阅读说明：本技术 一种双光束耦合水导加工头装置及加工方法 (Double-beam coupling water guide machining head device and machining method ) 是由 王吉 张文武 张广义 于 2021-07-28 设计创作，主要内容包括：本发明公开了一种双光束耦合水导加工头装置及加工方法,属于水导激光加工技术领域,能够解决现有耦合激光功率低、输出光斑能量不均匀及不能可视化加工的问题。加工头装置包括光束调制模块、视觉模块及控制模块；加工方法包括合束穿孔：控制模块控制两台离散的激光器发射激光A及激光B,通过合束室将激光A及激光B调制成合束激光,通过耦合室将合束激光聚焦耦合入射到水柱中,对工件进行合束穿孔；耦合切割：控制模块接收用户输入的平移量,并发送控制指令给运动模组,控制第一平移台及第二平移台根据平移量完成平移,经合束室及耦合室后将耦合后的光束聚焦耦合进水柱中。本发明用于对厚板工件进行穿孔加工。(The invention discloses a double-beam coupling water-guide processing head device and a processing method, belongs to the technical field of water-guide laser processing, and can solve the problems that the conventional coupling laser is low in power, uneven in output spot energy and incapable of visual processing. The processing head device comprises a light beam modulation module, a vision module and a control module; the processing method comprises the steps of bundling and perforating: the control module controls two discrete lasers to emit laser A and laser B, the laser A and the laser B are modulated into beam-combined laser through the beam-combining chamber, the beam-combined laser is focused and coupled through the coupling chamber and is incident into a water column, and beam-combined perforation is carried out on a workpiece; coupling and cutting: the control module receives the translation amount input by a user, sends a control instruction to the motion module, controls the first translation table and the second translation table to finish translation according to the translation amount, and focuses and couples the coupled light beams into the water column after passing through the beam combining chamber and the coupling chamber. The invention is used for punching thick plate workpieces.)

1. A double-beam coupling water-guide processing head device is characterized by comprising a beam modulation module, a vision module and a control module;

the beam modulation module comprises a beam combination chamber and a coupling chamber, the coupling chamber is fixedly arranged below the beam combination chamber, a workpiece is positioned below the coupling chamber, the beam combination chamber is used for modulating laser A and laser B into a beam combination laser beam with energy superposed or symmetrical in space, the coupling chamber is used for focusing the beam combination laser beam emitted from the beam combination chamber into a coupling beam, and the coupling beam is used for processing the workpiece;

the vision module is positioned in the beam combining chamber and is used for monitoring the surface of the workpiece in real time on line;

the control module is electrically connected with the light beam modulation module, the vision module and the laser and is used for controlling the light beam modulation module, the laser and the vision module to work;

preferably, the vision module comprises a CCD module and a light source, and the light source emits light having a wavelength different from the wavelengths of the laser light a and the laser light B.

2. A dual beam coupling water directing processing head apparatus as claimed in claim 1 wherein said beam combining chamber comprises a housing, a first light inlet, a second light inlet, a mirror assembly, a beam combining mirror and a motion module;

the first light inlet and the second light inlet are communicated and arranged on any one side wall or any two opposite side walls of the left side, the right side, the front side and the rear side of the shell, and the reflector group, the beam combining mirror and the motion module are all arranged in the shell;

the first light inlet and the second light inlet are respectively used for allowing the laser A and the laser B to enter the shell, the reflector group is used for carrying out total reflection on the laser A and the laser B entering the shell, and the beam combining mirror is used for enabling the laser A and the laser B to become a beam combined laser;

the movement module is used for controlling the reflector set to modulate the energy distribution of the combined laser, and the movement module is electrically connected with the control module and controls the movement module to work through the control module.

3. A dual-beam coupling water-guide processing head apparatus as claimed in claim 1 wherein a focusing mirror is disposed in the coupling chamber for focusing the combined laser beams emitted from the beam combining chamber into coupled beams, and central axes of the focusing mirror, the vision module and the coupling chamber are coincident.

