser processing system and a method. Through the beam splitting treatment of the three-band laser beam and the design of the double focusing heads, the transmission and the processing of the ultraviolet, visible and infrared three-band laser can be matched with one device at the same time; the composite light beam is used for illumination, visible light and infrared light are used for illumination when ultraviolet light processing is carried out, ultraviolet light is used for illumination when visible light and infrared light processing is carried out, at the moment, light captured by the CCD only comprises illumination light, and processing light is not included, so that the processing position can be imaged and observed more clearly; the laser imaging device has the advantages that the multiple precise two-dimensional adjusting frames and the translation support are utilized, so that the precise adjustment and imaging control of the transmission direction of laser beams are facilitated, the adjustment requirement on the direction of incident laser beams is reduced, and the processing and imaging requirements of multiple laser light sources and multiple specifications of focusing lenses or field lenses are met.)

1. A three-band laser double-focusing-head laser processing system comprises a femtosecond laser light source, a first reflector (21), a second reflector (4), a third reflector (4'), a fourth reflector (6), a fifth reflector (12), a first processing part, a second processing part and an illumination imaging part; the method is characterized in that:

the femtosecond laser source is a femtosecond laser capable of emitting ultraviolet band laser, visible band laser and infrared band laser;

the first reflector (21) transmits light in visible and infrared bands and totally reflects light in ultraviolet band; the second reflector (4) and the third reflector (4') totally reflect the light in the ultraviolet band; the fourth reflector (6) and the fifth reflector (12) transmit light in an ultraviolet band and reflect light in visible and infrared bands;

the femtosecond laser light source emits ultraviolet band light which is reflected by a first reflector (21), a second reflector (4) and a third reflector (4'), then transmitted by a fourth reflector (6), a fifth reflector (12) and finally reaches a first processing part, and the first processing part uses the ultraviolet light to process a test piece to be processed;

visible or infrared band light emitted by the femtosecond laser light source is transmitted by the first reflector (21), reflected by the fourth reflector (6) and the fifth reflector (12) and then reaches the second processing part, and the second processing part processes a test piece to be processed by using the visible or infrared band light;

the illumination imaging part is arranged on one side of the fifth reflector (12), visible and infrared parts of the polychromatic light emitted by the illumination imaging part are reflected by the fifth reflector (12) and then reach the first processing part to provide illumination, and the visible and infrared parts reflected by the first processing part are reflected by the fifth reflector (12) and then return to the illumination imaging part to be imaged; the ultraviolet part of the polychromatic light emitted by the illumination imaging part is transmitted by the fifth reflector (12) and then reaches the second processing part for providing illumination, and the ultraviolet part reflected by the second processing part is transmitted by the fifth reflector (12) and then returns to the illumination imaging part for imaging.

2. The tri-band laser dual focusing head laser processing system of claim 1, wherein:

the illumination and imaging part comprises a half-transmitting and half-reflecting mirror (13), an imaging mirror (14), an illumination light source (16) and a CCD camera (15); the light emitted by the illumination light source (16) reaches the fifth reflector (12) after being reflected by the semi-transparent semi-reflecting mirror (13); the light returned by the fifth reflector (12) is transmitted by the semi-transparent semi-reflector (13), focused by the imaging mirror (14) and then reaches the CCD camera (15).

3. The tri-band laser dual focusing head laser processing system of claim 1, wherein:

the first processing part comprises a five-dimensional adjusting frame (11) and an ultraviolet band laser focusing mirror (10), and ultraviolet light is adjusted by the five-dimensional adjusting frame (11) and then focused by the ultraviolet band laser focusing mirror (10) to realize processing of a test piece (9) to be processed.

4. The tri-band laser dual focusing head laser processing system of claim 1, wherein:

the second processing part comprises a scanning galvanometer (7) and a field lens (8), and visible light and infrared light are adjusted through the scanning galvanometer (7) and then processed through the adjustment of the field lens (8).

