阅读说明：本技术 激光加工方法及激光加工装置 (Laser processing method and laser processing apparatus ) 是由 游盛天 于 2019-10-14 设计创作，主要内容包括：本发明提供了一种激光加工方法与激光加工设备,所述激光加工方法包括设定加工路径；控制光源发出入射光束,并通过分光模块将入射光束分成至少两束激光；再控制分光模块旋转,以使得至少两束激光沿既定轴线旋转并共同形成加工光束,并控制加工光束沿所述加工路径移动,完成待加工元件的加工。本申请通过分光模块将入射光束分成至少两束激光,再通过分光模块的旋转,使得至少两束激光一并旋转并共同形成加工光束。所述加工光束的空间分布更均匀,提高激光开槽、刻蚀、切割等加工质量。(the invention provides a laser processing method and laser processing equipment, wherein the laser processing method comprises the steps of setting a processing path; controlling a light source to emit an incident beam, and dividing the incident beam into at least two beams of laser through a light splitting module; and controlling the light splitting module to rotate so that at least two beams of laser rotate along a set axis and form a processing beam together, and controlling the processing beam to move along the processing path to finish the processing of the element to be processed. This application divides into two at least bundles of laser with incident beam through beam splitting module, and the rotation of rethread beam splitting module for two at least bundles of laser rotate and form the processing light beam jointly. The spatial distribution of the processing light beam is more uniform, and the processing quality of laser grooving, etching, cutting and the like is improved.)

1. a laser processing method characterized by:

setting a processing path;

controlling a light source to emit an incident beam, and dividing the incident beam into at least two beams of laser through a light splitting module;

The control driving module drives the light splitting module to rotate so that at least two beams of laser rotate along a set axis and form a processing beam together;

And controlling the machining beam to move along the machining path to finish machining the element to be machined.

2. The laser processing method according to claim 1, characterized in that: the laser processing method further comprises the step of arranging a shielding plate on the surface of the element to be processed, wherein the shielding plate is provided with an opening which penetrates through the shielding plate up and down and corresponds to the processing path, and the diameter of the processing light beam is larger than the width of the opening.

3. The laser processing method according to claim 2, characterized in that: during the "controlling the machining beam to move along the machining path", the center of the machining beam moves along the center line of the opening.

4. the laser processing method according to claim 1, characterized in that: at least two laser beams are arranged in a linear way and are arranged into two groups which are mutually symmetrical.

5. The laser processing method according to claim 1, characterized in that: at least two laser beams are parallel to each other and have consistent intensity.

6. the laser processing method according to claim 1, characterized in that: at least two laser beams are symmetrically arranged relative to the axis.

7. The laser processing method according to claim 1, characterized in that: controlling the machining beam to repeatedly move along the machining path two or more times.

8. The laser processing method according to claim 1, characterized in that: and adjusting the emergent direction of the processing light beam to be vertical to the surface of the element to be processed.

9. The laser processing method according to claim 1, characterized in that: the laser processing method further comprises the step of setting the intensity of the incident beam, the rotating speed of the light splitting module and the moving speed of the processing beam.

10. A laser processing apparatus, characterized in that: the laser processing device comprises a light source, a light splitting module and a driving module, wherein the light splitting module is used for splitting initial laser emitted by the light source into at least two beams of laser, the driving module is used for driving the light splitting module to rotate, and the at least two beams of laser form processing beams together with the rotation of the light splitting module.

Technical Field

the invention relates to the technical field of semiconductor production and equipment, in particular to a laser processing method and a laser processing device.

Background

with the continuous development of the semiconductor industry towards the direction of multi-functionalization, precision and integration, the traditional mechanical grooving and cutting mode is gradually eliminated by the market. Compared with the traditional machining process, the laser machining method has higher machining speed and higher machining precision, and can effectively solve the problems of edge breakage, hidden cracking and the like of the semiconductor substrate.

