阅读说明：本技术 一种多光束射流耦合水导激光加工装置及加工系统 (Multi-beam jet coupling water-guide laser processing device and system ) 是由 张广义 张文武 吴耀文 于 2021-07-28 设计创作，主要内容包括：本发明公开了一种多光束射流耦合水导激光加工装置及加工系统,属于激光加工技术领域,本发明的加工装置通过将多路激光束导入水柱,提高了激光束在水柱的耦合功率；通过光束耦合单元调控多路激光束的空间位置及角度,从而提高输出激光束的光斑均匀性,最终实现对工件的高功率、零锥度及大深度加工；本发明的加工系统具有系统可靠性高、加工深度大及维护成本低的优点。(The invention discloses a multi-beam jet coupling water-guided laser processing device and a processing system, belonging to the technical field of laser processing, wherein the processing device of the invention improves the coupling power of laser beams in a water column by guiding multiple laser beams into the water column; the spatial position and the angle of the multi-path laser beams are regulated and controlled by the beam coupling unit, so that the spot uniformity of the output laser beams is improved, and the high-power, zero-taper and large-depth processing of the workpiece is finally realized; the processing system has the advantages of high system reliability, large processing depth and low maintenance cost.)

1. A multi-beam jet coupling water-guided laser processing device is characterized by comprising a beam coupling unit and a liquid chamber;

the light beam coupling unit and the liquid chamber are sequentially arranged along the transmission direction of the laser beam;

the beam coupling unit comprises at least two beam expanding and focusing modules, and each beam expanding and focusing module is used for focusing one path of laser beam input correspondingly;

the spatial position and the angle of the beam expanding and focusing module are adjustable, and the beam expanding and focusing module is used for adjusting the position and the posture angle of a focus of the laser beam after being focused by the beam expanding and focusing module;

the liquid chamber is used for transmitting the laser beam focused by the beam coupling unit along the water column emitted by the liquid chamber, and the laser beam in the water column is used for cutting the workpiece.

2. The laser processing device according to claim 1, wherein each of the beam expanding and focusing modules comprises a beam expanding sub-module and a focusing sub-module which are sequentially arranged along the transmission direction of the laser beam;

each beam expanding submodule is used for adjusting the beam diameter and the divergence angle of the laser beam;

each focusing submodule is used for focusing the laser beam processed by the beam expanding submodule.

3. The laser processing apparatus of claim 1, wherein each of said beam expanding and focusing modules is axially movable along its axis as a solid of revolution or stationary.

4. The laser processing apparatus of claim 1, wherein the number of beam expanding and focusing modules is 2-3.

5. The laser processing apparatus of claim 1, wherein the liquid chamber comprises a cavity, a window lens, and a liquid constriction port;

the window lens and the liquid shrinkage port are respectively arranged on the top wall and the bottom wall of the cavity;

the window lens is used for transmitting the laser beam focused by the light beam coupling unit, and the liquid shrinkage port is used for emitting the laser beam and the water column;

preferably, the side wall of the cavity is uniformly provided with a plurality of liquid inlets, and a liquid filtering structure is annularly arranged in the cavity close to the liquid inlets;

preferably, the liquid filtering structure is a porous resin element;

preferably, the liquid introduced into the liquid inlet is water.

6. The laser processing apparatus according to claim 5, further comprising a gas chamber for gas shielding the water column emitted from the liquid chamber;

the bottom wall of the gas cavity is provided with a gas-liquid flow reducing port, and the gas-liquid flow reducing port and the liquid flow reducing port are coaxially arranged;

preferably, a plurality of air inlets are uniformly formed in the side wall of the air cavity, and an air filtering structure is annularly arranged at the position, close to the air inlet, of the air cavity.

7. The laser processing apparatus according to claim 6, wherein an outlet cross-sectional area of the liquid throttle is larger than an outlet cross-sectional area of the gas-liquid throttle.

8. The laser processing device according to claim 7, wherein a focal point of the laser beam focused by the beam expanding and focusing module is located in a water column between the liquid contraction port and the gas-liquid contraction port.

9. The laser processing device according to claim 8, wherein one of the laser beams of the input laser beams of the beam expanding and focusing modules is coaxially arranged with the liquid throat, and the rest one or more laser beams are obliquely arranged around the coaxially arranged laser beams;

or the input laser beams of the beam expanding and focusing modules are all arranged around the axes of the liquid contraction opening and the gas-liquid contraction opening.