5. The tri-band laser dual focusing head laser processing system of claim 1, wherein:

the fundamental frequency of a femtosecond laser source is 1030nm, and four-color femtosecond laser processing of 1030nm fundamental frequency, 515nm double frequency, 343nm triple frequency and 258nm quadruple frequency is realized by utilizing a quadruple frequency function.

6. The tri-band laser dual focusing head laser processing system of claim 1, wherein:

first speculum (21), second speculum (4), third speculum (4'), fourth speculum (6) are all installed on two-dimentional alignment frame, and imaging mirror (14) and CCD camera (15) all set up on the translation support.

7. A method of laser machining using the laser machining system of any one of claims 1 to 6, characterized by comprising the steps of:

the material to be processed is a composite material, and proper processing wavelength is selected in advance according to different material components; selecting ultraviolet light for processing, selecting visible light for processing or selecting infrared light for processing; after the processing wavelength is selected, calculating the energy density required by the processing laser according to the processing wavelength and the absorption rate;

placing the composite material to be processed on a station to be processed, starting an illumination light source to emit polychromatic light for illumination, wherein the wavelength of the illumination light covers the range from ultraviolet to infrared bands;

firstly, adjusting a laser to emit ultraviolet light, and then adjusting a supporting platform, a five-dimensional adjusting frame and an ultraviolet focusing lens to focus the ultraviolet light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to carry out ultraviolet laser processing, and observing the processing condition of the composite material on a display screen;

after finishing the ultraviolet processing, adjusting the laser to emit visible light, and then adjusting the supporting platform, the galvanometer system and the field lens to focus the visible light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to perform visible light laser processing, and observing the processing condition of the composite material on a display screen;

after the visible light processing is finished, the laser is adjusted to emit infrared light, and then the supporting platform, the galvanometer system and the field lens are adjusted to focus the infrared light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to carry out infrared laser processing, and observing the processing condition of the composite material on a display screen;

the processing steps of the ultraviolet light, the visible light and the infrared light can be interchanged, and can be repeated for a plurality of times until the whole processing process is completed.

Technical Field

The invention belongs to the field of laser processing, relates to a light beam transmission and processing method, and particularly relates to a system and a method for simultaneously supporting ultraviolet, visible and infrared laser beam transmission and processing.

Background

Laser machining technology is now becoming more widely used in industry as a new manufacturing technology and has occupied an important manufacturing position in the fields of automobiles, electronics, aviation, aerospace, and the like. The laser transmission control is one of the important components of a laser processing system, and mainly comprises direction control, motion control, focusing control and the like.

At present, although the dielectric film of an optical element in laser transmission control can realize the control of reflection, motion, focusing and the like of laser with single wavelength, double wavelength and a certain waveband, the control of laser transmission with wider waveband cannot be covered due to the limitation of the performance of the dielectric film of the optical element, especially the ultraviolet laser generated by laser fundamental frequency light through triple frequency or quadruple frequency, fundamental frequency infrared laser and double frequency visible waveband laser cannot realize the transmission control of the same set of optical element, so that laser processing equipment needs to be provided with different components aiming at the laser with different wavebands, and the compatibility of the laser processing equipment to the laser sources with different wavelengths is poor. Therefore, a method compatible with infrared, visible and ultraviolet three-band laser transmission control is needed.

Patent application CN 201711215878.7 discloses a device for transmitting different light rays using optical paths of different wavelengths, wherein the first band output light path is provided with a first light path transmission module, the second band output light path is provided with a second light path transmission module, the output light beams of the light source are combined into one beam by a beam combining mirror, the output end of the beam combining mirror is sequentially provided with a first light path switching device, a second light path switching device and a third light path switching device, a third light path transmission module is arranged on the output light path of a third wave band, the light beam output by the third light path transmission module is positioned on the other light path, the output end of the third light path transmission module is sequentially provided with a fourth light path switching device, a fifth switching device and a sixth reflecting mirror, the centers of the first light path switching device, the second light path switching device and the third light path switching device are respectively aligned with the centers of the first light path switching device, the second light path switching device and the third light path switching device in the vertical direction, the light paths of the vertical ejection ends of the first light path switching device, the second light path switching device and the third light path switching device are respectively provided with a diaphragm, and the output. Several combined machining modes are realized. The optical switch has a relatively complex structure, and the use of too many mirrors and other devices can cause the reduction of light intensity and the quality of light beams, thereby affecting the laser processing effect.