4. A dual-beam coupling water-guide processing head device as claimed in claim 2, wherein the first light inlet and the second light inlet are disposed on any one of left, right, front and rear side walls of the beam combining chamber;

the reflector group comprises a first reflector and a second reflector, the beam combining mirror comprises an S1 surface and an S2 surface, the center of the first reflector is coaxial with the first light inlet, the second reflector and the beam combining mirror are coaxial with the second light inlet, the beam combining mirror is positioned between the second light inlet and the second reflector, the S1 surface of the beam combining mirror is used for reflecting the laser A reflected by the first reflector to the second reflector, and the S2 surface of the beam combining mirror is used for transmitting the laser B to the second reflector;

the movement module comprises a first translation platform and a second translation platform, the first translation platform and the second translation platform move horizontally, the first reflector and the second reflector are respectively arranged on the first translation platform and the second translation platform, and the vision module is positioned above the second translation platform.

5. A dual beam coupling water directing processing head apparatus as claimed in claim 4 wherein said first and second translation stages move towards each other.

6. A dual beam coupling water guide processing head apparatus as claimed in claim 2 wherein the first light inlet and the second light inlet are respectively provided on the left and right side walls or the front and rear side walls of the beam combining chamber;

the reflector group comprises a third reflector, a fourth reflector and a fifth reflector, the third reflector is coaxial with the center of the first light inlet, the fourth reflector is positioned below the third reflector, the fifth reflector is coaxial with the center of the second light inlet, the beam combiner is positioned below the fifth reflector, the beam combiner comprises an S2 surface for reflecting laser A and an S1 surface for transmitting laser B, and the center of the S2 surface of the beam combiner is coaxial with the focusing mirror;

the movement module comprises a first translation table and a second translation table, the first translation table and the second translation table move horizontally, the fourth reflector and the fifth reflector are respectively arranged on the first translation table and the second translation table, and the vision module is positioned above the second translation table.

7. A dual beam coupling water directing processing head apparatus as claimed in claim 6 wherein said first and second translation stages move in the same direction.

8. A dual beam coupling water channeling machining head apparatus as claimed in claim 2 wherein optical shutters are provided in both the first and second light inlets;

preferably, the optical shutter is electrically connected with the control module, and the control module controls the first light inlet or the second light inlet to open or close.

9. A dual beam coupling water directing processing head as claimed in claim 3 wherein a water cell is provided beneath the coupling chamber for forming said water column, said coupled beam being focused onto a surface of said water column adjacent to said coupling chamber, said water column being for transmitting said coupled beam onto a workpiece.

10. A method of processing the dual beam coupling water guide of any one of claims 1 to 9, comprising S1: combining and perforating; s2: coupling and cutting;

the bundle combining perforation comprises:

s11: the control module controls the water unit to form a water column, controls the vision module to work, and controls the motion module in the beam combining chamber to enable the positions of the first translation platform and the second translation platform to be zero;

s12: the control module controls two discrete lasers to emit laser A and laser B, the laser A and the laser B are modulated into combined laser through the beam combining chamber, the combined laser is focused and coupled to be incident into the water column through the coupling chamber, and beam combining and punching are carried out on a workpiece;

s13: the vision module recognizes the perforation progress until a formed hole is penetrated, sends a feedback signal to the control module, and the control module receives the feedback signal and then sends an instruction to control the shutter to close so as to prevent the laser A and the laser B from entering the beam combining chamber;

the coupling cutting includes:

s21: the control module receives translation amount input by a user, sends a control instruction to the motion module, and controls the first translation platform and the second translation platform to complete translation according to the translation amount;

s22: the control module sends an instruction to control the optical shutter to be opened, and the laser A and the laser B couple the obtained coupled light beams into the water column after passing through the beam combining chamber and the coupling chamber;

s23: and moving the position of the workpiece to cut the workpiece.

Technical Field

The invention relates to a double-beam coupling water-guide processing head device and a processing method, and belongs to the technical field of water-guide laser processing.

Background

The water-guided laser processing is to form an optical waveguide by using a water column, so that laser is totally reflected in the water column and can be used for laser cutting and punching. However, for fast cutting with low taper, the existing water-guided laser machining technology still does not have this capability. The reasons are mainly as follows: firstly, the coupling laser power is not high, a thick plate is difficult to directly penetrate when the initial perforation is cut, the workpiece can be penetrated only by long-time or multiple laser removal, the improvement of the cutting speed is greatly influenced, and the laser power is limited from the source because the mode of coupling a single beam with a water inlet column is adopted in the prior art; and secondly, the energy uniformity problem is solved, the energy of the single laser beam is distributed in a Gaussian curve in the transverse section of the water column optical waveguide, the energy density at the center of the water column optical waveguide is far higher than that at the periphery, the risk that water molecules at the center are broken down is increased, the machining taper is caused, and the deep machining of the thick plate is not facilitated.