10. A multi-beam jet coupled water-guided laser processing system, comprising an electronic control module, laser generators, optical elements, a gas delivery module, a fluid delivery module, and a laser processing device according to any one of claims 1 to 9;

the electric control module is used for controlling the opening and closing of the laser generator, the fluid transmission module and the gas transmission module;

the laser generator is used for generating a laser beam, and the generated laser beam is transmitted into the laser processing device through the optical element;

the fluid transmission module is used for providing high-pressure fluid, and the generated high-pressure fluid is input into a liquid chamber of the laser processing device;

the gas transmission module is used for providing high-pressure gas, and the generated high-pressure gas is input into a gas chamber of the laser processing device;

the laser processing device is used for cutting a workpiece by utilizing the laser generated by the laser generator.

Technical Field

The invention relates to a multi-beam jet coupling water-guide laser processing device and a processing system, and belongs to the technical field of laser processing.

Background

The efficiency and quality of conventional laser machining rapidly decline with increasing depth due to the machining taper effect of focused laser machining, making this approach depth-limiting; the constant accumulation of heat severely thermally affects the material. Therefore, achieving low thermal influence and large depth of intervention processing is a significant problem in the laser processing community.

The known short pulse dry laser processing is mainly advantageous in terms of instantaneous removal efficiency and thermal influence control of shallow materials, but still has a significant problem: hole machining has a taper and lack of depth capability, and short pulse advantage is lost in large depth (>5 mm) machining.

In order to solve the heat influence of materials in the laser processing process and expand the processing depth, SYNOVA company develops a micro-jet type water-assisted laser processing technology. The micro-jet water-assisted laser processing technology represented by SYNOVA company has excellent processing performance on penetrating cutting of various materials, and has a series of advantages of obviously reduced processing taper, small processing heat influence, clean surface and the like compared with dry laser processing, but the technology is difficult to maintain the high efficiency of large-depth processing, and the depth capability meets the limit about 10 mm; in addition, in order to ensure reliability, the laser transmission intensity is not too high, the improvement of coupling power is limited, and the processing speed is influenced.

The patent of 'a laser processing head and application thereof, a laser processing system and method' developed by Ningbo material technology and engineering research institute of Chinese academy of sciences solves the contradiction between high energy density coupling of laser and system reliability; the patent of 'a rotary water-guide laser processing system and method' can carry out large-depth laser processing; the patent of 'a high-power coupling laser processing device and a laser processing system' uses a method of total reflection coating and rotating water-guided laser to improve the laser coupling power and further expand the depth capability of laser processing; the patent of 'a rotary laser processing device and application thereof, a laser processing system and a method' utilizes a rotary laser processing mode to improve the processing depth.

At present, in the water-jet guided laser processing process, the processing efficiency and the depth capability of the water-jet guided laser are directly influenced by the high-power coupling and the uniformity of water column energy distribution.

Disclosure of Invention

The invention provides a multi-beam jet coupling water-guided laser processing device and a processing system, which can solve the problem that the processing efficiency and the depth capability of a workpiece are influenced by the high-power coupling and the uniformity of water column energy distribution.

In one aspect, the invention provides a multi-beam jet coupling water-guided laser processing device, which comprises a beam coupling unit and a liquid chamber;

the light beam coupling unit and the liquid chamber are sequentially arranged along the transmission direction of the laser beam;

the beam coupling unit comprises at least two beam expanding and focusing modules, and each beam expanding and focusing module is used for focusing one path of laser beam input correspondingly;

the spatial position and the angle of the beam expanding and focusing module are adjustable, and the beam expanding and focusing module is used for adjusting the position and the posture angle of a focus of the laser beam after being focused by the beam expanding and focusing module;

the liquid chamber is used for transmitting the laser beam focused by the beam coupling unit along the water column emitted by the liquid chamber, and the laser beam in the water column is used for cutting the workpiece.

Optionally, each beam expanding and focusing module comprises a beam expanding submodule and a focusing submodule which are sequentially arranged along the transmission direction of the laser beam;

each beam expanding submodule is used for adjusting the beam diameter and the divergence angle of the laser beam;

each focusing submodule is used for focusing the laser beam processed by the beam expanding submodule.

Optionally, each beam expanding and focusing module moves axially along the axis thereof as a revolving body or is stationary.

Optionally, the number of the beam expanding and focusing modules is 2-3.

