阅读说明：本技术 一种耐磨导电金刚石定位器 (Wear-resistant conductive diamond positioner ) 是由 胡常青 赵建海 王子龙 于 2021-06-10 设计创作，主要内容包括：本发明公开了一种耐磨导电金刚石定位器,包括：支撑座、固定于所述支撑座上的CVD绝缘金刚石膜、固接于所述CVD绝缘金刚石膜上的掺硼导电金刚石膜及位于所述掺硼导电金刚石膜上往复运动的运动件；所述掺硼导电金刚石膜沿长度方向上刻蚀有多个沟槽,多个所述沟槽用于将掺硼导电金刚石膜分割成多个独立的区域段,所述区域段用于运动件位于掺硼导电金刚石膜上往复运动时与掺硼导电金刚石膜形成接触和脱离接触两个接触状态。根据本发明,具有耐磨损,可以在恶劣的环境中稳定运行。(The invention discloses a wear-resistant conductive diamond positioner, which comprises: the device comprises a supporting seat, a CVD insulating diamond film fixed on the supporting seat, a boron-doped conductive diamond film fixedly connected on the CVD insulating diamond film and a moving part which is positioned on the boron-doped conductive diamond film and reciprocates; the boron-doped conductive diamond film is etched with a plurality of grooves along the length direction, the grooves are used for dividing the boron-doped conductive diamond film into a plurality of independent area sections, and the area sections are used for forming contact and separation contact with the boron-doped conductive diamond film when the moving part is located on the boron-doped conductive diamond film and moves back and forth. According to the invention, the wear-resistant rubber has wear resistance and can stably operate in a severe environment.)

1. A wear resistant conductive diamond positioner, comprising:

the device comprises a supporting seat (4), a CVD insulating diamond film (5) fixed on the supporting seat (4), a boron-doped conductive diamond film (2) fixedly connected on the CVD insulating diamond film (5) and a moving part (1) which is positioned on the boron-doped conductive diamond film (2) and reciprocates;

the boron-doped conductive diamond film (2) is etched with a plurality of grooves (7) along the length direction, the grooves (7) are used for dividing the boron-doped conductive diamond film (2) into a plurality of independent area sections, and the area sections are used for forming two contact states of contact and disconnection with the boron-doped conductive diamond film (2) when the moving piece (1) is located on the boron-doped conductive diamond film (2) in a reciprocating motion.

2. The wear-resistant conductive diamond positioner according to claim 1, wherein the supporting seat (4) is provided with a mounting groove, the CVD insulating diamond film (5) is fixedly connected in the mounting groove, and the length of the mounting groove is a first length value, and the first length value is greater than the length value of the CVD insulating diamond film (5).

3. A wear-resistant conductive diamond positioner according to claim 1, wherein the area section comprises a planar portion on the end face of the CVD insulating diamond film (5) remote from the support base (4) and a vertical portion integrally connected to the planar portion on the side of the CVD insulating diamond film (5) adjacent to the planar portion.

4. A wear-resistant conductive diamond positioner according to claim 3, wherein the moving element (1) reciprocates on the planar portion, and an electrode lead connection point (6) is fixedly connected to the end surface of the vertical portion, and an electrode lead (3) is fixedly connected to the electrode lead connection point.

5. The wear-resistant conductive diamond positioner of claim 1, wherein the CVD insulating diamond film (5) has a resistivity>1013 omega/cm, the resistivity of the boron-doped conductive diamond film (2) is 10^-3---10⁶Omega/cm.

6. A wear resistant electrically conductive diamond positioner according to claim 1, wherein each of the segments are insulated from each other.

7. The abrasion-resistant conductive diamond positioner according to claim 1, wherein the CVD insulating diamond film (5) and the boron-doped conductive diamond film (2) form fixed electrodes, the moving member (1) forms moving electrodes, and the fixed electrodes are shaped in a one-to-one correspondence to the moving tracks of the moving electrodes.

8. The wear-resistant conductive diamond positioner of claim 7, wherein the shape of the fixed electrode comprises a straight line shape, a circular ring shape, a 2D shape, or a 3D shape.

Technical Field

The invention relates to the technical field of vacuum microelectronics, in particular to a wear-resistant conductive diamond positioner.

Background

In many machining applications, precise positioning of the moving components is required at the moment of the machining process. The positioning of the reciprocating element is performed by using the conductivity of the electrode pair formed by the electrode array formed by multiple positioned electrodes and the moving assembly or not. However, in use, due to the reciprocating motion between the moving part electrode and the fixed part electrode, abrasion and even failure are easy to occur, so that the service life of the positioning mode is not ideal; in addition, in some corrosive use environments, the chemical stability of the positioner is also highly required.

Diamond has the highest hardness while the surface of diamond has a very low friction coefficient, so diamond has very excellent wear resistance. If diamond can be used as the material of the friction surface between reciprocating motions, the friction resistance of the friction surface can be greatly improved, thereby prolonging the service life of the positioner. Meanwhile, the diamond can resist the corrosion of any chemical in the normal temperature environment, so the diamond is used as a positioner and can be used in a severe environment, such as an environment containing radiation and chemical radiation.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide a wear-resistant conductive diamond positioner which is wear-resistant and can stably operate in a severe environment. To achieve the above objects and other advantages in accordance with the present invention, there is provided a wear-resistant conductive diamond positioner, comprising:

the device comprises a supporting seat, a CVD insulating diamond film fixed on the supporting seat, a boron-doped conductive diamond film fixedly connected on the CVD insulating diamond film and a moving part which is positioned on the boron-doped conductive diamond film and reciprocates;

the boron-doped conductive diamond film is etched with a plurality of grooves along the length direction, the grooves are used for dividing the boron-doped conductive diamond film into a plurality of independent area sections, and the area sections are used for forming contact and separation contact with the boron-doped conductive diamond film when the moving part is located on the boron-doped conductive diamond film and moves back and forth.