Disclosure of Invention

The invention provides a double-beam coupling water guide processing head device and a processing method, which can solve the problems of low power, uneven energy of output light spots and incapability of visual processing of the conventional coupled laser.

The invention provides a double-beam coupling water-guide machining head device which comprises a beam modulation module, a vision module and a control module, wherein the beam modulation module is used for modulating a beam;

the beam modulation module comprises a beam combination chamber and a coupling chamber, the coupling chamber is fixedly arranged below the beam combination chamber, a workpiece is positioned below the coupling chamber, the beam combination chamber is used for modulating laser A and laser B into a beam combination laser beam with energy superposed or symmetrical in space, the coupling chamber is used for focusing the beam combination laser beam emitted from the beam combination chamber into a coupling beam, and the coupling beam is used for processing the workpiece;

the vision module is positioned in the beam combining chamber and is used for monitoring the surface of the workpiece in real time on line;

the control module is electrically connected with the light beam modulation module, the vision module and the laser and is used for controlling the light beam modulation module, the laser and the vision module to work;

preferably, the vision module comprises a CCD module and a light source, and the light source emits light with a wavelength different from the wavelengths of the laser a and the laser B;

optionally, the beam combining chamber includes a housing, a first light inlet, a second light inlet, a reflector set, a beam combining mirror, and a motion module;

the first light inlet and the second light inlet are communicated and arranged on any one side wall or any two opposite side walls of the left side, the right side, the front side and the rear side of the shell, and the reflector group, the beam combining mirror and the motion module are all arranged in the shell;

the first light inlet and the second light inlet are respectively used for allowing the laser A and the laser B to enter the shell, the reflector group is used for carrying out total reflection on the laser A and the laser B entering the shell, and the beam combining mirror is used for enabling the laser A and the laser B to become a beam combined laser;

the movement module is used for controlling the reflector set to modulate the energy distribution of the combined laser, and the movement module is electrically connected with the control module and controls the movement module to work through the control module.

Optionally, a focusing mirror is disposed in the coupling chamber, the focusing mirror is configured to focus the combined laser emitted from the beam combining chamber into a coupled beam, and central axes of the focusing mirror, the vision module, and the coupling chamber are overlapped.

Optionally, the first light inlet and the second light inlet are disposed on any one of the left, right, front, and rear sidewalls of the beam combining chamber;

the reflector group comprises a first reflector and a second reflector, the beam combining mirror comprises an S1 surface and an S2 surface, the center of the first reflector is coaxial with the first light inlet, the second reflector and the beam combining mirror are coaxial with the second light inlet, the beam combining mirror is positioned between the second light inlet and the second reflector, the S1 surface of the beam combining mirror is used for reflecting the laser A reflected by the first reflector to the second reflector, and the S2 surface of the beam combining mirror is used for transmitting the laser B to the second reflector;

the movement module comprises a first translation platform and a second translation platform, the first translation platform and the second translation platform move horizontally, the first reflector and the second reflector are respectively arranged on the first translation platform and the second translation platform, and the vision module is positioned above the second translation platform.

Optionally, the first translation stage and the second translation stage move towards each other.

Optionally, the first light inlet and the second light inlet are respectively disposed on the left and right side walls or the front and rear side walls of the beam combining chamber;

the reflector group comprises a third reflector, a fourth reflector and a fifth reflector, the third reflector is coaxial with the center of the first light inlet, the fourth reflector is positioned below the third reflector, the fifth reflector is coaxial with the center of the second light inlet, the beam combiner is positioned below the fifth reflector, the beam combiner comprises an S2 surface for reflecting laser A and an S1 surface for transmitting laser B, and the center of the S2 surface of the beam combiner is coaxial with the focusing mirror;

the movement module comprises a first translation table and a second translation table, the first translation table and the second translation table move horizontally, the fourth reflector and the fifth reflector are respectively arranged on the first translation table and the second translation table, and the vision module is positioned above the second translation table.

Optionally, the first translation stage and the second translation stage move in the same direction.

Optionally, an optical shutter is disposed in each of the first light inlet and the second light inlet;

preferably, the optical shutter is electrically connected with the control module, and the control module controls the first light inlet or the second light inlet to open or close.