Optionally, the liquid chamber includes a cavity, a window lens and a liquid contraction port;

the window lens and the liquid shrinkage port are respectively arranged on the top wall and the bottom wall of the cavity;

the window lens is used for transmitting the laser beam focused by the light beam coupling unit, and the liquid shrinkage port is used for emitting the laser beam and the water column;

preferably, the side wall of the cavity is uniformly provided with a plurality of liquid inlets, and a liquid filtering structure is annularly arranged in the cavity close to the liquid inlets;

preferably, the liquid filtering structure is a porous resin element;

preferably, the liquid introduced into the liquid inlet is water.

Optionally, the laser processing apparatus further includes a gas chamber for protecting the water column emitted from the liquid chamber from gas;

the bottom wall of the gas cavity is provided with a gas-liquid flow reducing port, and the gas-liquid flow reducing port and the liquid flow reducing port are coaxially arranged;

preferably, a plurality of air inlets are uniformly formed in the side wall of the air cavity, and an air filtering structure is annularly arranged at the position, close to the air inlet, of the air cavity.

Optionally, the outlet cross-sectional area of the liquid flow-reducing port is larger than the outlet cross-sectional area of the gas-liquid flow-reducing port.

Optionally, the focus of the laser beam after the focusing of the beam expanding and focusing module is located in the liquid contraction port and the water column between the gas and liquid contraction ports.

Optionally, one path of laser beam among the input laser beams of the beam expanding and focusing modules is coaxially arranged with the liquid flow reducing port, and the rest one path or multiple paths of laser beams are obliquely arranged around the coaxially arranged laser beam;

or the input laser beams of the beam expanding and focusing modules are all arranged around the axes of the liquid contraction opening and the gas-liquid contraction opening.

In another aspect, the present invention provides a multi-beam-jet-coupled water-guided laser processing system, which includes an electronic control module, a laser generator, an optical element, a gas transmission module, a fluid transmission module, and any one of the above laser processing devices;

the electric control module is used for controlling the opening and closing of the laser generator, the fluid transmission module and the gas transmission module;

the laser generator is used for generating a laser beam, and the generated laser beam is transmitted into the laser processing device through the optical element;

the fluid transmission module is used for providing high-pressure fluid, and the generated high-pressure fluid is input into a liquid chamber of the laser processing device;

the gas transmission module is used for providing high-pressure gas, and the generated high-pressure gas is input into a gas chamber of the laser processing device;

the laser processing device is used for cutting a workpiece by utilizing the laser generated by the laser generator.

The invention can produce the beneficial effects that:

according to the multi-beam jet coupling water-guided laser processing device, the multi-path laser beams are guided into the water column, so that the coupling power of the laser beams in the water column is improved; the spatial position and the angle of the multi-path laser beams are regulated and controlled by the beam coupling unit, so that the spot uniformity of the output laser beams is improved, and the high-power, zero-taper and large-depth processing of the workpiece is finally realized; the multi-beam jet coupling water-guide laser processing system has the advantages of high system reliability, large processing depth and low maintenance cost.

The invention adjusts the laser energy distribution state in the water column by a multi-beam coupling method, has the advantages of low technical cost and small technical difficulty, effectively improves the processing efficiency of the laser processing device, and has important significance for processing large-thickness (more than 10mm) materials in the aerospace and civil fields.

The invention has large-depth intervention type processing capability and breaks through the depth limit of the traditional laser processing.

Drawings

FIG. 1 is a schematic diagram of an overall structure of a multi-beam jet coupled water-guided laser processing apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of the transmission of a water-guided laser beam of a multi-beam jet coupled water-guided laser processing apparatus according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of water column energy distribution and coupling of a multi-beam jet coupled water-guided laser processing apparatus according to an embodiment of the present invention;

fig. 4 is a system block diagram of a multi-beam jet coupled water-guided laser processing system according to an embodiment of the present invention.

List of parts and reference numerals:

1. a light beam A; 2. a light beam B; 3. a beam coupling unit; 4. a beam expanding and focusing module; 41. a beam expanding submodule; 42. a focus sub-module; 5. a liquid chamber; 51. a cavity; 52. a window lens; 53. a liquid contraction port; 54. a liquid inlet; 55. a liquid filtering structure; 6. a gas chamber; 61. a gas-liquid contraction port; 62. an air inlet; 63. a gas filtering structure; 7. a workpiece; 8. an electronic control module; 9. a laser generator; 10. an optical element; 11. a gas delivery module; 12. a fluid transfer module; 13. a laser processing device; 14. an energy storage device.