In practical applications, since the single laser beam has concentrated energy and a large thermal damage area, which is likely to cause chip performance failure, in a semiconductor practical processing process, the single laser beam is divided into two or more sub-beams 101 by a beam splitting assembly, and then a predetermined substrate 201 is processed (as shown in fig. 1 and 2). The arrangement mode of the sub-beams is preset, and the sub-beams are kept fixed in the subsequent processing process, but because the light intensity of different areas of each sub-beam is inconsistent, a certain distance often exists between adjacent sub-beams, so that the overall energy distribution of the processing light beams is uneven, the etched groove body 202 is not free from height difference, and the flatness is poor.

In view of the above, it is desirable to provide a new laser processing method and a new laser processing apparatus.

disclosure of Invention

the invention aims to provide a laser processing method and a laser processing device, which can improve the processing quality and uniformity of products.

In order to achieve the above object, the present invention provides a laser processing method, which mainly comprises:

Setting a processing path;

Controlling a light source to emit an incident beam, and dividing the incident beam into at least two beams of laser through a light splitting module;

The control driving module drives the light splitting module to rotate so that at least two beams of laser rotate along a set axis and form a processing beam together;

and controlling the machining beam to move along the machining path to finish machining the element to be machined.

As a further improvement of the invention, the laser processing method further comprises the step of arranging a masking plate on the surface of the element to be processed, wherein the masking plate is provided with an opening which vertically penetrates through and corresponds to the processing path, and the diameter of the processing beam is larger than the width of the opening.

As a further improvement of the present invention, during the "controlling the machining beam to move along the machining path", the center of the machining beam moves along the center line of the opening.

As a further improvement of the invention, at least two laser beams are arranged in a linear way and are arranged into two groups which are mutually symmetrical.

As a further improvement of the invention, at least two laser beams are parallel to each other and have the same intensity.

As a further development of the invention, at least two lasers are arranged symmetrically with respect to the axis.

As a further development of the invention, the machining beam is controlled to move repeatedly two or more times along the machining path.

As a further improvement of the invention, the emergent direction of the processing light beam is adjusted to be vertical to the surface of the element to be processed.

As a further improvement of the invention, the laser processing method further comprises setting the intensity of the incident beam, the rotating speed of the light splitting module and the moving speed of the processing beam.

The invention also provides a laser processing device, which comprises a light source, a light splitting module and a driving module, wherein the light splitting module is used for splitting the initial laser emitted by the light source into at least two beams of laser, the driving module is used for driving the light splitting module to rotate, and the at least two beams of laser form processing beams together with the rotation of the light splitting module.

The invention has the beneficial effects that: by adopting the laser processing method and the laser processing device, the incident beam emitted by the light source is divided into at least two beams of laser by the light splitting module, and then the at least two beams of laser are rotated together by the rotation of the light splitting module to form the processing beam with more uniform spatial distribution, so that the wall surface after laser etching is smoother, and the processing quality is improved.

Drawings

FIG. 1 is a schematic diagram of a prior art laser machining process;

FIG. 2 is a schematic cross-sectional view of the substrate of FIG. 1 after processing has been completed;

FIG. 3 is a schematic main flow chart of the laser processing method of the present invention;

FIG. 4 is a schematic diagram of a laser processing method according to a preferred embodiment of the present invention;

FIG. 5 is a schematic block diagram of a laser processing apparatus according to the present invention;

FIG. 6 is a schematic view of a laser processing method according to another preferred embodiment of the present invention.

Detailed Description

The present invention will be described in detail below with reference to embodiments shown in the drawings. The present invention is not limited to the embodiment, and structural, methodological, or functional changes made by one of ordinary skill in the art according to the embodiment are included in the scope of the present invention.

Referring to fig. 3 to 5, a laser processing apparatus 100 provided by the present invention includes a light source 11, a light splitting module 12, a driving module 13, and a control module 14. The light source 11 is used for emitting an incident light beam with a predetermined power and a predetermined size; the light splitting module 12 is configured to split an incident light beam emitted by the light source into at least two laser beams; the driving module 13 is configured to drive the light splitting module 12 to rotate, so that at least two laser beams jointly form a processing beam S. Obviously, the spot formed by the machining beam S in a plane perpendicular thereto is circular.