Optionally, the coupling room below is provided with the water unit, the water unit is used for forming the water column, the focused coupling of coupling beam is in the water column is close to the surface of coupling room, the water column is used for with coupling beam transmission is used to the work piece on.

The invention also provides a double-beam coupling water guide processing method, which comprises the following steps of S1: combining and perforating; s2: coupling and cutting;

the bundle combining perforation comprises:

s11: the control module controls the water unit to form a water column, controls the vision module to work, and controls the motion module in the beam combining chamber to enable the positions of the first translation platform and the second translation platform to be zero;

s12: the control module controls two discrete lasers to emit laser A and laser B, the laser A and the laser B are modulated into combined laser through the beam combining chamber, the combined laser is focused and coupled to be incident into the water column through the coupling chamber, and beam combining and punching are carried out on a workpiece;

s13: the vision module recognizes the perforation progress until a formed hole is penetrated, sends a feedback signal to the control module, and the control module receives the feedback signal and then sends an instruction to control the shutter to close so as to prevent the laser A and the laser B from entering the beam combining chamber;

the coupling cutting includes:

s21: the control module receives translation amount input by a user, sends a control instruction to the motion module, and controls the first translation platform and the second translation platform to complete translation according to the translation amount;

s22: the control module sends an instruction to control the optical shutter to be opened, and the laser A and the laser B couple the obtained coupled light beams into the water column after passing through the beam combining chamber and the coupling chamber;

s23: and moving the position of the workpiece to cut the workpiece.

The invention can produce the beneficial effects that:

according to the double-beam coupling water guide processing head device, the laser energy in the coupling water column is improved by 1 time in the water guide processing technology through the beam combining chamber and the coupling chamber, so that the coupling laser power is effectively improved, and the processing capacity of punching a thick plate workpiece is favorably improved;

according to the double-beam coupling water guide processing head device, the phenomenon of poor energy distribution uniformity of a single-beam water column is improved by combining the motion module with the double-light-path coupling technology, the energy distribution uniformity in the water column is improved, the taper of a cutting section is reduced, the cutting quality is improved, and visual processing is realized through the visual module;

the double-beam coupling water guide processing method is combined with the vision module, and the error is reduced, and the detection accuracy and the intelligent control level are improved through the coaxial detection perforation process.

Drawings

Fig. 1 is a schematic structural diagram of a dual-beam coupling water-guide processing head apparatus according to embodiment 1 of the present invention;

fig. 2 is a schematic view of an optical path in a dual-beam coupling water-guide processing head apparatus according to embodiment 1 of the present invention;

fig. 3 is a schematic structural diagram of a dual-beam coupling water-guide processing head apparatus according to embodiment 2 of the present invention;

fig. 4 is a schematic view of an optical path in a dual-beam coupling water-guide processing head apparatus according to embodiment 2 of the present invention;

FIG. 5 is a graph comparing the energy distribution of the focused coupled spots in the dual beam system and the single beam system according to example 1 and example 2 of the present invention;

fig. 6 is a flowchart of a dual-beam coupling water-conducting processing method according to embodiment 3 of the present invention.

List of parts and reference numerals:

1. a housing; 2. a first light inlet; 3. laser A; 4. an optical shutter; 5. a second light inlet; 6. laser B; 7.1, a first reflector; 7.2, a second reflector; 8.1, a first translation stage; 8.2, a second translation stage; 9. a CCD module; 10. a light source; 11. a beam combining chamber; 12. combining laser; 12.1, first beam combination laser; 12.2, second beam combination laser; 13. coupling the light beam; 13.1, a first coupled light beam; 13.2, a second coupled beam; 14. a focusing mirror; 15. a water unit; 16.1, a first beam combiner; 16.2, a second beam combiner; 17. a coupling chamber; 18. a water column; 19.1, a third reflector; 19.2, a fourth reflector; 19.3 and a fifth reflector.

Detailed Description

The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.

Example 1

The embodiment 1 of the invention provides a double-beam coupling water-guide processing head device which comprises a beam modulation module, a vision module and a control module.

As shown in fig. 1, the beam modulation module includes a beam combining chamber 11 and a coupling chamber 17, the coupling chamber 17 is screwed below the beam combining chamber 11, the workpiece is placed below the coupling chamber 17, and the beam combining chamber 11 is configured to modulate the laser a3 and the laser B6 emitted by the two discrete lasers into a beam of combined laser 12 with spatially coincident or symmetric energy.