Detailed Description

The present invention will be described in detail with reference to examples, but the present invention is not limited to these examples.

On one hand, the invention provides a multi-beam jet coupling water-guided laser processing device, as shown in fig. 1 and 2, which comprises a beam coupling unit 3, a liquid chamber 5 and a gas chamber 6, wherein the beam coupling unit 3, the liquid chamber 5 and the gas chamber 6 are sequentially arranged along the transmission direction of laser beams.

The beam coupling unit 3 comprises at least two beam expanding and focusing modules 4; preferably, the number of the beam expanding and focusing modules 4 is 2-3, and each beam expanding and focusing module 4 is used for focusing one path of laser beams input correspondingly. The spatial position and angle of the beam expanding and focusing module 4 are adjustable, and the beam expanding and focusing module is used for adjusting the position and posture angle of a focus of a laser beam focused by the beam expanding and focusing module 4.

Specifically, the number, position and attitude angle of the laser beams are adjusted according to the energy distribution requirement in the water column.

The beam coupling unit 3 further comprises a structural frame for fixing the beam expanding and focusing module 4.

Each beam expanding and focusing module 4 moves axially along the axis thereof as a revolving body or is stationary.

Specifically, each beam expanding and focusing module 4 comprises a beam expanding submodule 41 and a focusing submodule 42 which are sequentially arranged along the transmission direction of the laser beam; each beam expanding submodule 41 is used for adjusting the beam diameter and the divergence angle of the laser beam; each focusing submodule 42 is used for focusing the laser beam processed by the beam expanding submodule 41.

The liquid chamber 5 is used for transmitting the laser beam focused by the beam coupling unit 3 along a water column emitted by the liquid chamber 5, and the workpiece 7 is cut by the laser beam in the water column.

Specifically, the liquid chamber 5 includes a cavity 51, a window lens 52 and a liquid flow-contracting port 53, and the window lens 52 and the liquid flow-contracting port 53 are respectively arranged on the top wall and the bottom wall of the cavity 51; the window lens 52 is used for transmitting the laser beam focused by the beam coupling unit 3, and the liquid contraction port 53 is used for emitting the laser beam and the water column.

The side wall of the cavity 51 is uniformly provided with a plurality of liquid inlets 54, and a liquid filtering structure 55 is annularly arranged in the cavity 51 close to the liquid inlets 54. In the present embodiment, the liquid filter structure 55 is a porous resin member. The liquid introduced through the liquid inlet 54 is water.

The gas chamber 6 is used for gas protection of the water column exiting from the liquid chamber 5.

Specifically, the gas-liquid flow contracting port 61 is formed in the bottom wall of the gas chamber 6, and the gas-liquid flow contracting port 61 and the liquid flow contracting port 53 are coaxially arranged. A plurality of air inlets 62 are uniformly arranged on the side wall of the gas chamber 6, and a gas filtering structure is annularly arranged at the position of the gas chamber 6 close to the air inlets 62. And the outlet sectional area of the liquid constricted flow port 53 is larger than the outlet sectional area of the gas-liquid constricted flow port 61.

The fluid is ejected through the liquid flow contracting port 53, and flows out stably in a laminar state from the gas-liquid flow contracting port 61 together with the gas by being coated and compressed by the gas in the gas chamber 6.

The focus of the laser beam focused by the beam expanding and focusing module 4 is positioned in the water column between the liquid contraction port 53 and the gas-liquid contraction port 61.

In one embodiment of the present application, one of the laser beams of the input laser beams of the beam expanding and focusing modules 4 is coaxially disposed with the liquid throat 53, and the rest one or more laser beams are obliquely disposed around the coaxially disposed laser beam.

As shown in fig. 1 and fig. 2, in this embodiment, there are two beam expanding and focusing modules 4, the laser beams passing through the two beam expanding and focusing modules 4 are a light beam a1 and a light beam B2, respectively, the light beam a1 is coaxially disposed with the liquid converging port 53, and the light beam B2 is obliquely disposed on the left side of the light beam a 1.

In another embodiment of the present application, the input laser beams of the plurality of beam expanding and focusing modules 4 are circumferentially and uniformly arranged around the axis of the liquid flow contracting port 53 and the gas-liquid flow contracting port 61.