Disclosure of Invention

Based on the defects of the prior art, the invention provides a three-waveband laser double-focusing-head laser processing system which utilizes a plurality of ultraviolet waveband total-reflection mirrors and visible and infrared double-waveband total-reflection mirrors, and realizes the transmission and processing control of three-waveband laser by the same device by splitting the ultraviolet waveband laser and the visible or infrared waveband laser and utilizing two focusing heads to respectively focus the ultraviolet waveband laser and scan, move and focus the visible or infrared waveband laser.

In view of the above, to solve the above problems, a three-band laser double-focusing-head laser processing system is provided, which includes a femtosecond laser light source, a first reflector, a second reflector, a third reflector, a fourth reflector, a fifth reflector, a first processing portion, a second processing portion, and an illumination imaging portion;

the femtosecond laser source is a femtosecond laser capable of emitting ultraviolet band laser, visible band laser and infrared band laser;

the first reflector transmits light in visible and infrared bands and totally reflects light in an ultraviolet band; the second reflector and the third reflector totally reflect light in an ultraviolet band; the fourth reflector and the fifth reflector transmit light in an ultraviolet band and reflect light in visible and infrared bands;

the femtosecond laser light source emits ultraviolet band light which is reflected by a third reflector of a second reflector of the first reflector and then transmitted by a fifth reflector of a fourth reflector and then reaches the first processing part, and the first processing part processes a test piece to be processed by using ultraviolet light;

the light of visible or infrared wave band emitted by the femtosecond laser light source is transmitted by the first reflector, reflected by the fifth reflector of the fourth reflector and then reaches the second processing part, and the second processing part processes the test piece to be processed by using the light of visible or infrared wave band;

the illumination imaging part is arranged on one side of the fifth reflector, visible and infrared parts of polychromatic light emitted by the illumination imaging part reach the first processing part after being reflected by the fifth reflector to provide illumination, and the visible and infrared parts reflected by the first processing part return to the illumination imaging part for imaging after being reflected by the fifth reflector; the ultraviolet part of the polychromatic light emitted by the illumination imaging part is transmitted by the fifth reflector and then reaches the second processing part to provide illumination, and the ultraviolet part reflected by the second processing part is transmitted by the fifth reflector and then returns to the illumination imaging part to be imaged.

The illumination and imaging part comprises a semi-transparent semi-reflecting mirror, an imaging mirror, an illumination light source and a CCD camera; the light emitted by the illumination light source reaches the fifth reflector after being reflected by the semi-transparent semi-reflector; and light returned by the fifth reflecting mirror is transmitted by the semi-transmitting and semi-reflecting mirror and then focused by the imaging mirror to reach the CCD camera.

The first processing part comprises a five-dimensional adjusting frame and an ultraviolet band laser focusing mirror, and ultraviolet light is adjusted by the five-dimensional adjusting frame and then focused by the ultraviolet band laser focusing mirror to realize processing of a test piece to be processed.

The second processing part comprises a scanning galvanometer and a field lens, and visible light and infrared light are adjusted through the scanning galvanometer and then processed through the adjustment of the field lens.

The fundamental frequency of the femtosecond laser source is 1030nm, and four-color femtosecond laser processing with the fundamental frequency of 1030nm, the second frequency of 515nm, the third frequency of 343nm and the fourth frequency of 258nm is realized by using the quadruple frequency function

The first reflector, the second reflector, the third reflector and the fourth reflector are all installed on the two-dimensional adjusting frame, and the imaging mirror and the CCD camera are all arranged on the translation support.