The light source 11 may be selected according to the actual processing requirements of the element to be processed, which may be a semiconductor substrate 200, and the semiconductor substrate 200 may be a crystalline silicon wafer or made of III-V semiconductor material. The light splitting module 12 is integrated in a corresponding laser head, and includes but is not limited to optical devices such as prisms, gratings, lenses, etc., and the light splitting module 12 can split an incident light beam into a plurality of laser beams arranged linearly or rectangularly. The driving module 13 may drive the light splitting module 12 to rotate along a predetermined axis according to a command issued by the control module 14, and of course, the rotation speed of the light splitting module 12 may be set and adjusted by the control module 14.

the emitting directions of the at least two beams of laser are consistent, and the at least two beams of laser are symmetrically arranged relative to the axis. Preferably, the intensities of at least two laser beams emitted from the light splitting module 12 are consistent, so that the intensity of the processing beam S is more uniform. Here, the at least two laser beams are linearly arranged and are arranged in two groups symmetrical to each other with respect to the axis. The machining beam S shown in fig. 4 is formed by rotating two laser beams emitted in parallel at a distance from each other along the same axis, wherein the two laser beams are symmetrically arranged with respect to the axis.

the laser processing method provided by the invention comprises the following steps:

setting a processing path and processing parameters;

Controlling a light source 11 to emit a predetermined incident beam toward a light splitting module 12, wherein the light splitting module 12 splits the incident beam into at least two beams of laser and emits the two beams of laser outwards;

The control driving module 13 drives the light splitting module 12 to rotate, so that at least two laser beams rotate along a given axis and form a processing light beam S together;

And controlling the processing beam S to move along the processing path to finish the processing of the element to be processed.

The processing parameters include the intensity of the incident beam emitted from the light source 11, the rotation speed of the light splitting module 12, the moving speed of the processing beam S, and the like. The control module 14 may also be used for storing the above-mentioned machining parameters to facilitate repeated machining of a batch of components to be machined. Of course, the control module 14 may also control the processing beam S to repeatedly move two or more times along the processing path according to the processing requirements of the element 200 to be processed.

The laser processing method further comprises the step of adjusting the emitting direction of the processing beam S to be vertical to the surface of the element to be processed. Here, the semiconductor substrate 200 may be fixed in a direction perpendicular to the emitting direction of the processing beam S, and the semiconductor substrate 200 may be processed by the processing beam S, and the chip units 22 on the semiconductor substrate 200 may be separated by the grooves 21 etched by the processing beam S.

Referring to fig. 6, in another embodiment of the present invention, when the width of the slot 21 is required to be smaller than the diameter of the processing beam S, the laser processing method further includes providing a masking plate 300 for laying on the surface of the semiconductor substrate 200, wherein the masking plate 300 is provided with an opening 301 penetrating up and down and corresponding to the processing path, and the diameter of the processing beam S is larger than the width of the opening 301;

And controlling the processing beam S to move along the central line of the opening 301 to finish processing.

the processing requirements of the slots 21 with different widths can be met through the masking plate 300; moreover, during the movement of the processing beam S along the center line of the opening 301, the edge portions S1 on both sides of the processing beam S are irradiated on the masking plate 300, and the energy density of the edge portions S1 is low and does not participate in the processing of the corresponding semiconductor substrate 200; in contrast, the intensity of the middle portion S2 of the processing beam S for processing the semiconductor substrate 200 is more uniform, so that the inner wall of the etched slot 21 is more flat, and the processing quality is improved.

In summary, according to the laser processing method and the laser processing apparatus 100 of the present invention, the incident beam emitted from the light source 11 is divided into at least two laser beams by the light splitting module 12, and then the light splitting module 12 is driven to rotate so that the at least two laser beams rotate together to form the processing beam S with more uniform spatial distribution, thereby improving the laser processing quality.

it should be understood that although the present description refers to embodiments, not every embodiment contains only a single technical solution, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the technical solutions in the embodiments can also be combined appropriately to form other embodiments understood by those skilled in the art.

the above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.