The beam combination chamber 11 comprises a shell 1, a first light inlet 2, a second light inlet 5, a reflector group, a beam combination mirror and a motion module; the beam combining lens comprises a first beam combining lens 16.1 and a second beam combining lens 16.2; the first light inlet 2 and the second light inlet 5 are communicated with each other and arranged on any one of the left, right, front and back side walls or any two opposite side walls of the shell 1, and the reflector group, the beam combiner and the motion module are all arranged in the shell 1.

The first light inlet 2 and the second light inlet 5 are respectively used for allowing laser A3 and laser B6 to enter the housing 1, the mirror group is used for totally reflecting the laser A3 and the laser B6 entering the housing 1, and the beam combiner is used for combining the laser A3 and the laser B6 into a beam of combined laser 12.

Optical shutters 4 are arranged in the first light inlet 2 and the second light inlet 5, the optical shutters 4 are electrically connected with the control module, and the control module controls the opening and closing of the first light inlet 2 or the second light inlet 5.

The movement module is used for controlling the energy distribution of the combined beam laser 12 modulated by the reflector, and is electrically connected with the control module and used for controlling the movement module to work through the control module.

The coupling chamber 17 is used for focusing the combined beam laser 12 emitted from the combining chamber 11 into a coupled beam 13, and the coupled beam 13 is used for processing a workpiece.

The coupling chamber 17 is internally provided with a focusing mirror 14, the focusing mirror 14 is used for focusing the combined laser 12 emitted from the combining chamber 11 into a coupled beam 13, and the central axes of the focusing mirror 14, the vision module and the coupling chamber 17 are overlapped.

A water unit 15 is arranged below the coupling chamber 17, the water unit 15 is used for forming a water column 18, the coupling light beam 13 is focused and coupled on the surface, close to the coupling chamber 17, of the water column 18, namely the upper surface of the water column 18, and the water column 18 is used for transmitting the coupling light beam 13 to act on a workpiece.

The vision module is positioned in the beam combination chamber 11, and the vision module is superposed with the central axes of the focusing lens 14 and the coupling chamber 17, and is used for coaxially monitoring the surface of the workpiece in real time on line.

The vision module comprises a CCD module 9 and a light source 10, and the emission wavelength of the light source 10 is different from the wavelengths of the laser A3 and the laser B6.

The control module is electrically connected with the beam modulation module, the vision module, the laser and the optical shutter 4 and is used for controlling the beam modulation module, the laser, the vision module and the optical shutter 4 to work.

As shown in fig. 1, the laser beam a3 and the laser beam B6 are incident in the same direction into the beam combining chamber 11. The first light inlet 2 and the second light inlet 5 are disposed on any one of the left, right, front and rear side walls of the beam combining chamber 11, in this embodiment, the first light inlet 2 and the second light inlet 5 are disposed on the left side wall of the beam combining chamber 11, and the first light inlet 2 is located right above the second light inlet 5.

The reflector group comprises a first reflector 7.1 and a second reflector 7.2, the first beam combiner 16.1 comprises an S1 surface and an S2 surface, the center of the first reflector 7.1 is coaxial with the first light inlet 2, the second reflector 7.2, the first beam combiner 16.1 and the second light inlet 5 are coaxial, the first beam combiner 16.1 is located between the second light inlet 5 and the second reflector 7.2, the S1 surface of the first beam combiner 16.1 is used for reflecting the laser A3 reflected by the first reflector 7.1 to the second reflector 7.2, and the S2 surface of the first beam combiner 16.1 is used for transmitting 6 the laser B to the second reflector 7.2.

The motion module comprises a first translation platform 8.1 and a second translation platform 8.2, the first translation platform 8.1 and the second translation platform 8.2 move horizontally, a first reflector 7.1 and a second reflector 7.2 are respectively arranged on the first translation platform 8.1 and the second translation platform 8.2, and the vision module is positioned above the second translation platform 8.2.