The laser beam is totally reflected on the surface of the water column between the liquid flow reducing port 53 and the gas-liquid flow reducing port 61, and finally the laser beam and the water column reach the surface of the workpiece 7 together to finish the processing of the workpiece 7.

As shown in fig. 3, the laser energy distribution of the coaxial laser beam coaxially arranged with the liquid flow reducing port 53 in the water column is gaussian-like, and the laser energy distribution of the laser beam arranged around the axis of the liquid flow reducing port 53 and the gas-liquid flow reducing port 61 in the water column is annular.

In order to ensure the total reflection effect of the laser beam on the water-vapor interface of the water column, the emergent laser beam meets the following conditions:

wherein, θ 1 is the incident angle of the laser beam and the water-vapor laminar interface of the water column, θ 2 is the refraction angle, n1 is the refractive index of the laser beam and the water, and n2 is the refractive index of the laser beam and the gas.

When theta 2 is 90 degrees, namely the critical angle of total reflection of the laser beam at the water-vapor laminar flow interface of the water column, the calculated theta 1 is the minimum incident angle of the total reflection of the laser beam and the water-vapor laminar flow interface, and the incident angle of the laser beam and the water-vapor laminar flow interface is not less than theta 1, so that the laser can be totally reflected at the water-vapor laminar flow interface.

On the other hand, as shown in fig. 4, the present invention discloses a multi-beam jet coupling water-guided laser processing system, which includes an electronic control module 8, a laser generator 9, an optical element 10, a gas transmission module 11, a fluid transmission module and the laser processing apparatus 13.

The electric control module 8 is used for controlling the opening and closing of the laser generator 9, the fluid transmission module and the gas transmission module 11.

The laser generator 9 is used to generate a laser beam which is conducted through an optical element 10 into a laser machining device 13.

The laser machining device 13 further comprises an energy storage device 14 for storing energy for the water column.

The fluid delivery module is used to provide high pressure fluid, which is input into the liquid chamber 5 of the laser machining device 13.

The gas delivery module 11 is used to provide high-pressure gas, which is fed into the gas chamber 6 of the laser processing device 13.

The laser processing device 13 is used for cutting the workpiece 7 by using the laser generated by the laser generator 9.

As shown in fig. 1-4, when the multi-beam jet-coupled water-guided laser processing system works, the electronic control module 8 turns on a switch of a fluid transmission module, in this embodiment, the fluid is water, and the fluid fills the liquid chamber 5 through the liquid inlet 54 and enters the gas chamber 6 in a laminar flow manner; the electric control module 8 is used for opening the switch of the gas transmission module 11, gas enters the gas chamber 6 through the gas inlet 62, and the gas wraps and compresses the fluid in the laminar flow form to form a water column and flows out of the gas-liquid flow shrinkage port 61 together.

And opening a switch of the multi-path laser generator 9, focusing the generated laser beams at the lower edge of the liquid contraction opening 53 through the beam expanding and focusing module 4, the window lens 52 and the liquid chamber 5 in sequence, and transmitting the laser beams to the surface of the workpiece 7 along the water column to process the workpiece 7 through the total reflection effect of the water-gas interface of the water column.

In one embodiment of the present application, one of the multiple paths of beam expanding and focusing modules 4 is coaxially disposed with the central axis of the window lens 52 and the central axis of the liquid chamber 5, and the rest of the multiple paths of beam expanding and focusing modules 4 are disposed around the one path of beam expanding and focusing module 4 that is coaxially disposed, and a focus of a laser beam focused by the multiple paths of beam expanding and focusing modules 4 is located inside a water column between a lower edge of the liquid flow reducing port 53 and the gas-liquid flow reducing port 61.

In another embodiment of the present application, the central axes of the multi-path beam expanding and focusing module 4, the window lens 52 and the liquid chamber 5 are all arranged in different axes, that is, the multi-path beam expanding and focusing module 4 is arranged around the central axis, and the focus of the laser beam focused by the multi-path beam expanding and focusing module 4 is located inside the water column between the lower edge of the liquid converging port 53 and the gas-liquid converging port 61.

In the process of processing the workpiece 7 by the laser beam, the incident angle of the water-air laminar flow interface of the laser beam and the water column is not less than theta 1.

With the control and operation of the processing system, the efficient, temperature-free, heat-free and deep removal processing of the workpiece 7 is finally realized.

Although the present application has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application.