Preferably, the supporting seat is provided with an installation groove, the installation groove is fixedly connected with a CVD insulating diamond film, the length of the installation groove is a first length value, and the first length value is larger than the length value of the CVD insulating diamond film.

Preferably, the area section comprises a planar part and a vertical part integrally connected with the planar part, the planar part is positioned on the end face, away from the supporting seat, of the CVD insulating diamond film, and the vertical part is positioned on the side face, adjacent to the planar part, of the CVD insulating diamond film.

Preferably, the moving part is located on the plane part and reciprocates, an electrode lead connecting point is fixedly connected to the end face of the vertical part, and an electrode lead is fixedly connected to the electrode lead connecting point.

Preferably, the CVD insulating diamond film has a resistivity>1013 omega/cm, the resistivity of the boron-doped conductive diamond film is 10^-3---10⁶Omega/cm.

Preferably, each of the zone segments is insulated from the other zone segments.

Preferably, the CVD insulating diamond film and the boron-doped conductive diamond film form a fixed electrode, the moving part forms a moving electrode, and the shapes of the fixed electrodes are in one-to-one correspondence according to the moving tracks of the moving electrode.

Preferably, the shape of the fixed electrode includes a linear shape, a circular shape, a 2D shape, or a 3D shape.

Compared with the prior art, the invention has the beneficial effects that: the boron-doped conductive diamond film is divided into a plurality of independent sections, so that the moving electrode reciprocates on the boron-doped conductive diamond film, the moving electrode is respectively contacted with and separated from the conductive diamond film, the conductive CVD diamond films in different sections are in the states of electrode connection and separation connection, and the stroke positioning of a moving part can be determined.

Drawings

FIG. 1 is a schematic diagram of a wear resistant conductive diamond positioner according to the present invention;

fig. 2 is a schematic view of a half-section of a wear-resistant conductive diamond positioner according to the present invention.

In the figure: 1. a moving member; 2. a boron-doped conductive diamond film; 3. an electrode lead; 4. a supporting seat; CVD insulating diamond film; 6. an electrode lead connection point; 7. and connecting the electrode lead.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-2, a wear resistant conductive diamond positioner comprises: the device comprises a supporting seat 4, a CVD insulating diamond film 5 fixed on the supporting seat 4, a boron-doped conductive diamond film 2 fixedly connected on the CVD insulating diamond film 5 and a moving part 1 which is positioned on the boron-doped conductive diamond film 2 and reciprocates, wherein a layer of boron-doped conductive CVD diamond film is arranged on the surface of the insulating CVD diamond film 5, and the boron-doped conductive CVD diamond film 2 is divided into independent sections by utilizing a laser cutting technology or a pattern conversion technology; the boron-doped conductive diamond film 2 is etched with a plurality of grooves 7 along the length direction, the grooves 7 are used for dividing the boron-doped conductive diamond film 2 into a plurality of independent area sections, the area sections are used for forming two contact states of contact and disconnection with the boron-doped conductive diamond film 2 when the moving part 1 is located on the boron-doped conductive diamond film 2 and reciprocates, the moving part 1 is a moving electrode and is respectively contacted with and disconnected from the boron-doped conductive diamond film 2 by utilizing the reciprocating motion of the moving electrode, so that the boron-doped conductive diamond films 2 in different sections are in the states of connection and disconnection of the electrode, the stroke positioning of the moving part can be determined, and the positioner is wear-resistant and can stably run in a severe environment.

Furthermore, a mounting groove is formed in the support seat 4, a CVD insulating diamond film 5 is fixedly connected in the mounting groove, the length of the mounting groove is a first length value, and the first length value is larger than the length value of the CVD insulating diamond film 5.

Further, the area section comprises a plane part and a vertical part integrally connected with the plane part, the plane part is positioned on the end face, away from the supporting seat 4, of the CVD insulating diamond film 5, and the vertical part is positioned on the side face, adjacent to the plane part, of the CVD insulating diamond film 5.

Furthermore, the moving part 1 is located on the plane part and reciprocates, an electrode lead connecting point 6 is fixedly connected to the end face of the vertical part, and an electrode lead 3 is fixedly connected to the electrode lead connecting point.

Further, the resistivity of the CVD insulating diamond film 5 is more than 1013 omega/cm, and the resistivity of the boron-doped conductive diamond film 2 is between 10 & lt-3 & gt and 106 omega/cm.

Further, the boron-doped conductive diamond film 2 is divided into sections electrically insulated from each other by laser cutting or other etching methods, and each section is insulated from each other.

Further, the CVD insulating diamond film 5 and the boron-doped conductive diamond film 2 form a fixed electrode, the moving part 1 forms a moving electrode, and the shapes of the fixed electrodes are in one-to-one correspondence according to the moving tracks of the moving electrode.

Further, the shape of the fixed electrode includes a linear shape, a circular shape, a 2D shape, or a 3D shape.

The number of devices and the scale of the processes described herein are intended to simplify the description of the invention, and applications, modifications and variations of the invention will be apparent to those skilled in the art.

While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.