As shown in fig. 2(a), two discrete lasers respectively emit laser A3 and laser B6, the laser A3 enters the center of the first light inlet 2 to the center of the first reflector 7.1, is reflected by the first reflector 7.1 and transmitted vertically downward, enters the S1 surface of the first beam combiner 16.1, is totally reflected on the surface, enters the center of the second reflector 7.2, is reflected by the second reflector 7.2 and transmitted vertically downward into the coupling chamber 17, and enters the center of the focusing mirror 14; the laser B6 enters the S2 surface of the first beam combiner 16.1 from the center of the second light inlet 5, and exits from the S1 surface of the first beam combiner 16.1 to the second reflector 7.2, and then is reflected by the second reflector 7.2, vertically downward, and completely overlaps with the laser A3, forming the first combined laser 12.1. The first combined laser beam 12.1 enters the coupling chamber 17, and enters the center of the focusing mirror 14 to be focused to form a first coupled beam 13.1, and the positions of the first translation stage 8.1 and the second translation stage 8.2 are marked as zero points.

As shown in fig. 5(a), the first coupled beam 13.1 increases the central energy density by a factor of 1 compared to a single beam system, which improves the via processing capability.

The control module realizes the horizontal displacement of the first translation stage 8.1 and the second translation stage 8.2 by controlling the motion module, and the movement modes are opposite movement. Comprises two opposite moving modes, namely that the first translation stage 8.1 moves rightwards, the second translation stage 8.2 moves leftwards, the first translation stage 8.1 moves leftwards, and the second translation stage 8.2 moves rightwards.

As shown in fig. 1 and 2(b), the first reflector 7.1 and the second reflector 7.2 are respectively disposed on the first translation stage 8.1 and the second translation stage 8.2, and the control module controls the motion module to implement the opposite horizontal displacement of the first translation stage 8.1 and the second translation stage 8.2. In this embodiment, the first translation stage 8.1 drives the first reflecting mirror 7.1 to translate rightward, the second translation stage 8.2 drives the second reflecting mirror 7.2 to translate leftward, and the first combined laser 12.1 emitted from the beam combining chamber 11 after translation becomes a spatially symmetrical second combined laser 12.2. The second combined laser 12.2 is focused and coupled on the upper surface of the water column 18 by the second coupled beam 13.2 emitted after passing through the coupling chamber 17. The translation of the first translation stage 8.1 is 2 times the translation of the second translation stage 8.2. The vision module is located above the second mirror 7.2, coaxial with the focusing mirror 14. The second reflecting mirror 7.2 and the focusing mirror 14 are coated with antireflection films for the light source 10.

As shown in fig. 5(b), the energy at the center of the focused coupling spot of the second coupled beam 13.2 tends to be flat-top distributed, and the spot width is 1.64 times that of the single beam, so that the system has better energy uniformity distribution than that of a single beam system, and is beneficial to reducing the processing taper and performing high-quality cutting.

Example 2

As shown in fig. 3, embodiment 2 of the present application provides a two-beam coupling water-jet machining head device, which is different from embodiment 1 in that: the laser beam a3 and the laser beam B6 are emitted into the beam combining chamber 11 in opposite directions.

As shown in fig. 3, the first light inlet 2 and the second light inlet 5 are respectively disposed on the left and right side walls or the front and rear side walls of the beam combining chamber 11; in this embodiment, the first light inlet 2 is disposed on the left side wall of the beam combining chamber 11, and the second light inlet 5 is disposed on the right side wall of the beam combining chamber 11.

The reflector group comprises a third reflector 19.1, a fourth reflector 19.2 and a fifth reflector 19.3, the third reflector 19.1 is coaxial with the center of the first light inlet 2, the fourth reflector 19.2 is positioned below the third reflector 19.1, the fifth reflector 19.3 is coaxial with the center of the second light inlet 5, the second beam combiner 16.2 is positioned below the fifth reflector 19.3, the second beam combiner 16.2 comprises an S2 surface for reflecting the laser A3 and an S1 surface for transmitting the laser B6, and the center of the S2 surface of the second beam combiner 16.2 is coaxial with the focusing mirror 14;

the motion module comprises a first translation table 8.1 and a second translation table 8.2, the first translation table 8.1 and the second translation table 8.2 move horizontally, a fourth reflecting mirror 19.2 and a fifth reflecting mirror 19.3 are respectively arranged on the first translation table 8.1 and the second translation table 8.2, and the vision module is positioned above the second translation table 8.2.