A method of laser machining using a laser machining system, comprising the steps of:

the material to be processed is a composite material, and proper processing wavelength is selected in advance according to different material components; selecting ultraviolet light for processing, selecting visible light for processing or selecting infrared light for processing; after the processing wavelength is selected, calculating the energy density required by the processing laser according to the processing wavelength and the absorption rate;

placing the composite material to be processed on a station to be processed, starting an illumination light source to emit polychromatic light for illumination, wherein the wavelength of the illumination light covers the range from ultraviolet to infrared bands;

firstly, adjusting a laser to emit ultraviolet light, and then adjusting a supporting platform, a five-dimensional adjusting frame and an ultraviolet focusing lens to focus the ultraviolet light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to carry out ultraviolet laser processing, and observing the processing condition of the composite material on a display screen;

after finishing the ultraviolet processing, adjusting the laser to emit visible light, and then adjusting the supporting platform, the galvanometer system and the field lens to focus the visible light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to perform visible light laser processing, and observing the processing condition of the composite material on a display screen;

after the visible light processing is finished, the laser is adjusted to emit infrared light, and then the supporting platform, the galvanometer system and the field lens are adjusted to focus the infrared light on the composite material to be processed; adjusting the CCD and the imaging mirror to clearly present an image of the position to be processed on the display screen; adjusting laser processing parameters, starting a laser to carry out infrared laser processing, and observing the processing condition of the composite material on a display screen;

the processing steps of the ultraviolet light, the visible light and the infrared light can be interchanged, and can be repeated for a plurality of times until the whole processing process is completed.

The invention has the beneficial effects that:

(1) through the beam splitting treatment of the three-band laser beam and the design of the double focusing heads, the transmission and the processing of the ultraviolet, visible and infrared three-band laser can be matched with one device at the same time;

(2) the invention uses the composite light beam for illumination, uses visible light and infrared light for illumination when processing the ultraviolet light, and uses the ultraviolet light for illumination when processing the visible light and the infrared light, at the moment, the light captured by the CCD only comprises the illumination light, but not the processed light, and the processing position can be imaged and observed more clearly;

(3) the laser imaging device has the advantages that the multiple precise two-dimensional adjusting frames and the translation support are utilized, so that the precise adjustment and imaging control of the transmission direction of laser beams are facilitated, the adjustment requirement on the direction of incident laser beams is reduced, and the processing and imaging requirements of multiple laser light sources and multiple specifications of focusing lenses or field lenses are met.

Drawings

The accompanying drawings, which are included to provide a further understanding of the disclosed subject matter, are incorporated in and constitute a part of this specification. The drawings illustrate the implementations of the disclosed subject matter and, together with the detailed description, serve to explain the principles of implementations of the disclosed subject matter. No attempt is made to show structural details of the disclosed subject matter in more detail than is necessary for a fundamental understanding of the disclosed subject matter and various modes of practicing the same.

FIG. 1 is a schematic structural diagram of a three-band laser dual-focusing head processing system according to the present invention

FIG. 2 is a schematic diagram of a femtosecond laser processing method with 1030nm (fundamental frequency) or 515nm (double frequency) wavelength

FIG. 3 is a schematic diagram of a 343nm (triple frequency) or 258nm (quadruple frequency) wavelength femtosecond laser processing method

The notation in the figure is:

1. the laser processing device comprises an incident laser beam, 2 ultraviolet band laser, 3 and 3 'two-dimensional adjusting frames, 4 and 4' ultraviolet band total reflection mirrors, 5 two-dimensional adjusting frames, 6 visible and infrared two-band total reflection mirrors, 7 scanning galvanometers, 8 field mirrors, 9 samples to be processed, 10 ultraviolet band laser focusing mirrors, 11 five-dimensional adjusting frames, 12 visible and infrared two-band total reflection mirrors, 13 semi-transparent semi-reflection mirrors, 14 translation frames, 15 CCD cameras, 16 illumination light sources, 17 illumination light beams, 18 visible or infrared band laser, 19 imaging mirrors, 20 two-dimensional adjusting frames and 21 ultraviolet band total reflection mirrors.

Detailed Description

The advantages, features and methods of accomplishing the same will become apparent from the drawings and the detailed description that follows.