As shown in fig. 4(a), two discrete lasers respectively emit laser A3 and laser B6, the laser A3 enters the center of the first light inlet 2 to the center of the third reflector 19.1, is reflected by the third reflector 19.1, is vertically transmitted downward, enters the fourth reflector 19.2, is reflected by the fourth reflector 19.2, is horizontally transmitted to the center of the S2 plane of the second beam combiner 16.2, is reflected by the S2 plane, is vertically transmitted downward to the coupling chamber 17, and enters the center of the focusing mirror 14; the laser B6 enters the center of the fifth mirror 19.3 from the center of the second light inlet 5, is reflected by the fifth mirror 19.3 and is transmitted vertically downward to the S1 surface of the second beam combiner 16.2, and is emitted from the S2 surface of the second beam combiner 16.2 after being transmitted, the exit point is the center of the S2 surface, and is transmitted vertically downward into the coupling chamber 17, and is completely overlapped with the laser A3 to form a first combined laser 12.1, the first combined laser 12.1 enters the coupling chamber 17, enters the center of the focusing mirror 14, and is focused to form a first coupled laser beam 13.1, and at this time, the positions of the first translation stage 8.1 and the second translation stage 8.2 are marked as zero points.

As shown in fig. 5(a), the first coupled beam 13.1 increases the central energy density by 1 time compared with the single beam system, thereby improving the punching capability.

The control module realizes the horizontal displacement of the first translation platform 8.1 and the second translation platform 8.2 by controlling the motion module, and the movement modes are the same-direction motion. The method comprises two same-direction moving modes: the first and second translation stages 8.1, 8.2 both move to the right and the first and second translation stages 8.1, 8.2 both move to the left.

As shown in fig. 3 and fig. 4(b), the fourth mirror 19.2 and the fifth mirror 19.3 are respectively disposed on the first translation stage 8.1 and the second translation stage 8.2, and the control module controls the motion module to realize the same-direction horizontal displacement of the first translation stage 8.1 and the second translation stage 8.2. In this embodiment, the first translation stage 8.1 drives the fourth mirror 19.2 to translate rightward, the second translation stage 8.2 drives the fifth mirror 19.3 to translate rightward, the first combined laser 12.1 emitted from the beam combining chamber 11 after translation becomes a second combined laser 12.2 which is symmetrical in space, and the second coupled laser 13.2 emitted from the second combined laser 12.2 after passing through the coupling chamber 17 is focused and coupled on the upper surface of the water column 18. The first translation stage 8.1 and the second translation stage 8.2 are translated by equal amounts. The vision module is located above the fifth mirror 19.3 and is placed coaxially with the focusing mirror 14. The fifth reflector 19.3, the second beam combiner 16.2 and the focusing mirror 14 are coated with an antireflection film for the light source 10.

As shown in fig. 5(b), the energy at the center of the focused coupling spot of the second coupled beam 13.2 tends to be flat-top distributed, and the spot width is 1.64 times that of the single beam, so that the system has better energy uniformity distribution than that of a single beam system, and is beneficial to reducing the processing taper and performing high-quality cutting.

Example 3

As shown in fig. 6, embodiment 3 of the present application provides a two-beam coupling water guide processing method, including S1: combining and perforating; s2: and (6) coupling and cutting.

The bundle combining perforation comprises:

s11: the control module controls the water unit 15 to form a water column 18, controls the visual module to work, and controls the movement module in the beam combining chamber 11 to return the positions of the first translation platform 8.1 and the second translation platform 8.2 to zero points;

s12: the control module controls two discrete lasers to emit laser A3 and laser B6, the laser A3 and the laser B6 are modulated into beam-combined laser through the beam-combining chamber 11, the beam-combined laser is focused and coupled through the coupling chamber 17 and then enters the water column 18, and beam-combining and punching are carried out on a workpiece;

s13: the vision module identifies the perforation progress until the formed hole is penetrated, sends a feedback signal to the control module, and the control module sends an instruction to control the shutter 4 to close after receiving the feedback signal, so as to prevent the laser A3 and the laser B6 from entering the beam combining chamber 11;

the coupling cutting comprises the following steps:

s21: the control module receives the translation amount input by the user and sends a control instruction to the motion module to control the first translation stage 8.1 and the second translation stage 8.2 to complete translation according to the translation amount,

s22: the control module sends an instruction to control the optical gate 4 to be opened, and the laser A and the laser B pass through the beam combination chamber 11 and the coupling chamber 17 and then couple the obtained coupled light beams into the water column 18;

s23: and moving the position of the workpiece to perform high-quality cutting on the workpiece with near zero taper.

Although the present application has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application.